CN203592234U - Laser beam scanning system - Google Patents
Laser beam scanning system Download PDFInfo
- Publication number
- CN203592234U CN203592234U CN201320791998.2U CN201320791998U CN203592234U CN 203592234 U CN203592234 U CN 203592234U CN 201320791998 U CN201320791998 U CN 201320791998U CN 203592234 U CN203592234 U CN 203592234U
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- Prior art keywords
- axis
- wedge
- compensation group
- beam flying
- laser beam
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- 230000003287 optical effect Effects 0.000 claims abstract description 12
- 238000003754 machining Methods 0.000 abstract description 11
- 238000004080 punching Methods 0.000 abstract description 7
- 238000009434 installation Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Abstract
The utility model discloses a laser beam scanning system. A space three-dimensional coordinate comprises a Z axis, an X axis and a Y axis. The Z axis is arranged in the direction of an optical axis. The laser beam scanning system comprises a deflection optical wedge, a translation block, a light beam scanning module and a focus lens, wherein the deflection optical wedge, the translation block, the light beam scanning module and the focus lamp are arranged along the Z axis at intervals. The deflection optical wedge can rotate around the X axis, the translation block can swing around the X axis, the focus lens is located at the light-emitting end of the light beam scanning module, the deflection optical wedge and the translation block are located at the light-incidence end of the light beam scanning module, the light beam scanning module comprises a Dove prism, a first compensation set and a second compensation set, the Dove prism, the first compensation set and the second compensation set are arranged along the Z axis at intervals, the first compensation set and the second compensation set respectively comprise a pair of wedge lenses, and the Dove prism, the first compensation set and the second compensation set synchronously rotate around the Z axis. By means of additional arrangement of the first compensation set and the second compensation set, the laser beam scanning system can be used for compensating machining errors and installation errors of the Dove prism and improves laser punching accuracy and stability.
Description
Technical field
The utility model relates to a kind of laser beam flying system, particularly relates to a kind of laser beam flying system of processing taper hole.
Background technology
Capillary processing is one of important application of field of laser processing, and in capillary processing, hole shape usually has certain tapering requirement, and even requiring is reverse taper holes.For example, in atomizer capillary processing, in order to improve the atomizing effect of atomizer aperture oil spout, not only require aperture little, and require hole shape to there is certain back draught; And in aircraft blade processing, in order to improve the cooling effect of micropore, require Kong Weizheng taper.
The method of existing Laser microdrilling has: fixed beam pulse or multiple-pulse machining cell micropore, vibration mirror scanning, workpiece rotation punching and rotating double-optical wedge scanning.For the tapering of control hole, need in light path, add some pattern displacement modules, such as parallel flat, parallel double wedge etc.Modal combining form has vibration mirror scanning+parallel flat rotating double-optical wedge scanning+parallel flat, rotation four wedge scannings, Dove prism scanning etc.
As Chinese patent (notification number CN103028843A) employing is the processing head form that four wedge rotary light beams punch, in the time of punching, its four wedges are rotation status, and need to change the radius of turn of light beam and the tapering punching by the relative rotational changing between multiple wedges.This processing mode certainly exists following shortcoming: owing to there being multiple wedges to rotate simultaneously, the synchronism between wedge is difficult to control, and has reduced the machining accuracy in hole.
As Chinese patent application (notification number CN102950385A): the system and method for the small round taper hole of a kind of laser beam rotation processing, it discloses the system and method for the small round taper hole of a kind of laser beam rotation processing, and this system comprises laser generating unit, laser deflection unit, laser rotary unit, tapering control module and Laser Processing unit; Referring to its Figure of description, laser rotary unit comprises a Dove prism, rotarily drives Beam rotation by it.But the impact of Dove prism processing, the inclined degree of alignment error on aperture precision, pore diameter range and hole is extremely responsive, therefore, its trueness error is very difficult to regulate.
Utility model content
The utility model provides a kind of laser beam flying system, has improved the precision of machining hole.The utility model solves the technical scheme that its technical problem adopts:
A kind of laser beam flying system, space multistory three-dimensional coordinate comprises Z axis, X-axis and Y-axis, described Z axis is along optical axis direction setting, described laser beam flying system comprises along the spaced deflection wedge of Z axis, translation piece, beam flying module and focus lamp, described deflection wedge can rotate and arrange around X-axis, described translation piece can swing and arrange around X-axis, described focus lamp is positioned at the exit end of described beam flying module, described deflection wedge is peaceful moves piece and is positioned at incident end one side of described beam flying module, described beam flying module comprises along the spaced Dove prism of Z axis, the first compensation group and the second compensation group, described the first compensation group and the second compensation group comprise respectively a pair of wedge mirror, described Dove prism, the first compensation group and the second compensation group are synchronously rotated around Z axis.
Among one preferred embodiment: the vertical plane parallel opposed longer sides of two wedge mirrors of described the first compensation group arranges, or the inclined plane parallel opposed longer sides of two wedge mirrors of described the first compensation group arranges.
Among one preferred embodiment: the vertical plane parallel opposed longer sides of two wedge mirrors of described the second compensation group arranges, or the inclined plane parallel opposed longer sides of two wedge mirrors of described the second compensation group arranges.Put.
Among one preferred embodiment: described translation piece is between described deflection wedge and described beam flying module.
Among one preferred embodiment: described the first compensation group and the second compensation group are positioned at exit end one side of described Dove prism.
The technical program is compared with background technology, and its tool has the following advantages:
1. due to the existence of mismachining tolerance, the machining accuracy of described Dove prism itself can cause the incident of light and outgoing can not remain on same straight line; Due to the existence of alignment error, can cause from light and the optical axis of described Dove prism outgoing not parallel.Laser beam flying system of the present utility model is by setting up the first compensation group and the second compensation group, can be respectively used to compensate mismachining tolerance and the alignment error of Dove prism, make the incident ray of described beam flying module parallel with emergent ray, improved the precision and stability of laser boring.
2. due to the characteristic of Dove prism, it revolves and turns around, and encloses by its Beam rotation 2, and therefore, under equal conditions, sweep speed is 2 times of four wedge processing heads, has higher working (machining) efficiency.
3. whole system only needs the uniform rotation of described road beam flying module in the time of punching, has therefore cancelled the synchronization accuracy requirement of 4 wedge processing heads, has reduced control difficulty and hardware cost, has improved machining accuracy and stability.
4. beam deflection is swung and is realized by deflection wedge, beam deviation is swung and is realized by translation piece, swing to assigned address and keep transfixion, need to keep definite motion state with respect to 4 wedge processing heads, improved control accuracy and the stability of diameter, tapering.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is described in further detail.
Fig. 1 is the light channel structure figure of the utility model laser beam flying system.
The specific embodiment
Please refer to Fig. 1, space multistory three-dimensional coordinate comprises Z axis, X-axis and Y-axis, and described Z axis is along optical axis direction setting.A kind of laser beam flying system of the present utility model, comprises along the spaced deflection wedge 10 of Z axis, translation piece 20, beam flying module and focus lamp 60.Described beam flying module comprises along the spaced Dove prism 30 of Z axis, the first compensation group 40 and the second compensation group 50.Along optical axis direction, laser beam can pass this deflection wedge 10, translation piece 20, Dove prism 30, the first compensation group 40, the second compensation group 50, focus lamp 60 successively.
This deflection wedge 10 can rotate around x axle, and the angle of its rotation has determined the radius of turn of rotary light beam.That is to say, the pore size in processed hole is decided by the angle of the rotation of this deflection wedge 10.
This translation piece 20 swings around x axle, and its pendulum angle has determined that light beam injects the angle on work piece surface, thereby has determined the tapering of punching.That is to say, the tapering in processed hole is decided by the angle of the swing of this translation piece 20.This translation piece 20 has an incident end face 22 and an outgoing end face 24.
One of described the first compensation group 40 and described second compensation group 50 are for compensating the mismachining tolerance of Dove prism 30; Another of described the first compensation group 40 and described the second compensation group 50 is for compensating the alignment error of Dove prism 30.Described the first compensation group 40 is identical with the structure of described the second compensation group 50, all comprises a pair of wedge mirror 45.Described wedge mirror 45 can rotate around Z axis, thereby the incoming laser beam of beam flying module and outgoing laser beam are kept with on straight line.Preferably, the vertical plane parallel opposed longer sides of two wedge mirrors 45 of described the first compensation group 40 arranges, or the inclined plane parallel opposed longer sides of two wedge mirrors 45 of described the first compensation group 40 arranges.Preferably, the vertical plane parallel opposed longer sides of two wedge mirrors 45 of described the second compensation group 50 arranges, or the inclined plane parallel opposed longer sides of two wedge mirrors 45 of described the second compensation group 50 arranges.
In the time of work, described Dove prism 30, the first compensation group 40 and the second compensation group 50 are synchronously rotated around Z axis.
In when punching, light beam is first by deflection wedge 10, and deflection wedge 10 is around X-axis rotation, the rotational angle α of deflection wedge 10 according to radius of machining r by formula calculative determination below.Light beam and optical axis shape form an angle, and then by translation piece 20, translation piece 20 swings around X-axis, the pendulum angle γ of translation piece 20 according to processing tapering β by formula calculative determination below.Afterwards, light beam with respect to optical axis have certain deviation amount laggard enter Dove prism 30, after reflecting surface total reflection, penetrate from prism 30 other ends, by the first compensation group 40, the second compensation group 50 and focus lamp 60 post-concentrations to workpiece machining surface, by Dove prism 30 High Rotation Speeds, realize the circular scan campaign of convergent point.
The tapering β of the radius of turn r of rotary light beam and institute's machining hole has following formula to try to achieve:
Wherein, r-Beam rotation radius, f '-focus lamp focal length, θ-deflection wedge angle of wedge, a-deflection wedge rotational angle, β-machining hole tapering, γ-translation piece corner, d-translation piece thickness, n-wedge Refractive Index of Material.(translation piece thickness d refers to the thickness between incident end face 22 and the outgoing end face 24 of translation piece 20)
The above, it is only the utility model preferred embodiment, therefore can not limit according to this scope that the utility model is implemented, the equivalence of doing according to the utility model the scope of the claims and description changes and modifies, and all should still belong in the scope that the utility model contains.
Claims (5)
1. a laser beam flying system, space multistory three-dimensional coordinate comprises Z axis, X-axis and Y-axis, described Z axis is along optical axis direction setting, described laser beam flying system comprises along the spaced deflection wedge of Z axis, translation piece, beam flying module and focus lamp, described deflection wedge can rotate and arrange around X-axis, described translation piece can swing and arrange around X-axis, described focus lamp is positioned at exit end one side of described beam flying module, it is characterized in that: described deflection wedge is peaceful moves piece and be positioned at incident end one side of described beam flying module, described beam flying module comprises along the spaced Dove prism of Z axis, the first compensation group and the second compensation group, described the first compensation group and the second compensation group comprise respectively a pair of wedge mirror, described Dove prism, the first compensation group and the second compensation group are synchronously rotated around Z axis.
2. a kind of laser beam flying system according to claim 1, is characterized in that: the vertical plane parallel opposed longer sides of two wedge mirrors of described the first compensation group arranges, or the inclined plane parallel opposed longer sides of two wedge mirrors of described the first compensation group arranges.
3. a kind of laser beam flying system according to claim 1 and 2, is characterized in that: the vertical plane parallel opposed longer sides of two wedge mirrors of described the second compensation group arranges, or the inclined plane parallel opposed longer sides of two wedge mirrors of described the second compensation group arranges.
4. a kind of laser beam flying system according to claim 1, is characterized in that: described translation piece is between described deflection wedge and described beam flying module.
5. a kind of laser beam flying system according to claim 1, is characterized in that: described the first compensation group and the second compensation group are positioned at exit end one side of described Dove prism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320791998.2U CN203592234U (en) | 2013-12-04 | 2013-12-04 | Laser beam scanning system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320791998.2U CN203592234U (en) | 2013-12-04 | 2013-12-04 | Laser beam scanning system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203592234U true CN203592234U (en) | 2014-05-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320791998.2U Expired - Lifetime CN203592234U (en) | 2013-12-04 | 2013-12-04 | Laser beam scanning system |
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| CN (1) | CN203592234U (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106312331A (en) * | 2016-09-29 | 2017-01-11 | 长春理工大学 | Laser small-hole punching device based on Dove prism and method |
| CN107262943A (en) * | 2017-08-10 | 2017-10-20 | 温州大学 | Ultrafast laser processes the devices and methods therefor of superfine back taper hole |
| CN108067730A (en) * | 2018-01-08 | 2018-05-25 | 西安中科微精光子制造科技有限公司 | For lens type light-beam scanner, system and the beam scanning method of laser micropore processing |
| CN109164553A (en) * | 2018-10-18 | 2019-01-08 | 西安脉科莱斯光电科技有限公司 | Laser revolves the error compensation system and method for sweeping optical device isosceles trapezoid prism |
| CN112008239A (en) * | 2020-07-22 | 2020-12-01 | 中国科学院西安光学精密机械研究所 | Spiral scanning laser processing device and processing method |
| CN112219129A (en) * | 2018-06-08 | 2021-01-12 | 三菱电机株式会社 | Laser radar device |
| CN112630956A (en) * | 2020-12-16 | 2021-04-09 | 北京国科世纪激光技术有限公司 | Point changing method of ultraviolet harmonic crystal |
| CN113126107A (en) * | 2019-12-31 | 2021-07-16 | 北醒（北京）光子科技有限公司 | Scanning laser radar |
| CN113534190A (en) * | 2021-06-22 | 2021-10-22 | 惠州越登智能科技有限公司 | Three-dimensional laser radar imaging system and method based on double optical wedges |
-
2013
- 2013-12-04 CN CN201320791998.2U patent/CN203592234U/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106312331A (en) * | 2016-09-29 | 2017-01-11 | 长春理工大学 | Laser small-hole punching device based on Dove prism and method |
| CN107262943A (en) * | 2017-08-10 | 2017-10-20 | 温州大学 | Ultrafast laser processes the devices and methods therefor of superfine back taper hole |
| CN108067730A (en) * | 2018-01-08 | 2018-05-25 | 西安中科微精光子制造科技有限公司 | For lens type light-beam scanner, system and the beam scanning method of laser micropore processing |
| CN112219129A (en) * | 2018-06-08 | 2021-01-12 | 三菱电机株式会社 | Laser radar device |
| CN109164553A (en) * | 2018-10-18 | 2019-01-08 | 西安脉科莱斯光电科技有限公司 | Laser revolves the error compensation system and method for sweeping optical device isosceles trapezoid prism |
| CN109164553B (en) * | 2018-10-18 | 2021-04-09 | 西安脉科莱斯光电科技有限公司 | Error compensation system and method for isosceles trapezoid prism of laser rotary scanning optical device |
| CN113126107A (en) * | 2019-12-31 | 2021-07-16 | 北醒（北京）光子科技有限公司 | Scanning laser radar |
| CN112008239A (en) * | 2020-07-22 | 2020-12-01 | 中国科学院西安光学精密机械研究所 | Spiral scanning laser processing device and processing method |
| CN112630956A (en) * | 2020-12-16 | 2021-04-09 | 北京国科世纪激光技术有限公司 | Point changing method of ultraviolet harmonic crystal |
| CN113534190A (en) * | 2021-06-22 | 2021-10-22 | 惠州越登智能科技有限公司 | Three-dimensional laser radar imaging system and method based on double optical wedges |
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