CN204075509U - Optical beam forming apparatus - Google Patents
Optical beam forming apparatus Download PDFInfo
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- CN204075509U CN204075509U CN201420451389.7U CN201420451389U CN204075509U CN 204075509 U CN204075509 U CN 204075509U CN 201420451389 U CN201420451389 U CN 201420451389U CN 204075509 U CN204075509 U CN 204075509U
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Abstract
The utility model provides a kind of optical beam forming apparatus, and this optical beam forming apparatus comprises the laser instrument arranged successively along optical axis direction, a pair lens, a Dove prism, a plane mirror, a positive axis pyramid and a condenser lens; Distance between described lens is adjustable, in order to adjust spot size and the angle of divergence of laser emitting light beam; Described Dove prism is arranged in hollow shaft electric rotating machine, rotates centered by optical axis, also will along with rotation from the light beam of described Dove prism outgoing; Described plane mirror is used for the transmission direction of deflected beam; The position of described condenser lens on beam Propagation direction is adjustable, and the outgoing beam after described condenser lens is the hollow circular light beam of a branch of rotation.
Description
Technical field
The utility model belongs to technical field of laser processing, relates to a kind of optical beam forming apparatus in laser drilling device and method thereof, is specially adapted to the capillary processing of high hard brittle material.
Background technology
Laser processing technology has permeated in all trades and professions, and especially at microelectronics, in the high accuracy industries such as Aero-Space, more and more less to the requirement of processing dimension, precision is more and more higher, and Laser Processing has become a method that can not be substituted.To in the processing type of material, punch and occupy very most ratio.Laser boring generally has Four types: pulse punches, and multiple-pulse is punched, and rotates punching, and spiral punches.
Current ratio preferably technology is spiral punching, and after laser is focused on by condenser lens, on the surface of the workpiece, light beam is moving along machining locus in effect, and after degrading layer of material, the focus of laser beam, just not on the surface that workpiece is new, is in out-of-focus appearance.Now the focal plane of laser beam is displaced downwardly to the surface of workpiece, or laser beam focal plane keeps motionless, moves, ensure that new surface is on the focal plane of laser beam by workpiece.Can ensure that laser beam is forever positive burnt like this, degrade the material of required processing from level to level gradually.
Spiral punching can ensure that machining hole quality is meticulous, and hole wall is smooth, without fused mass and re cast layer.
The shortcoming of spiral punching is that working (machining) efficiency is lower, and needs melting to fall all material in hole, and the utilization rate for energy is low.
There is a kind of hole knockout to be utilize hollow circular light beam at present, by concentration of energy in the annular region of hot spot, instead of be distributed in whole facula area, promote capacity usage ratio.When utilizing hollow circular light beam to carry out pulse punching, need very large energy could complete punching under the effect of a pulse.When energy one timing, can punch by the mode of multiple-pulse punching, when such laser energy long duration of action is on workpiece, the edge in hole there will be fused mass, and hole wall is coarse, has re cast layer.
Summary of the invention
In order to solve the problems referred to above existed in laser boring, the utility model proposes a kind of optical beam forming apparatus in laser drilling device and method thereof, put forward high-octane utilization rate, drilling quality is meticulous, and without fused mass and re cast layer, hole wall is smooth.The purpose of this utility model is achieved through the following technical solutions:
A kind of optical beam forming apparatus, it comprises the laser instrument arranged successively along optical axis direction, a pair lens, a Dove prism, a plane mirror, a positive axis pyramid and a condenser lens; Distance between described lens is adjustable, in order to adjust spot size and the angle of divergence of laser emitting light beam; Described Dove prism is arranged in hollow shaft electric rotating machine, rotates centered by optical axis, also will along with rotation from the light beam of described Dove prism outgoing; Described plane mirror is used for the transmission direction of deflected beam; The position of described condenser lens on beam Propagation direction is adjustable, and the outgoing beam after described condenser lens is the hollow circular light beam of a branch of rotation.
The application of this kind of optical beam forming apparatus, the Energy distribution of the hollow circular light beam formed is in annular region, instead of be distributed in whole circular light spot, therefore energy density increases greatly, capacity usage ratio can be improved during for punching, and under the effect of lower laser single-pulse energy, can the quality of lifting hole.
Accompanying drawing explanation
Fig. 1 is the structure chart of the first optical beam forming apparatus of the utility model;
Fig. 2 is the schematic diagram of the hollow circular light beam that the utility model is formed;
Fig. 3 is the structure chart of the utility model the second optical beam forming apparatus;
Fig. 4 is the structure chart of the third optical beam forming apparatus of the utility model;
Fig. 5 is the structure chart of the utility model the 4th kind of optical beam forming apparatus;
Fig. 6 is the energy density distribution figure of the utility model laser emitting light beam;
Fig. 7 is the energy density distribution figure of the first hollow circular light beam formed to the 4th kind of optical beam forming apparatus of the utility model;
Fig. 8 is the structure chart of the utility model the 5th kind of optical beam forming apparatus;
Fig. 9 is the energy density distribution figure of the hollow circular light beam that the utility model the 5th kind of optical beam forming apparatus is formed;
In figure, the implication of each mark is as follows:
1, laser instrument
2, optical gate
31 lens 1
32, lens 2
4, Dove prism
41 wedges
42 wedges
5, plane mirror;
61, negative axle pyramid;
62, positive axis pyramid;
7, condenser lens;
81, the focal plane of condenser lens;
82, light beam acting surface
9, Gaussian beam shaping element
Detailed description of the invention
Below in conjunction with accompanying drawing, the utility model is described in detail:
As shown in Figure 1, the light beam of laser instrument 1 outgoing controls whether to continue transmission by optical gate 2.Distance between lens 31 and lens 32 is relatively adjustable, is used for adjusting the angle of divergence of laser exit beam and spot size.Dove prism 4 is arranged in hollow shaft electric rotating machine, allows Dove prism rotate R centered by optical axis, also will along with rotation from the light beam of Dove prism 4 outgoing.The laser beam rotated enters in plane mirror 5, and the direction of propagation of laser changes to vertical transmission.The laser beam of vertical transmission enters positive axis pyramid 62 and condenser lens 7, and outgoing beam is the annular beam of a branch of rotation, and as shown in Figure 2, the spot radius OS2 of annular beam, the increase along with propagation distance changes by Ring Width S1S2.The focal length of selective focus lens 7 and the position of surface of the work Range Focusing lens can be come according to the aperture of required punching.The focal plane of 81 expression condenser lenses 7,82 represent light beam acting surfaces, and be a certain cross section in direction of beam propagation, as shown in Figure 2, S1S2 and S3S4 represents the Ring Width of light beam to this cross section, and S2S3 is hollow area.Ring Width S1S2 and S3S4 of light beam can be adjusted by the relative distance between adjustment set of lenses 31 and 32.
Rotating mechanism shown in Fig. 1, Dove prism 4, also can replace with a pair wedge.As shown in Figure 3, light beam outgoing from lens 32 laggard enter wedge 41 and 42,41 all identical with size with the wedge angle of 42, Central Symmetry place, relative position is fixed, and is placed on together in hollow shaft electric rotating machine.Light beam, after 41 and 42 outgoing, will rotate centered by optical axis.
Shown in Fig. 1, from the increase along with transmission range of the annular beam of condenser lens 7 outgoing, its size is changing thereupon, therefore certain adjustable range is had to the aperture of machining hole, but when identical focal length, when surface of the work focal plane 81 is too far away, energy also can weaken, energy density declines, also can the size inaccuracy of causing hole, of poor quality.A positive axis pyramid 62 is had in Fig. 1, add a negative axle pyramid 61 again, as shown in Figure 4, the relative distance of negative axle pyramid 61 and positive axis pyramid 62 is adjustable, by adjusting the relative distance between 61 and 62, adjust the annular beam radius OS1 after focusing in conjunction with adjustment condenser lens 7 position in the direction of propagation of light, reach the object of adjustment spot size in real time.Equally, the relative distance adjusted between set of lenses 31 and 32 can adjust Ring Width S1S2 and S3S4 of light beam.Similarly, the Dove prism in Fig. 4 also can be replaced by a pair wedge, as shown in Figure 5.
As everyone knows, the energy density distribution of light beam on the cross section vertical with the direction of propagation of laser instrument 1 outgoing is Gaussian Profile, as shown in Figure 6.As above in Fig. 1,3,4 and 5 energy density distribution of the annular beam of outgoing as shown in Figure 7, the position that decentre is far away, energy reduce.Like this at the marginal position of machining hole, when laser energy is not enough, limit, hole can be made to occur fused mass, and hole wall quality is bad.Therefore add Gaussian beam shaping element wherein, the energy density distribution making light beam is flat-top, then the hole noenergy gradient difference processed, without fused mass and re cast layer, hole wall is smooth.As shown in Figure 8, add one piece of Gaussian beam shaping element 9 after plane mirror 5 in the diagram, then the energy density distribution of annular beam in the plane vertical with the direction of propagation of outgoing is flat-top, as shown in Figure 9.Above-mentioned Gauss beam reshaping can be realized by microlens array or diffraction optical element.
Take wavelength as the laser instrument of 1064nm be example, the focal length of the focus lamp used is 50mm, spot diameter before inciding focus lamp is that 10mm is (only for circular light spot in the present embodiment, but its shape is not limited to circle, can also be square or other shapes, normal beam incides Gaussian beam shaping element 5, the circular light spot of Gaussian characteristics is converted to the uniform flat-top hot spot of energy density, the shape of hot spot can be square, rectangle, the arbitrary shape such as linear or oval, select according to actual micro Process demand, these shapes are decided by the design of Gaussian beam shaping element), for the device shown in Fig. 1. when processing aperture is 100um, the girth in hole is 314um, if the movement velocity of platform is 20mm/s, the repetition rate of laser instrument is 1500Hz, the time then sending pulse is 0.67ms, if the rotating speed of hollow shaft motor is arranged on 1000 circles/s, then 1ms can complete the processing in a hole, and motion platform walks the circle of a 100um diameter, namely the time of processing needed for a hole is 15.7ms, improves decades of times from this respect time.
In addition, owing to adding flat-top shaping element, in conjunction with the rotation of hollow beam, compare with conventional apparatus, the hole wall obtained is smooth, without obvious fused mass and re cast layer.
The utility model does not do any pro forma restriction, every simple modification of carrying out according to technical spirit of the present utility model, and equivalent variations and modification, all still belong in the scope of technical solutions of the utility model.
Claims (8)
1. an optical beam forming apparatus, it comprises the laser instrument arranged successively along optical axis direction, a pair lens, a Dove prism, a plane mirror, a positive axis pyramid and a condenser lens; It is characterized in that the distance between described lens is adjustable, in order to adjust spot size and the angle of divergence of laser emitting light beam; Described Dove prism is arranged in hollow shaft electric rotating machine, rotates centered by optical axis, also will along with rotation from the light beam of described Dove prism outgoing; Described plane mirror is used for the transmission direction of deflected beam; The position of described condenser lens on beam Propagation direction is adjustable, and the outgoing beam after described condenser lens is the hollow circular light beam of a branch of rotation.
2. optical beam forming apparatus as claimed in claim 1, it is characterized in that described Dove prism is substituted by a pair wedge, the angle of two wedges and yardstick are all equal, Central Symmetry is placed and relative position is fixed, and be placed in hollow shaft electric rotating machine together, rotate centered by optical axis, also will along with rotation from the light beam of these two wedge outgoing.
3. optical beam forming apparatus as claimed in claim 1 or 2, is characterized in that also comprising the optical gate be arranged between described laser instrument and described a pair lens, and whether the outgoing beam for controlling described laser instrument continues transmission.
4. optical beam forming apparatus as claimed in claim 1 or 2, it is characterized in that also comprising the negative axle pyramid be arranged between described plane mirror and described positive axis pyramid, distance between described negative axle pyramid and described positive axis pyramid is adjustable, adjusts the spot size of described hollow circular light beam by adjusting distance between described negative axle pyramid and described positive axis pyramid and the position of described condenser lens on beam Propagation direction.
5. optical beam forming apparatus as claimed in claim 1 or 2, it is characterized in that also comprising the Gaussian beam shaping element be arranged between described plane mirror and described positive axis pyramid, the energy density distribution of outgoing beam on the cross section vertical with transmission direction of described laser instrument is Gaussian Profile, and the energy density distribution of described hollow circular light beam on the cross section vertical with transmission direction is the uniform flat-top distribution of energy density.
6. optical beam forming apparatus as claimed in claim 4, it is characterized in that also comprising the Gaussian beam shaping element be arranged between described plane mirror and described negative axle pyramid, the energy density distribution of outgoing beam on the cross section vertical with transmission direction of described laser instrument is Gaussian Profile, and the energy density distribution of described hollow circular light beam on the cross section vertical with transmission direction is the uniform flat-top distribution of energy density.
7. optical beam forming apparatus as claimed in claim 5, is characterized in that described Gaussian beam shaping element is microlens array or diffraction optical element.
8. optical beam forming apparatus as claimed in claim 6, is characterized in that described Gaussian beam shaping element is microlens array or diffraction optical element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420451389.7U CN204075509U (en) | 2014-08-04 | 2014-08-04 | Optical beam forming apparatus |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420451389.7U CN204075509U (en) | 2014-08-04 | 2014-08-04 | Optical beam forming apparatus |
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| CN204075509U true CN204075509U (en) | 2015-01-07 |
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| CN201420451389.7U Active CN204075509U (en) | 2014-08-04 | 2014-08-04 | Optical beam forming apparatus |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104148802A (en) * | 2014-08-04 | 2014-11-19 | 北京万恒镭特机电设备有限公司 | Beam forming device and method |
| CN106312331A (en) * | 2016-09-29 | 2017-01-11 | 长春理工大学 | Laser small-hole punching device based on Dove prism and method |
| CN106624355A (en) * | 2017-02-23 | 2017-05-10 | 常州特尔玛枪嘴有限公司 | Laser cutting head capable of regulating pot energy density distribution |
| CN106695116A (en) * | 2017-04-05 | 2017-05-24 | 东莞市盛雄激光设备有限公司 | Optical module and laser cutting device |
| CN107775187A (en) * | 2016-08-31 | 2018-03-09 | 上海微电子装备（集团）股份有限公司 | A kind of laser package apparatus and method |
| CN110609391A (en) * | 2019-02-14 | 2019-12-24 | 北京热刺激光技术有限责任公司 | Device for generating annular light beam |
| CN111168234A (en) * | 2018-11-11 | 2020-05-19 | 上海三克激光科技有限公司 | Light beam shaping system and method |
| CN112975159A (en) * | 2021-03-17 | 2021-06-18 | 武汉先河激光技术有限公司 | Laser cutting device of circumference cutting |
| CN117462243A (en) * | 2023-12-27 | 2024-01-30 | 中日友好医院(中日友好临床医学研究所) | Laser ablation probe |
-
2014
- 2014-08-04 CN CN201420451389.7U patent/CN204075509U/en active Active
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104148802B (en) * | 2014-08-04 | 2017-01-25 | 北京万恒镭特机电设备有限公司 | Beam forming device and method |
| CN104148802A (en) * | 2014-08-04 | 2014-11-19 | 北京万恒镭特机电设备有限公司 | Beam forming device and method |
| CN107775187A (en) * | 2016-08-31 | 2018-03-09 | 上海微电子装备（集团）股份有限公司 | A kind of laser package apparatus and method |
| CN106312331A (en) * | 2016-09-29 | 2017-01-11 | 长春理工大学 | Laser small-hole punching device based on Dove prism and method |
| CN106624355A (en) * | 2017-02-23 | 2017-05-10 | 常州特尔玛枪嘴有限公司 | Laser cutting head capable of regulating pot energy density distribution |
| CN106695116B (en) * | 2017-04-05 | 2018-08-28 | 东莞市盛雄激光设备有限公司 | A kind of optics module and laser cutting device |
| CN106695116A (en) * | 2017-04-05 | 2017-05-24 | 东莞市盛雄激光设备有限公司 | Optical module and laser cutting device |
| CN111168234A (en) * | 2018-11-11 | 2020-05-19 | 上海三克激光科技有限公司 | Light beam shaping system and method |
| CN110609391A (en) * | 2019-02-14 | 2019-12-24 | 北京热刺激光技术有限责任公司 | Device for generating annular light beam |
| CN112975159A (en) * | 2021-03-17 | 2021-06-18 | 武汉先河激光技术有限公司 | Laser cutting device of circumference cutting |
| CN112975159B (en) * | 2021-03-17 | 2022-11-22 | 武汉先河激光技术有限公司 | Laser cutting device of circumference cutting |
| CN117462243A (en) * | 2023-12-27 | 2024-01-30 | 中日友好医院(中日友好临床医学研究所) | Laser ablation probe |
| CN117462243B (en) * | 2023-12-27 | 2024-03-22 | 中日友好医院(中日友好临床医学研究所) | Laser ablation probe |
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| GR01 | Patent grant |