CN111965192A - A multi-faceted imaging visual inspection system and inspection method - Google Patents

Abstract

The invention discloses a multi-sided imaging visual detection system and detection method. The system includes: a camera, a lens, a lens module, a light source bracket, a first screw rod, a connecting board, and an industrial computer subsystem; the detection method includes: Send a signal to the X-direction displacement device through the adaptive control subsystem to move the camera to a certain position and then fix it, and make the workpiece to be measured in the center of the image; send the corresponding signal to the Z-direction displacement device through the adaptive control subsystem to connect the imaging device with the to-be-measured workpiece. The working distance between the measured workpieces is adjusted to a certain range and then fixed; the field of view is designed according to the size of the area to be detected, and the corresponding signal is sent to the first motor through the adaptive control subsystem to rotate the first screw to adjust the height in a small range in the Z direction. ;According to the size of the light source required by the workpiece to be tested, after adjusting the light source bracket to adapt to the light source, turn on the light source to illuminate the surface of the workpiece to be tested, and the camera collects the front image of the workpiece and the mirror images on both sides of the prism through the lens.

Description

A multi-faceted imaging visual inspection system and inspection method

technical field

The present invention relates to the technical field of visual imaging, in particular to a multi-faceted imaging visual detection system and detection method.

Background technique

Currently commonly used semiconductor component testing, such as circuit boards, LED chips, etc., has more and more surface features of a single component, and the appearance structure is more complex. The traditional visual imaging device can only photograph one surface to be inspected. For products with multiple surfaces to be inspected, it is necessary to set up multiple cameras to perform imaging detection from different directions, which not only increases the cost, but also takes a lot of labor to set up multiple cameras. position, resulting in a complex overall structure of the detection device, which is not suitable for installation. Therefore, the development of a new type of multi-faceted imaging visual inspection system is of great significance for improving the detection accuracy and efficiency of surface defects of components with complex appearance structures.

SUMMARY OF THE INVENTION

In order to solve the above technical problems, the purpose of the present invention is to provide a multi-sided imaging visual inspection system and detection method, which provides technical support for the detection of semiconductor components, ensures the product quality of the components, and reduces the defective rate; The system adopts the mirror imaging method of prism reflection and refraction, which realizes the simultaneous and high-precision imaging of multiple surfaces of the workpiece to be tested by monocular vision in a fixed station, thereby greatly saving hardware costs and improving detection efficiency. The invention has simple overall structure, stable and reliable operation, and is helpful for promoting the development of intelligent detection.

The object of the present invention is achieved through the following technical solutions:

A multi-faceted imaging visual inspection system, comprising: a camera, a lens, a lens module, a light source bracket, a first lead screw, a connecting board, and an industrial computer subsystem;

The camera is fixed on the connecting plate and is used to adjust the distance between the imaging element and the lens module in real time;

The camera is connected to the industrial computer subsystem, and is used for transmitting the collected frontal image of the workpiece and the mirror image of the workpiece to be detected formed by the prism to the industrial computer subsystem for analysis and processing;

The lens is installed directly below the camera and is connected with the lens module for collecting the reflected light from the surface of the workpiece to be measured and focusing it on the camera;

The light source bracket is assembled at the first connecting rod, and is used for receiving the upper imaging device and carrying different types of light sources.

A multi-faceted imaging visual inspection method, comprising:

Send a signal to the X-direction displacement device through the adaptive control subsystem to move the camera to a certain position and fix it, and make the workpiece to be tested in the center of the image;

The adaptive control subsystem sends corresponding signals to the Z-direction displacement device to adjust the working distance between the imaging device and the workpiece to be measured within a certain range and then fix it;

Design the field of view range according to the size of the area to be detected, and send corresponding signals to the first motor through the adaptive control subsystem to rotate the first screw rod to adjust the height in a small range in the Z direction;

According to the size of the light source required by the workpiece to be tested, after adjusting the light source bracket to adapt to the light source, turn on the light source to illuminate the surface of the workpiece to be tested, and the camera collects the mirror images of the front surface of the workpiece and the two sides of the prism through the lens.

One or more embodiments of the present invention may have the following advantages over the prior art:

Through this system, the front and both sides of the workpiece to be tested can be imaged at the same time, which provides effective technical support for the simultaneous detection of multiple surfaces of the workpiece by a single device in a fixed station, and solves the current problems of high detection cost and low efficiency. Guarantee product quality and reduce defective rate;

The camera is connected with the lens module through the lens, which minimizes the interference of the external environment on the imaging, in addition, the distance between the imaging device and the prism can be adjusted in real time through the first screw rod to ensure the imaging quality;

The integrated assembly of the light source bracket and the imaging device greatly simplifies the device structure and facilitates the good application of the device in the actual assembly line;

The light source bracket can be adjusted in real time according to the size of the light source used, with good applicability;

The invention realizes the multi-surface high-definition imaging of the workpiece by monocular vision, and provides a new technology for the fields of visual inspection and sensing.

Description of drawings

Fig. 1 is the overall structure schematic diagram of the present invention;

Fig. 2 is the lens module structure schematic diagram of the present invention;

Fig. 3 is the structure schematic diagram of the light source bracket of the present invention;

Fig. 4 is the working principle schematic diagram of the present invention;

Fig. 5 is the visual inspection method flow chart of the present invention;

FIG. 6 is a schematic diagram of Embodiment 2 of the present invention.

Detailed ways

In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be described in further detail below with reference to the embodiments and accompanying drawings.

As shown in FIG. 1, the overall structure of the present invention includes a camera 5, a lens 6, a lens module 7, a light source bracket 8, a first screw rod 9, a first motor 10, a coaxial light source 11, a connecting board 12, and an industrial control machine. system 14; the camera 5 is fixed on the connecting plate 12, and the distance between the imaging element and the lens module 7 can be adjusted conveniently in real time; the camera 5 is connected with the industrial computer subsystem 14 through the communication interface 51, In order to collect the mirror image of the workpiece to be tested 2 formed by the first prism 72 and the second prism 73 and the front image of the workpiece to be tested 2 and transmit the image to the industrial computer subsystem 14 for analysis and processing; the light source bracket 8 is assembled in the The first connecting rod 45 can not only bear the upper imaging device, but also bear different types of light sources.

The above-mentioned connecting plate 12 is assembled on the first screw rod 7 by screws, and the first screw rod 7 is installed above the light source bracket 8. By adjusting the first screw rod 9, the camera 5, the first prism 72 and the second prism can be precisely adjusted 73, and then adjust the size of the imaging field of view; the lens 6 is installed directly below the camera 5, and is connected with the lens module 7, for collecting the reflected light on the surface of the workpiece 2 to be measured, and Focus on the camera 5; the lens module 7 is assembled on the upper part of the light source bracket 8 through screws; the light source bracket 8 is fixed on the slider 43 through the first connecting rod 45; the industrial computer subsystem 14 is located outside the device. Control room.

The above-mentioned X-direction displacement device 4 includes: an X-direction motor 41, a fixed block 42, a slider 43, a linear guide 44, and a first connecting rod 45; the above-mentioned Z-direction displacement device 3 includes: a Z-direction motor 31, a Z-direction guide rail 32, a support plate 33; the X-direction displacement device 4 is installed on the support plate 33, the Z-direction displacement device 3 is assembled directly above the support rod 13, and the base 1 is fixed at the bottom of the support rod 13; the X-direction displacement device 4. By moving the position of the adjustable camera 5 in the X direction, the workpiece to be tested 2 is located in the center of the image, the imaging distortion is minimized, and the detection accuracy is improved; the Z-direction displacement device 3 can move the imaging device and the imaging device. The working distance between the workpieces to be tested 2 is adjusted to a certain range, which is convenient for the next step of focusing imaging and small-scale adjustment of the Z-direction height.

As shown in FIG. 2 , the above-mentioned lens module 7 includes a sleeve 71 , a first prism 72 , a first rotating handle 74 , a first prism clamping block 76 , a second prism 73 , a second rotating handle 75 , and a second prism clamping block 77. With the filter 78, and the lens module 7 is connected with the upper imaging device, it is convenient to provide the mirror image of each surface of the workpiece 2 to be tested; the first prism 72 is fixed on the sleeve through the first prism clamping block 76 On the inner wall of 71, a first rotating handle 74 is installed on both sides of the first prism clamping block 76, which can lock the prism to prevent angular deviation; On the inner wall of the barrel 71, a second rotating handle 75 is installed on both sides of the second prism clamping block 77 to lock the prism to prevent angular deviation, thereby causing changes in the field of view; the sleeve 71 is assembled on the light source bracket 8 by screws , used to protect the inner prism and reduce imaging interference, the filter 78 protects each optical device from damage.

As shown in FIG. 3 , the above-mentioned light source bracket 8 includes an upper support plate 81 , a first support block 82 and a second support block 83 ; the upper support plate 81 includes four mutually perpendicular linear slots 811 , each of which is perpendicular to each other. The lead of the linear slot 811 is equipped with a screw. By moving the screw, the X-direction space that can be accommodated by the light source bracket 8 can be adjusted, and the four screws can be adjusted independently without interfering with each other; the first support block 82 is installed by a nut On the first screw 812 and the second screw 813, the second support block 83 is mounted on the third screw 814 and the fourth screw 815 through nuts, and then the position of the nuts on the screws can be moved, so that the position of the light source bracket 8 can be adjusted in real time. The size of the Z-direction space that can be accommodated.

The industrial computer subsystem 14 is located in a centralized control room outside the device. The industrial computer subsystem 14 includes an information processing subsystem 141 and an adaptive control subsystem 142, and is connected to the camera 5 through the communication interface 51; the The information processing subsystem 141 performs surface defect detection on the image of the workpiece to be tested 2 collected by the camera 5; the adaptive control subsystem 142 controls the first motor 10 of the machine to rotate the first screw 9, adjusts the height of the camera 5, and ensures the imaging quality .

This embodiment also provides a multi-faceted imaging visual detection method, the method comprising:

The camera 5 is moved by the X-direction displacement device 3, so that the workpiece to be measured 2 is in the center of the image, the imaging distortion is reduced to the greatest extent, and the detection accuracy is improved; Adjust to a certain range, which is convenient for the next step of focusing imaging and adjusting the height in the Z direction in a small range; then, the adaptive control subsystem 142 sends a corresponding signal to the first motor 10 to rotate the first screw 9 to adjust the height in a small range in the Z direction. , in order to achieve the optimal spacing between the camera 5 and the lens module 7;

According to the detection requirements of the workpiece 2 to be tested, a reasonable light source is selected and installed on the light source bracket 8; the coaxial light source 11 is turned on to illuminate the surface of the workpiece 2 to be tested, and the camera 5 passes through the lens 6. The side mirror image is collected (as shown in Figure 4);

The information processing subsystem 141 in the industrial computer subsystem 14 splices the collected images of the front and both sides of the workpiece 2 to be tested, eliminates the overlapping parts between each other, and then forms an image containing the sequence information of each image after re-sampling and fusion. Large field of view, complete, high-definition new images;

The next step is to preprocess the spliced image to remove irrelevant information such as interference and noise in the image, and enhance the detectability of real information, thereby simplifying the data to the greatest extent and improving the overall detection accuracy and real-time performance;

Finally, the defect detection algorithm is used to detect the surface defects of the preprocessed workpiece image, and the defective parts are identified and marked, thereby reducing the defective rate of the product.

Example 2

A working state of the present invention is shown in FIG. 6 . The size of the workpiece to be tested 2 and the detection requirements change. After calculation, it is necessary to adjust the pose of the camera 5, the distance between the camera 5 and the first prism 72 and the second prism 73, and select the ring shape. Light source 15. Therefore, the adaptive control subsystem 142 sends signals to the Z-direction displacement device 3 and the X-direction displacement device 4 to adjust the pose of the camera 5 in the X and Z directions respectively, so that the area to be detected is in the center of the field of view and then the X and Z directions are fixed. ; Send a signal to the first motor 10 again through the adaptive control subsystem 142 and rotate the first screw 9 to adjust the distance between the camera 5 and the prism to ensure that the size of the field of view and the imaging area are complete; The data are collected and transmitted to the information processing subsystem 141 in the industrial computer subsystem 14 through the communication interface 51 for surface defect detection, and the defect area is marked.

Although the embodiments disclosed in the present invention are as above, the content described is only an embodiment adopted to facilitate understanding of the present invention, and is not intended to limit the present invention. Any person skilled in the art to which the present invention belongs, without departing from the spirit and scope disclosed by the present invention, can make any modifications and changes in the form and details of the implementation, but the scope of patent protection of the present invention, The scope as defined by the appended claims shall still prevail.

Claims (7)

1. A multi-faceted imaging visual inspection system, said system comprising: the system comprises a camera, a lens module, a light source bracket, a first screw rod, a connecting plate and an industrial personal computer subsystem;

the camera is fixed on the connecting plate and used for adjusting the distance between the imaging component and the lens module in real time;

the camera is connected with the industrial personal computer subsystem and is used for transmitting the collected front image of the workpiece and the mirror image of the workpiece to be detected, which is formed by the prism, to the industrial personal computer subsystem for analysis and processing;

the lens is arranged right below the camera, is connected with the lens module and is used for collecting reflected light of the surface of the workpiece to be measured and focusing the reflected light on the camera;

the light source bracket is assembled at the first connecting rod and used for bearing the upper imaging device and bearing different types of light sources.

2. The multi-faceted imaged visual inspection system of claim 1,

the connecting plate is assembled on a first screw rod through a screw, and the first screw rod is arranged above the light source bracket;

the lens module is assembled on the upper part of the light source bracket through a screw;

the light source bracket is fixed on the sliding block through a first connecting rod;

the industrial personal computer subsystem is located in a centralized control room outside the equipment.

3. The multi-faceted imaging vision inspection system of claim 1, wherein said lens module includes a sleeve, a first prism clamp, a first rotating handle, a second prism clamp, a second rotating handle, and a filter; the lens module is connected with the upper imaging device and used for providing mirror images of all surfaces of a workpiece to be detected, and the first rotating handle and the second rotating handle are used for respectively locking the first prism and the second prism to prevent angular deviation, so that the field of view is changed; the sleeve is assembled on the light source support through screws and used for protecting the internal prism and reducing imaging interference, the first prism clamping block and the second prism clamping block are respectively fixed on the inner wall of the sleeve, and the filter is used for protecting each optical device from being damaged.

4. The multi-faceted imaging vision inspection system of claim 1, wherein said light source support includes an upper support plate, a first support block, a second support block;

four mutually vertical linear clamping grooves are formed in the upper side supporting plate, and a screw is assembled in the lead of each linear clamping groove; the first supporting block is arranged on the first screw rod and the second screw rod through nuts, and the second supporting block is arranged on the third screw rod and the fourth screw rod through nuts; the positions of the screws on the four linear clamping grooves of the upper side supporting plate can be adjusted according to the size of the light source, and similarly, the first supporting block and the second supporting block can adapt to the height of the light source in the Z direction and the width requirement of the light source in the X direction by adjusting the four screws, so that the light source is fixed.

5. The multi-faceted imaging vision inspection system of claim 1, wherein said industrial personal computer subsystem includes an information processing subsystem and an adaptive control subsystem and is connected to said camera through said communication interface.

6. A method for visual inspection of multi-faceted imaging, said method comprising:

sending a signal to an X-direction displacement device through a self-adaptive control subsystem to move a camera to a certain position and then fixing the camera, and enabling a workpiece to be detected to be positioned in the center of an image;

sending a corresponding signal to the Z-direction displacement device through the self-adaptive control subsystem, adjusting the working distance between the imaging device and the workpiece to be measured to be within a certain range, and then fixing the working distance;

designing a view field range according to the size of the area to be detected, and sending a corresponding signal to a first motor to rotate a first screw rod through a self-adaptive control subsystem to adjust the height in a small range in the Z direction;

according to the size of the light source needed by the workpiece to be detected, the light source support is adjusted to adapt to the light source, then the light source is turned on to irradiate the surface of the workpiece to be detected, and the camera collects the mirror images of the front surface of the workpiece and the two side surfaces of the workpiece in the prism through the lens.

7. The multi-faceted imaged visual inspection method of claim 6,

splicing the collected images on the front side and the two side surfaces of the workpiece by the information processing subsystem, eliminating overlapped parts existing among the images, and forming a new image which is large in view field, complete and high in definition and contains sequence information of each image after resampling and fusing;

preprocessing the spliced image, removing irrelevant information such as interference and noise in the image, and enhancing the detectability of real information;

and performing surface defect detection on the preprocessed workpiece image by using a defect detection algorithm, and identifying and marking the defect part, thereby reducing the defective rate of the product.

Images