CN203343612U - Light beam movement trail control device used for laser processing - Google Patents
Light beam movement trail control device used for laser processing Download PDFInfo
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- CN203343612U CN203343612U CN 201320329921 CN201320329921U CN203343612U CN 203343612 U CN203343612 U CN 203343612U CN 201320329921 CN201320329921 CN 201320329921 CN 201320329921 U CN201320329921 U CN 201320329921U CN 203343612 U CN203343612 U CN 203343612U
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Abstract
The utility model relates to a light beam movement trail control device used for laser processing. The light beam movement trail control device comprises a light beam transmission direction control module, a light beam movement trail imaging amplification module, and a light beam focusing and focus switching module. The light beam transmission direction control module is used for modulating transmission directions of incident light beams emitted onto the light beam transmission direction control module. The light beam movement trail imaging amplification module is used for amplifying optical axis movement trails of a first light beam and carrying out beam expansion and collimation on the first light beam to form a second light beam. The light beam focusing and focus switching module is used for focusing the second light beam and controlling laser focuses to be switched among different processing units or carrying out auxiliary movement control on the laser focuses on one processing unit. The light beam movement trail control device has the advantages that the structure is simple, the transmission directions of the light beams can be controlled flexibly, and light beam scanning movement trails, light beam turning radiuses and the like can be adjusted dynamically; meanwhile, the scanning speed of the light beams in laser processing can be higher, large-size processing is facilitated, and requirements for actual laser processing can be met better.
Description
Technical field
The utility model relates to field of laser processing, relates in particular to a kind of track control device of the beam motion for Laser Processing.
Background technology
The patent that application number is 201010183539.7, the Beam rotation module adopted cannot dynamically change the Beam rotation diameter in process, is only suitable for using in the situation of the less variation of same work piece surface boring aperture, and therefore certain limitation is arranged.
The patent that application number is 200380110303.9, the light beam circumference modulation movement of galvanometer front is to move in a circle by the mirror reflects modulated laser, and speculum is by Piezoelectric Ceramic, its deflection amplitude is very little, is difficult to the hole that processing is larger.
The patent that application number is 201210460145.0, because the planar optics element is the work of swing mode, the planar optics element is very little to the modulation movement scope of laser beam, be not suitable for processing than large format, in the time of in certain range of work, planar optics element amplitude of fluctuation is less, its period frequency repeatedly scanned is just higher, but because general graphics processing all has the dimensions requirement, make the period frequency of scanning repeatedly not increase, there is limitation.
The utility model content
Technical problem to be solved in the utility model is to provide a kind of simple in structure, can control flexibly transmission orientation and the expanded light beam optical axis scanning motion track of light beam, and can make that beam flying speed is faster, shorter a kind of track control device of the beam motion for Laser Processing of scan period.
The technical scheme that the utility model solves the problems of the technologies described above is as follows: a kind of track control device of the beam motion for Laser Processing comprises that beam Propagation orientation control module, beam motion track imaging amplification module and light beam focus on and the focus handover module.
Described beam Propagation orientation control module is used for the transmission orientation that is transmitted into the incident beam on it is modulated, and incident beam is transmitted to rear the first beam emissions formed of orientation modulation to the beam motion track imaging amplification module that is positioned at this first light beam one side of described beam Propagation orientation control module outgoing.
Described beam motion track imaging amplification module carries out the imaging amplification and light beam is expanded to processing for the axis movement track of the first light beam to sending over from described beam Propagation orientation control module, the second light beam that enlarges and expand to form the axis movement track, and send to the light beam that is positioned at this this second light beam one side of beam motion track imaging amplification module outgoing to focus on and the focus handover module this second light beam.
Described light beam focuses on the focus handover module and is used for the second light beam sended over from described beam motion track imaging amplification module is focused on, and the control laser spot is switched or at a machining cell place, laser spot carried out to synkinesia control between different machining cells.
Further, described beam Propagation orientation control module comprises Beam rotation modulating unit and/or beam deviation modulating unit.
Further, described beam deviation modulating unit comprises the beam deviation modulation subunit of one or more series connection, and described beam deviation modulation subunit comprises transmission optical component and transmission optical component is swung or the motor of translation or piezoelectric ceramics for controlling; Or described beam deviation modulation subunit comprises reflective optical devices and the motor or the piezoelectric ceramics that carry out deflection or translation for controlling reflective optical devices; Or described beam deviation modulation subunit comprises acousto-optic modulator, the carrier frequency of the drive source by changing acousto-optic modulator is regulated the Bragg grating angle of reflection of described incident beam, changes the incident beam transmission direction.
Further, described transmission optical component is transmission planar optics element or optical prism optical element; Described reflective optical devices is reflecting optics.
Further, described Beam rotation modulating unit comprises the Beam rotation modulation subunit of or at least two series connection, described Beam rotation modulation subunit comprises transmission optical component and rotating driving device thereof, described transmission optical component rotating driving device is hollow spindle motor or motor belt transmission device, rotation transmission optical component in the Beam rotation modulation subunit is arranged on described hollow spindle electric machine main shaft, and described electric machine main shaft is hollow shaft.
Described motor belt transmission device comprises motor, driving wheel, driven pulley and is set in the Timing Belt on described driving wheel and driven pulley that described motor is arranged on driving wheel, and the rotation transmission optical component is fixedly mounted on driven pulley.
Further, described hollow spindle motor is the floating hollow spindle motor of air supporting hollow spindle motor or magnetic or ceramic bearing hollow spindle motor.
Further, described rotation transmission optical component is prism wedge or lens or planar optics element or diffracting object grating or wedge.
Further, described Beam rotation modulating unit, the Beam rotation modulation subunit that comprises at least two series connection, described Beam rotation modulation subunit rotating part is independently rotation separately, the output beam optical axis of Beam rotation modulation subunit carries out rotation along the optical axis of its incident light, the optical axis of the output beam of a rear Beam rotation modulation subunit is revolved round the sun along the optical axis of the light beam of the output of last Beam rotation modulation subunit, and carries out rotation along the revolution track.
Further, described beam motion track imaging amplification module comprises at least one enlargement ratio laser imaging unit, and described enlargement ratio laser imaging unit is the fixing laser imaging unit of enlargement ratio or the adjustable laser imaging unit of enlargement ratio.
Further, the fixing laser imaging unit of described enlargement ratio comprises the lens of a plurality of series connection and for the shell of fixing the plurality of lens; The laser imaging unit that described enlargement ratio is adjustable comprises shell, is installed on the lens of a plurality of series connection in described shell and the driver element that changes spacing between lens.
Further, described driver element is manual drives unit or electric drive unit.
Further, described light beam focusing is vibration mirror scanning focusing unit or platform movement quiescent imaging focusing unit with the focus handover module.
Described vibration mirror scanning focusing unit comprises scanning galvanometer and scanning flat field focus lamp, described scanning flat field focus lamp is focused on the emergent light from described beam motion track imaging amplification module output, described scanning galvanometer is for controlling the high speed switching of laser spot between different machining cells, or, at a machining cell place, described scanning galvanometer carries out synkinesia control to the laser spot scanning motion; Described scanning flat field focus lamp is the scanning focused mirror of common flat field or telecentric scanning focus lamp.
Described platform movement quiescent imaging focusing unit comprises quiescent imaging focus lamp and linear moving table, described quiescent imaging focus lamp carries out imaging and focusing for the emergent light to from described beam motion track imaging amplification module output, described linear moving table is for controlling the switching of laser spot between different machining cells, or, at a machining cell place, described linear moving table carries out synkinesia control to the laser spot scanning motion.
Operation principle of the present utility model is:
The transmission orientation of beam Propagation orientation control module modulated incident light beam, send the first light beam according to certain scanning motion track.The first light beam enters beam motion track imaging amplification module, manually adjust or automatically adjust the spacing between the lens of described beam motion track imaging amplification module inside, obtain the second parallel light beam of light beam, and the beam diameter ratio size of output beam the second light beam and input light beam the first light beam is the optical amplifier multiplying power of enlargement ratio laser imaging unit in this beam motion track imaging amplification module now, by enlargement ratio laser imaging unit interior lens spacing, this image optics enlargement ratio is adjustable continuously.When the first light beam high-speed, high precision motion, the second light beam is the synchronous high-speed high-precision motion also, and its movement locus shape is identical, the size difference.Because the complete small complete figure speed of the first beam flying is exceedingly fast, precision is high, and therefore, the second light beam can be with identical efficiency been scanned, and the figure of scanning can be than the corresponding amplification of the first beam flying figure.
Beam Propagation orientation control module comprises Beam rotation modulating unit and/or beam deviation modulating unit.
When the beam deviation modulation subunit comprises transmission optical component and for controlling that transmission optical component is swung or when the motor of translation or piezoelectric ceramics, described beam deviation modulation subunit is reflected wobble modulations to light beam.When the beam deviation modulation subunit comprises reflective optical devices and when controlling reflective optical devices and carry out the motor of deflection or translation or piezoelectric ceramics, described beam deviation modulation subunit is reflected wobble modulations to light beam.Adopt the beam deviation modulation subunit modulated beam of light motion orientation of above-mentioned two kinds of structures, light beam is carried out to the wobble modulations amplitude larger, complete one-period longer sweep time, light beam orientation modulating frequency is just lower, thereby has contradiction between the size of the scanning motion track of light beam and light beam orientation modulating frequency height.Because beam motion track imaging amplification module has to light beam the function that imaging is amplified and expanded, thereby in the situation of the beam deviation modulation subunit by above-mentioned two kinds of structures and the effect of mutually combining of beam motion track imaging amplification module, in the practical laser processed and applied, only need the skew of doing small amplitude of described beam deviation modulating unit to swing, therefore be offset hunting frequency very high, even can reach the frequency of 100 KHzs, and precision is high.
When the beam deviation modulation subunit comprises acousto-optic modulator, the beam deviation modulation subunit is carried out the diffraction wobble modulations to light beam.The carrier frequency of the drive source by changing acousto-optic modulator is regulated the Bragg grating angle of reflection of described incident beam, change the incident beam transmission direction, this mode is higher to the modulating frequency of light beam, but the beam wobbling amplitude is difficult to do greatly, is not suitable for the track occasion that exposes thoroughly.Imaging amplification by beam motion track imaging amplification module makes the first light beam become more the second light beam of large scale scanning motion track, more short scan movement velocity through the light beam image transformation.
When the driver element of the rotation transmission optical component of Beam rotation modulating unit is the forms such as air supporting hollow spindle motor or the floating hollow spindle motor of magnetic, the rotation transmission optical component is prism wedge or lens or planar optics element or diffracting object grating or wedge, very meticulous laser beam rotation (inverted cone surface, the positive conical surface, face of cylinder rotation) can be obtained, meticulous and ultrahigh speed the first Beam rotation speed can also be obtained.In this Beam rotation modulation scheme the inside, the first beam optical axis rotational trajectory size is dynamically adjusted more difficult realization.Employing imaging enlargement ratio is adjustable or dynamic adjustable beam motion track imaging amplification module, and the second beam optical axis rotational trajectory size is adjustable or dynamically adjustable can to realize rotating the output beam optical axis.
High-speed displacement switching capability and the extensive area scanning machining ability of vibration mirror scanning focusing unit to laser beam, the purpose of the micropore boring of can reach on a large scale, high-speed high-quality amount, aperture are variable, also be very suitable for blind slot that cross section changes or the blind hole laser milling processing in the multiple aperture of time processing.Due to the outstanding focus characteristics of having of static focus mirror, in conjunction with linear moving table, can realize meticulous micropore, blind slot, blind hole processing.
In a word, use the motion orientation modulation of beam Propagation orientation control module to the little motion amplitude high-precision high-speed of incident beam, use beam motion track imaging amplification module to amplify the first beam optical axis movement locus and to the first beam expander to obtain the second light beam, the second beam optical axis movement velocity is faster, track while scan is larger, focus on and the focus handover module in conjunction with light beam, complete particularly efficient micropore Drilling operation of the efficient micro-processing of various laser.
The beneficial effects of the utility model are:
The beam Propagation orientation control module formed by above-mentioned Beam rotation modulating unit and/or beam deviation modulating unit after can making beam Propagation orientation control module be modulated the transmission orientation that is transmitted into the incident beam on it, can obtain meticulous and with ultrahigh speed be rotated the first light beam and/or at a high speed, the first light beam of high-precision micro-displacement motion, the Beam rotation track can form inverted cone surface or the positive conical surface or the face of cylinder.
Owing to having adopted beam motion track imaging amplification module, under the second beam optical axis track while scan size one stable condition, only need the beam deviation modulating unit incident beam to be carried out to the transmission orientation motion modulation of small amplitude, the beam motion amplitude is less, the required time is just corresponding shorter, thereby capacitation enough greatly reduces the time that the first light beam completes path, unit scanning, greatly improved Laser Micro-Machining efficiency.
Owing to having adopted the adjustable beam motion track imaging amplification module of imaging enlargement ratio, thereby can adjust flexibly or dynamically adjust the track while scan size of the second beam optical axis.
Owing to having adopted beam motion track imaging amplification module, under the second beam optical axis rotating diameter one stable condition, the first beam optical axis rotating diameter can be less with respect to the second beam optical axis rotating diameter.The Beam rotation modulating unit can adopt the first little light beam of transmission optical component output rotating diameter of small size.The transmission optical component of small size is conducive to the Beam rotation modulating unit and obtains higher rotating speed, improves the rotating speed of the first light beam, thereby further improves the second Beam rotation speed.
Light beam focuses on and can realize laser spot is switched fast at different machining cells from the focus handover module, the Laser Processing effect and quality significantly improved, realize the big width laser Milling Process, or at a machining cell place, laser spot is carried out to synkinesia control, further enrich the laser beam space track modulation, realized more complicated laser processing mode.
This apparatus structure is simple, can control flexibly the transmission orientation of light beam, regulate or the sizes such as dynamic adjustments beam scanning motion track, Beam rotation radius, can also make the sweep speed of laser processing beam faster simultaneously, be easy to large-sized processing, the demand of more realistic Laser Processing.
The accompanying drawing explanation
The apparatus structure schematic diagram that Fig. 1 is the utility model embodiment 1 Copper Foil laser drilling through hole;
The apparatus structure schematic diagram that Fig. 2 is the utility model embodiment 2 aluminium nitride ceramics laser milling blind slots;
The apparatus structure schematic diagram that Fig. 3 is the utility model embodiment 3 aluminium nitride ceramics laser milling blind slots.
In accompanying drawing, the list of parts of each label representative is as follows:
1, beam Propagation orientation control module, 101, the Rotating Plates quartz glass, 102, the hollow spindle of air-floating main shaft motor, 103, the first plane mirror, 104, the second plane mirror, 112, the first beam deviation unit, 121, the first dull and stereotyped quartz glass, 122, the first rotating shaft, 113, the second beam deviation unit, 131, the second motor, 132, the second rotating shaft, 133, the second dull and stereotyped quartz glass, 2, beam motion track imaging amplification module, 201, the first convex lens, 202, the first concavees lens, 203, the second concavees lens, 204, the second convex lens, 205, shell, 3, light beam focuses on and the focus handover module, and 31, scanning galvanometer, 311, the electric machine main shaft of the second motor, 312, the second vibration mirror reflected eyeglass, 313, the first vibration mirror reflected eyeglass, 314, the first motor, 315, the electric machine main shaft of the first motor, 32, scanning flat field focus lamp, 4, workpiece to be processed, 5, incident beam, 6, the first light beam, 7, the second light beam, 8, the first folded light beam, 9, the second folded light beam, 10, focused beam, 11, transmitted light beam.
The specific embodiment
Below in conjunction with accompanying drawing, principle of the present utility model and feature are described, example, only for explaining the utility model, is not intended to limit scope of the present utility model.
Embodiment 1:
The apparatus structure schematic diagram that Fig. 1 is Copper Foil laser drilling through hole, as shown in Figure 1: the device of Copper Foil laser drilling through hole comprises that beam Propagation orientation control module 1, beam motion track imaging amplification module 2 and light beam focus on and focus handover module 3.
Described beam Propagation orientation control module 1 is the Beam rotation modulating unit, this Beam rotation modulating unit comprises a Beam rotation modulation subunit, and this Beam rotation modulation subunit comprises rotation transmission optical component and the drive unit rotated for the driven rotary transmission optical component.The rotation transmission optical component is Rotating Plates quartz glass 101, and the refractive index of Rotating Plates quartz glass 101 is 1.35 to 3, is preferably 1.45,6 millimeters of thickness, 532 nanometer anti-reflection films are all plated on its two sides, and the thickness of Rotating Plates quartz glass 101 is larger, and the Beam rotation diameter is larger.Drive unit is the air supporting hollow spindle motor with hollow spindle, and air supporting hollow spindle motor also can float hollow spindle motor or ceramic bearing hollow spindle motor or motor belt transmission device with the magnetic with hollow spindle and substitute.Described Rotating Plates quartz glass 101 is fixed in the hollow spindle 102 of air-floating main shaft motor, and Rotating Plates quartz glass 3 rotates together with hollow spindle 2.Hollow spindle 2 diameter of bores are preferably 8 millimeters, and the air-floating main shaft motor speed can reach 500,000 rev/mins.General actuating speed can reach at a high speed or superfast level, and wherein, speed is at a high speed at 5000 rev/mins to 50,000 rev/mins, more than 50,000 rev/mins, is being ultrahigh speed.The air-floating main shaft motor speed can reach 160,000 revolutions per seconds at present.
The driver element of rotation transmission optical component is the forms such as air supporting hollow spindle motor or the floating hollow spindle motor of magnetic, the rotation transmission optical component is prism wedge or lens or planar optics element or diffracting object grating or wedge, the result of this configuration is to obtain very meticulous laser beam rotation (inverted cone surface, the positive conical surface, face of cylinder rotation), can also obtain meticulous and ultrahigh speed the first Beam rotation speed, its rotary speed even can be up to 1,000,000 rev/mins, if adopt Dove prism to coordinate slide, can obtain the rotary light beam of 2,000,000 rev/mins.
If adopt motor belt actuator drives Rotating Plates quartz glass 3, this motor belt transmission device comprises motor, driving wheel, driven pulley and is set in the Timing Belt on described driving wheel and driven pulley, described motor is arranged on driving wheel, and Rotating Plates quartz glass 3 is fixedly mounted in the hollow shaft on driven pulley.
When the hollow electric main shaft of described hollow electric spindle motor is arranged on air-bearing, this hollow electric spindle motor is also referred to as the hollow electric spindle motor of air supporting.Described air-bearing refers to by import pressure air in bearing bore realizes the bearing that hollow electric main shaft suspends in air.In described air-bearing bearing bore, the gap of pressure release is minimum, the high accuracy suspension that has guaranteed hollow electric main shaft is rotated, and can stably rotate accurately, possess high rotating speed, pinpoint accuracy, zerofriction force, without wearing and tearing, do not need lubricating oil, remarkable speed control performance arranged, compact conformation, lightweight, vibrate the advantages such as little, that noise is low, the little response of inertia is fast.
When the hollow electric main shaft of described hollow electric spindle motor is arranged on Hydrodynamic and-static Bearing, this hollow electric spindle motor is also referred to as the hollow electric spindle motor of hydraulic pressure.Described Hydrodynamic and-static Bearing refers to a kind of outer supply constant pressure oil, sets up the bearing that makes electric main shaft oil film of suspension high voltage static pressure carrying all the time from start to stopping in bearing.Described Hydrodynamic and-static Bearing has and there is no wearing and tearing, long service life, starting power are little, also applicable characteristics under the speed of extremely low (being even zero).In addition, this bearing also has that running accuracy is high, oil film rigidity is large, can suppress the advantage such as film shocks.The hollow electric spindle motor of described hydraulic pressure, owing to having adopted Hydrodynamic and-static Bearing, therefore possess very high rigidity and damping, possesses higher rotation speed and service life.
When the hollow electric main shaft of described hollow electric spindle motor is arranged on electromagnetic suspension bearing, this hollow electric spindle motor is also referred to as the floating hollow electric spindle motor of magnetic.Described electromagnetic suspension bearing is that a kind of electromagnetic force of utilizing is suspended in by electric main shaft the bearing that contactless supporting is realized in space, have without friction, without lubricated, without oil pollution, the advantage such as energy consumption is low, noise is little, the life-span is long, be specially adapted in the particular surroundings such as vacuum, super dead room, high speed.Described magnetic floats hollow electric spindle motor, owing to adopting electromagnetic suspension bearing, therefore possesses high speed performance good, and precision is high, easily realizes the advantages such as diagnosis and on-line monitoring.
When the hollow electric main shaft of described hollow electric spindle motor is arranged on ceramic bearing, this hollow electric spindle motor is also referred to as the hollow electric spindle motor of ceramic bearing.Described ceramic bearing refers to that the rolling element of bearing uses Ceramic Balls, and bearing ring is still the bearing of steel ring, and the ceramic bearing standardization level is high, is meeting under the condition of certain rotating speed, possesses the low advantage simple in structure of cost.The hollow electric main shaft of the hollow electric spindle motor of described ceramic bearing is arranged on ceramic bearing, and the rotating speed of this ceramic bearing turns above per minute 5000.
Described beam motion track imaging amplification module 2 comprises an enlargement ratio laser imaging unit, according to the object-image relation of perfect optical system, the laser imaging unit that the imaging enlargement ratio is adjustable can adopt the lens combinations more than three groups or three groups to realize the function without burnt continuous zoom imaging and collimator and extender.Three groups of lens can adopt " positive lens-negative lens-positive lens " or various ways such as " negative lens-positive lens-negative lenses ", for example can design first group for fixing group, and second group is mobile zoom group, and the 3rd group is the compensation group.In the laser imaging unit that the enlargement ratio formed at three groups of lens is adjustable, when second group of lens relative to its object point when also the picture point of first group of lens moves, its imaging magnification changes thereupon, and consequent system focal length variations is moved and compensated by the 3rd group of lens.Now, if the picture point of second group of lens overlaps with the front focus of the 3rd group just, whole system is exactly a non-focus optical system, and the outgoing beam diameter can constantly change along with the movement of these two groups of lens.
The enlargement ratio laser imaging unit of the present embodiment is the adjustable laser imaging unit of enlargement ratio.The laser imaging unit that this enlargement ratio is adjustable comprises shell 205, connects successively and is arranged on the first convex lens 201, the first concavees lens 202, the second concavees lens 203 and the second convex lens 204 in shell 205.Wherein, the first convex lens 201 are fixed in housing 205 and claim again fixed lens group, the first concavees lens 202 are called variable focus lens package, the second concavees lens 203 and the second convex lens 204 are called the offset lens group, and the mobile linear electric motors high-speed, high precision that adopts of variable focus lens package and offset lens group drives and position and lock.When variable focus lens package moves with respect to fixed lens group, the equivalent focal length of variable focus lens package and fixed lens group just changes continuously, produces in new focus A(figure and does not indicate).The offset lens group also is designed to movably, when variable focus lens package moves in a certain position B(figure, do not indicate) time, the offset lens group also moves in corresponding position C(figure and does not indicate), make in new focus A(figure to indicate) be stabilized on the focus of offset lens group, be combined into new expand than beam-expanding system.The zoom beam-expanding system here adopts the version similar in appearance to Galilean type, each constituent element is decided to be to the combination of positive negative lens, and laser beam can not too be assembled, and has also shortened the operating distance of system simultaneously.Simultaneously, for spherical aberration corrector preferably, coma and band spherical aberration, and consider that superlaser can should not adopt balsaming lens to the cemented surface damage, zoom group and compensation arrangement of mirrors sheet are designed to two separate types, and the kind by selecting optical lens material and the trace of the air gap change and carry out aberration correction.In some cases, in order to reduce costs, can manual drives variable focus lens package and offset lens group mechanical caging.
Use the Beam rotation modulation subunit, can adopt the transmission optical component of small size, with the rotary inertia that reduces transmission optical component to obtain better dynamic balance property, be conducive to the Beam rotation modulating unit and obtain higher rotating speed, thereby can obtain higher running accuracy and the first light beam that rotates rotating speed, but still exist the diameter of the first beam scanning motion track to adjust the problems such as inconvenient, the first beam optical axis movement locus little to rotating diameter by beam motion track imaging amplification module carries out the imaging amplification, can obtain the second light beam of the large movement locus of high-speed, high precision, the imaging amplification of the different multiplying of the amplification module of beam motion track imaging simultaneously can change the scanning motion track size of the second light beam.
It is the vibration mirror scanning focusing unit that described light beam focuses on focus handover module 3, and described vibration mirror scanning focusing unit comprises scanning galvanometer 31 and scanning flat field focus lamp 32.Scanning flat field focus lamp 32 has the types such as the scanning focused mirror of common flat field and telecentric scanning focus lamp, and in the present embodiment, scanning flat field focus lamp adopts the telecentric scanning focus lamp.The focal length of telecentric scanning focus lamp is 10 to 1000 millimeters, is preferably 100 millimeters, and the flat field focusing range is 5 millimeters * 5 millimeters to 500 millimeters * 500 millimeters, is preferably 50 millimeters * 50 millimeters.Scanning galvanometer 32 comprises the first vibration mirror reflected eyeglass 313 and the second vibration mirror reflected eyeglass 312.
The first vibration mirror reflected eyeglass 313 of described scanning galvanometer is arranged on the electric machine main shaft 315 of the first motor 314 of scanning galvanometer.
The second vibration mirror reflected eyeglass 312 of described scanning galvanometer is arranged on the electric machine main shaft 311 of the second motor of scanning galvanometer.
Described workpiece to be processed 4 is 100 micron thickness Copper Foils.
Light path flow process in the apparatus structure of whole Copper Foil laser drilling through hole is as follows: after incident beam 5 sees through the Rotating Plates quartz glass 101 that is positioned at the hollow spindle cavity, obtain the first light beam 6, described the first light beam 6 obtains the second light beam 7 after electronic adjustable enlargement ratio image-generating unit, the second light beam 7 obtains the first folded light beam 8 through the first vibration mirror reflected eyeglass 313 of scanning galvanometer 31, the first folded light beam 8 obtains the second folded light beam 9 through the second vibration mirror reflected eyeglass 312 of scanning galvanometer 31, the second folded light beam 9 is focused on through the telecentric scanning focus lamp, obtain focused beam 10, focused beam 10 directly acts on workpiece to be processed 4.
Described incident beam 5 is preferably the incident beam of 1 millimeter for diameter, relevant parameter is as follows: optical maser wavelength 532 nanometers, beam quality factor is less than 1.2, hot spot circularity is greater than 90 percent, 30 watts of mean powers, single mode gauss laser (laterally field intensity is Gaussian Profile), pulse recurrence frequency, from 10 KHz to 100 megahertzes, is preferably 500 KHzs.
The refractive index of described Rotating Plates quartz glass 101 is 1.45,3 millimeters of thickness, 532 nanometer anti-reflection films are all plated on its two sides, the normal of the laser entrance face of Rotating Plates quartz glass 3 and incident beam optical axis angle are 5 degree, under the air supporting hollow spindle drives, Rotating Plates quartz glass 101 can be around the rotation of the optical axis of incident beam 5, makes the movement locus of the first light beam 6 optical axises become to take the face of cylinder that axle centered by incident beam 5 and diameter are 80 microns.The normal of the laser entrance face of design Rotating Plates quartz glass 101 and the angle of incident beam 5 optical axises, change the thickness of Rotating Plates quartz glass 101, perhaps change Refractive Index of Material or the shape of rotating optical element, can obtain the first Beam rotation track of the positive conical surface or inverted cone surface.
The first light beam 6 is injected described adjustable enlargement ratio image-generating unit.When the first light beam 6 transfixion, described adjustable enlargement ratio image-generating unit just only plays the function of adjustable multiplying power laser beam expander, expands multiplying power between 2 to 12 times.At the first light beam 6 during around incident beam 5 motion, described adjustable enlargement ratio image-generating unit can not only play the function of adjustable multiplying power laser beam expander, can also make the enlargement ratio of the movement locus of the first light beam 6 become adjustable, adjustable enlargement ratio is also between 2 to 12 times.When the movement locus of the first light beam 6 optical axises is the face of cylinder around 80 microns of the diameters of incident beam 5, the movement locus of the optical axis of the second light beam 7 be around the face of cylinder of the optical axis of incident beam 5 diameter of section between 160 microns to 960 microns.
Two reflecting optics of scanning galvanometer 31 i.e. the first vibration mirror reflected eyeglass 313 match with the second vibration mirror reflected eyeglass 312, and hole of every completion of processing is just arrived next position to the Focal Point Shift of focused beam 10, and in this jump procedure, laser is black out; When described the first vibration mirror reflected eyeglass 313 and the second vibration mirror reflected eyeglass 312 lock again motionless, Laser output now.Described the first light beam 6 optical axis rotational trajectories of take are example as 80 microns faces of cylinder of diameter, when the imaging enlargement ratio of described adjustable enlargement ratio image-generating unit is 12 times, the second light beam 7 optical axis rotational trajectories are 960 microns faces of cylinder of diameter, and the optical axis rotational trajectory of the first folded light beam 8, the second folded light beam 9, focused beam 10 is 960 microns faces of cylinder of diameter.The focus of focused beam 10 marks the circle (20 microns of focal beam spots) of 980 microns on to be processed 4.By the imaging enlargement ratio of the adjustable enlargement ratio image-generating unit of electronic dynamic adjustment, the focus that can reach dynamic change focused beam 10 marks the diameter of a circle size on to be processed 4.By this method, can on described workpiece to be processed 4, get out the via-hole array of needed different pore size.
In order to enlarge the processing breadth, can also be placed in described workpiece to be processed 4 on mobile platform, can realize large-scale Laser Processing like this, in practice, Laser Processing sweep limits area generally surpasses the large tracts of land that is commonly referred to of 200 millimeters * 200 millimeters.
Adjustable enlargement ratio image-generating unit described in the present embodiment, can be substituted by some fixedly enlargement ratio imaging subelements, in needs, selects wherein one or several fixedly enlargement ratio imaging subelement of connecting to form adjustable enlargement ratio image-generating unit.
Embodiment 2:
The apparatus structure schematic diagram that Fig. 2 is aluminium nitride ceramics laser milling blind slot, as shown in Figure 2: the device of aluminium nitride ceramics laser milling blind slot comprises that beam Propagation orientation control module 1, beam motion track imaging amplification module 2 and light beam focus on and focus handover module 3.Beam motion track imaging amplification module 2 in the present embodiment focuses on identical with the structure in embodiment 1 with the structure of focus handover module 3 with light beam.
Described beam Propagation orientation control module 1 comprises the beam deviation modulating unit, and this beam deviation modulating unit comprises the beam deviation subelement of two series connection, i.e. the first beam deviation unit 112 and the second beam deviation unit 113.The first beam deviation unit 112 comprises the first dull and stereotyped quartz glass 121 and for driving the first motor (not shown) of the described first dull and stereotyped quartz glass 121, the described first dull and stereotyped quartz glass 121 is arranged on the first rotating shaft 122, the electric machine main shaft that the first rotating shaft 122 is the first motor, the first dull and stereotyped quartz glass 121 is around the first rotating shaft 122 axial-rotations, and the first rotating shaft 122 be axially perpendicular to paper.The second beam deviation unit 113 comprises the second dull and stereotyped quartz glass 133 and for driving the second motor 131 of the described second dull and stereotyped quartz glass 133, the described second dull and stereotyped quartz glass 133 is arranged on the second rotating shaft 132, the electric machine main shaft that the second rotating shaft 132 is the second motor 131.The described second dull and stereotyped quartz glass 133 can be around the second rotating shaft 132 axial-rotations.The refractive index of the described first dull and stereotyped quartz glass 121 and the second dull and stereotyped quartz glass 133 is 1.45, and thickness is 3 millimeters, and two sides all is coated with the anti-reflection film of 532 nanoseconds.
Adopt motor to swing transmission planar optics element, after the incident beam refraction, it is exactly the first light beam, both translation distances can reach micron dimension, but because transmission planar optics element can be accomplished very little, therefore motor can swing by higher hunting frequency, can obtain the first light beam of micro-displacement high-speed motion.
Described workpiece to be processed 4 is 500 micron thickness aluminium nitride ceramics.
Light path flow process in the apparatus structure of whole aluminium nitride ceramics laser milling blind slot is as follows: incident beam 5 obtains transmitted light beam 11 through the first dull and stereotyped quartz glass 121, after seeing through the second dull and stereotyped quartz glass 133, transmitted light beam 11 obtains the first light beam 6, described the first light beam 6 obtains the second light beam 7 after electronic adjustable enlargement ratio image-generating unit 2, the second light beam 7 obtains the first folded light beam 8 through the first vibration mirror reflected eyeglass 313 of scanning galvanometer 31, the first folded light beam 8 obtains the second folded light beam 9 through the second vibration mirror reflected eyeglass 312 of scanning galvanometer 31, the second folded light beam 9 is focused on through the telecentric scanning focus lamp, obtain focused beam 10, focused beam 10 directly acts on workpiece to be processed 4.
The incident beam that described incident beam 5 is 1 millimeter for diameter, relevant parameter is as follows: optical maser wavelength 532 nanometers, beam quality factor is less than 1.2, hot spot circularity is greater than 90 percent, 30 watts of mean powers, single mode gauss laser (laterally field intensity is Gaussian Profile), pulse recurrence frequency, from 10 KHz to 100 megahertzes, is preferably 100 KHzs.
The refractive index of the described first dull and stereotyped quartz glass 121 and the second dull and stereotyped quartz glass 133 is 1.45,3 millimeters of thickness, and 532 nanometer anti-reflection films are all plated on its two sides, and the swinging axle of the described first dull and stereotyped quartz glass 121 and the second dull and stereotyped quartz glass 133 is vertical non-intersect.
The described first dull and stereotyped quartz glass 121 can swing around the first swinging axle 122 perpendicular to paper, make the laser incidence surface normal of the first dull and stereotyped quartz glass 121 and the angle between initial incident beam 5 beam optical axis change in 0～1 degree scope, make transmitted light beam 11 obtain translation with respect to incident beam 5, side-play amount changes in 0～16 micrometer range.
The second rotating shaft 132 of the described second dull and stereotyped quartz glass 133 and first dull and stereotyped the first swinging axle 122 spatial vertical of quartzy 121 are non-intersect, and all are basically perpendicular to incident beam 5.The second swinging axle 132 is controlled the second dull and stereotyped quartz glass 133 and is swung, make the laser incidence surface normal of the second quartzy plate glass 133 and the angle of transmitted light beam 11 change between 0～1 degree scope, make the first light beam 6 obtain the respective parallel displacement with respect to transmitted light beam 11, side-play amount changes between 0～16 micrometer range.
The routing motion of the described first dull and stereotyped quartz glass 121 and the second dull and stereotyped quartz glass 133 has directly determined the movement locus of the first light beam 6, the square region that in the present embodiment, the range of movement of the first light beam 6 is 16 microns * 16 microns.And first, second planar optics element is small-sized, and pendulum angle is so little, its hunting frequency can be very high, and the laser displacement control accuracy is high, obtains like this scanning effect of high-speed, high precision the first light beam 6.
The first light beam 6 is injected described adjustable enlargement ratio image-generating unit.When the first light beam 6 transfixion, described adjustable enlargement ratio image-generating unit just only plays the function of adjustable multiplying power laser beam expander, expands multiplying power between 2 to 12 times.At the first light beam 6, during around incident beam 5 motion, described adjustable enlargement ratio image-generating unit can not only play the function of adjustable multiplying power laser beam expander, can also make the enlargement ratio of movement locus of the first light beam 6 adjustable, and adjustable enlargement ratio is also between 2 to 12 times.When the movement locus of the first light beam 6 optical axises when take the face of cylinder that axle centered by incident beam 5 and diameter be 16 microns, the movement locus of the optical axis of the second light beam 7 be around the face of cylinder of the optical axis of incident beam 5 diameter of section between 32 microns to 190 microns.
Two reflecting optics of scanning galvanometer 31 i.e. the first vibration mirror reflected eyeglass 313 match with the second vibration mirror reflected eyeglass 312, and hole of every completion of processing is just arrived next position to the Focal Point Shift of focused beam 10, and in this jump procedure, laser is black out; When described the first vibration mirror reflected eyeglass 313 and the second vibration mirror reflected eyeglass 312 lock again motionless, Laser output now.When described the first light beam 6 optical axis rotational trajectories are 16 microns faces of cylinder of diameter, when the imaging enlargement ratio of described adjustable enlargement ratio image-generating unit is 10 times, the second light beam 7 optical axis rotational trajectories are 160 microns faces of cylinder of diameter, and the optical axis rotational trajectory of the first folded light beam 8, the second folded light beam 9, focused beam 10 is 160 microns faces of cylinder of diameter.The focus of focused beam 10 marks the circle (30 microns of focal beam spots) of 190 microns on to be processed 4.By the imaging enlargement ratio of the adjustable enlargement ratio image-generating unit of electronic dynamic adjustment, the focus that can reach dynamic change focused beam 10 marks the diameter of a circle size on to be processed 4.By this method, can on described workpiece to be processed 4, get out the via-hole array of needed different pore size.
Sometimes in order to reduce costs, can adopt enlargement ratio manually adjustable enlargement ratio image-generating unit or fixing enlargement ratio image-generating unit.
The present embodiment situation, described beam Propagation orientation control module itself can change by the swing that changes the first and second dull and stereotyped quartz glass shape and the size of the track while scan of the first light beam 6, therefore, in a lot of situations, adopt fixedly enlargement ratio image-generating unit to get final product, and, because the laser beam expanding multiplying power remains unchanged, possess and focus on the advantage that focus size remains unchanged.
The benefit of this processing mode of the present embodiment is, the advantage of the high-speed, high precision while having utilized beam Propagation orientation control module 1 fine scanning, coordinate the laser beam expanding function of 2 pairs of the first light beams 6 of beam motion track imaging amplification module, the movement locus enlarging function of the first light beam 6, realized cleverly the function in the required figure of high-speed, high precision dynamic scan path.In addition, utilized the meticulous filling repeatedly of beam Propagation orientation control module 1 scanning, form wider laser scanning cutting joint-cutting, realize flat-top Laser Processing effect with gauss laser, the advantages such as Laser Processing characteristics that simultaneously retain the long depth of focus of gauss laser and Gaussian Profile light intensity, be very suitable for needing the field of flat-top Laser Processing or the even Fast Filling scanning of small scope, processing effect is better than flat-top laser and controls very simple.
In above-described embodiment, the orthogonal while of the rotary main shaft of planar optics element, also need in theory vertically with beam optical axis, the alignment error in actual the use can be proofreaied and correct and gets final product by being controlled software.
Embodiment 3:
The apparatus structure schematic diagram that Fig. 3 is embodiment 3 LTCC laser drill, as shown in Figure 3: the device of LTCC laser drill comprises that beam Propagation orientation control module 1, beam motion track imaging amplification module 2 and light beam focus on and focus handover module 3.Beam motion track imaging amplification module 2 in the present embodiment focuses on identical with the structure in embodiment 1 with the structure of focus handover module 3 with light beam.
Described beam Propagation orientation control module 1 comprises the beam deviation modulating unit, this beam deviation modulating unit comprises the beam deviation subelement of two series connection, i.e. the first beam deviation unit and the second beam deviation unit, the first beam deviation unit comprises the first plane mirror 103 and for driving the first Piezoelectric Ceramic system (not shown) of described the first plane mirror 103 motion (swinging or translation), the second beam deviation unit comprises the second plane mirror 104 and for driving the second Piezoelectric Ceramic system (not shown) of described the second plane mirror 104 motion (swinging or translation).
Adopt the Piezoelectric Ceramic plane mirror, laser is carried out to one dimension or two-dimensional deflection reflection, can accomplish to laser beam reflection modulation ability the frequency that 10KHz is even higher under low-angle, this very high modulating frequency, make the speed of the first beam flying figure very fast.
Described workpiece to be processed 4 is 200 micron thickness LTCCs.
Light path flow process in the apparatus structure of whole LTCC laser drill is as follows: incident beam 5 obtains a folded light beam through the reflection of the first plane mirror 103, this folded light beam obtains the first light beam 6 after the second plane mirror 104 reflections, the first light beam 6 obtains the second light beam 7 again after electronic adjustable enlargement ratio image-generating unit, the second light beam 7 obtains the first folded light beam 8 through the first vibration mirror reflected eyeglass 313 of scanning galvanometer 31, the first folded light beam 8 obtains the second folded light beam 9 through the second vibration mirror reflected eyeglass 312 of scanning galvanometer 31, the second folded light beam 9 is focused on through the telecentric scanning focus lamp, obtain focused beam 10, focused beam 10 directly acts on workpiece to be processed 4.
The incident beam that described incident beam 5 is 1 millimeter for diameter, relevant parameter is as follows: optical maser wavelength 532 nanometers, beam quality factor is less than 1.2, hot spot circularity is greater than 90 percent, 30 watts of mean powers, single mode gauss laser (laterally field intensity is Gaussian Profile), pulse recurrence frequency, from 10 KHz to 100 megahertzes, is preferably 500 KHzs.
Described the first plane mirror 103 can be arranged at least one piezoelectric element or electrostriction element, particularly on piezoelectric ceramics; Piezoelectric element is stretching of piezo ceramic element particularly, makes the first mirror angle deflection, makes the transmission of angle of the folded light beam of the first plane mirror 103 deflect.More than at present basic piezo ceramic element or the stretching frequency of electrostriction element can be accomplished GHz (GHz).Here adopt 20KHz stretching frequency piezoelectric ceramics.
Described the second plane mirror 104 can be arranged at least one piezoelectricity telescopic element or electrostriction element, particularly on piezoelectric ceramics; Stretching of piezo ceramic element, make the second plane mirror 104 angular deflections, makes the transmission of angle of the first light beam 6 deflect.
Described the first plane mirror 103 is mutually vertical with the axis of oscillation of the second plane mirror 104.The space tracking that the movement locus of the first light beam 6 is free routing is controlled in the swing of the first plane mirror 103 and the second plane mirror 104.For example controlling the first beam motion track is the taper seat of angle 0.5 degree, 10 centimetres of the plane of incidence distances of the electronic adjustable enlargement ratio image-generating unit of the second plane mirror 104 distance, the circle that the beam optical axis of the first light beam 6 is 60 microns of diameters at the movement locus of the plane of incidence of electronic adjustable enlargement ratio image-generating unit so.Now change the distance of the electronic adjustable enlargement ratio image-generating unit plane of incidence of the second plane mirror 53 distance, perhaps change the angle of the first light beam 6 taper seat movement locus, can change the motion circle track size of the beam optical axis of the first light beam 6 at the electronic adjustable enlargement ratio image-generating unit plane of incidence.
Described the first light beam 6 is injected described adjustable enlargement ratio image-generating unit.When the first light beam 6 transfixion, described adjustable enlargement ratio image-generating unit just only plays the function of adjustable multiplying power laser beam expander, expands multiplying power between 2 to 12 times.At the first light beam 6, during around incident beam 5 motion, adjustable enlargement ratio image-generating unit just not only has the function of adjustable multiplying power laser beam expander, can also make the enlargement ratio of movement locus of the first light beam 6 adjustable, and adjustable enlargement ratio is between 2 to 12 times.
Two reflecting optics of scanning galvanometer 31 i.e. the first vibration mirror reflected eyeglass 313 match with the second vibration mirror reflected eyeglass 312, and hole of every completion of processing is just arrived next position to the Focal Point Shift of focused beam 10, and in this jump procedure, laser is black out; When described the first vibration mirror reflected eyeglass 313 and the second vibration mirror reflected eyeglass 312 lock again motionless, Laser output now.When the movement locus of the first light beam 6 optical axises is that summit is at the taper seat of the second plane mirror 104 or other movement locus, the movement locus of the optical axis of the second light beam 7 is the pictures of the first light beam 6 movement locus after adjustable enlargement ratio image-generating unit amplifies, the circle that the beam optical axis of the first light beam 6 is 60 microns of diameters at the movement locus of the electronic adjustable enlargement ratio image-generating unit plane of incidence, the enlargement ratio of electronic adjustable enlargement ratio image-generating unit is set in 10, the movement locus of the optical axis of the second light beam 7 during from 55 outgoing of electronic adjustable enlargement ratio image-generating unit diameter of section at 600 microns.The optical axis rotational trajectory taper seat of the first folded light beam 8, the second folded light beam 9, focused beam 10.The focus of focused beam 10 marks the circle of required diameter on to be processed 4.By the imaging enlargement ratio of the adjustable enlargement ratio image-generating unit of electronic dynamic adjustment, the focus that can reach dynamic change focused beam 10 marks the diameter of a circle size on to be processed 4.By this method, can on described workpiece to be processed 4, get out the via-hole array of needed different pore size.
Sometimes in order to reduce costs, can adopt enlargement ratio manually adjustable enlargement ratio image-generating unit or fixing enlargement ratio image-generating unit.
The present embodiment situation, described beam Propagation orientation control module 1 itself can change by changing the first and second plane mirror reflection angles shape and the size of the track while scan of the first light beam 1; Change the distance of the electronic adjustable enlargement ratio image-generating unit plane of incidence of the second plane mirror 104 distance, perhaps change the angle of the first light beam taper seat movement locus, also can change the motion circle track size of the beam optical axis of the first light beam 6 at the electronic adjustable enlargement ratio image-generating unit plane of incidence.Therefore, in a lot of situations, adopt fixedly enlargement ratio image-generating unit to get final product, and, because the laser beam expanding multiplying power remains unchanged, possess and focus on the advantage that focus size remains unchanged.
The benefit of this processing mode of the present embodiment is, the advantage of the high-speed, high precision while having utilized beam Propagation orientation control module 1 fine scanning, coordinate beam motion track imaging amplification module to the laser beam expanding function of the first light beam 6, the movement locus enlarging function of the first light beam 6, realized cleverly the function in the required figure of high-speed, high precision dynamic scan path.In addition, utilized the meticulous filling repeatedly of beam Propagation orientation control module 1 scanning, form wider laser scanning cutting joint-cutting, realize flat-top Laser Processing effect with gauss laser, the advantages such as Laser Processing characteristics that simultaneously retain the long depth of focus of gauss laser and Gaussian Profile light intensity, be very suitable for needing the field of flat-top Laser Processing or the even Fast Filling scanning of small scope, processing effect is better than flat-top laser and controls very simple.
Above-described embodiment is three typical application of the present utility model, in fact its application of principle is not limited to top described situation, for example light beam focuses on and with the focus handover module, can adopt the two-dimensional linear mobile platform to be combined the mode that the laser quiescent imaging focuses on to work, and the first beam wobbling that the laser spot microspur switching of fine space can be exported by beam Propagation orientation control module 1 complete etc.
In a word, the utility model proposes a kind of track control device of the beam motion for Laser Processing, its important feature is: the advantage of the high-speed, high precision while having utilized beam Propagation orientation control module 1 fine scanning, the laser beam expanding function and the axis movement track imaging enlarging function that coordinate 2 pairs of the first light beams of beam motion track imaging amplification module, realized cleverly the combination of the meticulous fine motion scanning of high speed and two kinds of modes of laser beam axis movement locus imaging amplification, realized that the laser high-speed Dynamic High-accuracy scans the function in required figure path.In addition, utilized the meticulous filling repeatedly of beam Propagation orientation control module 1 scanning, form wider laser scanning cutting joint-cutting, realize flat-top Laser Processing effect with gauss laser, the advantages such as Laser Processing characteristics that simultaneously retain the long depth of focus of gauss laser and Gaussian Profile light intensity, be very suitable for needing the field of flat-top Laser Processing or the even Fast Filling scanning of small scope, processing effect is better than flat-top laser and controls very simple.
For the beam Propagation orientation control module 1 of Beam rotation mode, manual or electronic enlargement ratio adjustable laser image-generating unit has successfully been realized the online nonadjustable problem of high speed rotary motion Beam rotation diameter.
Adopt the vibration mirror scanning focusing unit, laser spot is switched fast, the Laser Processing breadth, working (machining) efficiency and the crudy that significantly improve.
The foregoing is only preferred embodiment of the present utility model, not in order to limit the utility model, all within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (12)
1. the track control device of the beam motion for Laser Processing, is characterized in that: comprise that beam Propagation orientation control module, beam motion track imaging amplification module and light beam focus on and the focus handover module;
Described beam Propagation orientation control module is used for the transmission orientation that is transmitted into the incident beam on it is modulated, and incident beam is transmitted to rear the first beam emissions formed of orientation modulation to the beam motion track imaging amplification module that is positioned at this first light beam one side of described beam Propagation orientation control module outgoing;
Described beam motion track imaging amplification module carries out the imaging amplification and described the first light beam is expanded to processing for the axis movement track of the first light beam to sending over from described beam Propagation orientation control module, the second light beam that enlarges and expand to form the axis movement track, and send to the light beam that is positioned at this this second light beam one side of beam motion track imaging amplification module outgoing to focus on and the focus handover module this second light beam;
Described light beam focuses on the focus handover module and is used for the second light beam sended over from described beam motion track imaging amplification module is focused on, and the control laser spot is switched or at a machining cell place, laser spot carried out to synkinesia control between different machining cells.
2. a kind of track control device of the beam motion for Laser Processing according to claim 1, it is characterized in that: described beam Propagation orientation control module comprises Beam rotation modulating unit and/or beam deviation modulating unit.
3. a kind of track control device of the beam motion for Laser Processing according to claim 2, it is characterized in that: described beam deviation modulating unit comprises the beam deviation modulation subunit of one or more series connection, and described beam deviation modulation subunit comprises transmission optical component and transmission optical component is swung or the motor of translation or piezoelectric ceramics for controlling; Or described beam deviation modulation subunit comprises reflective optical devices and the motor or the piezoelectric ceramics that carry out deflection or translation for controlling reflective optical devices; Or described beam deviation modulation subunit comprises acousto-optic modulator, the carrier frequency of the drive source by changing acousto-optic modulator is regulated the Bragg grating angle of reflection of described incident beam, changes the incident beam transmission direction.
4. a kind of track control device of the beam motion for Laser Processing according to claim 3, it is characterized in that: described transmission optical component is transmission planar optics element or optical prism optical element; Described reflective optical devices is reflecting optics.
5. a kind of track control device of the beam motion for Laser Processing according to claim 2, it is characterized in that: described Beam rotation modulating unit comprises the Beam rotation modulation subunit of or at least two series connection, described Beam rotation modulation subunit comprises transmission optical component and rotating driving device thereof, described transmission optical component rotating driving device is hollow spindle motor or motor belt transmission device
Rotation transmission optical component in described Beam rotation modulation subunit is arranged in described hollow spindle electric machine main shaft, and described electric machine main shaft is hollow shaft;
Described motor belt transmission device comprises motor, driving wheel, driven pulley and is set in the Timing Belt on described driving wheel and driven pulley that described motor is arranged on driving wheel, and the rotation transmission optical component is fixedly mounted on driven pulley.
6. a kind of track control device of the beam motion for Laser Processing according to claim 5 is characterized in that: described hollow spindle motor is the floating hollow spindle motor of air supporting hollow spindle motor or magnetic or ceramic bearing hollow spindle motor.
7. a kind of track control device of the beam motion for Laser Processing according to claim 6, it is characterized in that: described rotation transmission optical component is prism wedge or lens or planar optics element or diffracting object grating or wedge.
8. a kind of track control device of the beam motion for Laser Processing according to claim 5, it is characterized in that: described Beam rotation modulating unit, the Beam rotation modulation subunit that comprises at least two series connection, described Beam rotation modulation subunit is independently rotation separately, the output beam optical axis of described Beam rotation modulation subunit carries out rotation along the optical axis of its incident light, the optical axis of the output beam of a rear incident beam rotation modulation subelement is revolved round the sun along the optical axis of the light beam of the output of last incident beam rotation modulation subelement, and carry out rotation along the revolution track.
9. according to the described a kind of track control device of the beam motion for Laser Processing of claim 1 to 8 any one, it is characterized in that: described beam motion track imaging amplification module comprises at least one enlargement ratio laser imaging unit, and described enlargement ratio laser imaging unit is the fixing laser imaging unit of enlargement ratio or the adjustable laser imaging unit of enlargement ratio.
10. a kind of track control device of the beam motion for Laser Processing according to claim 9 is characterized in that: the fixing laser imaging unit of described enlargement ratio comprises the lens of a plurality of series connection and for the shell of fixing the plurality of lens;
The laser imaging unit that described enlargement ratio is adjustable comprises shell, is installed on the lens of a plurality of series connection in described shell and the driver element that changes spacing between lens.
11. a kind of track control device of the beam motion for Laser Processing according to claim 10, it is characterized in that: described driver element is manual drives unit or electric drive unit.
12. a kind of track control device of the beam motion for Laser Processing according to claim 11 is characterized in that: it is vibration mirror scanning focusing unit or platform movement quiescent imaging focusing unit that described light beam focuses on the focus handover module,
Described vibration mirror scanning focusing unit comprises scanning galvanometer and scanning flat field focus lamp, described scanning flat field focus lamp is focused on the emergent light from described beam motion track imaging amplification module output, described scanning galvanometer is for controlling the high speed switching of laser spot between different machining cells, or, at a machining cell place, described scanning galvanometer carries out synkinesia control to the laser spot scanning motion; Described scanning flat field focus lamp is the scanning focused mirror of common flat field or telecentric scanning focus lamp;
Described platform movement quiescent imaging focusing unit comprises quiescent imaging focus lamp and linear moving table, described quiescent imaging focus lamp carries out imaging and focusing for the emergent light to from described beam motion track imaging amplification module output, described linear moving table is for controlling the switching of laser spot between different machining cells, or, at a machining cell place, described linear moving table carries out synkinesia control to the laser spot scanning motion.
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| CN103317233A (en) * | 2013-06-07 | 2013-09-25 | 张立国 | Light beam movement track control device for laser processing |
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