CN216938931U - Rotary cutting system based on combination of galvanometer and dove prism - Google Patents
Rotary cutting system based on combination of galvanometer and dove prism Download PDFInfo
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- CN216938931U CN216938931U CN202121728277.8U CN202121728277U CN216938931U CN 216938931 U CN216938931 U CN 216938931U CN 202121728277 U CN202121728277 U CN 202121728277U CN 216938931 U CN216938931 U CN 216938931U
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Abstract
The utility model relates to the technical field of laser processing, in particular to a rotary cutting system based on the combination of a galvanometer and a dove prism.A laser beam is deflected and deflected according to a preset position and angle by an incident double-galvanometer deflection unit to form deflected light; the deflected light is incident into the dove prism rotating unit and is adjusted into dynamic emergent light moving in a circular track; the focus position of the dynamic emergent light moving in a circular track is dynamically adjusted through the focusing unit, and the workpiece to be processed is processed after being focused by the focusing unit. The proper motion track is obtained through the rotation of the optical system, so that the laser beam is focused on the surface of the workpiece to form a uniform path taking the circumference as the track, the phenomenon that the temperature of the center is higher than the temperature of the periphery when the hole is punched due to the Gaussian distribution of the laser intensity is avoided, the thermal reaction of the small hole is reduced, the rotary cutting processing mode is more favorable for discharging molten substances, the hole wall recasting layer is relatively small, and the hole quality is higher. Meanwhile, the available repetition frequency of laser processing can be doubled, and the punching efficiency is greatly improved.
Description
Technical Field
The utility model relates to the technical field of laser processing, in particular to a rotary cutting system based on a combination of a galvanometer and a dove prism.
Background
The micro-holes have great demand in the manufacturing industry, such as spray holes of automobile oil nozzles, massive air film cooling holes of hot end parts of aircraft engines, probe holes of probe cards and the like, and compared with the existing punching processing technology, such as electric spark processing and electrolytic processing, the laser processing can become the hot direction of the current industrial manufacturing with higher efficiency and processing precision. The laser drilling has the processing modes of impact type, rotary cutting type, spiral time and the like, wherein when the impact type is used for drilling, a workpiece completes small hole processing under the impact of a series of pulse energy, the aperture is close to the size of a light spot, compared with other modes, the most basic and the fastest drilling mode is adopted, but the quality of a hole is directly influenced by the quality of a light beam and a focusing optical system, the temperature of the center is higher than the temperature of the periphery when the hole is drilled due to the Gaussian distribution of laser intensity, the thermal effect of the commonly processed small hole is serious, and the precision and the hole wall quality are poor.
SUMMERY OF THE UTILITY MODEL
The utility model provides a rotary cutting system based on a combination of a galvanometer and a dove prism, which solves the technical problems of poor precision and poor hole wall quality caused by the fact that the temperature of the center is higher than the temperature of the periphery when holes are punched due to the Gaussian distribution of laser light intensity.
The utility model provides a rotary cutting system based on the combination of a galvanometer and a dove prism for solving the technical problems, which comprises a deflection double-galvanometer unit, a dove prism rotating unit, a focusing unit and a focusing unit which are sequentially arranged on an incident laser beam light path;
the deflection double-galvanometer unit is used for deflecting and deflecting the incident laser beam to the dove prism rotating unit according to a preset position and an angle;
the dove prism rotating unit is used for adjusting the laser beam into dynamic emergent light moving in a circular track;
the focusing unit is used for dynamically adjusting the focus position of the dynamic emergent light;
the focusing unit is used for focusing the laser beam on the processed workpiece.
Optionally, the deflection double-vibration mirror unit includes a first deflection double-vibration mirror unit vibration mirror and a second deflection double-vibration mirror unit vibration mirror, which have complementary functions and high precision, the first deflection double-vibration mirror unit vibration mirror is used for deflecting and reflecting the incident laser beam to the second deflection double-vibration mirror unit vibration mirror, and the second deflection double-vibration mirror unit vibration mirror is used for compensating the angle of the laser beam caused by the first deflection double-vibration mirror unit vibration mirror.
Optionally, the second deflection double-vibrating mirror unit is further configured to control the laser beam to enter the dove prism rotating unit at a preset angle, and the angle determines a distance between a laser beam focusing position on the processing workpiece and a mechanical axis of the system.
Optionally, the dove prism rotating unit includes a standard dove prism and an air shaft motor for driving the dove prism to rotate, and the air shaft motor drives the dove prism to rotate so that a light ray track of the incident laser beam is emitted in a circular dynamic manner.
Optionally, the aperture of the collimator prism is 15mm, and the length of the lower base is 66.5 mm.
Optionally, an adjusting knob for adjusting the displacement and the placement angle of the dove prism is arranged below the dove prism.
Optionally, the focusing unit is a dynamic focusing system composed of an optical 4f system.
Has the advantages that: the application provides a rotary cutting system based on a combination of a galvanometer and a dove prism, wherein incident laser beams are deflected and deviated according to preset positions and angles through a deflection double-galvanometer unit to form deflection light; the deflected light is incident into the dove prism rotating unit and is adjusted into dynamic emergent light moving in a circular track; and dynamically adjusting the focus position of the dynamic emergent light moving in a circular track through a focusing unit, and processing the processed workpiece after focusing through the focusing unit. The proper motion track is obtained through the rotation of the optical system, so that the laser forms an even path taking the circumference as the track on the surface of the workpiece, the phenomenon that the temperature of the center is higher than the temperature of the periphery when the hole is punched due to the Gaussian distribution of the laser intensity can be avoided, the thermal reaction of the small hole is reduced, the rotary cutting processing mode is more favorable for discharging molten substances, the hole wall recasting layer is relatively small, and the hole quality is higher. On the other hand, the characteristic that the dove prism rotates for one circle around the mechanical shaft and the optical track formed by the dove prism rotates for two circles is adopted, so that the requirement of a motor for bearing the rotation of the dove prism on the motor is greatly reduced compared with the requirement of a traditional rotary cutting punching mode, meanwhile, the available repetition frequency of laser processing can be doubled, and the punching efficiency is greatly improved.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to implement them in accordance with the contents of the description, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings. The detailed description of the present invention is given in detail by the following examples and the accompanying drawings.
Drawings
The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the utility model and together with the description serve to explain the utility model without limiting the utility model. In the drawings:
FIG. 1 is a schematic block diagram of a rotary cutting system based on a combination of a galvanometer and a dove prism according to the utility model;
FIG. 2 is a schematic diagram of a dual-galvanometer unit of the rotary cutting system based on the combination of galvanometers and dove prisms according to the present invention;
FIG. 3 is a schematic diagram of an error of a dove prism of the rotary cutting system based on the combination of the galvanometer and the dove prism of the present invention;
FIG. 4 is an optical trace diagram of a dove prism of the rotary cutting system based on the combination of the galvanometer and the dove prism of the utility model;
FIG. 5 is a schematic diagram of the error compensation of the dove prism rotating unit of the rotary cutting system based on the combination of the galvanometer and the dove prism according to the utility model;
fig. 6 is another schematic diagram of error compensation of the dove prism rotating unit of the rotary cutting system based on the combination of the galvanometer and the dove prism;
fig. 7 is a focusing schematic diagram of the rotary cutting system based on the combination of the galvanometer and the dove prism.
Description of the reference numerals: the device comprises a first deflection double-vibrating-mirror unit vibrating mirror 1, a second deflection double-vibrating-mirror unit vibrating mirror 2, a dove prism rotating unit 3, an adjusting knob 4, a dove prism 5, a first focusing mirror 6, a second focusing mirror 7, a reflecting mirror 8, a focusing unit lens group 9 and a processing workpiece 10.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the utility model. The utility model is described in more detail in the following paragraphs by way of example with reference to the accompanying drawings. Advantages and features of the present invention will become apparent from the following description and from the claims. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the utility model herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
As shown in fig. 1 to 7, the present invention provides a rotary cutting system based on a combination of a galvanometer and a dove prism, which comprises a deflection double-galvanometer unit, a dove prism rotating unit 3, a focusing unit and a focusing unit, which are sequentially arranged on an incident laser beam light path; the deflection double-galvanometer unit is used for deflecting and deflecting the incident laser beam to the dove prism rotating unit 3 according to a preset position and an angle; the dove prism rotating unit 3 is used for adjusting laser beams into dynamic emergent light moving in a circular track; the focusing unit is used for dynamically adjusting the focus position of dynamic emergent light; the focusing unit is used for focusing the laser beam on the workpiece 10 to be processed.
The specific working principle and process are as follows:
firstly, the incident laser beam generated from the laser firstly enters into the deflection double-vibration mirror unit to realize the deviation of the beamDeflection is realized, so that the purposes of accurately controlling the taper of the small hole and the size of the small hole are achieved, and meanwhile, adjustment and conversion of various punching modes are realized by matching with a rotary cutting system in the machining process; the deflection double-vibration mirror unit mainly comprises two vibration mirrors which are matched with each other in a compensation way, the first deflection double-vibration mirror unit vibration mirror 1 deflects an incident beam by a certain angle and then emits the incident beam into the second deflection double-vibration mirror unit vibration mirror 2, and when a laser beam reaches the second deflection double-vibration mirror unit vibration mirror 2, the central axis of the laser beam and the mechanical axis of a system form a certain included angle theta1And a translational distance L, the second deflection double-galvanometer unit galvanometer 2 gives a deflection angle theta to the laser beam2Compensating the deflection angle of the central axis of the laser beam and the mechanical axis of the system and giving the laser beam a slight angle theta2-θ1Thereby further determining the size of the machined aperture.
The deflection double-vibrating mirror unit also comprises an independently developed software and hardware control system which is used for realizing the coordinated motion of the double-vibrating mirror and realizing a specific punching mode. The size of the second deflection double-galvanometer unit galvanometer 2 has certain requirements, and the requirement that the laser beam can still be adjusted after the beam translation is met.
As shown in FIG. 2, the first deflection double-vibrating mirror unit galvanometer 1 and the second deflection double-vibrating mirror unit galvanometer 2 can swing back and forth along the direction of the bidirectional arrow on the figure, the laser beam enters the first deflection double-vibrating mirror unit galvanometer 1, and the first deflection double-vibrating mirror unit galvanometer 1 reflects the laser beam by an angle theta1The laser beam is deflected from the axis center when being reflected to the second deflection double-vibrating mirror unit vibrating mirror 2, the laser reflected from the second deflection double-vibrating mirror unit vibrating mirror 2 is parallel to the laser when being incident, thereby achieving the effect of laser beam translation, and the deflection distance is L × sin (theta)1) Angle theta of second deflection double galvanometer unit galvanometer 2 to laser beam1Compensating for the deviation angle theta2. By theta2And the focal length of the focusing lens, the size of the punched small hole can be calculated.
Then, the light is deflected according to the preset position and angle to form deflected light, and then enters the dove prism rotating unit 3. The rotating action of the laser beams is realized, and the laser beam tracks can rotate for 720 degrees around the mechanical axis of the system when the dove prism 5 rotates for 360 degrees around the mechanical axis of the system; the dove prism rotating unit 3 is composed of a dove prism 5, a dove prism 5 placing device capable of achieving dynamic balance adjustment and placing of the dove prism 5 and a rotating air shaft motor, the dove prism 5 placing device can achieve up-and-down translation adjustment and swing adjustment of the dove prism 5, and dynamic balance adjustment is achieved through screws and hole positions attached to the dove prism 5.
As shown in fig. 3, when Δ d or Δ a of the dove prism 5 is not zero, the optical trajectory shown in fig. 4 is caused, when the dove prism 5 rotates around the mechanical axis for one circle, when Δ d is not zero, the angle between the light and the mechanical axis when the dove prism 5 rotates at different angles is caused to change, so that the optical trajectory shown in fig. 4 is generated on the focusing plane, and when Δ a is not zero, the distance between the light and the mechanical axis when the dove prism rotates at different angles is caused to change, so that the movement trajectory of the laser beam before focusing is as shown in fig. 4.
As shown in fig. 5, when the error Δ a of the dove prism 5 itself is not zero, the error can be compensated by translating the position of the dove prism 5, i.e. adjusting the displacement distance between the central axis of the dove prism 5 and the rotating mechanical axis of the system by the lower adjusting knob 4, and at the same time, the adjustment mode shown in fig. 5 is also the principle of implementing the ultraviolet-green two-band application of the optical system.
As shown in fig. 6, when the angle error Δ d of the dove prism 5 itself is not zero, the error Δ d can be compensated by adjusting the angle between the central axis of the dove prism 5 and the system rotating mechanical axis.
The dove prism rotating unit 3 comprises a standard dove prism 5 and an air shaft motor for driving the dove prism 5 to rotate, and the air shaft motor drives the quasi-dove prism 5 to rotate so that the light ray track of the incident laser beam is emitted in a circular shape. The aperture of the collimator prism 5 is 15mm, and the length of the lower bottom is 66.5 mm. The optical devices for both green and ultraviolet bands, which have certain errors in the length and angle of processing, need to be adjusted and calibrated using the dove prism 5 placement device in the dove prism rotary unit 3.
Then, the deflected light enters the dove prism rotating unit 3 to be adjusted into dynamic emergent light moving in a circular track, and then enters a focusing unit for focusing, and the focusing focus of the laser is slightly adjusted in the laser processing process, so that the fine control of the laser processing is realized; the adjusting and descending unit is composed of two focusing lens groups, and the position of the second focusing lens 7 can be finely adjusted to realize the rapid adjustment of the focus position, so that the problem that the focus position cannot rapidly follow the laser processing preprocessing position due to high laser power and rapid material processing is solved, the focus after laser focusing is always positioned at the preprocessing position of a workpiece, and the punching quality and efficiency are greatly improved. After exiting from the second focusing lens 7, the light is reflected by the reflector 8 to adjust the angle of the light, so as to enter the focusing unit lens group 9 for focusing, and finally, the light is irradiated on a workpiece 10 to be processed for processing.
The focusing unit consists of a specially designed aspherical achromatism lens group and is used for realizing the focusing of laser beams and obtaining laser spots with high energy density for processing.
And finally, dynamically adjusting the focus position of the dynamic emergent light moving in the circular track through a focusing unit, and processing the processed workpiece 10 after focusing through the focusing unit.
As shown in fig. 7, the light beam emitted from the laser is always divergent, and the degree of divergence or the degree of convergence of the light beam entering the focusing unit can be adjusted by adjusting the positions of the first focusing mirror 6 and the second focusing mirror 7 of the focusing unit, thereby achieving focusing in an optical degree.
The focusing unit and the focusing unit have the effect of adjusting the focal length, the focusing unit is transversely placed on the workbench, the fine adjustment of the focal length is realized by moving the second focusing lens group, the influence of gravity can be ignored, the weight of a single lens group is smaller, used mechanical equipment can be miniaturized and refined, and the accurate, quick and efficient adjustment of the focal point can be realized; the focusing unit is connected with a transmission device, can move up and down in the vertical direction and is used for greatly adjusting the focus, but the lens group and the matched mechanical device have larger weight and influence the adjusting precision and speed.
According to the optional scheme, a laser is arranged in front of the deflection double-vibration mirror unit, light beams emitted by the laser are in Gaussian distribution, and the center of the laser beams is overlapped with the central axis of the shaping unit.
Has the advantages that:
1. the utility model provides a combined rotary cutting device of a galvanometer and a dove prism, which uses a laser rotary scanning punching mode, avoids the phenomenon that the temperature of the center of impact punching is higher than that of the periphery due to Gaussian distribution of laser intensity, and can well improve the problem of slow change of the taper of a small hole inlet by relatively uniform temperature distribution and the rotary scanning mode.
2. The utility model provides a combined rotary cutting device of a galvanometer and a dove prism, which adopts a galvanometer reflection type adjusting mode for realizing the deflection and deviation functions of laser, can be more efficiently and quickly matched with rotary cutting processing of the laser, and can also more flexibly select the processing mode of the rotary cutting processing, so that the hole punching is more precise, and the efficiency and the quality are higher.
3. The utility model provides a combined rotary cutting device of a galvanometer and a dove prism, which can realize three-dimensional processing of small holes and dynamic adjustment in the punching process under the action of the galvanometer.
4. The utility model provides a combined rotary cutting device of a galvanometer and a dove prism, wherein the dove prism rotates around a mechanical shaft to drive a laser beam to rotate, the dove prism rotates 360 degrees around the mechanical axis of an optical system, the laser beam emitted from the dove prism rotates 720 degrees, the rotating speed of the optical system is two times of that of the mechanical system, and by increasing the repetition frequency of laser pulses, the processing efficiency can be further improved under the condition of ensuring the processing quality.
5. The utility model provides a combined rotary cutting device of a galvanometer and a dove prism, which is adjustedDeflecting the angle theta of the two mirrors of the double-mirror unit1And theta2And the distance relationship between the two galvanometers can obtain laser beams with different deflection angles and different offset distances to be injected into the dove prism rotating unit, so that the processing of micropores with different sizes and different tapers is realized.
6. The utility model provides a combined rotary cutting device of a galvanometer and a dove prism, which roughly adjusts a focus through a mechanical movement device of a focusing unit, and precisely adjusts the focus of a processing surface through a focusing unit, so that the focus is precisely and rapidly reduced along with the depth of a drilled hole, a layer of material is removed by laser processing, the focus is reduced by one layer, the best laser removal effect is kept by the processing all the time, and better pore wall quality of a small hole and smaller thermal reaction are obtained.
In summary, the laser beam is incident by a deflection double-galvanometer unit, and the double-galvanometer unit is based on the relative translation distance and angle of the laser beam, and meanwhile, the existence of the double-galvanometer can better control the movement track of laser drilling, such as modes of back-and-forth scanning along a spiral line, drilling along a fixed circumferential track, circular cutting, drilling and the like; and rotating the laser beam with a deflection angle and an offset distance by the deflection action of the dove prism to realize the rotation of the laser beam track, and finally processing the workpiece after focusing the laser beam. The utility model greatly increases the speed of optical track rotation through the special optical property of the dove prism, thereby obtaining micropores with better quality and higher punching efficiency, and the multiband design of the dove prism can meet the processing requirements of ultraviolet light and green light, so that the device can not only finish the tiny holes under the ultraviolet condition, but also process the big holes under the green light condition, and control the processing cost.
The foregoing is illustrative of the preferred embodiments of the present invention, and is not to be construed as limiting the utility model in any way; the present invention may be readily implemented by those of ordinary skill in the art as illustrated in the accompanying drawings and described above; however, those skilled in the art should appreciate that they can readily use the disclosed conception and specific embodiments as a basis for designing or modifying other structures for carrying out the same purposes of the present invention without departing from the scope of the utility model as defined by the appended claims; meanwhile, any changes, modifications, and evolutions of the equivalent changes of the above embodiments according to the actual techniques of the present invention are still within the protection scope of the technical solution of the present invention.
Claims (6)
1. A rotary cutting system based on a combination of a galvanometer and a dove prism is characterized by comprising a deflection double-galvanometer unit, a dove prism rotating unit, a focusing unit and a focusing unit which are sequentially arranged on an incident laser beam light path;
the deflection double-galvanometer unit is used for deflecting and deflecting the incident laser beam to the dove prism rotating unit according to a preset position and an angle;
the dove prism rotating unit is used for adjusting the laser beam into dynamic emergent light moving in a circular track;
the focusing unit is used for dynamically adjusting the focus position of the dynamic emergent light;
the focusing unit is used for focusing the laser beam on the processed workpiece.
2. The rotary-cut system based on the combination of the galvanometer and the dove prism as claimed in claim 1, wherein the deflecting double-galvanometer unit comprises a first deflecting double-galvanometer unit galvanometer and a second deflecting double-galvanometer unit galvanometer which are complementary in function, the first deflecting double-galvanometer unit galvanometer is used for deflecting and reflecting the incident laser beam to the second deflecting double-galvanometer unit galvanometer, and the second deflecting double-galvanometer unit galvanometer is used for compensating the angle of the laser beam caused by the first deflecting double-galvanometer unit galvanometer.
3. The rotational atherectomy system of claim 2, wherein the second deflection double galvanometer unit galvanometer is further configured to simultaneously control the laser beam to be incident on the dove prism rotating unit at a predetermined angle that determines the distance between the laser beam focus position on the workpiece and the mechanical axis of the system.
4. The rotary-cut system based on the combination of the galvanometer and the dove prism as claimed in claim 1, wherein the dove prism rotating unit comprises a standard dove prism and an air shaft motor for driving the dove prism to rotate, and the air shaft motor drives the quasi-dove prism to rotate so as to enable the incident laser beam to dynamically emit in a circular motion track.
5. The rotary-cut system based on the combination of the galvanometer and the dove prism as claimed in claim 4, wherein an adjusting knob for adjusting the displacement and the placing angle of the dove prism is arranged below the quasi-dove prism.
6. The rotational atherectomy system based on the combination of a galvanometer and a dove prism of claim 1, wherein the focusing unit is a dynamic focusing system consisting of an optical 4f system.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202121728277.8U CN216938931U (en) | 2021-07-27 | 2021-07-27 | Rotary cutting system based on combination of galvanometer and dove prism |
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| CN202121728277.8U CN216938931U (en) | 2021-07-27 | 2021-07-27 | Rotary cutting system based on combination of galvanometer and dove prism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024099116A1 (en) * | 2022-11-10 | 2024-05-16 | 上海名古屋精密工具股份有限公司 | Method and apparatus for laser processing |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024099116A1 (en) * | 2022-11-10 | 2024-05-16 | 上海名古屋精密工具股份有限公司 | Method and apparatus for laser processing |
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