JP4818958B2 - Beam irradiation apparatus and beam irradiation method - Google Patents

Description

  The present invention relates to a beam irradiation apparatus and a beam irradiation method capable of performing processing by irradiating a workpiece with a laser beam.

  In a general laser annealing apparatus, a laser beam emitted from a laser light source is incident on a fly-eye uniformizing optical system (homogenizer), and shaped into a long laser beam having a uniform beam intensity distribution. The substrate to be annealed is irradiated.

  Conventionally, in the transmission optical system from the laser light source to the homogenizing optical system, only the adjustment of the power of the laser beam and the adjustment of the beam size are performed, and the control of the beam profile (intensity distribution) has not been performed. For this reason, when the apparatus is operated for a long time, the emitted beam characteristic of the laser oscillator gradually changes, and there is a case where a constant processing quality cannot be obtained.

  An invention of a laser processing apparatus including a homogenizer including two aspheric lenses having different focal lengths depending on the position on the lens is disclosed (for example, see Patent Document 1). The laser processing apparatus described in Patent Document 1 performs processing by forming an image of a beam spot on a homogenized surface of a homogenizer on the surface of a processing object.

Japanese Patent No. 3673255

  An object of the present invention is to provide a beam irradiation apparatus capable of performing high-quality processing.

  Moreover, it is providing the beam irradiation method which can perform a high quality process.

According to one aspect of the present invention, a first mirror and a second mirror are disposed at both ends, a laser oscillator that emits a laser beam from the first mirror side, a stage that holds a workpiece, A homogenizer that is disposed on the optical path of the laser beam emitted from the laser oscillator and that impinges the incident laser beam on the object to be processed held on the stage, and the homogenizer transmits the incident laser beam to the first A first array lens including a plurality of cylindrical lenses that divides and emits along the direction of the laser beam; and a first array lens that includes a cylindrical lens disposed on each optical path of the laser beam divided by the first array lens. 2 and the laser beam transmitted through each of the cylindrical lenses constituting the second array lens are held on the stage. Each cylindrical lens constituting the second array lens and the converging lens are held on the stage with the object point at the position of the first array lens. And an imaging optical system disposed on a path of a laser beam between the laser oscillator and the homogenizer, wherein the first optical system includes: The conjugate point with respect to the position where the array lens is arranged is an intermediate point between the first mirror and the second mirror, the position of the first mirror, or the first mirror and the second mirror. There is provided a beam irradiation apparatus positioned between the intermediate point of the first mirror and the first mirror .
According to another aspect of the present invention, a first mirror and a second mirror are disposed at both ends, and a laser oscillator that emits a laser beam from the first mirror side and a workpiece are held. A stage and a homogenizer that is disposed on the optical path of the laser beam emitted from the laser oscillator and causes the incident laser beam to be incident on the object to be processed held by the stage, and the homogenizer includes the incident laser beam A first array lens including a plurality of cylindrical lenses, and a cylindrical lens disposed on each optical path of the laser beam divided by the first array lens And a laser beam transmitted through each cylindrical lens constituting the second array lens on the stage. Each of the cylindrical lenses and the converging lens constituting the second array lens has an object point at the position of the first array lens as the stage. An imaging optical system disposed on the path of the laser beam between the laser oscillator and the homogenizer, and further comprising the imaging optical system, A beam irradiation apparatus is provided in which a conjugate point with respect to a position where the first array lens is disposed is located at a beam waist position between the first mirror and the second mirror.
Further, according to another aspect of the present invention, a first mirror and a second mirror are disposed at both ends, and a laser oscillator that emits a laser beam from the first mirror side and a workpiece are held. A stage and a homogenizer that is disposed on the optical path of the laser beam emitted from the laser oscillator and causes the incident laser beam to be incident on the object to be processed held by the stage, and the homogenizer includes the incident laser beam A first array lens including a plurality of cylindrical lenses, and a cylindrical lens disposed on each optical path of the laser beam divided by the first array lens And a laser beam transmitted through each cylindrical lens constituting the second array lens on the stage. Each of the cylindrical lenses and the converging lens constituting the second array lens has an object point at the position of the first array lens as the stage. An imaging optical system in which an image is formed on a workpiece held on the workpiece, the first or second mirror is a concave mirror, and is further disposed on a laser beam path between the laser oscillator and the homogenizer There is provided a beam irradiation apparatus having a system, wherein in the imaging optical system, a conjugate point with respect to a position where the first array lens is disposed is located at a center of curvature of the first or second mirror. The

According to another aspect of the present invention, (a) a first oscillator and a second mirror are disposed at both ends, and a laser oscillator that emits a laser beam from the first mirror side is used . An intermediate point between the first and second mirrors, a position of the first mirror, a position between the intermediate point of the first and second mirrors and the first mirror, and the first mirror; A first position selected from any one of a beam waist position between the second mirror and a position of the center of curvature when the first or second mirror is a concave mirror; And (b) dividing the laser beam emitted in the step (a) at the second position, and imaging the object point at the divided position on the irradiation surface. And the split laser beam is superimposed on the irradiation surface. As it will be I, the beam irradiation method and a step for entering the laser beam in the object is provided.

  ADVANTAGE OF THE INVENTION According to this invention, the beam irradiation apparatus which can perform a high quality process can be provided.

  Further, it is possible to provide a beam irradiation method capable of performing high quality processing.

  1A and 1B are schematic views showing a beam irradiation apparatus according to an embodiment.

  The beam irradiation apparatus according to the embodiment includes, for example, a laser light source 10 including an excimer laser oscillator, a divergence 11 for optically correcting the divergence angle of the laser beam emitted from the laser light source 10, and the intensity of the incident laser beam with a desired attenuation rate. Variable attenuator 12 that attenuates and emits, afocal zoom 13 that includes an imaging optical system, and a homogenizer 14 that divides and emits a laser beam, shapes the beam shape on the irradiated surface, and makes the beam intensity close to uniform. A focus lens 15 and a stage 16. The homogenizer 14 includes first to fourth array lenses 14a to 14d. A laser oscillator (resonator) is provided with a laser medium or the like on a light path in which mirrors are arranged at both ends and confined in the resonator. An excitation light source for exciting the laser medium is also included. For example, laser annealing of an amorphous silicon film is performed using the beam irradiation apparatus according to the embodiment.

  For convenience of the following description, in FIG. 1A, an orthogonal coordinate system is defined in which the depth direction perpendicular to the paper surface is the X direction, the upper direction in the paper surface is the Y direction, and the right direction in the paper surface is the Z direction. FIG. 1B shows a beam irradiation apparatus according to an embodiment in which the upper direction in the drawing is the X direction, the front direction perpendicular to the drawing is the Y direction, and the right direction in the drawing is the Z direction.

  A laser beam 20 is emitted from the laser light source 10. The laser beam 20 travels so that the central ray is parallel to the Z direction, enters the divergence 11, and the divergence angle is corrected. The laser beam 20 emitted from the divergence 11 enters the variable attenuator 12. The variable attenuator 12 attenuates the beam intensity of the laser beam 20 so that laser annealing is performed with an appropriate beam intensity.

  The laser beam 20 emitted from the variable attenuator 12 enters the homogenizer 14 through the afocal zoom 13. For example, the afocal zoom 13 forms an image of a beam cross section at the beam exit (laser resonator exit mirror position) of the excimer laser oscillator at a position where the first array lens 14a of the homogenizer 14 is disposed.

  The first array lens 14a includes a plurality of cylindrical lenses arranged on one main surface side of the plane (the side opposite to the side on which the laser beam 20 is incident) so that the generatrix direction is parallel to the X direction. Consists of. The laser beam 20 travels so that the central ray is parallel to the Z direction, and enters the first array lens 14a.

  The laser beam 20 incident on the first array lens 14a is divided and emitted by each cylindrical lens along a direction parallel to the Y direction. In FIG. 1A, the center beam of the divided laser beam is indicated by an arrow.

  The laser beam emitted from the first array lens 14a is incident on the second array lens 14b. The second array lens 14b includes a plurality of, for example, cylindrical ones of the first array lens 14a, such that the generatrix direction is parallel to the X direction on the surface of the first array lens 14a facing the surface where the cylindrical lens is disposed. The same number of cylindrical lenses as the lenses are arranged.

  Each laser beam divided and emitted along the Y direction by each cylindrical lens of the first array lens 14a is incident on the corresponding cylindrical lens of the second array lens 14b.

  The laser beam emitted from the second array lens 14b is incident on the third array lens 14c.

  As shown in FIG. 1B, the third array lens 14c is arranged so that the generatrix direction is parallel to the Y direction on one principal surface side of the plane (the side opposite to the side on which the laser beam 20 is incident). A plurality of cylindrical lenses arranged in the above. The laser beam incident on the third array lens 14c is divided and emitted along the direction parallel to the X direction by each cylindrical lens.

  The laser beam emitted from the third array lens 14c enters the fourth array lens 14d. The fourth array lens 14d has a plurality of, for example, the cylindrical array of the third array lens 14c such that the generatrix direction is parallel to the Y direction on the surface of the third array lens 14c opposite to the surface where the cylindrical lens is disposed. The same number of cylindrical lenses as the lenses are arranged.

  Each laser beam divided and emitted along the X direction by each cylindrical lens of the third array lens 14c is incident on the corresponding cylindrical lens of the fourth array lens 14d.

  The laser beam divided by the homogenizer 14 along the X direction and the Y direction is converged by the focus lens 15 and is superimposed on the workpiece 17 and irradiated.

The workpiece 17 is a processed substrate in which an amorphous silicon film is formed on an insulating thin film formed of SiO ₂ or SiN on one main surface of a glass substrate, for example, and is held on the stage 16. . The stage 16 can hold the workpiece 17 in the XY plane and move it in the same plane.

  The laser beam is irradiated on the amorphous silicon film of the workpiece 17 in a long shape with the long direction parallel to the X direction and the short direction parallel to the Y direction. Further, the beam cross section (object point) at the position of the first array lens 14 a is imaged on the workpiece 17 by the second array lens 14 b and the focus lens 15. Further, the beam cross section (object point) at the position of the third array lens 14 c is imaged on the workpiece 17 by the fourth array lens 14 d and the focus lens 15. That is, in the beam irradiation apparatus according to the embodiment, the first array lens 14a, the second array lens 14b, and the focus lens 15 perform uniform beam intensity and shape of the beam in the short direction, and the third array lens 14c, The four-array lens 14d and the focus lens 15 make the beam intensity uniform and shape the beam shape in the longitudinal direction.

  In the beam irradiation apparatus according to the embodiment, the conjugate condition is applied to both the transmission optical system from the laser light source 10 to the homogenizer 14 and the homogenizing optical system from the homogenizer 14 to the workpiece 17. That is, by constructing the image transfer optical system from the beam exit of the laser oscillator (laser resonator exit mirror position) to the entrance of the homogenizing optical system (first array lens 14a), the surface of the first array lens 14a is A laser beam is always projected at a certain size at a certain position, and further, the surface of the first array lens 14a is transferred to the processing surface (beam irradiation surface), so that the laser beam divided by the first array lens 14a The image is projected onto the processing surface (beam irradiation surface) while maintaining the shape on the surface of the one array lens 14a.

  Therefore, the beam intensity on the processing surface (beam irradiation surface) is kept constant for a long time regardless of the beam characteristics (beam diameter, beam divergence angle, etc., pointing stability) emitted from the laser oscillator, and stable processing is performed. It can be carried out.

  Further, since the beam intensity distribution of each array lens on the array lens surface 14 a is transferred onto the processing object 17, the intensity distribution of the beam cut out with the array lens width is directly reflected on the processing object 17. Therefore, the slope of the end portion in the short direction depends only on the resolution of the uniformizing optical system, and can be sharpened. For this reason, the width of the flat top portion in the short direction can be increased in the long laser beam irradiated on the processing surface (beam irradiation surface). Therefore, for example, it is possible to reduce the overlap rate of scan irradiation in laser annealing and improve the throughput. In addition, since the transfer optical system does not use a mask, high energy transmission efficiency can be obtained.

  Each laser beam divided along the Y direction by each cylindrical lens of the first array lens 14a must be incident on the corresponding cylindrical lens of the second array lens 14b. Therefore, the allowable maximum value of the incident angle of the laser beam 20 incident on the first array lens 14a is the focal length of the cylindrical lens included in the first array lens 14a, the first array lens 14a, and the second array lens 14b. The distance between them, the divergence angle of the beam incident on the first array lens 14a, and the width in the direction perpendicular to the generatrix of the first and second array lenses 14a and 14b are determined as parameters.

  For example, the focal length of the cylindrical lens included in the first array lens 14a is 600 mm, the distance between the first and second array lenses 14a and 14b is 600 mm, the divergence angle of the beam incident on the first array lens 14a is 1 mrad, the first When the width in the direction perpendicular to the generatrices of the first and second array lenses 14a and 14b is 5 mm, the allowable maximum value of the incident angle of the laser beam 20 incident on the first array lens 14a is 3.7 mrad.

  FIG. 2 is a schematic diagram showing a laser oscillator. The laser oscillator (resonator) includes resonator mirrors 31 and 32 disposed at both ends of the resonator, a laser medium 33 disposed on a light path confined in the resonator, and an excitation light source for exciting the laser medium 33. 34 etc. are provided. For example, the resonator mirror 31 is a total reflection mirror, and the resonator mirror 32 is a partial reflection mirror. The laser beam 20 is emitted from the resonator mirror 32 side.

  In the embodiment described with reference to FIGS. 1A and 1B, the beam cross section of the beam exit (laser resonator exit mirror position) of the laser oscillator is imaged on the object to be processed. Depending on the form of the oscillator, the beam cross section at the laser resonator intermediate point (intermediate point between both mirrors of the laser oscillator) may be imaged. Further, depending on the form of the laser oscillator, it is possible to form an image of the beam cross section at any position between the beam exit (laser resonator exit mirror position) of the laser oscillator and the laser resonator intermediate point. Further, it may be a beam cross section at the position of the center of curvature of the resonator mirror (there may be outside the resonator). Further, in the case of a stable resonator, an image of the beam waist position in the resonator can be formed.

  In this figure, a beam exit (exit mirror position) 35, a laser resonator intermediate point 36, curvature centers 37 and 38, and a beam waist position 39 are shown. The center of curvature 37 is the center of curvature of the resonator mirror 32 (exit mirror), and the center of curvature 38 is the center of curvature of the resonator mirror 31.

  As mentioned above, although this invention was demonstrated along the Example, this invention is not limited to these.

For example, even when the first array lens 14a surface is simply transferred to the processing surface (beam irradiation surface), high-quality laser processing can be realized. This is because even if the position of the beam incident on the surface of the first array lens 14a fluctuates, the overlapping position of the beam on the processing surface (beam irradiation surface) can be made constant.
It will be apparent to those skilled in the art that other various modifications, improvements, combinations, and the like are possible.

  It can be suitably used for laser processing in general, particularly in the field of laser processing using laser annealing, for example, the manufacture of flat panel displays.

(A) And (B) is the schematic which shows the beam irradiation apparatus by an Example. It is the schematic which shows a laser oscillator.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Laser light source 11 Divergence 12 Variable attenuator 13 Afocal zoom 14 Homogenizer 14a 1st array lens 14b 2nd array lens 14c 3rd array lens 14d 4th array lens 15 Focus lens 16 Stage 17 Processing object 20 Laser beam 31, 32 Resonance Mirror 33 Laser medium 34 Excitation light source 35 Beam exit (exit mirror position)
36 Laser resonator intermediate points 37, 38 Center of curvature 39 Beam waist position

Claims (5)

A laser oscillator in which a first mirror and a second mirror are arranged at both ends, and emits a laser beam from the first mirror side;
A stage for holding the workpiece,
A homogenizer that is disposed on the optical path of the laser beam emitted from the laser oscillator and that makes the incident laser beam incident on the workpiece held on the stage;
The homogenizer is
A first array lens including a plurality of cylindrical lenses that divides and emits an incident laser beam along a first direction;
A second array lens including a cylindrical lens disposed on each optical path of the laser beam divided by the first array lens;
A converging lens that superimposes a laser beam transmitted through each cylindrical lens constituting the second array lens on a workpiece to be held on the stage;
Each cylindrical lens and the converging lens constituting the second array lens cause the object point at the position of the first array lens to form an image on a processing target held on the stage ,
And an imaging optical system disposed on a laser beam path between the laser oscillator and the homogenizer,
In the imaging optical system, a conjugate point with respect to a position where the first array lens is arranged is an intermediate point between the first mirror and the second mirror, a position of the first mirror, or the A beam irradiation apparatus positioned between an intermediate point between the first mirror and the second mirror and the first mirror. A laser oscillator in which a first mirror and a second mirror are arranged at both ends, and emits a laser beam from the first mirror side;
A stage for holding the workpiece,
A homogenizer that is disposed on the optical path of the laser beam emitted from the laser oscillator and that makes the incident laser beam incident on the workpiece held on the stage;
The homogenizer is
A first array lens including a plurality of cylindrical lenses that divides and emits an incident laser beam along a first direction;
A second array lens including a cylindrical lens disposed on each optical path of the laser beam divided by the first array lens;
A converging lens that superimposes a laser beam transmitted through each cylindrical lens constituting the second array lens on a workpiece to be held on the stage;
Each cylindrical lens and the converging lens constituting the second array lens cause the object point at the position of the first array lens to form an image on a processing target held on the stage ,
And an imaging optical system disposed on a laser beam path between the laser oscillator and the homogenizer,
In the imaging optical system, a beam irradiation apparatus in which a conjugate point with respect to a position where the first array lens is arranged is located at a beam waist position between the first mirror and the second mirror. A laser oscillator in which a first mirror and a second mirror are arranged at both ends, and emits a laser beam from the first mirror side;
A stage for holding the workpiece,
A homogenizer that is disposed on the optical path of the laser beam emitted from the laser oscillator and that makes the incident laser beam incident on the workpiece held on the stage;
The homogenizer is
A first array lens including a plurality of cylindrical lenses that divides and emits an incident laser beam along a first direction;
A second array lens including a cylindrical lens disposed on each optical path of the laser beam divided by the first array lens;
A converging lens that superimposes a laser beam transmitted through each cylindrical lens constituting the second array lens on a workpiece to be held on the stage;
Each cylindrical lens and the converging lens constituting the second array lens cause the object point at the position of the first array lens to form an image on a processing target held on the stage ,
The first or second mirror is a concave mirror;
And an imaging optical system disposed on a laser beam path between the laser oscillator and the homogenizer,
In the imaging optical system, a beam irradiation device in which a conjugate point with respect to a position where the first array lens is disposed is located at a position of the center of curvature of the first or second mirror. Furthermore, the homogenizer is
A plurality of laser beams arranged on the optical path of the laser beam between the first array lens and the converging lens, and dividing and emitting the incident laser beam along a second direction orthogonal to the first direction; A third array lens including a cylindrical lens of
A fourth lens including a cylindrical lens disposed on the optical path of the laser beam between the third array lens and the converging lens and on each optical path of the laser beam divided by the third array lens; Including an array lens,
The converging lens superimposes the laser beam transmitted through the fourth array lens on a workpiece to be held on the stage,
The fourth array lens and the converging lens form an image of the object point at the position of the third array lens on the processing object held on the stage;
The homogenizer, wherein said first direction corresponds to the short direction, a laser beam of a long shape in which the second direction corresponds to the longitudinal direction, is incident on the workpiece held by the stage Item 4. The beam irradiation apparatus according to any one of Items 1 to 3 . (A) A first and second mirrors are disposed at both ends, and a laser oscillator that emits a laser beam from the first mirror side is used, an intermediate point between the first and second mirrors, the first mirror Position of one mirror, a position between an intermediate point of the first and second mirrors and the first mirror, a beam waist position between the first mirror and the second mirror When the first or second mirror is a concave mirror, the first position selected from any one of the positions of the center of curvature is imaged at the second position to emit a laser beam. Process,
(b) The laser beam emitted in the step (a) is divided at the second position, and an object point at the divided position is imaged on the irradiation surface, and the laser beam divided on the irradiation surface is A beam irradiation method including a step of causing a laser beam to enter a workpiece so as to be superimposed.

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