CN110017791A - End surface of optical fiber connector parameter measuring apparatus and measurement method - Google Patents
End surface of optical fiber connector parameter measuring apparatus and measurement method Download PDFInfo
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- CN110017791A CN110017791A CN201910266676.8A CN201910266676A CN110017791A CN 110017791 A CN110017791 A CN 110017791A CN 201910266676 A CN201910266676 A CN 201910266676A CN 110017791 A CN110017791 A CN 110017791A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 82
- 238000000691 measurement method Methods 0.000 title abstract description 9
- 238000005259 measurement Methods 0.000 claims abstract description 20
- 230000003287 optical effect Effects 0.000 claims abstract description 19
- 238000003384 imaging method Methods 0.000 claims abstract description 18
- 238000007405 data analysis Methods 0.000 claims abstract description 16
- 238000013519 translation Methods 0.000 claims abstract description 11
- 239000000835 fiber Substances 0.000 claims abstract description 10
- 239000006096 absorbing agent Substances 0.000 claims abstract description 6
- 230000005540 biological transmission Effects 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 22
- 230000007246 mechanism Effects 0.000 claims description 12
- 230000009897 systematic effect Effects 0.000 claims description 5
- 238000012544 monitoring process Methods 0.000 claims description 2
- 239000000523 sample Substances 0.000 description 5
- 238000004891 communication Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000005305 interferometry Methods 0.000 description 2
- 238000004621 scanning probe microscopy Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 101100117236 Drosophila melanogaster speck gene Proteins 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
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- 238000003199 nucleic acid amplification method Methods 0.000 description 1
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- 230000010363 phase shift Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
To solve the technical problem that existing fiber connector ends measurement method of parameters is easily affected by environment, measuring accuracy is not high, measurement efficiency is low, dynamic range is small, the invention proposes a kind of end surface of optical fiber connector parameter measuring apparatus and measurement methods.Wherein, measuring device includes the light source set gradually along same optical path, convergent mirror, target plate, collimating mirror, No.1 beam splitter and absorber;Defining face of the No.1 beam splitter towards collimating mirror is the first mirror surface, in the outgoing beam on reflected light path after the first mirror-reflection of collimating mirror, is provided with No.1 microcobjective;The outgoing beam of No.1 microcobjective is disposed with No. two beam splitters, beam-expanding system and Shack-Hartmann wavefront sensor on the transmitted light path after the first specular transmission;No. two microcobjectives and imaging detector are disposed on the reflected light path of No. two beam splitters;Imaging detector is arranged on one-dimensional electronic control translation stage, and one-dimensional electronic control translation stage is connected by driver with control and Data Analysis Computer.
Description
Technical field
The invention belongs to optical field, it is related to a kind of end surface of optical fiber connector parameter measuring apparatus and measurement method.Optical fiber
Connector ends parameter includes end face three-dimensional appearance, radius of curvature, grinding bias and the optical fiber height value of optical fiber connector.
Background technique
The effect of optical fiber connector is exactly to connect optical fiber, enables optical signal with minimum loss in fibre system
Transmission, it is the important devices of optical fiber telecommunications system.To reach in optical fiber connector intervention optical communication line to systematic influence
Minimum, it is necessary that its optical property, and the factor for measuring optical fiber connector optical property superiority and inferiority is not outside cause, and
It is the quality condition of its own end face.Therefore, to the end face three-dimensional appearance of optical fiber connector, radius of curvature, grinding bias and light
The quantitative detection of the parameters such as fine height value just becomes extremely important.By the high-acruracy survey to end surface of optical fiber connector parameter,
And make final evaluation, so that it may the quality level of reliable evaluation connector, it is final to guarantee the reliable and stable of fiber optic communication.
Currently, end surface of optical fiber connector measurement method of parameters mainly has: mechanical probes method, optics probe method, scanning electron
Microscopic method, scanning probe microscopy method and interference micrometering method.
Mechanical probes method is contact type measurement, easy damaged tested surface.Optics probe method is non-contact measurement, is needed high-precision
Focusing system is spent, measurement accuracy is not high.For scanning electron microscope using electron probe, it requires tested surface that must have well
Electric conductivity, point by point scanning is needed, if tested surface is larger, it is necessary to for quite a long time, very time-consuming and operate
Come also relative complex.Scanning probe microscopy measurement accuracy is high, but complicated for operation, requires height to operating environment, and show rank
Section still has many technical problems not solve, and measurement range has significant limitation.Micrometering method is interfered to utilize optical interference
With the principle of micro- amplification, by using the automatic phases measuring technique such as difference interference or phase shift interference, thus accurate measurement light
Fiber connector transverse parameters;Wherein, heterodyne interferometry precision is high, but system complex, and influence factor is more in practical operation, application
It is relatively fewer;Phase-shifting interferometry is influenced vulnerable to extraneous bad border flow perturbation and vibration, can not dynamically be measured.Meanwhile interference is micro-
Mensuration measurement dynamic range is small, high to the position accuracy demand of optical fiber connector, and to the coherence requirement of light source height.
Summary of the invention
In order to solve existing fiber connector ends measurement method of parameters easily affected by environment, measuring accuracy in background technique
Technical problem not high, measurement efficiency is low, dynamic range is small, the invention proposes a kind of end surface of optical fiber connector parameter measurement dresses
It sets and measurement method,
The technical scheme is that
End surface of optical fiber connector parameter measuring apparatus is characterized in that the light including setting gradually along same optical path
Source, convergent mirror, target plate, collimating mirror, No.1 beam splitter and absorber;
Defining face of the No.1 beam splitter towards collimating mirror is the first mirror surface, anti-through the first mirror surface in the outgoing beam of collimating mirror
On reflected light path after penetrating, it is provided with No.1 microcobjective;The outgoing beam of No.1 microcobjective is after the first specular transmission
No. two beam splitters, beam-expanding system and Shack-Hartmann wavefront sensor are disposed on transmitted light path;No. two beam splitters it is anti-
It penetrates in optical path and is disposed with No. two microcobjectives and imaging detector;Imaging detector is arranged on one-dimensional electronic control translation stage,
One-dimensional electronic control translation stage is connected by driver with control and Data Analysis Computer;
Target plate is located at the focal position of collimating mirror, and the centre bit of target plate is equipped with an aperture, the size of hole diameter d are as follows: d=
2.44 λ f/D, in formula, λ is the central wavelength of light source;F is the focal length of collimating mirror;D is the clear aperture of collimating mirror;
Beam-expanding system is Kepler's structure, using doubly telecentric optical path;
Shack-Hartmann wavefront sensor sends control to for acquiring the end face figure like of tested optical fiber connector in real time
System and Data Analysis Computer;Control and Data Analysis Computer are used to obtain tested optical fiber connector according to the end face figure like
End face three-dimensional appearance, radius of curvature, grinding be eccentric and optical fiber height value.
It further, further include tieing up adjustment mechanisms for adjusting the five of tested optical fiber connector posture;Five dimension adjustment mechanisms
The lower section of tested optical fiber connector is set.
Further, beam-expanding system is made of object lens and eyepiece, and object lens are located at object lens towards tested optical fiber connector, eyepiece
Rear, and eyepiece is overlapped with the focus of object lens.
It further, further include the positioning datum knot being arranged between beam-expanding system and Shack-Hartmann wavefront sensor
Structure, is provided with taper hole in the middle part of positioning datum structure, in the center line of the taper hole and the target surface of Shack-Hartmann wavefront sensor
Heart line is overlapped.
Optical fiber connector is measured using above-mentioned end surface of optical fiber connector parameter measuring apparatus the present invention also provides a kind of
The method of transverse parameters, is characterized in that, comprising the following steps:
1) tested optical fiber connector is placed at the object space position of No.1 microcobjective;
2) light source is opened;
3) one-dimensional electronic control translation stage is driven to move using driver, to make imaging detector along the light of No. two microcobjectives
Axis direction linear motion, the sharply defined image until monitoring end surface of optical fiber connector by control and Data Analysis Computer;
4) posture that tested optical fiber connector is adjusted by five dimension adjustment mechanisms, so that by Shack-Hartmann wavefront sensing
The collected facula mass center coordinate of device is overlapped with the base position that Shack-Hartmann wavefront sensor systematic wavefront is demarcated;
5) positioning datum mechanism is removed, Shack-Hartmann wavefront sensor real-time image acquisition is utilized;
6) image that control and Data Analysis Computer are acquired according to Shack-Hartmann wavefront sensor calculates tested light
Field wave front slope, and the light field phase distribution at tested optical fiber connector ends position is obtained using field method wavefront reconstruction method
Φ(x,y);
7) control and Data Analysis Computer calculate the end face surface of tested optical fiber connector according to phase distribution Φ (x, y)
Height is distributed are as follows:
8) it is distributed according to two-dimensional section figure and end face surface height, obtains the three-dimensional appearance of end face;
9) it regards the end face of tested optical fiber connector as spherical surface, and the spherical surface is divided into assembly area, extracts area
Domain and flattening area carry out sphere surface fitting to the three-dimensional appearance valid data between assembly area and extracting region, obtain the centre of sphere
Coordinate and sphere curvature radius r0;
10) sphere centre coordinate obtained according to fitting calculates the grinding bias o of tested optical fiber connector ends are as follows:
In formula, x ', y ' are fiber core position coordinates;D is the pixel dimension size of imaging detector;K is beam-expanding system
Expand ratio;
11) optical fiber height value is calculated:
The end face surface height of the optical fiber connector measured with step 7) is distributed h (x, y), subtracts step 9) to the light of measurement
The end face three-dimensional appearance valid data of fiber connector carry out after sphere surface fitting as a result, taking being averaged for flattening area in gained difference
Value is optical fiber height value.
The present invention has the advantages that
1. realizing dynamic high precision end surface of optical fiber connector parameter the present invention is based on Shack-Hartmann wavefront sensor to survey
Amount, overcomes the small disadvantage of traditional measurement mode dynamic range, to greatly reduce the position to tested optical fiber connector
The requirement of precision, operation are easier.
2. the present invention is not high to the coherence requirement of light source, can work under white light source or monochromatic source.
3. the present invention can be achieved at the same time and clearly observe end surface of optical fiber connector and parameter measurement, without switching, greatly
High measurement efficiency.
4. the present invention is based on Shack-Hartmann wavefront sensor realize measure, not by external environment (air draught disturbance,
Vibration etc.) influence.
5. stability of the present invention is high, reproducible, measurement result confidence level is high.
Detailed description of the invention
Fig. 1 is the schematic illustration of end surface of optical fiber connector parameter measuring apparatus of the present invention.
Description of symbols:
1- light source, 2- convergent mirror, 3- target plate, 4- collimating mirror, 5- No.1 beam splitter, 6- absorber, 7- No.1 microcobjective,
8- tested optical fiber connector, No. bis- beam splitters of 9-, No. bis- microcobjectives of 10-, 11- imaging detector, 12- driver, 13- are expanded
System, 14- positioning datum structure, 15- Shack-Hartmann wavefront sensor, 16- control and Data Analysis Computer, 17- object
Mirror, 18- eyepiece, the one-dimensional electronic control translation stage of 19-, 20- five tie up adjustment mechanism.
Specific embodiment
Below in conjunction with attached drawing, invention is further explained.
As shown in Figure 1, end surface of optical fiber connector parameter measuring apparatus provided by the present invention, including successively along same optical path
Light source 1, convergent mirror 2, target plate 3, collimating mirror 4, No.1 beam splitter 5 and the absorber 6 of setting;No.1 beam splitter 5 is defined towards standard
The face of straight mirror 4 is the first mirror surface, in the outgoing beam on reflected light path after the first mirror-reflection of collimating mirror 4, is provided with one
Number microcobjective 7;The outgoing beam of No.1 microcobjective 7 is disposed with No. two on the transmitted light path after the first specular transmission
Beam splitter 9, beam-expanding system 13, positioning datum structure 14 and Shack-Hartmann wavefront sensor 15.The reflection of No. two beam splitters 9
No. two microcobjectives 10 and imaging detector 11 are disposed in optical path.Imaging detector 11 by driver 12 and control and
Data Analysis Computer 16 is connected, and control and Data Analysis Computer 16 are also connected with Shack-Hartmann wavefront sensor 15.
Light source 1 can reduce the requirement of light source coherence compared with conventional method using laser light source or white light source.
Target plate 3 is located at the focal position of collimating mirror 4, and the centre bit of target plate 3 is equipped with an aperture, the size of hole diameter d are as follows:
D=2.44 λ f/D (1)
In formula, λ is the central wavelength of light source 1;F is the focal length of collimating mirror 4;D is the clear aperture of collimating mirror 4.
Collimating mirror 4 uses achromat-design, to guarantee in visible light wave segment limit, keeps to different wavelengths of light collimation
Unanimously, to guarantee that light source 1 can reduce requirement of the present invention to light source coherence using white light source.
Imaging detector 11 is fixed on one-dimensional electronic control translation stage 19.
Beam-expanding system 13 is that Kepler's structure is made of using doubly telecentric optical path object lens 17 and eyepiece 18, and carries out colour killing
Difference design to guarantee the wide spectrum work of entire test device, and eliminates 11 location error of imaging detector to measurement result
Influence.
Positioning datum structure 14 is fixed on the front end of Shack-Hartmann wavefront sensor 15, can be easy to dismantle.
Specific work process of the invention is as follows:
When test, tested optical fiber connector 8 is fixed on five dimension adjustment mechanisms 20, and makes tested optical fiber connector 8
In the object space position of No.1 microcobjective 7.
The concentrated mirror 2 of diverging light that light source 1 exports converges on the aperture of target plate 3, then the collimation output of collimated mirror 4, quasi-
The light beam that straight mirror 4 exports is divided into two beams through No.1 beam splitter 5: a branch of is transmitted light, is incident on absorber 6, it is complete to be absorbed body 6
Hypersorption;Another light beam is reflected light, on the end face for converging to tested optical fiber connector 8 through No.1 microcobjective 7 after, Yan Yuanlu
Reflection;Being collimated by the reflected light of the end face reflection of tested optical fiber connector 8 through No.1 microcobjective 7 is directional light, the directional light
After No.1 beam splitter 5, reach No. two beam splitters 9, be divided into two beams by No. two beam splitters 9: a branch of is reflected light, aobvious through No. two
Speck mirror 10 converges on the target surface of imaging detector 11, and another beam is transmitted light, after being expanded by beam-expanding system 13, using fixed
Position benchmark architecture 14 is incident on Shack-Hartmann wavefront sensor 15.Then one-dimensional automatically controlled translation is driven using driver 12
Platform 19 moves, to make optical axis direction linear motion of the imaging detector 11 along No. two microcobjectives 10, until by controlling and counting
The sharply defined image of end surface of optical fiber connector is monitored according to analytical calculation machine 16, to realize to end surface of optical fiber connector scratch defects
Microscopic observation;The posture that tested optical fiber connector 8 is adjusted by five dimension adjustment mechanisms, so that by Shack-Hartmann wavefront sensing
The collected facula mass center coordinate of device 15 is overlapped with the base position that Shack-Hartmann wavefront sensor systematic wavefront is demarcated
(commercialization Shack-Hartmann wavefront sensor can show the base position that systematic wavefront is demarcated matched with it at present
On wavefront analysis software interface, as long as operator guarantees that collected facula mass center is overlapped with the base position of display).
At this point, positioning datum mechanism 14 is removed, using 15 real-time image acquisition of Shack-Hartmann wavefront sensor, by controlling and counting
Tested light field wavefront slope is calculated according to analytical calculation machine 16, and obtains tested optical fiber connector using field method wavefront reconstruction method
Light field phase distribution at endface position is that Φ (x, y) (those skilled in the art directly buy commercial Shack-Hartmann wavefront and pass
Sensor is implemented with the present invention according to the optical path that is arranged of the present invention and measurement method), then the end face of tested optical fiber connector 8
Apparent height is distributed h (x, y) are as follows:
After end face surface height distribution h (x, y) is calculated, the two dimension that can obtain 8 end face of tested optical fiber connector is cut
Face figure and three-dimensional appearance figure, and therefrom obtain the information of sphere curvature radius, grinding bias and optical fiber height value.
The end face of tested optical fiber connector 8 can regard spherical surface as, and spherical equation are as follows:
In formula, x0, y0And z0For sphere centre coordinate;r0For sphere curvature radius.According to IEC (International Electrotechnical Commission) standard,
The end face of tested optical fiber connector 8 can be divided into three regions, i.e. assembly area, extracting region and flattening area.To tested optical fiber
Three-dimensional appearance valid data between 8 end face assembly area of connector and extracting region carry out sphere surface fitting (sphere surface fitting method
It is Numerical Methods well known within the skill of those ordinarily skilled for foundation of numerical analysis knowledge), obtain sphere centre coordinate and spherical surface
Radius of curvature r0.According to the sphere centre coordinate that fitting obtains, the grinding bias o of tested optical fiber connector ends 8 can be calculated are as follows:
In formula, x ', y ' are fiber core position coordinates;D is the pixel dimension size of imaging detector 11;K is to expand to be
System 13 expands ratio.
It is distributed h (x, y) with the end face surface height of the optical fiber connector 8 of actual measurement, subtracts the aforementioned optical fiber to measurement
The end face surface height of connector 8 is distributed after carrying out sphere surface fitting as a result, taking the average value of flattening area in gained difference i.e.
For optical fiber height value.
Claims (5)
1. end surface of optical fiber connector parameter measuring apparatus, it is characterised in that: including set gradually along same optical path light source (1),
Convergent mirror (2), target plate (3), collimating mirror (4), No.1 beam splitter (5) and absorber (6);
Define No.1 beam splitter (5) towards collimating mirror (4) face be the first mirror surface, collimating mirror (4) outgoing beam through first
On reflected light path after mirror-reflection, it is provided with No.1 microcobjective (7);The outgoing beam of No.1 microcobjective (7) is through first
No. two beam splitters (9), beam-expanding system (13) and Shack-Hartmann wavefront is disposed on transmitted light path after specular transmission to pass
Sensor (15);No. two microcobjectives (10) and imaging detector (11) are disposed on the reflected light path of No. two beam splitters (9);
Imaging detector (11) is arranged on one-dimensional electronic control translation stage (19), and one-dimensional electronic control translation stage (19) passes through driver (12) and control
System and Data Analysis Computer (16) are connected;
Target plate (3) is located at the focal position of collimating mirror (4), and the centre bit of target plate (3) is equipped with an aperture, the size of hole diameter d
Are as follows: d=2.44 λ f/D, in formula, λ is the central wavelength of light source (1);F is the focal length of collimating mirror (4);D is the logical of collimating mirror (4)
Optical port diameter;
Beam-expanding system (13) is Kepler's structure, using doubly telecentric optical path;
Shack-Hartmann wavefront sensor (15) is sent to for acquiring the end face figure like of tested optical fiber connector (8) in real time
Control and Data Analysis Computer (16);Control and Data Analysis Computer (16) are used to be obtained according to the end face figure like tested
End face three-dimensional appearance, radius of curvature, grinding bias and the optical fiber height value of optical fiber connector.
2. end surface of optical fiber connector parameter measuring apparatus according to claim 1, it is characterised in that: further include for adjusting
Five dimensions adjustment mechanism (20) of tested optical fiber connector (8) posture;Five dimensions adjustment mechanism (20) are arranged in tested optical fiber connector
(8) lower section.
3. end surface of optical fiber connector parameter measuring apparatus according to claim 1 or 2, it is characterised in that: beam-expanding system
(13) it is made of object lens (17) and eyepiece (18), object lens (17) are located at object lens towards tested optical fiber connector (8), eyepiece (18)
(17) rear, and eyepiece (18) is overlapped with the focus of object lens (17).
4. end surface of optical fiber connector parameter measuring apparatus according to claim 1 or 2, it is characterised in that: further include setting
Positioning datum structure (14) between beam-expanding system (13) and Shack-Hartmann wavefront sensor (15), positioning datum structure
(14) middle part is provided with taper hole, the center line of the taper hole and the target surface center line weight of Shack-Hartmann wavefront sensor (15)
It closes.
5. being joined using any end surface of optical fiber connector parameter measuring apparatus measurement end surface of optical fiber connector of claim 1-4
Several methods, which comprises the following steps:
1) tested optical fiber connector (8) is placed at the object space position of No.1 microcobjective (7);
2) light source (1) is opened;
3) one-dimensional electronic control translation stage (19) is driven to move using driver (12), to keep imaging detector (11) micro- along No. two
The optical axis direction of object lens (10) moves along a straight line, until monitoring end surface of optical fiber connector by control and Data Analysis Computer (16)
Sharply defined image;
4) by the posture of five dimension adjustment mechanism (20) adjustment tested optical fiber connector (8), so that being passed by Shack-Hartmann wavefront
The base position of the collected facula mass center coordinate of sensor (15) and the calibration of Shack-Hartmann wavefront sensor systematic wavefront
It is overlapped;
5) positioning datum mechanism (14) are removed, Shack-Hartmann wavefront sensor (15) real-time image acquisition is utilized;
6) image that control and Data Analysis Computer (16) are acquired according to Shack-Hartmann wavefront sensor (15) calculates quilt
Light field wavefront slope is surveyed, and obtains the light field phase at tested optical fiber connector ends position using field method wavefront reconstruction method
It is distributed Φ (x, y);
7) control and Data Analysis Computer (16) calculate the end face of tested optical fiber connector (8) according to phase distribution Φ (x, y)
Apparent height distribution are as follows:
8) it is distributed according to two-dimensional section figure and end face surface height, obtains the three-dimensional appearance of end face;
9) it regards the end face of tested optical fiber connector (8) as spherical surface, and the spherical surface is divided into assembly area, extracting region
And flattening area, sphere surface fitting is carried out to the three-dimensional appearance valid data between assembly area and extracting region, obtains centre of sphere seat
Mark and sphere curvature radius r0;
10) sphere centre coordinate obtained according to fitting calculates the grinding bias o of tested optical fiber connector ends (8) are as follows:
In formula, x ', y ' are fiber core position coordinates;D is the pixel dimension size of imaging detector (11);K is beam-expanding system
(13) expand ratio;
11) optical fiber height value is calculated:
The end face surface height of the optical fiber connector (8) measured with step 7) is distributed h (x, y), subtracts step 9) to the light of measurement
The end face three-dimensional appearance valid data of fiber connector (8) carry out after sphere surface fitting as a result, taking flattening area in gained difference
Average value is optical fiber height value.
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CN110320011A (en) * | 2019-08-06 | 2019-10-11 | 清华大学深圳研究生院 | A kind of transmission wavefront detection system and method |
CN110793465A (en) * | 2019-11-07 | 2020-02-14 | 中国计量大学 | Multi-surface large-dynamic-range synchronous measurement method for micro-transmission element |
CN111288928A (en) * | 2020-03-12 | 2020-06-16 | 华侨大学 | Object surface three-dimensional topography feature measuring method, device, equipment and storage medium |
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CN110320011B (en) * | 2019-08-06 | 2024-04-19 | 清华大学深圳研究生院 | Transmission wavefront detection system and method |
CN110793465A (en) * | 2019-11-07 | 2020-02-14 | 中国计量大学 | Multi-surface large-dynamic-range synchronous measurement method for micro-transmission element |
CN110793465B (en) * | 2019-11-07 | 2021-07-20 | 中国计量大学 | Multi-surface large-dynamic-range synchronous measurement method for micro-transmission element |
CN111288928A (en) * | 2020-03-12 | 2020-06-16 | 华侨大学 | Object surface three-dimensional topography feature measuring method, device, equipment and storage medium |
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