CN108067730A - For lens type light-beam scanner, system and the beam scanning method of laser micropore processing - Google Patents
For lens type light-beam scanner, system and the beam scanning method of laser micropore processing Download PDFInfo
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- CN108067730A CN108067730A CN201810015116.0A CN201810015116A CN108067730A CN 108067730 A CN108067730 A CN 108067730A CN 201810015116 A CN201810015116 A CN 201810015116A CN 108067730 A CN108067730 A CN 108067730A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
Abstract
The present invention relates to a kind of lens type light-beam scanner, system and beam scanning method for laser micropore processing, which includes：First special-shaped wedge, the second special-shaped wedge, the first rotary drive, the second rotary drive；The light-beam scanner controls lateral displacement amount and the angle of inclination of laser beam using two special-shaped wedges, the angle changed between two special-shaped wedges can change the angle of inclination of laser beam and lateral displacement amount simultaneously, it can not only be used for processing reverse taper holes, and solve central light beam present in existing transmission-type and combined device deep hole machining and be first close to phenomenon, substantially increase deep hole machining ability.The optical beam scanning system and its beam scanning method for possessing above-mentioned light-beam scanner equally have above-mentioned technique effect.
Description
Technical field
The present invention relates to field of laser processing, in particular to a kind of lens type light beam for laser micropore processing
Scanning means, system and beam scanning method.
Background technology
Micro hole machining means mainly have mechanical drill, electro-hydraulic line, electric spark, the laser etc. several at present.Compared with it
His manufacturing process, Laser Processing have high in machining efficiency, machinable material scope is wide, without tool wear, it is non-contact, to material type
Face ring it is small, be easy to be oriented to, it is flexible the features such as.Especially with picosecond, the application of femto-second laser, laser processing quality is into one
Step is promoted, and not only high precision machining, inner wall quality are good, and without heat affecting, without re cast layer, it is non-microcracked, without material selectivity, swash
Light is processed into the selection of more and more people.
There are mainly three types of the modes for laser machining micro hole：Percussive drilling, circular scan drilling and helical scanning drilling, phase
Than for, circular scan drilling and helical scanning drilling quality are more excellent.To realize that circular scan campaign or helical scanning move, one
Kind is control workpiece motion s, and one kind is control beam motion, in contrast controls beam motion simpler, flexible.Control at present
Light beam Two-dimensional motion device has very much, is broadly divided into three classes：Reflection-type (such as galvanometer, PZT), transmission-type (such as four wedges or
Parallel flat+bis- wedges), reflection+transmission it is combined (such as PZT+ parallel flats, speculum+Dove prism).Type device
Although moving sweep speed is higher, positive cone hole machine can only be realized, can not realize cylinder or back taper hole machined, therefore only fit
For the requirement shallow bore hole processing of surface mark, etching or zero draft；Transmissive device can realize cylinder or back taper hole machined, still
Complicated, driving motor needs 3~4；Or reflection+transmission-type is of high cost or installation accuracy is more demanding, synchronous essence
Degree is not high.And transmission-type and it is combined have a same problem, when deep hole machining, can all have processing centre position than processing
The phenomenon that marginal position is easier to be in the light, as shown in Figure 1, lateral displacement amount does not become substantially in prior art process
Change, after being worked into certain depth, centre scan light beam is blocked by hole inlet edge, and laser is caused not reach deep hole center,
The material of center can not be removed, the final promotion for influencing hole aspect ratio.
The content of the invention
An embodiment of the present invention provides a kind of lens type light-beam scanner, system and light beams for laser micropore processing
Scan method is first close to phenomenon at least solving central light beam present in existing transmission-type and combined device deep hole machining
Technical problem.
One side according to embodiments of the present invention provides a kind of lens type light beam scanning for laser micropore processing
Device, the light-beam scanner are connected with external control system, and the light-beam scanner includes：First special-shaped light
Wedge, the second special-shaped wedge, the first rotary drive, the second rotary drive；
The first special-shaped wedge includes the first wedge part that an angle is α and that an inclination angle is β is first flat
The projection of both row plate parts, the main cross section of the main cross section of the first wedge part and the first parallel flat part it
Between angle be γ；
The second special-shaped wedge includes the second wedge part that an angle is α and that an inclination angle is β is second flat
The projection of both row plate parts, the main cross section of the main cross section of the second wedge part and the second parallel flat part it
Between angle be-γ；
Wherein, the γ angles take -90 °<γ<90°；
First rotary drive, the second rotary drive are driven described first different successively by control system control
Type wedge, the second special-shaped wedge rotate so that external laser beam passes sequentially through the described first special-shaped wedge, the second special-shaped light
Predetermined lateral displacement amount and angle of inclination are generated after wedge.
Further, the γ angles take 30 °≤| γ |≤60 °.
Further, the rotation axis of the described first special-shaped wedge of the first rotary drive driving and the described second rotation
The rotation axis of the described second special-shaped wedge of actuator driving is parallel.
Further, the α angles take 0 °<α<5 °, the β angles take 20 °<β<60°.
Further, first rotary drive, the second rotary drive include driving motor.
Other side according to embodiments of the present invention provides a kind of lens type light beam for laser micropore processing and sweeps
System is retouched, including：Control system, laser, light-beam scanner, focus lamp；The light-beam scanner is any of the above-described
The light-beam scanner；
The control system controls the in the light-beam scanner described first special-shaped wedge and the described second special-shaped light
The speed difference of wedge so that by the laser beam that the laser is launched by after the light-beam scanner with described first
The variation of included angle between special-shaped wedge and the second special-shaped wedge and generate predetermined lateral displacement amount and angle of inclination,
And it is projected after focus lamp focusing.
Further, the optical beam scanning system further includes speculum, and the laser beam that the laser is launched is by institute
The light-beam scanner is injected after stating speculum reflection, the center line of the laser beam through speculum reflection gathers with described
The optical axis coincidence of burnt mirror.
Other side according to embodiments of the present invention additionally provides a kind of using above-mentioned lens type optical beam scanning system
Beam scanning method comprises the following steps：
A. according to the micro-pore shape of preprocessing, the angle of inclination of outgoing laser beams is determined, and according to outgoing laser beams
Angle of inclination calculate angle Δ φ between the first special-shaped wedge and the second special-shaped wedge；
B. described first special-shaped wedge beat Δ φ on the basis of initial position is controlled；
C. the described first special-shaped wedge and the second special-shaped wedge synchronous rotary are controlled, the laser beam being emitted at this time is according to true
Fixed angle of inclination carries out circular scan campaign.
Further, the method further includes before step A：To between the first special-shaped wedge and the second special-shaped wedge
Relative position relation is demarcated；The laser beam projected after line focus mirror is focused on during calibration is imaged onto in CCD camera；Wherein
CCD camera is located on focus lamp focal plane position；It is demarcated as follows：
A1. laser is opened, light-beam scanner powers on, the first rotary drive, the second rotary drive back to zero, record
Driving angle J=0 at this time；
B1. the first rotary drive, the second rotary drive synchronous rotary are controlled, at this time the first special-shaped wedge, second different
Type wedge by fixed angle synchronous rotary, will record the diameter D0 of CCD camera the image collected at this time；
C1. the first rotary drive, the corresponding first special-shaped wedge of the second rotary drive control, the second special-shaped wedge it
Between angle increase by 1 °, repeat B processes, obtain image diameter D1；
D1. C processes are repeated, image diameter D2, D3 ... will be obtained successively；
E1. movement images diameter D1, D2, D3 ... find out the corresponding angle of minimum image diameter, are light beam scanning dress
The initial position put；
F1. will in the corresponding angle modification of minimum image diameter to the first rotary drive, the second rotary drive, be made
One rotary drive, the back to zero position of the second rotary drive correspond to the initial position of light-beam scanner.
Other side according to embodiments of the present invention additionally provides a kind of using above-mentioned lens type optical beam scanning system
Beam scanning method comprises the following steps：
A. the speed difference between the special-shaped wedge of control first and the second special-shaped wedge, the speed of the first wedge part are
V1, the speed of the second wedge part is V2, and the speed V1 of the first wedge part is controlled to be more than second light first
The speed V2 of wedge portion point, meets following formula：
V1/V2-1=φ n/N；
B. after N is enclosed, the speed V1 of the first wedge part is controlled to be less than the speed V2 of the second wedge part,
And meet following formula：
V1/V2-1=- φ n/N；
C. after N is enclosed, and process A is initially entered；
By A~C processes, laser beam is realized from the inside to the outside, then reciprocating screw scanning motion from outside to inside；
Wherein：
I. helix initial position is the initial position of light-beam scanner, is φ 0；
Ii. helix end position is φ n；
Iii. helix encloses from the inside to the outside for N, and wherein N is the integer more than 1, and n is integer and 0≤n≤N.
Further, the method further includes before step A：To between the first special-shaped wedge and the second special-shaped wedge
Relative position relation is demarcated；The laser beam projected after line focus mirror is focused on during calibration is imaged onto in CCD camera；Wherein
CCD camera is located on focus lamp focal plane position；It is demarcated as follows：
A1. laser is opened, light-beam scanner powers on, the first rotary drive, the second rotary drive back to zero, record
Driving angle J=0 at this time；
B1. the first rotary drive, the second rotary drive synchronous rotary are controlled, at this time the first special-shaped wedge, second different
Type wedge by fixed angle synchronous rotary, will record the diameter D0 of CCD camera the image collected at this time；
C1. the first rotary drive, the corresponding first special-shaped wedge of the second rotary drive control, the second special-shaped wedge it
Between angle increase by 1 °, repeat B processes, obtain image diameter D1；
D1. C processes are repeated, image diameter D2, D3 ... will be obtained successively；
E1. movement images diameter D1, D2, D3 ... find out the corresponding angle of minimum image diameter, are light beam scanning dress
The initial position put；
F1. will in the corresponding angle modification of minimum image diameter to the first rotary drive, the second rotary drive, be made
One rotary drive, the back to zero position of the second rotary drive correspond to the initial position of light-beam scanner.
In embodiments of the present invention, laser beam generates certain angle tilt by the wedge of low-angle, using one
A parallel flat generates a lateral displacement amount, can realize the inclination to laser beam and lateral displacement control.The light beam is swept
Lateral displacement amount and angle of inclination of the imaging apparatus using two special-shaped wedges control laser beams change between two special-shaped wedges
Angle can change the angle of inclination of laser beam and lateral displacement amount simultaneously, so as to reach differing tilt angles correspond to it is different
The purpose of lateral displacement amount can not only be used for processing reverse taper holes, and solve existing transmission-type and combined device deep hole
Central light beam present in processing is first close to phenomenon, substantially increases deep hole machining ability.Possesses above-mentioned light-beam scanner
Optical beam scanning system and its beam scanning method equally have above-mentioned technique effect.
Description of the drawings
Attached drawing described herein is used for providing a further understanding of the present invention, forms the part of the application, this hair
Bright schematic description and description does not constitute improper limitations of the present invention for explaining the present invention.In the accompanying drawings：
Central light beam elder generation light-baffling phenomena schematic diagram when Fig. 1 is existing laser scanning device deep hole machining；
Fig. 2 (a) is the first special-shaped wedge equivalent schematic；
Fig. 2 (b) is the second special-shaped wedge equivalent schematic；
Fig. 3 is position relationship schematic diagram of the γ=0 ° wedge part with parallel plate part；
Fig. 4 is displacement of the laser beam after light-beam scanner and is directed toward in XOY faces perspective view；
Central light beam and edge light beam condition of incidence schematic diagram when Fig. 5 is deep hole machining of the present invention；
Fig. 6 is that light-beam scanner builds figure in specific embodiment；
Fig. 7 is that optical beam scanning system builds figure in specific embodiment；
Calibrating platform builds figure when Fig. 8 is initial position.
Wherein reference numeral is：1st, laser；2nd, beam expander；3rd, speculum；4th, the first special-shaped wedge；5th, the second special-shaped light
Wedge；6th, the first driving motor；7th, the second driving motor；8th, focus lamp；9th, workpiece；10th, computer；11st, beam center.
Specific embodiment
In order to which those skilled in the art is made to more fully understand the present invention program, below in conjunction in the embodiment of the present invention
The technical solution in the embodiment of the present invention is clearly and completely described in attached drawing, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
Member's all other embodiments obtained without making creative work should all belong to the model that the present invention protects
It encloses.
It should be noted that term " first " in description and claims of this specification and above-mentioned attached drawing, "
Two " etc. be the object for distinguishing similar, without being used to describe specific order or precedence.It should be appreciated that it so uses
Data can exchange in the appropriate case, so as to the embodiment of the present invention described herein can with except illustrating herein or
Order beyond those of description is implemented.In addition, term " comprising " and " having " and their any deformation, it is intended that cover
Cover it is non-exclusive include, be not necessarily limited to for example, containing the process of series of steps or unit, method, system, product or equipment
Those steps or unit clearly listed, but may include not list clearly or for these processes, method, product
Or the intrinsic other steps of equipment or unit.
Embodiment 1
According to embodiments of the present invention, a kind of lens type light-beam scanner for laser micropore processing, light beam are provided
Scanning means is connected with external control system, and light-beam scanner includes：First special-shaped wedge, the second special-shaped wedge, the
One rotary drive, the second rotary drive；
First special-shaped wedge includes the first wedge part that angle is α and the first parallel flat portion that an inclination angle is β
Point.For convenience of description, it is β's that two parts, which are separated, and are equivalent to the first wedge part that an angle is α and an inclination angle
First parallel flat part carries out light path description.The first wedge part face opposite with the first parallel flat part enters for laser
Reflective surface, laser inject the first special-shaped wedge from the plane of incidence, are projected by the deviation and translation of the first special-shaped wedge.It tilts
Angle of the angle beta between vertical direction and the first parallel flat part, low-angle α for the first parallel flat part and the plane of incidence it
Between angle, depending on the micropore size of preprocessing and depth, α angles take angle a and β：0°<α<5 °, β angles take：20°<β<
60°。
Angle between the projection of both main cross sections of the main cross section of first wedge part and the first parallel flat part is
From the light beam of plane of incidence incidence, deviation and deflection are being generated by the first wedge part and the first parallel flat part by γ
It is incident on afterwards on the projection line of parallel flat part.It can with γ angular misalignments between first wedge part and the first parallel flat part
The desired lateral displacement amount of beam deviation is effectively ensured.Second special-shaped wedge is identical with the first special-shaped wedge structure, including angle
Spend the second wedge part for α and the second parallel flat part that an inclination angle is β.For convenience of description, two parts are separated
It opens to be equivalent to the second wedge part that an angle is α and the second parallel flat part that an inclination angle is β and carry out light path and retouch
It states.With the first special-shaped wedge the difference is that, the main cross section of the main cross section of the second wedge part and the second parallel flat part
Angle between the projection of the two is-γ.
For ease of the understanding to specification, γ angles are defined as follows：When the master of parallel flat part and wedge part cuts
Face is parallel, and when the two position is as shown in Figure 3, defines γ=0 °, wherein, parallel flat partial cross section is around the wedge portion of low-angle
When partial cross-section rotates counterclockwise, positive direction rotation is defined as, γ angles take -90 °<γ<90°；In real work, preferably take 30 °≤|
γ|≤60.In the art, wedge is substantially low-angle, i.e., in wedge-shaped, the angle of very little with an angle
Triangle.Low-angle wedge herein in art technology document more use.
First rotary drive, the second rotary drive control the special-shaped wedge of driving first successively, second by control system
Special-shaped wedge rotates so that external laser beam generates predetermined horizontal stroke after passing sequentially through the first special-shaped wedge, the second special-shaped wedge
To displacement and angle of inclination.
In embodiments of the present invention, laser beam generates certain angle by the wedge part of the low-angle in special-shaped wedge
Degree tilts, and generates a lateral displacement amount using the parallel flat part in special-shaped wedge, which uses two
The lateral displacement amount of a abnormal shape wedge control laser beam and angle of inclination, the angle changed between two special-shaped wedges can be same
When change the angle of inclination of laser beam and lateral displacement amount, correspond to different lateral displacement amounts so as to reach differing tilt angles
Purpose can not only be used for processing reverse taper holes, and solve present in existing transmission-type and combined device deep hole machining
Central light beam is first close to phenomenon, substantially increases deep hole machining ability.
Embodiment 2
According to embodiments of the present invention, a kind of lens type optical beam scanning system for laser micropore processing is provided, including：
Laser, beam expander, speculum, two-dimentional light beam scanning means, focus lamp, workpiece, computer.Computer controlled laser is emitted
Light beam by having the speculum of certain setting angle to be reflected into two-dimentional light beam scanning means after beam expander collimates, generates tool
There is the outgoing beam of certain refraction angle and lateral displacement, finally focus on laser on workpiece by focus lamp.It is anti-through speculum
The beam center line penetrated and focus lamp optical axis coincidence, and in two-dimentional light beam scanning means two special-shaped wedges rotation axis it is parallel.
Two-dimentional light beam scanning means is mainly by the first special-shaped wedge, the second special-shaped wedge and two rotations for driving its rotation
Actuator --- being motor in the present embodiment --- is completed by composition, control by computer.First special-shaped wedge can include one
The parallel flat part of a angle of inclination beta and the wedge part of an angle [alpha], and the main cross section of wedge part and parallel plate part
Between there are one γ angles, as shown in Fig. 2 (a).For convenience of description, the second special-shaped wedge can separate, equivalent to incline into one
The parallel flat part of oblique angle β and the wedge part that angle is α, and the main cross section of wedge part and parallel plate part it
Between there are one-γ angles, as shown in Fig. 2 (b).Light beam generates certain angle by the wedge part of the low-angle of special-shaped wedge
It tilts, generates a lateral displacement amount using parallel flat part, light beam deviation had both been realized so as to reach an optical mirror slip,
The purpose of lateral displacement is generated again, and control accuracy is improved to reduce controlled quentity controlled variable.
For ease of the understanding to specification, the wedge part of low-angle is defined as follows with parallel plate part：When flat
Row plate part is parallel with the wedge part main cross section of low-angle, and when the two position is as shown in Figure 3, defines γ=0 °；When flat
Row plate part section around low-angle wedge partial cross section rotate counterclockwise when, be defined as positive direction rotation.In order to realize cylinder
Or back taper hole machined, the folder that the traversing direction of light beam that special-shaped wedge generates is projected with deviation direction on the horizontal plane of vertical optical axis
Angle must be obtuse angle, correspondingly, during special-shaped wedge makes, -90 °<γ<90 °, in real work, preferably take 30 °≤| γ |≤
60。
When light beam is successively by two special-shaped wedges, and angle is φ between special-shaped wedge, wherein, φ is the first wedge portion
Angle between the main cross section divided and the small bore of the second wedge part.As shown in figure 4, the great circle in coordinate system is represented second
A cross section below special-shaped wedge, wherein, the hot spot when circle of dotted line represents light beam separately through the two special-shaped wedges
Position, solid line circle represent light beam proceeding through the synthesising position after two special-shaped wedges, and the dotted line by Y-axis represents single different
Influence of the type wedge to light-beam position and direction, solid line represent the effect after the two synthesis.Arrow represents light beam and is directed toward transversal
Projection components on face.
Different φ values correspond to different outgoing beam inclination angles and lateral displacement amount, i.e. two-dimentional light beam scanning means two is different
The small angle phi generated between type wedge corresponds to small lateral displacement amount, and wide-angle φ corresponds to big lateral displacement amount.Swash in helix
In light drill process, two special-shaped wedge rotations carry out, when the included angle of two wedges there are the variation of angle φ with scanning
When smaller, light beam is scanned center, and when the included angle of two wedges is larger, beam deviation amount is big, and light beam is to aperture
Edge is scanned, when so avoiding deep hole machining, the problem of centre scan light beam easily sweeps side, as shown in Figure 5.
As φ=0, for the first wedge part and the second wedge portion of the initial position of processing, at this time two special-shaped wedges
The apex angle divided is opposite, and the main cross section of wedge part is parallel.
The outgoing beam deflection angle projected from two special-shaped wedges is δ, then
The maximum diameter of hole d=2Ftan δ finally processed；
Wherein, F is focus lamp focal length, and n is special-shaped wedge refractive index.
Below in conjunction with the accompanying drawings 6~7 and specific embodiment the invention will be further described.
Optical beam scanning system as shown in Figure 7, by laser 1, beam expander 2, the special-shaped wedge 4, second of speculum 3, first
Special-shaped wedge 5, the first driving motor 6, the second driving motor 7, focus lamp 8, workpiece 9 and 10 groups of the computer as control system
Into.The optical axis coincidence of beam center line and the focus lamp 8 of the beam center 11 reflected through speculum 3, and with the first special-shaped wedge 4
It is parallel with the rotation axis of the second special-shaped wedge 5.
The first special-shaped special-shaped wedge 5 of wedge 4 and second passes through the control of computer 10 first driving motor 6 and the second driving electricity
Machine 7 realizes motion control respectively.Computer 10 controls 1 outgoing beam of laser, by having a Dingan County after the collimation of beam expander 2
The speculum 3 of dress angle is reflected into the first special-shaped wedge 4, generates the outgoing beam with certain refraction angle and lateral displacement, then
It is reflected by the second special-shaped wedge 5 and transverse shifting, is finally focused on by focus lamp 8 on workpiece 9.
Embodiment 3
According to embodiments of the present invention, a kind of beam scanning method using above-mentioned optical beam scanning system is provided, uses two
Before tieing up light-beam scanner, the relative position relation between two special-shaped wedges is demarcated first, determines driving motor
The relation of rotation amount and initial position, to realize accurate control.It sets for this platform as shown in Figure 8：It is a branch of from laser emitting first
Laser beam, laser energy cannot be too big, in order to avoid damage CCD camera, reflects into through speculum in light-beam scanner, adjust reflection
Mirror angle makes the center line of light beam be overlapped as far as possible with the rotation axis of light-beam scanner；The light beam being emitted from light-beam scanner
It after being focused on using focus lamp, is imaged onto in CCD camera, wherein CCD camera is located at focus lamp focal plane position.By such as lower section
Method is demarcated：
A1. laser is opened, light-beam scanner powers on, and the first rotary drive, the second rotary drive i.e. two drive
Dynamic motor back to zero, records driving motor angle J=0 at this time；
B1. two driving motor synchronous rotaries are controlled, the first special-shaped wedge, the second special-shaped wedge will be by fixed angles at this time
Synchronous rotary records the diameter D0 of CCD camera the image collected at this time；
C1. the angle between the corresponding first special-shaped wedge of two driving motor controls, the second special-shaped wedge increases by 1 °, weight
Multiple B processes, obtain image diameter D1；
D1. C processes are repeated, image diameter D2, D3 ... will be obtained successively；
E1. movement images diameter D1, D2, D3 ... find out the corresponding angle of minimum image diameter, are light beam scanning dress
The initial position put；
F1. will in the corresponding angle modification of minimum image diameter to the first rotary drive, the second rotary drive, be made
One rotary drive, the back to zero position of the second rotary drive correspond to the initial position of light-beam scanner.
The optical beam scanning system of the present invention can carry out light beam circular scan campaign and helical scanning movement, and wherein light beam is justified
The beam scanning method of scanning motion comprises the following steps：
A. according to the micro-pore shape of preprocessing, the angle of inclination of outgoing laser beams is determined, and according to outgoing laser beams
Angle of inclination calculate angle Δ φ between the first special-shaped wedge and the second special-shaped wedge；
B. the special-shaped wedge of control first beat Δ φ on the basis of initial position；
C. the special-shaped wedge of control first and the second special-shaped wedge synchronous rotary, the laser beam being emitted at this time is according to definite
Angle of inclination carries out circular scan campaign.
The beam scanning method of wherein helical scanning movement comprises the following steps：
A. according to assuming to calculate the speed difference between the first special-shaped wedge and the second special-shaped wedge, the first wedge part
Speed is V1, and the speed of the second wedge part is V2, and the speed V1 of the first wedge part is more than the speed of the second wedge part first
V2 is spent, meets following formula：
V1/V2-1=φ n/N；
B. after N is enclosed, the speed V1 of the first wedge part is less than the speed V2 of the second wedge part, and meets following formula：
V1/V2-1=- φ n/N；
C. after N is enclosed, and process A is initially entered；
By A~C processes, laser beam is realized from the inside to the outside, then reciprocating screw scanning motion from outside to inside；
Wherein it is assumed to be：
I. helix initial position is the initial position of light-beam scanner, is φ 0；
Ii. helix end position is φ n；
Iii. helix encloses from the inside to the outside for N, and wherein N is the integer more than 1, and n is integer and 0≤n≤N.
The technique effect of the present invention is as follows：
Technical scheme replaces four original wedges using two special-shaped wedges, reduces wedge, driving motor
Quantity reduces cost；It only needs to demarcate a relative position relation using double special-shaped wedges, and four wedges need calibration four
Position relationship between wedge, operation are simpler；Mechanical structure is simpler, and introducing error source is less, improves precision；Compared to anti-
Emitting, transmission-type, transmission+reflection-type, deep hole machining ability greatly improve.
The embodiments of the present invention are for illustration only, do not represent the quality of embodiment.
In the above embodiment of the present invention, all emphasize particularly on different fields to the description of each embodiment, do not have in some embodiment
The part of detailed description may refer to the associated description of other embodiment.
In several embodiments provided herein, it should be understood that disclosed technology contents can pass through others
Mode is realized.Wherein, the apparatus embodiments described above are merely exemplary, such as the division of unit, can be one kind
Division of logic function, can there is an other dividing mode in actual implementation, such as multiple units or component can combine or can
To be integrated into another system or some features can be ignored or does not perform.Another, shown or discussed is mutual
Coupling, direct-coupling or communication connection can be by some interfaces, the INDIRECT COUPLING or communication connection of unit or module,
Can be electrical or other forms.
The unit illustrated as separating component may or may not be physically separate, be shown as unit
Component may or may not be physical location, you can be located at a place or can also be distributed to multiple units
On.Some or all of unit therein can be selected to realize the purpose of this embodiment scheme according to the actual needs.
In addition, each functional unit in each embodiment of the present invention can be integrated in a processing unit, it can also
That unit is individually physically present, can also two or more units integrate in a unit.Above-mentioned integrated list
The form that hardware had both may be employed in member is realized, can also be realized in the form of SFU software functional unit.
If integrated unit is realized in the form of SFU software functional unit and is independent production marketing or in use, can
To be stored in a computer read/write memory medium.Based on such understanding, technical scheme substantially or
Saying all or part of the part contribute to the prior art or the technical solution can be embodied in the form of software product
Out, which is stored in a storage medium, is used including some instructions so that a computer equipment
(can be personal computer, server or network equipment etc.) performs all or part of step of each embodiment method of the present invention
Suddenly.And foregoing storage medium includes：USB flash disk, read-only memory (ROM, Read-Only Memory), random access memory
The various media that can store program code such as (RAM, Random Access Memory), mobile hard disk, magnetic disc or CD.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (11)
1. a kind of lens type light-beam scanner for laser micropore processing, the light-beam scanner and external control system
System is connected, which is characterized in that the light-beam scanner includes：First special-shaped wedge, the second special-shaped wedge, the first rotation are driven
Moving part, the second rotary drive；
The first special-shaped wedge includes the first wedge part that an angle is α and that an inclination angle is β is first parallel flat
Between the projection of both main cross sections of plate part, the main cross section of the first wedge part and the first parallel flat part
Angle is γ；
The second special-shaped wedge includes the second wedge part that an angle is α and that an inclination angle is β is second parallel flat
Between the projection of both main cross sections of plate part, the main cross section of the second wedge part and the second parallel flat part
Angle is-γ；
Wherein, the γ angles take -90 °<γ<90°；
First rotary drive, the second rotary drive drive the described first special-shaped light successively by control system control
After wedge, the second special-shaped wedge rotation cause external laser beam to pass sequentially through the described first special-shaped wedge, the second special-shaped wedge
Generate predetermined lateral displacement amount and angle of inclination.
2. lens type light-beam scanner according to claim 1, which is characterized in that the γ angles take 30 °≤| γ |≤
60°。
3. lens type light-beam scanner according to claim 1, which is characterized in that the first rotary drive driving
The rotation axis of described first special-shaped wedge is parallel with the rotation axis of the described second special-shaped wedge of second rotary drive driving.
4. lens type light-beam scanner according to claim 1, which is characterized in that the α angles take 0 °<α<5 °, the β
Angle takes 20 °<β<60°.
5. lens type light-beam scanner according to claim 1, which is characterized in that first rotary drive,
Two rotary drives include driving motor.
6. a kind of lens type optical beam scanning system for laser micropore processing, which is characterized in that including：Control system, laser
Device, light-beam scanner, focus lamp；Light beam scanning dress of the light-beam scanner any one of claim 1-5
It puts；
The control system controls the in the light-beam scanner described first special-shaped wedge and the described second special-shaped wedge
Speed difference, so that being passed through by the laser beam that the laser is launched special-shaped with described first after the light-beam scanner
The variation of included angle between wedge and the second special-shaped wedge and generate predetermined lateral displacement amount and angle of inclination, and pass through
The focus lamp projects after focusing on.
7. lens type optical beam scanning system according to claim 6, which is characterized in that the optical beam scanning system further includes
Speculum, the laser beam that the laser is launched injects the light-beam scanner after being reflected by the speculum, through institute
State the optical axis coincidence of the center line and the focus lamp of the laser beam of speculum reflection.
A kind of 8. beam scanning method using the lens type optical beam scanning system of claim 6 or 7, which is characterized in that bag
Include following steps：
A. according to the micro-pore shape of preprocessing, the angle of inclination of outgoing laser beams, and inclining according to outgoing laser beams are determined
Rake angle calculates the angle Δ φ between the first special-shaped wedge and the second special-shaped wedge；
B. described first special-shaped wedge beat Δ φ on the basis of initial position is controlled；
C. the described first special-shaped wedge and the second special-shaped wedge synchronous rotary are controlled, the laser beam being emitted at this time is according to definite
Angle of inclination carries out circular scan campaign.
9. beam scanning method according to claim 8, which is characterized in that the method further includes before step A：It is right
Relative position relation between first special-shaped wedge and the second special-shaped wedge is demarcated；It is penetrated after line focus mirror is focused on during calibration
The laser beam gone out is imaged onto in CCD camera；Wherein CCD camera is located on focus lamp focal plane position；As follows into
Rower is determined：
A1. laser is opened, light-beam scanner powers on, the first rotary drive, the second rotary drive back to zero, and record is at this time
Driving angle J=0；
B1. the first rotary drive, the second rotary drive synchronous rotary are controlled, at this time the first special-shaped wedge, the second special-shaped light
Wedge by fixed angle synchronous rotary, will record the diameter D0 of CCD camera the image collected at this time；
C1. between the first rotary drive, the corresponding first special-shaped wedge of the second rotary drive control, the second special-shaped wedge
Angle increases by 1 °, repeats B processes, obtains image diameter D1；
D1. C processes are repeated, image diameter D2, D3 ... will be obtained successively；
E1. movement images diameter D1, D2, D3 ... find out the corresponding angle of minimum image diameter, are light-beam scanner
Initial position；
F1. by the corresponding angle modification of minimum image diameter to the first rotary drive, the second rotary drive, the first rotation is made
Turn actuator, the back to zero position of the second rotary drive corresponds to the initial position of light-beam scanner.
A kind of 10. beam scanning method using the lens type optical beam scanning system of claim 6 or 7, which is characterized in that bag
Include following steps：
A. the speed difference between the special-shaped wedge of control first and the second special-shaped wedge, the speed of the first wedge part is V1,
The speed of the second wedge part is V2, and the speed V1 of the first wedge part is controlled to be more than the second wedge portion first
The speed V2 divided, meets following formula：
V1/V2-1=φ n/N；
B. after N is enclosed, the speed V1 of the first wedge part is controlled to be less than the speed V2 of the second wedge part, and it is full
Foot formula：
V1/V2-1=- φ n/N；
C. after N is enclosed, and process A is initially entered；
By A~C processes, laser beam is realized from the inside to the outside, then reciprocating screw scanning motion from outside to inside；
Wherein：
I. helix initial position is the initial position of light-beam scanner, is φ 0；
Ii. helix end position is φ n；
Iii. helix encloses from the inside to the outside for N, and wherein N is the integer more than 1, and n is integer and 0≤n≤N.
11. beam scanning method according to claim 10, which is characterized in that the method further includes before step A：
Relative position relation between first special-shaped wedge and the second special-shaped wedge is demarcated；After line focus mirror is focused on during calibration
The laser beam of injection is imaged onto in CCD camera；Wherein CCD camera is located on focus lamp focal plane position；As follows
It is demarcated：
A1. laser is opened, light-beam scanner powers on, the first rotary drive, the second rotary drive back to zero, and record is at this time
Driving angle J=0；
B1. the first rotary drive, the second rotary drive synchronous rotary are controlled, at this time the first special-shaped wedge, the second special-shaped light
Wedge by fixed angle synchronous rotary, will record the diameter D0 of CCD camera the image collected at this time；
C1. between the first rotary drive, the corresponding first special-shaped wedge of the second rotary drive control, the second special-shaped wedge
Angle increases by 1 °, repeats B processes, obtains image diameter D1；
D1. C processes are repeated, image diameter D2, D3 ... will be obtained successively；
E1. movement images diameter D1, D2, D3 ... find out the corresponding angle of minimum image diameter, are light-beam scanner
Initial position；
F1. by the corresponding angle modification of minimum image diameter to the first rotary drive, the second rotary drive, the first rotation is made
Turn actuator, the back to zero position of the second rotary drive corresponds to the initial position of light-beam scanner.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810015116.0A CN108067730A (en) | 2018-01-08 | 2018-01-08 | For lens type light-beam scanner, system and the beam scanning method of laser micropore processing |
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|---|---|---|---|
| CN201810015116.0A CN108067730A (en) | 2018-01-08 | 2018-01-08 | For lens type light-beam scanner, system and the beam scanning method of laser micropore processing |
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ID=62156467
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| US11865643B2 (en) * | 2019-08-30 | 2024-01-09 | Lyncwell Innovation Intelligent System (zhejiang) Co., Ltd. | Drilling device with controllable femtosecond laser processing taper and drilling process thereof |
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