CN212483393U - Visual inspection equipment of multiaspect formation of image - Google Patents

Visual inspection equipment of multiaspect formation of image Download PDF

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CN212483393U
CN212483393U CN202022063758.3U CN202022063758U CN212483393U CN 212483393 U CN212483393 U CN 212483393U CN 202022063758 U CN202022063758 U CN 202022063758U CN 212483393 U CN212483393 U CN 212483393U
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camera
light source
prism
displacement device
direction displacement
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闫奕樸
彭艳华
冯彪
唐傲
郭云峰
梁智深
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Guilin University of Electronic Technology
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Guilin University of Electronic Technology
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Abstract

本实用新型公开了一种多面成像的视觉检测设备,该设备包括Z向位移装置、X向位移装置、相机、镜头、透镜模组、光源支架、第一丝杆、连接板、支撑杆、工控机子系统;所述相机固定在连接板上,实时调节成像元器件与所述透镜模组的间距;所述相机与所述工控机子系统连接,将采集到的待测工件正面图像及待检测工件镜像图像传输到工控机子系统;所述镜头安装在相机正下方,并且与透镜模组相连接,用于收集待测工件表面的反射光,并聚焦在相机上;所述光源支架装配在第一连接杆处;所述X向位移装置固定在支撑板上,所述支撑板装配在Z向位移装置内;所述Z向位移装置安装在支撑杆的正上方,并且在支撑杆的底部固定有底座。

Figure 202022063758

The utility model discloses a multi-sided imaging visual inspection device, which comprises a Z-direction displacement device, an X-direction displacement device, a camera, a lens, a lens module, a light source bracket, a first screw rod, a connecting plate, a support rod, an industrial control machine subsystem; the camera is fixed on the connecting board, and the distance between the imaging element and the lens module is adjusted in real time; the camera is connected with the industrial computer subsystem, and the collected front image of the workpiece to be tested and the workpiece to be tested are collected. The mirror image is transmitted to the industrial computer subsystem; the lens is installed directly under the camera and connected with the lens module to collect the reflected light from the surface of the workpiece to be measured and focus on the camera; the light source bracket is assembled on the first at the connecting rod; the X-direction displacement device is fixed on the support plate, and the support plate is assembled in the Z-direction displacement device; the Z-direction displacement device is installed just above the support rod, and is fixed at the bottom of the support rod with a base.

Figure 202022063758

Description

Visual inspection equipment of multiaspect formation of image
Technical Field
The utility model relates to a vision imaging technology field especially relates to a visual detection equipment of multiaspect.
Background
Currently, semiconductor device inspection is commonly used, for example: the surface characteristics of a single component such as a circuit board and an LED chip are more and more, and the appearance structure is more and more complex. Traditional vision imaging device can only shoot one and wait to detect the face, to there being a plurality of products that wait to detect the face, just need set up a plurality of cameras and carry out the formation of image from different position and detect, not only increase cost sets up a plurality of cameras moreover and must occupy a large amount of stations, causes detection device overall structure complicacy, should not install. Therefore, a novel multi-surface imaging visual detection device is designed, and the device has important significance for improving the detection precision and efficiency of the surface defects of the elements with complex appearance structures.
Disclosure of Invention
For solving the technical problem, the utility model aims at providing a visual inspection equipment of multiaspect formation of image provides technical support for semiconductor components and parts's detection, has ensured the product quality of components and parts, reduces the defective rate. Meanwhile, the system adopts a mirror image imaging mode of prism reflection and refraction, so that simultaneous and high-precision imaging of monocular vision on multiple surfaces of a workpiece to be detected under a fixed station is realized, hardware cost is greatly saved, and detection efficiency is improved. The utility model has the advantages of simple overall structure and stable and reliable operation, help promoting the development of intelligent detection.
The purpose of the utility model is realized through the following technical scheme:
a multi-surface imaging visual detection device comprises a Z-direction displacement device (3), an X-direction displacement device (4), a camera (5), a lens (6), a lens module (7), a light source bracket (8), a first screw rod (9), a connecting plate (12), a supporting rod (13) and an industrial personal computer subsystem (14);
the camera (5) is fixed on the connecting plate (12), and the distance between the imaging component and the lens module (7) is adjusted in real time; the camera (5) is connected with the industrial personal computer subsystem (14) and transmits the collected front image and the left and right side mirror images of the workpiece (2) to be detected to the industrial personal computer subsystem (14);
the lens (6) is arranged right below the camera (5), is connected with the lens module (7), and is used for collecting reflected light on the surface of the workpiece (2) to be measured and focusing the reflected light on the camera (5);
the light source bracket (8) is assembled at a first connecting rod (45);
the X-direction displacement device (4) is fixed on a support plate (33), and the support plate (33) is assembled in the Z-direction displacement device (3);
the Z-direction displacement device (3) is arranged right above the supporting rod (13), and a base (1) is fixed at the bottom of the supporting rod (13).
Compared with the prior art, the utility model discloses an advantage can have as follows to one or more embodiments:
the equipment can simultaneously image the front surface and two side surfaces of the workpiece to be detected, provides effective technical support for simultaneously detecting multiple surfaces of the workpiece by monocular vision at a fixed station, solves the problems of high detection cost and low efficiency at present, ensures the product quality and reduces the defective rate;
the camera is connected with the lens module after being assembled with the lens, so that the interference of an external environment on imaging is reduced to the maximum extent, and in addition, the distance between the imaging device and the prism can be adjusted in real time through the first screw rod, so that the imaging quality is ensured;
the light source bracket and the imaging device are integrally assembled, so that the structure of the device is greatly simplified, and the device is convenient to be well applied to an actual production line;
the light source bracket can be adjusted in real time according to the size of the adopted light source, and has good applicability;
the utility model discloses a monocular vision is to the high-definition formation of image of many surfaces of work piece, provides new technique for fields such as visual detection and sensing.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is a schematic structural diagram of a lens module according to the present invention;
fig. 3 is a schematic structural view of the light source bracket of the present invention;
FIG. 4 is a schematic view of the working principle of the present invention;
fig. 5 is a flow chart of the vision inspection method of the present invention;
fig. 6 is a schematic view of embodiment 2 of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, embodiments of the present invention will be described in further detail with reference to the following embodiments and accompanying drawings.
As shown in fig. 1, the overall structure of the present invention includes a Z-directional displacement device 3, an X-directional displacement device 4, a camera 5, a lens 6, a lens module 7, a light source bracket 8, a first lead screw 9, a connecting plate 12, a support rod 13, and an industrial personal computer subsystem 14; the camera 5 is fixed on the connecting plate 12, and the distance between an imaging component and the lens module 7 is adjusted in real time; the camera 5 is connected with the industrial personal computer subsystem 14, and transmits the collected front images and the left and right side mirror images of the workpiece 2 to be detected to the industrial personal computer subsystem 14 for analysis and processing; the lens 6 is arranged right below the camera 5, connected with the lens module 7 and used for collecting reflected light on the surface of the workpiece 2 to be measured and focusing the reflected light on the camera 5; the light source holder 8 is fitted at the first connecting rod 45; the X-direction displacement device 4 is fixed on a support plate 33, and the support plate 33 is assembled in the Z-direction displacement device 3; the Z-direction displacement device 3 is arranged right above the supporting rod 13, and the base 1 is fixed at the bottom of the supporting rod 13.
The light source bracket 8 is mounted on the first connecting rod 45, and can support both an upper imaging device and different types of light sources.
The X-direction displacement device 4 comprises an X-direction motor 41, a fixed block 42, a slide block 43, a linear guide rail 44 and a first connecting rod 45; the Z-direction displacement device 3 includes: a Z-direction motor 31, a Z-direction guide rail 32 and a support plate 33. The X-direction displacement device 4 moves the position of the adjustable camera 5 in the X direction to enable the workpiece 2 to be detected to be in the center of an image, so that imaging distortion is reduced to the maximum extent, and detection precision is improved; the Z-direction displacement device 3 can adjust the working distance between the imaging device and the workpiece 2 to be measured to a certain range through movement, and is convenient for focusing imaging and Z-direction height small-range adjustment.
The connecting plate 12 is assembled on the first screw rod 9 through a screw, the first screw rod 9 is installed above the light source support 8, and the distance between the camera 5 and the first prism 72 and the distance between the camera 5 and the second prism 73 can be accurately adjusted by adjusting the first screw rod 9, so that the size of an imaging view field is adjusted; the lens module 7 is assembled on the upper part of the light source bracket 8 through screws; the light source support 8 is fixed on the sliding block 43 through a first connecting rod 45, and the industrial personal computer subsystem 14 is located in a centralized control room outside the equipment.
As shown in fig. 2, the lens module 7 includes: a sleeve 71, a first prism 72, a first rotating handle 74, a first prism clamping block 76, a second prism 73, a second rotating handle 75, a second prism clamping block 77 and a filter 78; the sleeve 71 is assembled on the light source bracket 8 through screws; the first prism 72 is fixed on the inner wall of the sleeve 71 through a first prism clamping block 76; the second prism 73 is fixed on the inner wall of the sleeve 71 through a second prism clamping block 77; the first rotating handle 74 and the second rotating handle 75 respectively lock the first prism 72 and the second prism 73 to prevent angular deviation, so that the field of view is changed; the sleeve 71 is assembled to the light source holder 8 by screws, protecting the internal prism and reducing the image interference, and the filter 78 protects the optical devices from damage.
As shown in fig. 3, the light source holder 8 includes an upper support plate 81, a first support block 82 and a second support block 83; the upper supporting plate 81 comprises four mutually vertical linear clamping grooves 811, a screw is assembled in a lead of each linear clamping groove 811, the size of an X-direction space which can be accommodated by the light source bracket 8 can be adjusted by moving the screw, and the four screws can be respectively adjusted without interference; the first supporting block 82 is arranged on the first screw 812 and the second screw 813 through nuts; the second supporting block 83 is mounted on the third screw 814 and the fourth screw 815 through nuts, and further, the position of the nuts on the screws is moved, so that the size of the Z-direction space that the light source bracket 8 can accommodate can be adjusted in real time, and the light source is fixed.
The industrial personal computer subsystem 14 is connected with the camera 5 through the communication interface 51, and comprises an information processing subsystem 141 and an adaptive control subsystem 142; the information processing subsystem 141 detects the surface defects of the image of the workpiece 2 to be detected acquired by the camera 5; the adaptive control subsystem 142 controls the rotation of the X-direction motor 41, the Z-direction motor 31 and the first motor 10, so as to adjust the field area and the height of the camera 5, thereby ensuring the imaging quality. The method specifically comprises the following steps: the adaptive control subsystem 142 can send a signal to the X-direction displacement device to move the camera to a certain position and then fix the limit switch, so that the area to be detected is positioned in the center of the image, the imaging distortion is reduced to the maximum extent, and the detection precision is improved; secondly, the adaptive control subsystem sends 142 corresponding signals to the Z-direction displacement device 3, and the working distance between the imaging device and the workpiece 2 to be measured is adjusted to a certain range, so that the next focusing imaging and Z-direction height small-range adjustment are facilitated; then, the adaptive control subsystem 142 sends a signal again to the first motor 10 to rotate the first lead screw 9 to adjust the height in a small range in the Z direction, so as to achieve the optimal distance between the camera 5 and the lens module 7; the information processing subsystem 141 splices the collected images of the front surface and the two side surfaces of the workpiece to eliminate overlapped parts, and then forms a new image with large view field, integrity and high definition containing sequence information of each image after resampling and fusion; next, preprocessing the spliced image, removing irrelevant information such as interference, noise and the like in the image, and enhancing the detectability of real information, thereby simplifying data to the maximum extent and improving the overall detection precision and real-time performance; finally, the defect detection algorithm is used for detecting the surface defects of the preprocessed workpiece image, and the defect part is identified and marked, so that the defective rate of the product is reduced.
As shown in fig. 5, the implementation flow of the above embodiment is as follows:
(1) firstly, a signal is sent to the X-direction displacement device 4 through the self-adaptive control subsystem 142 to move the camera 5, so that the workpiece 2 to be detected is positioned in the center of an image, the imaging distortion is reduced to the maximum extent, and the detection precision is improved; secondly, a corresponding signal is sent to the Z-direction displacement device 3 through the self-adaptive control subsystem 142, and the working distance between the imaging device and the workpiece 2 to be measured is adjusted to be within a certain range, so that the next focusing imaging and the Z-direction height small-range adjustment are facilitated; then, designing a view field range according to the size of the area to be detected, and further sending a corresponding signal to the first motor 10 through the self-adaptive control subsystem 142 to rotate the first lead screw 9 to adjust the height in a small range in the Z direction so as to achieve the optimal distance between the camera 5 and the lens module 7;
(2) adjusting the light source bracket 8 to adapt to the light source according to the size of the light source required by the workpiece 2 to be measured; turning on a coaxial light source 11 to irradiate the surface of the workpiece 2 to be measured, and collecting the front image of the workpiece 2 to be measured and the mirror images of the left side surface and the right side surface in the prism through a camera 5 through a lens 6 (as shown in fig. 4);
(3) an information processing subsystem 141 in the industrial personal computer subsystem 14 splices the acquired images of the front surface and the two side surfaces of the workpiece, eliminates the overlapped parts, and forms a new image with large view field, integrity and high definition containing the sequence information of each image after resampling and fusion;
(4) next, preprocessing the spliced image, removing irrelevant information such as interference, noise and the like in the image, and enhancing the detectability of real information, thereby simplifying data to the maximum extent and improving the overall detection precision and real-time performance;
(5) finally, surface defect detection is carried out on the preprocessed workpiece image by using a defect detection algorithm, and the defect part is identified and marked, so that the defective rate of the product is reduced;
and (5) repeating the steps (1) to (5) to realize continuous operation of the monitoring system.
Example 2
In the present embodiment, as shown in fig. 6, the size and the detection requirement of the workpiece 2 to be detected are changed, and after calculation, the pose of the camera 5, the distances between the camera 5 and the first prism 72 and the second prism 73, and the selection of the ring light source 15 are adjusted. Therefore, the adaptive control subsystem 142 sends signals to the Z-direction displacement device 3 and the X-direction displacement device 4, and respectively adjusts the position and posture of the camera 5 in the direction X, Z, so that the region to be detected is located at the center of the view field and then the position of the X, Z direction is fixed; sending a signal to the first motor 10 through the adaptive control subsystem 142 again to rotate the first lead screw 9 to adjust the distance between the camera 5 and the prism, so as to ensure the size of the view field and the integrity of the imaging area; at this moment, the camera 5 collects images of the front and two sides of the workpiece, transmits the images to the information processing subsystem 141 in the industrial personal computer subsystem 14 through the communication interface 51 for surface defect detection, and marks a defect area.
Although the embodiments of the present invention have been described above, the description is only for the convenience of understanding the present invention, and the present invention is not limited thereto. It will be apparent to persons skilled in the relevant art that various changes in form and detail can be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (6)

1.一种多面成像的视觉检测设备,其特征在于,所述设备包括Z向位移装置(3)、X向位移装置(4)、相机(5)、镜头(6)、透镜模组(7)、光源支架(8)、第一丝杆(9)、连接板(12)、支撑杆(13)、工控机子系统(14);1. A visual inspection device for multi-faceted imaging, characterized in that the device comprises a Z-direction displacement device (3), an X-direction displacement device (4), a camera (5), a lens (6), a lens module (7) ), a light source bracket (8), a first screw rod (9), a connecting plate (12), a support rod (13), and an industrial computer subsystem (14); 所述相机(5)固定在连接板(12)上,实时调节成像元器件与所述透镜模组(7)的间距;所述相机(5)与所述工控机子系统(14)连接,将采集到的待测工件正面图像及待检测工件镜像图像传输到工控机子系统;The camera (5) is fixed on the connecting plate (12), and the distance between the imaging component and the lens module (7) is adjusted in real time; the camera (5) is connected with the industrial computer subsystem (14), and the The collected front image of the workpiece to be tested and the mirror image of the workpiece to be tested are transmitted to the industrial computer subsystem; 所述镜头(6)安装在相机(5)正下方,并且与透镜模组(7)相连接,用于收集待测工件(2)表面的反射光,并聚焦在相机(5)上;The lens (6) is installed directly below the camera (5), and is connected with the lens module (7), for collecting the reflected light from the surface of the workpiece (2) to be measured, and focusing on the camera (5); 所述光源支架(8)装配在第一连接杆(45)处;The light source bracket (8) is assembled at the first connecting rod (45); 所述X向位移装置(4)固定在支撑板(33)上,所述支撑板(33)装配在Z向位移装置(3)内;The X-direction displacement device (4) is fixed on the support plate (33), and the support plate (33) is assembled in the Z-direction displacement device (3); 所述Z向位移装置(3)安装在支撑杆(13)的正上方,并且在支撑杆(13)的底部固定有底座(1)。The Z-direction displacement device (3) is installed just above the support rod (13), and a base (1) is fixed on the bottom of the support rod (13). 2.如权利要求1所述的多面成像的视觉检测设备,其特征在于,所述X向位移装置(4)包括X向电机(41)、固定块(42)、滑块(43)、直线导轨(44)与第一连接杆(45);所述Z向位移装置(3)包括:Z向电机(31)、Z向导轨(32)与支撑板(33)。2. The multi-faceted imaging visual inspection device according to claim 1, wherein the X-direction displacement device (4) comprises an X-direction motor (41), a fixed block (42), a slider (43), a straight line A guide rail (44) and a first connecting rod (45); the Z-direction displacement device (3) includes a Z-direction motor (31), a Z-direction guide rail (32) and a support plate (33). 3.如权利要求1所述的多面成像的视觉检测设备,其特征在于,3. The multi-faceted imaging visual inspection device according to claim 1, characterized in that, 所述连接板(12)通过螺钉装配在第一丝杆(9)上,所述第一丝杆(9)安装在光源支架(8)上方;The connecting plate (12) is assembled on the first screw rod (9) by screws, and the first screw rod (9) is installed above the light source bracket (8); 所述透镜模组(7)通过螺钉装配在光源支架(8)上部;所述光源支架(8)通过第一连接杆(45)固定在滑块(43)上。The lens module (7) is assembled on the upper part of the light source bracket (8) through screws; the light source bracket (8) is fixed on the slider (43) through a first connecting rod (45). 4.如权利要求1所述的多面成像的视觉检测设备,其特征在于,所述透镜模组(7)包括:套筒(71)、第一棱镜(72)、第一旋转手柄(74)、第一棱镜夹块(76)、第二棱镜(73)、第二旋转手柄(75)、第二棱镜夹块(77)与滤镜(78);所述套筒(71)通过螺钉装配在光源支架(8)上;所述第一棱镜(72)通过第一棱镜夹块(76)固定在套筒(71)内壁;所述第二棱镜(73)通过第二棱镜夹块(77)固定在套筒(71)内壁;所述第一旋转手柄(74)与第二旋转手柄(75)分别锁紧第一棱镜(72)与第二棱镜(73)防止出现角度偏移,从而引起视场变化。4. The visual inspection device for multi-faceted imaging according to claim 1, wherein the lens module (7) comprises: a sleeve (71), a first prism (72), and a first rotating handle (74) , the first prism clamping block (76), the second prism (73), the second rotating handle (75), the second prism clamping block (77) and the filter (78); the sleeve (71) is assembled by screws On the light source bracket (8); the first prism (72) is fixed on the inner wall of the sleeve (71) by the first prism clamping block (76); the second prism (73) is fixed by the second prism clamping block (77) ) is fixed on the inner wall of the sleeve (71); the first rotating handle (74) and the second rotating handle (75) respectively lock the first prism (72) and the second prism (73) to prevent angular deviation, thereby cause field of view changes. 5.如权利要求1所述的多面成像的视觉检测设备,其特征在于,所述光源支架(8)包括上侧支撑板(81)、第一支撑块(82)与第二支撑块(83);所述上侧支撑板(81)包含有四个互相垂直的直线卡槽(811),各个直线卡槽(811)导程内装配有螺杆,通过移动螺杆能够调节光源支架(8)所能够容纳的X向空间大小;所述第一支撑块(82)通过螺母安装在第一螺杆(812)与第二螺杆(813)上;所述第二支撑块(83)通过螺母安装在第三螺杆(814)与第四螺杆(815)上,进而移动螺母在螺杆上的位置,实时调整光源支架(8)所能容纳的Z向空间大小。5. The multi-sided imaging visual inspection device according to claim 1, wherein the light source bracket (8) comprises an upper support plate (81), a first support block (82) and a second support block (83) ); the upper support plate (81) includes four mutually perpendicular straight grooves (811), and each straight groove (811) is equipped with a screw in the lead, and the position of the light source bracket (8) can be adjusted by moving the screw. The size of the X-direction space that can be accommodated; the first support block (82) is installed on the first screw rod (812) and the second screw rod (813) through a nut; the second support block (83) is installed on the first screw rod (813) through a nut On the third screw (814) and the fourth screw (815), the position of the nut on the screw is moved, and the Z-direction space that can be accommodated by the light source bracket (8) is adjusted in real time. 6.如权利要求1所述的多面成像的视觉检测设备,其特征在于,所述工控机子系统(14)通过通信接口(51)与相机(5)相连,且包括信息处理子系统(141)和自适应控制子系统(142)。6. The multi-surface imaging visual inspection device according to claim 1, wherein the industrial computer subsystem (14) is connected to the camera (5) through a communication interface (51), and comprises an information processing subsystem (141) and an adaptive control subsystem (142).
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111965192A (en) * 2020-09-18 2020-11-20 桂林电子科技大学 Multi-surface imaging visual detection system and detection method
CN113295618A (en) * 2021-05-21 2021-08-24 苏州凌云光工业智能技术有限公司 Vision positioning lighting device
CN119510425A (en) * 2025-01-13 2025-02-25 北京妙想科技有限公司 Metal cover appearance defect machine vision inspection equipment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111965192A (en) * 2020-09-18 2020-11-20 桂林电子科技大学 Multi-surface imaging visual detection system and detection method
CN111965192B (en) * 2020-09-18 2025-05-16 桂林电子科技大学 A multi-faceted imaging visual inspection system and inspection method
CN113295618A (en) * 2021-05-21 2021-08-24 苏州凌云光工业智能技术有限公司 Vision positioning lighting device
CN119510425A (en) * 2025-01-13 2025-02-25 北京妙想科技有限公司 Metal cover appearance defect machine vision inspection equipment

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