CN201032671Y - Optical beam shaping and coupling device of linear laser diode array - Google Patents

Optical beam shaping and coupling device of linear laser diode array Download PDF

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Publication number
CN201032671Y
CN201032671Y CNU2007200676518U CN200720067651U CN201032671Y CN 201032671 Y CN201032671 Y CN 201032671Y CN U2007200676518 U CNU2007200676518 U CN U2007200676518U CN 200720067651 U CN200720067651 U CN 200720067651U CN 201032671 Y CN201032671 Y CN 201032671Y
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microplate
heap
lens
parallelogram
group
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孟俊清
陈卫标
陆雨田
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Shanghai Institute of Optics and Fine Mechanics of CAS
Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

The utility model relates to a beam shaping and coupling device of the linear laser diode array. The utility model comprises a micro-cylindrical lens, a parallelogram microchip pile shaper, and an axisymmetric aspheric surface lens and a cylindrical lens, which are arranged along the direction of advance of the beam in sequence. The axisymmetric aspheric surface lens and the cylindrical lens are matched together with the focal point of the focused beam after being shaped. The utility model is able to couple the beam which is emitted through the linear high power laser diode array into the energy transmission optical fiber, and is able to be utilized for pump coupling of the solid-state laser. The utility model has the advantages of simple structure, convenient processing and mounting, low cost, good shaping effect and high coupling efficiency.

Description

The beam shaping of linear laser diode array and coupler
Technical field
The utility model relates to beam shaping, particularly a kind of beam shaping of linear laser diode array and coupler, be used for the optical shaping device that light beam that linear laser diode array sends is cut apart and arranged again, the linear laser diode array emitting laser in the coupled into optical fibres, also can be can be used as the pumping coupled system of solid state laser after shaping.
Background technology
The light-emitting area of diode laser matrix mostly is 1 * 100 micron to 1 * 400 micron rectangle, and the laser beam that sends has the different angles of divergence on both direction: be that alongst slow axis, the angle of divergence are generally 10 degree; The direction that is parallel to 1 micron is called fast axle, and the angle of divergence is generally 38 degree.Be linear array by discontinuous several such luminous zones again and form large power laser diode array, reach 1 centimetre on the normal length direction.The Lagrange invariant of the large power laser diode array of being not difficult to calculate like this on both direction differs and can reach thousands of times, therefore be difficult to the direct scioptics group of this laser beam is converged to the small light spot with certain depth of focus, also be difficult to enter into energy transmission optical fibre with low numerical aperture (representative value is as 0.22).There are a lot of inventions and method to be used to the light beam of diode laser matrix output is carried out shaping for this reason, its basic principle is the Lagrange invariant that changes fast axle and slow axis, the Lagrange invariant of slow-axis direction is reduced, and the increase of fast axle, thereby output beam can enough set of lenses be focused to have certain depth of focus than small light spot, by energy transmission optical fibre is transmitted or is directly used in pumped laser media.
Concrete shaping methods can roughly be divided into refraction process, direct reflection method and catadioptric method according to the optical characteristics of the optical element that adopts.Fig. 1 is the coupling device of a kind of typical employing direct reflection method shaping, and it adopts trapezoidal direct reflection to make light beam reorganization obtain the suitable optical field distribution of Lagrange invariant on the both direction, thereby utilizes set of lenses that light beam is focused in the coupled into optical fibres again.This method be Germany not bright and luxuriant and rich with fragrance laser technology people such as Du Keming proposition, its core technology is the special reflectors of a kind of being referred to as " ladder lens ", this speculum is by the stepped arrangement of reflecting surface, make the light beam of incident be cut apart and arrange again, utilize two symmetrical such speculums to finish required light beam and arrange.Linear beam sends from semiconductor laser array 1 among Fig. 1, to enter ladder lens 3 after the angle of divergence compression of fast axle through microtrabeculae lens 2, through ladder lens 3 cut apart with the reorganization after, the Lagrange invariant of the light beam on fast axle and the slow axis both direction is close to identical, enters in the optical fiber 6 through cylindrical lens 4 and aspherical mirror 5 focusing again.This structure can realize good shaping and therefore can access very high coupling efficiency, but the shortcoming of this technology is: (1) light path between each light field of ladder lens reorganization does not wait needs compensation; (2) ladder lens machined surface shape difficulty is very big, present domestic such working ability that also do not have.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned prior art shortcoming, provide a kind of beam shaping and coupler that is used for linear laser diode array, the light beam that linear laser diode array is sent by it is cut apart shaping and it is coupled in the energy transmission optical fibre, and have simple in structure, processing is with easy for installation, with low cost, shaping effect is better, the coupling efficiency advantage of higher.
Technical solution of the present utility model is as follows:
A kind of beam shaping and coupler that is used for linear laser diode array, comprise the microtrabeculae lens that laser direction of advance that shape diode laser matrix along the line sends is placed successively, beam shaping, the axisymmetric aspheric surface lens, cylindrical lens and energy transmission optical fibre, it is characterized in that described beam shaping is a parallelogram microplate heap reshaper, he piles perpendicular placement by two groups of identical microplates of structure and constitutes, every group of microplate heap is that the 45 parallelogram thin slices of spending closely rearrange by the polylith acute angle, the height of each piece parallelogram thin slice increases progressively gradually, and the order of arranging makes thin slice highly the highest in the group microplate heap of winning corresponding to highly minimum thin slice in second group, and the focus of described axisymmetric aspheric surface lens and cylindrical lens is located on the input of described energy transmission optical fibre.
The number that constitutes the microplate of microplate heap in the described parallelogram microplate heap reshaper is determined according to the suitable principle of the Lagrange invariant of latter two direction of shaping.
The also available cylindrical lens of described axisymmetric aspheric surface lens replaces.
Technique effect of the present utility model:
Because the utility model adopts parallelogram microplate heap reshaper, this reshaper is made up of the microplate heap of two parts same structure, the height of parallelogram thin slice all increases progressively arrangement successively in each group microplate heap, the acute angle of each plate sheet all is 45 degree, total reflection all takes place at two 45 degree faces after entering thin slice in light beam, each plate sheet all forms an independent fiber waveguide like this, and light beam does not change through exit direction after such fiber waveguide, and translation has just taken place.And because the height of every waveguide is and increases progressively distribution, therefore after the linear beam microplate such through a group piled, can be cut apart and arrange again to being the little linear beam of the multistage that increases progressively distribution with the corresponding height of the height of parallelogram thin slice.Pile the microplate heap of perpendicular placement through second group with first group of microplate again, through identical principle, these are highly that the segment linear beam that increases progressively distribution further arranges again is a row segment linear beam.And because light beam has passed through two groups of identical microplates heaps, thin slice highly minimum in second group of microplate heap is corresponding to first group of the highest thin slice of height, so after the shaping light path of light beam each several part is basic identical.This parallelogram flake structure is simple, easy to process, at present domesticly can process fully, so the utility model has overcome the shortcoming of prior art, has kept good shaping effect simultaneously and has obtained higher coupling efficiency thus.
Description of drawings
Fig. 1 is that prior art uses trapezoidal mirror to constitute the light beam leaded light and the reshaper device schematic diagram of the wire semiconductor laser array of beam shaping core, wherein 1 is the wire semiconductor laser array, 2 is the microtrabeculae lens, 3 is the ladder lens reshaper, 4 is cylindrical lens, 5 for being the axisymmetric aspheric surface lens, and 6 is energy transmission optical fibre.
Fig. 2 is that the utility model is used for the beam shaping of linear laser diode array and the plan structure schematic diagram of coupler, wherein 1 is linear laser diode array, 2 is the microtrabeculae lens, 301 first group of glass microplate heap for parallelogram microplate heap reshaper, 302 second group of glass microplate heap for parallelogram microplate heap reshaper, 4 is the axisymmetric aspheric surface lens, and 5 is cylindrical lens, and 6 is energy transmission optical fibre.
Fig. 3 is the front view that constitutes the parallelogram quadrangle microplate of the utility model beam shaping, and black arrow is represented the direction that light beam advances among the figure.
Fig. 4 is the front view of parallelogram microplate heap reshaper of the present utility model, wherein E 1Be linear beam.
Fig. 5 is the left view (promptly seeing along the direction of light beam incident) of parallelogram microplate heap reshaper of the present utility model, wherein E 1Be linear beam.
Fig. 6 be linear beam through first group of glass microplate heap cut apart and arrange again after the optical field distribution schematic diagram.
Fig. 7 is that linear beam is piled by the optical field distribution schematic diagram after further arranging through second group of glass microplate.
Embodiment
The utility model is described in further detail below in conjunction with embodiment and accompanying drawing, but should not limit protection range of the present utility model with this.
See also Fig. 2 earlier, Fig. 2 is that the utility model is used for the beam shaping of linear laser diode array and the plan structure schematic diagram of coupler, as seen from the figure, the utility model is used for the beam shaping and the coupler of linear laser diode array, comprise the microtrabeculae lens 2 that the direction of advance of the light beam that shape diode laser matrix 1 along the line sends sets gradually, reshaper 3, axisymmetric aspheric surface lens 4, the energy transmission optical fibre 6 that cylindrical lens 5 and light beam finally are coupled into, it is characterized in that described reshaper 3 is constituted with the parallelogram microplate glass stack of 302 liang of mutual vertical placements of group by 301, the acute angle that every group of microplate glass stack increases progressively successively by the multi-disc height is that the parallelogram glass flakes of 45 degree closely rearrange, and make one 45 degree limit alignment of every plate sheet, thereby make another 45 degree hypotenuse form stair-stepping inner total reflection face, the corresponding relation of the thin slice between two groups is parallelogram thin slice the highest in first group corresponding to minimum parallelogram thin slice in second group, all the other and the like.The focus of described axisymmetric aspheric surface lens 4 and cylindrical lens 5 coincides with the end of energy transmission optical fibre 6.
The course of work of the utility model device:
The light beam that wire large power laser diode array 1 sends at first compresses through the angle of divergence of 2 pairs of beam fast axis directions of microtrabeculae lens, obtains being similar to linear horizontal light beam.3 pairs of light beams of process parallelogram microplate heap reshaper are cut apart and are recombinated again.Parallelogram microplate heap reshaper 3 is core components of the present utility model, is made up of two groups of identical parallelogram glass microplate heap 301 and 302 perpendicular placements.Fig. 4 and Fig. 5 are respectively the front view and the left views (seeing along optical path direction) of parallelogram microplate heap reshaper 3, with horizontal direction among Fig. 4 is length direction, vertical direction is a short transverse, is the Width of parallelogram microplate perpendicular to the direction of view plane.As can be seen from Figure 3, two parallel inclined-planes of microplate and vertical direction angle are 45 degree, and light runs into two inclined-plane experiences total internal reflection, and each plate sheet just forms a fiber waveguide like this.Microplate height in each group microplate heap increases progressively gradually, and after aliging with one group of inclined-plane, one group of stair-stepping total internal reflection surface is just formed on another group inclined-plane like this.As horizontal line shaped light beam E 1After level enters first group of microplate heap, vertically advanced after first group of inclined-plane reflection and run into second group of inclined-plane, be stepped total internal reflection surface, cut apart and be arranged as one group of segment linear beam of the height stepped distribution corresponding, as shown in Figure 6 with this group bevel altitude.Such light beam enters the second group of microplate heap that is vertical placement with first group of microplate heap again, second group of microplate heap is identical with the structure of first group of microplate heap, its stair-stepping inclined-plane is relative with the stepped inclined-plane group of first group of microplate heap, the order that microplate is placed in the microplate heap makes just that from first group the light beam of outgoing enters the highest thin slice in second group in the highly minimum thin slice, all the other and the like, through identical light beam reorganization principle, light beam is further rearranged, become the little linear beam of row, as shown in Figure 7.Pass through axisymmetric aspheric surface lens 4 and cylindrical lens 5 through over-segmentation more successively in the light beam of reorganization, be converted into small light spot, place energy transmission optical fibre 6, just can realize being coupled efficiently at the minimum position place of hot spot with certain depth of focus.
The sheet of the parallelogram thin slice in the described parallelogram microplate reshaper 3 is several to be determined according to the equal principle of the Lagrange invariant of latter two direction of shaping.The position of the degree of collimation and the parallelogram microplate reshaper 3 of quick shaft direction being put with the microtrabeculae lens is relevant particularly.Because the angles of divergence of 10 degree are still arranged on the slow-axis direction, so reshaper should try one's best near the microtrabeculae lens, thereby guarantees that not wanting too many sheet number just can make all light all enter reshaper.For realizing coupling efficiently, the sheet number of parallelogram microplate should match with the degree of collimation of microtrabeculae lens to the fast axle angle of divergence, makes that the Lagrange invariant of fast axle and slow axis both direction is suitable.If the sheet number of microplate was N during every group of microplate piled, the angle of divergence of quick shaft direction is θ behind microtrabeculae lens 1 collimation F', the yardstick of quick shaft direction are D, and the angle of divergence of slow-axis direction is θ S, the yardstick of slow-axis direction is L, then the Lagrange invariant of slow-axis direction is L SSL, the Lagrange invariant of quick shaft direction is L F=θ ' FD, the Lagrange invariant of slow-axis direction and quick shaft direction is respectively L after the shaping S'=θ SL/N and L ' F=θ ' FDN then makes L according to the equal principle of the Lagrange invariant of latter two direction of shaping S'=L ' F, obtain through arrangement:
N = θ s L θ F ′ D
Because quick shaft direction is nearly diffraction limit,, be not difficult its angle of divergence spent to be compressed to from about 40 to have only the several years at zero point even littler so collimate with 2 pairs of quick shaft directions of microtrabeculae lens.When for example the angle of divergence compression of 2 pairs of fast axles of microtrabeculae lens reaches 80~100 times, the angle of divergence is 0.4~0.5 degree, this moment, the yardstick of quick shaft direction correspondingly was increased to about 100 microns by 1 micron, according to above-mentioned principle can calculate in corresponding every group of parallelogram microplate heap the sheet number of microplate should be about 20~30.
Focus on by axisymmetric aspheric surface lens 4 and cylindrical lens 5 through the light beam after reshaper 3 shapings, the focus that the focal length of choose reasonable axisymmetric aspheric surface lens 4 and cylindrical lens 5 makes both direction is complementary at same position and with the numerical aperture of energy transmission optical fibre, so just can realize the efficient coupling of large power laser diode array to optical fiber.By the optimization to whole coupled system, the energy more than 90% of the laser beam that wire large power laser diode array 1 can be sent is coupled into 0.4 millimeter of core diameter, in the energy transmission optical fibre of numerical aperture 0.22.
Specific embodiment:
2 pairs of length of employing microtrabeculae lens are that 1 centimetre large power laser diode array collimates quick shaft direction, adjust the distance between microtrabeculae lens 2 and the light-emitting area, generally, be not difficult to make the angle of divergence that collimates the fast axle in back less than 0.5 degree, the angle of divergence of slow-axis direction will still remain unchanged this moment, about 10 degree.The yardstick of considering slow axis is along with beam propagation can increase, so the distance between reshaper 3 and the microtrabeculae lens 2 should be less than 3 millimeters, to guarantee that reshaper 3 does not need too many microplate number that linear beam is all entered in the reshaper.Reshaper 3 is made of two groups of microplate heaps, consider that present most of large power laser diode array all is made up of about about 20 discontinuous luminous zone, every group of each tight arrangement of aforesaid parallelogram thin slice by 22 0.5 millimeters thick of microplate heap constitutes, and first group and second group of perpendicular placement, simultaneously the order of flake alignment makes thin slice the highest in the group of winning corresponding to minimum thin slice in second group, and all the other by that analogy.To become the little linear beam of row of 11 millimeters high of 0.5 mm wides through the light beam after the reshaper shaping, the angle of divergence of slow axis (width) direction still is 10 degree, the angle of divergence of fast axle (highly) direction be less than 0.5 degree, be not difficult to calculate at this moment the Lagrange invariant of quick shaft direction and slow-axis direction be about 5.5.Light beam after reshaper 3 shapings successively enters axisymmetric aspheric surface lens 4 and cylindrical lens 5, and the focal length of axisymmetric aspheric surface lens 4 is 20 millimeters, and the focal length of cylindrical lens 5 is 12 millimeters.And suitably adjust the position that axisymmetric aspheric surface lens 4 and cylindrical lens 5 placed, can make focus that light beam focuses on quick shaft direction and slow-axis direction at same position, and have very little focal spot yardstick simultaneously.Axisymmetric aspheric surface lens 4 also can replace with the cylindrical lens of respective focal, do not influence whole coupling effect.The result who focuses on can concentrate on the laser energy more than 90% in 0.4 millimeter the zone, place the energy transmission optical fibre of 0.4 millimeter of core diameter, numerical aperture 0.22 at the focus place, just can realize being coupled efficiently, the energy more than 90% that is about to this diode laser matrix is coupled in this optical fiber.
Show that through on probation the beam shaping of the utility model linear laser diode array and coupler can be with lines The light beam that the shape diode laser matrix sends is cut apart shaping and it is coupled in the energy transmission optical fibre, and tool Have simple in structure, processing with easy for installation, with low cost, shaping effect is better, the advantage that coupling efficiency is higher.

Claims (3)

1. the beam shaping of a linear laser diode array and coupler, comprise the microtrabeculae lens (2) that laser direction of advance that shape diode laser matrix along the line (1) sends is placed successively, beam shaping (3), axisymmetric aspheric surface lens (4), cylindrical lens (5) and energy transmission optical fibre (6), it is characterized in that described beam shaping (3) is a parallelogram microplate heap reshaper, he piles perpendicular placement by two groups of identical microplates of structure and constitutes, every group of microplate heap is that the 45 parallelogram thin slices of spending closely rearrange by the polylith acute angle, the height of each piece parallelogram thin slice increases progressively gradually, and the order of arranging makes thin slice highly the highest in the group microplate heap of winning corresponding to highly minimum thin slice in second group, and the focus of described axisymmetric aspheric surface lens (4) and cylindrical lens (5) is located on the input of described energy transmission optical fibre (6).
2. beam shaping according to claim 1 and coupler is characterized in that the number of the microplate of formation microplate heap in the described parallelogram microplate heap reshaper is determined according to the suitable principle of the Lagrange invariant of latter two direction of shaping.
3. beam shaping according to claim 1 and coupler is characterized in that the also available cylindrical lens of described axisymmetric aspheric surface lens (4) replaces.
CNU2007200676518U 2007-03-07 2007-03-07 Optical beam shaping and coupling device of linear laser diode array Expired - Lifetime CN201032671Y (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100470346C (en) * 2007-03-07 2009-03-18 中国科学院上海光学精密机械研究所 Beam shaping of linear laser diode array and coupling system
CN106842587A (en) * 2015-12-04 2017-06-13 北京润和微光科技有限公司 Diffraction optics method realizes that Gauss light is shaped as the superfine line style uniform light spots of superelevation length-width ratio

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100470346C (en) * 2007-03-07 2009-03-18 中国科学院上海光学精密机械研究所 Beam shaping of linear laser diode array and coupling system
CN106842587A (en) * 2015-12-04 2017-06-13 北京润和微光科技有限公司 Diffraction optics method realizes that Gauss light is shaped as the superfine line style uniform light spots of superelevation length-width ratio
CN106842587B (en) * 2015-12-04 2020-12-15 北京润和微光科技有限公司 The diffraction optical method realizes the shaping of Gaussian light into ultra-fine linear uniform light spots with ultra-high length-width ratio

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