CN102248307A - Ultraviolet laser fine processing device and method with double optical heads for different limiting apertures - Google Patents
Ultraviolet laser fine processing device and method with double optical heads for different limiting apertures Download PDFInfo
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- CN102248307A CN102248307A CN2011101611973A CN201110161197A CN102248307A CN 102248307 A CN102248307 A CN 102248307A CN 2011101611973 A CN2011101611973 A CN 2011101611973A CN 201110161197 A CN201110161197 A CN 201110161197A CN 102248307 A CN102248307 A CN 102248307A
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Abstract
The invention discloses an ultraviolet laser fine processing device and method with double optical heads for different limiting apertures. The device comprises a DPSS (Diode Pumped Solid State) laser, a 10-time beam expanding system, an optical path switching module, a rotating micropore processing head with double optical wedges, a galvanometer scanning processing head, an XYZ three-dimensional translation platform, a Z-axis rotating platform, an auxiliary gas system, a dust collecting system, a CCD (Charge Coupled Device) vision monitoring system and a computer controlling system, wherein the rotating micropore processing head with double optical wedges is suitable for processing round holes with diameters less than several hundred microns and array micropores; and the galvanometer scanning processing head is suitable for precisely processing round holes with diameters greater than 300 microns and also curvilinear figures up to dozens of millimeters in size. By means of the device and method which are disclosed by the invention, the limitation that the aperture range and precision are limited by the device performance and the processing mode due to limiting processing in a single processing mode are broken through, and the ultraviolet laser fine processing requirements for the different limiting apertures are satisfied. The processing device has the advantages of high repetition frequency, good stability, high light beam quality and small pulse width.
Description
Technical field
The present invention relates to a kind of light path by accurate switching rotating double-optical wedge processing head and vibration mirror scanning processing head, particularly a kind of two bare headed retrofit device and methods of Ultra-Violet Laser that are used for the otherwise limit aperture belong to laser retrofit technical applications.
Background technology
In recent years, along with the miniaturization of electronic product, microelectronics, biomedical devices components and parts, the demand of Ultra-Violet Laser retrofit was growing, and it is also more and more in these Application for Field that laser is played processing such as micropore, cutting, cutting.Be usually operated at cellular level as biomedical devices, the component hole, passage and other parts that this means them all are minimum, some aperture that is processed is between 20 to hundreds of microns, the tolerance of aperture and relative dimensions is also at micron order, and the profile cut lengths of part are then between several millimeters to tens of millimeters.Advanced DPSS laser process equipment, use the pulse energy processing small-size materials of Ultra-Violet Laser, its focused spot size is minimum, I reaches several microns, have advantages such as joint-cutting is narrow, cutting speed is fast, the heat affected area is little, material deformation is little, but the parts of fine cut circular hole and various complicated shapes.
The moulding of laser circular hole mainly contains five kinds of methods: 1, fixed beam processing micropore, the aperture is determined that by focal beam spot unadjustable, hole shape is determined by beam quality, and is uncontrollable.2, fixed beam is in conjunction with two-dimension displacement platform processing micropore or figure, and the aperture is by the stroke decision of translation stage, and the micropore precision is subjected to the influence of displacement platform precision and speed.Because movement inertia is very big, response speed is low, carburization zone, melting zone that little bore edges has tangible fuel factor to cause, or have the phenomenon of deposit at the material top, therefore be not suitable for processing the hole of hundred micron diameters.3, fixed beam is in conjunction with rotation platform and one dimension displacement platform processing circular hole, and aperture adjustment realizes that by the bias of rotating shaft and optical axis center the aperture is unrestricted, and pass forms by rotating at a high speed, and precision is higher, is fit to the processing micropore.But, be not suitable for the processing of big part and array hole, and the anchor point difficulty is looked for because workpiece rotates with platform.4, vibration mirror scanning processing micropore or figure, because the high-speed response of galvanometer, beam position is fast, is fit to the array hole and the various figure of processing One's name is legion, but is subjected to feature of device own and accuracy limitations, generally is not suitable for processing the hole below 300 microns, the hole can be out of shape.5, light beam rotates at a high speed, and workpiece is motionless, and aperture adjustment is that the deviation value at laser beam and micropore center is produced by optical module, realize capillary processing, hole shape precision height, the aperture controllability is good, its greatest limit aperture is limited by the wedge drift angle, is fit to the following high-precision micropore of hundreds of micron and is shaped.
Above-mentioned micropore manufacturing process all exists certain limitation at aspects such as pore diameter range, hole shape precision, process velocity, quality, if will satisfy requirements such as different apertures, hole shape, precision, array, high efficiency, high-quality, then must be equipped with many cover ultraviolet retrofit equipment, cost then is multiplied.
Summary of the invention
The present invention seeks in order to overcome the limitation of existing single micropore manufacturing process, to satisfy the Ultra-Violet Laser retrofit demand of industrial production otherwise limit aperture and precision at aspects such as pore diameter range, hole shape precision, process velocity, quality.
Technical scheme of the present invention is: a kind of two bare headed retrofit devices of Ultra-Violet Laser that are used for the otherwise limit aperture, it is characterized in that this device comprises that a DPSS laser instrument, 10 power beam expansion lens, light path switching component, rotating double-optical wedge capillary processing head, vibration mirror scanning processing head, precision are XYZ translation stage and Z axle turntable, workpiece absorptive table, assist gas system, dust collecting system, CCD visual monitoring system and the computer control system of micron dimension; Described DPSS Laser Output Beam expands the Shu Houzhi light path switching component through 10 power beam expansion lens, be divided into two light paths, one the tunnel directly to rotating double-optical wedge capillary processing head, by the rotation of computer control system control high-speed electric expreess locomotive, and drive two sensitometric strips and rotate together, thereby make the light beam rotation, realize the single capillary processing of aperture hundreds of micron, change the location of workpiece in conjunction with the XY translation stage, realize the processing of array micropore, first reflecting optics of another road in light path switching component is reflective to the vibration mirror scanning processing head, XY scanning mirror by in the computer control system control vibration mirror scanning processing head obtains the processing of the circular hole of limiting aperture more than 300 microns and the above complex figure of millimeter level; The high-speed electric expreess locomotive of described computer control system and DPSS laser instrument, rotating double-optical wedge capillary processing head, slowspeed machine and straight dynamic air cylinder, the XY scanning mirror of vibration mirror scanning processing head, CCD visual monitoring system, XYZ translation stage, assist gas system are connected, and the line-spacing row distance in the rotating speed of DPSS laser parameters, high-speed electric expreess locomotive, the angular displacement of slowspeed machine, array hole and line number columns, sweep speed are by described computer control system setting and control.
Described light path switching component comprises rack module, 45 degree inclined plane slide blocks, first reflecting optics, directive slide track, first stage clip, contiguous block, location-plate and spacer pin, described first reflecting optics is fixed on the inclined-plane of 45 degree inclined plane slide blocks, 45 degree inclined plane slide blocks are parallel with the directive slide track diaxon, link to each other by contiguous block, cooperate with rack module, move back and forth in rack module, spacer pin is fixed on the location-plate.
Described rotating double-optical wedge capillary processing head comprises second reflecting optics, first bolster, second bolster, first, the second two sensitometric strips, the belt wheel transmission system, gear train assembly, high-speed electric expreess locomotive, slowspeed machine, second stage clip, straight dynamic air cylinder, the valve that is connected with focus lamp, two identical drift angles that are fixed in first bolster and second bolster are first of α, the second two sensitometric strip placements parallel to each other, described two sensitometric strip center lines and light shaft coaxle through the incident beam of second reflecting optics reflection, the rotating shaft of first bolster and second bolster is coaxial, described DPSS Laser Output Beam light path after 10 power beam expansion lens expand bundle directly to rotating double-optical wedge capillary processing head, light beam is after second reflecting optics reflection and two sensitometric strips reflect, the line focus mirror focuses on the focal plane that departs from focus lamp central optical axis 0-R position, and the maximum deviation amount is by the apex angle decision of sensitometric strip; The upper surface of the lower surface of described first bolster and second bolster is processed with identical end face tooth, by stage clip the diaxon end face is meshed, when an end face of two bolsters meshes, high-speed electric expreess locomotive is by belt wheel transmission system drives first, the second two bolsters rotate jointly, realize the capillary processing of light beam rotation, described straight dynamic air cylinder is connected with the second two bolsters, when straight dynamic air cylinder starts, straight dynamic air cylinder acts on second bolster, make itself and first bolster break away from engagement, cut simultaneously to gear train assembly, driving second bolster by slowspeed machine independently rotates, make two sensitometric strips produce relative angular displacement, minimum value of angular displacement meshes the segmentation angle of single tooth for the bolster end face, light beam has changed the side-play amount of light beam after two sensitometric strip refractions, and the segmentation angle becomes relation one to one with the aperture, when closing straight dynamic air cylinder, straight dynamic air cylinder no longer acts on second bolster, then second bolster thrust and first bolster that are subjected to second stage clip meshes again, when first bolster is driven in rotation, diaxon is rotation jointly again, thereby change the size in processing aperture, the end face number of teeth of described two bolsters has determined the degree of regulation in aperture, the angle of slowspeed machine rotation is the integral multiple of the single tooth segmentation of two bolster end faces angle, and the rotation angle value of slowspeed machine is set by computer control system.
Described vibration mirror scanning processing head comprises XY 2-D vibration mirror probe, f – θ lens.
The two bare headed retrofit devices of a kind of Ultra-Violet Laser that is used for the otherwise limit aperture, it is as follows that the method for processing step is carried out in the aperture of otherwise limit size:
When the limiting aperture of needs processing during at the 20-300 micron:
1) spacer pin in the light path switching component is inserted in 45 spacing holes of spending on the inclined plane slide blocks, first speculum is not among light path, and then the light beam of DPSS laser instrument output directly transmits after 10 power beam expansion lens expand bundle and enters the rotating double-optical wedge processing head;
2) start straight dynamic air cylinder, the straight reciprocating motion of straight dynamic air cylinder promotes the field of conjugate action that second bolster breaks away from first bolster, and cut simultaneously to gear train assembly, on computer control system, set rotation angle value with the corresponding slowspeed machine in required aperture, rotate corresponding angle by computer control system control slowspeed machine, drive second bolster by gear train assembly and also rotate corresponding angle, make relative first sensitometric strip of second sensitometric strip that is fixed in second bolster produce relative angular displacement, close straight dynamic air cylinder, straight dynamic air cylinder no longer acts on second bolster, then second bolster is because the thrust of second stage clip breaks away from gear train assembly, and mesh again the lower surface of its upper surface tooth and first bolster;
3) computer control system driving Z axle translation stage moves up and down, and by CCD visual monitoring system monitoring, workpiece machining surface is transferred on the focal plane of focus lamp; Mobile XY two-dimension translational platform rotates Z axle turntable, finds the capillary processing position of workpiece by CCD visual monitoring system;
4) laser parameter, the process time parameter of rotating speed, the DPSS laser instrument of line-spacing, row distance, line number, columns, the high-speed electric expreess locomotive in hole is set on computer control system, open assist gas system and dust collecting system simultaneously, by the rotation of computer control system control high-speed electric expreess locomotive, by the belt wheel transmission system, make first and second bolsters be driven common rotation, and the laser output of control DPSS laser instrument and the displacement of XY translation stage, realize the processing of single micropore in required aperture or array micropore;
When the limiting aperture of needs processing more than 300 microns the time:
1) spacer pin in the light path switching component is extracted, 45 of first speculum is installed spends the position that under the precompression of stage clip promotes, accurately is positioned at the light path switching on the inclined plane slide blocks, then the reflection of light beam first speculum in 10 power beam expansion lens, light path switching component of DPSS laser instrument output transfers on the XY scanning mirror in the vibration mirror scanning processing head;
2) move up and down Z axle translation stage,, the finished surface of workpiece is transferred on the focal plane of f – θ lens by the monitoring of CCD visual monitoring system video; Mobile XY translation stage and Z axle turntable by the Working position that CCD visual monitoring system determines workpiece, are opened dust collecting system simultaneously.Carry out the processing of circular hole and complex figure more than 300 microns by computer control system control laser and XY scanning mirror.
The invention has the beneficial effects as follows: a kind of two bare headed retrofit device and methods of Ultra-Violet Laser that can be used for the otherwise limit aperture are provided, overcome single micropore former and method limitation at aspects such as pore diameter range, hole shape precision, process velocity, quality, can satisfy the Ultra-Violet Laser retrofit requirement of industrial production, greatly reduce cost wide regions such as different apertures, hole shape, precision, array, high efficiency, high-quality.
Description of drawings
Fig. 1 is the two bare headed retrofit schematic diagram of device of Ultra-Violet Laser;
Fig. 2 is two shaven head processing light path schematic diagrames;
Fig. 3 is a light path switching component structural representation front view;
Fig. 4 is a light path switching component structural representation vertical view;
Fig. 5 is a rotating double-optical wedge capillary processing schematic diagram;
Fig. 6 is two bolster end face meshing gear structural representations.
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The specific embodiment
The present invention is further illustrated below in conjunction with accompanying drawing.
A kind of two bare headed retrofit devices of Ultra-Violet Laser that are used for the otherwise limit aperture, by Fig. 1, Fig. 2, Fig. 4, Fig. 5, shown in Figure 6, a kind of two bare headed retrofit devices of Ultra-Violet Laser that are used for the otherwise limit aperture, be characterized in that this device comprises a DPSS laser instrument 1,10 power beam expansion lens 2, light path switching component 3, rotating double-optical wedge capillary processing 4, vibration mirror scanning processing head 5, precision is the XYZ translation stage 7 of micron dimension, 8,9 and Z axle turntable 10, workpiece absorptive table 11, assist gas system 12, dust collecting system 14, CCD visual monitoring system 6 and computer control system 13; Described DPSS laser instrument 1 output beam expands Shu Houzhi light path switching component 3 through 10 power beam expansion lens 2, be divided into two light paths, one the tunnel directly to rotating double-optical wedge capillary processing 4, by 30 rotations of computer control system 13 control high-speed electric expreess locomotives, and drive first and second sensitometric strips 27,28 rotations, thereby make the light beam rotation, realize the single capillary processing of aperture hundreds of micron, in conjunction with XY translation stage 7,8 change workpiece 15 positions, realize the processing of array micropore, first reflecting optics 18 of another road in light path switching component 3 is reflective to vibration mirror scanning processing head 5, XY scanning mirror 37 by in the computer control system 13 control vibration mirror scanning processing heads 5 obtains the processing of the circular hole of limiting aperture more than 300 microns and the above complex figure of millimeter level; High-speed electric expreess locomotive 30, slowspeed machine 32, straight dynamic air cylinder 34, the XY scanning mirror 37 of vibration mirror scanning processing head 5, CCD visual monitoring system 6, the XYZ translation stage 7,8,9 of described computer control system 13 and DPSS laser instrument 1, rotating double-optical wedge capillary processing 4 are connected with assist gas system 12, and the line-spacing row distance in the rotating speed of the parameter of DPSS laser instrument 1, high-speed electric expreess locomotive 30, the angular displacement of slowspeed machine 32, array hole and line number columns, sweep speed are provided with and control by described computer control system 13.
By Fig. 3 and shown in Figure 4, described light path switching component 3 comprises rack module 16,45 degree inclined plane slide blocks 17, first reflecting optics 18, directive slide track 19, first stage clip 20, contiguous block 21, location-plate 22 and spacer pin 23, described first reflecting optics 18 is fixed on the inclined-plane of 45 degree inclined plane slide blocks 17,45 degree inclined plane slide blocks 17 are parallel with directive slide track 19 diaxons, link to each other by contiguous block 21, cooperate with rack module 16, move back and forth in rack module 16, spacer pin 22 is fixed on the location-plate 22.When light beam directly transferred to two wedges rotation capillary processings 4, first speculum 18 was away from light beam, and spacer pin 23 is inserted in the spacing holes 24 on the 45 degree inclined plane slide blocks 17, guarantees that light path switching component 3 does not stop light path.When light path need transfer to vibration mirror scanning processing head 5, extract spacer pin 23, precompression by stage clip 20 guarantees that the 45 degree inclined plane slide blocks 17 that first reflective mirror is installed accurately are positioned at the position that light path is switched all the time, and with beam reflection on the XY scan mirror 37 of vibration mirror scanning processing head 5, focus on the workpiece 15 through f – θ lens 38, realize processing.
By Fig. 5, shown in Figure 6, described rotating double-optical wedge capillary processing 4 comprises second reflecting optics 39, first bolster 25, second bolster 26, first, the second two sensitometric strips (27,28), belt wheel transmission system 29, gear train assembly 31, high-speed electric expreess locomotive 30, slowspeed machine 32, second stage clip 33, straight dynamic air cylinder 34, the valve 36 that is connected with focus lamp, two identical drift angles that are fixed in first bolster 25 and second bolster 26 are first of α, the second two sensitometric strips (27,28) placement parallel to each other, described two sensitometric strips (27,28) center line and light shaft coaxle through the incident beam of second reflecting optics 39 reflection, the rotating shaft of first bolster 25 and second bolster 26 is coaxial, described DPSS laser instrument 1 output beam after 10 power beam expansion lens 2 expand bundle directly to rotating double-optical wedge capillary processing 4, light beam is through second reflecting optics, 39 reflection and two sensitometric strips (27,28) refraction is after focus lamp 35 focuses on the focal plane that departs from focus lamp central optical axis 0-R position, and the maximum deviation amount is by two sensitometric strips (27,28) apex angle decision; The upper surface of the lower surface of described first bolster 25 and second bolster 26 is processed with identical end face tooth, by second stage clip 33 the diaxon end face is meshed, when two bolsters (25, when an end face 26) meshes, high-speed electric expreess locomotive 30 drives first by belt wheel transmission system 29, second bolster (25,26) common rotation, realize the capillary processing of light beam rotation, described straight dynamic air cylinder 34 is connected with second bolster 26, when straight dynamic air cylinder 34 starts, straight dynamic air cylinder 34 acts on second bolster 26, make itself and first bolster 25 break away from engagement, cut simultaneously to gear train assembly 31, drive the 26 independent rotations of second bolster by slowspeed machine 32, make two sensitometric strips (27,28) produce relative angular displacement, minimum value of angular displacement is two bolsters (25,26) end face meshes the segmentation angle of single tooth, light beam is through two sensitometric strips (27,28) changed the side-play amount of light beam after the refraction, and the segmentation angle becomes relation one to one with the aperture, when closing straight dynamic air cylinder 34, straight dynamic air cylinder 34 no longer acts on second bolster 26, then second bolster 26 thrust and first bolster 25 that are subjected to second stage clip 33 meshes again, when first bolster 25 is driven in rotation, two bolsters (25,26) rotation jointly again, thereby change the size in processing aperture, described two bolsters (25,26) the end face number of teeth has determined the degree of regulation in aperture, the angle of slowspeed machine 32 rotations is two bolsters (25,26) integral multiple of the single tooth segmentation of end face angle, the rotation angle value of slowspeed machine 32 is set by computer control system 13.
By shown in Figure 2, described vibration mirror scanning processing head 5 comprises XY 2-D vibration mirror probe 37, f – θ lens 38.
The two bare headed retrofit devices of a kind of Ultra-Violet Laser that is used for the otherwise limit aperture, it is as follows that the method for processing step is carried out in the aperture of otherwise limit size:
When the limiting aperture of needs processing during at the 20-300 micron:
1) spacer pin in the light path switching component 3 23 is inserted in 45 spacing holes of spending on the inclined plane slide blocks 17,
2) start straight dynamic air cylinder 34, the straight reciprocating motion of straight dynamic air cylinder 34 promotes the field of conjugate action that second bolster 26 breaks away from first bolster 25, and cut simultaneously to gear train assembly 31, on computer control system 13, set rotation angle value with the corresponding slowspeed machine 32 in required aperture, by the corresponding angle of computer control system 13 control slowspeed machines, 32 rotations, drive second bolster 26 by gear train assembly 31 and also rotate corresponding angle, make second sensitometric strip, 28 relative first sensitometric strips 27 that are fixed in second bolster 26 produce relative angular displacement, close straight dynamic air cylinder 34, straight dynamic air cylinder 34 no longer acts on second bolster 26, then second bolster 26 is because the thrust of second stage clip 33 breaks away from gear train assembly 31, and mesh again the lower surface of its upper surface tooth and first bolster 25;
3) computer control system 13 driving Z axle translation stages 9 move up and down, and by 6 monitorings of CCD visual monitoring system, workpiece 15 finished surfaces are transferred on the focal plane of focus lamp 35; Mobile XY two-dimension translational platform 8,9 rotates Z axle turntable 10, finds the capillary processing position of workpiece 15 by CCD visual monitoring system 6;
4) laser parameter, the process time parameter of rotating speed, the DPSS laser instrument 1 of line-spacing, row distance, line number, columns, the high-speed electric expreess locomotive 30 in hole is set on computer control system 13, open assist gas system 12 and dust collecting system 14 simultaneously, by 30 rotations of computer control system 13 control high-speed electric expreess locomotives, by belt wheel transmission system 29, make first and second bolsters 25,26 be driven common rotation, and the laser output of control DPSS laser instrument 1 and the displacement of XY translation stage 7,8, realize the processing of single micropore in required aperture or array micropore.
When the limiting aperture of needs processing more than 300 microns the time:
1) spacer pin in the light path switching component 3 23 is extracted, 45 of first speculum 18 is installed spends the position that under the precompression of first stage clip 20 promotes, accurately is positioned at the light path switching on the inclined plane slide blocks 17, then the reflection of light beam first speculum 18 in 10 power beam expansion lens 2, light path switching component 3 of DPSS laser instrument 1 output transfers on the XY scanning mirror 37 in the vibration mirror scanning processing head 5;
2) move up and down Z axle translation stage 9,, the finished surface of workpiece 15 is transferred on the focal plane of f – θ lens 38 by the 6 videos monitoring of CCD visual monitoring system; Mobile XY translation stage 7,8 and Z axle turntable 10 by the Working position that CCD visual monitoring system 6 determines workpiece 15, are opened dust collecting system 14 simultaneously.Carry out the processing of circular hole and complex figure more than 300 microns by computer control system 13 control laser output and XY scanning mirror 37.
Claims (5)
1. two bare headed retrofit devices of the Ultra-Violet Laser that is used for the otherwise limit aperture, it is characterized in that this device comprises that a DPSS laser instrument, 10 power beam expansion lens, light path switching component, rotating double-optical wedge capillary processing head, vibration mirror scanning processing head, precision are XYZ translation stage and Z axle turntable, workpiece absorptive table, assist gas system, dust collecting system, CCD visual monitoring system and the computer control system of micron dimension; Described DPSS Laser Output Beam expands the Shu Houzhi light path switching component through 10 power beam expansion lens, be divided into two light paths, one the tunnel directly to rotating double-optical wedge capillary processing head, by the rotation of computer control system control high-speed electric expreess locomotive, and drive two sensitometric strips and rotate together, thereby make the light beam rotation, realize the single capillary processing of aperture hundreds of micron, change the location of workpiece in conjunction with the XY translation stage, realize the processing of array micropore, first reflecting optics of another road in light path switching component is reflective to the vibration mirror scanning processing head, XY scanning mirror by in the computer control system control vibration mirror scanning processing head obtains the processing of the circular hole of limiting aperture more than 300 microns and the above complex figure of millimeter level; The high-speed electric expreess locomotive of described computer control system and DPSS laser instrument, rotating double-optical wedge capillary processing head, slowspeed machine and straight dynamic air cylinder, the XY scanning mirror of vibration mirror scanning processing head, CCD visual monitoring system, XYZ translation stage, assist gas system are connected, and the line-spacing row distance in the rotating speed of DPSS laser parameters, high-speed electric expreess locomotive, the angular displacement of slowspeed machine, array hole and line number columns, sweep speed are by described computer control system setting and control.
2. according to the described a kind of two bare headed retrofit devices of Ultra-Violet Laser that are used for the otherwise limit aperture of claim 1, it is characterized in that, described light path switching component comprises rack module, 45 degree inclined plane slide blocks, first reflecting optics, directive slide track, first stage clip, contiguous block, location-plate and spacer pin, described first reflecting optics is fixed on the inclined-plane of 45 degree inclined plane slide blocks, 45 degree inclined plane slide blocks are parallel with the directive slide track diaxon, link to each other by contiguous block, cooperate with rack module, move back and forth in rack module, spacer pin is fixed on the location-plate.
3. according to the described a kind of two bare headed retrofit devices of Ultra-Violet Laser that are used for the otherwise limit aperture of claim 1, it is characterized in that, described rotating double-optical wedge capillary processing head comprises second reflecting optics, first bolster, second bolster, first, the second two sensitometric strips, the belt wheel transmission system, gear train assembly, high-speed electric expreess locomotive, slowspeed machine, second stage clip, straight dynamic air cylinder, the valve that is connected with focus lamp, two identical drift angles that are fixed in first bolster and second bolster are first of α, the second two sensitometric strip placements parallel to each other, described two sensitometric strip center lines and light shaft coaxle through the incident beam of second reflecting optics reflection, the rotating shaft of first bolster and second bolster is coaxial, described DPSS Laser Output Beam after 10 power beam expansion lens expand bundle directly to rotating double-optical wedge capillary processing head, light beam is after second reflecting optics reflection and two sensitometric strips reflect, the line focus mirror focuses on the focal plane that departs from focus lamp central optical axis 0-R position, and the maximum deviation amount is by the apex angle decision of sensitometric strip; The upper surface of the lower surface of described first bolster and second bolster is processed with identical end face tooth, by second stage clip diaxon end face is meshed, when an end face of two bolsters meshes, high-speed electric expreess locomotive is by belt wheel transmission system drives first, the second two bolsters rotate jointly, realize the capillary processing of light beam rotation, described straight dynamic air cylinder is connected with second bolster, when straight dynamic air cylinder starts, straight dynamic air cylinder acts on second bolster, make itself and first bolster break away from engagement, cut simultaneously to gear train assembly, driving second bolster by slowspeed machine independently rotates, make two sensitometric strips produce relative angular displacement, minimum value of angular displacement meshes the segmentation angle of single tooth for the bolster end face, light beam has changed the side-play amount of light beam after two sensitometric strip refractions, and the segmentation angle becomes relation one to one with the aperture, when closing straight dynamic air cylinder, straight dynamic air cylinder no longer acts on second bolster, then second bolster thrust and first bolster that are subjected to stage clip meshes again, when first bolster is driven in rotation, diaxon is rotation jointly again, thereby change the size in processing aperture, the end face number of teeth of described two bolsters has determined the degree of regulation in aperture, the angle of slowspeed machine rotation is the integral multiple of the single tooth segmentation of two bolster end faces angle, and the rotation angle value of slowspeed machine is set by computer control system.
4. according to the described a kind of two bare headed retrofit devices of Ultra-Violet Laser that are used for the otherwise limit aperture of claim 1, it is characterized in that described vibration mirror scanning processing head comprises XY 2-D vibration mirror probe, f – θ lens.
5. the two bare headed retrofit devices of a kind of according to claim 1 Ultra-Violet Laser that is used for the otherwise limit aperture, it is as follows that the method for processing step is carried out in the aperture of otherwise limit size:
When the limiting aperture of needs processing during at the 20-300 micron:
1) spacer pin in the light path switching component is inserted in 45 spacing holes of spending on the inclined plane slide blocks, first speculum is not among light path, and then the light beam of DPSS laser instrument output directly transmits after 10 power beam expansion lens expand bundle and enters the rotating double-optical wedge processing head;
2) start straight dynamic air cylinder, the straight reciprocating motion of straight dynamic air cylinder promotes the field of conjugate action that second bolster breaks away from first bolster, and cut simultaneously to gear train assembly, on computer control system, set rotation angle value with the corresponding slowspeed machine in required aperture, rotate corresponding angle by computer control system control slowspeed machine, drive second bolster by gear train assembly and also rotate corresponding angle, make relative first sensitometric strip of second sensitometric strip that is fixed in second bolster produce relative angular displacement, close straight dynamic air cylinder, straight dynamic air cylinder no longer acts on second bolster, then second bolster is because the thrust of second stage clip breaks away from gear train assembly, and mesh again the lower surface of its upper surface tooth and first bolster;
3) computer control system driving Z axle translation stage moves up and down, and by CCD visual monitoring system monitoring, workpiece machining surface is transferred on the focal plane of focus lamp; Mobile XY two-dimension translational platform rotates Z axle turntable, finds the capillary processing position of workpiece by CCD visual monitoring system;
4) laser parameter, the process time parameter of rotating speed, the DPSS laser instrument of line-spacing, row distance, line number, columns, the high-speed electric expreess locomotive in hole is set on computer control system, open assist gas system and dust collecting system simultaneously, by the rotation of computer control system control high-speed electric expreess locomotive, by the belt wheel transmission system, make first and second bolsters be driven common rotation, and the laser output of control DPSS laser instrument and the displacement of XY translation stage, realize the processing of single micropore in required aperture or array micropore;
When the limiting aperture of needs processing more than 300 microns the time:
1) spacer pin in the light path switching component is extracted, 45 of first speculum is installed spends the position that under the precompression of stage clip promotes, accurately is positioned at the light path switching on the inclined plane slide blocks, then the reflection of light beam first speculum in 10 power beam expansion lens, light path switching component of DPSS laser instrument output transfers on the XY scanning mirror in the vibration mirror scanning processing head;
2) move up and down Z axle translation stage,, the finished surface of workpiece is transferred on the focal plane of f – θ lens by the monitoring of CCD visual monitoring system video; Mobile XY translation stage and Z axle turntable are determined the Working position of workpiece by CCD visual monitoring system, open dust collecting system simultaneously, are carried out the processing of circular hole and complex figure more than 300 microns by computer control system control laser and XY scanning mirror.
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| CN105108356A (en) * | 2015-09-25 | 2015-12-02 | 深圳英诺激光科技有限公司 | Laser machining device and method for machining pipe-shaped materials |
| CN105880827A (en) * | 2015-11-04 | 2016-08-24 | 上海费米激光科技有限公司 | Micron-sized ultraviolet laser micro processing platform |
| CN106425122A (en) * | 2016-12-05 | 2017-02-22 | 清华大学 | Device and method for laser rotary-cut processing |
| CN108274135A (en) * | 2018-03-30 | 2018-07-13 | 海目星（江门）激光智能装备有限公司 | A kind of full-automatic battery shell laser cutting device |
| CN108941926A (en) * | 2018-08-01 | 2018-12-07 | 东莞盛翔精密金属有限公司 | Four-axle linked marking equipment based on automated imaging technology |
| CN108971752A (en) * | 2018-08-01 | 2018-12-11 | 东莞盛翔精密金属有限公司 | Automatic identification and the welding equipment of welding position can be grabbed |
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| CN114178687A (en) * | 2021-11-19 | 2022-03-15 | 华中科技大学 | Plug-in laser inclination angle control module and laser scanning processing device |
| CN114114673A (en) * | 2021-12-31 | 2022-03-01 | 华中科技大学 | Laser point-to-point transmission system |
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| CN114101900B (en) * | 2021-12-31 | 2023-03-10 | 华中科技大学 | Laser scanning optical system |
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Address after: 200233 No. 770, Xuhui District, Shanghai, Yishan Road Patentee after: Shanghai Laser Technology Research Institute Co.,Ltd. Address before: 200233 No. 770, Xuhui District, Shanghai, Yishan Road Patentee before: Shanghai Institute of Laser Technology |