CN203696236U - Multi-light-beam shaping laser machining system - Google Patents
Multi-light-beam shaping laser machining system Download PDFInfo
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- CN203696236U CN203696236U CN201420062639.8U CN201420062639U CN203696236U CN 203696236 U CN203696236 U CN 203696236U CN 201420062639 U CN201420062639 U CN 201420062639U CN 203696236 U CN203696236 U CN 203696236U
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Abstract
The utility model discloses a multi-light-beam shaping laser machining system comprising a laser, a cylindrical concave lens, a cylindrical convex lens, a one-dimensional diffractive optical element and a focusing lens which are sequentially arranged in the direction of a laser light path. The multi-light-beam shaping laser machining system can improve the machining effect of common ultraviolet nanosecond laser equipment, and improve the machining efficiency.
Description
Technical field
The utility model relates to a kind of multiple beam shaping laser-processing system, is mainly used in fluting or cutting processing to chip.
Background technology
Market is more and more higher to the requirement of laser cutting chip quality, be mainly reflected in need to be less heat affected area, cutting speed etc. faster, in order to realize these requirements, there is the psec that pulsewidth is shorter, femtosecond is Ah second's laser instrument even, mainly to set about improving cutting effect from the aspect of change pulsewidth, but these laser instruments are mostly expensive, at present mostly use nanosecond ultraviolet laser for the laser equipment of retrofit on the market, price is well below above mentioned high-end laser instrument, but due to the restriction of optical texture, the more and more difficult processing needs that meet fine, want to realize retrofit, replacing laser instrument, improvement optical texture, and the cost that improves optical texture is relatively much smaller,
Utilizing laser to carry out all kinds of processing to sample is the modal technique of field of laser processing, traditional laser-processing system needs strengthen laser cut wide or often deepen when cutting-in by increase laser power, out of focus processing or repeatedly the technology mode such as line realize, cut wide or cutting-in although these modes can increase, can bring respectively and increase the problems such as the not good and efficiency in heat affected area, Cutting Road pattern is low;
The equipment or the article that utilize diffraction optical element to promote working (machining) efficiency occur, but this method is just divided into multi beam by beam of laser, reduce the energy of single beam, trail the mode of cutting by multiple beam and improve cutting effect, do not change in fact the Energy distribution of single laser focusing hot spot, and the Energy distribution of laser can affect cutting effect to a certain extent;
Existing another kind of beam shaping technique is to realize beam shaping by post set of lenses, also occur compared with equipment and the article of the strip focal beam spot of aspect ratio by obtaining, the starting point of this method is mainly to reduce heat affected area by reducing the power density of focal beam spot on long axis direction, but owing to only having beam of laser hot spot, consider the relation of power density and material damage threshold value, two ends energy on laser facula long axis direction is mainly that material is being heated, and there is no removal effect;
As shown in common one dimension diffraction optical element shaping light channel structure figure as left in Fig. 1, the laser beam 1A that laser instrument 1 sends, after beam expanding lens 2, obtain the new laser beam 2A through expanding, after one dimension diffraction optical element 5, obtain again the sub-laser beam 5A of multi beam, the laser beam beam splitting number of one dimension diffraction optical element 5 is different and different according to design load, schematic diagrames all in the utility model are all to be divided into three beams as example, but actual quantity defines according to claims the inside, the sub-laser beam 5A of multi beam focuses on and obtains multi beam focused beam through laser condensing lens 6, finally on the focal plane of focus lamp, obtain multiple circular laser faculas, these focal beam spots are focused on to the surface of sample 7 to be processed, and then realize a cutting in direction, the original state of schematic diagram is take cutting straight line in x direction as example.
Part optical element in left Fig. 1 figure is adjusted, for example, by one dimension diffraction optical element half-twist under the original state shown in the left figure of Fig. 1, just can obtain the one-dimensional focusing hot spot of arranging in y direction, thereby realize the straight cuts in y direction, the Reference numeral 5A` in Fig. 1 and 6A` represent respectively the focused beam before the sub-laser beam after the light splitting of one dimension diffraction optical element and laser condensing lens under this situation focus on.
Shown in the right figure of Fig. 2, be that wide light path schematic diagram is necessarily cut in common one dimension diffraction optical element shaping light path realization, wherein the left figure of Fig. 2 remains light path original state schematic diagram, when being less than while rotating one dimension diffraction optical element in the scope of 90 °, just can obtain and in x direction or y direction, there is certain projection and cut wide hot spot and distribute, realize the technique of similar laser fluting, the Reference numeral 5A`` in Fig. 2 and 6A`` represent respectively the focused beam before the sub-laser beam after the light splitting of one dimension diffraction optical element and laser condensing lens under this situation focus on.
Utility model content
The utility model object is: for the problems referred to above, provide a kind of multiple beam shaping laser-processing system, to improve the processing effect of common ultraviolet nanosecond laser process equipment, improve working (machining) efficiency.
The technical solution of the utility model is: a kind of multiple beam shaping laser-processing system, comprises laser instrument, cylindrical concave lens, cylindrical convex lens, one dimension diffraction optical element and the condenser lens arranged successively along laser optical path direction.
As preferably, the image space virtual focus of described cylindrical concave lens overlaps with the object space real focus of described cylindrical convex lens.
As preferably, between described laser instrument and cylindrical concave lens, be furnished with beam expanding lens.
As preferably, described beam expanding lens expand multiplying power between 1～4 times.
As preferably, described laser instrument is ultraviolet nanosecond laser.
As preferably, the focal length absolute value of described cylindrical convex lens is 1.1～1.3 times of focal length absolute value of described cylinder concave and convex lenses.
As preferably, the light splitting number of described one dimension diffraction optical element is between 4～14.
As another kind of optimal way, the light splitting number of described one dimension diffraction optical element is between 2～6.
As preferably, the beam separation angle of described one dimension diffraction optical element is between 0.005 °～0.1 °.
The utility model has the advantages that:
1, the utility model is this multiple beam shaping laser-processing system, one group of post lens---cylindrical concave lens and cylindrical convex lens in traditional multiple beam light channel structure, are increased, thereby can be according to the different distances between appropriately change cylindrical concave lens and cylindrical convex lens that needs, the final multiple elliptical laser hot spots that obtain different-shape and different distributions on the focal plane of laser condensing lens, and then realize shaping, not only can improve Laser Processing effect, can also improve working (machining) efficiency.With respect to more early stage single Gauss's circular light spot laser system of processing, the utility model, except having increased by one group of number lens---cylindrical concave lens and cylindrical convex lens, has also increased one dimension diffraction optical element.
2, because the utility model be this multiple beam shaping laser-processing system can integral-rotation post set of lenses, so can obtain in any direction in theory identical laser facula pattern and relative position distribution, need to cut the mode of after x direction, chip half-twist being cut again than equipment component in prior art, the utility model can obtain identical laser facula pattern and identical relative position distribution at x and y direction.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is further described:
Figure 1 shows that wherein a kind of one dimension hot spot relative position distribution figure of common multiple beam orthopedic systems, be mainly used in obtaining thinner line of cut in x direction or y direction;
Figure 2 shows that another one dimension hot spot relative position distribution figure of common multiple beam orthopedic systems, be mainly used in necessarily cutting wide line of cut in x direction or the acquisition of y direction;
Fig. 3 left side is depicted as the light channel structure schematic diagram that the utility model uses, suppose that original laser hot spot relative position is as shown in left figure, according to the described method of mark, can obtain the new laser facula shown in the right figure of Fig. 3 and distribute, thereby can realize narrow and dark y to cutting; The parts that in figure, empty wire frame representation is rotated;
Fig. 4 left side is depicted as the light channel structure schematic diagram that the utility model uses, suppose that original laser hot spot relative position is as shown in left figure, according to the described method of mark, can obtain the new laser facula shown in the right figure of Fig. 4 and distribute, thereby can realize narrow and dark x to cutting;
Fig. 5 left side is depicted as the light channel structure schematic diagram that the utility model uses, suppose that original laser hot spot relative position is as shown in left figure, according to the described method of mark, can obtain the new laser facula shown in the right figure of Fig. 5 and distribute, necessarily cut wide y to grooving processes thereby can realize;
Fig. 6 left side is depicted as the light channel structure schematic diagram that the utility model uses, suppose that original laser hot spot relative position is as shown in left figure, according to the described method of mark, can obtain the new laser facula shown in the right figure of Fig. 6 and distribute, necessarily cut wide x to grooving processes thereby can realize;
Figure 7 shows that the Laser Focusing hot spot that common one dimension diffraction optical element shaping light path obtains is rule in x direction, the schematic diagram of diced chip sample, in figure, arrow represents machine direction, Reference numeral 20 represents the functional areas of chip, Reference numeral 21 represents the Cutting Road position of chip, and Reference numeral 22 represents the cut channel after laser cutting;
Figure 8 shows that Laser Focusing hot spot that common one dimension diffraction optical element shaping light path obtains on chip in the x-direction on the schematic diagram of line, diced chip sample, in figure, arrow represents machine direction;
Figure 9 shows that the Laser Focusing hot spot that common one dimension diffraction optical element shaping light path obtains cuts the schematic diagram of certain live width in x direction, for example grooving processes, in figure, arrow represents machine direction;
Figure 10 shows that the Laser Focusing hot spot that common one dimension diffraction optical element shaping light path obtains cuts the schematic diagram of certain live width in y direction, for example grooving processes, in figure, arrow represents machine direction;
Shown in Figure 11, be that the Laser Focusing hot spot that multiple beam shaping laser-processing system of the present utility model obtains is rule in x direction, the schematic diagram of diced chip sample, in figure, arrow represents machine direction, Reference numeral 20 represents the functional areas of chip, Reference numeral 21 represents the Cutting Road position of chip, and Reference numeral 22 represents the cut channel after laser cutting;
Shown in Figure 12, be that the Laser Focusing hot spot that multiple beam shaping laser-processing system of the present utility model obtains is rule in y direction, the schematic diagram of diced chip sample, in figure, arrow represents machine direction; .
Shown in Figure 13, be that the Laser Focusing hot spot that multiple beam shaping laser-processing system of the present utility model obtains cuts the schematic diagram of certain live width in x direction, for example grooving processes, in figure, arrow represents machine direction;
Shown in Figure 14, be that the Laser Focusing hot spot that multiple beam shaping laser-processing system of the present utility model obtains cuts the schematic diagram of certain live width in y direction, for example grooving processes, in figure, arrow represents machine direction.
Wherein: 1-laser instrument, 2-beam expanding lens, 3-cylinder concave and convex lenses, 4-cylindrical convex lens, 5-one dimension diffraction optical element, 6-condenser lens, 7-material to be processed.
The specific embodiment
Embodiment: Fig. 3～Fig. 6 has shown a specific embodiment of this multiple beam shaping of the utility model laser-processing system.As shown in Figure 3, this multiple beam shaping laser-processing system comprises laser instrument 1, beam expanding lens 2, cylindrical concave lens 3, cylindrical convex lens 4, one dimension diffraction optical element 5 and the condenser lens 6 arranged successively along laser optical path direction.Wherein the effect of beam expanding lens 2 is mainly the diameter in order to change light beam, certainly the angle of divergence of the laser beam after beam expanding lens expands also can be dwindled to some extent, but the laser beam divergence of at present large multi-laser has all been controlled smallerly, if the original laser beam diameter that laser instrument 1 sends is large (being greater than 5mm) enough, so just do not need to arrange this beam expanding lens 2.The multiplying power that expands of beam expanding lens 2 is typically chosen between 1～4 times, if multiplying power is too large, is unfavorable for the actual debugging of subsequent optical parts; In the time selecting 1 times to expand according to actual needs, be equivalent to not use beam expanding lens.
Visible, the key difference of the light channel structure of this multiple beam shaping of the present embodiment laser-processing system and traditional one dimension diffraction optical element shaping light channel structure is: between laser instrument 1 and one dimension diffraction optical element 5, be provided with the post set of lenses being made up of cylindrical concave lens 3 and cylindrical convex lens 4.
When work, the original laser beam 1A that laser instrument 1 sends obtains diameter and becomes large new laser beam 2A after beam expanding lens 2, new laser beam 2A is mapped on cylindrical concave lens 3, and this cylindrical concave lens 3 can be dispersed laser beam in one direction, keeps original transmitted characteristic constant in another direction.Laser beam after cylindrical concave lens 3 shapings passes through described cylindrical convex lens 4 again, the relative position of cylindrical concave lens 3 and cylindrical convex lens 4 is appropriately set, can from the exit facet of cylindrical convex lens 4 obtain one in one direction size do not change and with the perpendicular another one direction of aforementioned direction the collimation collimated light beam that expanded, the Cross Section Morphology of this collimated light beam becomes ellipse by initial circle, and oval ratio of semi-minor axis length depends on the parameter matching of cylindrical concave lens 3 and cylindrical convex lens 4.The collimation elliptical laser bundle with certain axial ratio incides on one dimension diffraction optical element 5, the object of one dimension diffraction optical element 5 is that incident laser is gone out to be shot out according to quantity and the angle of departure of design, the elliptical laser bundle that collimates outgoing from cylindrical convex lens 4 is divided into the oval-shaped beamlet of multi beam after one dimension diffraction optical element 5, these beamlets are with respect to the laser beam inciding on one dimension diffraction optical element, just variant on the direction of propagation and energy.There is the sub-laser beam incident of elliptical shape to laser condensing lens, according to Gauss's hot spot computing formula, laser spot diameter and launching spot diameter after focusing on are inversely proportional to, so oval launching spot also can obtain the Laser Focusing hot spot of an oval pattern after focus lamp 6 focuses on focal plane, laser condensing lens 6 focuses on these focal beam spots on the surface of material 7 to be processed so that material is processed.Visible, the post set of lenses that cylindrical concave lens 3 and cylindrical convex lens 4 form and one dimension diffraction optical element have all been realized the shaping dissimilar to laser.The post set of lenses forming by rotating one dimension diffraction optical element or integral-rotation cylindrical concave lens 3 and cylindrical convex lens 4, can change the Energy distribution of focal beam spot on material 7 to be processed, for the process requirements of different materials.
The left figure of Fig. 3 is depicted as the light channel structure schematic diagram of the multiple beam shaping laser-processing system that the utility model uses, initial configuration using the framework arrangement as shown in figure as left in Fig. 3 as the related laser-processing system of the utility model, the original laser beam 1A that laser instrument 1 sends obtains the new laser beam 2A expanding after beam expanding lens 2, after cylindrical concave lens 3, obtain dispersing in a direction and laser beam that another direction remains unchanged, this laser beam is again after cylindrical convex lens 4, adjusting under the confocal prerequisite of cylindrical concave lens 3 and cylindrical convex lens 4, can obtain from the exit facet of cylindrical convex lens 4 collimated laser beam of oval topographic profile, collimated light beam after the shaping of post set of lenses enters to inject one dimension diffraction optical element 5, obtain the sub-laser beam 5A of multi beam, this a little laser beam still has oval shape characteristic, this a little laser beam incides on laser condensing lens 6 again, the final Laser Focusing hot spot that obtains multiple oval patterns on the focal plane of laser condensing lens 6, these focal beam spots are focused on material 7 to be processed and can realize processing, and due to hot spot has been carried out to shaping, cutting speed also can get a promotion, wherein Reference numeral 6A represents the laser focusing bundle before focusing.
The right figure of Fig. 3 is depicted as the schematic diagram that utilizes the utility model laser-processing system to realize the cutting of y direction line.Be mainly on the basis shown in the left figure of Fig. 3 by one dimension diffraction optical element 5 half-twists, just can make multiple focal beam spots arrange along y direction, and the major axis of each oval focal beam spot is parallel to y direction.This form just can obtain narrow line of cut or narrow and dark line of cut in y direction, and due to hot spot has been carried out to shaping, cutting speed also can get a promotion.Wherein Reference numeral 5B represents to rotate the spatially sub-laser beam of new multi beam of redistribution obtaining after one dimension diffraction optical element, and Reference numeral 6B represents the laser focusing bundle before poly-6 Jiao of 5B focus lamp.
The right figure of Fig. 4 is depicted as the schematic diagram that utilizes laser-processing system of the present utility model to realize the cutting of x direction line.Mainly 90 ° of the post set of lenses integral-rotations that on the basis shown in the left figure of Fig. 4, cylinder concave and convex lenses 3 and cylindrical convex lens 4 formed, multiple focal beam spots are arranged along x direction, and each single focal beam spot major axis is parallel to x direction, this form just can obtain narrow line of cut or narrow and dark line of cut in x direction, and due to hot spot has been carried out to shaping, cutting speed also can get a promotion.Wherein Reference numeral 5C represents the spatially sub-laser beam of new multi beam of redistribution obtaining after integral-rotation post set of lenses, and Reference numeral 6C represents the laser focusing bundle of 5C before focus lamp focuses on.
The right figure of Fig. 5 is depicted as and utilizes laser-processing system of the present utility model to realize y direction line to cut the schematic diagram of certain live width, for example lbg technique.Mainly on the basis shown in the left figure of Fig. 5, to be less than in the scope of 90 ° to rotate one dimension diffraction optical element 5, just can obtain a new focal beam spot distribution form: the line that the geometric center of each focal beam spot links up had both been not parallel to x axle, also be not parallel to y axle, and the angle of x axle or y axle is between 0 ° to 90 °, and under original state, rotate one dimension diffraction optical element and do not change the major and minor axis distribution arrangement of single focal beam spot.The major axis that light path shown in the right figure of Fig. 5 distributes due to focal beam spot is along y direction, so the rate of exchange are adapted at slotting in y direction, and due to hot spot has been carried out to shaping, cutting speed also can get a promotion.Wherein Reference numeral 5D represents to rotate the spatially sub-laser beam of new multi beam of redistribution obtaining after one dimension diffraction optical element, and Reference numeral 6D represents the laser focusing bundle of 5D before focus lamp focuses on.
The right figure of Fig. 6 is depicted as and utilizes laser-processing system of the present utility model to realize x direction line to cut the schematic diagram of certain live width, for example lbg technique.Mainly on the basis shown in the left figure of Fig. 6, in the scope that is less than 90 °, rotate one dimension diffraction optical element, the post set of lenses that integral-rotation is made up of cylinder concave and convex lenses 3 and cylindrical convex lens 4 simultaneously, just can obtain a new focal beam spot distributes: the line that the geometric center of each focal beam spot links up had both been not parallel to x axle, also be not parallel to y axle, and the angle of x axle or y axle is between 0 ° to 90 °, and can change the major and minor axis distribution arrangement of single focal beam spot by integral-rotation post set of lenses.Light path shown in the right figure of Fig. 6 distributes because the major axis of focal beam spot distributes (parallel with x direction) along x direction, thus be relatively adapted at slotting in x direction, and due to hot spot has been carried out to shaping, cutting speed also can get a promotion.Wherein Reference numeral 5E represents to rotate the spatially sub-laser beam of new multi beam of redistribution obtaining after one dimension diffraction optical element and integral-rotation post set of lenses, and Reference numeral 6E represents the laser focusing bundle of 5E before focus lamp focuses on.
Therefore,
In the optical system that the utility model relates to, increase by one group of post lens---cylindrical concave lens 3 and cylindrical convex lens 4, regulation is positive direction along the light path direction of propagation, the focal length of supposing cylindrical concave lens is-f, the focal length of cylindrical convex lens is chosen between 1.1f-3.0f, by adjusting the relative distance between cylindrical concave lens and cylindrical convex lens, can obtain from the exit facet of cylindrical convex lens the laser beam of a preliminary shaping, this laser beam in one direction, be assumed to x direction, laser beam in x direction does not change on diameter than the laser beam after beam expanding lens, and be collimation outgoing, and this post set of lenses does not have shaping effect for laser beam in this direction, but in vertical with it direction, be assumed to y direction, laser beam in y direction can be organized post lens by this and change propagation characteristic, by adjusting the distance between cylindrical concave lens and cylindrical convex lens, can obtain one from the exit facet of cylindrical convex lens converges in y direction, the laser beam of dispersing or collimating, according to different needs can appropriately change distance between these group post lens obtain the focal beam spot of different-shape.
The important optics of another one of using in the utility model is one dimension diffraction optical element, function is that original laser beam is upwards separated at one-dimensional square according to the angle of departure of design and specific quantity, post set of lenses can be by a relatively large margin to the shaping of light beam reduction cutting time heat affected area, and one dimension diffraction optical element obtains the method for multiple focal beam spots by isolating multiple laser beams, not only can further reduce heat affected area, can also greatly improve process velocity.
Instantly the use of one dimension diffraction optical element has slowly started to popularize, the important parameter of this element comprises beam separation angle and light splitting number etc., wherein light splitting number depends primarily on the power of LASER Light Source and needed maximum is cut cutting-ins wide or that need, and beam separation angle can affect cutting effect.
In the time that the wide requirement of cutting of sample to be processed is wider or cutting-in requirement is darker, just need more light splitting number, defining alphabetical n is light splitting number, certainly narrowly cut wide or shallow cutting-in and all mean relatively low laser general power, so reduced the requirement to laser power, in the utility model, consider that the groove width of current common chip requirement is between 20um-80um, so select light splitting number between 4 to 14, light splitting number is cannot meet to cut wide requirement very little, when light splitting number is too many, because the general power of laser instrument is limited, the power that every bundle beamlet obtains will tail off, the effect of material is removed in the cutting just losing in the time that the power density of every bundle laser beam is less than the damage threshold of sample to be processed,
When customer requirement is narrow while cutting wide, deep dark and less heat affected area, need to cut by multiple beam and to a line, and we find for this requirement, the divided beams number of one dimension diffraction optical element is better between 2-6, and divided beams is just there is no spectrophotometric result at 1 o'clock at all, when light splitting number is too many, intensification to cutting-in does not almost help, can increase on the contrary heat affected area, and the requirement of meaningless increase to laser instrument due to the increase of light splitting number, and then improve equipment cost.
In the time that reality is used, in order to obtain the very elliptical shaped laser spot of standard, preferably the image space virtual focus of described cylindrical concave lens 3 is adjusted to the object space real focus of described cylindrical convex lens 4 and overlapped.
The size at beam separation angle can affect cutting effect, in this statement, except indicating especially, in the utility model, all beam separation angles of mentioning all refer to the angles between the sub-laser beam of adjacent two bundle after one dimension diffraction optical element separates, and define alphabetical β beam separation angle for this reason, in the utility model, define beam separation angle between 0.005 °-0.1 °, beam separation angle too hour, laser facula after condenser lens just can not effectively spatially separate, when requiring necessarily to cut when wide, cut wide adjustable scope just very limited, or when needs are by multiple beam and to a line and when identical with cut direction, can cause because the distance between adjacent luminous point is too short first luminous point not have time enough to remove material, reduce working (machining) efficiency, in the time that beam separation angle is too large, laser spot center distance after line focus mirror focuses on is too large, can be because adjacent laser point difference in time and affect cutting pattern be applied on material time in cutting, or working as need to be by multiple beam and to a line, and when identical with cut direction, can be because the distance between adjacent laser point is oversize, material after being used for a long time by first laser point just by next laser point effect, reduce cutting efficiency, also can greatly affect cutting effect.
Wherein a kind of embodiment imbody of the present utility model is as follows, laser instrument 1 is selected the ultraviolet pulse laser of 355nm, the focal length of cylindrical concave lens is-25mm, the focal length of cylindrical convex lens is chosen as 50mm, distance between cylindrical concave lens and cylindrical convex lens plane is about 19mm, the focal length of laser condensing lens is about 50mm, processed material is the naked silicon chip of thickness 120um, in the time carrying out line cutting, the one dimension diffraction optical element for 1X4 of selecting, in the time carrying out similar laser grooving processes, what select is the one dimension diffraction optical element of 1X7.
Certainly, above-described embodiment is only explanation technical conceive of the present utility model and feature, and its object is to allow people can understand content of the present utility model and implement according to this, can not limit protection domain of the present utility model with this.All equivalent transformations doing according to the Spirit Essence of the utility model main technical schemes or modification, within all should being encompassed in protection domain of the present utility model.
Claims (9)
1. a multiple beam shaping laser-processing system, is characterized in that: it comprises laser instrument (1), cylindrical concave lens (3), cylindrical convex lens (4), one dimension diffraction optical element (5) and the condenser lens (6) arranged successively along laser optical path direction.
2. multiple beam shaping laser-processing system according to claim 1, is characterized in that: the image space virtual focus of described cylindrical concave lens (3) overlaps with the object space real focus of described cylindrical convex lens (4).
3. multiple beam shaping laser-processing system according to claim 1, is characterized in that: between described laser instrument (1) and cylindrical concave lens (3), be furnished with beam expanding lens (2).
4. multiple beam shaping laser-processing system according to claim 2, is characterized in that: described beam expanding lens (2) expand multiplying power between 1～4 times.
5. multiple beam shaping laser-processing system according to claim 1, is characterized in that: described laser instrument (1) is ultraviolet nanosecond laser.
6. multiple beam shaping laser-processing system according to claim 1, is characterized in that: the focal length absolute value of described cylindrical convex lens (4) is 1.1～1.3 times of focal length absolute value of described cylinder concave and convex lenses (3).
7. multiple beam shaping laser-processing system according to claim 1, is characterized in that: the light splitting number of described one dimension diffraction optical element (4) is between 4～14.
8. multiple beam shaping laser-processing system according to claim 1, is characterized in that: the light splitting number of described one dimension diffraction optical element (4) is between 2～6.
9. multiple beam shaping laser-processing system according to claim 1, is characterized in that: the beam separation angle of described one dimension diffraction optical element (4) is between 0.005 °～0.1 °.
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103846547A (en) * | 2014-02-12 | 2014-06-11 | 苏州兰叶光电科技有限公司 | Multi-beam shaping laser processing system |
| CN104174994A (en) * | 2014-07-31 | 2014-12-03 | 北京万恒镭特机电设备有限公司 | Light-splitting device and method |
| CN105127150A (en) * | 2015-08-14 | 2015-12-09 | 四川大学 | Laser cleaning system based on robot control and cleaning method thereof |
| CN105234560A (en) * | 2015-09-30 | 2016-01-13 | 厦门市三安光电科技有限公司 | Cutting method for semiconductor chips |
| CN107242904A (en) * | 2017-07-19 | 2017-10-13 | 重庆半岛医疗科技有限公司 | A kind of beam homogenizing therapeutic system |
| CN108544107A (en) * | 2018-04-26 | 2018-09-18 | 苏州福唐智能科技有限公司 | A kind of laser hole drilling system and its boring method that drilling efficiency can be improved |
| CN109175729A (en) * | 2018-09-30 | 2019-01-11 | 大族激光科技产业集团股份有限公司 | A kind of laser cutting system and method for epoxy resin case chip |
| CN109352184A (en) * | 2018-10-23 | 2019-02-19 | 深圳赛意法微电子有限公司 | The beam splitting laser cutting method of silicon-based wafer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103846547A (en) * | 2014-02-12 | 2014-06-11 | 苏州兰叶光电科技有限公司 | Multi-beam shaping laser processing system |
| CN104174994A (en) * | 2014-07-31 | 2014-12-03 | 北京万恒镭特机电设备有限公司 | Light-splitting device and method |
| CN105127150A (en) * | 2015-08-14 | 2015-12-09 | 四川大学 | Laser cleaning system based on robot control and cleaning method thereof |
| CN105127150B (en) * | 2015-08-14 | 2017-12-15 | 四川大学 | A kind of laser cleaning system and its cleaning method based on robot control |
| CN105234560A (en) * | 2015-09-30 | 2016-01-13 | 厦门市三安光电科技有限公司 | Cutting method for semiconductor chips |
| CN107242904A (en) * | 2017-07-19 | 2017-10-13 | 重庆半岛医疗科技有限公司 | A kind of beam homogenizing therapeutic system |
| CN108544107A (en) * | 2018-04-26 | 2018-09-18 | 苏州福唐智能科技有限公司 | A kind of laser hole drilling system and its boring method that drilling efficiency can be improved |
| CN109175729A (en) * | 2018-09-30 | 2019-01-11 | 大族激光科技产业集团股份有限公司 | A kind of laser cutting system and method for epoxy resin case chip |
| CN109352184A (en) * | 2018-10-23 | 2019-02-19 | 深圳赛意法微电子有限公司 | The beam splitting laser cutting method of silicon-based wafer |
| CN109352184B (en) * | 2018-10-23 | 2021-02-09 | 深圳赛意法微电子有限公司 | Beam splitting laser cutting method for silicon-based wafer |
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