CN106563880A - Multi-light source, multi-function and multi-axis laser processing head and apparatus - Google Patents
Multi-light source, multi-function and multi-axis laser processing head and apparatus Download PDFInfo
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- CN106563880A CN106563880A CN201610922220.9A CN201610922220A CN106563880A CN 106563880 A CN106563880 A CN 106563880A CN 201610922220 A CN201610922220 A CN 201610922220A CN 106563880 A CN106563880 A CN 106563880A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
- B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention discloses a laser processing head and a multi-light source, multi-function and multi-axis processing apparatus comprising the same. The laser processing head includes a shell, an optical path system, a locating conical disk-shaped connecting mechanism, a laser range finder, a motor driving mechanism and a dust collection protection cover. The laser processing head has the advantages of a plurality of processing modes, flexibility in laser selection and easiness in replacement. The multi-light source, multi-function and multi-axis processing apparatus includes an apparatus control and operation system platform, a multi-axis linkage numerically-controlled machine tool and the laser processing head; the laser processing head is fixed on a high-precision multi-axis linkage machine tool through a blade handle type positioning cone device; and large-breadth and cross-scale laser fine processing only requires the switching of a laser light source, a laser optical path and the laser processing head, so that at least three kinds of large complex component fine surface processing application can be realized. The multi-light source, multi-function and multi-axis processing apparatus is especially for the aerospace field. The laser processing head and the multi-light source, multi-function and multi-axis processing apparatus comprising the same of the invention have the advantages of low manufacturing cost, wide application range, convenience in mass production and the like.
Description
Technical field
The invention belongs to technical field of laser processing, and in particular to a kind of multiple light courcess, multi-functional, multiaxis laser processing
And equipment.
Technical background
In aerospace three-dimensional complex component Precision Machining, there are a large amount of irregular surface component surface pattern systems
Make, size is repaired and milling quarter type demand, its common feature is surface fine processing, scantling is generally several meters, manufacture essence
Degree reaches some tens of pm, and material is different, belongs to " complex-curved across the yardstick " manufacture of typical different materials.Traditional multiaxis machine
Tool processing method machining accuracy and concordance difference and production efficiency is extremely low, it is difficult to meet application request.
For example, select table (FSS) antenna radar cover and the solid surface antenna of spacecraft anti-in guided missile and radome of fighter frequency
Emitter aspect, manufacture size is typically from 0.3～3m, but working image size required precision reaches 10～20 μm of magnitude.
The conventional molding process of existing frequently-used FSS antenna houses has two kinds, and one kind is indirect transfer method, on a thin film substrate using plating
Film, flexible FSS films are lithographically derived, are then transferred on antenna house.But when FSS film piecemeals are covered in antenna house surface, splicing is missed
Difference etc. causes FSS periodic microstructures integrity and accuracy to be destroyed, and directly affects antenna house wave transparent performance and Stealth Fighter,
Cause larger with designing technique index difference, it is impossible to meet model technical requirement.Another kind is digitized machining, should
Method difficult point is the control of the design of system of processing and machining accuracy and mechanical stress, in processing the accumulation of various errors and
Deformation can have a strong impact on the transmission characteristic of FSS antenna houses.
The hollow blade ceramics core finishing technology of aircraft engine is always one of key technology in hollow blade casting, it
Determine performance and the life-span of the dimensional accuracy, qualification rate and casting cost and aircraft engine of blade.With starting
The development of machine technology, the air cooling structure of blade tends to complicating, as formed the ceramic core of hollow blade air cooling structure also by
Gradually thin-walled property, complex structure.Such as the feature of double-layer ceramic core：Groove, post, hole, chamber etc. are due to complex structure, thin-walled (0.6-
1.0mm) cause size core finishing difficulty larger, existing artificial mechanical's core finishing means cannot ensure precision, cause low precision and efficiency
It is low, it is difficult to meet prescription.
The type lightweight of milling quarter is the difficulties of Aero-Space and weaponry manufacture, is to improve rocket, guided missile to have an high regard for
Than and combination property important channel.However, now domestic generally using Traditional Man quarter type technique.Due to artificial quarter type mistake
Error accumulation is larger in journey, it is impossible to which automatization, working (machining) efficiency is low, and the process-cycle is long, it is impossible to ensure accessory size accuracy and
Concordance, it is difficult to ensure that glued membrane carves disconnected, does not injure parent metal and the required precision needed for trim line, while also needing to a large amount of
Quarter pattern plate.
Laser due to focal beam spot diameter it is little, energy density is high, noncontact procession (without tool wear), flexible journey
Degree is high, without mask the features such as, be especially suitable for difficult-to-machine material：Ultra-soft, superhard, super special material and the various complexity such as crisp, ultra-thin
Shape microfabrication.But, it is right because the optical characteristics and physico-chemical properties of above-mentioned rapidoprint have larger difference
Optical maser wavelength, waveform and power have different requirements.Prior art can only adopt single lasing light emitter, it is difficult to reach to above-mentioned all
Material can carry out precision machined purpose.If equipped for above-mentioned a certain Precision Machining using a three-dimensional laser processing
Using then must could meet three of the above application using the three-dimensional laser processing equipment of multiple stage difference optical maser wavelength light source will
Ask, cause the three-dimensional laser processing equipment cost intensive developed, range of application is single, it is impossible to the problem of batch production.
The content of the invention
Repair and milling quarter type for the various materials of above Aero-Space and complex component picture on surface Precision Machining, size
Great demand, the present invention proposes a kind of multiple light courcess, multi-functional, multiaxis laser processing and equipment, it is therefore an objective at one plus
Various Laser focus systems such as ceramics, metal, the accurate cutting of Metal polymer composite, etching are realized on construction equipment
Function is made, and while ensures Precision Machining manufacture dimensional accuracy and prescription.
A kind of laser Machining head proposed by the present invention, including housing (51), light path system, locating cone plate-like bindiny mechanism,
Laser range finder (20), motor-driven mechanism (18) and dust suction protective cover (22)；Wherein：
The housing (51) offers outside laser light well, optical-fiber laser light well, light hole and range finding hole；Light hole
With range finding hole position in laser Machining head housing bottom surface, light well, light hole and range finding hole are respectively used to outside laser light incident, optical fiber
Laser and laser range finder detection light pass through after laser light incident, focusing；
The light path system is used for laser shaping and makes it project processing focal plane, is selected according to different wave length laser
With the optics of matching, it is integrated in different laser Machining heads；Light path system can flexible disassembling, assembling and replacing, with suitable for different ripples
Long laser；
The locating cone plate-like bindiny mechanism (17) is installed on outside the wall of housing (51) side, is connected for fixing with Digit Control Machine Tool
Connect, different laser Machining heads can be by the flexible disassembling, assembling and replacing of locating cone plate-like bindiny mechanism (17)；Locating cone plate-like bindiny mechanism
(17) middle part is provided with light hole, and the hole is just right with hull outside laser light well, for outside laser feed-in processing head；
The laser range finder (20) is interior installed in housing (51), the detection laser beam and reflection laser of its outgoing during work
Shu Jun is found range hole by housing bottom surface, the hot spot of the detection laser beam of laser range finder outgoing on Laser Processing focal plane with swash
Light processing hot spot overlaps, and for Laser Measurement focal plane height tolerance is processed；
The motor-driven mechanism (18) is internal installed in housing (51), for driving light path system and laser range finder to exist
The normal direction movement of surface of the work；
The dust suction protective cover (22) is installed positioned at laser Machining head bottom around housing (51) light-emitting window, by with it is outer
The connection of portion sweep-up pipe to siphon away the course of processing in the flue dust that produces and prevent laser from leaking, protection working environment health and prevent people
Member damages.
Further, the laser Machining head hull outside is provided with optical fiber laser.
Further, the light path system has two kinds of working methods：
Dynamic focusing mode：Light path system includes 90 ° of reflecting mirrors and focus lamp, installed in laser Machining head case inside
Wall, the incident laser beam of light well first pass around it is parallel after 90 ° of reflecting mirrors reflections incide focus lamp, laser beam is gathered by it
Jiao, Jing light holes project surface of the work；
3-D scanning mode：Light path system includes 90 ° of reflecting mirrors, two-dimensional high speed scanning galvanometer and field mirrors, is arranged on
Enclosure interior, the incident laser beam of light well first pass around it is parallel after 90 ° of reflecting mirrors reflections enter to inject scanning galvanometer, then pass through
Field mirror is focused on, and by light hole surface of the work is projected.
According to aforesaid laser Machining head, a kind of multiple light courcess, multi-functional and multiaxis laser accurate manufacturing equipment, the dress are proposed
Put and also include equipment control operating system platform, multi-shaft linkage numerical control machine；Wherein：
The equipment control operating system is constituted based on PC, for controlling multi-shaft linkage numerical control machine and laser Machining head
Overall operation, including but not limited to realize irregular block planning, the Machining of Curved Surface pattern precision of large complicated carved model
Compensation, machining path analog simulation and anticollision real time monitoring function；
The multi-shaft interlocked main frame bed adopts the high accuracy linkage numerical control machine of at least five axles, including X, Y, Z three-dimensional straight
Line shifting axle, rotary shaft C and swinging axle A；The laser Machining head is arranged on swinging axle A；The multi-shaft linkage numerical control machine
Z axis on be reserved with installation gas laser and its light path system position, plus man-hour, can be selected use gas according to material behavior
The optical fiber laser that laser instrument or processing head inside are installed；
In use, when being worked using dynamic focusing mode, laser Machining head action under Digit Control Machine Tool drive, laser light
The movement of speckle is by Digit Control Machine Tool control；Laser is entered from laser casing incidence hole, and the shaping of Jing light path systems is focused on, by housing bottom
Light-emitting window in portion's dust suction protective cover is projected, and focuses on surface of the work；The laser range finder sends laser, is found range by shell
Hole projects surface of the work, measures workpiece height data, sends into equipment control operating system, real-time by equipment control operating system
Adjustment focal spot height realizes that dynamic tracking is focused on to surface of the work；
When being worked using 3-D scanning mode, laser Machining head action under Digit Control Machine Tool drive, laser facula movement
Controlled by two-dimensional high speed scanning galvanometer；Laser is entered from laser casing incidence hole, reflected mirror, scanning galvanometer and field lens, Jing
Projected by housing bottom dust suction protective cover, focus on surface of the work；The laser range finder sends laser, is found range hole by shell
Surface of the work is projected, workpiece height data are measured, equipment control operating system is sent into, it is burnt by the adjustment of equipment control operating system
Point height.
Further, the multi-shaft linkage numerical control machine is planer-type five-axis machine tool.
Further, the laser Machining head also includes light beam sensing/power detection module, for pointing to laser beam
Real-time monitoring is carried out with laser power；Light beam sensing/power detection module is arranged on the rear portion of 90 ° of reflecting mirrors in light path system,
The fraction of laser light transmitted from 90 ° of reflecting mirrors enters to inject the detection window of light beam sensing/power detection module, realizes to laser
Light beam is pointed to and laser power carries out real-time monitoring.For the light source, multi-functional and multiaxis laser accurate manufacturing equipment, monitoring
As a result in being fed back to equipment control operating system；Equipment control operating system is analyzed to testing result, if light beam sensing/
Power meets the requirements, then do not adjust；If light beam sensing is undesirable, instruction is sent, mechanism adjusts by beam-pointing correction
90 degree of reflecting mirrors of section change laser propagation direction；If light beam power is undesirable, sent by equipment Control System adjustment
Laser power size instruction laser power is adjusted, realize closed loop feedback adjust.
Further, the laser instrument is ultrafast or nanosecond optical fiber laser.
The present invention is by the fiber optic laser source and CO of different wave length2Lasing light emitter, the optimization of respective light path, control and transmission positioning
The laser Machining head of system and different cooked mode, is integrated on a multi-shaft interlocked main frame bed, forms a multiple light courcess, many
The complex component surface of function and multiaxis is across the fine manufacturing equipment of the efficient laser of yardstick.How to design the different laser optical paths of realization it
Between it is non-interference, being switched fast between different processing heads is realized, while locating and machining when ensureing to change different laser Machining heads
Precision and repetitive positioning accuracy are that the difficult point of the present invention is located.The equipment also has on-line monitoring with compensation, light beam space simultaneously
The modules such as high-speed transfer positioning, light beam space sensing/power real time correction, it is ensured that Precision Machining manufactures dimensional accuracy and quality will
Ask.
Multi-shaft interlocked main frame bed used of the invention is five axles and above high accuracy linkage numerical control machine.It is provided with swinging axle
Knife handle type attachment means, can respectively from be attached using the laser Machining head of different cooked modes and different laser Source Types,
Facilitate the exactitude position between various laser Machining heads and be switched fast.
Laser Machining head light source used of the invention can be using optical fiber laser or CO2Laser instrument, wherein optical fiber laser bag
Containing nanosecond or ultrafast (psec, femtosecond) optical fiber laser.The laser Machining head of two kinds of different type laser instrument can be using three-dimensional
Scanning or two kinds of processing modes of dynamic focusing, so as to constitute the laser Machining head of four types：(1) three-dimensional scanning type optical-fiber laser
Processing head；(2) dynamic focusing formula optical-fiber laser processing head；(3) three-dimensional scanning type CO2Laser Machining head；(4) dynamic focusing formula CO2
Laser Machining head.
Nanosecond and ultrafast optical fiber laser and respective light path system are separately mounted on respective processing head, CO2Swash
Light device and its light path system are arranged on the Z axis for vertically moving of 5-shaft linkage numerical control lathe, when each processing head is changed
Light path is fixed, and respective optic path positioning is non-interference.
Dynamic focusing formula laser Machining head (the optical-fiber laser processing head of formula containing dynamic focusing and dynamic focusing formula CO2Laser adds
Foreman) it is along workpiece normal direction travel mechanism, dust suction protective cover and positioning by auto-focusing dynamic regulation system and focal plane
Taper knife handle bindiny mechanism composition 1 ties up processing head, and by locating cone plate-like attachment means the pendulum of multi-shaft linkage numerical control machine is fixed on
On moving axis A, " N+1 " axle laser profile track cooked mode is capable of achieving；
Three-dimensional scanning type laser Machining head (processing head of optical-fiber laser containing three-dimensional scanning type and three-dimensional scanning type CO2Laser adds
Foreman) be by two-dimensional high speed scanning galvanometer, auto-focusing dynamic regulation system, focal plane along workpiece normal direction travel mechanism and
The three axis machining head of locating cone plate-like bindiny mechanism composition, by locating cone plate-like attachment means 5-shaft linkage numerical control machine is fixed on
On the swinging axle A of bed, " 5+3 " axle laser three-D high-velocity scanning cooked mode is capable of achieving.
By height intellectuality overall control software, on-line automatic focusing and positioning, projection scanning etch path optimization,
Line is monitored and the function such as compensation, by multi-shaft linkage numerical control machine, multiple light courcess, two kinds of cooked modes knife handle type laser Machining head system
System is integrated into a multiple light courcess, multi-functional, multiaxis laser across the efficient laser accurate manufacturing equipment of yardstick.Different type is laser machined
Head can according to different materials processing actual demand switching, realize large format, across yardstick laser finely etch, cutting processing,
Replace traditional five shaft mechanicals and laser processing.
In aerospace field, typical large format, the fine lithography of across yardstick laser include complex component metal film
The formula laser ablation processing of layer tripleplane and the fine core finishing processing of hollow blade internal model laser, laser fine cut processing includes three
Vygen belongs to the processing of milling part laser incising type.
Because the component that aerospace complex surface complex figure makes is by metallic diaphragm and optical fiber epoxy resin
Organic composite material is constituted, using to metal material absorbance, preferably, the near-infrared higher to organic composite material absorbance is received
Second, the three-dimensional scanning type optical-fiber laser processing head of ultrafast fiber optic laser source, are connected with the swinging axle A of gantry five-axis machine tool, realize
Complex component surface complex figure " 5+3 " axle laser three-D high-velocity scanning Precision Machining.
For electromotor hollow blade ceramic laser core finishing, because laser ablation is a kind of contactless, mechanical cutting force
Processing mode, be adapted to ultra-soft, the processing of superhard, the super difficult processing material such as crisp, ultra-thin, without tool wear problem, and fixture is only
It is responsible for supporting positioning, without rigid requirements, is particularly well-suited to complex-shaped and thin-walled fusing point height, the electromotor that hardness is big and quality is crisp
Ceramic core for hollow vane core finishing technology.Additionally, being obtained using ultrafast pulsed laser, laser focusing hot spot is little and gasification is gone
Except ceramic material mechanism, the removal precision of sub-micrometer scale is realized.So, machining accuracy is high, little to workpiece heat affected area, is difficult
Core local is caused to deform, it is easy to ensure ceramic core size and dimension precision, realization carries out essence to ceramic core structure division
It is thin to repair.Therefore, for the precision size of curve ceramic core is repaired, using ultrafast optical fiber laser, by dynamic focusing formula light
Fine laser Machining head or three-dimensional scanning type optical-fiber laser processing head are connected with the swinging axle A of gantry five-axis machine tool, are capable of achieving " 5+1 "
The accurate etching in axle ultrafast laser three-D profile track or " 5+3 " axle ultrafast laser three-dimensional high-speed scanning precision etching size core finishing should
With.
For the processing of aerospace complex component milling laser incising type, due to the Protection glue of alloying metal thin-walled milling part
Polyvinyl resin and butadiene-styrene rubber synthetic rubber or natural rubber class material are generally fallen into, is 10.6 μm of CO to wavelength2Swash
The absorbance close 100% of light device, and it is higher to near-infrared fibre-optical laser absorbance.And the CO of titanium and aluminium alloy to 10.6 μm2
The absorbance of laser instrument is only 8% or so, but higher to near-infrared fibre-optical laser absorption rate.Protect thoroughly to reach laser incising
Glue, but metal parts surface purpose is not damaged, using CO2Lasing light emitter is LASER Light Source the most suitable.By dynamic focusing formula or
Three-dimensional high-speed scanning formula CO2Laser Machining head is connected with the swinging axle A of gantry five-axis machine tool, realizes complex component surface protective glue
" 5+1 " axle CO2Laser three-D profile traces precision quarter type or " 5+3 " axle CO2Laser three-D high-velocity scanning precision quarter type, replaces and passes
Artificial mechanical's quarter type of system.
In sum, multiple light courcess, multi-functional, multiaxis are one the characteristics of the efficient laser precision machining method of yardstick and equipment
The fine manufacturing equipment of universal high-end laser is planted, rather than tailored version is equipped, and only need to pass through LASER Light Source, laser optical path and laser
The switching of processing head, you can realize at least more than three kinds complex large-scale component fine surface processed and applieds of Aero-Space.Therefore, should
Invention equipment has low cost of manufacture, and applied range, modular organization is easy to the advantages of producing in batches.
Description of the drawings
Fig. 1 be multiple light courcess, multi-functional, multiaxis across the efficient laser accurate manufacturing equipment of yardstick exemplary construction schematic diagram；
Fig. 2 is dynamic focusing formula CO2Laser Machining head structural representation；
Fig. 3 is dynamic focusing formula CO2Laser Machining head light path schematic diagram；
Fig. 4 is three-dimensional scanning type CO2Laser Machining head structural representation；
Fig. 5 is three-dimensional scanning type CO2Laser Machining head light path schematic diagram；
Fig. 6 is dynamic focusing formula optical-fiber laser processing head structural representation；
Fig. 7 is dynamic focusing formula optical-fiber laser processing head light path schematic diagram；
Fig. 8 is three-dimensional scanning type optical-fiber laser processing head structural representation；
Fig. 9 is three-dimensional scanning type optical-fiber laser processing head light path schematic diagram.
Specific embodiment
The specific embodiment of the present invention is described further below in conjunction with the accompanying drawings.Here it should be noted that for
The explanation of these embodiments is used to help understand the present invention, but does not constitute limitation of the invention.Additionally, disclosed below
As long as the present invention each embodiment in involved technical characteristic do not constitute conflict each other and just can be mutually combined.
As shown in figure 1, a kind of multiple light courcess, multi-functional, multiaxis that present example is provided are across the efficient laser accurate system of yardstick
Make equipment, including equipment control operating system platform 1, planer-type five-axle linkage high-precision numerical control machine 50 and interchangeable blades shank type
The three parts of laser Machining head 60.Equipment control operating system 1 is made up of computer, control electrical equipment, operating platform.Responsible control
The overall fortune of the laser Machining head of the planer-type five-axis machine tool, different wave length laser instrument and different cooked modes of operating equipment processed
OK.The base 2 of planer-type five-axis machine tool 50 is fixed on outfit of equipment on ground, and base is equipped with damping and stabilising arrangement, can
Trickle vibrations are filtered, strengthens the stability of equipment, it is ensured that the degree of accuracy of processing.High accuracy rectilinear movement axle 6 is the 1st of equipment
Axle (Z axis), is responsible for driving interchangeable blades shank type laser Machining head 60 along Z-direction movement and solid by position-limit mechanism 9 and baffle plate 10
(for equipment Y-axis) on high accuracy the 2nd axle 5 of rectilinear movement, the 2nd axle 5 drives Z axis and interchangeable blades shank type laser Machining head 60
Move along the direction of Y.Y-axis 5 is fixed on high accuracy the 3rd axle 3 of rectilinear movement (for equipment X-axis), the 3rd axle 3 by bindiny mechanism 4
Y-axis, Z axis and interchangeable blades shank type laser Machining head 60 is driven to move in X direction together.High-precision rotary C axles 12 are equipment the 4th
Axle, by column connecting elements 11 Z axis end is fixed on, and is responsible for the axle centered on Z axis of interchangeable blades shank type laser Machining head 60,
360 ° of rotations in high precision.High-precision swing A axles 15 are the 5th axle of equipment, are consolidated by column bindiny mechanism 13 and guiding mechanism 14
On high-precision rotary axle 12, it is responsible for driving the axle centered on Y-axis of interchangeable blades shank type laser Machining head 60 to carry out ± 180 °
High-precision swing (as shown in Figure 2).Locating cone set plate-like bindiny mechanism 16 is fixed on high-precision swing A axles 15, be responsible for can
Exchange the coaxial positioning of the high accuracy of knife handle type laser Machining head 60 and connect and dismounting, realize the interchangeable handle of a knife of different cooked modes
The concentric positioning handoff functionality of the high accuracy of formula laser Machining head 60.CCD optical detections alignment system 40 is arranged on A axles lower end, with A
Axle swings, and realizes Laser Processing optical detection positioning function.
Interchangeable blades shank type laser Machining head 60 has the laser Machining head of four kinds of Laser Processing patterns.First laser processing mould
Formula is CO2Dynamic Laser focuses on cooked mode, the first locating cone plate-like bindiny mechanism 17 for through hole and CO by center2Laser adds
Foreman 19 constitutes (as shown in Figure 2).First locating cone plate-like bindiny mechanism 17 is used for and the coupling of locating cone set plate-like bindiny mechanism 16
Close, realize that interchangeable blades shank type laser Machining head 60 is connected with the high accuracy of five-axis machine tool 50.
CO2Laser instrument 7 and CO2Optical system 8 is fixed on high precision movement Z axis 6, with Z axis 6 along Z direction move (see
Shown in Fig. 1).CO2Laser instrument 7 is responsible for the CO that output wavelength is 10.6 μm2Laser beam, its optical axis and the axis coinciding of Z axis, pass through
After the beam-expanding collimation of optical system 8 and shaping, the guiding of the joint position being connected with swinging axle installed in Digit Control Machine Tool Z axis is input to
The center of circular polarization reflecting mirror 35 (see shown in Fig. 2 and Fig. 3) in mechanism 14, polarization light is carried out repairing is biased into round polarization light, eliminates
The directivity deviation of Laser Processing, can improve crudy.Circular polarization reflecting mirror 35 is by CO290 ° of reflections of laser beam import CO2Swash
99% reflecting mirror 37 in light processing head 19.Digit Control Machine Tool beam-pointing correction mechanism 34 is fixed on circular polarization reflecting mirror 35,
By finely tuning circular polarization reflecting mirror 35, it is ensured that point to the center of 99% reflecting mirror 37 in laser beams space.99% reflecting mirror 37 will
99%CO290 ° of laser power is reflexed on the surface of focus lamp 21, is focused onto on the surface of workpiece to be processed 23.Remaining 1% CO2
Laser power is transmitted through in the light beam sensing/power detection module 38 in 99% reflecting mirror dead astern, for laser beam
Sensing/power carries out real-time monitoring, and monitoring result is fed back in equipment CAD system.CAD system is carried out point to testing result
Analysis, if light beam sensing/power meets the requirements, is not adjusted；If light beam sensing/power is undesirable, CAD system sends finger
Order, controls respectively beam-pointing correction mechanism 34 and CO2Laser instrument 7 is finely adjusted school to laser propagation direction and laser power
Just, realize that closed loop feedback real-time regulation is corrected, it is ensured that Laser Processing precision and quality.The function of laser range finder 20 is to supervise in real time
Survey laser focusing point position, and and CO2Laser condensing lens 21 are fixed on together in motor-driven mechanism 18 (for the 6th of equipment the
Axle).When laser spot is set in workpiece to be processed surface, once laser range finder 20 monitors that laser spot deviate from workpiece
23 surfaces, immediately pass through motor-driven mechanism 18 and rapidly adjust back to laser spot on the surface of workpiece 23, realize that auto-focusing is moved
State regulatory function.The function of dust suction protective cover 22 be siphon away in the course of processing produce flue dust and prevent laser from leaking, protect work
Make environmental health and prevent personal damage.
Gantry five-axis linkage numerical control lathe 50 is covered into plate-like bindiny mechanism 16 by the locating cone of A axles, with interchangeable
First locating cone plate-like bindiny mechanism 17 of laser Machining head 60 is of coupled connections fixation, you can obtain (5+1) axle CO2Laser three-D
Accurate milling quarter type equipment, realizes three-dimensional milling laser profile track quarter type Protection glue application.
Second cooked mode of interchangeable blades shank type laser Machining head 60 is three-dimensional CO2Laser high-speed scanning machining head,
By the second locating cone plate-like bindiny mechanism 29 and CO2Laser three-dimensional scanning processing head 51 and dust suction protective cover 54 are constituted (see Fig. 4
It is shown).CO2Laser three-dimensional scanning processing head 51 is by 99% reflecting mirror 37, laser power detection module 38, guide-lighting mirror 58,2 Vc O2
Laser scanning galvanometer 55, telecentric scanning focus lamp 57, laser range finder 20 and edge processing surface of the work normal direction are moved up and down
Mechanism 56 constitutes (see shown in Figure 4 and 5).Guide-lighting mirror 58, CO2Laser scanning galvanometer 55, telecentric scanning focus lamp 57 and Laser Measuring
Distance meter 20 is fixed in travel mechanism 56, can be moved up and down along processing surface of the work normal direction with travel mechanism 56.2 Vc O2
2 axles of laser scanning galvanometer 55 are processed the composition three-dimensional laser of 23 surface normal direction reciprocating mechanism of workpiece 56 and are swept at a high speed with edge
Retouch 3 axles (equipment the 6th, 7,8 axles).
CO2The output wavelength of laser instrument 7 is 10.6 μm of CO2Laser beam, it is defeated after the beam-expanding collimation of optical system 8 and shaping
Enter to the center of circular polarization reflecting mirror 35 (see shown in Fig. 1 and Fig. 5) in guiding mechanism 14, polarization light is carried out repairing to be biased into
Circle polarization light, eliminates the directivity deviation of Laser Processing.Circular polarization reflecting mirror 35 is by CO290 ° of reflections of laser beam import CO2Laser
99% reflecting mirror 37 in 3-D scanning processing head 51.Beam-pointing correction mechanism 34 is fixed on circular polarization reflecting mirror 35, is led to
Cross fine setting circular polarization reflecting mirror 35, it is ensured that point to the center of 99% reflecting mirror 37 in laser beams space.99% reflecting mirror 37 will
99%CO290 ° of laser power is reflexed on guide-lighting mirror 52, by 90 ° of importing CO2In laser scanning galvanometer 55, Jing telecentric scannings are focused on
Mirror 57 is focused on the surface of workpiece to be processed 23.Remaining 1% CO2Laser power is transmitted through positioned at 99% reflecting mirror dead astern
In light beam sensing/power detection module 38, for pointing to laser beam/power carries out real-time monitoring, and monitoring result is anti-
In being fed to equipment CAD system.CAD system is analyzed to testing result, if light beam sensing/power meets the requirements, does not adjust；
If light beam sensing/power is undesirable, CAD system sends instruction, and beam-pointing correction mechanism 34 and CO are controlled respectively2Swash
Light device 7 is finely adjusted correction to laser propagation direction and laser power, realizes that closed loop feedback real-time regulation is corrected, it is ensured that laser adds
Work precision and quality.The function of laser range finder 20 is real-time monitoring laser focusing point position.When laser spot be set in it is to be added
During work 23 surface of workpiece, once laser range finder 20 monitors that laser spot deviate from the surface of workpiece 23, moving machine is immediately passed through
Structure 56 rapidly adjusts back to laser spot on the surface of workpiece 23, realizes auto-focusing dynamic regulation function.Dust suction protective cover 54
Function is to siphon away the flue dust that produces in the course of processing and prevent laser from leaking, and protection and prevents personal damage at working environment health.
Gantry five-axis linkage numerical control lathe 50 is covered into plate-like bindiny mechanism 16 by the locating cone of A axles, with interchangeable
Second locating cone plate-like bindiny mechanism 29 of laser Machining head 60 is of coupled connections fixation, you can obtain (5+3) axle CO2Laser three-D
Accurate milling quarter type equipment, realizes three-dimensional milling laser high-speed scanning quarter type Protection glue application.
The third cooked mode of interchangeable blades shank type laser Machining head 60 is optical fiber laser dynamic focusing cooked mode, by
3rd locating cone plate-like bindiny mechanism 27, optical-fiber laser processing head 40, laser transmission fiber 46, laser beam optimization optical system 41
Constitute (see Fig. 6 institutes with optical fiber laser (comprising continuous or nanosecond, ultrafast pulse optical fiber laser) 47 and dust suction protective cover 42
Show).Optical-fiber laser processing head 40 is fixed on the plate-like bindiny mechanism side of the 3rd locating cone plate-like bindiny mechanism 27, and laser beam is excellent
Change optical system 41 and optical fiber laser 47 is separately mounted to the both sides of optical-fiber laser processing head 40, by the phase of laser transmission fiber 46
Connect.Optical-fiber laser processing head 40 is by 99% reflecting mirror 44, laser power detection module 43, focus lamp 48, laser range finder
20 and constitute (as shown in Figure 7) along processing surface of the work normal direction reciprocating mechanism 45.
Its operation principle is the outgoing laser beam of optical fiber laser 47, through laser transmission fiber 46, is input to laser beam excellent
Changing optical system 41 carries out after beam-expanding collimation and shaping correction optimization, importing to 99% reflecting mirror in optical-fiber laser processing head 40
44 centers, by 99% 90 ° of laser power focus lamp 48 is reflexed to, and is focused onto on the surface of workpiece to be processed 23.Remaining 1%
Laser power is transmitted through in the power detection module 43 in 99% reflecting mirror dead astern, for detecting to laser power.
Once laser power shifts, power detection module 43 will output offset amount to optical fiber laser 47, rapidly by laser work(
Rate adjusts back to set-point, it is ensured that Laser Processing dimensional accuracy and quality.The function of laser range finder 20 is that real-time monitoring laser gathers
Focal position, and be fixed on together with laser condensing lens 48 and (be along processing surface of the work normal direction reciprocating mechanism 45
6th axle of equipment).When laser spot is set in 23 surface of workpiece to be processed, once laser range finder 20 monitors that laser is burnt
Point deviate from the surface of workpiece 23, and immediately passing through travel mechanism 45 rapidly adjusts back to laser spot on the surface of workpiece 23, realize certainly
Dynamic focusing dynamic regulation function.The function of dust suction protective cover 42 be siphon away in the course of processing produce flue dust and prevent outside laser
Let out, protect working environment health and prevent personal damage.
Plate-like bindiny mechanism 16 is covered by the 3rd locating cone plate-like bindiny mechanism 27 with locating cone on Digit Control Machine Tool to couple, it is real
Existing interchangeable blades shank type laser Machining head 60 is connected with the high accuracy of five-axis machine tool 50, you can obtain (5+1) axle optical-fiber laser
Three-dimensional precise etching equipment, realizes the accurate etching core finishing application of three-dimensional ceramic core profile traces.
4th kind of cooked mode of interchangeable blades shank type laser Machining head 60 is three-dimensional fiber laser high-speed scanning machining mould
Formula, by the 4th locating cone plate-like bindiny mechanism 28, three-dimensional laser high-velocity scanning processing head 70, laser transmission fiber 46, laser beam
Optimization optical system 41 and optical fiber laser (comprising continuous or nanosecond, ultrafast pulse optical fiber laser) 47 and dust suction protective cover
74 compositions are (as shown in Figure 8).Three-dimensional laser high-velocity scanning processing head 70 is fixed on the disk of the 4th locating cone plate-like bindiny mechanism 28
Shape bindiny mechanism side, laser beam optimization optical system 41 and optical fiber laser 47 are separately mounted to three-dimensional laser high-velocity scanning and add
The both sides of foreman 70, are connected with each other by laser transmission fiber 46.Three-dimensional laser high-velocity scanning processing head 70 by 99% reflecting mirror 44,
Laser power detection module 43, the guide-lighting dimension of mirror 80,2 high-velocity scanning galvanometer 77, telecentric scanning focus lamp 78, the and of laser range finder 20
Constitute along processing surface of the work normal direction reciprocating mechanism 81.2 axles of 2 dimension high-velocity scanning galvanometers 77 and edge processing workpiece table
Face normal direction reciprocating mechanism 81 constitute three-dimensional laser high-velocity scanning 3 axles (equipment the 6th, 7,8 axles).
Fig. 9 provides its operation principle, and the outgoing laser beam of optical fiber laser 47, through laser transmission fiber 46, is input to sharp
Beam optimum optical system 41 is carried out after beam-expanding collimation and shaping correction optimization, in importing three-dimensional laser high-velocity scanning processing head 70
The center of 99% reflecting mirror 44, by 99% near-infrared laser power reflection to the guide-lighting center of mirror 80, by guide-lighting mirror 80 by laser
Beam imports to 2 dimension high-velocity scanning galvanometers 77, is focused on the surface of workpiece to be processed 23 by telecentric scanning focus lamp 78.Remaining 1%
Near-infrared laser power transmission to be located at 99% reflecting mirror dead astern power detection module 43 in, for entering to laser power
Row detection.Once laser power shifts, power detection module 43 will output offset amount to optical fiber laser 46, rapidly will
Laser power adjusts back to set-point, it is ensured that Laser Processing dimensional accuracy and quality.The function of laser range finder 20 is real-time monitoring
Laser focusing point position, and with the dimension of guide-lighting mirror 80,2 high-velocity scanning galvanometer 77 and be fixed on edge together with telecentric scanning focus lamp 78
On processing surface of the work normal direction reciprocating mechanism 81.When laser spot is set in 23 surface of workpiece to be processed, once
Laser range finder 20 monitors that laser spot deviate from the surface of workpiece 23, immediately passes through travel mechanism 81 and rapidly adjusts laser spot
Return on the surface of workpiece 23, realize auto-focusing dynamic regulation function.The function of dust suction protective cover 74 siphons away processing and produces
Flue dust simultaneously prevents laser from leaking, and protects working environment health and prevents personal damage.
The A axles of gantry five-axis linkage numerical control lathe 50 are accessed into the 4th processing of interchangeable blades shank type laser Machining head 60
Pattern：Three-dimensional laser high-velocity scanning processing head.Plate-like is covered with locating cone by the 4th locating cone plate-like bindiny mechanism 28 and is connected machine
Structure 16 is coupled, and realizes that interchangeable blades shank type laser Machining head 60 is connected with the high accuracy of five-axis machine tool 50, you can obtained (5+3)
The accurate etching equipment of axle laser three-D high-velocity scanning, realizes that complex-curved across yardstick laser high-speed scans three-dimensional precise showing methods
With ceramic core accurate etching core finishing application.
Example
Example one
In Aero-Space typical part picture on surface laser accurate lithography, the material of piece surface pattern-making leads to
The multiple structure of layer of metal film layer is often plated in glass fiber compound material carrier surface, due to the fusing point and evaporation temperature of metal
Degree is far above composite ignition temperature, while laser ablation metallic diaphragm, it is difficult to avoid carrier surface of burning.In this example
In, adopt wavelength for 1064nm nanosecond optical fiber laser as lasing light emitter, (5+3) the accurate etching of axle laser three-D high-velocity scanning
Equip and the multiple structure that glass fiber compound material carrier surface plates the μ m-thick copper film layer of last layer 17 complex-curved is projected
Formula high speed three-dimensional scanning machining.Laser scanning etching parameters are adopted for nanosecond laser output 30W, repetition rate
400kHz, laser pulse width 100ns, laser spot on metal film layer surface, fill out by laser galvanometer scanning speed 1000mm/s, laser
Overlapping rate 30% is filled, coordinates the automatic of equipment to be capable of achieving the laser accurate lithography of piece surface to poly- dynamic regulation function,
Copper film layer to be processed is completely removed, and removed metallic diaphragm edge-smoothing, the defect such as impulse- free robustness, ablation.Graphics processing and
Position dimension error is respectively less than 20 μm, and carrier composite material is not burnt, and its surface is examined under a microscope without ablated area, and
There is not deformation in part overall (including composite and metallic diaphragm), and removal effect is good.
Example two
At thin-walled milling part quarter in type of Aero-Space complex component, needing to meet laser must carve Protection glue but can not
Damage the requirement of metal base surface.In this example, (5+1) axle CO is adopted2Laser three-D precision milling quarter type equipment, to aviation
Titanium alloy starts the Protection glue after the 0.5mm of ring-like Thin-Wall Outer Casing milling part to carry out three-dimensional laser profile traces quarter type.Laser incising
Shape parameter is CO2Laser instrument exports continuous laser power 80W, and laser spot is located at Protection glue surface, laser incising type speed
200mm/s, coordinates the automatic to poly- dynamic regulation function of equipment, and achievable Protection glue carves completely connectionless, opens Protection glue
Afterwards, laser incising type Protection glue flush edge is smooth, the defect such as impulse- free robustness.Meanwhile, metal base surface is not carved wound, and its surface exists
Basis of microscopic observation is without ablated area, and deformation does not occur in part overall (including metallic matrix and protection glue-line), removes effect
It is really good.
Example three
In the laser of aviation complexity ceramic core component is repaired, ceramic core has complex-shaped and thin-walled feature, material
Material has fusing point height, the characteristic that hardness is big and quality is crisp, makes repairing precision reach 5 μm of orders of magnitude during reparation.This example is adopted
With the accurate etching equipment of (5+3) axle picosecond laser three-dimensional high-speed scanning, complex-curved across yardstick laser high-speed scanning ceramics are carried out
The accurate etching core finishing of core.Laser is adopted to repair ceramic core technological parameter for the psec optical fiber laser that wavelength is 1064nm,
Output 20W, repetition rate 200kHz, pulsewidth 150ps, laser spot is located at ceramic material surfaces to be repaired, coordinates equipment
It is automatic to poly- dynamic regulation function, be capable of achieving that laser three-D ceramic core is accurate to be repaired.After testing, its laser repair size is missed
Difference precision is less than 3 μm, and removal surface is smooth, and the defect such as non-microcracked, burr, ablation repairs effect good.
The above is presently preferred embodiments of the present invention, but the present invention should not be limited to the embodiment and accompanying drawing institute
Disclosure.So it is every without departing from the equivalent or modification completed under spirit disclosed in this invention, both fall within guarantor of the present invention
The scope of shield.
Claims (9)
1. a kind of laser Machining head, it is characterised in that including housing (51), light path system, locating cone plate-like bindiny mechanism, laser
Diastimeter (20), motor-driven mechanism (18) and dust suction protective cover (22)；Wherein：
The housing (51) offers outside laser light well, optical-fiber laser light well, light hole and range finding hole；Light hole and survey
Away from hole position in laser Machining head housing bottom surface, light well, light hole and range finding hole are respectively used to outside laser light incident, optical-fiber laser
Laser and laser range finder detection light pass through after incident, focusing；
The light path system is used for laser shaping and makes it project processing focal plane, according to the selection of different wave length laser
The optics matched somebody with somebody, is integrated in different laser Machining heads；Light path system can flexible disassembling, assembling and replacing, to swash suitable for different wave length
Light；
The locating cone plate-like bindiny mechanism (17) is installed on outside the wall of housing (51) side, for being fixedly connected with Digit Control Machine Tool,
Different laser Machining heads can be by the flexible disassembling, assembling and replacing of locating cone plate-like bindiny mechanism (17)；Locating cone plate-like bindiny mechanism (17)
Middle part is provided with light hole, and the hole is just right with hull outside laser light well, for outside laser feed-in processing head；
The laser range finder (20) is interior installed in housing (51), the detection laser beam and reflection laser Shu Jun of its outgoing during work
Found range hole by housing bottom surface, the hot spot of the detection laser beam of laser range finder outgoing on Laser Processing focal plane adds with laser
Work hot spot overlaps, and for Laser Measurement focal plane height tolerance is processed；
The motor-driven mechanism (18) is internal installed in housing (51), for driving light path system and laser range finder in workpiece
Move in normal to a surface direction；
The dust suction protective cover (22) is installed positioned at laser Machining head bottom around housing (51) light-emitting window, by inhaling with outside
Flue dust that dirt pipe is produced in connecting to siphon away the course of processing simultaneously prevents laser from leaking, and protection and prevents personnel from damaging at working environment health
Wound.
2. processing head according to claim 1, it is characterised in that is provided with optical fiber laser outside the housing (51).
3. processing head according to claim 1, it is characterised in that the light path system has two kinds of working methods：
Dynamic focusing mode：Light path system includes 90 ° of reflecting mirrors and focus lamp, installed in laser Machining head case inside wall, enters
The incident laser beam of unthreaded hole first pass around it is parallel after 90 ° of reflecting mirrors reflections incide focus lamp, by it by laser beam focus, Jing goes out
Unthreaded hole projects surface of the work；
3-D scanning mode：Light path system includes 90 ° of reflecting mirrors, two-dimensional high speed scanning galvanometer and field mirrors, installed in housing
Inside, the incident laser beam of light well first pass around it is parallel after 90 ° of reflecting mirrors reflections enter to inject scanning galvanometer, then be scanned through
Field lens is focused on, and by light hole surface of the work is projected.
4. optical fiber laser according to claim 2, it is characterised in that the optical fiber laser is ultrafast or nanosecond optical fiber swashs
Light device, exports laser and sends into from the optical-fiber laser light well of processing casing and swash work processing head.
5. laser Machining head according to claim 1, it is characterised in that the laser Machining head also includes light beam sensing/work(
Rate detection module, for carrying out real-time monitoring to laser beam sensing and laser power；Light beam sensing/power detection module is installed
The rear portion of 90 ° of reflecting mirrors in light path system, the fraction of laser light transmitted from 90 ° of reflecting mirrors enters to inject light beam sensing/power
The detection window of detection module, realizes pointing to laser beam and laser power carries out real-time monitoring.
6. the multiple light courcess of laser Machining head according to claim 1, multi-functional and multiaxis laser accurate manufacturing equipment, it is special
Levy and be, also including equipment control operating system platform, multi-shaft linkage numerical control machine；
The equipment control operating system is constituted based on PC, for controlling the whole of multi-shaft linkage numerical control machine and laser Machining head
Running body, including but not limited to realize large complicated carved model irregular block planning, Machining of Curved Surface pattern precision compensation,
Machining path analog simulation and anticollision real time monitoring function；
The multi-shaft linkage numerical control machine adopts the high accuracy linkage numerical control machine of at least five axles, including X, Y, Z 3 d-line
Shifting axle, rotary shaft C and swinging axle A；The laser Machining head is arranged on swinging axle A；The Z of the multi-shaft linkage numerical control machine
Installation gas laser and its light path system position, plus man-hour are reserved with axle, can be selected to swash using gas according to material behavior
Light device or optical fiber laser；
In use, when being worked using dynamic focusing mode, laser Machining head action under Digit Control Machine Tool drive, laser facula
Movement is by Digit Control Machine Tool control；Processing laser is entered from laser casing incidence hole, and the shaping of Jing light path systems is focused on, by housing bottom
Light-emitting window in portion's dust suction protective cover is projected, and focuses on surface of the work；The laser range finder sends range laser, by shell
Range finding hole projects surface of the work, measures workpiece height data, equipment control operating system is sent into, by equipment control operating system
The focal spot height of real-time adjustment processing laser realizes that dynamic tracking is focused on to surface of the work；
When being worked using 3-D scanning mode, laser Machining head action under Digit Control Machine Tool drive, laser facula movement is by two
Dimension high-velocity scanning galvanometer control；Processing laser is entered from laser casing incidence hole, reflected mirror, scanning galvanometer and field lens, Jing
Projected by housing bottom dust suction protective cover, focus on surface of the work；The laser range finder sends range laser, is surveyed by shell
Surface of the work is projected away from hole, workpiece height data are measured, equipment control operating system is sent into, is adjusted by equipment control operating system
The focal spot height of whole processing laser.
7. laser accurate manufacturing equipment according to claim 4, it is characterised in that the multi-shaft linkage numerical control machine is gantry
Formula five-axis machine tool.
8. the laser accurate manufacturing equipment according to claim 4 or 5, it is characterised in that the laser Machining head also includes light
Shu Zhixiang/power detection module, they are arranged on 90 ° of reflecting mirror rear portions；Light beam sensing/the power detection module is used for swashing
Light light beam is pointed to and laser power carries out real-time monitoring, and monitoring result is fed back in equipment control operating system；Equipment control
Operating system processed is analyzed to testing result, if light beam sensing/power meets the requirements, does not adjust；If light beam is pointed to not being inconsistent
Close and require, then send instruction, circular polarization reflecting mirror (35) is adjusted by laser Machining head external beam orientation-correcting mechanism (34)
Change laser propagation direction；If light beam power is undesirable, the laser power sent by equipment Control System adjustment is big
Little instruction is adjusted to laser power, realizes that closed loop feedback is adjusted.
9. the application of laser accurate manufacturing equipment according to claim 4, it is characterised in that it has four kinds of application models：
Pattern 1：For CO2Dynamic Laser focuses on cooked mode；Processing laser is CO2Laser instrument, laser instrument is preferably mounted on Z axis,
By the reflecting mirror reflection being fixed on inside machine Z-axis, from locating cone plate-like bindiny mechanism center light hole and processing casing
Outside laser light well enters processing head；The type of focusing is dynamic focusing, can be used for the non-gold such as metallic substrate surface resin, rubber
The three-D profile line tracking cutting processing of category material.
Pattern 2：For three-dimensional CO2Laser high-speed scanning machining；Processing laser is CO2Laser, the type of focusing is 3-D scanning, can be used
In three-dimensional precise cutting, the lithography of the nonmetallic materials such as metallic substrate surface resin, rubber.
Pattern 3：For optical fiber laser dynamic focusing cooked mode；Processing laser is optical-fiber laser, from accurate with optical fiber laser outgoing
The straight concentric optical-fiber laser light well of mirror enters processing head, and the type of focusing is dynamic focusing, can be used for the materials such as ceramics, metal
Three-dimensional precise high-speed cutting, lithography.
Pattern 4：For three-dimensional fiber laser high-speed scanning machining pattern；Processing laser is optical-fiber laser, and the type of focusing is swept for three-dimensional
Retouch, can be used for ceramics, metal, the three-dimensional precise pattern high speed lithography of the composite of metal-polymer composition.
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