CN202207858U - Ultraviolet laser fine processing device with double laser heads for different limited apertures - Google Patents
Ultraviolet laser fine processing device with double laser heads for different limited apertures Download PDFInfo
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- CN202207858U CN202207858U CN201120202124XU CN201120202124U CN202207858U CN 202207858 U CN202207858 U CN 202207858U CN 201120202124X U CN201120202124X U CN 201120202124XU CN 201120202124 U CN201120202124 U CN 201120202124U CN 202207858 U CN202207858 U CN 202207858U
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Abstract
The utility model discloses an ultraviolet laser fine processing device with double laser heads for different limited apertures, which comprises a DPSS (diode pumped solid state) laser device, a ten-times beam expanding system, an optical path switching component, a rotary micropore processing head with double optical wedges, a polarizer scanning processing head, an X, Y and Z three-dimensional translating platform, an Z-axis rotating platform, an auxiliary gas system, a dust absorption system, a CCD (charge coupled device) visual monitoring system and a computer control system. The rotating processing head with the double optical wedges is applicable to processing circular holes with diameters smaller than a few hundred microns and can be used for processing arrayed micropores, and the polarizer scanning processing head is suitable for realizing fine processing of circular holes with diameters larger than 300 microns and can be used for processing curve graphs with the maximum size of dozens of millimeters. By the aid of the ultraviolet laser fine processing device, limitation that the limited aperture processing range and precision of a single processing mode are limited by performances of devices and processing modes are broken through, and ultraviolet laser fine processing requirements of different limited apertures are met. The ultraviolet laser processing device has the advantages of high repetition frequency, fine stability, high quality of light beams and narrow pulse width.
Description
Technical field
The utility model relates to a kind of through the accurate light path of switching rotating double-optical wedge processing head and vibration mirror scanning processing head, and particularly a kind of two bare headed retrofit devices of Ultra-Violet Laser that are used for the otherwise limit aperture belong to laser retrofit technical applications.
Background technology
In recent years, along with the miniaturization of electronic product, microelectronics, biomedical devices components and parts, the increasing demand of Ultra-Violet Laser retrofit increased, and laser is played micropore, cutting, cutting etc., and to be processed in these Application for Field also more and more.Be usually operated at cellular level like biomedical devices; The component hole, passage and other parts that this means them all are minimum; Some aperture that is processed is between 20 to hundreds of microns; The tolerance of aperture and relative dimensions is also at micron order, and the profile cut lengths of part are then between several millimeters to tens of millimeters.Advanced DPSS laser process equipment; Use the pulse energy processing small-size materials of Ultra-Violet Laser; Its focused spot size is minimum; I reaches several microns, has advantages such as joint-cutting is narrow, cutting speed is fast, the heat affected area is little, material deformation is little, but the parts of fine cut circular hole and various complicated shapes.
The moulding of laser circular hole mainly contains five kinds of methods: 1, fixed beam processing micropore, the aperture is determined that by focal beam spot unadjustable, hole shape is determined by beam quality, and is uncontrollable.2, fixed beam combines two-dimension displacement platform processing micropore or figure, and the aperture is by the stroke decision of translation stage, and the micropore precision receives displacement platform precision and velocity effect.Because movement inertia is very big, response speed is low, carburization zone, melting zone that little bore edges has tangible fuel factor to cause, or have the phenomenon of deposit at the material top, therefore be not suitable for processing the hole of hundred micron diameters.3, fixed beam combines rotation platform and one dimension displacement platform processing circular hole, and aperture adjustment realizes that by the bias of rotating shaft and optical axis center the aperture is unrestricted, and pass forms by rotating at a high speed, and precision is higher, is fit to the processing micropore.But, be not suitable for the processing of big part and array hole, and the anchor point difficulty is looked for because workpiece rotates with platform.4, vibration mirror scanning processing micropore or figure, because the high-speed response of galvanometer, beam position is fast, is fit to the array hole and the various figure of processing One's name is legion, but receives characteristic of device own and accuracy limitations, generally is not suitable for processing the hole below 300 microns, the hole can be out of shape.5, light beam rotates at a high speed, and workpiece is motionless, and aperture adjustment is that the deviation value at laser beam and micropore center is produced by optical module; Realize capillary processing, the hole shape precision is high, and controllable aperture property is good; Its greatest limit aperture is limited by the wedge drift angle, and the high-precision micropore that is fit to below the hundreds of micron is shaped.
Above-mentioned micropore manufacturing process all exists certain limitation at aspects such as pore diameter range, hole shape precision, process velocity, quality; If will satisfy requirements such as different apertures, hole shape, precision, array, high efficiency, high-quality; Then must be equipped with many cover ultraviolet retrofit equipment, cost then is multiplied.
Summary of the invention
The utility model purpose is in order to overcome the limitation of existing single micropore manufacturing process at aspects such as pore diameter range, hole shape precision, process velocity, quality, to satisfy the Ultra-Violet Laser retrofit demand of commercial production to otherwise limit aperture and precision.
The technical scheme of the utility model is: a kind of two bare headed retrofit devices of Ultra-Violet Laser that are used for the otherwise limit aperture; It is characterized in that this device comprises that a DPSS laser instrument, 10 power beam expansion lens, light path switching component, rotating double-optical wedge capillary processing head, vibration mirror scanning processing head, precision are XYZ translation stage and Z axle turntable, workpiece absorptive table, assist gas system, dust collecting system, CCD visual monitoring system and the computer control system of micron dimension; Described DPSS Laser Output Beam expands the Shu Houzhi light path switching component through 10 power beam expansion lens; Be divided into two light paths, the one tunnel directly to rotating double-optical wedge capillary processing head, by the rotation of computer control system control high-speed electric expreess locomotive; And drive two sensitometric strips and rotate together; Thereby make the light beam rotation, realize the single capillary processing of aperture hundreds of micron, change the location of workpiece in conjunction with the XY translation stage; Realize the processing of array micropore; First reflecting optics of another road in light path switching component is reflective to the vibration mirror scanning processing head, and the XY scanning mirror by in the computer control system control vibration mirror scanning processing head obtains the processing of the circular hole of limiting aperture more than 300 microns and the above complex figure of millimeter level; The high-speed electric expreess locomotive of described computer control system and DPSS laser instrument, rotating double-optical wedge capillary processing head, slowspeed machine and straight dynamic air cylinder; The XY scanning mirror of vibration mirror scanning processing head, CCD visual monitoring system, XYZ translation stage, assist gas system are connected, and the line-spacing row distance in the rotating speed of DPSS laser parameters, high-speed electric expreess locomotive, the angular displacement of slowspeed machine, array hole and line number columns, sweep speed are by described computer control system setting and control.
Described light path switching component comprises rack module, 45 degree inclined plane slide blocks, first reflecting optics, directive slide track, first stage clip, contiguous block, location-plate and spacer pin; Said first reflecting optics is fixed on the inclined-plane of 45 degree inclined plane slide blocks; 45 degree inclined plane slide blocks are parallel with the directive slide track diaxon, linked to each other by contiguous block, cooperate with rack module; In rack module, move back and forth, spacer pin is fixed on the location-plate.
Described rotating double-optical wedge capillary processing head comprises second reflecting optics, first bolster, second bolster, first, second two sensitometric strips, belt wheel transmission system, gear train assembly, high-speed electric expreess locomotive, slowspeed machine, second stage clip, straight dynamic air cylinder, the valve that is connected with focus lamp; Two identical drift angles that are fixed in first bolster and second bolster are first, second two sensitometric strip placements parallel to each other of α; Said two sensitometric strip center lines are coaxial with the rotating shaft of light shaft coaxle, first bolster and second bolster of the incident beam that reflects through second reflecting optics; Described DPSS Laser Output Beam light path after 10 power beam expansion lens expand bundle directly to rotating double-optical wedge capillary processing head; Light beam is after second reflecting optics reflection and two sensitometric strips reflect; The line focus mirror focuses on the focal plane that departs from focus lamp central optical axis 0-R position, and the maximum deviation amount is by the apex decision of sensitometric strip; The upper surface of the lower surface of described first bolster and second bolster is processed with identical end face tooth, by stage clip the diaxon end face is meshed, when an end face of two bolsters meshes; High-speed electric expreess locomotive rotates through first, second two bolsters of belt wheel transmission system drives jointly, realizes the capillary processing of light beam rotation, and said straight dynamic air cylinder is connected with the second two bolsters; When straight dynamic air cylinder started, straight dynamic air cylinder acted on second bolster, made itself and first bolster break away from engagement; Cut simultaneously to gear train assembly, drive second bolster by slowspeed machine and independently rotate, make two sensitometric strips produce relative angular displacement; The smallest angles shift value meshes the segmentation angle of single tooth for the bolster end face; Light beam has changed the side-play amount of light beam after the refraction of two sensitometric strips, and the segmentation angle becomes with the aperture one to one to concern, when closing straight dynamic air cylinder; Straight dynamic air cylinder no longer acts on second bolster; Then second bolster thrust and first bolster that receive second stage clip meshes again, and when first bolster was driven in rotation, diaxon is rotation jointly again; Thereby change the size in processing aperture; The end face number of teeth of described two bolsters has determined the degree of regulation in aperture, and the angle of slowspeed machine rotation is the integral multiple of the single tooth segmentation of two bolster end faces angle, and the rotation angle value of slowspeed machine is set by computer control system.
Described vibration mirror scanning processing head comprises XY 2-D vibration mirror probe, f – θ lens.
The two bare headed retrofit devices of a kind of Ultra-Violet Laser that is used for the otherwise limit aperture, it is following that the method for processing step is carried out in the aperture of otherwise limit size:
When the limiting aperture of needs processing during at the 20-300 micron:
1) spacer pin in the light path switching component is inserted in the spacing hole on the 45 degree inclined plane slide blocks, first speculum is not among light path, and then the light beam of DPSS laser instrument output directly transmits after 10 power beam expansion lens expand bundle and gets into the rotating double-optical wedge processing head;
2) start straight dynamic air cylinder; The straight reciprocating motion of straight dynamic air cylinder promotes the field of conjugate action that second bolster breaks away from first bolster; And cut simultaneously to gear train assembly, the rotation angle value of setting and the corresponding slowspeed machine in required aperture on computer control system is rotated corresponding angle by computer control system control slowspeed machine; Drive second bolster through gear train assembly and also rotate corresponding angle; Make relative first sensitometric strip of second sensitometric strip that is fixed in second bolster produce relative angular displacement, close straight dynamic air cylinder, straight dynamic air cylinder no longer acts on second bolster; Then second bolster is because the thrust of second stage clip breaks away from gear train assembly, and mesh again the lower surface of its upper surface tooth and first bolster;
3) computer control system driving Z axle translation stage moves up and down, and through CCD visual monitoring system monitoring, workpiece machining surface is transferred on the focal plane of focus lamp; Move XY two-dimension translational platform, rotate Z axle turntable, find the capillary processing position of workpiece through CCD visual monitoring system;
4) laser parameter, the process time parameter of rotating speed, the DPSS laser instrument of line-spacing, row distance, line number, columns, the high-speed electric expreess locomotive in hole is set on computer control system; Open assist gas system and dust collecting system simultaneously; By the rotation of computer control system control high-speed electric expreess locomotive,, make first and second bolsters driven common rotation through the belt wheel transmission system; And the laser output of control DPSS laser instrument and the displacement of XY translation stage, realize the processing of single micropore in required aperture or array micropore;
When the limiting aperture of needs processing more than 300 microns the time:
1) spacer pin in the light path switching component is extracted; 45 of first speculum is installed spends the position that under the precompression of stage clip promotes, accurately is positioned at the light path switching on the inclined plane slide blocks; Then the reflection of light beam first speculum in 10 power beam expansion lens, light path switching component of DPSS laser instrument output transfers on the XY scanning mirror in the vibration mirror scanning processing head;
2) move up and down Z axle translation stage,, the finished surface of workpiece is transferred on the focal plane of f – θ lens through the monitoring of CCD visual monitoring system video; Move XY translation stage and Z axle turntable,, open dust collecting system simultaneously through the Working position that CCD visual monitoring system confirms workpiece.Carry out the processing of circular hole and complex figure more than 300 microns by computer control system control laser and XY scanning mirror.
The beneficial effect of the utility model is: a kind of two bare headed retrofit devices of Ultra-Violet Laser that can be used for the otherwise limit aperture are provided; Overcome single micropore former and method limitation at aspects such as pore diameter range, hole shape precision, process velocity, quality; Can satisfy the Ultra-Violet Laser retrofit requirement of commercial production, greatly reduce cost wide regions such as different apertures, hole shape, precision, array, high efficiency, high-quality.
Description of drawings
Fig. 1 is the two bare headed retrofit schematic diagram of device of Ultra-Violet Laser;
Fig. 2 is two shaven head processing light path sketch mapes;
Fig. 3 is a light path switching component structural representation front view;
Fig. 4 is a light path switching component structural representation vertical view;
Fig. 5 is a rotating double-optical wedge capillary processing sketch map;
Fig. 6 is two bolster end face meshing gear structural representations.
The specific embodiment
Below in conjunction with accompanying drawing the utility model is further described.
A kind of two bare headed retrofit devices of Ultra-Violet Laser that are used for the otherwise limit aperture; By Fig. 1, Fig. 2, Fig. 4, Fig. 5, shown in Figure 6; A kind of two bare headed retrofit devices of Ultra-Violet Laser that are used for the otherwise limit aperture; Be characterized in that this device comprises that a DPSS laser instrument 1,10 power beam expansion lens 2, light path switching component 3, rotating double-optical wedge capillary processing 4, vibration mirror scanning processing head 5, precision are XYZ translation stage 7,8,9 and Z axle turntable 10, workpiece absorptive table 11, assist gas system 12, dust collecting system 14, CCD visual monitoring system 6 and the computer control system 13 of micron dimension; Described DPSS laser instrument 1 output beam expands Shu Houzhi light path switching component 3 through 10 power beam expansion lens 2; Be divided into two light paths, the one tunnel directly to rotating double-optical wedge capillary processing 4, by 30 rotations of computer control system 13 control high-speed electric expreess locomotives; And drive the rotation of first and second sensitometric strips 27,28; Thereby make the light beam rotation, realize the single capillary processing of aperture hundreds of micron, change workpiece 15 positions in conjunction with XY translation stage 7,8; Realize the processing of array micropore; First reflecting optics 18 of another road in light path switching component 3 is reflective to vibration mirror scanning processing head 5, and the XY scanning mirror 37 by in the computer control system 13 control vibration mirror scanning processing heads 5 obtains the processing of the circular hole of limiting aperture more than 300 microns and the above complex figure of millimeter level; High-speed electric expreess locomotive 30, slowspeed machine 32, straight dynamic air cylinder 34, the XY scanning mirror 37 of vibration mirror scanning processing head 5, CCD visual monitoring system 6, the XYZ translation stage 7,8,9 of described computer control system 13 and DPSS laser instrument 1, rotating double-optical wedge capillary processing 4 are connected with assist gas system 12, and the line-spacing row distance in the rotating speed of the parameter of DPSS laser instrument 1, high-speed electric expreess locomotive 30, the angular displacement of slowspeed machine 32, array hole and line number columns, sweep speed are by described computer control system 13 settings and control.
By Fig. 3 and shown in Figure 4; Described light path switching component 3 comprises rack module 16,45 degree inclined plane slide block 17, first reflecting optics 18, directive slide track 19, first stage clip 20, contiguous block 21, location-plate 22 and spacer pin 23; Said first reflecting optics 18 is fixed on the inclined-plane of 45 degree inclined plane slide blocks 17; 45 degree inclined plane slide blocks 17 are parallel with directive slide track 19 diaxons, linked to each other by contiguous block 21, cooperate with rack module 16; In rack module 16, move back and forth, spacer pin 22 is fixed on the location-plate 22.When light beam directly transferred to two wedges rotation capillary processings 4, first speculum 18 was away from light beam, and spacer pin 23 is inserted in the spacing hole 24 on the 45 degree inclined plane slide blocks 17, guarantees that light path switching component 3 does not stop light path.When light path need transfer to vibration mirror scanning processing head 5; Extract spacer pin 23; Precompression by stage clip 20 guarantees that the 45 degree inclined plane slide blocks 17 that first reflective mirror is installed accurately are positioned at the position that light path is switched all the time; And with beam reflection on the XY scan mirror 37 of vibration mirror scanning processing head 5, focus on the workpiece 15 through f – θ lens 38, realize processing.
By Fig. 5, shown in Figure 6; Described rotating double-optical wedge capillary processing 4 comprises second reflecting optics 39, first bolster 25, second bolster 26, first, second two sensitometric strips (27,28), belt wheel transmission system 29, gear train assembly 31, high-speed electric expreess locomotive 30, slowspeed machine 32, second stage clip 33, straight dynamic air cylinder 34, the valve 36 that is connected with focus lamp; Two identical drift angles that are fixed in first bolster 25 and second bolster 26 are first, second two sensitometric strips (27,28) placement parallel to each other of α; Said two sensitometric strips (27,28) center line is coaxial with the rotating shaft of light shaft coaxle, first bolster 25 and second bolster 26 of the incident beam that reflects through second reflecting optics 39; Described DPSS laser instrument 1 output beam after 10 power beam expansion lens 2 expand bundle directly to rotating double-optical wedge capillary processing 4; Light beam reflects after focus lamp 35 focuses on the focal plane of the position of departing from focus lamp central optical axis 0-R through 39 reflections of second reflecting optics and two sensitometric strips (27,28), and the maximum deviation amount is by the apex decision of two sensitometric strips (27,28); The upper surface of the lower surface of described first bolster 25 and second bolster 26 is processed with identical end face tooth, by second stage clip 33 the diaxon end face is meshed, when an end face of two bolsters (25,26) meshes; High-speed electric expreess locomotive 30 drives the common rotation of first, second bolster (25,26) through belt wheel transmission system 29, realizes the capillary processing of light beam rotation, and said straight dynamic air cylinder 34 is connected with second bolster 26; When straight dynamic air cylinder 34 starts; Straight dynamic air cylinder 34 acts on second bolster 26, makes itself and first bolster 25 break away from engagement, cuts simultaneously to gear train assembly 31; Drive the 26 independent rotations of second bolster by slowspeed machine 32; Make two sensitometric strips (27,28) produce relative angular displacement, the smallest angles shift value is the segmentation angle that two bolsters (25,26) end face meshes single tooth, and light beam has changed the side-play amount of light beam after two sensitometric strips (27,28) refraction; And the segmentation angle becomes relation one to one with the aperture; When closing straight dynamic air cylinder 34, straight dynamic air cylinder 34 no longer acts on second bolster 26, and then second bolster 26 thrust and first bolster 25 that receive second stage clip 33 meshes again; When first bolster 25 is driven in rotation; Two bolsters (25,26) are rotation jointly again, thereby changes the size in processing aperture, and the end face number of teeth of described two bolsters (25,26) has determined the degree of regulation in aperture; The angle of slowspeed machine 32 rotations is integral multiples of the single tooth segmentation of two bolsters (25,26) end face angle, and the rotation angle value of slowspeed machine 32 is set by computer control system 13.
By shown in Figure 2, described vibration mirror scanning processing head 5 comprises XY 2-D vibration mirror probe 37, f – θ lens 38.
The two bare headed retrofit devices of a kind of Ultra-Violet Laser that is used for the otherwise limit aperture, it is following that the method for processing step is carried out in the aperture of otherwise limit size:
When the limiting aperture of needs processing during at the 20-300 micron:
1) spacer pin in the light path switching component 3 23 is inserted in the spacing hole on the 45 degree inclined plane slide blocks 17,
2) start straight dynamic air cylinder 34; The straight reciprocating motion of straight dynamic air cylinder 34 promotes the field of conjugate action that second bolster 26 breaks away from first bolster 25; And cut simultaneously to gear train assembly 31, the rotation angle value of setting and the corresponding slowspeed machine 32 in required aperture on computer control system 13 is by the corresponding angle of computer control system 13 control slowspeed machines, 32 rotations; Drive second bolster 26 through gear train assembly 31 and also rotate corresponding angle; Make second sensitometric strip, 28 relative first sensitometric strips 27 that are fixed in second bolster 26 produce relative angular displacement, close straight dynamic air cylinder 34, straight dynamic air cylinder 34 no longer acts on second bolster 26; Then second bolster 26 is because the thrust of second stage clip 33 breaks away from gear train assembly 31, and mesh again the lower surface of its upper surface tooth and first bolster 25;
3) computer control system 13 driving Z axle translation stages 9 move up and down, and through 6 monitorings of CCD visual monitoring system, workpiece 15 finished surfaces are transferred on the focal plane of focus lamp 35; Move XY two-dimension translational platform 8,9, rotate Z axle turntable 10, find the capillary processing position of workpiece 15 through CCD visual monitoring system 6;
4) laser parameter, the process time parameter of rotating speed, the DPSS laser instrument 1 of line-spacing, row distance, line number, columns, the high-speed electric expreess locomotive 30 in hole is set on computer control system 13; Open assist gas system 12 and dust collecting system 14 simultaneously; By 30 rotations of computer control system 13 control high-speed electric expreess locomotives; Through belt wheel transmission system 29; Make first and second bolsters 25,26 driven common rotation, and the laser output of control DPSS laser instrument 1 and the displacement of XY translation stage 7,8, realize the processing of single micropore in required aperture or array micropore.
When the limiting aperture of needs processing more than 300 microns the time:
1) spacer pin in the light path switching component 3 23 is extracted; 45 of first speculum 18 is installed spends the position that under the precompression of first stage clip 20 promotes, accurately is positioned at the light path switching on the inclined plane slide blocks 17; Then the reflection of the light beam of DPSS laser instrument 1 output first speculum 18 in 10 power beam expansion lens 2, light path switching component 3 transfers on the XY scanning mirror 37 in the vibration mirror scanning processing head 5;
2) move up and down Z axle translation stage 9,, the finished surface of workpiece 15 is transferred on the focal plane of f – θ lens 38 through the 6 videos monitoring of CCD visual monitoring system; Move XY translation stage 7,8 and Z axle turntable 10,, open dust collecting system 14 simultaneously through the Working position that CCD visual monitoring system 6 confirms workpiece 15.Carry out the processing of circular hole and complex figure more than 300 microns by computer control system 13 control laser output and XY scanning mirror 37.
Claims (4)
1. two bare headed retrofit devices of the Ultra-Violet Laser that is used for the otherwise limit aperture; It is characterized in that this device comprises that a DPSS laser instrument, 10 power beam expansion lens, light path switching component, rotating double-optical wedge capillary processing head, vibration mirror scanning processing head, precision are XYZ translation stage and Z axle turntable, workpiece absorptive table, assist gas system, dust collecting system, CCD visual monitoring system and the computer control system of micron dimension; Described DPSS Laser Output Beam expands the Shu Houzhi light path switching component through 10 power beam expansion lens, is divided into two light paths, and one the tunnel directly to rotating double-optical wedge capillary processing head; By the rotation of computer control system control high-speed electric expreess locomotive, and drive two sensitometric strips and rotate together, thereby make the light beam rotation; Realize the single capillary processing of aperture hundreds of micron; Change the location of workpiece in conjunction with the XY translation stage, realize the processing of array micropore, first reflecting optics of another road in light path switching component is reflective to the vibration mirror scanning processing head; XY scanning mirror by in the computer control system control vibration mirror scanning processing head obtains the circular hole of limiting aperture more than 300 microns; The high-speed electric expreess locomotive of described computer control system and DPSS laser instrument, rotating double-optical wedge capillary processing head, slowspeed machine and straight dynamic air cylinder; The XY scanning mirror of vibration mirror scanning processing head, CCD visual monitoring system, XYZ translation stage, assist gas system are connected, and the line-spacing row distance in the rotating speed of DPSS laser parameters, high-speed electric expreess locomotive, the angular displacement of slowspeed machine, array hole and line number columns, sweep speed are by described computer control system setting and control.
2. according to the said a kind of two bare headed retrofit devices of Ultra-Violet Laser that are used for the otherwise limit aperture of claim 1; It is characterized in that; Described light path switching component comprises rack module, 45 degree inclined plane slide blocks, first reflecting optics, directive slide track, first stage clip, contiguous block, location-plate and spacer pin, and said first reflecting optics is fixed on the inclined-plane of 45 degree inclined plane slide blocks, and 45 degree inclined plane slide blocks are parallel with the directive slide track diaxon; Link to each other by contiguous block; Cooperate with rack module, in rack module, move back and forth, spacer pin is fixed on the location-plate.
3. according to the said a kind of two bare headed retrofit devices of Ultra-Violet Laser that are used for the otherwise limit aperture of claim 1; It is characterized in that; Described rotating double-optical wedge capillary processing head comprises second reflecting optics, first bolster, second bolster, first, second two sensitometric strips, belt wheel transmission system, gear train assembly, high-speed electric expreess locomotive, slowspeed machine, second stage clip, straight dynamic air cylinder, the valve that is connected with focus lamp; Two identical drift angles that are fixed in first bolster and second bolster are first, second two sensitometric strip placements parallel to each other of α; Said two sensitometric strip center lines are coaxial with the rotating shaft of light shaft coaxle, first bolster and second bolster of the incident beam that reflects through second reflecting optics; Described DPSS Laser Output Beam after 10 power beam expansion lens expand bundle directly to rotating double-optical wedge capillary processing head; Light beam is after second reflecting optics reflection and two sensitometric strips reflect; The line focus mirror focuses on the focal plane that departs from focus lamp central optical axis 0-R position, and the maximum deviation amount is by the apex decision of sensitometric strip; The upper surface of the lower surface of described first bolster and second bolster is processed with identical end face tooth, by second stage clip two bolster end faces is meshed, when an end face of two bolsters meshes; High-speed electric expreess locomotive rotates through first, second two bolsters of belt wheel transmission system drives jointly, realizes the capillary processing of light beam rotation, and said straight dynamic air cylinder is connected with second bolster; When straight dynamic air cylinder started, straight dynamic air cylinder acted on second bolster, made itself and first bolster break away from engagement; Cut simultaneously to gear train assembly, drive second bolster by slowspeed machine and independently rotate, make two sensitometric strips produce relative angular displacement; The smallest angles shift value meshes the segmentation angle of single tooth for the bolster end face; Light beam has changed the side-play amount of light beam after the refraction of two sensitometric strips, and the segmentation angle becomes with the aperture one to one to concern, when closing straight dynamic air cylinder; Straight dynamic air cylinder no longer acts on second bolster; Then second bolster thrust and first bolster that receive second stage clip meshes again, and when first bolster was driven in rotation, two bolsters are rotation jointly again; Thereby change the size in processing aperture; The end face number of teeth of described two bolsters has determined the degree of regulation in aperture, and the angle of slowspeed machine rotation is the integral multiple of the single tooth segmentation of two bolster end faces angle, and the rotation angle value of slowspeed machine is set by computer control system.
4. according to the said a kind of two bare headed retrofit devices of Ultra-Violet Laser that are used for the otherwise limit aperture of claim 1, it is characterized in that described vibration mirror scanning processing head comprises XY 2-D vibration mirror probe, f – θ lens.
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| CN105499813B (en) * | 2016-02-02 | 2017-10-17 | 苏州禾弘电子科技有限公司 | Laser drilling machine |
| CN111716023A (en) * | 2020-06-24 | 2020-09-29 | 中国科学院西安光学精密机械研究所 | Machining device and machining method for high depth-diameter ratio micropores |
| CN111716023B (en) * | 2020-06-24 | 2021-12-21 | 中国科学院西安光学精密机械研究所 | Machining device and machining method for high depth-diameter ratio micropores |
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