CN111965192A - Multi-surface imaging visual detection system and detection method - Google Patents

Multi-surface imaging visual detection system and detection method Download PDF

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Publication number
CN111965192A
CN111965192A CN202010992684.3A CN202010992684A CN111965192A CN 111965192 A CN111965192 A CN 111965192A CN 202010992684 A CN202010992684 A CN 202010992684A CN 111965192 A CN111965192 A CN 111965192A
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light source
workpiece
camera
prism
detected
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Chinese (zh)
Inventor
闫奕樸
彭艳华
冯彪
唐傲
郭云峰
梁智深
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Guilin University of Electronic Technology
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Guilin University of Electronic Technology
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Priority to CN202010992684.3A priority Critical patent/CN111965192A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a multi-surface imaging visual detection system and a detection method, wherein the system comprises: the system comprises a camera, a lens module, a light source bracket, a first screw rod, a connecting plate and an industrial personal computer subsystem; the detection method comprises the following steps: sending a signal to an X-direction displacement device through a self-adaptive control subsystem to move a camera to a certain position and then fixing the camera, and enabling a workpiece to be detected to be positioned in the center of an image; sending a corresponding signal to the Z-direction displacement device through the self-adaptive control subsystem, adjusting the working distance between the imaging device and the workpiece to be measured to be within a certain range, and then fixing the working distance; designing a view field range according to the size of the area to be detected, and sending a corresponding signal to a first motor to rotate a first screw rod through a self-adaptive control subsystem to adjust the height in a small range in the Z direction; according to the size of a light source needed by a workpiece to be detected, after the light source support is adjusted to adapt to the light source, the light source is turned on to irradiate the surface of the workpiece to be detected, and the camera collects images on the front surface of the workpiece and images on two side surfaces in the prism through the lens.

Description

Multi-surface imaging visual detection system and detection method
Technical Field
The invention relates to the technical field of visual imaging, in particular to a multi-surface imaging visual detection system and a multi-surface imaging visual detection method.
Background
Currently, semiconductor device inspection is commonly used, for example: the surface characteristics of a single component such as a circuit board and an LED chip are more and more, and the appearance structure is more and more complex. Traditional vision imaging device can only shoot one and wait to detect the face, to there being a plurality of products that wait to detect the face, just need set up a plurality of cameras and carry out the formation of image from different position and detect, not only increase cost sets up a plurality of cameras moreover and must occupy a large amount of stations, causes detection device overall structure complicacy, should not install. Therefore, a novel multi-surface imaging visual detection system is developed, and the system has important significance for improving the detection precision and efficiency of the surface defects of the components with complex appearance structures.
Disclosure of Invention
In order to solve the technical problems, the invention aims to provide a multi-surface imaging visual detection system and a multi-surface imaging visual detection method, which provide technical support for the detection of semiconductor components, ensure the product quality of the components and reduce the defective rate; meanwhile, the detection system adopts a mirror image imaging mode of prism reflection and refraction, so that simultaneous and high-precision imaging of monocular vision on multiple surfaces of the workpiece to be detected under a fixed station is realized, the hardware cost is greatly saved, and the detection efficiency is improved. The invention has simple integral structure and stable and reliable work, and is beneficial to promoting the development of intelligent detection.
The purpose of the invention is realized by the following technical scheme:
a multi-faceted imaging vision inspection system, comprising: the system comprises a camera, a lens module, a light source bracket, a first screw rod, a connecting plate and an industrial personal computer subsystem;
the camera is fixed on the connecting plate and used for adjusting the distance between the imaging component and the lens module in real time;
the camera is connected with the industrial personal computer subsystem and is used for transmitting the collected front image of the workpiece and the mirror image of the workpiece to be detected, which is formed by the prism, to the industrial personal computer subsystem for analysis and processing;
the lens is arranged right below the camera, is connected with the lens module and is used for collecting reflected light of the surface of the workpiece to be measured and focusing the reflected light on the camera;
the light source bracket is assembled at the first connecting rod and used for bearing the upper imaging device and bearing different types of light sources.
A method of visual inspection for multi-faceted imaging, comprising:
sending a signal to an X-direction displacement device through a self-adaptive control subsystem to move a camera to a certain position and then fixing the camera, and enabling a workpiece to be detected to be positioned in the center of an image;
sending a corresponding signal to the Z-direction displacement device through the self-adaptive control subsystem, adjusting the working distance between the imaging device and the workpiece to be measured to be within a certain range, and then fixing the working distance;
designing a view field range according to the size of the area to be detected, and sending a corresponding signal to a first motor to rotate a first screw rod through a self-adaptive control subsystem to adjust the height in a small range in the Z direction;
according to the size of the light source needed by the workpiece to be detected, the light source support is adjusted to adapt to the light source, then the light source is turned on to irradiate the surface of the workpiece to be detected, and the camera collects the mirror images of the front surface of the workpiece and the two side surfaces in the prism through the lens.
One or more embodiments of the present invention may have the following advantages over the prior art:
the system can simultaneously image the front surface and two side surfaces of the workpiece to be detected, provides effective technical support for simultaneously detecting multiple surfaces of the workpiece by single equipment at a fixed station, solves the problems of high detection cost and low efficiency at present, ensures the product quality and reduces the defective rate;
the camera is connected with the lens module through the lens, interference of an external environment on imaging is reduced to the maximum extent, and in addition, the distance between the imaging device and the prism can be adjusted in real time through the first screw rod, so that the imaging quality is ensured;
the light source bracket and the imaging device are integrally assembled, so that the structure of the device is greatly simplified, and the device is convenient to be well applied to an actual production line;
the light source bracket can be adjusted in real time according to the size of the adopted light source, and has good applicability;
the invention realizes the multi-surface high-definition imaging of the workpiece by monocular vision, and provides a new technology for the fields of vision detection, sensing and the like.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of a lens module according to the present invention;
FIG. 3 is a schematic view of a light source holder according to the present invention;
FIG. 4 is a schematic diagram of the working principle of the present invention;
FIG. 5 is a flow chart of a visual inspection method of the present invention;
fig. 6 is a schematic view of embodiment 2 of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the following embodiments and accompanying drawings.
As shown in fig. 1, the overall structure of the present invention includes a camera 5, a lens 6, a lens module 7, a light source bracket 8, a first lead screw 9, a first motor 10, a coaxial light source 11, a connecting plate 12, and an industrial personal computer subsystem 14; the camera 5 is fixed on the connecting plate 12, and the distance between an imaging component and the lens module 7 can be conveniently adjusted in real time; the camera 5 is connected with the industrial personal computer subsystem 14 through the communication interface 51, and is used for acquiring a mirror image of the workpiece 2 to be detected formed by the first prism 72 and the second prism 73 and a front image of the workpiece 2 to be detected, and transmitting the images to the industrial personal computer subsystem 14 for analysis and processing; the light source bracket 8 is assembled at the first connecting rod 45, and can bear not only the upper imaging device but also different types of light sources.
The connecting plate 12 is assembled on the first screw rod 7 through a screw, the first screw rod 7 is installed above the light source support 8, and the distance between the camera 5 and the first prism 72 and the distance between the camera 5 and the second prism 73 can be accurately adjusted by adjusting the first screw rod 9, so that the size of an imaging view field is adjusted; the lens 6 is arranged right below the camera 5, connected with the lens module 7 and used for collecting reflected light on the surface of the workpiece 2 to be measured and focusing the reflected light on the camera 5; the lens module 7 is assembled on the upper part of the light source bracket 8 through screws; the light source bracket 8 is fixed on the sliding block 43 through a first connecting rod 45; the industrial personal computer subsystem 14 is located in a centralized control room outside the equipment.
The X-direction displacement device 4 includes: an X-direction motor 41, a fixed block 42, a sliding block 43, a linear guide rail 44 and a first connecting rod 45; the Z-direction displacement device 3 includes: a Z-direction motor 31, a Z-direction guide rail 32 and a support plate 33; the X-direction displacement device 4 is arranged on the supporting plate 33, the Z-direction displacement device 3 is arranged right above the supporting rod 13, and the bottom of the supporting rod 13 is fixed with the base 1; the X-direction displacement device 4 moves the position of the adjustable camera 5 in the X direction to enable the workpiece 2 to be detected to be in the center of an image, so that imaging distortion is reduced to the maximum extent, and detection precision is improved; the Z-direction displacement device 3 can adjust the working distance between the imaging device and the workpiece 2 to be measured to a certain range through movement, and is convenient for focusing imaging and Z-direction height small-range adjustment.
As shown in fig. 2, the lens module 7 includes a sleeve 71, a first prism 72, a first rotating handle 74, a first prism clamping block 76, a second prism 73, a second rotating handle 75, a second prism clamping block 77, and a filter 78, and the lens module 7 is connected to an upper imaging device, so as to provide a mirror image of each surface of the workpiece 2; the first prism 72 is fixed on the inner wall of the sleeve 71 through a first prism clamping block 76, and first rotating handles 74 are arranged on two sides of the first prism clamping block 76 and can lock the prism to prevent angular deviation; similarly, the second prism 73 is fixed on the inner wall of the sleeve 71 through a second prism clamping block 77, and second rotating handles 75 are mounted on two sides of the second prism clamping block 77 to lock the prism so as to prevent angular deviation, thereby causing a change in the field of view; the sleeve 71 is assembled to the light source holder 8 by screws for protecting the internal prism and reducing the image interference, and the filter 78 protects the optical devices from damage.
As shown in fig. 3, the light source holder 8 includes an upper support plate 81, a first support block 82, and a second support block 83; the upper supporting plate 81 comprises four mutually vertical linear clamping grooves 811, a screw is assembled in a lead of each linear clamping groove 811, the size of an X-direction space which can be accommodated by the light source bracket 8 can be adjusted by moving the screw, and the four screws can be respectively adjusted without interference; the first supporting block 82 is mounted on the first screw 812 and the second screw 813 through nuts, and the second supporting block 83 is mounted on the third screw 814 and the fourth screw 815 through nuts, so that the position of the nuts on the screws can be moved, and the size of the Z-direction space that the light source bracket 8 can accommodate can be adjusted in real time.
The industrial personal computer subsystem 14 is positioned in a centralized control chamber outside the equipment, the industrial personal computer subsystem 14 comprises an information processing subsystem 141 and an adaptive control subsystem 142, and is connected with the camera 5 through the communication interface 51; the information processing subsystem 141 detects the surface defects of the image of the workpiece 2 to be detected acquired by the camera 5; the adaptive control subsystem 142 controls the first motor 10 to rotate the first lead screw 9, so as to adjust the height of the camera 5 and ensure the imaging quality.
The embodiment also provides a visual inspection method for multi-face imaging, which comprises the following steps:
the camera 5 is moved through the X-direction displacement device 3, so that the workpiece 2 to be detected is positioned in the center of an image, the imaging distortion is reduced to the maximum extent, and the detection precision is improved; moving the Z-direction displacement device 3 to adjust the working distance between the imaging device and the workpiece 2 to be measured to a certain range, so as to facilitate the next focusing imaging and the small-range adjustment of the Z-direction height; then, a corresponding signal is sent to the first motor 10 through the adaptive control subsystem 142 to rotate the first lead screw 9 to adjust the height in a small range in the Z direction, so as to achieve the optimal distance between the camera 5 and the lens module 7;
selecting a reasonable light source according to the detection requirement of the workpiece 2 to be detected and installing the reasonable light source on the light source bracket 8; turning on a coaxial light source 11 to irradiate the surface of the workpiece 2 to be measured, and collecting a front image of the workpiece 2 to be measured and mirror images of the left side surface and the right side surface in a prism by a camera 5 through a lens 6 (as shown in fig. 4);
an information processing subsystem 141 in the industrial personal computer subsystem 14 splices the collected images of the front surface and the two side surfaces of the workpiece 2 to be detected, eliminates the overlapped parts, and forms a new image with large view field, integrity and high definition containing the sequence information of each image after resampling and fusion;
next, preprocessing the spliced image, removing irrelevant information such as interference, noise and the like in the image, and enhancing the detectability of real information, thereby simplifying data to the maximum extent and improving the overall detection precision and real-time performance;
finally, the defect detection algorithm is used for detecting the surface defects of the preprocessed workpiece image, and the defect part is identified and marked, so that the defective rate of the product is reduced.
Example 2
In the present invention, as shown in fig. 6, the size and the detection requirement of the workpiece 2 to be detected are changed, and after calculation, the pose of the camera 5, the distances between the camera 5 and the first prism 72 and the second prism 73, and the selection of the ring light source 15 are adjusted. Therefore, the adaptive control subsystem 142 sends signals to the Z-direction displacement device 3 and the X-direction displacement device 4, and respectively adjusts the position and posture of the camera 5 in the direction X, Z, so that the region to be detected is located at the center of the view field and then the position of the X, Z direction is fixed; sending a signal to the first motor 10 through the adaptive control subsystem 142 again to rotate the first lead screw 9 to adjust the distance between the camera 5 and the prism, so as to ensure the size of the view field and the integrity of the imaging area; at this moment, the camera 5 collects images of the front and two sides of the workpiece, transmits the images to the information processing subsystem 141 in the industrial personal computer subsystem 14 through the communication interface 51 for surface defect detection, and marks a defect area.
Although the embodiments of the present invention have been described above, the above descriptions are only for the convenience of understanding the present invention, and are not intended to limit the present invention. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (7)

1. A multi-faceted imaging visual inspection system, said system comprising: the system comprises a camera, a lens module, a light source bracket, a first screw rod, a connecting plate and an industrial personal computer subsystem;
the camera is fixed on the connecting plate and used for adjusting the distance between the imaging component and the lens module in real time;
the camera is connected with the industrial personal computer subsystem and is used for transmitting the collected front image of the workpiece and the mirror image of the workpiece to be detected, which is formed by the prism, to the industrial personal computer subsystem for analysis and processing;
the lens is arranged right below the camera, is connected with the lens module and is used for collecting reflected light of the surface of the workpiece to be measured and focusing the reflected light on the camera;
the light source bracket is assembled at the first connecting rod and used for bearing the upper imaging device and bearing different types of light sources.
2. The multi-faceted imaged visual inspection system of claim 1,
the connecting plate is assembled on a first screw rod through a screw, and the first screw rod is arranged above the light source bracket;
the lens module is assembled on the upper part of the light source bracket through a screw;
the light source bracket is fixed on the sliding block through a first connecting rod;
the industrial personal computer subsystem is located in a centralized control room outside the equipment.
3. The multi-faceted imaging vision inspection system of claim 1, wherein said lens module includes a sleeve, a first prism clamp, a first rotating handle, a second prism clamp, a second rotating handle, and a filter; the lens module is connected with the upper imaging device and used for providing mirror images of all surfaces of a workpiece to be detected, and the first rotating handle and the second rotating handle are used for respectively locking the first prism and the second prism to prevent angular deviation, so that the field of view is changed; the sleeve is assembled on the light source support through screws and used for protecting the internal prism and reducing imaging interference, the first prism clamping block and the second prism clamping block are respectively fixed on the inner wall of the sleeve, and the filter is used for protecting each optical device from being damaged.
4. The multi-faceted imaging vision inspection system of claim 1, wherein said light source support includes an upper support plate, a first support block, a second support block;
four mutually vertical linear clamping grooves are formed in the upper side supporting plate, and a screw is assembled in the lead of each linear clamping groove; the first supporting block is arranged on the first screw rod and the second screw rod through nuts, and the second supporting block is arranged on the third screw rod and the fourth screw rod through nuts; the positions of the screws on the four linear clamping grooves of the upper side supporting plate can be adjusted according to the size of the light source, and similarly, the first supporting block and the second supporting block can adapt to the height of the light source in the Z direction and the width requirement of the light source in the X direction by adjusting the four screws, so that the light source is fixed.
5. The multi-faceted imaging vision inspection system of claim 1, wherein said industrial personal computer subsystem includes an information processing subsystem and an adaptive control subsystem and is connected to said camera through said communication interface.
6. A method for visual inspection of multi-faceted imaging, said method comprising:
sending a signal to an X-direction displacement device through a self-adaptive control subsystem to move a camera to a certain position and then fixing the camera, and enabling a workpiece to be detected to be positioned in the center of an image;
sending a corresponding signal to the Z-direction displacement device through the self-adaptive control subsystem, adjusting the working distance between the imaging device and the workpiece to be measured to be within a certain range, and then fixing the working distance;
designing a view field range according to the size of the area to be detected, and sending a corresponding signal to a first motor to rotate a first screw rod through a self-adaptive control subsystem to adjust the height in a small range in the Z direction;
according to the size of the light source needed by the workpiece to be detected, the light source support is adjusted to adapt to the light source, then the light source is turned on to irradiate the surface of the workpiece to be detected, and the camera collects the mirror images of the front surface of the workpiece and the two side surfaces of the workpiece in the prism through the lens.
7. The multi-faceted imaged visual inspection method of claim 6,
splicing the collected images on the front side and the two side surfaces of the workpiece by the information processing subsystem, eliminating overlapped parts existing among the images, and forming a new image which is large in view field, complete and high in definition and contains sequence information of each image after resampling and fusing;
preprocessing the spliced image, removing irrelevant information such as interference and noise in the image, and enhancing the detectability of real information;
and performing surface defect detection on the preprocessed workpiece image by using a defect detection algorithm, and identifying and marking the defect part, thereby reducing the defective rate of the product.
CN202010992684.3A 2020-09-18 2020-09-18 Multi-surface imaging visual detection system and detection method Pending CN111965192A (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112325778A (en) * 2020-12-02 2021-02-05 广东省科学院智能制造研究所 Full-size detection device and method for over-the-field workpiece based on machine vision
CN112683323A (en) * 2020-12-27 2021-04-20 深圳市裕展精密科技有限公司 Detection device, control system and control method
CN112858175A (en) * 2021-03-11 2021-05-28 广东工业大学 Visual inspection system with integrated camera lens
CN113058875A (en) * 2021-04-22 2021-07-02 慕贝尔汽车部件(太仓)有限公司 Automatic detection system for workpiece surface flaws
CN113686892A (en) * 2021-08-20 2021-11-23 四川轻化工大学 Novel bearing surface defect intelligent detection system
CN114111571A (en) * 2021-11-15 2022-03-01 天津大学 Visual precision detection device for measuring special-shaped workpiece
CN114850072A (en) * 2022-05-10 2022-08-05 苏州天准科技股份有限公司 Electrode outer ring detection device, detection method and electrode comprehensive detection equipment
WO2024000446A1 (en) * 2022-06-30 2024-01-04 宁德时代新能源科技股份有限公司 Tab image acquisition device, system, and method
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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112325778A (en) * 2020-12-02 2021-02-05 广东省科学院智能制造研究所 Full-size detection device and method for over-the-field workpiece based on machine vision
CN112683323A (en) * 2020-12-27 2021-04-20 深圳市裕展精密科技有限公司 Detection device, control system and control method
CN112683323B (en) * 2020-12-27 2024-01-12 富联裕展科技(深圳)有限公司 Detection device, control system and control method
CN112858175A (en) * 2021-03-11 2021-05-28 广东工业大学 Visual inspection system with integrated camera lens
CN113058875B (en) * 2021-04-22 2022-07-26 慕贝尔汽车部件(太仓)有限公司 Automatic detection system for workpiece surface flaws
CN113058875A (en) * 2021-04-22 2021-07-02 慕贝尔汽车部件(太仓)有限公司 Automatic detection system for workpiece surface flaws
CN113686892A (en) * 2021-08-20 2021-11-23 四川轻化工大学 Novel bearing surface defect intelligent detection system
CN113686892B (en) * 2021-08-20 2023-08-25 四川轻化工大学 Novel bearing surface defect intelligent detection system
CN114111571A (en) * 2021-11-15 2022-03-01 天津大学 Visual precision detection device for measuring special-shaped workpiece
CN114850072A (en) * 2022-05-10 2022-08-05 苏州天准科技股份有限公司 Electrode outer ring detection device, detection method and electrode comprehensive detection equipment
WO2024000446A1 (en) * 2022-06-30 2024-01-04 宁德时代新能源科技股份有限公司 Tab image acquisition device, system, and method
EP4322107A4 (en) * 2022-06-30 2024-04-10 Contemporary Amperex Technology Co., Limited Tab image acquisition device, system, and method
US12092583B2 (en) 2022-06-30 2024-09-17 Contemporary Amperex Technology Co., Limited Tab image acquisition device, system, and method
CN117686431A (en) * 2024-01-31 2024-03-12 国网辽宁省电力有限公司辽阳供电公司 Detection device and method for power distribution terminal
CN117686431B (en) * 2024-01-31 2024-07-16 国网辽宁省电力有限公司辽阳供电公司 Detection device and method for power distribution terminal

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