CN111537198A - Star sensor lens interference detection system - Google Patents
Star sensor lens interference detection system Download PDFInfo
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- CN111537198A CN111537198A CN202010270879.7A CN202010270879A CN111537198A CN 111537198 A CN111537198 A CN 111537198A CN 202010270879 A CN202010270879 A CN 202010270879A CN 111537198 A CN111537198 A CN 111537198A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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Abstract
The invention relates to the technical field of lens detection, in particular to a high-quality lens detection device. A star sensor lens interference detection system has the technical scheme that: the laser interferometer is arranged below the second motion table, and the first motion table is arranged above the second motion table; under the displacement motion of the second motion platform, the image surface of the lens to be measured can be aligned with the focus of spherical waves emitted by the laser interferometer, and under the displacement motion of the first motion platform, the plane reflecting mirror can be perpendicular to plane waves emitted by the image surface of the lens to be measured and generates echoes to interfere with the laser interferometer. The invention is suitable for common star sensitive lenses with different field focal lengths and F numbers, meets the requirement of high-precision detection, greatly reduces the time cost and the labor cost for detecting a single lens, and is automatic high-efficiency detection equipment.
Description
Technical Field
The invention relates to the technical field of lens detection, in particular to a high-quality lens detection device.
Background
In the industrial field, such as industrial mass production of mobile phone lenses, assembly and detection of lenses are usually completed by automation equipment and machine vision algorithms, and in the occasions with low requirements on imaging quality of lenses, assembly and detection of lenses are usually completed by combining machine vision in a target image mode.
The typical industrial lens rapid detection equipment adopts the working principle that a standard imaging detection image is directly projected on an image sensor through a lens to be detected by utilizing a light path projection mode, different lenses can project images with different qualities, the quality of the lens with excellent quality is close to that of the standard imaging detection image, and the difference can be generated on the contrary. After the image sensor acquires and analyzes the image, whether the lens reaches the standard can be evaluated. The method has high detection efficiency and is suitable for occasions with low detection precision requirements.
For high-quality lenses, especially in the aerospace field, such as star-sensitive lenses, telescopes and the like, generally, a special MTF detection instrument is used for transmitting an image of a target into the lens through a collimator and imaging the image on a detector or a microscope, so that the MTF under corresponding spatial frequency is calculated, and the MTFs of different fields of view of the lens are measured through six-dimensional adjustment. The test process is complex, needs manual operation of professionals to finish, consumes time from hours to dozens of hours, and is suitable for single-piece detection of the telescope.
For a special product of the star-sensitive lens, the batch production quantity is large, the requirement on the imaging quality is high, the requirement on large-scale production is difficult to meet by a traditional manual detection mode, and special automatic equipment is urgently needed to improve the production efficiency. At present, no corresponding equipment at home and abroad meets the requirement.
Disclosure of Invention
The purpose of the invention is: in order to improve the efficiency of a detection link in the production of the star sensor lens and automatically detect optical indexes such as a view field, each view field transfer function, distortion, a focal length, a rear working distance and the like of the star sensor lens, the star sensor lens interference detection system is provided.
The technical scheme of the invention is as follows: a star sensor lens interference detection system comprises: the device comprises a first moving table for fixing a plane reflecting mirror, a second moving table for fixing a lens to be measured and a laser interferometer;
the laser interferometer is arranged below the second motion table, and the first motion table is arranged above the second motion table; under the displacement motion of the second motion platform, the image surface of the lens to be measured can be aligned with the focus of spherical waves emitted by the laser interferometer, and under the motion of the first motion platform, the plane mirror can be perpendicular to plane waves emitted by the image surface of the lens to be measured and generates echoes to interfere with the laser interferometer.
On the basis of the scheme, further, the laser interferometer is connected with the data processing display end; and the data processing display end receives the interference data returned by the laser interferometer and displays the detection result.
On the basis of the scheme, further, the first moving table and the second moving table are both fixed on the air floating platform; a through hole is formed in the center of the air floatation platform, and the laser interferometer is arranged in the through hole of the air floatation platform. The air supporting platform is used as an installation base frame of the whole detection system, and a high-stability environment required by detection is provided for the detection system through the threaded installation hole and the nut which are embedded on the marble platform and fixedly connected with the first moving platform and the second moving platform.
On the basis of the above scheme, further, the first motion table has two rotational degrees of freedom, including: the horizontal guide rail is arranged on the fixed plane, and the rotating frame is arranged on the horizontal guide rail; the horizontal guide rail is of an annular structure, and the axis of the horizontal guide rail is in the vertical direction; the horizontal guide rail is fixed on the fixed plane; the rotating frame comprises a horizontal sliding block which is in sliding fit with the horizontal guide rail and a reflector mounting frame which is vertically arranged;
the horizontal sliding block and the reflector mounting rack are both semicircular rings, wherein the opening of the reflector mounting rack is vertically butted downwards at the opening end of the horizontal sliding block; the plane mirror is arranged in the arc-shaped sliding groove through a mounting seat in sliding fit with the sliding groove.
One end of the fixed plane is provided with a connecting rod which is fixedly arranged on the side surface of the air floating platform through a mounting side plate; in order to adjust the relative height between the fixed plane and the air floating platform conveniently, the connecting rod is designed to be a telescopic rod, and the height of the connecting rod can be adjusted manually.
Furthermore, in order to meet the requirement of detection of star sensor lenses with different entrance pupil sizes, the plane reflector is a replaceable component, so that the plane reflector is detachably mounted on the reflector mounting frame of the rotating frame.
On the basis of the scheme, the second motion table has three degrees of freedom in the horizontal front-back direction, the horizontal left-right direction and the height up-down direction. Specifically, the second motion stage includes: the device comprises a horizontal two-direction motion platform, a height displacement platform arranged on the horizontal two-direction motion platform and a workbench arranged on the height displacement platform; the workbench is used for fixing the lens to be measured, and the workbench is provided with a lens interface capable of replacing the star sensor lenses with different apertures. Furthermore, the horizontal two-direction motion platform and the height displacement platform are driven by a micro-stepping motor matched with a precise ball screw, matched with a grating with the resolution of 0.1 mu m and controlled by a closed loop; wherein, each degree of freedom direction of the horizontal two-position motion platform is provided with two groups of micro-stepping motors matched with the precise ball screw rod for driving, and the height displacement platform is provided with a group of micro-stepping motors matched with the precise ball screw rod for driving.
Has the advantages that:
the invention is suitable for common star sensitive lenses with different field focal lengths and F numbers, meets the requirement of high-precision detection, greatly reduces the time cost and the labor cost for detecting a single lens, and is automatic high-efficiency detection equipment. The invention solves the problems that the traditional aerospace production mode depends on manual operation of professionals and industrial production cannot be realized, thereby realizing cost reduction and quality guarantee.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a cross-sectional view of FIG. 1;
FIG. 3 is a schematic diagram of the operation of the present invention;
FIG. 4 is a schematic diagram of a first motion stage according to the present invention;
FIG. 5 is a schematic diagram of a second motion stage according to the present invention;
FIG. 6 is a schematic structural view of a marble air-floating platform according to the present invention;
in the figure: the system comprises a 1-plane reflector, a 2-first moving platform, a 21-fixed plane, a 22-horizontal guide rail, a 23-rotating frame, a 24-connecting rod, a 25-installation side plate, a 3-lens to be measured, a 4-second moving platform, a 41-horizontal two-azimuth moving platform, two azimuth moving platforms, a 42-height displacement platform, a 43-workbench, a 5-laser interferometer, a 6-data processing display end and a 7-air floating platform.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Example 1:
referring to fig. 1 and 2, a star sensor lens interference detection system includes: a first moving table 2 for fixing the plane mirror 1 (adopting a standard plane mirror), a second moving table 4 for fixing a lens 3 to be measured and a laser interferometer 5;
the laser interferometer 5 is arranged below the second motion table 4, and the first motion table 2 is arranged above the second motion table 4; under the displacement motion of the second motion table 4, the image plane of the lens 3 to be measured can be aligned with the focus of spherical waves emitted by the laser interferometer 5, and under the motion of the first motion table 2, the direction of the standard plane mirror 1 is adjusted, so that the plane mirror 1 can be perpendicular to the plane waves emitted by the image plane of the lens 3 to be measured, and echoes are generated to interfere with the laser interferometer 5.
During detection, the plane reflector 1 is fixed on the first moving table 2, and the lens 3 to be detected is fixed on the second moving table 4; the second motion platform 4 drives the lens 3 to be measured to move, so that the spherical wave focus emitted by the laser interferometer 5 is aligned to the image surface of the lens 3 to be measured; the first motion stage 2 drives the plane mirror 1 to move towards the lens 3 to be measured, so that the entrance pupil of the plane mirror 1 coincides with that of the lens 3 to be measured, and the plane wave emitted by the lens 3 to be measured is perpendicular to the plane mirror 1 and interferes with the echo.
Referring to fig. 3, the laser interferometer 5 is connected to the data processing display terminal 6; and the data processing and displaying end 6 receives the interference data returned by the laser interferometer 5 and displays the detection result.
Example 2:
on the basis of embodiment 1, see fig. 4, in this example the first motion stage 2 has two degrees of freedom for rotation and height adjustment. Specifically, the first moving stage 2 includes: a horizontal guide rail 22 provided on the fixed plane 21, and a rotating frame 23 provided on the horizontal guide rail 22; the horizontal guide rail 22 is of an annular structure (the axis of the horizontal guide rail is in the vertical direction), and the horizontal guide rail 22 is fixed on the fixed plane 21; the rotating frame 23 comprises a horizontal sliding block which is matched with the horizontal guide rail 22 in a sliding way and a reflector mounting frame which is vertically arranged; the rotating frame 23 can rotate on the horizontal guide rail 22 around the vertical direction;
the horizontal sliding block and the reflector mounting rack are both semicircular rings, wherein the opening of the reflector mounting rack is downwards vertically butted with the opening end of the horizontal sliding block, namely the reflector mounting rack is vertical to the horizontal sliding block, an arc-shaped sliding groove along the inner arc surface of the reflector mounting rack is arranged on the inner arc surface of the reflector mounting rack, the plane reflector 1 is arranged in the arc-shaped sliding groove through a mounting seat in sliding fit with the sliding groove, the plane reflector 1 moves in the arc-shaped sliding groove, and the other rotational freedom degree (rotation around the axis of the reflector mounting rack) of the plane reflector 1 is realized; in this example, the angle of rotation of the flat mirror 1 about the mirror mount axis is limited to ± 50 °.
One end of the fixed plane 21 is provided with a connecting rod 24, and the connecting rod 24 is fixedly arranged on the side surface of the marble air-floating platform 7 through a mounting side plate 25; in order to adjust the relative height between the fixing plane 21 and the marble air-floating platform 7, the connecting rod 24 is a telescopic rod and can lift along the vertical direction, so that the first moving platform 2 has a Z-direction translational degree of freedom.
In order to meet the requirement of detection of star sensor lenses with different entrance pupil sizes, the standard plane mirror assembly (including the plane mirror and the installation assembly thereof) is a replaceable assembly, so that the standard plane mirror assembly is detachably installed on the rotating frame 23.
Referring to fig. 5, the second motion stage 4 has the freedom of movement in three directions, i.e., horizontally forward and backward (in the X direction), horizontally left and right (in the Y direction), and vertically up and down (in the Z direction). Specifically, the second moving stage 4 includes: a horizontal two-azimuth motion platform 41, a height displacement platform 42 arranged on the horizontal two-azimuth motion platform 41, and a workbench 43 arranged on the height displacement platform 42; the workbench 43 is used for fixing the lens 3 to be measured, and the workbench 43 is provided with a lens interface capable of replacing star sensor lenses with different apertures.
Furthermore, the horizontal two-direction motion platform 41 and the height displacement platform 42 are driven by a micro-stepping motor matched with a precise ball screw, matched with a grating with the resolution of 0.1 μm and controlled by a closed loop; two sets of micro-stepping motors are arranged in each degree of freedom direction of the horizontal two-direction motion platform 41 and are matched with the precision ball screw for driving, and one set of micro-stepping motors are arranged on the height displacement platform 42 and are matched with the precision ball screw for driving.
The specific parameters of the second motion stage 4 are as follows:
| parameter(s) | Horizontal two-direction motion platform | Height displacement platform |
| Range of travel | 50mm | 20mm |
| Maximum speed | 30mm/s | 30mm/s |
| Center load | 1000N | 200N |
| Minimum displacement increment | 1μm | 0.5μm |
| Accuracy, guaranteed value | 5μm | 2μm |
| Bidirectional repetition precision, guaranteed value | 5μm | 2μm |
Referring to fig. 6, the first motion table 2 and the second motion table 4 are both fixed on a marble air-floating platform 7; a through hole is arranged at the center of the marble air floating platform 7, and the laser interferometer 5 is arranged in the through hole of the marble air floating platform 7. The marble air-floating platform 7 is used as an installation base frame of the whole detection system, and is fixedly connected with the first moving platform 2 and the second moving platform 4 through a threaded installation hole and a nut which are embedded on the marble platform, so that a high stable environment required for detection is provided for the detection system.
Although the invention has been described in detail above with reference to a general description and specific examples, it will be apparent to one skilled in the art that modifications or improvements may be made thereto based on the invention. Accordingly, such modifications and improvements are intended to be within the scope of the invention as claimed.
Claims (9)
1. A star sensor lens interference detection system is characterized by comprising: the device comprises a first moving table (2) used for fixing a plane reflecting mirror (1), a second moving table (4) used for fixing a lens (3) to be measured, and a laser interferometer (5);
the laser interferometer (5) is arranged below the second motion table (4), and the first motion table (2) is arranged above the second motion table (4); under the displacement motion of the second motion table (4), the image plane of the lens to be measured (3) can be aligned with the focus of spherical waves emitted by the laser interferometer (5), and under the motion of the first motion table (2), the plane reflecting mirror (1) can be perpendicular to plane waves emitted by the image plane of the lens to be measured (3) and generates echoes to be interfered to the laser interferometer (5).
2. The system for detecting interference of the star sensor lens as claimed in claim 1, wherein the laser interferometer (5) is connected with a data processing display terminal (6); and the data processing display terminal (6) receives the interference data returned by the laser interferometer (5) and displays the detection result.
3. The system for detecting interference of the star sensor lens according to claim 1 or 2, wherein the first moving platform (2) and the second moving platform (4) are both fixed on an air floating platform (7); the center of the air floatation platform (7) is provided with a through hole, and the laser interferometer (5) is arranged in the through hole of the air floatation platform (7).
4. The star sensor lens interference detection system according to claim 3, wherein the first motion stage (2) comprises: a horizontal guide rail (22) arranged on the fixed plane (21), and a rotating frame (23) arranged on the horizontal guide rail (22); the horizontal guide rail (22) is of an annular structure, and the axis of the horizontal guide rail is vertical; the horizontal guide rail (22) is fixed on the fixed plane (21); the rotating frame (23) comprises a horizontal sliding block which is in sliding fit with the horizontal guide rail (22) and a reflector mounting frame which is vertically arranged;
the horizontal sliding block and the reflector mounting rack are both semicircular rings, wherein the opening of the reflector mounting rack is vertically butted downwards at the opening end of the horizontal sliding block; an arc-shaped sliding groove along the inner arc surface of the reflector mounting frame is arranged on the inner arc surface of the reflector mounting frame, and the plane reflector (1) is mounted in the arc-shaped sliding groove through a mounting seat in sliding fit with the sliding groove.
5. The interference detection system for the star sensor lens as claimed in claim 4, wherein the plane mirror (1) is detachably mounted on a mirror mounting frame of the rotating frame (23).
6. The system for detecting interference of the lens of the star sensor according to claim 4, wherein the connecting rod (24) is a telescopic rod.
7. The system for detecting interference of the lens of the star sensor according to claim 3, wherein the second motion stage (4) has three degrees of freedom in horizontal front and back, horizontal left and right, and vertical height.
8. The star sensor lens interference detection system according to claim 7, wherein the second motion stage (4) comprises: the device comprises a horizontal two-azimuth motion platform (41), a height displacement platform (42) arranged on the horizontal two-azimuth motion platform (41), and a workbench (43) arranged on the height displacement platform (42); the workbench (43) is used for fixing the lens (3) to be measured.
9. The system for detecting interference of the lens of the star sensor according to claim 8, wherein the horizontal two-direction moving platform (41) and the height displacement platform (42) are driven by a micro-stepping motor and a precision ball screw, and are controlled by a closed loop in cooperation with a grating with a resolution of 0.1 μm.
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