CN106563880B - A kind of multiple light courcess, multi-functional, multiaxis laser Machining head and equipment - Google Patents

A kind of multiple light courcess, multi-functional, multiaxis laser Machining head and equipment Download PDF

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Publication number
CN106563880B
CN106563880B CN201610922220.9A CN201610922220A CN106563880B CN 106563880 B CN106563880 B CN 106563880B CN 201610922220 A CN201610922220 A CN 201610922220A CN 106563880 B CN106563880 B CN 106563880B
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laser
light
processing
machining head
hole
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CN106563880A (en
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段军
张菲
胡乾午
曾晓雁
蒋明
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046Automatically focusing the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0869Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B23K26/0884Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention discloses a kind of laser Machining head and its multiple light courcess including the processing head, multi-functional, multiaxis laser processing are equipped.The laser Machining head includes shell, light path system, locating cone plate-like bindiny mechanism, laser range finder, motor-driven mechanism and dust suction protective cover, has the characteristics that a variety of cooked modes, can flexible choice laser, readily replaceable.The multiple light courcess, multi-functional, multiaxis laser processing equipment include equipment control operating system platform, multi-shaft linkage numerical control machine and aforementioned laser processing head, laser Machining head positions wimble device by knife handle type and is fixed on the multi-shaft interlocked lathe of high-precision, carry out large format, the Laser focus across scale need to only pass through the switching of laser light source, laser optical path and laser Machining head, at least three kinds or more complex large-scale component fine surface processed and applieds can be realized, especially suitable for aerospace field.The advantages that present invention has manufacturing cost low, has a wide range of application, and is convenient for batch production.

Description

A kind of multiple light courcess, multi-functional, multiaxis laser Machining head and equipment
Technical field
The invention belongs to technical field of laser processing, and in particular to a kind of multiple light courcess, multi-functional, multiaxis laser processing And equipment.
Technical background
In the three-dimensional complex component Precision Machining of aerospace, there are a large amount of irregular surface component surface pattern systems Work, size is repaired and milling quarter type demand, and common feature is surface fine processing, and scantling is generally several meters, manufacture essence Degree reaches some tens of pm, and material is different, belongs to " complex-curved across the scale " manufacture of typical different materials.Traditional multiaxis machine Tool processing method machining accuracy and consistency difference and production efficiency it is extremely low, it is difficult to meet application request.
For example, it is anti-to consolidate surface antenna in guided missile and radome of fighter frequency selection table (FSS) antenna radar cover and spacecraft In terms of emitter, size is manufactured generally from 0.3~3m etc., but working image size required precision reaches 10~20 μm of magnitude. There are two types of the conventional molding process of existing frequently-used FSS antenna house, and one is indirect branch methods, on a thin film substrate using plating Film is lithographically derived flexible FSS film, is then transferred on antenna house.But when FSS film piecemeal is covered in antenna house surface, splicing is missed Difference etc. causes FSS periodic microstructures integrality and accuracy to be destroyed, and directly affects antenna house wave transparent performance and Stealth Fighter, It causes larger with designing technique index difference, is unable to satisfy model technical requirement.Another kind is digitlization machining, should Method difficult point is the design of system of processing and the control of machining accuracy and mechanical stress, in processing the accumulation of various errors and Deformation can seriously affect the transmission characteristic of FSS antenna house.
The hollow blade ceramics core finishing technology of aircraft engine is always one of the key technology in hollow blade casting, it Determine service performance and the service life of the vane size precision, qualification rate and casting cost and aircraft engine.With starting The development of machine technology, the air cooling structure of blade tend to complicate, as formed hollow blade air cooling structure ceramic core also by It is gradually thinning, structure is complicated changes.Such as feature of double-layer ceramic core: slot, column, hole, chamber are since structure is complicated, thin-walled (0.6- 1.0mm) cause size core finishing difficulty larger, existing artificial mechanism core finishing means not can guarantee precision, lead to low precision and efficiency It is low, it is difficult to meet quality requirement.
The type lightweight of milling quarter is the difficulties of aerospace and weaponry manufacture, is to improve rocket, guided missile to have an high regard for Than and comprehensive performance important channel.However, the country generallys use traditional artificial quarter type technique now.Due to artificial quarter type mistake Error accumulation is larger in journey, cannot automate, and processing efficiency is low, and the process-cycle is long, not can guarantee part size accuracy and Consistency it is difficult to ensure that glue film carves disconnected, required precision needed for not injuring parent metal and trim line, while also needing a large amount of Quarter pattern plate.
Laser is due to focal beam spot diameter is small, energy density is high, noncontact procession (no tool wear), flexible journey The features such as degree is high, without exposure mask, is very suitable to difficult-to-machine material: ultra-soft, superhard, super special material and the various complexity such as crisp, ultra-thin Shape microfabrication.But the optical characteristics and physico-chemical properties due to above-mentioned rapidoprint have biggish difference, it is right Optical maser wavelength, waveform and power have different requirements.The prior art can only use single laser source, it is difficult to reach to above-mentioned all Material can carry out precision machined purpose.If using a three-dimensional laser processing equipment for above-mentioned a certain Precision Machining Using then must being just able to satisfy three of the above application using the three-dimensional laser processing equipment of more different optical maser wavelength light sources and want It asks, causes the three-dimensional laser processing developed equipment expensive, application range is single, the problem of can not producing in batches.
Summary of the invention
For the above aerospace a variety of materials and complex component picture on surface Precision Machining, size is repaired and milling quarter type Great demand, the present invention proposes a kind of multiple light courcess, multi-functional, multiaxis laser processing and equipment, it is therefore an objective at one plus A variety of Laser focus systems such as ceramics, metal, the accurate cutting of Metal polymer composite, etching are realized on construction equipment Function is made, and guarantees Precision Machining manufacture dimensional accuracy and quality requirement simultaneously.
A kind of laser Machining head proposed by the present invention, including shell (51), light path system, locating cone plate-like bindiny mechanism, Laser range finder (20), motor-driven mechanism (18) and dust suction protective cover (22);Wherein:
The shell (51) offers external laser light well, optical-fiber laser light well, light hole and ranging hole;Light hole It is located at laser Machining head housing bottom surface with ranging hole, light well, light hole and ranging hole are respectively used to external laser light incident, optical fiber Laser and laser range finder detection light pass through after laser light incident, focusing;
The light path system is used for laser shaping and it is made to project processing focal plane, is selected according to different wave length laser With matched optical device, it is integrated in different laser Machining heads;Light path system can flexible disassembling, assembling and replacing, be suitable for different waves Long laser;
Locating cone plate-like bindiny mechanism (17) is installed on outside shell (51) side wall, connects for fixing with numerically-controlled machine tool It connects, different laser Machining heads can pass through locating cone plate-like bindiny mechanism (17) flexible disassembling, assembling and replacing;Locating cone plate-like bindiny mechanism (17) middle part is provided with light hole, and the hole and hull outside laser light well face are used for external laser feed-in processing head;
The laser range finder (20) is mounted in shell (51), the detection laser beam and reflection laser of its outgoing when work Shu Jun in the hot spot laser machined on focal plane and is swashed by housing bottom surface ranging hole, the detection laser beam of laser range finder outgoing Light is processed hot spot and is overlapped, for measuring laser processing focal plane height tolerance;
The motor-driven mechanism (18) is mounted on shell (51) inside, for driving light path system and laser range finder to exist The normal direction of workpiece surface is mobile;
The dust suction protective cover (22) is located at laser Machining head bottom, around shell (51) light-emitting window install, by with it is outer Portion's sweep-up pipe is connected to siphon away the flue dust generated in process and prevent laser from leaking, and is protected working environment health and is prevented people Member's damage.
Further, the laser Machining head hull outside is equipped with optical fiber laser.
Further, there are two types of working methods for the light path system:
Dynamic focusing mode: light path system includes 90 ° of reflecting mirrors and focus lamp, is mounted on laser Machining head case inside Wall, the laser beam of light well incidence are incident on focus lamp after first passing around 90 ° of reflecting mirror reflections in parallel, are gathered laser beam by it Coke projects workpiece surface through light hole;
3-D scanning mode: light path system includes 90 ° of reflecting mirrors, two-dimensional high speed scanning galvanometer and field mirror, is mounted on Enclosure interior, parallel incidence enters scanning galvanometer after the laser beam of light well incidence first passes around 90 ° of reflecting mirror reflections, using Field mirror focuses, and projects workpiece surface by light hole.
According to laser Machining head above-mentioned, a kind of multiple light courcess, multi-functional and multiaxis laser accurate manufacturing equipment, the dress are proposed Set further includes equipment control operating system platform, multi-shaft linkage numerical control machine;Wherein:
The equipment control operating system is constituted based on PC machine, for controlling multi-shaft linkage numerical control machine and laser Machining head Overall operation, including but not limited to realize irregular block planning, the Machining of Curved Surface pattern precision of large complicated carved model Compensation, machining path analog simulation and anticollision real time monitoring function;
The multi-shaft interlocked host bed uses the high-precision linkage numerical control machine of at least five axis, including X, Y, Z three-dimensional straight Line shifting axle, rotary shaft C and swinging axle A;The laser Machining head is mounted on swinging axle A;The multi-shaft linkage numerical control machine Z axis on be reserved with installation gas laser and its light path system position, when processing, using gas can be selected according to material property The optical fiber laser installed inside laser or processing head;
In use, laser Machining head acts under numerically-controlled machine tool drive, laser light when being worked using dynamic focusing mode The movement of spot is controlled by numerically-controlled machine tool;Laser enters from laser casing incidence hole, focuses through light path system shaping, by shell bottom Light-emitting window in portion's dust suction protective cover projects, and focuses on workpiece surface;The laser range finder issues laser, passes through shell ranging Hole projects workpiece surface, measures workpiece height data, is sent into equipment control operating system, real-time by equipment control operating system Focal spot height is adjusted to workpiece surface, realizes that dynamically track focuses;
When being worked using 3-D scanning mode, laser Machining head acts under numerically-controlled machine tool drive, and laser facula is mobile It is controlled by two-dimensional high speed scanning galvanometer;Laser enters from laser casing incidence hole, through reflecting mirror, scanning galvanometer and field lens, warp It is projected by housing bottom dust suction protective cover, focuses on workpiece surface;The laser range finder issues laser, passes through shell ranging hole Workpiece surface is projected, workpiece height data are measured, is sent into equipment control operating system, is adjusted by equipment control operating system burnt Point height.
Further, the multi-shaft linkage numerical control machine is planer-type five-axis machine tool.
Further, the laser Machining head further includes light beam direction/power detection module, for being directed toward to laser beam Real-time monitoring is carried out with laser power;Light beam direction/power detection module is mounted on the rear portion of 90 ° of reflecting mirrors in light path system, The fraction of laser light incidence transmitted from 90 ° of reflecting mirrors enters light beam direction/power detection module detection window, realizes to laser Light beam is directed toward and laser power carries out real-time monitoring.For the light source, multi-functional and multiaxis laser accurate manufacturing equipment, monitoring As a result it is fed back in equipment control operating system;Equipment control operating system analyzes testing result, if light beam direction/ Power meets the requirements, then does not adjust;If light beam direction is undesirable, instruction is issued, beam-pointing correction mechanism tune is passed through 90 degree of reflecting mirrors of section change direction of laser propagation;If light beam power is undesirable, is adjusted and issued by equipment Control System Laser power size instruction laser power is adjusted, realize closed loop feedback adjust.
Further, the laser is ultrafast or nanosecond optical fiber laser.
The present invention is by the fiber optic laser source and CO of different wave length2Laser source, the optimization of respective optical path, control and transmission positioning The laser Machining head of system and different cooked mode, is integrated on a multi-shaft interlocked host bed, forms multiple light courcess, more The complex component surface of function and multiaxis is across the fine manufacturing equipment of the efficient laser of scale.How to design realize different laser optical paths it Between non-interference, processing positioning when realizing being switched fast between different processing heads, while guaranteeing to replace different laser Machining heads Precision and repetitive positioning accuracy are difficult point places of the invention.The equipment also has on-line monitoring and compensation, light beam space simultaneously The modules such as high-speed transfer positioning, light beam space direction/power real time correction guarantee that Precision Machining manufacture dimensional accuracy and quality are wanted It asks.
Multi-shaft interlocked host bed used in the present invention is five axis and the above high-precision linkage numerical control machine.It is equipped on swinging axle Knife handle type attachment device can be attached from the laser Machining head using different cooked modes and different laser Source Types respectively, Facilitate the exactitude position between various laser Machining heads and is switched fast.
Optical fiber laser or CO can be used in laser Machining head light source used in the present invention2Laser, wherein optical fiber laser packet Containing nanosecond or ultrafast (picosecond, femtosecond) optical fiber laser.Three-dimensional can be used in the laser Machining head of two kinds of different type lasers Scanning or two kinds of processing methods of dynamic focusing, thus the laser Machining head of four seed types of composition: (1) three-dimensional scanning type optical-fiber laser Processing head;(2) dynamic focusing formula optical-fiber laser processing head;(3) three-dimensional scanning type CO2Laser Machining head;(4) dynamic focusing formula CO2 Laser Machining head.
Nanosecond and ultrafast optical fiber laser and respective light path system are separately mounted on respective processing head, CO2Swash Light device and its light path system are mounted on the Z axis of 5-shaft linkage numerical control lathe vertically moved, when each processing head is converted Light path is fixed, and respective optic path positioning is non-interference.
Dynamic focusing formula laser Machining head (the optical-fiber laser processing head of formula containing dynamic focusing and dynamic focusing formula CO2Laser adds Foreman) it is by auto-focusing dynamic regulation system and focal plane along workpiece normal direction mobile mechanism, dust suction protective cover and positioning 1 dimension processing head of taper knife handle bindiny mechanism composition, the pendulum of multi-shaft linkage numerical control machine is fixed on by locating cone plate-like attachment device On moving axis A, it can be achieved that " N+1 " axis laser profile track cooked mode;
Three-dimensional scanning type laser Machining head (processing head of optical-fiber laser containing three-dimensional scanning type and three-dimensional scanning type CO2Laser adds Foreman) be by two-dimensional high speed scanning galvanometer, auto-focusing dynamic regulation system, focal plane along workpiece normal direction mobile mechanism and The three axis machining head of locating cone plate-like bindiny mechanism composition, is fixed on 5-shaft linkage numerical control machine by locating cone plate-like attachment device , it can be achieved that " 5+3 " axis laser three-D high-velocity scanning cooked mode on the swinging axle A of bed.
By height intelligence overall control software, it is on-line automatic focusing with positioning, projection scanning etch path optimization, The functions such as line monitoring and compensation, by multi-shaft linkage numerical control machine, multiple light courcess, two kinds of cooked modes knife handle type laser Machining head system System is integrated into a multiple light courcess, multi-functional, multiaxis laser across the efficient laser accurate manufacturing equipment of scale.Different type laser processing Head can process actual demand switching according to different materials, realize large format, the laser across scale finely etch, cutting processing, Replace traditional five shaft mechanicals and laser processing.
In aerospace field, typical large format, the fine lithography of across scale laser include complex component metal film The processing of layer tripleplane's formula laser ablation and the fine core finishing processing of hollow blade internal model laser, the processing of laser fine cut includes three The processing of Vygen category milling part laser incising type.
Since the component that the complex surface complex figure of aerospace makes is by metallic diaphragm and optical fiber epoxy resin Organic composite material composition is received the higher near-infrared of organic composite material transmissivity using preferable to metal material absorptivity Second, the three-dimensional scanning type optical-fiber laser processing head of ultrafast fiber optic laser source, connect with the swinging axle A of gantry five-axis machine tool, realization Complex component surface complex figure " 5+3 " axis laser three-D high-velocity scanning Precision Machining.
For engine hollow blade ceramic laser core finishing, due to laser ablation be it is a kind of it is contactless, without mechanical cutting force Processing method, be suitble to the processing of ultra-soft, superhard, the super difficult processing substance such as crisp, ultra-thin, no tool wear problem, and fixture is only It is responsible for support positioning, no rigid requirements, especially suitable for engine complex-shaped and that thin-walled fusing point is high, hardness is big and quality is crisp Ceramic core for hollow vane core finishing technology.In addition, can get using ultrafast pulsed laser, laser focal beam spot is small and gasification is gone Except ceramic material mechanism, the removal precision of sub-micrometer scale is realized.So machining accuracy is high, and it is small to workpiece heat affected area, it is not easy The deformation of forming core local is made, is easy to guarantee ceramic core size and shape precision, realizes and essence is carried out to ceramic core structure division It is thin to repair.Therefore, the precision size of curve ceramic type core is repaired, using ultrafast optical fiber laser, by dynamic focusing formula light Fine laser Machining head or three-dimensional scanning type optical-fiber laser processing head is connect with the swinging axle A of gantry five-axis machine tool, it can be achieved that " 5+1 " Axis ultrafast laser three-D profile track precision etching or " 5+3 " axis ultrafast laser three-dimensional high-speed scanning precision etching size core finishing are answered With.
Complex component milling laser incising type processing for aerospace, due to the protective glue of alloying metal thin-walled milling part Polyvinyl resin and butadiene-styrene rubber synthetic rubber or natural rubber class material are generally fallen into, the CO for being 10.6 μm to wavelength2Swash The absorptivity of light device is and higher to near-infrared fibre-optical laser transmissivity close to 100%.And titanium and aluminium alloy are to 10.6 μm of CO2 The absorptivity of laser is only 8% or so, but higher to near-infrared fibre-optical laser absorption rate.It is protected thoroughly to reach laser incising Glue, but metal parts surface purpose is not damaged, using CO2Laser source is laser light source the most suitable.By dynamic focusing formula or Three-dimensional high-speed scanning formula CO2Laser Machining head is connect with the swinging axle A of gantry five-axis machine tool, realizes complex component surface protective glue " 5+1 " axis CO2Laser three-D profile traces precision quarter type or " 5+3 " axis CO2Laser three-D high-velocity scanning precision quarter type, replace pass The artificial mechanism quarter type of system.
In conclusion multiple light courcess, multi-functional, multiaxis across the efficient laser precision machining method of scale and equipment the characteristics of be one The universal high-end fine manufacturing equipment of laser of kind, rather than tailored version is equipped, and laser light source, laser optical path and laser need to be only passed through Aerospace at least three kinds or more complex large-scale component fine surface processed and applieds can be realized in the switching of processing head.Therefore, should The advantages that invention equipment has manufacturing cost low, has a wide range of application, modular organization, is convenient for batch production.
Detailed description of the invention
Fig. 1 is the exemplary construction schematic diagram of multiple light courcess, multi-functional, multiaxis across the efficient laser accurate manufacturing equipment of scale;
Fig. 2 is dynamic focusing formula CO2Laser Machining head structural schematic diagram;
Fig. 3 is dynamic focusing formula CO2Laser Machining head light path schematic diagram;
Fig. 4 is three-dimensional scanning type CO2Laser Machining head structural schematic diagram;
Fig. 5 is three-dimensional scanning type CO2Laser Machining head light path schematic diagram;
Fig. 6 is dynamic focusing formula optical-fiber laser processing head structural schematic diagram;
Fig. 7 is dynamic focusing formula optical-fiber laser processing head light path schematic diagram;
Fig. 8 is three-dimensional scanning type optical-fiber laser processing head structural schematic diagram;
Fig. 9 is three-dimensional scanning type optical-fiber laser processing head light path schematic diagram.
Specific embodiment
Specific embodiments of the present invention will be further explained with reference to the accompanying drawing.It should be noted that for The explanation of these embodiments is used to help understand the present invention, but and does not constitute a limitation of the invention.In addition, disclosed below The each embodiment of the present invention in involved technical characteristic can be combined with each other as long as they do not conflict with each other.
As shown in Figure 1, a kind of multiple light courcess of present example offer, multi-functional, multiaxis are across the efficient laser accurate system of scale Make equipment, including equipment control operating system platform 1, planer-type five-axle linkage high-precision numerical control machine 50 and interchangeable blades shank type 60 three parts of laser Machining head.Equipment control operating system 1 is made of computer, control electrical component, operating platform.It is responsible for control The whole fortune of the laser Machining head of the planer-type five-axis machine tool of operating equipment processed, different wave length laser and different cooked modes Row.The pedestal 2 of planer-type five-axis machine tool 50, which will be equipped, to be totally fixed on ground, and pedestal is equipped with damping and stabilising arrangement, can Subtle vibration is filtered, the stability of equipment is enhanced, guarantees the accuracy of processing.High-precision linear movement axis 6 is the 1st of equipment Axis (Z axis) is responsible for that interchangeable blades shank type laser Machining head 60 is driven to move along Z-direction, and solid by position-limit mechanism 9 and baffle 10 Due to, (to equip Y-axis), the 2nd axis 5 drives Z axis and interchangeable blades shank type laser Machining head 60 on high-precision the 2nd axis 5 of linear movement It moves in direction along Y.Y-axis 5 is fixed on high-precision the 3rd axis 3 of linear movement by bindiny mechanism 4 (to equip X-axis), the 3rd axis 3 Y-axis, Z axis and interchangeable blades shank type laser Machining head 60 is driven to move in X direction together.High-precision rotary C axis 12 is equipment the 4th Axis is fixed on Z axis end by column connecting elements 11, be responsible for interchangeable blades shank type laser Machining head 60 using Z axis as center axis, 360 ° of rotations in high precision.High-precision swing A axis 15 is the 5th axis of equipment, solid by column bindiny mechanism 13 and guiding mechanism 14 ± 180 ° are carried out by center axis of Y-axis due on high-precision rotary axis 12, being responsible for drive interchangeable blades shank type laser Machining head 60 High-precision swing (as shown in Figure 2).Locating cone set plate-like bindiny mechanism 16 be fixed on high-precision swing A axis 15, be responsible for can The coaxial positioning of 60 high-precision of knife handle type laser Machining head and connection and disassembly are exchanged, realizes the interchangeable knife handle of different cooked modes The 60 concentric positioning handoff functionality of high-precision of formula laser Machining head.CCD optical detection positioning system 40 is mounted on A axis lower end, with A Axis is swung, and realizes laser processing optical detection positioning function.
There are four types of the laser Machining heads of laser processing mode for interchangeable blades shank type laser Machining head 60.First laser processing mould Formula is CO2Dynamic Laser focuses cooked mode, the first locating cone plate-like bindiny mechanism 17 and CO by center for through-hole2Laser adds Foreman 19 forms (as shown in Figure 2).First locating cone plate-like bindiny mechanism 17 is used to cover 16 coupling of plate-like bindiny mechanism with locating cone It closes, realizes that interchangeable blades shank type laser Machining head 60 is connected and fixed with 50 high-precision of five-axis machine tool.
CO2Laser 7 and CO2Optical system 8 is fixed on high precision movement Z axis 6, move with Z axis 6 along the direction of Z (see Shown in Fig. 1).CO2Laser 7 is responsible for the CO that output wavelength is 10.6 μm2Laser beam, optical axis are overlapped with the axle center of Z axis, are passed through After 8 beam-expanding collimation of optical system and shaping, it is input to the guiding for being mounted on the joint position of numerically-controlled machine tool Z axis and swing axis connection 35 center of circular polarization reflecting mirror (see shown in Fig. 2 and Fig. 3) in mechanism 14, polarization light repair is biased into round polarization light, eliminates The directivity deviation of laser processing, can be improved processing quality.Circular polarization reflecting mirror 35 is by CO290 ° of reflections of laser beam import CO2Swash 99% reflecting mirror 37 in light processing head 19.Numerically-controlled machine tool beam-pointing correction mechanism 34 is fixed on circular polarization reflecting mirror 35, By finely tuning circular polarization reflecting mirror 35, guarantee that 99% reflecting mirror, 37 center is directed toward in laser beams space.99% reflecting mirror 37 will 99%CO290 ° of laser power are reflected on 21 surface of focus lamp, are focused on 23 surface of workpiece to be processed.Remaining 1% CO2 Laser power is transmitted through in the light beam direction/power detection module 38 in 99% reflecting mirror dead astern, for laser beam Direction/power carries out real-time monitoring, and monitoring result is fed back in equipment CAD system.CAD system divides testing result Analysis, if light beam direction/power meets the requirements, is not adjusted;If light beam direction/power is undesirable, CAD system sending refers to It enables, controls beam-pointing correction mechanism 34 and CO respectively2Laser 7 is finely adjusted school to direction of laser propagation and laser power Just, it realizes that closed loop feedback adjusts correction in real time, guarantees laser processing precision and quality.The function of laser range finder 20 is to supervise in real time Survey laser focus position, and and CO2It (is the 6th of equipment that laser condensing lens 21, which are fixed on together in motor-driven mechanism 18, Axis).When laser spot is set in workpiece to be processed surface, once laser range finder 20 monitors that laser spot deviates from workpiece 23 surfaces immediately pass through motor-driven mechanism 18 and adjust back to laser spot rapidly on 23 surface of workpiece, realize that auto-focusing is dynamic State regulatory function.The function of dust suction protective cover 22 is to siphon away the flue dust generated in process and prevent laser from leaking, and protects work Make environmental sanitation and prevents personal damage.
Gantry five-axis linkage numerical control lathe 50 is covered into plate-like bindiny mechanism 16 by the locating cone of A axis, with interchangeable First locating cone plate-like bindiny mechanism 17 of laser Machining head 60 is of coupled connections fixation, can be obtained (5+1) axis CO2Laser three-D Accurate milling quarter type equipment, realizes three-dimensional milling laser profile track quarter type protective glue application.
Second of cooked mode of interchangeable blades shank type laser Machining head 60 is three-dimensional CO2Laser high-speed scanning machining head, By the second locating cone plate-like bindiny mechanism 29 and CO2Laser three-dimensional scanning processing head 51 and the composition of dust suction protective cover 54 are (see Fig. 4 It is shown).CO2Laser three-dimensional scanning processing head 51 is by 99% reflecting mirror 37, laser power detection module 38, guide-lighting mirror 58,2 Victoria C O2 It laser scanning galvanometer 55, telecentric scanning focus lamp 57, laser range finder 20 and is moved up and down along workpieces processing surface normal direction Mechanism 56 forms (see shown in Figure 4 and 5).Guide-lighting mirror 58, CO2Laser scanning galvanometer 55, telecentric scanning focus lamp 57 and Laser Measuring Distance meter 20 is fixed in mobile mechanism 56, can be moved up and down with mobile mechanism 56 along workpieces processing surface normal direction.2 Victoria C O2 2 axis of laser scanning galvanometer 55 are swept with along 23 surface normal direction reciprocating mechanism 56 of workpieces processing composition three-dimensional laser high speed 3 axis the 6 of equipment (, 7,8 axis) retouched.
CO2The CO that 7 output wavelength of laser is 10.6 μm2Laser beam, it is defeated after 8 beam-expanding collimation of optical system and shaping Enter to 35 center of circular polarization reflecting mirror (see shown in Fig. 1 and Fig. 5) being mounted in guiding mechanism 14, polarization light repair being biased into Circle polarization light, eliminates the directivity deviation of laser processing.Circular polarization reflecting mirror 35 is by CO290 ° of reflections of laser beam import CO2Laser 99% reflecting mirror 37 in 3-D scanning processing head 51.Beam-pointing correction mechanism 34 is fixed on circular polarization reflecting mirror 35, is led to Fine tuning circular polarization reflecting mirror 35 is crossed, guarantees that 99% reflecting mirror, 37 center is directed toward in laser beams space.99% reflecting mirror 37 will 99%CO290 ° of laser power are reflected on guide-lighting mirror 52, by 90 ° of importing CO2In laser scanning galvanometer 55, focused through telecentric scanning Mirror 57 focuses on 23 surface of workpiece to be processed.Remaining 1% CO2Laser power is transmitted through positioned at 99% reflecting mirror dead astern In light beam direction/power detection module 38, for carrying out real-time monitoring to laser beam direction/power, and monitoring result is anti- It is fed in equipment CAD system.CAD system analyzes testing result, if light beam direction/power meets the requirements, does not adjust; If light beam direction/power is undesirable, CAD system issues instruction, controls beam-pointing correction mechanism 34 and CO respectively2Swash Light device 7 is finely adjusted correction to direction of laser propagation and laser power, realizes that closed loop feedback adjusts correction in real time, guarantees that laser adds Work precision and quality.The function of laser range finder 20 is real-time monitoring laser focus position.When laser spot be set in it is to be added When work 23 surface of workpiece, once laser range finder 20 monitors that laser spot deviates from 23 surface of workpiece, moving machine is immediately passed through Structure 56 adjusts back to rapidly laser spot on 23 surface of workpiece, realizes auto-focusing dynamic regulation function.Dust suction protective cover 54 Function is to siphon away the flue dust generated in process and prevent laser from leaking, and protects working environment health and prevents personal damage.
Gantry five-axis linkage numerical control lathe 50 is covered into plate-like bindiny mechanism 16 by the locating cone of A axis, with interchangeable Second locating cone plate-like bindiny mechanism 29 of laser Machining head 60 is of coupled connections fixation, can be obtained (5+3) axis CO2Laser three-D Accurate milling quarter type equipment realizes that three-dimensional milling laser high-speed scans the protective glue application of quarter type.
The third cooked mode of interchangeable blades shank type laser Machining head 60 is optical fiber laser dynamic focusing cooked mode, by Third locating cone plate-like bindiny mechanism 27, optical-fiber laser processing head 40, laser transmission fiber 46, laser beam optimize optical system 41 With optical fiber laser (including continuous or nanosecond, ultrafast pulse optical fiber laser) 47 and the composition of dust suction protective cover 42 (see Fig. 6 institute Show).Optical-fiber laser processing head 40 is fixed on the plate-like bindiny mechanism side of third locating cone plate-like bindiny mechanism 27, and laser beam is excellent Change optical system 41 and optical fiber laser 47 is separately mounted to 40 two sides of optical-fiber laser processing head, passes through 46 phase of laser transmission fiber It connects.Optical-fiber laser processing head 40 is by 99% reflecting mirror 44, laser power detection module 43, focus lamp 48, laser range finder 20 and along workpieces processing surface normal direction reciprocating mechanism 45 form (as shown in Figure 7).
Its working principle is that it is excellent to be input to laser beam by laser transmission fiber 46 for 47 outgoing laser beam of optical fiber laser Change the progress beam-expanding collimation of optical system 41 and shaping is rectified a deviation after optimizing, 99% reflecting mirror importeding into optical-fiber laser processing head 40 44 centers are reflected into focus lamp 48 for 90 ° of laser power of 99%, are focused on 23 surface of workpiece to be processed.Remaining 1% Laser power is transmitted through in the power detection module 43 in 99% reflecting mirror dead astern, for detecting to laser power. Once laser power shifts, power detection module 43 will output offset amount to optical fiber laser 47, rapidly by laser function Rate adjusts back to given value, it is ensured that laser processing dimensional accuracy and quality.The function of laser range finder 20 is that real-time monitoring laser is poly- Focal position, and with laser condensing lens 48 be fixed on along workpieces processing surface normal direction reciprocating mechanism 45 together (for 6th axis of equipment).When laser spot is set in 23 surface of workpiece to be processed, once laser range finder 20 monitors laser coke Point deviates from 23 surface of workpiece, and immediately passing through mobile mechanism 45 adjusts back to rapidly laser spot on 23 surface of workpiece, realizes certainly Dynamic focusing dynamic regulation function.The function of dust suction protective cover 42 is to siphon away the flue dust generated in process and prevent outside laser It lets out, protect working environment health and prevents personal damage.
Plate-like bindiny mechanism 16 is covered with locating cone on numerically-controlled machine tool by third locating cone plate-like bindiny mechanism 27 to couple, it is real Existing interchangeable blades shank type laser Machining head 60 is connected and fixed with 50 high-precision of five-axis machine tool, can be obtained (5+1) axis optical-fiber laser Three-dimensional precise etching equipment, realizes that three-dimensional ceramic type core profile track precision etches core finishing application.
4th kind of cooked mode of interchangeable blades shank type laser Machining head 60 is three-dimensional fiber laser high-speed scanning machining mould Formula, by the 4th locating cone plate-like bindiny mechanism 28, three-dimensional laser high-velocity scanning processing head 70, laser transmission fiber 46, laser beam Optimize optical system 41 and optical fiber laser (comprising continuous or nanosecond, ultrafast pulse optical fiber laser) 47 and dust suction protective cover 74 compositions (as shown in Figure 8).Three-dimensional laser high-velocity scanning processing head 70 is fixed on the disk of the 4th locating cone plate-like bindiny mechanism 28 Shape bindiny mechanism side, laser beam optimization optical system 41 and optical fiber laser 47 are separately mounted to three-dimensional laser high-velocity scanning and add 70 two sides of foreman, are connected with each other by laser transmission fiber 46.Three-dimensional laser high-velocity scanning processing head 70 by 99% reflecting mirror 44, Laser power detection module 43, guide-lighting mirror 80,2 tie up high-velocity scanning galvanometer 77, telecentric scanning focus lamp 78,20 and of laser range finder It is formed along workpieces processing surface normal direction reciprocating mechanism 81.2 tie up 2 axis of high-velocity scanning galvanometers 77 and along workpieces processing table Face normal direction reciprocating mechanism 81 forms 3 axis the 6 of equipment (, 7,8 axis) of three-dimensional laser high-velocity scanning.
Fig. 9 provides its working principle, and 47 outgoing laser beam of optical fiber laser is input to sharp by laser transmission fiber 46 After beam optimum optical system 41 carries out beam-expanding collimation and shaping correction optimization, import in three-dimensional laser high-velocity scanning processing head 70 99% reflecting mirror, 44 center, by 99% near-infrared laser power reflection to guide-lighting 80 center of mirror, by guide-lighting mirror 80 by laser Beam imported into 2 dimension high-velocity scanning galvanometers 77, is focused on 23 surface of workpiece to be processed by telecentric scanning focus lamp 78.Remaining 1% Near-infrared laser power transmission to being located in the power detection module 43 in 99% reflecting mirror dead astern, for laser power into Row detection.Once laser power shifts, power detection module 43 will output offset amount to optical fiber laser 46, rapidly will Laser power adjusts back to given value, it is ensured that laser processing dimensional accuracy and quality.The function of laser range finder 20 is real-time monitoring Laser focus position, and tie up high-velocity scanning galvanometer 77 with guide-lighting mirror 80,2 and edge is fixed on by telecentric scanning focus lamp 78 together On workpieces processing surface normal direction reciprocating mechanism 81.When laser spot is set in 23 surface of workpiece to be processed, once Laser range finder 20 monitors that laser spot deviates from 23 surface of workpiece, immediately passes through mobile mechanism 81 and adjusts laser spot rapidly It returns on 23 surface of workpiece, realizes auto-focusing dynamic regulation function.The function of dust suction protective cover 74 siphons away processing and generates Flue dust simultaneously prevents laser from leaking, and protects working environment health and prevents personal damage.
By the 4th processing of the A axis access interchangeable blades shank type laser Machining head 60 of gantry five-axis linkage numerical control lathe 50 Mode: three-dimensional laser high-velocity scanning processing head.Plate-like, which is covered, with locating cone by the 4th locating cone plate-like bindiny mechanism 28 connect machine Structure 16 couples, and realizes that interchangeable blades shank type laser Machining head 60 is connected and fixed with 50 high-precision of five-axis machine tool, can be obtained (5+3) Axis laser three-D high-velocity scanning precision etching equipment realizes that complex-curved across scale laser high-speed scans three-dimensional precise showing methods Core finishing application is etched with ceramic core precision.
Example
Example one
In aerospace typical part picture on surface laser accurate lithography, the material of piece surface pattern-making is logical The multilayered structure that layer of metal film layer is often plated in glass fiber compound material carrier surface, due to the fusing point and evaporation temperature of metal Degree is much higher than composite material ignition temperature, while laser ablation metallic diaphragm, is difficult to avoid burn carrier surface.In this example In, use wavelength for 1064nm nanosecond optical fiber laser as laser source, (5+3) axis laser three-D high-velocity scanning precision etching The multilayered structure that equipment plates one layer of 17 μ m-thick copper film layer to glass fiber compound material carrier surface is complex-curved to be projected Formula high speed three-dimensional scanning machining.Use laser scanning etching parameters for nanosecond laser output power 30W, repetition rate 400kHz, laser pulse width 100ns, laser spot on metal film layer surface, fill out by laser galvanometer scanning speed 1000mm/s, laser Fill overlapping rate 30%, cooperate equipment it is automatic to poly- dynamic regulation function, it can be achieved that the laser accurate lithography of piece surface, The defects of copper film layer to be processed is completely removed, and removed metallic diaphragm edge-smoothing, impulse- free robustness, ablation.Graphics processing and Position dimension error is respectively less than 20 μm, and carrier composite material is not burnt, and no ablated area is observed on surface under the microscope, and Part whole (including composite material and metallic diaphragm) does not occur deformation, and removal effect is good.
Example two
At thin-walled milling part quarter in type of aerospace complex component, protective glue must be carved but cannot by needing to meet laser Damage the requirement of metal base surface.In this example, using (5+1) axis CO2Laser three-D precision milling quarter type equipment, to aviation Titanium alloy starts the protective glue after the 0.5mm of ring-like Thin-Wall Outer Casing milling part to carry out three-dimensional laser profile traces quarter type.Laser incising Shape parameter is CO2Laser exports continuous laser power 80W, and laser spot is located at protective glue surface, laser incising type speed 200mm/s, cooperate equipment it is automatic to poly- dynamic regulation function, it can be achieved that protective glue carve completely thoroughly it is connectionless, open protective glue Afterwards, the defects of laser incising type protective glue flush edge is smooth, impulse- free robustness.Meanwhile metal base surface is not carved and is hurt, surface exists Microscopically observation is without ablated area, and part whole (including metallic matrix and protection glue-line) does not occur deformation, removal effect Fruit is good.
Example three
In the laser of aviation complexity ceramic core component is repaired, ceramic core has the characteristics that complex-shaped and thin-walled, material Expect that there is the characteristic that fusing point is high, hardness is big and quality is crisp, repairing precision is made to reach 5 μm of orders of magnitude in repair process.This example is adopted It is etched and is equipped with (5+3) axis picosecond laser three-dimensional high-speed scanning precision, carry out complex-curved across scale laser high-speed scanning ceramics Type core precision etches core finishing.Laser is used to repair picosecond optical fiber laser that ceramic core technological parameter is 1064nm for wavelength, Output power 20W, repetition rate 200kHz, pulsewidth 150ps, laser spot are located at ceramic material surfaces to be repaired, cooperation equipment It is automatic to poly- dynamic regulation function, it can be achieved that laser three-D ceramic core precision repair.Through detecting, laser repair size is missed The defects of poor precision is less than 3 μm, and removal surface is smooth, non-microcracked, burr, ablation, it is good to repair effect.
The above is presently preferred embodiments of the present invention, but the present invention should not be limited to the embodiment and attached drawing institute Disclosure.So all do not depart from the lower equivalent or modification completed of spirit disclosed in this invention, guarantor of the present invention is both fallen within The range of shield.

Claims (7)

1. a kind of multiple light courcess, multi-functional and multiaxis laser accurate manufacturing equipment, which is characterized in that including laser Machining head, equipment Control operating system, multi-shaft linkage numerical control machine;
The laser Machining head includes shell (51), light path system, locating cone plate-like bindiny mechanism, laser range finder (20), electricity Machine driving mechanism (18) and dust suction protective cover (22);Wherein:
The shell (51) offers external laser light well, optical-fiber laser light well, light hole and ranging hole;Light hole and survey It is located at laser Machining head housing bottom surface away from hole, light well, light hole and ranging hole are respectively used to external laser light incident, optical-fiber laser Laser and laser range finder detection light pass through after incident, focusing;
The light path system is used for laser shaping and it is made to project processing focal plane, according to the selection of different wave length laser The optical device matched is integrated in different laser Machining heads;Light path system can flexible disassembling, assembling and replacing, with suitable for different wave length swash Light;
Locating cone plate-like bindiny mechanism (17) is installed on outside shell (51) side wall, for being fixedly connected with numerically-controlled machine tool, Different laser Machining heads can pass through locating cone plate-like bindiny mechanism (17) flexible disassembling, assembling and replacing;Locating cone plate-like bindiny mechanism (17) Middle part is provided with light hole, and the hole and hull outside laser light well face are used for external laser feed-in processing head;
The laser range finder (20) is mounted in shell (51), the detection laser beam and reflection laser Shu Jun of its outgoing when work By housing bottom surface ranging hole, hot spot of the detection laser beam of laser range finder outgoing on laser processing focal plane adds with laser Work hot spot is overlapped, for measuring laser processing focal plane height tolerance;
The motor-driven mechanism (18) is mounted on shell (51) inside, for driving light path system and laser range finder in workpiece Normal to a surface direction is mobile;
The dust suction protective cover (22) is located at laser Machining head bottom, installs around shell (51) light-emitting window, by inhaling with outside Dirt pipe is connected to siphon away the flue dust generated in process and prevent laser from leaking, and is protected working environment health and is prevented personnel from damaging Wound;
The laser Machining head further includes light beam direction/power detection module, for laser beam be directed toward and laser power into Row real-time monitoring;Light beam direction/power detection module is mounted on the rear portion of 90 ° of reflecting mirrors in light path system, saturating from 90 ° of reflecting mirrors The fraction of laser light incidence of injection enters light beam direction/power detection module detection window, realizes and is directed toward and swashs to laser beam Optical power carries out real-time monitoring;
The equipment control operating system is constituted based on PC machine, for controlling the whole of multi-shaft linkage numerical control machine and laser Machining head Running body, including but not limited to realize large complicated carved model irregular block planning, Machining of Curved Surface pattern precision compensation, Machining path analog simulation and anticollision real time monitoring function;
The multi-shaft linkage numerical control machine uses the high-precision linkage numerical control machine of at least five axis, including X, Y, Z 3 d-line Shifting axle, rotary shaft C and swinging axle A;The laser Machining head is mounted on swinging axle A;The Z of the multi-shaft linkage numerical control machine It is reserved with installation gas laser and its light path system position on axis, when processing, using gas can be selected to swash according to material property Light device or optical fiber laser;
In use, laser Machining head acts under numerically-controlled machine tool drive, laser facula when being worked using dynamic focusing mode Movement is controlled by numerically-controlled machine tool;It processes laser to enter from laser casing incidence hole, be focused through light path system shaping, by shell bottom Light-emitting window in portion's dust suction protective cover projects, and focuses on workpiece surface;The laser range finder issues range laser, passes through shell Ranging hole projects workpiece surface, measures workpiece height data, equipment control operating system is sent into, by equipment control operating system The focal spot height of the laser of adjustment processing in real time realizes that dynamically track focuses to workpiece surface;
When being worked using 3-D scanning mode, laser Machining head acts under numerically-controlled machine tool drive, and laser facula is mobile by two Tie up the control of high-velocity scanning galvanometer;It processes laser to enter from laser casing incidence hole, through reflecting mirror, scanning galvanometer and field lens, warp It is projected by housing bottom dust suction protective cover, focuses on workpiece surface;The laser range finder issues range laser, is surveyed by shell Workpiece surface is projected away from hole, measures workpiece height data, equipment control operating system is sent into, by equipment control operating system tune The focal spot height of whole processing laser.
2. laser accurate manufacturing equipment according to claim 1, which is characterized in that be equipped with light outside the shell (51) Fibre laser.
3. laser accurate manufacturing equipment according to claim 1, which is characterized in that there are two types of work sides for the light path system Formula:
Dynamic focusing mode: light path system includes 90 ° of reflecting mirrors and focus lamp, is mounted on laser Machining head case inside wall, into The laser beam of unthreaded hole incidence is incident on focus lamp after first passing around 90 ° of reflecting mirror reflections in parallel, by it by laser beam focus, through going out Unthreaded hole projects workpiece surface;
3-D scanning mode: light path system includes 90 ° of reflecting mirrors, two-dimensional high speed scanning galvanometer and field mirror, is mounted on shell Inside, parallel incidence enters scanning galvanometer after the laser beam of light well incidence first passes around 90 ° of reflecting mirror reflections, using scanning Field lens focuses, and projects workpiece surface by light hole.
4. laser accurate manufacturing equipment according to claim 2, which is characterized in that the optical fiber laser is ultrafast or receives Second optical fiber laser, output laser is sent into from the optical-fiber laser light well of processing casing swashs work processing head.
5. laser accurate manufacturing equipment according to claim 1, which is characterized in that the multi-shaft linkage numerical control machine is gantry Formula five-axis machine tool.
6. laser accurate manufacturing equipment according to claim 1, which is characterized in that monitoring result is fed back to equipment control behaviour Make in system, the equipment control operating system analyzes monitoring result, if light beam direction/power meets the requirements, no It adjusts;If light beam direction is undesirable, instruction is issued, passes through laser Machining head external beam orientation-correcting mechanism (34) and adjusts Pitch circle polarizing mirror (35) changes direction of laser propagation;If light beam power is undesirable, pass through equipment Control System tune Laser power is adjusted in the laser power size instruction haircuted out, realizes that closed loop feedback is adjusted.
7. the application of laser accurate manufacturing equipment according to claim 1, which is characterized in that it has, and there are four types of application models:
Mode 1: for CO2Dynamic Laser focuses cooked mode;Processing laser is CO2Laser, laser are mounted on Z axis, are passed through The reflecting mirror reflection being fixed on inside machine Z-axis, from locating cone plate-like bindiny mechanism center light hole and processing head hull outside Laser light well enters processing head;The type of focusing is dynamic focusing, can be used for the three-D profile of metallic substrate surface resin, rubber Line tracking cutting processing;
Mode 2: for three-dimensional CO2Laser high-speed scanning machining;Processing laser is CO2Laser, the type of focusing are 3-D scanning, can be used In the three-dimensional precise cutting of metallic substrate surface resin, rubber, lithography;
Mode 3: for optical fiber laser dynamic focusing cooked mode;Processing laser is optical-fiber laser, quasi- from being emitted with optical fiber laser The straight concentric optical-fiber laser light well of mirror enters processing head, and the type of focusing is dynamic focusing, can be used for the three-dimensional essence of ceramics, metal Close high-speed cutting, lithography;
Mode 4: for three-dimensional fiber laser high-speed scanning machining mode;Processing laser is optical-fiber laser, and the type of focusing is swept for three-dimensional It retouches, can be used for the three-dimensional precise pattern high speed lithography for the composite material that ceramics, metal, metal-polymer form.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103240527A (en) * 2013-05-08 2013-08-14 宁德新能源科技有限公司 Full-automatic laser welder
CN205342233U (en) * 2016-01-29 2016-06-29 哈工大鞍山工业技术研究院有限公司 Multi -functional laser surely welds all -in -one
CN205363011U (en) * 2016-01-27 2016-07-06 山西暗睛光电科技有限公司 Laser cutter
CN105772949A (en) * 2016-03-28 2016-07-20 天津宏光伟业激光科技有限公司 Fiber laser cutting machine
CN105798469A (en) * 2016-05-16 2016-07-27 广州广源激光科技有限公司 Multi-laser-head laser cutting machine

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1285718B9 (en) * 2001-08-18 2004-07-14 Trumpf Werkzeugmaschinen GmbH + Co. KG Machine tool for machining workpieces by laser beam

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103240527A (en) * 2013-05-08 2013-08-14 宁德新能源科技有限公司 Full-automatic laser welder
CN205363011U (en) * 2016-01-27 2016-07-06 山西暗睛光电科技有限公司 Laser cutter
CN205342233U (en) * 2016-01-29 2016-06-29 哈工大鞍山工业技术研究院有限公司 Multi -functional laser surely welds all -in -one
CN105772949A (en) * 2016-03-28 2016-07-20 天津宏光伟业激光科技有限公司 Fiber laser cutting machine
CN105798469A (en) * 2016-05-16 2016-07-27 广州广源激光科技有限公司 Multi-laser-head laser cutting machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2783722C1 (en) * 2022-04-19 2022-11-16 Общество С Ограниченной Ответственностью Научно-Производственное Предприятие "Телар" (Ооо Нпп "Телар") Method for manufacturing parts from a sheet metal blank on a cnc laser machine

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