CN104162741B - Laser processing device and method thereof - Google Patents
Laser processing device and method thereof Download PDFInfo
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- CN104162741B CN104162741B CN201410374711.5A CN201410374711A CN104162741B CN 104162741 B CN104162741 B CN 104162741B CN 201410374711 A CN201410374711 A CN 201410374711A CN 104162741 B CN104162741 B CN 104162741B
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 22
- 229910052742 iron Inorganic materials 0.000 description 11
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- 230000009471 action Effects 0.000 description 3
- 238000004080 punching Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
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- Laser Beam Processing (AREA)
Abstract
The present invention provides a kind of laser processing device and method thereof, and this laser processing device comprises laser apparatus, set of lenses, road power and influence mirror, plane mirror, condensing lens and the processing work arranged successively along optical axis direction; Described set of lenses is made up of two lens, and the distance between two lens is adjustable, in order to adjust spot size and the angle of divergence of laser apparatus outgoing beam; Described road power and influence mirror is arranged in rotating machine, rotates centered by optical axis, also will along with rotation from the light beam of described road power and influence mirror outgoing; Described plane mirror is for deflecting the transmission direction of light beam; The position of described condensing lens on beam Propagation direction is adjustable, and light beam is by focusing on the surface of described processing work after described condensing lens; Described processing work is placed on electricity driving displacement platform, and it can make two-dimensional motion in the plane vertical with the transmission direction of light beam.
Description
Technical field
The invention belongs to technical field of laser processing, it relates to a kind of laser processing device and method thereof, be specially adapted to the Laser Micro-Machining of high rigidity, brittle materials.
Background technology
Laser processing technology has that precision height, highly versatile, efficiency height, cost be low and the advantage such as overall economics remarkable benefit, has become one of the gordian technique in modern manufacturing field, has solved the difficult problem that some tradition mechanical workouts can not solve. Laser processing efficiency height, without tool loss, can process on the material of the difficult processing such as hard, crisp, soft, be the processing means of the advanced person of micro-processing technology.
Micro Process is a big branch of field of laser processing, along with the progress of science and technology and the raising of production state of the art, the miniaturization of product and accuracy are required more and more higher by people, under the prerequisite meeting processing quality, micro-machined minimum size is more little, product output capacity is more high, and the economic benefit obtained is more big. In general laser drilling, focal beam spot diameter is more little, and the diameter in hole is more little; Burnt dark more long, the tapering in hole is more little; The action time of laser and workpiece is more long, and melts is more many, and heat affected zone is more big. The Gaussian characteristics of Stimulated Light light beam determines, its focal beam spot is more little, and burnt dark more short, the diameter of causing hole is more little, and the tapering in hole does not more control well, seriously have impact on the quality in hole and shape. In current technology, there is publication to show to utilize rotary-cut punching technology can obtain better hole shape, more smooth hole wall, cleaner workpiece surface before.
Compared with rotary-cut punching technology beats micropore with percussion drilling technology, it is possible to obtain better hole shape, but the tapering of general rotary-cut punching technology is difficult to control, and the melts on limit, hole is difficult to eliminate.
Summary of the invention
The parameters such as the roughness of processing cross section that is difficult to control in Laser Micro-Machining to solve, angle of inclination, trim process size, the laser processing device that the present invention proposes and method thereof, can the diameter of control punch and tapering, the rotating speed of rotary-cut can be doubled, not only increase working efficiency, also the corresponding action time decreased between laser and workpiece, it is possible to effectively ensure machined surface smooth, smooth, without melts.
The object of the present invention is achieved through the following technical solutions:
A kind of laser processing device, it comprises laser apparatus, set of lenses, road power and influence mirror, plane mirror, condensing lens and the processing work arranged successively along optical axis direction; Described set of lenses is made up of two lens, and the distance between two lens is adjustable, in order to adjust spot size and the angle of divergence of laser apparatus outgoing beam; Described road power and influence mirror is arranged in rotating machine, rotates centered by optical axis, also will along with rotation from the light beam of described road power and influence mirror outgoing; Described plane mirror is for deflecting the transmission direction of light beam; The position of described condensing lens on beam Propagation direction is adjustable, and light beam is by focusing on the surface of described processing work after described condensing lens; Described processing work is placed on electricity driving displacement platform, and it can make two-dimensional motion in the plane vertical with the transmission direction of light beam.
In above-mentioned laser processing device, described road power and influence mirror is substituted by one pair of wedge-shaped mirrors, the angle of wedge of two wedge-shaped mirrors and size are all equal, centrosymmetry is placed and relative position is fixed, and be placed on together in rotating machine, rotate centered by optical axis, also will along with rotation from the light beam of these two wedge-shaped mirrors outgoing.
In above-mentioned laser processing device, also comprise and it is arranged in described road power and influence mirror or described to the two-piece type vibration mirror scanning head between wedge-shaped mirrors and described plane mirror.
In above-mentioned laser processing device, described plane mirror is arranged on angle deflection platform in order to adjust the drift angle of described plane mirror, described plane mirror is also connected with a rotating machine, can rotating centered by optical axis, described plane mirror and described road power and influence mirror or described are to wedge-shaped mirrors synchronous rotary.
A kind of laser processing device, it comprise arrange successively along optical axis direction laser apparatus, set of lenses, is to wedge-shaped mirrors, plane mirror, condensing lens and processing work; Described set of lenses is made up of two lens, and the distance between two lens is adjustable, in order to adjust spot size and the angle of divergence of laser apparatus outgoing beam; Described one to the angle of wedge of in wedge-shaped mirrors two wedge-shaped mirrors and size is all equal and centrosymmetry is placed, and each wedge-shaped mirrors is placed in a rotating machine respectively, rotates centered by optical axis, and two rotating machines first rotate angle then synchronous rotaries relatively; Described plane mirror is for deflecting the transmission direction of light beam; The position of described condensing lens on beam Propagation direction is adjustable, and light beam is by focusing on the surface of described processing work after described condensing lens; Described processing work is placed on electricity driving displacement platform, and it can make two-dimensional motion in the plane vertical with the transmission direction of light beam.
In above-mentioned laser processing device, described plane mirror is arranged on angle deflection platform in order to adjust the drift angle of described plane mirror, described plane mirror is also connected with a rotating machine, can rotating centered by optical axis, synchronous rotary also followed by described plane mirror when described two wedge-shaped mirrors synchronous rotaries.
A kind of laser processing device, it comprise arrange successively along optical axis direction laser apparatus, set of lenses, plane mirror, is to wedge-shaped mirrors, condensing lens and processing work; Described set of lenses is made up of two lens, and the distance between two lens is adjustable, in order to adjust spot size and the angle of divergence of laser apparatus outgoing beam; Described plane mirror is for deflecting the transmission direction of light beam, and described plane mirror is arranged on angle deflection platform in order to adjust the drift angle of described plane mirror; Described one is all equal to the angle of wedge and the size of in wedge-shaped mirrors two wedge-shaped mirrors, and centrosymmetry is placed and relative position is fixed; Described plane mirror is placed in rotating machine with described one together with wedge-shaped mirrors, rotates centered by optical axis, also will along with rotation to the light beam of wedge-shaped mirrors outgoing from described one; The position of described condensing lens on beam Propagation direction is adjustable, and light beam is by focusing on the surface of described processing work after described condensing lens; Described processing work is placed on electricity driving displacement platform, and it can make two-dimensional motion in the plane vertical with the transmission direction of light beam.
In above-mentioned laser processing device, also comprising the road power and influence mirror being arranged between described set of lenses and described plane mirror, described road power and influence mirror is arranged in rotating machine, rotates centered by optical axis, also will along with rotation from the light beam of described road power and influence mirror outgoing.
In above-mentioned laser processing device, described plane mirror can move in light beam incident direction.
In above-mentioned laser processing device, also comprising the parallel flat being arranged between described plane mirror and described condensing lens, described parallel flat can deflect.
A kind of laser processing device, it comprise arrange successively along optical axis direction laser apparatus, set of lenses, road power and influence mirror, plane mirror, first to wedge-shaped mirrors, the 2nd to wedge-shaped mirrors, condensing lens and processing work; Described set of lenses is made up of two lens, and the distance between two lens is adjustable, in order to adjust spot size and the angle of divergence of laser apparatus outgoing beam; Described road power and influence mirror is arranged in rotating machine, rotates centered by optical axis, also will along with rotation from the light beam of described road power and influence mirror outgoing; Described plane mirror is for deflecting the transmission direction of light beam; Described first to, in wedge-shaped mirrors, the angle of wedge of two wedge-shaped mirrors and size are all equal, centrosymmetry place, between relative distance adjustable; Described 2nd to, in wedge-shaped mirrors, the angle of wedge of two wedge-shaped mirrors and size are all equal, centrosymmetry place, between relative angle adjustable; Wedge-shaped mirrors is placed in same rotating mechanism synchronous rotary centered by optical axis by wedge-shaped mirrors and the described 2nd by described first; The position of described condensing lens on beam Propagation direction is adjustable, and light beam is by focusing on the surface of described processing work after described condensing lens.
In above-mentioned laser processing device, described processing work is placed on electricity driving displacement platform, and it can make two-dimensional motion in the plane vertical with the transmission direction of light beam.
In above-mentioned laser processing device, also comprise the Gauss beam reshaping element being arranged between described laser apparatus and described processing work, the outgoing beam of described laser apparatus is being Gaussian distribution with the energy density distribution on the vertical cross section in transmission direction, is the uniform flat-top distribution of energy density from the energy density distribution of the light beam of described Gauss beam reshaping element outgoing on the cross section vertical with transmission direction.
In above-mentioned laser processing device, also comprise the electronic shutter being arranged between described laser apparatus and described set of lenses, utilize its time delay for by the initial unstable partial occlusion of laser.
A kind of laser processing, comprising: the outgoing beam of laser apparatus incides the road power and influence mirror or rotated centered by optical axis to wedge-shaped mirrors after the adjustment of spot size and the angle of divergence, from described road power and influence mirror or one, the light beam of wedge-shaped mirrors outgoing is also rotated centered by optical axis, then the transmission direction of light beam is deflected by plane mirror, light beam is again by focusing on the surface of processing work after condensing lens, described processing work makes two-dimensional motion in the plane vertical with the transmission direction of light beam, described one is all equal to the angle of wedge and the size of in wedge-shaped mirrors two wedge-shaped mirrors, centrosymmetry is placed and relative position is fixed.
In above-mentioned laser processing, described plane mirror be arranged on angle deflection platform in order to adjust the drift angle of described plane mirror, described plane mirror also with described road power and influence mirror or described to wedge-shaped mirrors synchronous rotary.
In above-mentioned laser processing, at described road power and influence mirror or described to arranging two-piece type vibration mirror scanning head between wedge-shaped mirrors and described plane mirror.
A kind of laser processing, comprising: the outgoing beam of laser apparatus incides rotate centered by optical axis one to wedge-shaped mirrors after the adjustment of spot size and the angle of divergence, described one to the angle of wedge of in wedge-shaped mirrors two wedge-shaped mirrors and size is all equal and centrosymmetry is placed, two wedge-shaped mirrors first rotate an angle then synchronous rotary relatively, then the transmission direction of light beam is deflected by plane mirror, light beam is again by focusing on the surface of processing work after condensing lens, described processing work makes two-dimensional motion in the plane vertical with the transmission direction of light beam.
In above-mentioned laser processing, described plane mirror is arranged in order to adjust the drift angle of described plane mirror on angle deflection platform, and synchronous rotary also followed by described plane mirror when described two wedge-shaped mirrors synchronous rotaries.
A kind of laser processing, comprising: the outgoing beam of laser apparatus incides plane mirror after the adjustment of spot size and the angle of divergence, described plane mirror is arranged on angle deflection platform in order to adjust the drift angle of described plane mirror, light beam is by inciding one pair of wedge-shaped mirrors behind plane mirror deflection transmission direction, described one is all equal to the angle of wedge and the size of in wedge-shaped mirrors two wedge-shaped mirrors, centrosymmetry is placed and relative position is fixed, described plane mirror rotates together with wedge-shaped mirrors with described one centered by optical axis, from described one, the light beam of wedge-shaped mirrors outgoing is also rotated centered by optical axis, then light beam is again by focusing on the surface of processing work after condensing lens, described processing work makes two-dimensional motion in the plane vertical with the transmission direction of light beam.
In above-mentioned laser processing, the outgoing beam of laser apparatus first incides the road power and influence mirror rotated centered by optical axis after the adjustment of spot size and the angle of divergence, then incide described plane mirror, also rotate centered by optical axis from the light beam of described road power and influence mirror outgoing.
In above-mentioned laser processing, described plane mirror can move in light beam incident direction.
In above-mentioned laser processing, between described plane mirror and described condensing lens, arrange deflectable parallel flat.
A kind of laser processing, comprising: the outgoing beam of laser apparatus incides the road power and influence mirror rotated centered by optical axis after the adjustment of spot size and the angle of divergence, also rotate centered by optical axis from the light beam of described road power and influence mirror outgoing, then the transmission direction of light beam is deflected by plane mirror, light beam incide successively synchronous rotary centered by optical axis first to wedge-shaped mirrors and the 2nd to wedge-shaped mirrors, light beam is again by focusing on the surface of processing work after condensing lens, described first in wedge-shaped mirrors, the angle of wedge of two wedge-shaped mirrors and size are all equal, centrosymmetry is placed, between relative distance adjustable, described 2nd to, in wedge-shaped mirrors, the angle of wedge of two wedge-shaped mirrors and size are all equal, centrosymmetry place, between relative angle adjustable.
In above-mentioned laser processing, described processing work makes two-dimensional motion in the plane vertical with the transmission direction of light beam.
In above-mentioned laser processing, Gauss beam reshaping element is arranged between described laser apparatus and described processing work, the outgoing beam of described laser apparatus is being Gaussian distribution with the energy density distribution on the vertical cross section in transmission direction, is the uniform flat-top distribution of energy density from the energy density distribution of the light beam of described Gauss beam reshaping element outgoing on the cross section vertical with transmission direction.
In above-mentioned laser processing, by the initial unstable partial occlusion of laser apparatus outgoing beam.
The laser processing device of the present invention, it is possible to integrate 2 dimension translational movement and rotary motions of light beam, it is achieved dynamic laser is processed, shorten laser to the continuous time of workpiece effect, reduce heat affected zone, increase the smoothness of machined surface, can increase work efficiency simultaneously. The advantage that laser spot is rotated is to make processing cross section smooth, reduces splashing and the fused deposition on surface. But owing to laser focusing spot diameter is general all at about 20um, the Area comparison of processing is little, when the position that laser light beam incides on condensing lens can be adjusted, the i.e. finish size of adjustable laser, it is possible to by translated plane speculum or by adjustment wedge between phase mutual edge distance adjust the position that laser light beam incides on condensing lens.
Under some practical situations, it is desired to processing cross section has certain gradient, to punch, has requirement straight hole, also has the product of requirement taper hole or reverse taper holes. It is thus desirable to a kind of method that can control tapering. By Oscillating flat mirror or by wedge, or by the vibration mirror scanning head of maturation to adjusting the incident angle of laser light beam relative to condensing lens. Namely the size of processing cross section can be adjusted.
The present invention is on the basis of laser spinning, and adjustment laser light beam incides the position on condensing lens and angle, controls the size of laser processing, tapering, surface smoothing degree etc., it is possible to meet the demand of great majority application on market.
The laser processing device uniqueness of the present invention is in the control to light path, and one is by adjusting the first lens and the relative distance of the 2nd lens, it is possible to the diameter of adjustment focal beam spot, implements the live width on adjustment work pieces process face; Two is by spinning unit, makes light beam rotation, and the drill bit with electric drill is the same, avoids the energy distribution difference of monopulse or successive pulse and causes machined surface uneven, sticks the problem of slag, and process velocity can improve at least one times; Three is control aperture by light beam deflection unit, is fixed on high-precision rotary motor by light beam deflection unit, it is achieved processing action; Four is the control that can be realized the gradient to processing cross section by gradient control unit, processing cross-section smooth, it does not have melts.
Accompanying drawing explanation
Fig. 1 is the structure iron of the first laser processing device of the present invention;
Fig. 2 is the schematic diagram of the light beam that the present invention is formed at workpiece surface;
Fig. 3 is the structure iron of the present invention's the 2nd kind of laser processing device;
Fig. 4 is the structure iron of the third laser processing device of the present invention;
Fig. 5 is that in Fig. 4, two rotating machines have light beam when relatively rotating to form schematic diagram;
Fig. 6 is the structure iron of the present invention's the 4th kind of laser processing device;
Fig. 7 is the structure iron of the present invention's the 5th kind of laser processing device;
Fig. 8 is the structure iron of the present invention's the 6th kind of laser processing device;
Fig. 9 is the structure iron of the present invention's the 7th kind of laser processing device;
Figure 10 is the structure iron of the present invention's the 8th kind of laser processing device;
Figure 11 is the focusing effect schematic diagram that Figure 10 midplane speculum produces when X-direction moves;
Figure 12 is the structure iron of the present invention's the 9th kind of laser processing device;
Figure 13 is the structure iron of the present invention's the tenth kind of laser processing device;
Figure 14 is the screw processing track that the present invention's the tenth kind of laser processing device realizes;
Figure 15 is that the twill that the present invention's the tenth kind of laser processing device realizes fills machining locus;
Figure 16 is that the grid that the present invention's the tenth kind of laser processing device realizes fills machining locus;
Figure 17 is the energy density distribution figure of laser apparatus outgoing beam of the present invention;
Figure 18 is the energy density distribution figure after Gauss beam reshaping of the present invention;
Figure 19 is the structure iron of the present invention's the 11 kind of laser processing device.
Figure 20 is the schematic diagram of laser processing tapering.
In figure, the implication of each mark is as follows:
1: laser apparatus;
2: electronic shutter;
31: the first lens;
32: the two lens;
4: road power and influence mirror;
5: plane mirror;
51: plane mirror;
52: plane mirror;
53: plane mirror;
54: prism square;
6: condensing lens;
7: processing work;
8: parallel flat;
9: wedge-shaped mirrors;
91: wedge-shaped mirrors 1;
92: wedge-shaped mirrors 2;
93: wedge-shaped mirrors 3;
94: wedge-shaped mirrors 4;
10: Gauss beam reshaping element
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in detail:
Fig. 1 shows the schematic diagram of the laser processing device described in the present invention an enforcement mode. Laser processing device is composed as follows: laser apparatus 1, has the continuous of high-energy or pulse laser for launching; Electronic shutter 2, utilizes its time delay by the initial unstable partial occlusion of pulse laser, avoids the irregular of machined surface; The set of lenses being arranged on electricity driving displacement platform, is made up of lens 31 and lens 32, and the distance between lens 31 and lens 32 is relatively adjustable, reduces the angle of divergence launching laser light beam, expands spot diameter; Road power and influence mirror 4, is arranged in tubular shaft rotating machine, it is possible to high speed rotating, and when blocking the way power and influence mirror rotates with speed omega, outgoing beam is with the speed spinning of 2 ��; Plane mirror 5, by from the photoconduction of road power and influence mirror 4 outgoing to being normally incident on condensing lens 6; Light beam is by, after condensing lens 6, focusing on the surface of processing work 7. Condensing lens 6 can move in the direction of propagation of light, adjusts the relative position between laser spot and workpiece surface in real time.
Having 3 groups of running gears in Fig. 1, set of lenses is arranged on line slideway, and the position between lens 31 and lens 32 is relatively adjustable, by the relative position between adjustment lens 31 and lens 32, adjusts the final size focusing on some spot diameter. Road power and influence mirror 4 is arranged on high-speed rotary motor, and owing to light beam has a total reflection in power and influence mirror inside, road, when driven by motor road power and influence mirror rotates, outgoing beam rotates thereupon, and turning axle is optical axis. Condensing lens 6 is arranged on high precision line slideway, drives by motor, it is possible to adjust the position of condensing lens 6 in the direction of propagation of light, can be positioned at surface to be machined by real-time ensuring focusing point.
When workpiece in Fig. 1 is positioned over X-Y mobile platform, when X-Y mobile platform drives workpiece motion s, the light beam then focusing on workpiece surface is combined by two portions motion, a profile driven for mobile platform, and one is the high speed rotary motion focusing on light beam centered by optical axis. For circular track, its motion track is as shown in Figure 2. Beam trajectory A is the motion of mobile platform, and beam trajectory B is the rotary motion focusing on light beam. Due to the combination of two kinds of motions, it is ensured that process the level and smooth of cross section, avoid burr.
Wedge-shaped mirrors can also be replaced by the road power and influence mirror in Fig. 1 with one, as shown in Figure 3. The size of wedge-shaped mirrors 91 and the 92 and angle of wedge is equal and centrosymmetry is placed. Wedge-shaped mirrors 91 is fixed on high-speed rotary motor together with 92. When driven by motor wedge-shaped mirrors 91 and 92 rotates, outgoing beam rotates centered by optical axis, reaches and the identical function of road power and influence mirror 4.
Fig. 4 represents the third laser processing device of the present invention, and this kind of laser processing device is particularly useful for boring. Wedge-shaped mirrors 91 and wedge-shaped mirrors 92, on the basis of Fig. 3, are contained on 2 rotating machines C, D by this processing unit (plant) respectively. When rotating machine C does the rotation of a Small angle relative to D, there is a little drift angle from the emergent light of wedge-shaped mirrors 92 by relative to incident light, also will deviate optical axis center O by the focusing point after condensing lens 6, and focus on O1 point, as shown in Figure 5. Then, when motor C with D rotates with identical speed sync, focus on some O1 and just rotate centered by O. This kind of laser processing device is when ensureing processing cross-section smooth impulse-free robustness, and real-time change aperture, by rotating C and D, adjusts the relative angle between wedge-shaped mirrors 91 and 92, and then changes the distance focused between some O to O1, is aperture.
The object that relative drift angle between this kind of adjustment two wedge-shaped mirrors realizes adjusting aperture can also be realized by Oscillating flat mirror 5. As shown in Figure 6. Plane mirror 5 is arranged on High-precision angle deflection platform, when needs adjustment focuses on some position, namely realizes by adjusting the angle of plane mirror 5. The drift angle of plane mirror is adjusted, it is achieved focus on the change of the spacing of some O to O1 by motor E. Then plane mirror 5 is connected with high-speed rotary motor R again, and motor R drives plane mirror to rotate centered by optical axis, and its rotating speed is synchronous with motor C and D, it is achieved focus on the rotation that some O1 take O as the center of circle.
Can also optimize for the laser processing device shown in Fig. 6 and save a motor, as shown in Figure 7. Plane mirror 5 is arranged on High-precision angle deflection platform, it is achieved motion E; By wedge-shaped mirrors 91 and wedge-shaped mirrors 92 centrosymmetry fixed placement, it is connected with high-speed rotary motor R together with can adjusting the plane mirror of drift angle. This kind of device can realize adjustment drift angle, and focal beam spot is rotating two kinds of motions.
Light beam spinning effect shown in associating Fig. 1, after adding road power and influence mirror, it is possible to realizes each processing point with light beam spinning, ensures the even of energy distribution, avoid the coarse of machined surface. Specifically as shown in Figure 8.
The deflection of the adjustment plane mirror 5 shown in Fig. 7 and Fig. 8 realizes motion, it is also possible to substitute with two-piece type vibration mirror scanning head, by the control of galvanometer motor can be edited out arbitrary graphic, as shown in Figure 9.
Due to the Gaussian characteristics of laser light beam, laser spot center energy is the highest, and the closer to outer, laser energy is more low; Again owing to laser is from loss during workpiece surface travel downward, what act on workpiece surface formation after causing laser beam focusing is that aperture, ingress is big, the conical surface that aperture, exit is little. Especially, when laser boring, hole shape is easy to become tapered hole. And the straight hole that industrial application needs hole wall smooth mostly at present, or reverse taper holes, in laser processing device, it is necessary to realize the control to tapering. It is thus desirable to the light-beam position on condensing lens is incided in adjustment, adjust tapering. Laser processing device shown in Fig. 8 adds a maintenance and operation again move, as shown in Figure 10, namely can realize the position that adjustable laser light beam incides on condensing lens.
Y motion in Figure 10 drives plane mirror 5 when X-direction moves, and the different focusing effect of generation is as shown in figure 11.
The motion Y that drive plane mirror 5 in Figure 10 moves in X-direction can also substitute with the parallel flat 8 that can deflect, and avoids the setting accuracy brought because of the multi-dimensional movement of plane mirror 5 to require high, expensive. Specifically as shown in figure 12.
Can also be optimized for as shown in figure 13 for the laser processing device shown in Figure 12. The laser light beam that laser apparatus 1 sends is by after optical gate 2, enter hot spot adjustment set of lenses 31 and 32, the angle of divergence of adjustment laser light beam and spot size, the road power and influence mirror 4 of rotation makes laser light beam rotate thereupon, and plane mirror 5 makes laser light beam enter another rotating mechanism W. Rotating mechanism W comprises wedge 91,92,93 and 94. 4 pieces of wedge synchronous rotaries in rotating mechanism. By the relative distance adjusted between 91 and 92, it is possible to adjustment laser light incident is to the relative position of condensing lens. By the relative angle adjusted between 93 and 94, it is possible to adjustment laser light incident is to the relative angle of condensing lens. The condensing lens 6 that can move in the direction of propagation of light adjusts the relative position between focal beam spot and workpiece surface 7. By spinning mechanism, adjustment laser light incident is to the relative position mechanism on condensing lens, and adjustment laser light incident is to the relative angle mechanism on condensing lens, and the control of this three aspect can realize the track of arbitrary shape. Back and forth processed by multistep at process zone, it is ensured that finished surface, the quality of processing cross section and appearance requirement. Especially to punch, it is possible to there is helical trajectory as shown in figure 14, the twill shown in Figure 15 fills track, and the grid shown in Figure 16 fills track.
It is well known that the energy density distribution of the light beam of laser apparatus outgoing on the cross section vertical with propagation direction is Gaussian distribution, as shown in figure 17. From the position away from spot center, energy reduces. Like this when carrying out laser processing, when laser energy is not enough, can make the edge of a knife of laser processing that melts occurs, cross section poor quality. Therefore Gauss beam reshaping element is added wherein, the energy density distribution making light beam is flat-top, as shown in figure 18, O is the center of circle of laser facula, spot radius is OR1=OR2, and laser energy is evenly distributed on whole laser facula, laser facula noenergy gradient difference, processing knife-edge part is without melts and re cast layer, and sidewall is smooth. Above-mentioned Gauss beam reshaping can be realized by microlens array or diffraction optical element.
As shown in figure 19, add one piece of Gauss beam reshaping element after plane mirror 5 in fig. 13, then energy density distribution in the plane vertical with propagation direction of light beam after outgoing is flat-top. The flat top beam being rotating enters two pairs of wedges, adjusts translational movement and the angle of light according to process requirements so that the processing edge of a knife is smooth, smooth, without the breach that ginseng time is not neat.
All regulating mechanisms of this kind of laser processing device all achieve automatically controlled, especially can meet variation and the handiness of product. Advantage is, can not only double rotating speed, it is to increase working efficiency, reduces the action time between laser and workpiece, eliminates heat affected zone, and can the diameter in hole and tapering be controlled. This kind of laser processing device can not only be competent at the processing of micropore, also can complete special-shaped cutting.
Take wavelength as the laser apparatus of 1064nm it is example, the focal length of the condensing lens used is 50mm, spot diameter before inciding condensing lens is that 10mm is (only for circular light spot in the present embodiment, but its shape is not limited to circle, can also be square or other shapes, normal beam incides Gauss beam reshaping element 5, the circular light spot of Gaussian characteristics is converted to the uniform flat-top hot spot of energy density, the shape of hot spot can be square, rectangle, the arbitrary shape such as linear or oval, select according to actual micro Process demand, these shapes are determined by the design of Gauss beam reshaping element). spot diameter after then focusing on is about 11.5um. and adopts the device shown in Figure 19, and it is the improvement of tapering that the processing result of gained the most significantly improves. as shown in figure 20, the schematic diagram of tapering, the calculation formula of tapering is:
Tapering=(Din-Dout)/thickness
When thickness of workpiece is identical, hand-hole aperture Din and the difference of aperture Dout of portalling are more little, and tapering is more little. the device shown in conventional apparatus and Figure 19, and when being contrast experiment on the ceramic substrate that 1mm is thick, its tapering size is as shown in the table:
| Din | Dout | Difference | |
| Conventional apparatus | 50um | 20um | 30um |
| This device | 50um | 49.5um | 0.5um |
Certainly require that tapering is negative value in other instances. Such as nozzle burner, it is desired to Din is less than Dout, test proves in the device of the application, it is possible to realize arbitrary taper value completely.
The present invention does not do any restriction in form, and every simple modification carried out according to the technical spirit of the present invention, equivalent variations and modification, all still belong in the scope of technical solution of the present invention.
Claims (4)
1. a laser processing device, it comprise arrange successively along optical axis direction laser apparatus, set of lenses, road power and influence mirror, plane mirror, first to wedge-shaped mirrors, the 2nd to wedge-shaped mirrors, condensing lens and processing work, described set of lenses is made up of two lens, and the distance between two lens is adjustable, in order to adjust spot size and the angle of divergence of laser apparatus outgoing beam, described road power and influence mirror is arranged in rotating machine, rotates centered by optical axis, also will along with rotation from the light beam of described road power and influence mirror outgoing, described plane mirror is for deflecting the transmission direction of light beam, described first to, in wedge-shaped mirrors, the angle of wedge of two wedge-shaped mirrors and size are all equal, centrosymmetry place, between relative distance adjustable, in order to adjust the relative position of laser light incident to condensing lens, described 2nd to, in wedge-shaped mirrors, the angle of wedge of two wedge-shaped mirrors and size are all equal, centrosymmetry place, between relative angle adjustable, in order to adjust the relative angle of laser light incident to condensing lens, wedge-shaped mirrors is placed in same rotating mechanism synchronous rotary centered by optical axis by wedge-shaped mirrors and the described 2nd by described first, the position of described condensing lens on beam Propagation direction is adjustable, light beam is by focusing on the surface of described processing work after described condensing lens, it is characterized in that: also comprise the Gauss beam reshaping element being arranged between described laser apparatus and described processing work, the energy density distribution of the outgoing beam of described laser apparatus on the cross section vertical with transmission direction is Gaussian distribution, with the energy density distribution the vertical cross section in transmission direction it is being the uniform flat-top distribution of energy density from the light beam of described Gauss beam reshaping element outgoing, and the electronic shutter being arranged between described laser apparatus and described set of lenses, utilize its time delay for by the initial unstable partial occlusion of laser.
2. laser processing device as claimed in claim 1, it is characterised in that: described processing work is placed on electricity driving displacement platform, and it can make two-dimensional motion in the plane vertical with the transmission direction of light beam.
3. the laser processing for the laser processing device described in claim 1 or 2, comprising: the outgoing beam of laser apparatus incides the road power and influence mirror rotated centered by optical axis after the adjustment of spot size and the angle of divergence, also rotate centered by optical axis from the light beam of described road power and influence mirror outgoing, then the transmission direction of light beam is deflected by plane mirror, light beam incide successively synchronous rotary centered by optical axis first to wedge-shaped mirrors and the 2nd to wedge-shaped mirrors, light beam is again by focusing on the surface of processing work after condensing lens, described first in wedge-shaped mirrors, the angle of wedge of two wedge-shaped mirrors and size are all equal, centrosymmetry is placed, between relative distance adjustable, described 2nd in wedge-shaped mirrors, the angle of wedge of two wedge-shaped mirrors and size are all equal, centrosymmetry is placed, between relative angle adjustable, it is characterized in that: between described laser apparatus and described processing work, arrange Gauss beam reshaping element, the energy density distribution of the outgoing beam of described laser apparatus on the cross section vertical with transmission direction is Gaussian distribution, with the energy density distribution the vertical cross section in transmission direction it is being the uniform flat-top distribution of energy density from the light beam of described Gauss beam reshaping element outgoing, and by the initial unstable partial occlusion of laser apparatus outgoing beam.
4. laser processing as claimed in claim 3, it is characterised in that: described processing work makes two-dimensional motion in the plane vertical with the transmission direction of light beam.
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