CN101497149A - Laser flying focus scanning system - Google Patents
Laser flying focus scanning system Download PDFInfo
- Publication number
- CN101497149A CN101497149A CNA2009100609038A CN200910060903A CN101497149A CN 101497149 A CN101497149 A CN 101497149A CN A2009100609038 A CNA2009100609038 A CN A2009100609038A CN 200910060903 A CN200910060903 A CN 200910060903A CN 101497149 A CN101497149 A CN 101497149A
- Authority
- CN
- China
- Prior art keywords
- laser
- focus
- scanning
- galvanometer
- static
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention belongs to the field of laser processing, and relates to a laser flying focused scanning system, which has the important characteristic of adopting combination of a static focusing system and a polarizer system. The scanning system realizes the aim of dynamic control of a three-dimensional spacial position of a laser spot by changing distance between the static focusing system and the polarizer system, and has the characteristics of good focusing property, simple structure, quick response speed, low cost, wide application range and the like.
Description
Technical field
The invention belongs to field of laser processing, particularly big width laser 3-D scanning manufacture field.
Background technology
Big width laser scanning system of processing in the market, or adopt expensive import dynamic focusing system, or adopt large format XY worktable mode.
Adopt the import dynamic focusing system, its principle is that distance remains unchanged between focus lamp and the galvanometer system, change laser beam divergent angle by beam expanding lens, perhaps change the distance between beam expander and the condensing lens, realize focus-compensating, its advantage is that response speed is fast, the processing breadth is big, be mainly used in fields such as laser fast shaping, but changing response speed for some for the focal position does not require for the so high application, adopt the scheme of dynamic focusing system, purchase cost is too high, has the situation of configuration serious waste.
Adopt the system of large format XY worktable, mainly be divided into two kinds of situations again, a kind of is that workpiece is moving, and laser spot is motionless, and a kind of is that workpiece is motionless, adopts flight light path.The former advantage is the precise localization of focal spot height, but because workbench inertia is very big, so process velocity is very slow; Latter's process velocity aspect improves a lot than the former, but still will use the linear electric motors (pace is fast) of longer stroke, therefore still has the too high not strong situation of the market competitiveness that causes of cost.
Summary of the invention
The objective of the invention is to design a kind of new outside optical system that is applied to the big width laser 3-D scanning, possess simple and reliable for structure, characteristics such as cost is low, control is easy, high efficiency laser scanning, be applied to laser scanning focal variation response speed less demanding especially, but the field that the laser scanning manufacturing breadth is bigger, carving, the processing of amorphous silicon thin-film solar cell plate photic zone, the laser scribing insulation all around of amorphous silicon thin-film solar cell plate etc. in for example amorphous silicon thin-film solar cell plate clear limit processing, the large format glass.
The object of the present invention is achieved like this: ask for an interview Fig. 1, the 1st, the laser galvanometer scanning eyeglass, laser scanning initial point just, 2,3 is respectively the position and the laser scanning centre position of laser scanning outermost, converge attitude laser back-shaped globulate focal sphere face 4 after galvanometer 1 scanning, the 5th, processing plane, in order to make the laser spot on the focal sphere face 4 in the vibration mirror scanning process, all fall on the processing plane 5, must realize the dynamic change of laser spot in scanning process, the problem to be solved in the present invention that Here it is.Ask for an interview Fig. 2, the 6th, LASER Light Source, the 7th, base plate, the 8th, the laser beam expanding device, the 11st, the laser galvanometer system, the 12nd, laser beam, between laser beam expander 8 and laser galvanometer system 11, a series of optical lens is set, and these a series of optical lenses constitute laser condensing lens, change the distance between laser condensing lens and the laser galvanometer system 11,9,10 is respectively the diverse location of focus lamp, laser spot is left the corresponding same distance that changes of distance of galvanometer system, and when focus lamp was positioned at position 9, laser spot was in 13 positions, when focus lamp is positioned at position 10, laser spot adds the one dimension or the two-dimensional scan of galvanometer system 11 in 14 positions, reaches the purpose of control laser spot at three-dimensional space position.
The present invention, a kind of laser flying focus scanning system owing to adopted above-mentioned technical scheme, makes it compared with prior art, has following advantage and good effect:
1. the present invention proposes a kind of laser flying focus scanning system, compares with large format two dimension mobile working platform working method, owing to adopted galvanometer, its outstanding advantage is that the laser scanning acceleration and deceleration greatly improve, and simple in structure, cost reduces, and laser-processing system is simple in structure.
2. this flying focus of the present invention system compares with adopting dynamic focusing large format scanning system, in some less demanding fields of focusing change in location response speed, can reduce equipment cost greatly, and structure is also simple, is easy to maintaining.Certainly,, for example adopt linear electric motors, also can improve the focal position greatly and change response speed if increase the driving mechanism cost that focus lamp moves.
3. this flying focus of the present invention system, positional precision for whole system of processing focus is easy to control, on the contrary, the incident eyeglass of mobile beam expander changes laser beam divergence and then changes this method in focal position, and is all very high to the relative position requirement of moving movement component controls precision and optical axis and movement locus.
4. this method that proposes of the present invention is compared with " galvanometer+flat field mirror " scheme, and the present invention program has focusing optical and differs little because what adopt is static focus in fact, is easier to obtain the littler focal beam spot or the range of work of large format more.
5. this method of the present invention's proposition is suitable for big width laser scanning cutting and fields such as three-dimensional laser mark, engraving.
6. this method that proposes of the present invention is suitable for the laser-processing system of various wavelength.
Description of drawings
To the present invention, a kind of some embodiment of laser flying focus scanning system can further understand purpose of the present invention, specific structural features and advantage in conjunction with the description of its accompanying drawing by following.Wherein, accompanying drawing is:
Fig. 1 laser focusing is through the vibration mirror scanning sectional view
Fig. 2 invention technical scheme figure
Fig. 3 embodiment two figure
The specific embodiment
Embodiment one three-dimensional laser engraving sees also Fig. 2,6 is 50 watts of acousto-optic Q modulation single-mode solid lasers, beam quality factor is less than 1.2, behind the laser beam expander 8 through ten times of multiplying powers of Senior Two, become the collimated light beam of 20 millimeters of beam diameters, 9 and 10 is respectively the diverse location of focus lamp, and focus lamp adopts three assembled static focus lamps of 1000 millimeters of focal lengths, amasthenic lens is fixed on above the moving guide rail, and amasthenic lens can advance or retreats along beam axis.This laser instrument and outer light path configuration carry out three-dimensional engraving, 90 microns of focal beam spot diameters, 9 millimeters of depths of focus to pottery.When starting working, amasthenic lens goes out in 9 positions, laser begins cutting material upper strata 13,, focused on and staticly 9 to move to position 10 by behind the laser ablation on material upper strata 13, it is reported processing subsurface material 14 from the position, mobile so step by step focus lamp, carry out laser engraving from level to level, realize the three-dimensional laser engraving, finish three-dimensional process.
The clear limit of embodiment two thin-film solar cell panel laser machine sees also Fig. 2,6 is 200 watts of acousto-optic Q modulation single-mode solid lasers, beam quality factor is less than 1.2, behind the laser beam expander 8 through ten times of multiplying powers of Senior Two, become the collimated light beam of 20 millimeters of beam diameters, 9 and 10 is respectively the diverse location of focus lamp, and focus lamp adopts three assembled static focus lamps of 2800 millimeters of focal lengths, amasthenic lens is fixed on above the moving guide rail, and amasthenic lens can advance or retreats along beam axis.This laser instrument and outer light path configuration, 250 microns of focal beam spot diameters, 75 millimeters of depths of focus.When starting working, ask for an interview Fig. 3, the 1st, galvanometer output eyeglass, 21,22,23,24 is respectively the several position of convergent laser, the 27th, the amorphous silicon membrane of glass surface, 4,25 is respectively focus lamp when being in the diverse location transfixion, the track of laser spot in eyeglass 1 scanning process.Because the laser focusing block has the 75mm depth of focus, therefore the scope interscan of laser beam between 22,23 time, the part that the amorphous silicon membrane 27 of glass surface is between the light beam 22,23 can be fallen by laser vaporization, finishes the clear limit of the laser process of this a part of area.Then, laser will be between 21 and 22 and the processing of vaporizing of the amorphous silicon membrane between 23 and 24, this moment, amasthenic lens was towards the galvanometer certain distance that advances, make laser spot be in the surface of amorphous silicon membrane to be processed, this moment is static if focus lamp keeps, 1 deflection of galvanometer eyeglass is converged laser and is scanned 24 position from 21, if laser spot forms 25 camber lines shown in 3.Because laser spot is on the amorphous silicon membrane surface between 21 and 22 and between 23 and 24, this part amorphous silicon membrane will be vaporized, and finish the clear limit of the laser process of this part.
The foregoing description is several concrete application of the present invention.In fact its principle is used and is not limited to top described situation, for example can also be in fields such as the three-dimensional leather engraving of large format carbon dioxide laser, solid state laser three-dimensional marking and engravings.
In a word, the present invention proposes a kind of laser flying focus scanning system, and its important feature is to adopt static gathering The combination of burnt system and galvanometer system by both spacings of dynamic change, realizes laser spot three dimensions The purpose of position dynamic control, have that focus characteristics is good, simple in structure, fast response time, cost are low, should With characteristics such as scope are wide.
Claims (5)
1. a laser flying focus scanning system is primarily characterized in that, characteristics is to adopt the combination of static focus system and galvanometer system, by both spacings of dynamic change, realizes the dynamically purpose of control of laser spot three-dimensional space position.
2. according to claim 1, it is characterized in that the static focus system can be a simple lens, also can be the combination of lens.
3. according to claim 1, it is characterized in that the static focus system is fixing can move forward and backward along optical axis, to change the distance of static focus system and galvanometer system with above the motion.
4. as described in claim 2 or 3, it is characterized in that according to Laser Processing focus place spatial level or zone differently, the static focus system will be in the different position of optical axis, and in addition the deflection of galvanometer system makes laser spot be in the locus of requirement.
5. as described in the claim 4, the incident beam that it is characterized in that native system is a collimated light beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100609038A CN101497149A (en) | 2009-03-02 | 2009-03-02 | Laser flying focus scanning system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100609038A CN101497149A (en) | 2009-03-02 | 2009-03-02 | Laser flying focus scanning system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101497149A true CN101497149A (en) | 2009-08-05 |
Family
ID=40944539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2009100609038A Pending CN101497149A (en) | 2009-03-02 | 2009-03-02 | Laser flying focus scanning system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101497149A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101804515A (en) * | 2010-03-26 | 2010-08-18 | 苏州德龙激光有限公司 | Large-breadth precise laser scribing and dotting equipment |
| CN102097529A (en) * | 2010-11-05 | 2011-06-15 | 张立国 | Edge cleaning method of ultraviolet laser thin-film solar battery |
| CN103681966A (en) * | 2013-12-04 | 2014-03-26 | 中国科学院上海硅酸盐研究所 | Laser scribing method for Mo back electrodes of CIGS film solar modules |
| CN108453375A (en) * | 2018-05-25 | 2018-08-28 | 北京莱泽光电技术有限公司 | A kind of solar battery thin film clear side processing unit (plant) and processing method |
| CN110421253A (en) * | 2019-07-22 | 2019-11-08 | 廊坊西波尔钻石技术有限公司 | Laser scanning system and laser engraving system with it |
| CN111299835A (en) * | 2020-03-05 | 2020-06-19 | 中国汽车工业工程有限公司 | Laser flight welding online repair welding device and method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030213787A1 (en) * | 1999-05-28 | 2003-11-20 | Dunsky Corey M. | Beam shaping and projection imaging with solid state UV gaussian beam to form vias |
| CN1547055A (en) * | 2003-12-12 | 2004-11-17 | 华中科技大学 | Vibrating mirror type laser scanning system |
| CN2714340Y (en) * | 2004-07-04 | 2005-08-03 | 华中科技大学 | Laser internal engraving apparatus for transparent material |
| CN101351294A (en) * | 2006-07-19 | 2009-01-21 | 丰田自动车株式会社 | Laser processing system and laser processing method |
| CN101419336A (en) * | 2008-11-17 | 2009-04-29 | 华中科技大学 | Mirror-vibrating laser three-dimensional scanning system |
-
2009
- 2009-03-02 CN CNA2009100609038A patent/CN101497149A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030213787A1 (en) * | 1999-05-28 | 2003-11-20 | Dunsky Corey M. | Beam shaping and projection imaging with solid state UV gaussian beam to form vias |
| CN1547055A (en) * | 2003-12-12 | 2004-11-17 | 华中科技大学 | Vibrating mirror type laser scanning system |
| CN2714340Y (en) * | 2004-07-04 | 2005-08-03 | 华中科技大学 | Laser internal engraving apparatus for transparent material |
| CN101351294A (en) * | 2006-07-19 | 2009-01-21 | 丰田自动车株式会社 | Laser processing system and laser processing method |
| CN101419336A (en) * | 2008-11-17 | 2009-04-29 | 华中科技大学 | Mirror-vibrating laser three-dimensional scanning system |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101804515A (en) * | 2010-03-26 | 2010-08-18 | 苏州德龙激光有限公司 | Large-breadth precise laser scribing and dotting equipment |
| CN102097529A (en) * | 2010-11-05 | 2011-06-15 | 张立国 | Edge cleaning method of ultraviolet laser thin-film solar battery |
| CN103681966A (en) * | 2013-12-04 | 2014-03-26 | 中国科学院上海硅酸盐研究所 | Laser scribing method for Mo back electrodes of CIGS film solar modules |
| CN108453375A (en) * | 2018-05-25 | 2018-08-28 | 北京莱泽光电技术有限公司 | A kind of solar battery thin film clear side processing unit (plant) and processing method |
| CN110421253A (en) * | 2019-07-22 | 2019-11-08 | 廊坊西波尔钻石技术有限公司 | Laser scanning system and laser engraving system with it |
| CN111299835A (en) * | 2020-03-05 | 2020-06-19 | 中国汽车工业工程有限公司 | Laser flight welding online repair welding device and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105081586B (en) | A kind of laser processing and device | |
| CN105945422B (en) | A kind of ultrafast laser microfabrication system | |
| CN101419336B (en) | Mirror-vibrating laser three-dimensional scanning system | |
| CN201783759U (en) | Optical fiber laser or disc laser dynamic focusing scanning spot trajectory processing system | |
| CN103801838B (en) | The wide laser galvanometer scanning fast etching method of a kind of modified line | |
| CN101518855B (en) | Multifunctional laser processing device | |
| CN100441360C (en) | Laser perforating method and its perforating device | |
| CN102248307B (en) | Ultraviolet laser fine processing device and method with double optical heads for different limiting apertures | |
| CN101497149A (en) | Laser flying focus scanning system | |
| CN101913024A (en) | System and method for processing dynamic focusing scanning spot track of optical fiber laser or disk laser | |
| KR20060100773A (en) | A semiconductor wafer dicing and scribing system and appratus with a high speed laser beam focus positioning system to arbitrary 3d positions and laser beam diffraction system | |
| CN203437812U (en) | Three-dimensional galvanometer laser etching machine | |
| CN111548023B (en) | Method for finely processing glass surface by using red light nanosecond laser | |
| CN106475685A (en) | The device of a kind of raising material laser marking quality and efficiency and marking method | |
| CN103801826A (en) | Laser processing focusing device and focusing method and laser processing equipment | |
| CN101380696A (en) | Light-wall conduit laser micro cutting device and method | |
| CN210451368U (en) | Laser scanning system and laser engraving system with same | |
| CN201371316Y (en) | Multi-functional laser machining system | |
| CN106773025A (en) | Focusing lens and lens vibrating type laser scanning system | |
| CN209239280U (en) | A kind of Three-Dimensional Dynamic galvanometer system | |
| CN115255652B (en) | Multi-angle laser emission self-adaptive control method and device for laser engraving machine | |
| CN103394809A (en) | Automobile oil sprayer minuteness oil spraying hole femtosecond laser efficient and precise machining device and method | |
| CN114131208B (en) | Laser-induced plasma profiling device and method | |
| CN112355484B (en) | Surface periodic conical microstructure processing method based on Gaussian beam focusing direct writing | |
| CN104625437A (en) | Scanning mechanism for precision processing of laser drilling and cutting of special-shaped hole |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhang Liguo Document name: Notification of Patent Invention Entering into Substantive Examination Stage |
|
| ASS | Succession or assignment of patent right |
Owner name: CHANGZHOU INNOMACHINING CORPORATION Free format text: FORMER OWNER: ZHANG LIGUO Effective date: 20121212 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 430074 WUHAN, HUBEI PROVINCE TO: 213161 CHANGZHOU, JIANGSU PROVINCE |
|
| TA01 | Transfer of patent application right |
Effective date of registration: 20121212 Address after: Wujin District of Jiangsu city in Changzhou province 213161 Chang Wu Road No. 801 Changzhou Science City building room 1111-1126 South Hui research Applicant after: Inno Machining Co., Ltd. Address before: 430074 Hubei Province, Wuhan city Hongshan District Kuanshan Poly Garden Road 2-1-1103 Applicant before: Zhang Liguo |
|
| DD01 | Delivery of document by public notice |
Addressee: Zhang Liguo Document name: Notification of Passing Examination on Formalities |
|
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20090805 |