CN113333942A - Machining head with laser focus automatic focusing function and machining method thereof - Google Patents
Machining head with laser focus automatic focusing function and machining method thereof Download PDFInfo
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- CN113333942A CN113333942A CN202110459068.6A CN202110459068A CN113333942A CN 113333942 A CN113333942 A CN 113333942A CN 202110459068 A CN202110459068 A CN 202110459068A CN 113333942 A CN113333942 A CN 113333942A
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- 238000003754 machining Methods 0.000 title claims abstract description 54
- 238000000034 method Methods 0.000 title claims abstract description 14
- 239000000523 sample Substances 0.000 claims abstract description 44
- 230000003287 optical effect Effects 0.000 claims abstract description 22
- 230000001681 protective effect Effects 0.000 claims abstract description 20
- 238000012545 processing Methods 0.000 claims description 43
- 230000033001 locomotion Effects 0.000 claims description 22
- 230000000007 visual effect Effects 0.000 claims description 16
- 238000007664 blowing Methods 0.000 claims description 7
- 230000009471 action Effects 0.000 claims description 6
- 239000000428 dust Substances 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 230000008859 change Effects 0.000 description 5
- 238000003672 processing method Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- 230000010354 integration Effects 0.000 description 3
- 238000003698 laser cutting Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
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- 230000007246 mechanism Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention provides a machining head with a laser focus automatic focusing function and a machining method thereof, and solves the problems that the existing laser focus automatic focusing mode is low in focusing precision, cannot realize a real-time focusing function when a five-axis machine tool moves according to a track, and cannot realize surface following machining of a complex component. The machining head comprises a first double-swing-shaft hollow motor, a first reflector, a second double-swing-shaft hollow motor, a head optical unit and a control unit; the first double-swing-shaft hollow motor, the first reflector, the second double-swing-shaft hollow motor and the head optical unit are sequentially arranged on an emergent light path of the laser beam; in the head optical unit, the reflector base is arranged at the output end of the second double-pendulum shaft hollow motor, the second reflector is arranged in the reflector base, the voice coil motor is arranged on the reflector base, the focusing mirror connecting piece is arranged inside the reflector base and connected with the output shaft of the voice coil motor, and the dichroic mirror, the focusing mirror, the protective mirror and the capacitance sensor probe are sequentially arranged on the focusing mirror connecting piece.
Description
Technical Field
The invention belongs to the field of laser processing, and particularly relates to a processing head with an automatic laser focus focusing function and a processing method thereof.
Background
The laser processing technology has the advantages of non-contact, approximate cold processing, no pollution, wide material applicability and the like, and becomes a key processing technology in the fields of aviation, aerospace, navigation, automobiles and the like. For large complex components, due to the defects of deformation, inconsistent size and the like during machining, the laser focus is required to be ensured to follow the surface of a workpiece in real time, and therefore the machining head capable of realizing automatic laser focus following becomes a key device for high-precision machining.
Chinese patent CN2019113866715 discloses an anti-collision control method and an anti-collision control device for a laser cutting head, the method generates a capacitance sensing signal between a sensing component on the laser cutting head and a workpiece, and sends a corresponding obstacle avoidance signal to a driving motor or a braking mechanism when the capacitance sensing signal exceeds a threshold value, so as to avoid the laser cutting head from directly colliding with an obstacle. However, this method does not transmit the value of the capacitance sensing signal to the numerical control system, and cannot adjust the position of the laser processing head.
Chinese patent CN201310244879X discloses an automatic focusing device and an automatic focusing method for a laser marking machine, which automatically focus in a visual manner, and automatically control the adjustment of the focal length by acquiring the position information of a marked object, however, the method relies on visual image focusing, the focusing precision is low, the focal position completely depends on the Z axis of the machine tool, the real-time focusing function of a five-axis machine tool during movement according to a track cannot be realized, and the following processing of the surface of a complex component cannot be realized.
In practical engineering application, various laser focus following modes are available, however, at present, laser automatic focusing mainly depends on a Z axis to drive a laser processing head to realize focusing. In the process of five-axis linkage machining, the movement of the Z axis can cause the coordinate change of other axes to realize specific machining, and the function of a numerical control system can be realized only by special requirements, so that the existing laser focus automatic focusing mode is not suitable for application scenes such as five-axis linkage curved surface machining and the like.
Disclosure of Invention
The invention aims to solve the problems that the existing laser focus automatic focusing mode is low in focusing precision, the focus position is completely realized by depending on the Z axis of a machine tool, the real-time focusing function of a five-axis machine tool in track motion cannot be realized, and further the surface following processing of a complex component cannot be realized, and provides a processing head with a laser focus automatic focusing function and a processing method thereof.
In order to achieve the purpose, the invention adopts the following technical scheme:
a machining head with a laser focus automatic focusing function comprises a first double-swing-shaft hollow motor, a first reflector, a second double-swing-shaft hollow motor, a head optical unit and a control unit; the first double-swing-shaft hollow motor, the first reflector, the second double-swing-shaft hollow motor and the head optical unit are sequentially arranged on an emergent light path of the laser beam; the first double-pendulum-shaft hollow motor is used for realizing the rotation of the first reflector, the second double-pendulum-shaft hollow motor and the head optical unit in the direction of the axis C, and the second double-pendulum-shaft hollow motor is used for realizing the rotation of the head optical unit in the direction of the axis A; the head optical unit comprises a reflecting mirror seat, a second reflecting mirror, a voice coil motor, a focusing mirror connecting piece, a dichroic mirror, a focusing mirror, a protective mirror and a capacitance sensor probe; the reflecting mirror seat is arranged at the output end of the second double-pendulum shaft hollow motor and can rotate in the A-axis direction, the second reflecting mirror is arranged in the reflecting mirror seat and used for guiding laser beams, the voice coil motor is arranged on the reflecting mirror seat, the focusing mirror connecting piece is arranged in the reflecting mirror seat and connected with an output shaft of the voice coil motor, and the dichroic mirror, the focusing mirror, the protective mirror and the capacitance sensor probe are sequentially arranged on the focusing mirror connecting piece and positioned on a reflecting light path of the second reflecting mirror; the voice coil motor is positioned on one side of the axis of the second double-pendulum shaft hollow motor, and meanwhile, the dichroic mirror, the focusing mirror, the protective mirror and the capacitance sensor probe are positioned on the other side of the axis of the second double-pendulum shaft hollow motor, so that the load center of the second double-pendulum shaft hollow motor is coincided with the axis of the second double-pendulum shaft hollow motor; the capacitance sensor probe feeds back relative position information between the machining head and a workpiece in real time and transmits the position information to the control unit, the control unit controls the action of the voice coil motor according to the position information fed back by the capacitance sensor probe, and the voice coil motor drives the dichroic mirror, the focusing mirror, the protective mirror and the capacitance sensor probe to move, so that the adjustment of a laser focus is realized, and the follow-up machining of the machining head is further realized.
Further, the laser positioning device further comprises a measuring unit, wherein the measuring unit comprises a CCD camera, the CCD camera is arranged on one side of the laser beam emergent light path, the visual light path of the CCD camera is coaxial with the laser light path, and the CCD camera is used for marking the position of the laser focus in the visual interface.
Furthermore, the CCD camera is connected with an output shaft of the voice coil motor through a focusing mirror connecting piece.
Furthermore, a blowing device is arranged on the focusing mirror connecting piece, and dust and plasma generated by processing are removed by high-pressure gas through the blowing device.
Furthermore, a counterweight device is arranged on the body of the voice coil motor, so that the weights on two axial sides of the second double-pendulum-shaft hollow motor are matched.
Further, the focusing mirror connecting piece is of a sleeve structure, and the dichroic mirror, the focusing mirror, the protective mirror and the capacitance sensor probe are arranged inside the focusing mirror connecting piece.
Meanwhile, the invention also provides a processing method based on the processing head with the laser focus automatic focusing function, which comprises the following steps:
step one, mounting a head optical unit on a processing head, and fixedly connecting a voice coil motor, a reflector seat and a second double-pendulum-axis hollow motor;
placing the workpiece on a workbench, adjusting the positions of the first double-swing-shaft hollow motor and the second double-swing-shaft hollow motor, and adjusting the position of the workpiece at the same time until the position error of the workpiece is within a required range;
inputting the processing track of the workpiece into a control unit;
calibrating the distance relationship between the capacitance sensor probe and the workpiece;
fifthly, in the machining process, the laser focus is positioned on the surface of a workpiece, the probe of the capacitance sensor feeds back the relative position information between the machining head and the workpiece in real time and transmits the position information to the control unit, and the control unit controls the motion of the voice coil motor according to the position information fed back by the probe of the capacitance sensor to realize the adjustment of the laser focus;
and sixthly, performing five-axis interpolation on the five axes of the machine tool to realize the scanning of a machining track, and adjusting the position of a laser focus in real time by the voice coil motor according to the deformation of the workpiece to realize the machining of the whole workpiece.
Further, between the first step and the second step, the method also comprises the following steps: and searching a laser focus, and adjusting the coaxial visual image plane to enable the laser focus to coincide with the imaging image plane.
Compared with the prior art, the invention has the following beneficial effects:
1. the voice coil motor motion of the machining head and the X/Y/Z/A/C motion of the machine tool are not influenced mutually, so that the five-axis interpolation of the machine tool is carried out along a specific track to realize five-axis machining, if the local part of a workpiece is inconsistent with a three-dimensional model before machining, the motion axis of the machine tool is kept unchanged, the high-precision position regulation and control of a laser focus can be realized by driving the voice coil motor, the real-time following of the laser focus is realized, and the surface following machining of a complex component is further realized.
2. The voice coil motor, the focusing lens, the protective lens, the CCD camera, the capacitance sensor probe, the mounting structure of the capacitance sensor probe and other parts of the processing head are positioned at two sides of the axis of the second double-pendulum-shaft hollow motor, so that the load center of the second double-pendulum-shaft hollow motor is basically positioned near the axis of the second double-pendulum-shaft hollow motor, the structural size and the weight of the processing head are reduced, and the dynamic performance and the integration level of the second double-pendulum-shaft hollow motor are improved.
3. The laser processing head of the invention integrates the coaxial visual observation function, can be used for the calibration of the laser focus and the accurate alignment of the workpiece in the workpiece coordinate system, and improves the reference alignment accuracy of the workpiece.
4. The processing head of the invention can improve the robustness of the structure.
Drawings
Fig. 1 is a schematic structural view of a machining head having an autofocus function for a laser focus according to the present invention.
Reference numerals: 1-laser beam, 2-first double-pendulum shaft hollow motor, 3-first reflecting mirror, 4-second double-pendulum shaft hollow motor, 4, 5-voice coil motor, 6-reflecting mirror base, 7-second reflecting mirror, 8-focusing mirror connecting piece, 9-CCD camera, 10-dichroic mirror, 11-visual light path, 12-focusing mirror, 13-protective mirror, 14-capacitance sensor probe, 15-laser focus, 16-XY motion platform, 17-control unit, 18-blowing device and 19-workpiece.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
The invention provides a processing head with a laser focus automatic focusing function and a processing method thereof, wherein when a five-axis of a machine tool is subjected to real-time interpolation along a specific track to realize five-axis processing, if the local part of a workpiece is inconsistent with a three-dimensional model before processing, the motion axis of the machine tool can be kept unchanged, high-precision position regulation and control of a laser focus can be realized through a voice coil motor and a capacitance sensor probe, further, the surface following processing of a complex component is realized, the motion of the voice coil motor and the motion of the X/Y/Z/A/C of the machine tool are not influenced mutually during the following processing, and the problem of precise processing of the surface pattern of the complex or large-deformation component can be solved.
As shown in fig. 1, the machining head with the laser focus automatic focusing function of the invention comprises a first double-pendulum-shaft hollow motor 2, a first reflector 3, a second double-pendulum-shaft hollow motor 4, a head optical unit, a control unit 17 and a measuring unit; the first double-swing-shaft hollow motor 2, the first reflector 3, the second double-swing-shaft hollow motor 4 and the head optical unit are sequentially arranged on an emergent light path of laser; the first double-swing-shaft hollow motor 2 is used for achieving rotation of the first reflecting mirror 3, the second double-swing-shaft hollow motor 4 and the head optical unit in the C-axis direction, the second double-swing-shaft hollow motor 4 is used for achieving rotation of the head optical unit in the A-axis direction, the machining head is controlled through the control unit 17, and five-axis linkage machining can be achieved through combination of the three-axis motion platform.
The head optical unit comprises a reflecting mirror seat 6, a second reflecting mirror 7, a voice coil motor 5, a focusing mirror connecting piece 8, a dichroic mirror 10, a focusing mirror 12, a protective mirror 13 and a capacitance sensor probe 14; the reflecting mirror seat 6 is arranged on the second double-pendulum shaft hollow motor 4 and can rotate in the A-axis direction, the second reflecting mirror 7 is arranged in the reflecting mirror seat 6 and used for guiding the laser beam 1, the voice coil motor 5 is arranged on the reflecting mirror seat 6, the focusing mirror connecting piece 8 is arranged inside the reflecting mirror seat 6 and connected with the output end of the voice coil motor 5, and the dichroic mirror 10, the focusing mirror 12, the protective mirror 13 and the capacitance sensor probe 14 are sequentially arranged on the focusing mirror connecting piece 8 and located on a reflecting light path of the second reflecting mirror 7; the voice coil motor 5 is positioned on one side of the axis of the second double-pendulum shaft hollow motor 4, and meanwhile, the dichroic mirror 10, the focusing mirror 12, the protective mirror 13 and the capacitance sensor probe 14 are positioned on the other side of the axis of the second double-pendulum shaft hollow motor 4, so that the load center of the second double-pendulum shaft hollow motor 4 is coincided with the axis of the second double-pendulum shaft hollow motor. In addition, the invention can be provided with a counterweight device on the body of the voice coil motor 5, so that the weights of two axial sides of the second double-pendulum shaft hollow motor 4 are matched. The focusing lens connecting piece 8 can be specifically set to be of a sleeve structure, the dichroic mirror 10, the focusing lens 12, the protective lens 13 and the capacitance sensor probe 14 are arranged inside the focusing lens connecting piece 8, a blowing device 18 can be further arranged on the focusing lens connecting piece 8, and dust and plasma generated in processing are removed by high-pressure gas through the blowing device 18, so that the lenses are prevented from being polluted.
The capacitance sensor probe 14 feeds back the relative position information between the machining head and the workpiece 19 in real time, and transmits the position information to the control unit 17, the control unit 17 controls the movement of the voice coil motor 5 according to the position information fed back by the capacitance sensor probe 14, and the voice coil motor 5 drives the dichroic mirror 10, the focusing mirror 12, the protective mirror 13 and the capacitance sensor probe 14 to move, so that the adjustment of the laser focus 15 is realized, and the follow-up machining of the machining head is further realized.
The measuring unit comprises a CCD camera 9, the CCD camera 9 is connected with the output end of the voice coil motor 5 through a focusing mirror connecting piece 8, the CCD camera 9 is arranged on one side of a laser emergent light path, and a visual light path 11 of the CCD camera is coaxial with the laser light path and used for marking the position of a laser focus 15 in a visual interface.
The second reflector 7 of the head of the processing head is used for guiding the laser beam 1, so that the laser beam 1 enters the center of the focusing mirror 12 for focusing, and the position of the focusing mirror 12 determines the position of the laser focus 15. The reflecting mirror seat 6 is connected with the second double-pendulum shaft hollow motor 4, meanwhile, the voice coil motor 5 is connected with the reflecting mirror seat 6 and located on one side of the axis of the second double-pendulum shaft hollow motor 4, the focusing mirror 12, the protective mirror 13, the measuring unit and the capacitance sensor probe 14 are assembled together through a mechanical structure and directly fixedly connected to the voice coil motor 5, the part of the structure is located on the other side of the axis of the second double-pendulum shaft hollow motor 4, and the voice coil motor 5 can drive the focusing mirror 12 and other components to move, so that the adjustment of the laser focus 15 is achieved. According to the invention, the voice coil motor 5 is arranged on one side of the axis of the second double-pendulum-shaft hollow motor 4, and the focusing mirror 12, the CCD camera 9 and other components are positioned on the other side of the axis of the second double-pendulum-shaft hollow motor 4, so that the working load eccentricity of the motor is reduced as much as possible, the structural size and the total weight of a processing head are greatly reduced, and the dynamic performance and the integration level of the motor are greatly improved.
The capacitance sensor probe 14 of the laser processing head and the workpiece 19 form a capacitance structure, the change of the distance between the capacitance sensor probe 14 and the workpiece 19 causes the change of capacitance, the capacitance sensor probe 14 feeds back a relative position signal between the capacitance sensor probe and the workpiece 19 to the control unit 17 in real time, the control unit 17 responds to a sending signal at a high speed to control the movement of the voice coil motor 5, the rapid adjustment of the laser focus 15 is realized, and the precise processing of the surface pattern of a complex or large-deformation structure is realized. When the workpiece 19 has deformation or local defects, the five-axis machining track of the machine tool can be kept unchanged, the laser focus 15 can follow the surface of the workpiece 19 in real time by using the voice coil motor 5, and the flexibility and the robustness of the five-axis laser machining tool are improved. The device does not need to consider the clear aperture of the voice coil motor 5, does not occupy the space of a laser light path, has small and simple occupied space, and is very suitable for high-precision adjustment of a laser focus 15 in laser processing equipment. After the position of the laser focus 15 is aligned, the value of the marking capacitance sensor at the moment is zero, and the value is recorded as the position of the laser focus 15, so that the searching speed of the laser focus 15 is high, and the searching precision is high. Because the visual light path 11 of the CCD is coaxial with the laser light path, the position of the laser focus 15 in the visual interface is marked, so that the searching precision of the laser focus 15 is further improved, meanwhile, the coordinate of the reference point on the workpiece 19 can be quickly searched by using the visual interface, and the processing efficiency and the positioning precision of the workpiece 19 are improved.
Meanwhile, the invention also provides a processing method of the processing head with the laser focus automatic focusing function, which comprises the following steps:
step one, a head optical unit is installed on a machining head, a voice coil motor 5, a reflector base 6 and a mover of a second double-pendulum shaft hollow motor 4 are fixedly connected through screws or mechanical structures, and a focusing mirror 12, a dichroic mirror 10, a CCD camera 9, a capacitance sensor probe 14 and the like are fixedly connected to an action part of the voice coil motor 5 through a focusing mirror connecting piece 8, so that the action of the voice coil motor 5 can realize the change of a laser focus 15;
step two, searching a laser focus 15, and adjusting a coaxial visual image plane to enable the laser focus 15 to coincide with an imaging image plane;
thirdly, after the workpiece 19 is placed on the XY motion platform 16, adjusting the first double-pendulum-axis hollow motor 2 and the second double-pendulum-axis hollow motor 4 to specific positions, searching for an error between a reference characteristic and a zero position of the workpiece 19 through coaxial vision, and adjusting the position of the workpiece 19 until the position error of the workpiece 19 is within a required range;
step four, outputting a machining program by post-processing software aiming at the machining track of the surface of the workpiece 19;
fifthly, calibrating the relation between the value of the capacitive sensor and the distance between the probe and the workpiece 19 thereof, and providing a parameter curve for the subsequent action of the voice coil motor 5;
sixthly, in the machining process, the laser focus 15 is located on the surface of the workpiece 19, the capacitance sensor probe 14 keeps a certain distance from the surface of the workpiece 19, the laser machining head moves according to a program to form a track, when the workpiece 19 has deformation or local defects, the distance between the surface of the workpiece 19 and the capacitance sensor probe 14 changes, the distance change value is sent to the voice coil motor 5 controller through the capacitance sensor controller, the voice coil motor 5 is controlled to move, and the position adjustment of the laser focus 15 is realized;
and seventhly, performing five-axis interpolation on five axes of the machine tool to realize the motion of the space track, and adjusting the position of the laser focus 15 by the voice coil motor 5 in real time according to the deformation of the workpiece 19 to realize the machining of the whole workpiece 19.
The voice coil motor 5 and the reflector seat 6 are connected into a whole, so that the angular motion amount of the second reflector 7 and the voice coil motor 5 is kept consistent, and the processing precision is improved. Meanwhile, a focusing mirror 12, a protective mirror 13, a CCD camera 9, a capacitance sensor probe 14 and a mounting structure thereof are fixedly connected to an action part of the voice coil motor 5, and the voice coil motor 5 can realize the up-and-down movement of the components along the transmission direction of the laser beam 1, so that the movement of the laser focus 15 along the direction of the laser beam 1 is realized. In addition, the voice coil motor 5, the focusing mirror 12, the protective mirror 13, the CCD camera 9, the capacitance sensor probe 14, the installation structure of the capacitance sensor probe and the like are respectively arranged on two sides of the axis of the hollow motor, so that the load center of the hollow motor is basically positioned near the axis of the hollow motor, the structural size and the weight of a processing head are reduced, and the dynamic performance and the integration level of the hollow motor are improved. The structure can improve the robustness of the structure; when the load of the direct drive motor is distributed on one side of the rotating shaft of the direct drive motor, the offset of the gravity center of the load enables servo gain parameters of the motor at each position to be inconsistent, and the working stability and precision of the motor are influenced. By adopting the structure, the load weight distribution of the motor can be balanced, the center of gravity of the load is basically positioned at the rotation axis of the motor, the servo gain of each position is basically consistent, and the working stability and the precision of the motor are greatly improved.
Because the laser focus 15 has a certain focal depth, when the distance between the workpiece 19 and the laser focus 15 exceeds a certain range, the laser does not have the processing capacity, the invention realizes the real-time following of the laser focus 15 through the voice coil motor 5, and avoids the occurrence of defects in the processing process; the motion of the voice coil motor 5 and the motion of the machine tool X/Y/Z/A/C are not influenced mutually, so that when a five-axis of the machine tool performs real-time interpolation along a specific track to realize five-axis machining, when the local part of a workpiece 19 is inconsistent with a three-dimensional model processed before and after machining, a post-processing program can be kept unchanged, the position of the laser focus 15 is regulated and controlled by driving the voice coil motor 5, and the real-time following of the laser focus 15 is realized.
The laser processing head of the invention integrates the coaxial visual observation function, can be used for the calibration of the laser focus 15 and the accurate alignment of the workpiece in the workpiece coordinate system, and improves the reference alignment accuracy of the workpiece.
Claims (8)
1. A machining head with a laser focus autofocus function, comprising: the head optical unit comprises a first double-swing-shaft hollow motor (2), a first reflector (3), a second double-swing-shaft hollow motor (4), a head optical unit and a control unit (17);
the first double-swing-shaft hollow motor (2), the first reflector (3), the second double-swing-shaft hollow motor (4) and the head optical unit are sequentially arranged on an emergent light path of the laser beam (1); the first double-pendulum-shaft hollow motor (2) is used for realizing the rotation of the first reflector (3), the second double-pendulum-shaft hollow motor (4) and the head optical unit in the direction of a shaft C, and the second double-pendulum-shaft hollow motor (4) is used for realizing the rotation of the head optical unit in the direction of a shaft A;
the head optical unit comprises a reflector seat (6), a second reflector (7), a voice coil motor (5), a focusing mirror connecting piece (8), a dichroic mirror (10), a focusing mirror (12), a protective mirror (13) and a capacitance sensor probe (14);
the reflecting mirror seat (6) is arranged at the output end of the second double-pendulum shaft hollow motor (4) and can rotate in the A-axis direction, the second reflecting mirror (7) is arranged in the reflecting mirror seat (6) and used for guiding the laser beam (1), the voice coil motor (5) is arranged on the reflecting mirror seat (6), the focusing mirror connecting piece (8) is arranged inside the reflecting mirror seat (6) and connected with an output shaft of the voice coil motor (5), and the dichroic mirror (10), the focusing mirror (12), the protective mirror (13) and the capacitance sensor probe (14) are sequentially arranged on the focusing mirror connecting piece (8) and are positioned on a reflecting light path of the second reflecting mirror (7); the voice coil motor (5) is positioned on one side of the axis of the second hollow double-pendulum shaft motor (4), and meanwhile, the dichroic mirror (10), the focusing mirror (12), the protective mirror (13) and the capacitance sensor probe (14) are positioned on the other side of the axis of the second hollow double-pendulum shaft motor (4), so that the load center of the second hollow double-pendulum shaft motor (4) is superposed with the axis of the second hollow double-pendulum shaft motor;
the relative position information between the processing head and a workpiece (19) is fed back by the capacitance sensor probe (14) in real time, the position information is transmitted to the control unit (17), the control unit (17) controls the action of the voice coil motor (5) according to the position information fed back by the capacitance sensor probe (14), the voice coil motor (5) drives the dichroic mirror (10), the focusing mirror (12), the protective mirror (13) and the capacitance sensor probe (14) to move, the adjustment of a laser focus is realized, and the following processing of the processing head is further realized.
2. The machining head with the laser focus autofocus function as claimed in claim 1, wherein: the laser focus measuring device is characterized by further comprising a measuring unit, wherein the measuring unit comprises a CCD camera (9), the CCD camera (9) is arranged on one side of an emergent light path of the laser beam (1), and a visual light path (11) of the CCD camera is coaxial with the laser light path and used for marking the position of the laser focus in a visual interface.
3. The machining head with the laser focus autofocus function as claimed in claim 2, wherein: the CCD camera (9) is connected with an output shaft of the voice coil motor (5) through a focusing mirror connecting piece (8).
4. The machining head with the laser focus autofocus function of claim 1, 2, or 3, wherein: and the focusing mirror connecting piece (8) is provided with an air blowing device (18), and high-pressure air is used for removing dust and plasma generated by processing through the air blowing device (18).
5. The machining head with the laser focus autofocus function as claimed in claim 4, wherein: and a counterweight device is arranged on the body of the voice coil motor (5), so that the weights of two axial sides of the second double-pendulum shaft hollow motor (4) are matched.
6. The machining head with the laser focus autofocus function of claim 5, wherein: the focusing lens connecting piece (8) is of a sleeve structure, and the dichroic mirror (10), the focusing lens (12), the protective lens (13) and the capacitive sensor probe (14) are arranged inside the focusing lens connecting piece (8).
7. A machining method of a machining head with an automatic laser focus focusing function according to any one of claims 1 to 6, comprising the steps of:
step one, mounting a head optical unit on a processing head, and fixedly connecting a voice coil motor, a reflector seat and a second double-pendulum-axis hollow motor;
placing the workpiece on a workbench, adjusting the positions of the first double-swing-shaft hollow motor and the second double-swing-shaft hollow motor, and adjusting the position of the workpiece at the same time until the position error of the workpiece is within a required range;
inputting the processing track of the workpiece into a control unit;
calibrating the distance relationship between the capacitance sensor probe and the workpiece;
fifthly, in the machining process, the laser focus is positioned on the surface of a workpiece, the probe of the capacitance sensor feeds back the relative position information between the machining head and the workpiece in real time and transmits the position information to the control unit, and the control unit controls the motion of the voice coil motor according to the position information fed back by the probe of the capacitance sensor to realize the adjustment of the laser focus;
and sixthly, performing five-axis interpolation on the five axes of the machine tool to realize the scanning of a machining track, and adjusting the position of a laser focus in real time by the voice coil motor according to the deformation of the workpiece to realize the machining of the whole workpiece.
8. The process of claim 7, wherein: between the first step and the second step, the method also comprises the following steps: and searching a laser focus, and adjusting the coaxial visual image plane to enable the laser focus to coincide with the imaging image plane.
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