CN206230159U - A kind of laser drill and drilling fill system - Google Patents
A kind of laser drill and drilling fill system Download PDFInfo
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- CN206230159U CN206230159U CN201621171825.0U CN201621171825U CN206230159U CN 206230159 U CN206230159 U CN 206230159U CN 201621171825 U CN201621171825 U CN 201621171825U CN 206230159 U CN206230159 U CN 206230159U
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Abstract
The utility model discloses a kind of laser drill and drilling fill system, including laser light source module, incident beam rotary motion module, Beam rotation angle compression multiplying power adjustable module and Laser Focusing and focus handover module.The utility model introduces Beam rotation angle compression multiplying power adjustable module, during so that laser high-speed rotating, the Beam rotation angle compression multiplying power of adjustment Beam rotation angle compression multiplying power adjustable module, realize the adjustment of the rotary motion track diameter of the focused spot of focus on light beam so that focused spot rotary motion track diameter and the adjustable perfect adaptation of boring aperture；And introducing expands multiplying power compensating module, during so that Beam rotation angle compression multiplying power adjustable module carrying out anglec of rotation compression to incident rotary light beam, the corresponding entrance spot diameter for changing incident rotary light beam, the stabilization of the focused spot spot diameter of focus on light beam is ensured, has been conducive to the stabilization and processing effect of laser processing technology.
Description
Technical field
The utility model is related to field of laser processing, and in particular to a kind of laser drill and drilling fill system.
Background technology
Laser drill field, laser spot switches between hole and hole, and current vibration mirror scanning is the most fast of comparative maturity
Switching mode, shows acceleration and deceleration high, displacement linear velocity and locating speed.Two-dimension displacement platform is very slow one kind side
Formula, typically seldom employs.
Obtaining rotary light beam using the rotation of high speed rotating optical element is used to laser machine, due to dynamic equilibrium problems, optics
Element does not accomplish very complicated, and size is also done less, therefore the anglec of rotation of high speed rotary beam does not accomplish can adjust, but actual
In, the diameter in the hole of required processing needs what is changed at any time really, needs flexibility to change in high speed rotary drilling and aperture
There is huge challenge between change.
Utility model content
A kind of laser drill of the utility model and drilling fill system, solve the defect and deficiency of prior art.
The technical scheme that the utility model solves above-mentioned technical problem is as follows：Filled there is provided a kind of laser drill and drilling
System, including laser light source module, incident beam rotary motion module, Beam rotation angle compression multiplying power adjustable module and laser
Focus on and focus handover module；
The laser light source module, for producing incident beam, and the incident incident beam rotary motion module；
The incident beam rotary motion module, for carrying out rotation modulation to export rotary light beam, shape to incident beam
Into the first light beam that the optical axis around the incident beam is rotated, the incident Beam rotation angle compression of first light beam
Multiplying power adjustable module, wherein, the first beam optical axis rotation full-shape is less than 30 milliradians；The incident beam rotary motion mould
Block includes at least one laser beam rotary unit, and the laser beam rotary unit includes rotation transmission optical component and is used for
The drive device for driving the rotation transmission optical component to rotate；
The Beam rotation angle compresses multiplying power adjustable module, for being expanded to the first light beam and to first light
The Space Rotating angle of beam is compressed, and second light beam and the incident Laser Focusing of output anglec of rotation compression are cut with focus
Mold changing block；
The Laser Focusing and focus handover module, for being focused to second light beam, to form focus on light beam,
And control the focused spot of the focus on light beam to be switched between different machining cells or at a machining cell pair
The focused spot scanning motion of the focus on light beam carries out synkinesia control；
Wherein, the through hole for different pore size drills, and Beam rotation angle compression multiplying power adjustable module is to described the
The Space Rotating angle of one light beam is compressed, and obtains the second light beam of Space Rotating angle corresponding with through-hole aperture；When described
Space rotation of the Beam rotation angle compression multiplying power adjustable module using different anglec of rotation compression multiplying powers to first light beam
When gyration is compressed, the diameter of the circular rotating track at the focused spot center of the focus on light beam is different；
For blind hole drilling, Space Rotating of the Beam rotation angle compression multiplying power adjustable module to first light beam
Angle carries out continuous compression so that the focused spot movement locus of the focus on light beam is helix or approximate helical line；Or
Person, the Beam rotation angle compression multiplying power adjustable module carries out multiple discrete pressure to the Space Rotating angle of first light beam
Contracting so that second light beam forms multiple anglecs of rotation in blind hole drilling stage, and then causes the focusing of the focus on light beam
Focus obtains corresponding concentric circular tracks.
The beneficial effects of the utility model are：Beam rotation angle compression multiplying power is introduced in whole drilling fill system
Adjustable module so that when laser high-speed rotates, adjustment Beam rotation angle compresses the Beam rotation angle pressure of multiplying power adjustable module
Demagnification rate, realizes the adjustment of the rotary motion track diameter of the focused spot of focus on light beam so that focus rotary motion track is straight
Footpath and the adjustable perfect adaptation of boring aperture, improve the processing efficiency of laser, it is also possible to which flexibility changes the drilling of high speed rotary laser
Pore size.
On the basis of above-mentioned technical proposal, the utility model can also make following improvement.
Further, the rotation transmission optical component is prism wedge or diffraction body grating or wedge, the driving dress
Hollow spindle motor is set to, the rotation transmission optical component is arranged on the electric machine main shaft of the hollow spindle motor；It is described
Hollow spindle motor is air supporting hollow spindle motor or magnetic floating heart spindle motor.
It is described further to have the beneficial effect that：Because drive device can use air supporting hollow spindle motor or magnetic floating
Heart spindle motor, can control laser beam rotary unit at a high speed or ultrahigh speed rotates, and its laser motion processing effect is greatly improved
Rate.
Wherein, when Beam rotation angle compression multiplying power adjustable module compresses multiplying power to institute using the different anglecs of rotation
When the Space Rotating angle for stating the first light beam is compressed, the focused spot spot diameter of the focus on light beam follows adjustment,
Do not have under the conditions of other measures, the second light beam beam diameter can become big, the corresponding focused spot spot diameter for stating focus on light beam
Can diminish, it is necessary to take the measure including pulse energy size or pulsewidth length including adjustment incident beam, maintenance laser
Focused spot laser peak power density substantially constant.Second light beam beam diameter can become big, corresponding to state the poly- of focus on light beam
Burnt focus spot diameter can diminish, and this is that the basic Laser Transmission of Gaussian beam focuses on rule.Laser for different-diameter gathers
The laser parameter needs such as burnt hot spot, the laser energy of incident laser, laser pulse repetition frequency and laser pulse width are corresponding to be adjusted
Whole, the laser drill effect for obtaining high-quality is good.
Further, the Laser Focusing and focus handover module are vibration mirror scanning f-theta unit, and the galvanometer is swept
Retouching f-theta unit includes scanning galvanometer and scanning f-theta mirror；
Injected after the scanned vibration mirror reflected of second light beam of the Beam rotation angle compression multiplying power adjustable module output and swept
F-theta mirror is retouched, then focuses on to form focus on light beam through the scanning f-theta mirror, wherein, the scanning galvanometer is by scanning
Vibration mirror reflected eyeglass deflects the switching for reaching the focused spot for controlling the focus on light beam between different machining cells, Huo Zhe
In Laser output process at one machining cell, the scanning galvanometer passes through scanning galvanometer reflecting optics auxiliary deflection pair
The focused spot scanning motion of the focus on light beam carries out synkinesia control.
It is described further to have the beneficial effect that：The application employs the scanning focused mirror of flat field as the scanning focused hand of flat field
Section, after the scanning focused mirror of flat field is focused to light beam, displacement of the laser spot on the scanning focused mirror focal plane of flat field
Be directly proportional to the scanning focused mirror focal length of flat field, with flat field scanning focused mirror inlet beam peace field scan focus lamp optical axis included angle or
The changing value of person's angle is directly proportional, once the scanning focused mirror of flat field is selected, the scanning focused mirror focal length of flat field is determined that, then laser
Displacement of the focus on the scanning focused mirror focal plane of flat field in theory only with the scanning focused mirror inlet beam of flat field and flat field
Scanning focused mirror optical axis included angle or angle change value are directly proportional.All collimated laser beams in incident same f-theta mirror and
When the orientation (angle and displacement) of collimated laser beam incidence f-theta mirror is in the scanning focused mirror scope of design of the flat field,
All parallel incident laser beams focus on same point on f-theta mirror focal plane.Beam rotation angle compression multiplying power can
Compression of the mode transfer block to the laser beam anglec of rotation, is embodied directly in the change of laser spot rotating diameter of focus on light beam above.
Beam rotation angle compression multiplying power adjustable module coordinates vibration mirror scanning f-theta unit to switch energy to the high-speed displacement of laser beam
Power and extensive area scanning machining ability, can reach on a large scale, the mesh of the variable micropore drilling in high-speed high-quality amount, aperture
, it is also admirably suitable for the blind hole laser milling processing of the blind slot or time processing multiple aperture of cross section change.
Further, the Beam rotation angle compression multiplying power adjustable module includes housing and lens group, the lens group
It is installed in housing, lens of the lens group comprising at least four series connection, by changing the multiple lens in the lens group
Between the spacing compression of realizing to the Space Rotating angle of first light beam, can also simultaneously adjust second light beam
The angle of divergence is so as to adjust the locus of the focused spot of focus on light beam so that the focused spot is in workpiece to be processed all the time
Surface.
The Beam rotation angle compression most typical form of expression of multiplying power adjustable module is exactly electronic adjustable beam expander, can
The size for expanding multiplying power is adjusted with automatically controlled at any time.In general, it is exactly Beam rotation angle compression multiplying power to expand multiplying power, in adjustment
During Beam rotation angle compression multiplying power, note keeping the beam divergence angle of the second light beam, it is ensured that laser spot is remained to be treated
Process the position to be processed of workpiece.
Further, the Beam rotation angle compression multiplying power adjustable module includes housing and prism group, the prism group
It is installed in housing, the prism group includes at least two prisms of series connection, by changing the multiple prisms in the prism group
Between the spatial relation compression of realizing to the Space Rotating angle of first light beam, can also simultaneously adjust described the
The angle of divergence of two light beams is so as to adjust the locus of the focused spot of the focus on light beam so that the focused spot is located all the time
In workpiece to be processed surface.
The prism group, most typical is exactly prism to (2 prisms are constituted), or the prism being made up of 3 to 4 prisms
Group, possesses laser beam expanding function.As the beam expander constituted with lens group, the multiplying power that expands of prism group is exactly Beam rotation angle
Compression multiplying power, rotating prism angle can realize expanding the change of multiplying power.
It is described further to have the beneficial effect that：Under same process conditions, the through hole or blind hole of different pore size are carried out at high speed
Processing, Beam rotation angle compression multiplying power adjustable module can be by adjusting the spacing between multiple lens or the multiple ribs of adjustment
Spatial relation between mirror realizes the compression of Space Rotating angle in real time to high speed rotary laser light beam, or enters one
The angle of divergence of the light beam of successive step second is so as to adjust the locus of laser spot so that Laser Focusing focus is all the time in be added
Work workpiece surface, improves Laser Processing efficiency.
Further, also including expanding multiplying power compensating module, the multiplying power compensating module that expands is positioned at the LASER Light Source
Between module and the incident beam rotary motion module, for expanding the incident beam that the laser light source module is produced
Beam, it is described expand after the incident incident beam rotary motion module of light beam；
Wherein, when Beam rotation angle compression multiplying power adjustable module carries out big multiplying power pressure to the first Beam rotation angle
During contracting, it is described expand multiplying power compensating module small multiplying power carried out to incident beam expand, or, when Beam rotation angle compression
When multiplying power adjustable module carries out small multiplying power compression to the first Beam rotation angle, the multiplying power compensating module that expands is to incident beam
Carry out big multiplying power to expand so that the beam diameter of the second light beam keeps constant or substantially constant, and then causes focus on light beam
Focused spot spot diameter keeps constant or substantially constant.
It is described further to have the beneficial effect that：Under conditions of the beam diameter of the second light beam is basically unchanged, the light beam
Anglec of rotation compression multiplying power adjustable module can increase the compression multiplying power scope of Beam rotation angle, and then increased focusing light
The boring aperture scope of the focused spot of beam.
Further, the multiplying power compensating module that expands includes housing and lens group, and the lens group is installed in housing,
The lens group includes at least two lens of series connection, is realized by changing the spacing between the multiple lens in the lens group
The adjustment of multiplying power or the adjustment of the angle of divergence are expanded to the incident beam, the Beam rotation is changed by the adjustment of the angle of divergence
The entrance spot diameter of the incident beam of angle compression multiplying power adjustable module.
Wherein, the Beam rotation angle compression multiplying power adjustable module expands multiplying power compensating module coordination meeting with described
There is more preferable effect, such as, be switched fast boring aperture.
The operation principle of the application is as follows：Incident laser is by after incident beam rotary motion module, output rotates at a high speed
Light beam, i.e. the first light beam, the incident Beam rotation angle compression multiplying power adjustable module of first light beam, export the second light
Beam, the second light beam incident laser is focused on and determines situation in focus lamp focal length with focus handover module, acquisition focus on light beam
Under, the motion circular path diameter of focus on light beam is by focus on light beam laser spot spot diameter and the second Beam rotation full-shape
Determine.Incident beam rotary motion module once it is determined that, the rotation full-shape of first light beam is determined that, thus by the light
The second Beam rotation required for beam anglec of rotation compression multiplying power adjustable module adjustment Beam rotation angle compression multiplying power is obtained is complete
Angle determines；If laser spot needs to carry out a series of concentric circular tracks motions, multiplying power is compressed by the Beam rotation angle
Adjustable module adjustment Beam rotation full-shape compression multiplying power, obtains a series of the second light beam of corresponding rotation full-shapes；If swashed
Optical focus needs to carry out spiral trajectory motion, then continuously adjust light beam by Beam rotation angle compression multiplying power adjustable module
Rotation full-shape compression multiplying power so that the rotation full-shape of the second light beam is continuously adjusted, so as to reach the purpose of the application.
Brief description of the drawings
Fig. 1 is a kind of Silicon Wafer laser drilling system structural representation of the utility model embodiment 1；
Fig. 2 is laser spot concentric circular tracks figure in embodiment 1；
Fig. 3 is laser spot spiral trajectory figure in embodiment 1；
Fig. 4 is Laser Focusing focus drilling track graph in embodiment 1；
Fig. 5 is a kind of LTCC laser drilling system structural representation of embodiment 2.
In accompanying drawing, the component names representated by each label are as follows：
1st, laser light source module, 2, expand multiplying power compensating module, the 21, first housing, 22, compensation concavees lens, 23, compensate convex
Lens, 3, incident beam, 5, incident beam rotary motion module, 51, the hollow spindle of air-floating main shaft motor, 52, rotary wedge
Prism, the 6, first light beam, 7, Beam rotation angle compression multiplying power adjustable module, the 71, second housing, the 72, first convex lens, 73,
First concavees lens, the 74, second concavees lens, the 75, second convex lens, the 8, second light beam, 9, Laser Focusing and focus handover module,
91st, the electric machine main shaft of the second motor, the 92, second reflecting optics, the 93, second the reflected beams, the 94, first the reflected beams, 95, first
Reflecting optics, the electric machine main shaft of the 96, first motor 97,98, telecentric scanning f-theta mirror, 10, focus on light beam, 11, to be processed
Workpiece, 12, donut trajectory diagram, 1201, drilling five rings, 1202, drilling Fourth Ring, 1203, the 3rd ring of drilling, 1204,
Drill the second ring, and 1205, the first ring of drilling, 13, boring aperture, 1301, the rotational trajectory of Laser Focusing focus center 1304,
1302nd, drill center, 1303, Laser Focusing focus, 1304, Laser Focusing focus center.
Specific embodiment
Principle of the present utility model and feature are described below in conjunction with accompanying drawing, example is served only for explaining this practicality
It is new, it is not intended to limit scope of the present utility model.
Embodiment 1, a kind of Silicon Wafer laser drilling system.The present embodiment is described in detail with reference to Fig. 1-Fig. 4.
Referring to Fig. 1, a kind of Silicon Wafer laser drilling system of the present embodiment is revolved including laser light source module 1, incident beam
Turn motion module 5, Beam rotation angle compression multiplying power adjustable module 7 and Laser Focusing and focus handover module 9；
The laser light source module 1, for producing incident beam 3, and the incident incident beam rotary motion module 5；
The incident beam rotary motion module 5, for carrying out rotation modulation to export rotary light beam to incident beam 3,
Form the first light beam 6 rotated around the optical axis of the incident beam 3, the incident Beam rotation angle of the first light beam 6
Degree compression multiplying power adjustable module 7, wherein, the optical axis of the first light beam 6 rotation full-shape is less than 30 milliradians；The incident beam rotation
Turning motion module 5 includes at least one laser beam rotary unit, and the laser beam rotary unit includes rotation transmission optics
Element and the drive device for driving the rotation transmission optical component to rotate；
The Beam rotation angle compression multiplying power adjustable module 7, for being expanded and the first light beam 6 to described first
The Space Rotating angle of light beam 6 is compressed, and exports the second light beam 8 and the incident Laser Focusing and Jiao of anglec of rotation compression
Point handover module 9；
The Laser Focusing and focus handover module 9, for being focused to second light beam 8, to form focusing light
Beam 10, and control the focused spot of the focus on light beam 10 to be switched between different machining cells or in a work sheet
Focused spot scanning motion of first place to the focus on light beam 10 carries out synkinesia control；
Wherein, the through hole for different pore size drills, Beam rotation angle compression multiplying power adjustable module 7 pairs described the
The Space Rotating angle of one light beam 6 is compressed, and obtains the second light beam 8 of Space Rotating angle corresponding with through-hole aperture；Work as institute
State Beam rotation angle compression multiplying power adjustable module 7 and sky of the multiplying power to first light beam 6 is compressed using the different anglecs of rotation
Between anglec of rotation when being compressed, the diameter of the circular rotating track at the focused spot center of the focus on light beam 10 is different；
For blind hole drilling, the space rotation of described Beam rotation angle compression multiplying power 7 pairs of first light beams 6 of adjustable module
Gyration carries out continuous compression so that the focused spot movement locus of the focus on light beam 10 is helix or approximate helical
Line；Or, the Space Rotating angle of Beam rotation angle compression multiplying power 7 pairs of first light beams 6 of adjustable module carries out many
Secondary discrete compression so that second light beam 8 forms multiple anglecs of rotation in blind hole drilling stage, and then causes the focusing light
The focused spot of beam 10 obtains corresponding concentric circular tracks.
The incident beam rotary motion mould 5 includes a laser beam rotary unit, the laser beam rotary unit
The drive device that transmission optical component rotates is rotated including rotation transmission optical component and for driving.Rotation transmission
Optical element is rotary wedge prism 52, and the refractive index of rotary wedge prism 52 is 1.45,3 millimeters of thickness, and its two sides plates 355
Nanometer anti-reflection film.Drive device is the air supporting hollow spindle motor with hollow spindle, and air supporting hollow spindle motor can also use band
The magnetic floating heart spindle motor of hollow spindle is substituted.The rotary wedge prism 52 is fixedly mounted on the hollow of air-floating main shaft motor
In main shaft 51, and rotate together.The diameter of bore of hollow spindle 51 of air-floating main shaft motor is 10 millimeters, air-floating main shaft electricity
Machine rotating speed is up to 180,000 revs/min.If selection more small through hole aperture, air-floating main shaft motor speed is up to 360,000 revs/min.Enter
The incident beam 3 of 5 pairs of transmissions of irradiating light beam rotary motion module carries out rotation modulation to export rotary light beam, is formed around the incidence
The first light beam 6 that the optical axis of light beam 3 is rotated, the optical axis of the first light beam 6 rotation full-shape is less than 30 milliradians.
Beam rotation angle compression multiplying power adjustable module 7 is additionally provided with after incident beam rotary motion module 5, is used for
Carrying out the compression of anglec of rotation multiplying power to the anglec of rotation of the first light beam of high speed rotary motion 6 (can also be while carries out the second light beam 6
Angle of divergence angle compensation), output rotation full-shape reduce the second light beam 6.In the present embodiment, the Beam rotation angle compression
Multiplying power adjustable module 7 include four series connection lens, constitute lens group, including the first convex lens 72, the first concavees lens 73,
Second concavees lens 74, the second convex lens 75, four series connection lens are installed in the second housing 71, and second housing 71 is
Assembly (in figure without sign) so that the spacing between four lens of series connection is adjustable, realizes to transmission rotary light beam, i.e., the
The angle compression of the rotation full-shape of one light beam 6, so as to realize the adjustment of the focused spot drilling motion track diameter of focus on light beam 10.
The Laser Focusing is vibration mirror scanning f-theta unit with focus handover module 9, and the vibration mirror scanning flat field gathers
Burnt unit includes scanning galvanometer and scanning f-theta mirror, and the scanning f-theta mirror is the scanning focused mirror of common flat field or remote
The types such as the scanning focused mirror of heart flat field.In the present embodiment, scanning f-theta mirror uses telecentric scanning focus lamp 98, telecentricity flat field
The focal length of scanning focused mirror 98 is 100 millimeters, 50 millimeters × 50 millimeters of f-theta scope.Scanning galvanometer includes the first speculum
The reflecting optics 92 of piece 95 and second.
First reflecting optics 95 of the scanning galvanometer are arranged on the electric machine main shaft 96 of the first motor 97 of scanning galvanometer.
Second reflecting optics 92 of the scanning galvanometer are arranged on the electric machine main shaft 91 of the second motor of scanning galvanometer.
The light path flow of whole Silicon Wafer laser drilling system is as follows：Laser light source module 1 produces incident beam 3, and passes through
Incident beam rotary motion module exports the first light beam 6, the incident Beam rotation angle compression multiplying power adjustable die of the first light beam 6
Block 7, the second light beam 8 of output beam rotation full-shape compression, the first reflecting optics of scanned galvanometer 95 of the second light beam 8 obtain first
The reflected beams 94, the second reflecting optics 92 of the scanned galvanometer of first the reflected beams 94 obtain the second the reflected beams 93, institute
State the second the reflected beams 93 to be focused through the scanning focused mirror 98 of telecentricity flat field, obtain focus on light beam 10, the focus on light beam 10
Directly act on workpiece to be processed 11.The workpiece to be processed 11 is 50 micron thickness, 8 inches of Silicon Wafers.
The incident beam 3 is a diameter of 1 millimeter of incident beam-expanding collimation light beam.
The relevant parameter of focus on light beam 10 is as follows：355 nanometers of optical maser wavelength, beam quality factor is less than 1.2, hot spot circularity
More than 90 percent, 20 watts of mean power, single mode gauss laser (horizontal field intensity is Gaussian Profile), pulse recurrence frequency 100
KHz.
The two panels reflecting optics of scanning galvanometer are that the first reflecting optics 95 are engaged with the second reflecting optics 92, are often processed
Finish a hole, the focused spot of focus on light beam 10 is just moved to next position, laser is black out in this jump procedure；
When first reflecting optics 95 and the second reflecting optics 92 lock motionless, now Laser output, the rotary wedge again
Prism 52 also rotates in high speed, and the rotary wedge prism 52 is due to designing certain angle of wedge so that the first light beam 6 rotates full-shape
It is 5 milliradians, and the anglec of rotation compression multiplying power of Beam rotation angle compression multiplying power adjustable module 7 is 5 (laser beam expanding multiplying powers 5
Times, beam expander multiplying power be N times, then outgoing beam move the anglec of rotation just taper to incident beam the anglec of rotation N/
One), then, focal beam spot diameter of the focus on light beam 10 on workpiece to be processed 11 is about 12 microns, forms 112 microns of diameter straight
Footpath circle (12 microns of focus spot diameter adds 100 microns of spot center rotating diameter).
If the anglec of rotation compression multiplying power of Beam rotation angle compression multiplying power adjustable module 7 be changed into respectively 5 times, 4.5 times,
4 times, 3.5 times, 3 times, then focal beam spot diameter of the focus on light beam 7 on workpiece to be processed 8 respectively may be about 12 microns, it is 13.5 micro-
Rice, 15 microns, 17 microns, 20 microns, laser spot spot center rotating diameter is respectively 100 microns, 111 microns, it is 125 micro-
Rice, 143 microns, 167 microns, laser spot spot center rotational trajectory formed concentric circles, drill the first ring in corresponding diagram 2 respectively
1205th, the second ring 1204 of drilling, the 3rd ring 1203 of drilling, drilling Fourth Ring 1202, drilling five rings 1201.
If the anglec of rotation of Beam rotation angle compression multiplying power adjustable module 7 compresses multiplying power from 5 times to 3 times according to certain
Speed consecutive variations, then the track of focal beam spot diameter of the focus on light beam 10 on workpiece to be processed 11, see Fig. 3, is spiral
Line tracking, this track is especially suitable for the filling scanning motion of blind hole drilling and blind slot milling.
Fig. 4 is may refer to, is rotary motion trajectory diagram when Laser Focusing focus drills, wherein, the second light beam 8 is through too drastic
Light is focused on to be focused on focus handover module 9 and forms Laser Focusing focus 1303, the center 1304 of the Laser Focusing focus 1303
Rotational trajectory is 1301, and motion processing is carried out around drill center 1302, and 13 is boring aperture.The compression times of Beam rotation angle
7 pairs of the first light beams 6 of rate adjustable module carry out rotation full-shape compression so that the center of the Laser Focusing focus 1303 for ultimately forming
1304 rotational trajectory diameter carries out perfect correspondence to boring aperture 13, improves laser drill effect.
The present embodiment employs f-theta mirror as the scanning focused means of flat field, including the scanning focused mirror of common flat field and
The scanning focused mirror of telecentricity flat field, the common scanning focused mirror of flat field or the scanning focused mirror of telecentricity flat field are focused to light beam
Afterwards, displacement of the laser spot on the scanning focused mirror focal plane of flat field is directly proportional to the scanning focused mirror focal length of flat field, and flat
The changing value of field scan focus lamp inlet beam peace field scan focus lamp optical axis included angle or angle is directly proportional, once flat field is swept
Retouch focus lamp to select, the scanning focused mirror focal length of flat field is determined that, then laser spot is on the scanning focused mirror focal plane of flat field
Displacement in theory only with flat field scanning focused mirror inlet beam peace field scan focus lamp optical axis included angle or variable angle
Value is directly proportional.All collimated laser beams are in incident same f-theta mirror and the orientation of collimated laser beam incidence f-theta mirror
When (angle and displacement) is in the f-theta mirror scope of design, all parallel incident laser beams focus on flat field and gather
Same point on burnt mirror focal plane.Therefore, the Beam rotation angle compression multiplying power adjustable module 7 changes to the transmission of angle of light beam
Become the displacement to laser spot in the focussing plane of f-theta mirror to contribute, band while beam Propagation angle is changed
The light beam translation for coming, the displacement to laser spot in the focussing plane of f-theta mirror is not contributed.
The range of work of the scanning focused mirror 98 of telecentricity flat field is still limited after all, if processing breadth is big not enough,
The workpiece to be processed 11 can also be actually placed on mobile platform, can so realize Laser Processing on a large scale, it is real
Trample the commonly referred to large area that middle Laser Processing sweep limits area is generally more than 200 millimeters × 200 millimeters.
The benefit of this processing mode of the present embodiment is to realize that flat-top laser machines effect with gauss laser, while retaining
The advantages of Laser Processing feature of gauss laser Diode laser and Gaussian Profile light intensity, be very suitable for needing flat-top laser machine or
The field of the uniform Fast Filling scanning of the small scope of person, processing effect is better than flat-top laser and controls very simple.
Embodiment 2, a kind of LTCC laser drilling system.
The laser drilling system of the present embodiment is as shown in figure 5, in addition to module in comprising above-described embodiment 1, also include
Multiplying power compensating module 2 is expanded, the transmitting outlet laser beam 4 of laser light source module 1, the outlet incidence of laser beam 4 expands multiplying power compensation mould
Block 2, and export incident beam 3.
As different from Example 1, it was additionally provided with before incident beam rotary motion module 5 and expands multiplying power compensating module
2；It is described when Beam rotation angle compression multiplying power 7 pairs of anglecs of rotation of the first light beam 6 of adjustable module carry out big multiplying power to be compressed
Expand the outlet laser beams 4 of multiplying power compensating module 2 pairs and carry out small multiplying power and expand, or, when the Beam rotation angle compresses multiplying power
It is described to expand 2 pairs of outlet laser of multiplying power compensating module when 7 pairs of anglecs of rotation of the first light beam 6 of adjustable module carry out small multiplying power compression
Beam 4 carries out big multiplying power and expands so that the beam diameter of the second light beam 6 keeps constant or substantially constant, and then causes to focus on light
The focused spot spot diameter of beam 10 keeps constant or substantially constant.So, the beam diameter in the second light beam 6 is basically unchanged
Under the conditions of, the Beam rotation angle compression multiplying power adjustable module 7 can increase the compression multiplying power scope of Beam rotation angle,
And then increased the boring aperture scope of the focused spot of focus on light beam 10.
It is described to expand multiplying power compensating module 2, including two the compensation concavees lens 22 and compensation convex lens 23 of series connection, series connection
Compensation concavees lens 22 and compensation convex lens 23 are installed in the first housing 21, and the housing 21 is assembly (without mark in figure
Show) so that the spacing between compensation concavees lens 22 and compensation convex lens 23 is adjustable, realizes the adjustment to the angle of divergence of incident beam 3,
Change entrance spot diameter of first light beam 6 in Beam rotation angle compression multiplying power adjustable module 7.Better way is to adopt
The first light beam 6 is changed with the adjustable multiplying power beam expander of four lens compress entering for multiplying power adjustable module 7 in Beam rotation angle
Mouth spot diameter, so may insure the first light beam 6 collimated incident beam anglec of rotation compression multiplying power adjustable module 7 as far as possible.
If for example, the anglec of rotation compression multiplying power of Beam rotation angle compression multiplying power adjustable module 7 be changed into respectively 5 times,
4.5 times, 4 times, 3.5 times, 3 times, it is described expand multiplying power compensating module 2 expand multiplying power respectively correspond to be adjusted to 1 times, 5/4.5 times,
5/4 times, 5/3.5 times, 5/3 times, then it is micro- that focal beam spot diameter of the focus on light beam 10 on workpiece to be processed 11 is about 12 substantially
Rice, laser spot spot center rotating diameter is respectively 100 microns, 111 microns, 125 microns, 143 microns, 167 microns, respectively
Drill the first ring 1205, the second ring 1204 of drilling, the 3rd ring 1203 of drilling, drilling Fourth Ring 1202, drilling the 5th in corresponding diagram 2
Ring 1201.The present embodiment is made using multiplying power compensating module 2 and the synergy of Beam rotation angle compression multiplying power adjustable module 7 is expanded
The beam diameter for obtaining the second light beam 6 keeps constant or substantially constant, and then causes that the focused spot hot spot of focus on light beam 10 is straight
Footpath keeps constant or substantially constant, and its benefit is that the focused spot spot diameter of focus on light beam 10 keeps being basically unchanged, favorably
In the stabilization of laser processing technology.Reference can be made to Fig. 4, can by expanding multiplying power compensating module 2 and Beam rotation angle compression multiplying power
The collaborative work of mode transfer block 7 so that the diameter of the Laser Focusing focus 1303 for ultimately forming keeps constant or substantially constant, has
Beneficial to the stability of Laser Processing.
Wherein, the multiplying power adjustable range of the Beam rotation angle compression multiplying power adjustable module 7 is 1~20 times, corresponding
The multiplying power compensation range that expands for expanding multiplying power compensating module 2 is 20~1 times.
If the anglec of rotation of Beam rotation angle compression multiplying power adjustable module 7 compresses multiplying power from 5 times to 3 times according to certain
Speed consecutive variations, the multiplying power that expands for expanding multiplying power compensating module 2 corresponds to from 1 times to 5/3 times correspondence consecutive variations respectively,
It is held essentially constant with the focused spot size that this ensures focus on light beam 10, and focus on light beam 10 is poly- on workpiece to be processed 11
The track of burnt spot diameter, see Fig. 3, is spiral trajectory, and this track is especially suitable for the filling of blind hole drilling and blind slot milling
Scanning motion.
The utility model proposes a kind of laser drill with drilling fill system, introduce Beam rotation angle compression multiplying power
Adjustable module so that when laser high-speed rotates, compresses multiplying power adjustable module and adjusts Beam rotation angle by Beam rotation angle
Degree compression multiplying power, realizes the adjustment of the focused spot rotary motion track diameter of focus on light beam so that the rotation of high speed rotary beam
Turn movement locus diameter and the adjustable perfect adaptation of boring aperture, realize the Laser Processing of different pore size drilling name；And introduce expansion
Beam multiplying power compensating module so that Beam rotation angle compresses multiplying power adjustable module carries out anglec of rotation compression to transmission rotary light beam
When, it is corresponding to change the entrance spot diameter that laser beam compresses multiplying power adjustable module in Beam rotation angle, it is ensured that the second light
Light beams diameter keeps constant or is basically unchanged, so that the stabilization of focus on light beam focused spot spot diameter has been ensured, favorably
In the stabilization and processing effect of laser processing technology.
The utility model is configured with Laser Focusing and focus handover module simultaneously so that the utility model is suitable for large area
Group's hole drilling (through hole and blind hole), and blind slot processing, the utility model is particularly suitable for thin material group's hole machined, also special
It is not suitable for milling and the Drilling operation of some crisp and hard materials, compared to conventional laser Milling Process, this programme processing uniformity,
Processing efficiency and crudy are increased substantially.
Preferred embodiment of the present utility model is the foregoing is only, is not used to limit the utility model, it is all in this practicality
Within new spirit and principle, any modification, equivalent substitution and improvements made etc. should be included in guarantor of the present utility model
Within the scope of shield.
Claims (7)
1. a kind of laser drill with drilling fill system, it is characterised in that including laser light source module, incident beam rotary motion
Module, Beam rotation angle compression multiplying power adjustable module and Laser Focusing and focus handover module；
The laser light source module, for producing incident beam, and the incident incident beam rotary motion module；
The incident beam rotary motion module, for carrying out rotation modulation to incident beam to export rotary light beam, formed around
The first light beam that the optical axis of the incident beam is rotated, the incident Beam rotation angle compression multiplying power of first light beam
Adjustable module, wherein, the first beam optical axis rotation full-shape is less than 30 milliradians；The incident beam rotary motion module bag
At least one laser beam rotary unit is included, the laser beam rotary unit includes rotation transmission optical component and for driving
The drive device that the rotation transmission optical component rotates；
The Beam rotation angle compresses multiplying power adjustable module, for being expanded to the first light beam and to first light beam
Space Rotating angle is compressed, the second light beam and the incident Laser Focusing and the focus switching mould of output anglec of rotation compression
Block；
The Laser Focusing and focus handover module, for being focused to second light beam, to form focus on light beam, and control
The focused spot for making the focus on light beam is switched over or at a machining cell to described between different machining cells
The focused spot scanning motion of focus on light beam carries out synkinesia control；
Wherein, the through hole for different pore size drills, and the Beam rotation angle compresses multiplying power adjustable module to first light
The Space Rotating angle of beam is compressed, and obtains the second light beam of Space Rotating angle corresponding with through-hole aperture；When the light beam
Anglec of rotation compression multiplying power adjustable module compresses Space Rotating angle of the multiplying power to first light beam using the different anglecs of rotation
When degree is compressed, the diameter of the circular rotating track at the focused spot center of the focus on light beam is different；
For blind hole drilling, Space Rotating angle of the Beam rotation angle compression multiplying power adjustable module to first light beam
Carry out continuous compression so that the focused spot movement locus of the focus on light beam is helix or approximate helical line；Or, institute
State Beam rotation angle compression multiplying power adjustable module carries out multiple discrete compression to the Space Rotating angle of first light beam, makes
Obtain second light beam and form multiple anglecs of rotation in blind hole drilling stage, and then cause that the focused spot of the focus on light beam is obtained
Obtain corresponding concentric circular tracks.
2. laser drill as claimed in claim 1 with drilling fill system, it is characterised in that the rotation transmission optical component
It is prism wedge or diffraction body grating or wedge, the drive device is hollow spindle motor, the rotation transmission optical component
On the electric machine main shaft of the hollow spindle motor；The hollow spindle motor is air supporting hollow spindle motor or magnetic floating
Heart spindle motor.
3. laser drill as claimed in claim 1 with drilling fill system, it is characterised in that the Laser Focusing is cut with focus
Mold changing block is vibration mirror scanning f-theta unit, and the vibration mirror scanning f-theta unit includes that scanning galvanometer and scanning flat field gather
Jiao Jing；
It is flat scanning to be injected after the scanned vibration mirror reflected of second light beam of the Beam rotation angle compression multiplying power adjustable module output
Field focus lamp, then focus on to form focus on light beam through the scanning f-theta mirror, wherein, the scanning galvanometer passes through scanning galvanometer
Reflecting optics deflect the switching for reaching the focused spot for controlling the focus on light beam between different machining cells, or at one
In Laser output process at machining cell, the scanning galvanometer is by scanning galvanometer reflecting optics auxiliary deflection to described
The focused spot scanning motion of focus on light beam carries out synkinesia control.
4. laser drill as claimed in claim 3 and drilling fill system, it is characterised in that Beam rotation angle compression
Multiplying power adjustable module includes housing and lens group, and the lens group is installed in housing, and the lens group includes at least four strings
The lens of connection, by changing Space Rotating of the realization of the spacing between the multiple lens in the lens group to first light beam
The compression of angle, can also simultaneously adjust the angle of divergence of second light beam so as to adjust the space of the focused spot of focus on light beam
Position so that the focused spot is in workpiece to be processed surface all the time.
5. laser drill as claimed in claim 3 and drilling fill system, it is characterised in that Beam rotation angle compression
Multiplying power adjustable module includes housing and prism group, and the prism group is installed in housing, and the prism group includes at least two strings
The prism of connection, is realized to first light beam by changing the spatial relation between the multiple prisms in the prism group
The compression of Space Rotating angle, can also simultaneously adjust the angle of divergence of second light beam so as to adjust the poly- of the focus on light beam
The locus of focus so that the focused spot is in workpiece to be processed surface all the time.
6. the laser drill as described in claim any one of 1-5 and drilling fill system, it is characterised in that also including expanding times
Rate compensating module, the multiplying power compensating module that expands is positioned at the laser light source module and the incident beam rotary motion module
Between, for being expanded to the incident beam that the laser light source module is produced, the incident incident light of light beam after expanding
Beam rotary motion module；
Wherein, when Beam rotation angle compression multiplying power adjustable module carries out big multiplying power compression to the first Beam rotation angle
When, it is described expand multiplying power compensating module small multiplying power carried out to incident beam expand, or, when Beam rotation angle compression times
When rate adjustable module carries out small multiplying power compression to the first Beam rotation angle, the multiplying power compensating module that expands enters to incident beam
The big multiplying power of row is expanded so that the beam diameter of the second light beam keeps constant or substantially constant, and then causes the poly- of focus on light beam
Burnt focus spot diameter keeps constant or substantially constant.
7. laser drill as claimed in claim 6 with drilling fill system, it is characterised in that it is described to expand multiplying power compensating module
Comprising housing and lens group, the lens group is installed in housing, and the lens group includes at least two lens of series connection, passes through
Change adjustment or diverging that the spacing between the multiple lens in the lens group realizes expanding the incident beam multiplying power
The adjustment at angle, the entrance that the Beam rotation angle compresses the incident beam of multiplying power adjustable module is changed by the adjustment of the angle of divergence
Spot diameter.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2016108241999 | 2016-09-14 | ||
| CN201621057474 | 2016-09-14 | ||
| CN201610824199 | 2016-09-14 | ||
| CN2016210574740 | 2016-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206230159U true CN206230159U (en) | 2017-06-09 |
Family
ID=58982314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621171825.0U Withdrawn - After Issue CN206230159U (en) | 2016-09-14 | 2016-10-26 | A kind of laser drill and drilling fill system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206230159U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106312335A (en) * | 2016-09-14 | 2017-01-11 | 张立国 | Laser drilling and drilled-hole filling system and method |
| CN110936014A (en) * | 2019-12-30 | 2020-03-31 | 苏州迅镭激光科技有限公司 | Optical system capable of realizing large-breadth scanning welding |
| CN111790982A (en) * | 2020-07-15 | 2020-10-20 | 中国航空制造技术研究院 | Laser hole making device and method |
| CN113319434A (en) * | 2021-06-28 | 2021-08-31 | 苏州赛腾精密电子股份有限公司 | Laser line width adjusting method and laser marking device |
| CN116372360A (en) * | 2023-02-21 | 2023-07-04 | 中国工程物理研究院激光聚变研究中心 | Micropore rotary-cut scanning processing optical system |
-
2016
- 2016-10-26 CN CN201621171825.0U patent/CN206230159U/en not_active Withdrawn - After Issue
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106312335A (en) * | 2016-09-14 | 2017-01-11 | 张立国 | Laser drilling and drilled-hole filling system and method |
| CN106312335B (en) * | 2016-09-14 | 2017-12-19 | 张立国 | A kind of laser drill and drilling fill system and method |
| CN110936014A (en) * | 2019-12-30 | 2020-03-31 | 苏州迅镭激光科技有限公司 | Optical system capable of realizing large-breadth scanning welding |
| CN111790982A (en) * | 2020-07-15 | 2020-10-20 | 中国航空制造技术研究院 | Laser hole making device and method |
| CN113319434A (en) * | 2021-06-28 | 2021-08-31 | 苏州赛腾精密电子股份有限公司 | Laser line width adjusting method and laser marking device |
| CN116372360A (en) * | 2023-02-21 | 2023-07-04 | 中国工程物理研究院激光聚变研究中心 | Micropore rotary-cut scanning processing optical system |
| CN116372360B (en) * | 2023-02-21 | 2024-01-12 | 中国工程物理研究院激光聚变研究中心 | Micropore rotary-cut scanning processing optical system |
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