KR101928264B1 - Laser beam shaping apparatus - Google Patents

Abstract

The present invention is characterized in that a laser deformed beam is incident on one side so as to be optically connected via a laser deformed beam of a beam forming optical system facing a laser light source unit, Shaped beam of the laser engraved beam, and a plurality of laser engraved beams are moved in the other direction (or the X-axis) orthogonal to one direction and the plurality of laser engraved beams are moved in the other direction And a beam operating optical system for forming a plurality of laser-adjusted shaped beams arranged and emitted.

Description

[0001] LASER BEAM SHAPING APPARATUS [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser beam forming apparatus for irradiating a laser beam onto a machined surface of a workpiece from a laser light source unit and more particularly to a laser beam shaping apparatus for irradiating a laser source shape beam of a gaseous- The present invention relates to a laser beam forming apparatus for forming a laser beam on a work surface of a workpiece by forming a laser beam on a workpiece and forming a laser beam on the work.

2. Description of the Related Art Generally, in a manufacturing method of a light emitting diode (LED), a laser lift off (LLO) process for separating an insulating film (GaN film or AlN film) from a sapphire substrate, a thin film transistor liquid crystal display (Liquid Crystal Display) -LCD (Liquid Crystal Display) method, an Eximer laser beam or a Diode Pumped Solid State (DPSS) laser beam is used for the crystallization process of the amorphous silicon layer after deposition of the amorphous silicon layer on the glass substrate do.

In this case, the Eximer laser beam or the DPSS laser beam must be irradiated with a high-energy laser beam on the processed surface of the workpiece in a short period of time. To this end, the Eximer laser beam or the DPSS laser beam is irradiated with a beam spot It should be shaped to form a flat-top profile that reduces the size and keeps the beam intensity (or beam intensity) constant in a direction perpendicular to the direction of travel of the beam so that it can easily be homogenized .

Since the Eximer laser beam or the DPSS laser beam is shaped into a gaussian profile and the beam intensity is small according to the distance from the beam center, the Eximer laser beam or the DPSS laser beam can be used as a flat- To provide a beam spot of small size and to irradiate the work surface of the workpiece with high energy through a small beam spot.

According to knowledge known in the art, the smaller the beam quality factor (M ² ) associated with the beam divergence of the laser, the smaller the beam diameter to be focused on the lens, and the smaller the beam diameter (spot size or beam the additional optical system shapes the raw laser beam emitted from the light source into a line beam and directs the laser beam to divergence of the original laser beam through the line beam The line beam is divided into a predetermined size, and the horizontal axis and the vertical axis of the divided line beam are rearranged to reduce the beam diameter.

Korean Patent Publication No. 10-2015-0082119

SUMMARY OF THE INVENTION The present invention has been conceived in order to solve the conventional problems, and it is an object of the present invention to provide a laser optical system for forming a line beam of high density energy, which comprises a homogenizer The present invention provides a laser beam shaping apparatus suitable for collimating a beam of uniform intensity conforming to a laser optical system and beam focusing easily on a lens-by-lens basis in a Y-axis direction to reduce a beam spot size or a beam waist. There is a purpose.

A laser beam shaping apparatus according to the present invention is a laser beam shaping apparatus for shaping a laser beam of a laser beam having a gauss distribution starting from a laser beam source unit to form a laser beam and irradiating the laser beam on a processed surface of the workpiece, (Or Y-axis) to form a plurality of laser engraved beams by receiving the laser deformed beam from one side and optically connecting the laser deformed beam of the forming optical system , And the plurality of laser engraved beams are moved in the other direction (or the X-axis) perpendicular to the one direction, and the plurality of laser engraved beams are arranged in the other direction And a beam manipulating optical system for forming a plurality of laser-modulated shaped beams, wherein the plurality of laser- Has a smaller beam size than the laser deformed beam in the one direction and has the same beam spreadability as the laser deformed beam in the one direction.

The beam operating optical system is composed of a plurality of lens cells (lens cells or spherical lenses) and is arranged on a plane formed by the one direction and the other direction on the beam path, And the incident surface and the exit surface may have an incident partial surface and an emergent partial surface in each lens cell.

Wherein the plurality of lens cells has a lens cell axis in the longitudinal direction of the individual lens cells and has a focal line connecting the focal points of the individual lens cells so that the focal line is perpendicular to the lens cell axis, The lens cell axis and the focal line may be inclined at 45 degrees with respect to one direction.

Wherein the spherical lens array receives the laser deformed beam at the incident surface and splits the laser deformed beam by the incident partial surface of the individual lens cell to form a laser engraved beam, (Or X-axis) orthogonal to the one direction while symmetrically inverting the laser engraved beam with respect to the focal point while allowing the engraved beam to pass through the focus of the individual lens cell, And the laser engaging beam is arranged in the other direction on the exit surface so as to form a laser-adjusted shaped beam exiting through the exit partial surface of the individual lens cell.

The laser engraved beam is rotated 180 degrees about the focal point between the incident partial surface and the emergent partial surface of the individual lens cell and is symmetrically inverted.

The laser engraved beam is symmetrically inverted in terms of the shape of the individual lens cells with respect to the lens cell axis or the focal line.

The beam operating optical system includes a first cylinder lens positioned sequentially so as to have an incident surface and an emergent surface which are located on a plane formed by the one direction and the other direction on the beam path and which are opposite to each other, And the cylinder lens array has a plurality of lens cells and may have an incidence part surface and an incidence part surface on the individual lens cells on the incidence surface and the emission surface.

Wherein the first cylinder lens or the second cylinder lens has a lens axis inclined by 45 DEG on one side (counterclockwise) with respect to the one direction, and the first cylinder lens array is inclined with respect to the one direction The individual lens cell axes can be tilted by 45 占 on the other side (clockwise).

Wherein the beam operating optical system receives the laser deformed beam through the incident surface of the first cylinder lens and rotates the lens toward the lens axis of the first cylinder lens to emit the laser deformed beam through the emergent surface, Shaped beam of the first cylinder lens is divided through the incident partial surface of each lens cell in the array to form a laser engraved beam perpendicular to the lens cell axis of the individual lens cell, Shaped lens in a direction from the one side of the cylinder lens array to the other side of the cylinder lens array through an incident surface of the second cylinder lens, Shaped laser beam that is incident on the laser engraved beam and emerges as a parallel beam through the exit surface, Can be formed.

Wherein the laser deformed beam emitted from the first cylinder lens is perpendicular to the lens cell axis of the individual lens cell in the cylinder lens array and the laser engraved beam emitted from the cylinder lens array is rectangular or square Can be molded.

When there are a plurality of the cylinder lens arrays, the plurality of laser engraved beams may have the same shape on an incident surface and an emergent surface of each cylinder lens array.

The cylinder lens array may be located at a focal length of the first cylinder lens.

The linear laser processing apparatus comprising: a relay optical system positioned between the laser light source unit and the beam forming optical system; And a homogenizer optical system and a focusing optical system sequentially arranged from the beam operating optical system toward the processing surface, wherein the relay optical system transmits the laser beam from the laser light source part to the beam forming optical system, Wherein the homogenizer optical system forms a flat-top profile on the plurality of laser-modulated shaped beams in the other direction and forms a flat-top profile on the laser-modulated beam in one direction And the focusing optical system focuses the laser line beam in the other direction to reduce the size of the beam spot to form a laser beam.

Wherein the beam forming optical system increases the beam size of the laser primitive beam in the one direction perpendicular to the traveling direction (or Z axis) of the laser primitive beam and reduces the beam spreading of the laser primitive beam, A beam can be formed.

The laser source shape beam may be a DPSS laser beam including a Yb: Yag laser.

As described above, the present invention is applicable to a beam operating optical system in which a spherical lens array is provided or one or a plurality of cylinder lens arrays are provided between two cylinder lenses, and a spherical lens array or a cylinder lens is provided with a laser deformed beam (Or Y-axis) orthogonal to the advancing direction of the beam, the alignment operation for each lens can be omitted or can be easily performed with respect to the laser deformed beam.

The present invention is characterized in that in a beam operating optical system, a laser deformed beam (or a line beam) of a beam forming optical system is divided into a plurality of laser engraved shapes (or line beams) along the one direction in the cylinder lens array or between the incident surface and the emergent surface of the spherical lens array, After the beams are formed, a plurality of laser engraved beams are moved toward another direction (or X axis) (for example, order pair movement related to Y axis position change in accordance with X axis position change) Since a plurality of laser-adjusted shaped beams having a beam size smaller than that of the deformed beam and having the same beam spreadability as the laser-deformed beam in one direction are continuously formed, the operator can quickly recognize the function of the beam operating optical system, It is possible to make the processing work convenient.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing irradiation of a laser beam to a machined surface of a workpiece using a laser beam forming apparatus according to the present invention; FIG.
FIG. 2 is a schematic view showing a source laser beam emitted from the laser light source unit of FIG. 1 in three-dimensional coordinates. FIG.
3 is a schematic view showing a laser deformed beam emitted from the beam forming optical system of FIG.
Fig. 4 is a schematic diagram showing the positional relationship between the beam forming optical system and the beam operating optical system of Fig. 1;
5 is a schematic view showing a beam operating optical system according to the first embodiment of the present invention.
6 is a schematic view showing the positional shift of a beam in a lens cell in the spherical lens array of FIG. 5;
Fig. 7 is a schematic view showing the movement of the beam between the entrance surface and the exit surface of the lens cell of Fig. 6;
Fig. 8 is a schematic view showing a plurality of laser-tuned shaped beams emitted from the beam operating optical system of Fig. 5;
9 is a schematic view showing a beam operating optical system according to a second embodiment of the present invention.
10 is a schematic view showing the positional shift of the beam in the beam operating optical system of Fig.

The following detailed description of the invention refers to the accompanying drawings, which illustrate, by way of illustration, specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It should be understood that the various embodiments of the present invention are different, but need not be mutually exclusive. For example, certain features, structures, and characteristics described herein may be implemented in other embodiments without departing from the spirit and scope of the invention in connection with one embodiment. It is also to be understood that the position or arrangement of the individual components within each disclosed embodiment may be varied without departing from the spirit and scope of the invention. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the present invention is to be limited only by the appended claims, along with the full scope of equivalents to which such claims are entitled, if properly explained. In the drawings, like reference numerals refer to the same or similar functions throughout the several views, and length and area, thickness, and the like may be exaggerated for convenience.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art can easily carry out the present invention.

FIG. 1 is a schematic view showing irradiation of a laser beam on a machined surface of a workpiece using the laser beam forming apparatus according to the present invention, and FIG. 2 is a schematic view showing a source laser beam radiated from the laser beam source unit in FIG. 1 in three-dimensional coordinates.

Fig. 3 is a schematic view showing a laser deformed beam emitted from the beam forming optical system of Fig. 1, and Fig. 4 is a schematic view showing a positional relationship between the beam forming optical system and the beam operating optical system of Fig.

1 to 4, a laser beam forming apparatus 170 according to the present invention includes a laser beam source unit 10, a relay optical system 20, a beam forming optical system 30, A focusing optical system 70, a homogenizer optical system 150, and a focusing optical system 160 as shown in FIG. In order to realize the beam path, the laser light source part 10 forms a laser source shape beam (10B in FIG. 2) of a gaussian distribution and transfers the laser source shape beam 10B to the relay optical system 20. The laser source shape beam 10B is a DPSS laser beam including a Yb: Yag laser.

The laser source beam 10B has a circular cross section in a plane perpendicular to the advancing direction (or Z axis) of the beam. However, in order to simplify the beam shape, for example, in the plane, It is assumed that it has a 5 mm X 5 mm axis and a beam divergence of 0.5 ° X 0.5 ° in the X and Y directions. The beam spreading is proportional to the beam quality factor M ² by the following equation.

(However, 2w _0; of the beam spot diameter, λ; laser wavelength, D; beam size, F; lens focal length, M ^2; bimjil factor (beam quality factor))

(Where [theta] (beam divergence), BPP (beam parameter product)

After the laser source beam 10B has been delivered to the relay optical system 20 the relay optical system 20 is capable of moving the laser source beam 10B from the laser source source beam 10B, And transmits it to the beam forming optical system 30. After the laser source beam 10B is continuously transmitted to the beam forming optical system 30, the beam forming optical system 30 deforms the shape of the laser source beam 10B in one direction (or Y axis) Thereby forming a laser deformed beam (30B in Fig. 3).

On the other hand, when the beam passes through a conventional optical system (e.g., a lens), the 'Etendue conservation law' (or Abb's sine condition) is implemented as Equation 4 below, The product of the size (or image size, H1, H2) of the light source and the spreading angles (? ₁ ,? ₂ ) of the light source is always constant. Therefore, at one side or the other side of the lens, according to the 'etendue conservation law', the beam length and beam spreadability are in inverse proportion to each other.

(Where N ₁ and N ₂ are the refractive index of the optical system)

The refractive index is 1 in air. In order to reduce the spot size of the beam on the processing surface A of the workpiece 180 in the laser beam forming apparatus 170, the focusing lens 160 has a large beam size according to Equation (1) The incident beam must pass through the focusing lens 160 and cause an aberration of the focusing lens 160 on the beam path to be difficult to focus well and the DOF (depth of focus).

In order to eliminate the optical load of the focusing lens 160, the laser deformed beam 30B has a beam length of 5 mm x 25 mm in the X-axis and a Y-axis in the plane, and a beam spreading factor X Axis and on the Y axis by 0.5 ° X 0.1 °. Thus, the laser deformed beam 30B has a beam spread that is reduced by a factor of five compared to the laser source shape beam 10B in the Y-axis when the laser deformed beam 30B has a beam length 5 times longer than the laser source shape beam 10B in the Y- .

After the laser deformed beam 30B is formed in the beam forming optical system 30, the beam forming optical system 30 transmits the laser deformed beam 30B to the beam operating optical system 70. [ After the laser deformed beam 30B is transmitted to the beam operating optical system 70, the beam operating optical system 70 receives the laser deformed beam 10B and receives a plurality of laser engraved beams 70B of FIG. And transmits a plurality of laser engraved beams 70B to the homogenizer optical system 150. [

The plurality of laser engraved beams 70B will now be described in more detail. After the plurality of laser engraved beams 70B have been transferred to the homogenizer optical system 150, the homogenizer optical system 150 has a laser beam beam corresponding to the plurality of laser engraved beams 70B And transmits it to the focusing optical system 160. After the laser line beam is transmitted to the focusing optical system 160, the focusing optical system 160 focuses the laser line beam in a desired direction to reduce the beam spot to focus the laser beam (not shown) 180 on the machined surface (A).

FIG. 5 is a schematic view showing a beam operating optical system according to the first embodiment of the present invention, FIG. 6 is a schematic view showing the movement of a beam in a lens cell in the spherical lens array of FIG. 5, And FIG. 5 is a schematic view showing the movement of the beam between the incident surface and the emitting surface of the light source.

Fig. 8 is a schematic view showing a plurality of laser-tuned shaped beams emitted from the beam operating optical system of Fig. 5; Here, the Z-axis refers to the direction of beam advancement, and the Y-axis refers to one direction perpendicular to the advancing direction (or Z-axis) of the beam, and the X-axis refers to the other direction perpendicular to one direction.

5 to 8, the beam operating optical system 70 is located on the beam path together with the beam forming optical system 30 and includes a spherical lens array. The spherical lens array receives the laser deformed beam 30B from one side and divides the laser deformed beam 30B in one direction to form a plurality of laser engraved beams 30C.

In addition, the spherical lens array moves (m) the plurality of laser engraved beams 30C in the direction toward the other direction (or the X-axis) orthogonal to one direction (or Y axis) A plurality of laser-modulated shaped beams (30C) are arranged in the other direction to form a plurality of emitted laser-modulated shaped beams (70B). The position movement m may be referred to as an ordered pair coordinate movement related to the Y-axis position change in accordance with the X-axis position change.

More specifically, when looking at the spherical lens array, the spherical lens array is composed of a plurality of lens cells (lens cell 49, or spherical lens) and is located on a plane made up of one direction and the other direction on the beam path And has an incident surface (50) and an exit surface (60) facing in opposite directions from each other.

The incident surface 50 and the exit surface 60 have an incident partial surface 43 and an emergent partial surface 46 in the individual lens cells 49. The plurality of lens cells 49 has a lens cell axis LA in the longitudinal direction of each lens cell 49 and has a focal line FA connecting the focal points of the individual lens cells 49, The focal line FA is perpendicular to the cell axis LA and the lens cell axis LA and the focal line FA are inclined at 45 DEG with respect to one direction.

The spherical lens array receives the laser deformed beam 30B from the incident surface 50 and receives the laser deformed beam 30B from the incident partial surface 43 of the individual lens cell 49 The laser deformed shape beam 30B is divided in one direction to form the laser engraved beam 30C.

In addition, the spherical lens array is configured to symmetrically invert (1 - > 1 ') the laser engraved beam 30C with respect to the focal point while passing the laser engraved beam 30C through the focal point of the individual lens cell 49, , 2 -> 2 ', 3 -> 3') to move the laser engraved beam 30C toward another direction orthogonal to one direction.

In addition, the spherical lens array includes a laser-modulated shaped beam 70B that is arranged in the other direction on the exit surface 60 and outgoing through the exit partial surface 46 of the individual lens cell 49 ). The laser tuning beam 70B has, for example, a beam length of 25 mm x 5 mm in the X-axis and a Y-axis in the plane, and a beam divergence of 0.5 x 0.1 deg. In the X-axis and in the Y-axis.

Here, the laser engraved beam 30C rotates 180 degrees with respect to the focal point between the incidence portion surface 43 and the incidence portion surface 46 of the individual lens cells 49 to perform symmetrical inversion (1? 1 ' , 2 -> 2 ', 3 -> 3'). The laser engraved beam 30C is symmetrical inversion (1 -> 1 ', 2 -> 2) in terms of shape from the lens cell axis LA or the focal line FA in the individual lens cells 49 ', 3 -> 3').

Here, the plurality of laser-tuned beams 70B have a beam size smaller than the laser-deformed beam 30B in one direction and have the same beam spreadability as the laser-deformed beam 30B in one direction. Here, the plurality of laser-modulated shaped beams 70B have a flat-top profile in one direction.

FIG. 9 is a schematic view showing a beam operating optical system according to a second embodiment of the present invention, and FIG. 10 is a schematic view showing a positional shift of a beam in the beam operating optical system of FIG. The Z axis refers to the direction in which the beam advances, and the Y axis refers to one direction perpendicular to the advancing direction (or Z axis) of the beam, and the X axis refers to the other direction perpendicular to one direction.

9 and 10, the beam operating optical system 140 includes a beam operating optical system 140, which is disposed on a plane formed by one direction and the other direction on the beam path, and has an incident surface and an emitting surface facing in opposite directions from each other, A plurality of cylinder lens arrays 100, and a plurality of second cylinder lenses 120. The first cylinder lens 80 includes a first cylinder lens 80, To simplify the present invention, the cylinder lens array 100 is described using one.

The incident surface and the emergent surface respectively take in and out of the beam on the beam path in the first cylinder lens 80, the cylinder lens array 100, or the second cylinder lens 120. The cylinder lens array 100 has a plurality of lens cells 95 and has an incident surface and an emergent surface in each lens cell 95 similar to FIG. 5, FIG. 6, Respectively.

The first cylinder lens 80 and the second cylinder lens 120 have lens axes A1 and A3 respectively and the cylinder lens array 100 is arranged at a focal distance F1 of the first cylinder lens 80 And the cylinder lens array 100 has a lens cell axis A2 in each lens cell 95. [

The first cylinder lens 80 or the second cylinder lens 120 tilts the lens axis A1 or A3 in one direction (counterclockwise) by 45 °, and the cylinder lens array 100 The respective lens cell axes A2 are inclined by 45 DEG in the other direction (clockwise direction) with respect to one direction in each lens cell 95. [

That is, the lens axis A1 of the first cylinder lens 80 and the lens axis A3 of the second cylinder lens 120 are perpendicular to the lens cell axis A2 of the cylinder lens array 100. Accordingly, the optical roles of the first cylinder lens 80, the cylinder lens array 100, and the second cylinder lens 120 will be described as follows.

The first cylinder lens 80 receives the laser deformed beam 80B from the beam forming optical system (30 in FIG. 4) through the incident surface, rotates the lens at the angle of 45 ° toward the lens axis A1, And the deformed shape beam 80B is emitted. Here, the laser deformed beam 80B has the same beam characteristic as the laser deformed beam 30B in Fig.

The cylinder lens array 100 is positioned at the focal point of the first cylinder lens 80 so that the laser lens array 100 is rotated through the incident partial face of the individual lens cell 95 by a laser- The beam 80B is divided to form a laser engraved beam 100B perpendicular to the lens cell axis A2 of the individual lens cells 95. Then, And emits the piece-shaped beam 100B.

The laser deformed beam 80B emitted from the first cylinder lens 80 is perpendicular to the lens cell axis A2 of the individual lens cell 95 in the cylinder lens array 100, The laser engraved beam 100B emitted from the array 100 is shaped into a square, e.g., a rectangle or a square.

The laser engraved beam 100B is shifted by 90 degrees in one direction from the first cylinder lens 80 to the other focal distance. Since the second cylinder lens 120 is located at a focal length twice as long as the first cylinder lens 80, the laser beam 100B is incident on the incidence plane from the cylinder lens array 100, To form a laser-tuned shaped beam 120B that emerges in parallel without further deformation.

That is, the laser-modulated shaped beam 120B that has passed through the second cylinder lens 120 is symmetrically inverted in the same manner as the laser-modulated shaped beam passed through the spherical lens array as described in FIGS. 5-8.

The laser deformed beam 80B passes through the first cylinder lens 80, the cylinder lens array 100 and the second cylinder lens 120, Shaped beam 120B.

10, the plurality of laser-tuned beams 120B have a smaller beam size than the laser-deformed beam 80B in one direction, and the laser-deformed beams 80B and 80B in one direction And has the same beam spreadability.

Accordingly, the present invention discloses a beam manipulating optical system 70 or 140 that does not apply to the " Etendue conservation law ", wherein the beam manipulating optical system 70 or 140 keeps the beam spreading uniform while reducing the beam size in one direction The beam manipulating optical system 70 or 140 uses the laser deformed beam 30B or 80B having a beam size of 25 mm and a beam spreading of 0.1 DEG in one direction Thereby forming a laser-tuned shaped beam 70B or 120B having a beam size of 5 mm and a beam spreading of 0.1 degrees in one direction as shown in Fig. 8 or Fig.

On the other hand, when there are a plurality of the cylinder lens arrays 100, the plurality of laser engraved beams 100B may have the same shape on an incident surface and an emergent surface of each cylinder lens array 100.

Referring again to FIG. 1, the homogenizer optical system 150 shapes a flat-top profile on a plurality of laser-tuned shaped beams (70B in FIG. 5 or 120B in FIG. 10) To form a laser line beam (not shown in the figure). Here, the homogenizer optical system 150 includes a plurality of laser engraved beams 70B or 120B while optically processing a plurality of laser-adjusted shaped beams 70B or 120B using a collimator (not shown) (Or X axis) to emit a laser line beam (not shown) having a beam size adjusted in one direction with a flat-top profile in the other direction (or X axis).

1, the focusing optical system 160 of FIG. 1 focuses the laser line beam in one direction to focus the laser line beam to a desired length, for example, a length between several microns and several tens of microns A laser beam (not shown) is formed by focusing or reducing the beam spot, and the laser beam is irradiated onto the work surface A of the workpiece (180 in FIG. 1).

10; A laser light source unit 20; Relay light source
30; Beam forming optical system, 70; Beam manipulating optical system
150; Homogenizer optical system, 160; Focusing optical system
170; Laser beam shaping apparatus, 180; Workpiece

Claims (15)

A laser beam forming apparatus for shaping a laser source shape beam of a gauss distribution starting from a laser beam source unit to form a laser beam and irradiate the laser beam onto a machined surface of the workpiece,
Shaped beam from one side so as to be optically connected through a laser deformed beam of a beam forming optical system facing the laser light source unit, and dividing the laser deformed beam in one direction to form a plurality of laser engraved beams Shaped beams are rotated symmetrically by rotating the laser engraved beams 180 ° toward another direction orthogonal to the one direction inside and arranging the plurality of laser engraved beams on the other side in the other direction, And a beam operating optical system for forming a plurality of laser-
Wherein the plurality of laser-modulated shaped beams have a smaller beam size than the laser-deformed beam in the one direction and have the same beam spreadability as the laser-deformed beam in the one direction,
Wherein the beam operating optical system comprises a plurality of lens cells and is arranged on a plane formed by the one direction and the other direction on the beam path, Array,
Wherein the incident surface and the exit surface have incident surface portions and exit surface portions in the respective lens cells,
Wherein the plurality of lens cells has a lens cell axis in the longitudinal direction of the individual lens cells and has a focal line connecting the focal points of the individual lens cells so that the focal line is perpendicular to the lens cell axis, And said lens cell axis and said focal line are inclined at 45 DEG with respect to one direction.
delete delete The method according to claim 1,
Wherein the spherical lens array receives the laser deformed beam from the incident surface and splits the laser deformed beam in the one direction by the incident partial surface of the individual lens cell to form a laser engraved beam, While the laser engraved beam passes through the focus of the individual lens cell, the laser engraved beam is symmetrically inverted with respect to the focal point so that the laser engraved beam is directed in the other direction perpendicular to the one direction And said laser engraved beam is arranged in said other direction on said exit surface so as to form a laser adjusted shaped beam exiting through said exit partial surface of said individual lens cell.
5. The method of claim 4,
Wherein said laser engraved beam is symmetrically inverted between said incident partial surface and said emergent partial surface of said individual lens cell by 180 DEG with respect to said focal point.
5. The method of claim 4,
Wherein the laser engraved beam is symmetrically inverted in the individual lens cells when viewed from the point of view of the lens cell axis or the focal line.
delete delete delete delete delete delete The method according to claim 1,
A relay optical system positioned between the laser light source part and the beam forming optical system;
Further comprising a homogenizer optical system and a focusing optical system sequentially arranged from the beam operating optical system toward the processed surface,
Wherein the relay optical system maintains a beam size and a beam spreading property imparted to the laser source beam from the laser source unit when the laser source beam is transmitted to the beam forming optical system,
Wherein the homogenizer optical system forms a flat-top profile on the plurality of laser-tuned shaped beams in the other direction and adjusts the beam size in the one direction to form a laser line beam,
Wherein the focusing optical system focuses the laser line beam in the other direction to reduce the size of the beam spot to form a laser beam.
The method according to claim 1,
Wherein the beam forming optical system is configured to increase the beam size of the laser primitive beam in the one direction perpendicular to the traveling direction of the laser primitive beam and to reduce the beam spreading of the laser primitive beam, Beam shaping device.
The method according to claim 1,
Wherein the laser beam is a DPSS laser beam including a Yb: Yag laser.

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