CN105195903B - A kind of micro- water knife processing unit (plant) of laser punched for turbo blade - Google Patents
A kind of micro- water knife processing unit (plant) of laser punched for turbo blade Download PDFInfo
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- CN105195903B CN105195903B CN201510686264.1A CN201510686264A CN105195903B CN 105195903 B CN105195903 B CN 105195903B CN 201510686264 A CN201510686264 A CN 201510686264A CN 105195903 B CN105195903 B CN 105195903B
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- laser
- micro
- water
- generating means
- water knife
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/001—Turbines
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention relates to a kind of micro- water knife processing unit (plant) of laser punched for turbo blade, the device includes：Laser system, light beam interface, beam shaping system, the micro- water knife generating means of laser, machine table and control system for processing；Described laser system is located at foremost, described light beam interface is located in the space optical path of described laser system outgoing laser beam, or be connected by optical fiber with laser output mouthful, described beam shaping system is located in the light path that described light beam interface is exported, the micro- water knife generating means of described laser is located in the light path that described beam shaping system is exported, and the optical axis of the two is conllinear in vertical direction, described machine table is located at the lower section of the described micro- water knife generating means of laser, described control system for processing respectively with described laser system, the micro- water knife generating means of described laser and described machine table are connected.
Description
Technical field
The present invention relates to turbo blade cheesing techniques field, more particularly to a kind of micro- water of laser punched for turbo blade
Knife processing unit (plant).
Background technology
Turbine is the critical component of aero-engine, it is necessary to bear great thermic load and mechanical load.And in order to be lifted
The thrust and thrust-weight ratio of engine also imply that turbo blade in cycle of engine, it is necessary to improve constantly the temperature of combustion chamber
In to bear very high temperature high-pressure gas impact.Therefore, Cooling Technique Based On Thermal Driving becomes guarantee turbine in hot environment
Lower reliably working, the feasible and efficient approach for extending part service life.Wherein, air film cooling technology is representative
One of important feature improvement, the characteristics of its is main is to devise substantial amounts of air film at positions such as turbo blade leading edge, blade type faces
Hole, to ensure that parts surface is covered by a thin layer of cold air.
The process technology of air film hole is one of key technology of turbo blade manufacture.At present, blade film cooling holes plus
Work is mainly using methods such as laser boring, electric spark-erosion perforation, the punchings of electro-hydraulic beam.Traditional laser boring efficiency high, but there is heat
The zone of influence, can produce some manufacturing deficiencies such as slag, micro-crack, fold, fusion zone and remelted layer；Electric spark-erosion perforation remelted layer phase
To relatively thin, but metal material can only be processed；And although electro-hydraulic beam is punched without remelted layer, crudy is good, less efficient.
Laser water knife is a kind of effective technological means for overcoming above-mentioned processing method shortcoming.It is imported into after Laser Focusing micro-
Water column center, the principle being totally reflected using light in micro- water column and Air Interface, guiding laser is advanced along water column, when water column and work
When part is contacted, laser is directed to workpiece surface and to inside workpiece by water column, and Reciprocity of Laser ＆ Materials, material is removed simultaneously
Taken away by current, while current cooling down workpiece, without heat affected area, does not produce slag.Therefore, laser water knife not only has tradition
The advantage of Laser Processing, the problems such as also effectively eliminating heat affected area, micro-crack, remelted layer and burr obtains higher processing
Quality.Further, since laser beam, which is bound in liquid flow, is not present focus so that the effective working distance of laser water knife is long,
Generally reach 1000 times of nozzle bore.Laser beam is tapered in focal point when conventional solid is laser machined, in work piece
The processing groove of upper formation is the big del in upper end, and integral cutting is stitched than larger.Laser beam is in liquid when laser water knife is processed
Among beam, no focus is always the cylinder of uniform diameter, and the cutting seam that processing is formed is narrow.But to meeting turbine
The high precision of blade punching and crudy requirement, used laser water knife must have less diameter and height collection
In energy, it is therefore desirable to be processed using the micro- water knife of laser.
The content of the invention
It is an object of the present invention to be used for turbo blade punching there is provided one kind for the precision and crudy that improve punching
The micro- water knife processing unit (plant) of laser.
The invention provides a kind of micro- water knife processing unit (plant) of laser punched for turbo blade.The device includes：Laser
System, light beam interface, beam shaping system, the micro- water knife generating means of laser, machine table and control system for processing；Described laser
System is located at foremost, and described light beam interface is located in the space optical path of described laser system outgoing laser beam, Huo Zhetong
Cross optical fiber to be connected with laser output mouthful, described beam shaping system is located in the light path that described light beam interface is exported,
The micro- water knife generating means of described laser is located in the light path that described beam shaping system is exported, and the optical axis of the two is vertical
Conllinear on direction, described machine table is located at the lower section of the described micro- water knife generating means of laser, described control system for processing
It is connected respectively with described laser system, the micro- water knife generating means of described laser and described machine table.
The running of the described laser system of described control system for processing control, described laser system output pulse laser
Beam, the light beam enters described light beam interface via free-space propagation, or fiber coupling, and optical propagation direction is changed into vertically
Downwards, described beam shaping system is then passed through；Laser beam by shaping is incident from above the micro- water knife of described laser
Generating means, and in the small current sprayed downwards are wherein coupled to by condenser lens, form water beam optical fiber；Water Shu Guang
The fine turbo blade on described workbench carries out perforation processing.The described micro- water of laser of described control system for processing adjustment
Knife generating means realizes that laser is coupled with the alignment of current, and controls the action of described machine table to position in process
Workpiece.
Described laser system includes：Solid pulse laser either solid continuous wave laser or optical fiber laser, with
And power supply, water cooling unit.
Described light beam interface is laser mirror or optical fiber interface.
If the optical system or optical fiber that described beam shaping system is made up of dry lens and optical element are accurate
Direct line system.
The micro- water knife generating means of described laser includes：Optical system and fine bourn generating means for laser coupled.
Described fine bourn generating means is the laser light incident window for having a glass above a container being connected with miniflow pump, the container
Mouthful, there is a micropore diameter water spout its underface, and the container is connected by the water inlet on the wall of side with miniflow pump.
Described machine table is the manipulator or five-axis robot system of high-precision six degree of freedom.
Described control system for processing includes：Main frame, control panel and external motion platform controller.
The output wavelength scope of described solid pulse laser or solid continuous wave laser or optical fiber laser is
515nm—1064nm。
The advantage of the invention is that：The present invention can realize that diameter reaches 20 μm -1000 μm of superfine water beam optical fiber, can
To get, diameter is smaller, deeper micropore, does not produce remelted layer, slag burr in process, adds in the punching of turbo blade
Higher machining accuracy, quality and efficiency can be obtained in work, and high yield rate, cost are relatively low.
Brief description of the drawings
Fig. 1 is the overall structure diagram of the micro- water knife processing unit (plant) of laser for being used for turbo blade punching of the present invention
Fig. 2 is the schematic diagram of the micro- water knife generating means of laser of the present invention
Fig. 3 is the sectional view of coupled lens and water container in the micro- water knife generating means of laser of the invention
1st, laser beam 2, coupled lens
3rd, water container 4, water inlet
5th, water spout 6, miniflow pump
7th, water filling port 8, water beam optical fiber
9th, glass window
Embodiment
In conjunction with accompanying drawing, the invention will be further described.
As shown in figure 1, the described micro- water knife processing unit (plant) of laser for being used for turbo blade punching includes：Laser system, light
Beam interface, beam shaping system, the micro- water knife generating means of laser, machine table and control system for processing；Described laser system position
In foremost, described light beam interface is located in the space optical path of described laser system outgoing laser beam, and described light beam is whole
Shape system is located in the light path that described light beam interface is exported, and it is whole that the micro- water knife generating means of described laser is located at described light beam
In the light path of shape system output, and the optical axis of the two is conllinear in vertical direction, and it is micro- that described machine table is located at described laser
The lower section of water knife generating means, described control system for processing is sent out with described laser system, the micro- water knife of described laser respectively
Generating apparatus and described machine table are connected.
As shown in figure 1, the running of the described laser system of described control system for processing control, described laser system is defeated
Go out laser beam, the light beam enters described light beam interface, optical propagation direction transformation via free-space propagation, or fiber coupling
Vertically downward, then to pass through described beam shaping system；Laser beam by shaping is incident from above described laser
Micro- water knife generating means.The micro- water knife generating means of described laser is made up of laser coupled system and fine bourn generating means,
As shown in Figure 2,3, deionized water or other working solutions its flow into miniflow pump 6 via water filling port 7, then by miniflow pump 6 by entering
The mouth of a river 4 is injected to the intracavitary of container 3, then ejection forms fine bourn downwards from water spout 5；Laser beam 1 by shaping is from device
Square vertical incidence, is focused on by coupled lens 2, and the described intracavitary of container 3, described machining control system are irradiated into from glass window 9
The micro- water knife generating means of laser described in adjustment of uniting realizes that laser is coupled with the alignment of current, makes laser beam 1 in described water spray
The centre focus of mouth 5 is that small hot spot is coupled in fine bourn completely, forms superfine water beam optical fiber 8, can be opposite to lower section
Turbo blade in machine table carries out playing capillary processing.Described control system for processing controls described processing in process
The action of platform is to position workpiece.
Described laser system includes：Solid pulse laser and its power supply, water cooling unit.Laser has higher light beam matter
Amount, the wavelength of described pulsed solid stale laser is 1064nm, and single pulse energy scope is 1 μ J to 100J, and pulse duration range is 1ps
To 1s, laser works repetition rate can be from 1Hz to 100MHz, can strobe pulse energy, pulsewidth and again according to actual needs
Frequently.
Described light beam interface is laser mirror or optical fiber interface, and it is vertical downward transportation that laser beam, which is turned to,.
If the optical system or optical fiber that described beam shaping system is made up of dry lens and optical element are accurate
Direct line system.Laser beam is incided in beam shaping system, through collimation, expand or shrink beam after outgoing from below.
The micro- water knife generating means of described laser includes：Laser coupled system and fine bourn generating means, such as Fig. 2 institutes
Show.Described laser coupled system is a Focused Optical system, and the incident pulse laser beam 1 in top is focused into diameter only has
Tens microns, aberrationless hot spot, the hot spot of focusing must be accurately located in the water spout 5 of lower section fine bourn generating means
At the heart.
Described fine bourn generating means includes：Miniflow pump 6 and water container 3, as shown in Figure 2.Described miniflow pump 6
It is connected by water inlet 4 with described container 3, and external water source is connected by water filling port 7.On the described roof of water container 3
There is a glass window 9, described water spout 5 is located at the bottom wall central immediately below described glass window 9, described water inlet
4 are located at the side wall of described water container 3.
Described water spout 5 is made up of the material good to laser reflectivity height, high temperature high voltage resistant, wearability, such as Buddha's warrior attendant
The metal such as stone or tungsten, and elongated, stable cylindrical current can be formed, its diameter range is 20 μm -1000 μm.
Described miniflow pump 6 is to the described container 3 constantly described working solution of injection and provides stable hydraulic pressure, maintains to hold
Constant flow in device 3, and it is about 5 × 10 to produce pressure at described water spout 56Pa—5×107Pa liquid jet.
Described machine table is the manipulator of high-precision six degree of freedom.The six degree of freedom manipulator have clamp, rotation,
Vacillate now to the left, now to the right, pedestal is turned round and the common six-freedom degree of two pitching.
Described control system for processing includes：Main frame, control panel and external motion platform controller.It carries multichannel I/O
Port and working shaft driving.Described main frame controls pair of laser, miniflow pump, laser and water beam by each control panel
Quasi- coupling, described external motion platform controller is then responsible for the manipulation of machine table.Described control system for processing is by calculating
Acceleration and deceleration of the setting per one-dimensional process velocity and start-up portion, most the multiaxial motion of complexity resolves into what can be performed at last
One-dimensional control instruction is used to drive machine table in the motion and the triggering of the micro- water knife of laser that each side translates up and rotates, and assists
The linkage between them and the control of laser energy are adjusted, accurate process operation is efficiently completed.
In other specific embodiments, described optical fiber interface is connected by optical fiber with laser output mouthful, described
Solid pulse laser can also be continuous wave laser, or optical fiber laser, its wavelength can also be 1053nm, 1047nm,
1030nm, 532nm, 527nm, 523.5nm or 515nm.Described machine table can also be five-axis robot system, five described axles
System of processing can make the movement on three directions of X, Y, Z axis, and along the rotation of wherein two axles, can be used for geometry more multiple
The fixation and processing of turbo blade more than miscellaneous, free form surface.
In other specific embodiments, present invention can also apply to the cutting of various high-precision requirements, cutting, scribing,
The micro Process such as engraving, in semiconductor, precision optical machinery and instrument, Medical Devices and equipment, electronics and microelectronics industry, Aero-Space
Industry etc. is all with a wide range of applications to being machined with high-accuracy, high-cleanness requirement field.
For example in the scribing process of semiconductor chip, using the micro- water knife processing of laser joint-cutting can be made small, smooth neat, material
Material loss is smaller, and yield rate is higher, while saving cost.The technique that slim wafer is and for example cut in microelectronic industry, makes
With the micro- water knife process velocity of laser it is fast, eliminate the influence of mechanical stress and heat, reduce processing micro-crack and burr, shorten processing
Cycle, and processing efficiency greatly improved.
The micro- machinable material of water knife system of processing of laser is extensive, silicon, metal, alloy, carbon fibre material, ceramics, graphite
Deng can also be surface-treated to material and surface structure etc..
It should be noted last that, the above embodiments are merely illustrative of the technical solutions of the present invention and it is unrestricted.Although ginseng
The present invention is described in detail according to embodiment, it will be understood by those within the art that, to the technical side of the present invention
Case is modified or equivalent substitution, and without departure from the spirit and scope of technical solution of the present invention, it all should cover in the present invention
Right among.
Claims (1)
1. a kind of micro- water knife processing unit (plant) of laser punched for turbo blade, it is characterised in that the device includes：Laser system
System, light beam interface, beam shaping system, the micro- water knife generating means of laser, machine table and control system for processing；Described laser system
System is located at foremost, and described light beam interface is located in the light path of described laser system outgoing laser beam, and described light beam is whole
Shape system is located in the light path that described light beam interface is exported, and it is whole that the micro- water knife generating means of described laser is located at described light beam
In the light path of shape system output, and the optical axis of the two is conllinear in vertical direction, and it is micro- that described machine table is located at described laser
The lower section of water knife generating means, described control system for processing is sent out with described laser system, the micro- water knife of described laser respectively
Generating apparatus and described machine table are connected, and the micro- water knife generating means of described laser includes：Optical system for laser coupled
System and fine bourn generating means；Described fine bourn generating means is that have above a container being connected with miniflow pump, the container
The laser light incident window of one glass, there is a micropore diameter water spout below, and the container passes through the water inlet on the wall of side and institute
The miniflow pump stated is connected；Described miniflow pump constantly injects water to described container and provides stable hydraulic pressure, remains described and holds
Constant flow in device, in described water spout（5）It is 5 × 10 that place, which produces pressure,6Pa—5×107Pa；The laser system is defeated
Go out pulse laser beam, and single pulse energy scope is 1 μ J to 100J, pulse duration range is 1ps to 1s；Laser beam is in the water spout
Centre focus is small hot spot and is coupled to completely in fine bourn；
Described water spout, and can by the good diamond of laser reflectivity height, high temperature high voltage resistant, wearability or tungsten are made
Elongated, stable cylindrical current are formed, its diameter range is 20 μm -1000 μm；
Described laser system includes：Solid pulse laser either solid continuous wave laser or optical fiber laser, Yi Ji electricity
Source, water cooling unit；
The output wave of described solid pulse laser either described solid continuous wave laser or described optical fiber laser
Long scope is 515nm-1064nm；
Described light beam interface is laser mirror or optical fiber interface；
If optical system or fiber optic collimator system that described beam shaping system is made up of dry lens and optical element；
Described machine table is the manipulator of high-precision six degree of freedom；
Described control system for processing includes：Main frame, control panel and external motion platform controller；Described main frame passes through each
Control panel controls laser, miniflow pump, laser to be coupled with the alignment of water beam, and described external motion platform controller is then responsible for
The manipulation of machine table.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510686264.1A CN105195903B (en) | 2015-10-21 | 2015-10-21 | A kind of micro- water knife processing unit (plant) of laser punched for turbo blade |
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| CN201510686264.1A CN105195903B (en) | 2015-10-21 | 2015-10-21 | A kind of micro- water knife processing unit (plant) of laser punched for turbo blade |
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| CN105195903A CN105195903A (en) | 2015-12-30 |
| CN105195903B true CN105195903B (en) | 2017-10-17 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI706614B (en) * | 2018-11-10 | 2020-10-01 | 鴻超環保能源股份有限公司 | Laser light source module |
| CN109866028B (en) * | 2019-04-19 | 2020-04-24 | 山东大学 | Jet-flow-constrained femtosecond laser ultra-precision machining system and method |
| CN112824004B (en) * | 2019-11-20 | 2022-11-22 | 中国科学院宁波材料技术与工程研究所 | Composite water-assisted laser processing system and processing method thereof |
| CN111331263B (en) * | 2020-03-28 | 2022-03-29 | 北京工业大学 | Device and method for accurately preparing turbine blade cooling hole by picosecond laser |
| CN111716022A (en) * | 2020-06-19 | 2020-09-29 | 西安交通大学 | Laser composite machining device and method for turbine blade air film hole with thermal barrier coating |
| CN114799903B (en) * | 2022-04-11 | 2024-07-30 | 国泰达鸣精密科技集团有限公司 | Processing method of microminiature part with open pore |
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| JP2000334590A (en) * | 1999-05-24 | 2000-12-05 | Amada Eng Center Co Ltd | Machining head for laser beam machine |
| JP3871240B2 (en) * | 2000-05-16 | 2007-01-24 | 澁谷工業株式会社 | Hybrid processing equipment |
| EP1657020A1 (en) * | 2004-11-10 | 2006-05-17 | Synova S.A. | Process and device for optimising the coherence of a fluidjet used for materialworking and fluid flow nozzle for such a device |
| JP5035653B2 (en) * | 2005-03-18 | 2012-09-26 | 澁谷工業株式会社 | Hybrid laser processing equipment |
| US8525074B2 (en) * | 2008-12-26 | 2013-09-03 | Denso Corporation | Machining method and machining system for micromachining a part in a machine component |
| CN103212845A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | Coaxial water jet device used for laser micro machining of thin-walled tube |
| JP6063636B2 (en) * | 2012-04-10 | 2017-01-18 | 株式会社東芝 | Laser processing apparatus, laser processing system, and laser processing method |
| JP5970360B2 (en) * | 2012-12-07 | 2016-08-17 | 株式会社東芝 | Laser processing apparatus, laser processing system, and laser processing method |
| JP6101139B2 (en) * | 2013-04-12 | 2017-03-22 | 株式会社東芝 | Laser processing method and laser processing apparatus |
| CN103358028A (en) * | 2013-07-16 | 2013-10-23 | 桂林电子科技大学 | Method and system for scribing brittle ultrathin piece by water jet and laser |
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