CN103658975B - Laser beam splitting and processing device - Google Patents
Laser beam splitting and processing device Download PDFInfo
- Publication number
- CN103658975B CN103658975B CN201310642068.5A CN201310642068A CN103658975B CN 103658975 B CN103658975 B CN 103658975B CN 201310642068 A CN201310642068 A CN 201310642068A CN 103658975 B CN103658975 B CN 103658975B
- Authority
- CN
- China
- Prior art keywords
- laser beam
- laser
- light
- module
- subelement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
Abstract
The invention relates to the field of laser processing, in particular to a laser beam splitting and processing device. The laser beam splitting and processing device comprises a laser focusing and switching module, a laser splitting module and a beam steering module. The laser splitting module can process a single laser into multiple lasers, the laser focusing and switching module can focus lasers and switch spatial space of laser focal points at a high speed, and through combination of the laser splitting module and the laser focusing and switching module, array laser processing with high speed, efficiency and accuracy is realized; through the beam steering module, control content of beam movement trajectories during laser processing is further enriched, and requirements on various processing environments and processing conditions can be met. Compared with conventional laser processing devices, the laser beam splitting and processing device has the advantages that processing accuracy, processing efficiency, processing quality and the like are greatly improved, and the laser beam splitting and processing device adapts to the development trend of modern solid-sate lasers and can be widely applied to the field of laser processing.
Description
Technical field
The present invention relates to field of laser processing, particularly to a kind of laser beam splitter processing unit (plant).
Background technology
In prior art, the laser processing device that configuration vibration mirror scanning focuses on, is all using single beam laser processing, processing
Efficiency is not high enough, can not meet industrial requirement；And the device adopting multi-beam laser to process, it is all based on static focus mode,
There is the slow-footed problem of laser spot switching position.And current solid state laser particularly optical fiber laser, all towards height
Pulse recurrence frequency, high power ultrashort pulsewidth direction are developed, above-mentioned processing mode, can not be with current solid state laser
Development want adapt to it is impossible to enough give full play to the high pulse repetition frequency of existing laser instrument and the advantage of high power ultrashort pulsewidth,
More efficient laser processing mode therefore must be found, match with current laser developments level.
Content of the invention
The technical problem to be solved is to provide a kind of laser beam splitter processing unit (plant), solves in prior art and swashs
The technical problem that optical machining device working (machining) efficiency is low, process velocity is slow.
The technical scheme that the present invention solves above-mentioned technical problem is as follows：A kind of laser beam splitter processing unit (plant), including light beam control
Molding block, laser beam splitter module and Laser Focusing handover module, described incident beam sequentially passes through described Beam Control module, institute
State laser beam splitter module and be irradiated to described Laser Focusing handover module；Or described incident beam sequentially passes through described laser beam splitter
Module, described Beam Control module are irradiated to described Laser Focusing handover module；
Described Beam Control module is used for adjusting the state being irradiated to laser beam thereon；Described Beam Control module bag
Include position interchangeable laser beam expanding unit and light beam dynamic control unit, described laser beam expanding unit is used for being irradiated to described
Laser beam thereon carries out beam-expanding collimation, and described light beam dynamic control unit is used for adjusting and is irradiated to laser beam thereon
Motion state；
Described laser beam splitter module, for being split to the laser beam irradiating thereon, forms multiple beam group, described
Each light beam in multiple beam group is synchronously static with the described laser beam being irradiated in described laser beam splitter module or is synchronized with the movement；
Described Laser Focusing handover module, including focus lamp and motion platform；Described focus lamp be static focus mirror or
Quiescent imaging focus lamp, described focus lamp be used for each light beam irradiating in multiple beam group thereon is carried out static focus or
Imaging and focusing, exports focus on light beam group；Described motion platform, including motion in one dimension platform or the Multi-dimension Motion Platform, described motion
Platform is used for controlling each laser spot of each light beam of described focus on light beam group to switch in the locus of different machining cells, or
Person's scanning motion to each laser spot of described focus on light beam group at a machining cell carries out synkinesia control.
The invention has the beneficial effects as follows：The present invention by described Laser Focusing handover module, described laser beam splitter module with
The combination of described Beam Control module, it is possible to achieve multi-beam laser synchronizes focusing processing, is provided simultaneously with quick focus and cuts
Change and high accuracy focus switching capability, can be processed it is adaptable to laser is cut with high efficiency and high-precision multi-path laser focusing synchronous
Cut, hole, milling, the field such as welding, working (machining) efficiency has been significantly increased.Meanwhile, the Laser Focusing handover module of the present invention
Including focus lamp and motion platform, each of each light beam of light beam group focusing on through described focus lamp can be swashed by described motion platform
Optical focus switches in the locus of different machining cells, realizes big width laser Milling Process；Or in a machining cell
The scanning motion of each laser spot to described focus on light beam group for the place carries out synkinesia control, enriches laser beam further
Space tracking is modulated, and realizes more complicated laser processing mode.
On the basis of technique scheme, the present invention can also do following improvement.
Described laser beam splitter module is the first beam splitting unit, the second beam splitting unit, the 3rd beam splitting unit any one；Or
Laser beam splitter module described in person is the first beam splitting unit, in the second beam splitting unit, the 3rd beam splitting unit at least two series connection group
Close, described tandem compound is used for the laser beam being irradiated to thereon is split, and forms multiple beam group；
Described first beam splitting unit is any one or multiple tandem compound of micro optical element, described micro-optics unit
Part is used for carrying out light splitting to the laser beam irradiating thereon；Described micro optical element include binary optical elements, diffraction grating,
Microlens array or holographic optical elements (HOE)；Described diffraction grating includes one-dimensional transmissive diffraction grating, two-dimensional transmission formula diffraction light
Grid, 3-D transmission formula diffraction grating or reflective gratings；
Described second beam splitting unit is the tandem compound of optical thin film light-splitting device and optical mirror；Or described second
Beam splitting unit is the tandem compound of optical thin film light-splitting device, optical mirror and slide；
Described 3rd beam splitting device is the tandem compound of birefringece crystal and optical mirror；Or described 3rd beam splitting list
Unit is the tandem compound of birefringece crystal, optical mirror and slide.
Described micro optical element, is upper, the novel optical element developed of the development in optics and photoelectron technology,
There is small volume, light weight, low cost, the small, array of realizing that common optical elements are difficult to, integrated, imaging
With New function such as corrugated conversions.Described micro optical element, can be divided into diffraction optical element and refraction according to the approach that light is propagated
Property optical element two big class, including binary optical elements, diffraction grating, microlens array or holographic optical elements (HOE), apply swash
Light optical field can change laser beam corrugated, realizes optical beam transformation, such as the collimation of light beam, shaping, beam splitting etc..
Described binary optical elements, are one kind of diffraction optical element, and its diffraction theory based on light wave, using computer
Computer Aided Design, and with ultra-large integrated (VLSI) circuit production technique, (or Traditional optics surface) etching in chip base
Produce the embossment structure of two or more step depth, form pure phase position, the coaxial diffraction optical element reproducing, its diffraction efficiency
Height, beam shaping effect is good, and beam splitting uniformity is good.
Described grating, also referred to as diffraction grating, mainly have four fundamental propertys:Dispersion, beam splitting, polarization and phase matched, light
Most applications of grid are all based on these four characteristics.The splitting properties of grating refer to that grating can be by a branch of incidence monochromatic light
It is divided into the ability of multi beam emergent light, be divided into reflecting diffraction grating and transmission diffraction grating two big class, can apply in light network, light
The fields such as lotus root conjunction, Uniform Illumination, optical communication, optical oomputing.The Performance Evaluating Indexes of grating have:Diffraction efficiency, splitting ratio, compression
Than, hot spot heterogeneity and facular model etc..Described transmissive diffraction grating is divided into one-dimensional transmissive diffraction grating, two dimension thoroughly
Penetrate formula diffraction grating, 3-D transmission formula diffraction grating, described one-dimensional transmissive diffraction grating is to laser beam splitter, the laser after beam splitting
Bundle is in the same plane；Described two-dimensional transmission formula diffraction grating to laser beam splitter, the laser beam after beam splitting not in the same plane,
Institute's divided beams can be distributed with rectangular array, can also can be distributed with circumference array distribution, Yi Jiqi in two orthogonal planes
His situation spatial distribution etc.；Described 3-D transmission formula diffraction grating, the laser beam after beam splitting is not only two-dimensional space array distribution,
And with Laser Transmission direction, and after Laser Focusing, often can assume Diode laser during a branch of Laser Focusing or short focus are deep
Feature.
, by the array that clear aperature and relief depth are that micron-sized lens form, it is by one for described microlens array
Spatially it is divided into many small parts, each section is all focused on focal plane by corresponding lenslet before complete laser wave
On, a series of lenticules can be obtained by a series of plane being made up of focuses, many in wavefront sensing, light cumulative, light shaping etc.
The system of kind can get extensive application, in this processing unit (plant), possesses good spectrophotometric result.
Described holographic optical elements (HOE) adopts stereolithography process making, its interference based on light and diffraction principle, can be complete
Become the functions such as collimation, focusing, imaging, beam splitting, light beam steering and light beam scanning, in the processing unit (plant) of the present invention, have preferably
Spectrophotometric result.
Further, described laser beam splitter module is adjustable with the spacing of described Laser Focusing handover module, can adjust described
In multiple beam group, each light beam is in the relative position of focus lamp porch, such that it is able to adjust each laser spot of described focus on light beam group
Relative position；The light splitting surface of described laser beam splitter module can change according to the rotation of described laser beam splitter module, described
Laser beam splitter module rotates around the optical axis irradiating laser beam thereon, and the array beams distribution of its output also can be along described
The optical axis of laser beam rotates.
Further, described laser beam splitter processing unit (plant) comprises the light beam dynamic control unit of one or more series connection.
Further, when described incident beam sequentially passes through described laser beam splitter module, described laser beam expanding unit, described light
Bundle dynamic control unit, when being irradiated to described Laser Focusing handover module；Or when described incident beam sequentially pass through described swash
When light beam splitting module, described light beam dynamic control unit, described laser beam expanding unit are irradiated to described Laser Focusing handover module；
Or when described incident beam sequentially passes through described light beam dynamic control unit, described laser beam expanding unit, described laser beam splitter
When module is irradiated to described Laser Focusing handover module, described light beam dynamic control unit includes reflective optical devices and is used for
Described reflective optical devices are controlled to enter motor or the piezoelectric ceramics of horizontal deflection or translation.
Beneficial effect using above-mentioned further scheme is：Dynamically control when described laser beam expanding unit is arranged on described light beam
When after unit processed, described laser beam expanding unit, while completing laser bundle-enlarging collimation, also completes through described light beam
The work that laser motion track imaging after dynamic control unit modulation is amplified, so, enters Laser Focusing switching mould certain
Under the premise of the beam motion track of block, described light beam dynamic control unit only needs to carry out the modulation of very little, so described
Light beam dynamic control unit modulating speed can improve further.
Due to limited by the angle of each light beam after described laser beam splitter module is split, such as dividing through diffraction grating
Shu Hou, it is larger that the angle of each light beam is difficult to do, for example, reach 30 degree, typically all within 10 degree, so described laser divides
Reservation certain space is needed to separate for each laser beam, if institute between bundle module and described Laser Focusing handover module
State Beam Control module to be placed between described laser beam splitter module and described Laser Focusing handover module, then whole device structure meeting
More compact.
Further, described light beam dynamic control unit controls subelement, the second control subelement, the 3rd control for first
Any one of unit；Or described light beam dynamic control unit is the first control subelement, second controls subelement, the 3rd control
At least two tandem compound in subunit, described tandem compound is used for adjusting the motion shape being irradiated to laser beam thereon
State；
Described first control subelement includes transmission optical component and is used for controlling described transmission optical component to be put
The motor moving or translating or piezoelectric ceramics；
Described second control subelement includes acousto-optic modulator, and described acousto-optic modulator passes through to change the carrier frequency of driving source
Rate adjusts the Bragg grating reflection angle of described laser beam, changes described Laser beam propagation state；
Described 3rd control subelement includes a laser beam and rotates subelement or the laser light of at least two series connection
Shu Xuanzhuan subelement；Described laser beam rotation subelement includes rotating transmission optical component and is used for controlling described rotation thoroughly
Penetrate the driving means that optical element rotates；The laser being two or more series connection when the described 3rd control subelement
During Beam rotation subelement, described laser beam rotation subelement each independent control rotation, described previous laser beam rotation
The optical axis of subelement output beam carries out rotation along the optical axis of its incident light, and a laser beam rotates the output light of subelement afterwards
The optical axis that the optical axis of bundle rotates subelement output beam along previous laser beam is revolved round the sun, and also enters along revolution track
Row rotation.
Beneficial effect using above-mentioned further scheme is：For described light beam dynamic control unit, it can be above-mentioned son
Any one or a few tandem compound of unit.If subelement is rotated using laser beam, motor can be passed through
Laser beam is carried out with a high speed even ultrahigh speed rotation control, compares the mode of galvanometer swing, have higher process velocity and
Machining accuracy, in the processing of the low material of a lot of processing threshold values or thin-film material, can be greatly improved Laser Processing efficiency
With quality.
Further, described transmission optical component is transmission flat optical element or optical prism optical element；Described rotation
Transmission optical component is prism wedge, lens, flat optical element, one-dimensional transmissive diffraction optical element, two-dimensional transmission formula are spread out
Penetrate any one or multiple tandem compounds of optical element, 3-D transmission formula diffraction optical element, microlens array.
Described transmissive diffraction optical element is divided into one-dimensional transmissive diffraction optical element, two-dimensional transmission formula diffraction optics unit
Part, 3-D transmission formula diffraction optical element, described one-dimensional transmissive diffraction optical element is to laser beam splitter, the laser beam after beam splitting
In the same plane；, to laser beam splitter, the laser beam after beam splitting is not in same plane for described two-dimensional transmission formula diffraction optical element
Interior, institute's divided beams can be distributed with rectangular array, can also can be distributed with circumference array distribution in two orthogonal planes, and
Other situation spatial distributions etc.；Described 3-D transmission formula diffraction optical element, the laser beam after beam splitting is not only two-dimensional space battle array
Column distribution, and with Laser Transmission direction, and after Laser Focusing, often can present during a branch of Laser Focusing Diode laser or
Short focus depth feature.
Further, the driving means that described laser beam rotates subelement are hollow spindle motor, described rotation transmitted light
Learn element to be arranged on the main shaft of described hollow spindle motor, described electric machine main shaft is hollow shaft；
Or, the driving means that described laser beam rotates subelement are motor belt transmission device, described motor belt
Transmission device includes motor, driving wheel, driven pulley and is set in Timing Belt on described driving wheel and driven pulley, described motor peace
It is contained on described driving wheel, described rotation transmission optical component is fixedly mounted on described driven pulley.
Further, described hollow spindle motor is air supporting hollow spindle motor, magnetic floating heart spindle motor, the hollow electricity of hydraulic pressure
Spindle motor or servo hollow spindle motor.
When the hollow electric spindle of described hollow electric spindle motor is arranged on air-bearing, this hollow electric spindle motor is also referred to as
For air supporting hollow electric spindle motor, described air-bearing refers to realize hollow electric spindle by importing pressure air in bearing bore
The bearing suspending in atmosphere.In described air-bearing bearing bore the gap of pressure release minimum it is ensured that hollow electric spindle high-precision
Degree suspends and rotates it is possible to stably accurately rotate, and possesses high rotating speed, pinpoint accuracy, zerofriction force, no weares and teares, is not required to
Want lubricating oil, the speeds control performance having brilliance, compact conformation, lightweight, vibration is little, noise is low, the little response of inertia is soon etc. excellent
Point.
When the hollow electric spindle of described hollow electric spindle motor is arranged on Hydrodynamic and-static Bearing, this hollow electric spindle electricity
Machine is also referred to as hydraulic pressure hollow electric spindle motor.Described Hydrodynamic and-static Bearing refer to a kind of by be externally supplied constant pressure oily,
The bearing making electro spindle oil film of suspension high voltage static pressure carrying all the time from start to stopping is set up in bearing.Described hydrodynamic and hydrostatic pressure axle
Hold have do not wear and tear, long service life, starting power are little, extremely low, also applicable feature under even zero speed.This
Outward, the advantages of this bearing also has that running accuracy is high, oil film rigidity is big, can suppress film shocks.Described hydraulic pressure hollow electric spindle
Motor, due to employing Hydrodynamic and-static Bearing, therefore possesses very high rigidity and damping, possesses higher rotation speed and use the longevity
Life.
When the hollow electric spindle of described hollow electric spindle motor is arranged on electromagnetic suspension bearing, this hollow electric spindle motor
Also referred to as magnetic floating electrocardio spindle motor.Described electromagnetic suspension bearing is that electro spindle is suspended in space in fact using electromagnetic force by one kind
The bearing of existing contactless supporting, have the advantages that no to rub, need not lubricate, no oily pollution, energy consumption is low, noise is little, life-span length,
It is particularly well-suited in the particular surroundings such as vacuum, super dead room, high speed.Described magnetic floating electrocardio spindle motor, due to being hanged using electromagnetism
Floating axle holds, and it is good therefore to possess high speed performance, high precision, easily realizes the advantages of diagnosis and on-line monitoring.
When the hollow electric spindle of described hollow electric spindle motor is arranged on ceramic bearing, this hollow electric spindle motor is also referred to as
For ceramic bearing hollow electric spindle motor.Described ceramic bearing refers to that the rolling element of bearing uses Ceramic Balls, and bearing ring is still
The bearing of steel ring, ceramic bearing standardization level is high, under conditions of meeting certain rotating speed, possesses low cost structure simply excellent
Point.The hollow electric spindle of described ceramic bearing hollow electric spindle motor is arranged on ceramic bearing, and the rotating speed of this ceramic bearing exists
More than 10,000 turns per minute.
Further, described Laser Focusing handover module is configured with light path coaxial camera head monitor device.
Beneficial effect using above-mentioned further scheme is：Configuration light path coaxial camera head monitor device, can be very convenient
The positioning carrying out focal position of laser, and can easily observe Reciprocity of Laser ＆ Materials in laser processing procedure
State.
Further, in described focus on light beam group, the cross section of each focus spot in optical axis for each beam orthogonal is ellipse
Shape.
Beneficial effect using above-mentioned further scheme is：If the long axis direction of oval focal beam spot is transported for laser spot
Dynamic direction, then when laser pulse repetition frequency one timing, laser scribing speed, pulse overlap degree, joint-cutting section can be improved
Smooth degree；If the short-axis direction of oval focal beam spot is the laser spot direction of motion, then can obtain relatively wide cutting
Seam, laser machines occasion at some, and wide joint-cutting is conducive to the material slag of laser cutting boring generation effectively from joint-cutting
Spray.
Brief description
Fig. 1 is the structural representation of the embodiment of the present invention 1.
Specific embodiment
Below in conjunction with accompanying drawing, the principle of the present invention and feature are described, example is served only for explaining the present invention, and
Non- for limiting the scope of the present invention.
The laser beam splitter processing unit (plant) of the present invention carry out Laser Focusing with switching before, using Beam Control module to incidence
Light beam carries out beam-expanding collimation and motor adjustment, and the laser beam described Beam Control module being exported using laser beam splitter module
It is split, or first using laser beam splitter module, incident beam is split, each light beam warp again of the light beam group after beam splitting
Beam Control module carries out beam-expanding collimation and motion state is adjusted, thus realizing the multi-path laser synchronous processing to workpiece；Simultaneously
Laser Focusing handover module enriches laser beam space track modulation further, realizes more complicated laser processing mode.If controlling
The cross section of the focus spot perpendicular to optical axis of described each focus on light beam is ellipse, then be very suitable for laser scribing.
The operation principle of the present invention is as follows：Incident beam carries out beam-expanding collimation through Beam Control module and motion state is adjusted
Afterwards, form the first light beam, described first light beam is irradiated in described laser beam splitter module, formation the second light beam group, described second
Each light beam in light beam group is synchronized with the movement with described incident beam, the first light beam；Or incident beam divides through laser beam splitter module
Shu Hou, forms the first light beam group, and each light beam of described first light beam group carries out beam-expanding collimation and motion shape through Beam Control module
After state is adjusted, form the second light beam group, described first light beam group is static relative to incident beam, and described second light beam group is relative to first
Light beam group is synchronized with the movement；Each light beam of described second light beam group is irradiated to described Laser Focusing handover module, by described laser
Focus on handover module each light beam to be focused and high-speed displacement switching, control each laser spot to enter between different machining cells
Row switches or carries out synkinesia control to laser spot scans motion at a machining cell, reaches and carries out big model to workpiece
Enclose, high-speed high-quality amount Laser Processing purpose.
Described Beam Control module includes light beam dynamic control unit, and described light beam dynamic control unit is to being irradiated to thereon
Laser beam carry out status adjustment, described state includes beam motion state, light beam polarization state and Laser beam propagation shape
State etc., such as light beam steering, light beam translation or rotation.
Light beam dynamic control unit can be using structures such as laser beam rotation subelement, Piezoelectric Ceramic diaphotoscopes.
Described laser beam rotates the structure of subunit generally by the way of motor is rotated transmission optical component, described motor
Can be air supporting hollow spindle motor, magnetic floating heart spindle motor or servo hollow spindle motor, such as air-floating main shaft motor speed
Up to 160,000 revolutions per seconds, transmission optical component is rotated and realizes high speed even ultrahigh speed rotation, satisfaction is actual to process need in a large number
Ask.Now, rotation transmission optical component rotary speed is at a high speed at 5000 revs/min to 50,000 revs/min, at 50,000 revs/min
It is ultrahigh speed above.
Embodiment 1：
Fig. 1 is structural representation when a kind of present invention laser beam splitter processing unit (plant) is applied in aluminium oxide ceramics boring,
As shown in Figure 1：Including Beam Control module, laser beam splitter module and Laser Focusing handover module, described workpiece to be processed 89 is
1000 micron thickness aluminum oxide ceramic pieces, fixed installation is on the moving platform.
The Beam Control module of the present embodiment includes laser beam expanding unit（In figure does not indicate）With light beam dynamic control unit.
The incident beam 79 of the present embodiment is a diameter of 10 millimeters of collimated light beam, and its relevant parameter is as follows：Optical maser wavelength
532 nanometers, beam quality factor be less than 1.2, hot spot circularity be more than 90 percent, 35 watts of mean power, single mode gauss laser
（Laterally field intensity is Gaussian Profile）, pulse recurrence frequency 50 KHz.
The described light beam dynamic control unit of the present embodiment includes a laser beam rotation subelement, described laser beam
Rotation subelement includes rotating transmission optical component and states, for driving to be rotated, the driving that transmission optical component rotates
Device.Preferably, described rotation transmission optical component be prism wedge, lens, flat optical element, transmissive diffraction optics unit
Part, any one or multiple tandem compound of microlens array.In the present embodiment, described rotation transmission optical component is to tilt
Flat quartz glass 80, described flat quartz glass 80 thickness is 6 millimeters, and refractive index is 1.45, and two sides is all coated with 532 nanometers
Anti-reflection film.Described driving means can be hollow spindle motor or motor belt transmission device.If driving means are hollow spindle electricity
Machine, then can be air supporting hollow spindle motor, magnetic floating heart spindle motor, hydraulic pressure hollow electric spindle motor or servo hollow spindle electricity
Machine, adopts air supporting hollow spindle motor in the present embodiment, described flat quartz glass 80 tilts to be fixed on the hollow master of described air supporting
On the hollow spindle 81 of spindle motor, 15 millimeters of air-floating main shaft 81 diameter of bore, 180,000 revs/min of air-floating main shaft motor speed.?
In other embodiment, described driving means can also adopt motor belt transmission device, and described motor belt transmission device includes
Motor, driving wheel, driven pulley and be set in Timing Belt on described driving wheel and driven pulley, described motor is arranged on described active
On wheel, described flat quartz glass 80 is fixedly mounted on described driven pulley.
In other embodiments, described light beam dynamic control unit can also rotate subelement by least two laser beams
Constitute, described laser beam rotation subelement each independent control rotation, previous laser beam rotates the output beam of subelement
Optical axis carries out rotation along the optical axis of its incident beam, and a laser beam rotates the optical axis of the output beam of subelement along front afterwards
The optical axis that one laser beam rotates the output beam of subelement is revolved round the sun, and also carries out rotation along revolution track.
Described laser beam splitter module is transmissive diffraction grating 83, and laser beam splitter ratio is designed as 1 point 4, neighboring diffraction angle 5
Degree.In other preferred embodiments, described laser beam splitter module can be composed in series by one or more diffraction element, also may be used
To be substituted using two dimension even multidimensional diffraction beam splitting element, can also be made up of discrete optical element, for example film light splitting unit
Part and speculum, the combining of slide, or birefringece crystal and speculum, the combining of slide.
In the present embodiment, described Laser Focusing handover module includes quiescent imaging focus lamp and three-dimensional movement platform（XYZ tri-
Dimensional linear motion platform, 500 millimeters * 500 millimeters of XY direction range of movement, 20 millimeters of Z axis range）, described quiescent imaging
Focus lamp is used for carrying out imaging and focusing to each light beam in the second light beam group 84 that described laser beam splitter module 83 exports, output
Focus on light beam group 88；Described three-dimensional movement platform is used for controlling each laser spot of each light beam of described focus on light beam group in difference
The locus switching of machining cell；Or to each laser spot of described focus on light beam group 88 at a machining cell
Scanning motion carries out synkinesia control, and the elevating movement of workpiece to be processed 89.
The light path flow process of the present embodiment is as follows：Incident beam 79 through beam-expanding collimation is irradiated to described laser beam gyrator
Unit, forms the first light beam 82, and described first light beam 82, after transmissive diffraction grating 83 light splitting, forms the second light beam group 84,
Second light beam group 84 reflects to form the 3rd light beam group 86 through plane reflection eyeglass 85, and described 3rd light beam group 86 is gathered through quiescent imaging
Burnt mirror 87 carries out imaging and focusing, obtains focus on light beam group 88, and described focus on light beam group 88 directly acts on workpiece to be processed 89, institute
State workpiece 89 to be added and be fixed on described three-dimensional movement platform（In figure does not indicate）.
Every batch of array hole completion of processing, described three-dimensional movement platform just moves to each beam focus of focus on light beam group 88
Next position, this during laser be black out；When described three-dimensional movement platform（In figure does not indicate）Lock again not
Dynamic, now Laser output.By described Beam rotation subelement, form the first light beam 82 of high-speed rotation, the of high-speed rotation
One light beam 82 is diffracted to the second light beam group 84 of four bundle high-speed rotations through transmissive diffraction grating 83, described second light beam group 84
Four bundles light is all done and being synchronized with the movement of the first light beam 82, and described focus on light beam group 88 is gathered due to the imaging of quiescent imaging focus lamp 87
Jiaozhuo is used, and can depict corresponding circle on workpiece 89 relevant position to be added.In the present embodiment, described focus on light beam group 88
When carrying out Drilling operation with aluminum oxide ceramic piece 89, described three-dimensional movement platform（In figure does not indicate）Can be transported simultaneously
Dynamic, including the circular motion in X/Y plane and Z-direction（The beam Propagation direction of described focus on light beam group 88）Motion, institute
State linear platform（In figure does not indicate）Z-direction motion, be each light beam for adjusting described focus on light beam group 88
Focused spot and the relative position relation of described aluminum oxide ceramic piece 89,1mm thickness oxidation aluminium pottery needs repeatedly to adjust
Focus just can drill.
In the present embodiment, change described laser beam splitter module and the distance of Laser Focusing handover module, thus it is possible to vary described
The position relationship of each laser spot in focus on light beam group 88, such as spacing size.Described laser beam splitter module and Beam Control mould
The position of block can also exchange, when described Beam Control module is placed in described laser beam splitter module and described Laser Focusing switching mould
The separation of each light beam after described laser beam splitter module beam splitting when between block, not only can be ensured, realize processing effect, and whole
The structure of individual device is compacter, and now the laser beam expanding unit of described Beam Control module can individually be taken out and be placed in institute simultaneously
Before or after stating laser beam splitter module.In described Beam Control inside modules, described laser beam expanding unit is moved with described light beam
State control unit position is also interchangeable, when after described laser beam expanding unit being placed in described light beam dynamic control unit, described
Laser beam expanding unit, while completing laser bundle-enlarging collimation, also completes after the modulation of described light beam dynamic control unit
Laser motion track imaging amplify work, so, ensure enter Laser Focusing handover module beam motion track before
Put, described light beam dynamic control unit only needs to carry out the modulation of very little, so described light beam dynamic control unit is adjusted
Speed processed can improve further.
The light splitting surface of described laser beam splitter module can change, described laser according to the rotation of described laser beam splitter module
Beam splitting module rotates around the optical axis of the laser beam irradiating thereon, and the array beams distribution of its output also can be along described laser beam
Optical axis rotate.
The benefit of this processing mode of the present embodiment is to combine high-speed rotation advantage, the laser of laser rotary subelement
The single channel processing of beam splitting becomes the advantage of the advantage of multichannel processing, vibration mirror scanning high speed switched laser focus it is achieved that high-speed and high-efficiency
High-precision laser machining arrayed drills.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all spirit in the present invention and
Within principle, any modification, equivalent substitution and improvement made etc., should be included within the scope of the present invention.
Claims (8)
1. a kind of laser beam splitter processing unit (plant) it is characterised in that：Including Beam Control module, laser beam splitter module and Laser Focusing
Handover module, incident beam sequentially passes through described Beam Control module, described laser beam splitter module is irradiated to described Laser Focusing
Handover module；Or incident beam sequentially passes through described laser beam splitter module, described Beam Control module is irradiated to described laser
Focus on handover module；
Described Beam Control module is used for adjusting the state being irradiated to laser beam thereon；Described Beam Control module includes position
Put interchangeable laser beam expanding unit and light beam dynamic control unit；Described laser beam expanding unit is used for being irradiated to thereon to described
Laser beam carry out beam-expanding collimation, described light beam dynamic control unit is used for adjusting the motion being irradiated to laser beam thereon
State；
Described laser beam splitter processing unit (plant) comprises the light beam dynamic control unit of one or more series connection；Described light beam dynamic control
Unit is the first control subelement, second control subelement, the 3rd control subelement any one；Or described light beam is dynamic
Control unit is the first control subelement, second control subelement, the 3rd control subelement at least two tandem compound, institute
State tandem compound for adjust be irradiated to the motion state of laser beam thereon；
Described first control subelement include transmission optical component and be used for controlling described transmission optical component to be swung or
The motor of person's translation or piezoelectric ceramics；
Described second control subelement includes acousto-optic modulator, and the carrier frequency that described acousto-optic modulator passes through to change driving source is adjusted
Save the Bragg grating reflection angle of described laser beam, change described Laser beam propagation state；
Described 3rd control subelement includes the laser beam rotation that a laser beam rotates subelement or at least two series connection
Rotor unit；Described laser beam rotation subelement includes rotating transmission optical component and is used for controlling described rotation transmitted light
Learn the driving means that element rotates；The laser beam gyrator connected for two or more when the described 3rd control subelement
During unit, described laser beam rotation subelement each independent control rotation, previous laser beam rotates subelement output beam
Optical axis carry out rotation along the optical axis of its incident light, a laser beam rotates the optical axis of the output beam of subelement along front afterwards
The optical axis that one laser beam rotates subelement output beam is revolved round the sun, and also carries out rotation along revolution track；
Described laser beam splitter module, for being split to irradiating laser beam thereon, forms multiple beam group, described how light
Each light beam in bundle group is synchronously static with the laser beam being irradiated in described laser beam splitter module or is synchronized with the movement；
Described Laser Focusing handover module, including focus lamp and motion platform；Described focus lamp is quiescent imaging focus lamp, described
Focus lamp is used for each light beam in the multiple beam group irradiated thereon is carried out static focus or imaging and focusing, and output focuses on light
Bundle group；Described motion platform, including motion in one dimension platform or the Multi-dimension Motion Platform, described motion platform is used for controlling described focusing
Each laser spot of each light beam of light beam group switches in the locus of different machining cells, or in a machining cell
The scanning motion of each laser spot to described focus on light beam group for the place carries out synkinesia control.
2. according to claim 1 laser beam splitter processing unit (plant) it is characterised in that：Described laser beam splitter module is the first beam splitting
Unit, the second beam splitting unit, the 3rd beam splitting unit any one；Or described laser beam splitter module be the first beam splitting unit,
At least two tandem compound in second beam splitting unit, the 3rd beam splitting unit, described tandem compound is used for being irradiated to thereon
Laser beam is split, and forms multiple beam group；
Described first beam splitting unit is any one or multiple tandem compound of micro optical element, and described micro optical element is used
Carry out light splitting in the laser beam thereon to irradiation；Described micro optical element includes binary optical elements, diffraction grating, micro-
Lens array or holographic optical elements (HOE)；Described diffraction grating include one-dimensional transmissive diffraction grating, two-dimensional transmission formula diffraction grating, three
Dimension transmissive diffraction grating or reflective gratings；
Described second beam splitting unit is the tandem compound of optical thin film light-splitting device and optical mirror；Or described second beam splitting
Unit is the tandem compound of optical thin film light-splitting device, optical mirror and slide；
Described 3rd beam splitting device is the tandem compound of birefringece crystal and optical mirror；Or described 3rd beam splitting unit is
The tandem compound of birefringece crystal, optical mirror and slide.
3. laser beam splitter processing unit (plant) according to claim 1 it is characterised in that：Described laser beam splitter module is swashed with described
The spacing that light focuses on handover module is adjustable；The light splitting surface of described laser beam splitter module according to the rotation of described laser beam splitter module and
Change.
4. laser beam splitter processing unit (plant) according to claim 1 it is characterised in that：Described transmission optical component is put down for transmission
Plate optical element or optical prism optical element；Described rotation transmission optical component is prism wedge, lens, planar opticses are first
Part, one-dimensional transmissive diffraction optical element, two-dimensional transmission formula diffraction optical element, 3-D transmission formula diffraction optical element, micro-
Any one or multiple tandem compounds of lens array.
5. laser beam splitter processing unit (plant) according to claim 1 it is characterised in that：Described laser beam rotates subelement
Driving means are hollow spindle motor, and described rotation transmission optical component is arranged on the main shaft of described hollow spindle motor, electricity
Owner's axle is hollow shaft；
Or, the driving means that described laser beam rotates subelement are motor belt transmission device, described motor belt transmission
Device includes motor, driving wheel, driven pulley and is set in Timing Belt on described driving wheel and driven pulley, and described motor is arranged on
On described driving wheel, described rotation transmission optical component is fixedly mounted on described driven pulley.
6. laser beam splitter processing unit (plant) according to claim 5 it is characterised in that：Described hollow spindle motor is that air supporting is empty
Heart spindle motor, magnetic floating heart spindle motor, hydraulic pressure hollow electric spindle motor or servo hollow spindle motor.
7. according to the arbitrary described laser beam splitter processing unit (plant) of claim 1～6 it is characterised in that：Described Laser Focusing switching
Module is configured with light path coaxial camera head monitor device.
8. laser beam splitter processing unit (plant) according to claim 7 it is characterised in that：Each beam orthogonal in described focus on light beam group
It is ellipse in the cross section of each focus spot of optical axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310642068.5A CN103658975B (en) | 2013-12-03 | 2013-12-03 | Laser beam splitting and processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310642068.5A CN103658975B (en) | 2013-12-03 | 2013-12-03 | Laser beam splitting and processing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103658975A CN103658975A (en) | 2014-03-26 |
| CN103658975B true CN103658975B (en) | 2017-02-15 |
Family
ID=50298416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310642068.5A Active CN103658975B (en) | 2013-12-03 | 2013-12-03 | Laser beam splitting and processing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103658975B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104158067B (en) * | 2014-08-22 | 2016-06-22 | 苏州大学 | A kind of laser-stripping method of wire sheath |
| CN106475685B (en) * | 2016-12-07 | 2019-10-11 | 常州英诺激光科技有限公司 | A kind of device and marking method improving material laser marking quality and efficiency |
| CN107199408A (en) * | 2017-07-25 | 2017-09-26 | 英诺激光科技股份有限公司 | The method that cutting taper lifts cutting speed is reduced using multi beam ultrafast laser |
| DE102018205545A1 (en) * | 2018-04-12 | 2019-10-17 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | Device, laser processing machine and method for processing a workpiece |
| CN109323657B (en) * | 2018-08-29 | 2019-10-22 | 桂林电子科技大学 | A method of measurement optical interconnection module key position postwelding alignment offset |
| CN109290676B (en) * | 2018-11-21 | 2023-11-14 | 浙江龙游道明光学有限公司 | Anti-fake hyperbola marking device for retroreflective product |
| US11273520B2 (en) * | 2019-01-31 | 2022-03-15 | General Electric Company | System and method for automated laser ablation |
| CN109702329A (en) * | 2019-03-06 | 2019-05-03 | 广东工业大学 | A kind of array laser processing method |
| CN114888458B (en) * | 2021-08-17 | 2023-12-15 | 武汉华工激光工程有限责任公司 | Parallel rotary cutting machining device and method |
| CN114700628A (en) * | 2022-06-06 | 2022-07-05 | 一道新能源科技(衢州)有限公司 | Device for slotting focused laser birefringence perc battery piece |
| CN117239527B (en) * | 2023-11-14 | 2024-04-12 | 拉普拉斯新能源科技股份有限公司 | Laser device, laser processing system and processing method |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1271756C (en) * | 2004-02-26 | 2006-08-23 | 天津大学 | Microstructure fibre-optical femto second white light laser generator |
| WO2006000549A1 (en) * | 2004-06-29 | 2006-01-05 | Hitachi Via Mechanics, Ltd. | Laser machining device for drilling holes into a workpiece comprising an optical deflecting device and a diverting unit |
| CN101909804B (en) * | 2008-01-10 | 2014-10-22 | 以色列商奥宝科技股份有限公司 | Laser drilling method having simultaneity of changes in one baseboard |
| JP2012533149A (en) * | 2009-07-07 | 2012-12-20 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Patterning apparatus for generating a pattern in and / or on a layer |
| JP2011110591A (en) * | 2009-11-27 | 2011-06-09 | Pioneer Electronic Corp | Laser machining device |
| CN103203541B (en) * | 2013-02-04 | 2015-05-13 | 张立国 | Laser machining device |
| CN103317233B (en) * | 2013-06-07 | 2015-02-18 | 张立国 | Light beam movement track control device for laser processing |
| CN203712073U (en) * | 2013-12-03 | 2014-07-16 | 张立国 | Laser beam splitting device |
-
2013
- 2013-12-03 CN CN201310642068.5A patent/CN103658975B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN103658975A (en) | 2014-03-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103658975B (en) | Laser beam splitting and processing device | |
| CN203817621U (en) | Laser beam splitting and galvanometer scanning processing device | |
| CN103706946B (en) | A kind of laser beam splitter vibration mirror scanning processing unit (plant) | |
| CN203712073U (en) | Laser beam splitting device | |
| CN105081586B (en) | A kind of laser processing and device | |
| CN103317233B (en) | Light beam movement track control device for laser processing | |
| CN203343612U (en) | Light beam movement trail control device used for laser processing | |
| CN103071930B (en) | System and method for preparing micro-pore array through femtosecond laser direct writing | |
| CN203265914U (en) | Large-breadth micropore high-speed hole-drilling system | |
| CN102139415B (en) | Vascular stent cutting device and vascular stent cutting method | |
| CN103203541B (en) | Laser machining device | |
| CN104148802B (en) | Beam forming device and method | |
| CN102773605B (en) | A kind of rotary light beam module group laser motion tracking control system | |
| CN105149773B (en) | The processing method and device of a kind of clear glass | |
| CN111338089A (en) | Optical system with annular light spots | |
| CN113649595B (en) | Annular light spot optical system for metal SLM printing and printing method | |
| CN103552244A (en) | 3D (three-dimensional) laser printing device based on multi-laser-device scanning system | |
| CN201632766U (en) | Rotary double-optical wedge laser micropore processing device | |
| CN206230159U (en) | A kind of laser drill and drilling fill system | |
| CN110076449A (en) | Realize the laser head assembly of big aspect ratio processing | |
| JP2021186880A (en) | Laser head for achieving dynamic adjustment of laser spot using high frequency and superhigh frequency micro-vibration | |
| CN202207858U (en) | Ultraviolet laser fine processing device with double laser heads for different limited apertures | |
| CN105458492A (en) | Precision laser processing device based on swing angle compression | |
| CN203778974U (en) | Focusing optical path system for multi-pulse gradual laser drilling | |
| CN204248222U (en) | A kind of three axle dynamic focusing laser mark printing devices |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |