CN106842587B - The diffraction optical method realizes the shaping of Gaussian light into ultra-fine linear uniform light spots with ultra-high length-width ratio - Google Patents
The diffraction optical method realizes the shaping of Gaussian light into ultra-fine linear uniform light spots with ultra-high length-width ratio Download PDFInfo
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- CN106842587B CN106842587B CN201510875267.XA CN201510875267A CN106842587B CN 106842587 B CN106842587 B CN 106842587B CN 201510875267 A CN201510875267 A CN 201510875267A CN 106842587 B CN106842587 B CN 106842587B
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- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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Abstract
The invention relates to a novel light path for shaping Gaussian light into superfine linear light spots with high length-width ratio by using a flat-top light diffraction optical element. The light path structure of the laser comprises a flat top light element, a ball lens and a cylindrical lens in sequence along the laser propagation direction. And obtaining the flat-top optical element, the ball lens and the cylindrical lens with corresponding specifications according to the laser source parameters and the target line light spot parameters, and obtaining the optimal working distance. The diffraction method has the advantages of simple and light structure, high light energy utilization rate, high design freedom degree and uniform light beam energy.
Description
Technical Field
The invention provides a novel optical path structure for shaping Gaussian light into superfine linear light spots with high length-width ratio by using a flat-top light diffraction optical element.
Background
In the laser processing industry, especially the laser cutting industry, increasingly high requirements are provided for the quality of light beams, on one hand, fine processing requires that light spots are increasingly small, on the other hand, the requirements for the uniformity of light beam energy are increasingly high, and on the other hand, requirements for various light spot forms are provided. Among them, linear light spots are increasingly used in fields such as glass integral cutting. In laser three-dimensional sensing systems, line structured illumination, also known as "light knives", is used to measure the depth of points on the surface of an object.
There are many methods for generating the line light spot, and there are typical methods of combining a cylindrical mirror and a spherical mirror, and other methods include diffraction method and rotating mirror scanning method. Commercial light knife projectors produce line light with a minimum line width of about 0.1mm at a distance of about 100mm, with the minimum line width of the spot increasing as the projected distance increases.
The diffraction method has the advantages of simple and light structure, high light energy utilization rate, high design freedom degree and uniform light beam energy. The invention designs a flat-top optical element capable of generating light spots with uniform energy distribution by using a diffraction optical method, and combines the traditional optical elements of a ball lens and a cylindrical lens to obtain an ultra-fine linear uniform light spot with the length-width ratio of more than 1000 and the line width of less than 15 mu m.
Disclosure of Invention
A new optical path for shaping Gaussian light into a very fine linear spot with a high aspect ratio by using a flat-top light diffraction optical element. The light path structure of the laser comprises a flat top light element, a ball lens and a cylindrical lens in sequence along the laser propagation direction.
Firstly, according to the laser source parameters and the target line light spot parameters, a flat-top optical element, a ball lens and a cylindrical lens with corresponding specifications are obtained, and the optimal working distance is obtained.
The second step is that: the laser beam is expanded and collimated, and the requirement of a flat-top optical element on incident light is met.
The third step: a light path is constructed according to a design scheme, and a flat-top optical element, a ball lens and a cylindrical lens are sequentially arranged in the light path along the laser emitting direction.
The fourth step: and observing the distribution of light spots at the focal length F of the focusing element, and debugging the distance of an image plane until the required light spots are obtained.
Drawings
The following are described separately:
fig. 1 is an optical path diagram of the embodiment of the present patent disclosure, and the width of the linear light spot on the image plane is changed by adjusting the working distance L.
Fig. 2 is a plan view of a measured energy distribution of a linear uniform spot of 10mm in length and 15 μm in width, as achieved using the embodiments of the present patent disclosure.
Fig. 3 is a three-dimensional plot of the measured energy distribution of a linear uniform spot of 10mm in length and 15 μm in width, as achieved using the embodiments of the present patent disclosure.
Detailed Description
The flat-top optical element is matched with other traditional optical elements, including a ball lens, a cylindrical lens and a beam expanding collimating lens, so as to realize ultra-fine linear uniform light spots.
The specific implementation comprises the following steps:
1. the flat-top optical element, the ball lens and the cylindrical lens are selected and the distance between the flat-top optical element, the ball lens and the cylindrical lens is selected according to the incident light parameters (including wavelength, beam waist diameter and divergence angle) and the parameters of the linear light spot which needs to be obtained finally (light spot size, length-width ratio, working distance and the like).
2. And (4) debugging the light path according to a design scheme to obtain the required light spot at a proper working distance.
Examples and effects
Example 1 a linear uniform spot of 10mm in length and 15 μm in width was achieved.
There is a laser incident light source with wavelength λ and beam waist diameter D to achieve a linear uniform spot with length L0 and width W.
First step to obtain the best results, consider a flat top shaping element and a ball lens with focal length F and a cylindrical lens with focal length F.
The second step is that: the laser beam is expanded and collimated, and the requirement of a flat-top optical element on incident light is met.
The third step: a light path is constructed according to a design scheme, and a flat-top optical element, a ball lens and a cylindrical lens are sequentially arranged in the light path along the laser emitting direction.
The fourth step: and observing the distribution of light spots at the focal length F of the focusing element, and debugging the distance of an image plane until the required light spots are obtained.
The actually obtained light spots are shown in fig. 2 and fig. 3.
Claims (5)
1. A light path structure for shaping Gaussian light into superfine linear light spots with high length-width ratio by utilizing a flat-top light diffraction optical element only comprises the flat-top light element, a ball lens with a focal length of F and a cylindrical lens with a focal length of F along the laser propagation direction;
firstly, according to laser source parameters and target line light spot parameters, obtaining a flat-top optical element, a ball lens and a cylindrical lens with corresponding specifications, and obtaining an optimal working distance L;
the second step is that: expanding and collimating the laser beam to meet the requirement of a flat-top optical element on incident light;
the third step: building a light path according to a design scheme, wherein a flat-top light element, a ball lens and a cylindrical lens are sequentially arranged in the light path along the laser emergent direction;
the fourth step: and observing the distribution of light spots at the focal length F of the focusing element, and debugging the distance of an image plane until the required light spots are obtained, thereby obtaining the ultra-fine linear uniform light spots with the length-width ratio of more than 1000 and the line width of less than 15 mu m.
2. The optical circuit structure according to claim 1, wherein the material of the optical flat top diffraction element is quartz glass, ordinary glass, or ZnSe.
3. An optical circuit structure as claimed in claim 1, wherein the laser source parameters include wavelength, beam waist diameter, and divergence angle.
4. An optical path structure as claimed in claim 1, characterized in that the target spot parameters include spot length, width, working distance.
5. The optical circuit structure of claim 1, wherein the parameters of the ball lens and the cylindrical lens include focal length and relative position.
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| CN201510875267.XA CN106842587B (en) | 2015-12-04 | 2015-12-04 | The diffraction optical method realizes the shaping of Gaussian light into ultra-fine linear uniform light spots with ultra-high length-width ratio |
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| CN107329276A (en) * | 2017-09-01 | 2017-11-07 | 中国电子科技集团公司第三十八研究所 | A kind of wide spectrum optical reshaper based on cascade diffraction optical element and preparation method thereof |
| CN108120666A (en) * | 2017-11-07 | 2018-06-05 | 山东卓越生物技术股份有限公司 | For the Optical devices of blood cell analysis |
| CN107861250A (en) * | 2017-11-27 | 2018-03-30 | 中国科学院上海光学精密机械研究所 | Light-beam forming unit and regulation and control method based on dispersion grating |
| CN110190491A (en) * | 2019-07-02 | 2019-08-30 | 中国工程物理研究院激光聚变研究中心 | A kind of injection seeded formula Terahertz parameter generator |
| CN111240009B (en) * | 2019-12-31 | 2020-12-29 | 嘉兴驭光光电科技有限公司 | Diffractive optical element capable of projecting oblique lines, projection device and design method thereof |
| CN111665581B (en) * | 2020-05-12 | 2021-10-12 | 杭州驭光光电科技有限公司 | Optical device, projection apparatus including the same, and linear projection method |
| CN115487328B (en) * | 2022-08-02 | 2024-03-12 | 郑州大学 | USP laser inactivating device stirring system based on acoustic standing wave principle |
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