CN114888458B - Parallel rotary cutting machining device and method - Google Patents
Parallel rotary cutting machining device and method Download PDFInfo
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- CN114888458B CN114888458B CN202110942819.XA CN202110942819A CN114888458B CN 114888458 B CN114888458 B CN 114888458B CN 202110942819 A CN202110942819 A CN 202110942819A CN 114888458 B CN114888458 B CN 114888458B
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- lens group
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- light beam
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- 238000005520 cutting process Methods 0.000 title claims abstract description 14
- 238000003754 machining Methods 0.000 title claims description 10
- 238000000034 method Methods 0.000 title abstract description 11
- 238000003672 processing method Methods 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 claims description 7
- 239000004973 liquid crystal related substance Substances 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
- 238000004080 punching Methods 0.000 abstract description 7
- 238000005553 drilling Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a parallel rotary cutting processing device and a parallel rotary cutting processing method, wherein the device comprises a multi-beam generating device, a combined lens group, a two-dimensional rotating device, a first lens group, a second lens group and a third lens group which are sequentially arranged along a light path; the multi-beam generating device is used for generating at least 2 laser beams, the combined lens group is used for realizing the overturning of the beams, the two-dimensional rotating device is used for realizing the pivoting rotation of the beams, and the first lens group and the second lens group are used for adjusting the angles of the beams incident to the third lens group; the lens group is used for realizing focusing of light beams on the surface of a workpiece to be processed. The invention solves the problem of taper of the hole in the processing process and the problem of low punching efficiency.
Description
Technical Field
The invention belongs to the field of laser precise micro deep hole machining, and particularly relates to a parallel rotary cutting machining device and method.
Background
Laser drilling methods are classified into single pulse drilling, multi-pulse drilling, and multi-beam drilling. Single pulse has many advantages, but has the defects of taper, splash, recast layer, microcrack and the like of the processed hole shape; the taper of the hole can be reduced and the contour is better by multi-pulse punching, but the remelting phenomenon can occur on the inner wall of the hole, and in the process of acting on the material by multi-pulse laser, the material is over-processed or remelted at the same position due to the fact that the beam is processed for multiple times, so that the situation of microcracks occurs; the multi-beam punching is to divide the light beam into n beams by means of n-1 spectroscopes and then to converge the light beams by using a focusing mirror, so that each beam of light needs a focusing mirror to finish the processing of a plurality of holes, and the multi-beam punching has the defects that the distance of the holes cannot be controlled and the tiny hole spacing cannot be processed although the processing of the holes is realized, and the processing taper of the holes cannot be controlled because of the limitation of the mechanical outer diameter of a lens, so that the degree of freedom is low.
Therefore, the laser drilling method in the prior art has the problems of taper hole shape, low drilling efficiency and the like.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides a parallel rotary cutting processing device and a parallel rotary cutting processing method, which are used for solving the problems of taper of holes and low punching efficiency in the processing process.
According to an aspect of the present disclosure, there is provided a parallel rotary-cut machining apparatus, including a multi-beam generating device, a combined lens group, a two-dimensional rotating device, a lens group one, a lens group two, and a lens group three, which are sequentially disposed along an optical path; the multi-beam generating device is used for generating at least 2 laser beams, the combined lens group is used for realizing the overturning of the beams, the two-dimensional rotating device is used for realizing the pivoting rotation of the beams, and the first lens group and the second lens group are used for adjusting the angles of the beams incident to the third lens group; the lens group is used for realizing focusing of light beams on the surface of a workpiece to be processed.
In the technical scheme, the multi-beam generating device generates multi-beams, the generated beams are turned over by the combined lens group and then are incident to the two-dimensional rotating device, the two-dimensional rotating device rotates the beams around the axis and then emits the beams to the first lens group, the angle of the beams incident to the third lens group is adjusted by adjusting the relative positions of the first lens group and the second lens group under the condition that the relative distance between the first lens group and the third lens group is kept unchanged, and finally the beams are focused to the surface of a workpiece through the lens group; the technical scheme is composed of a light beam generating device, a combined lens group, a two-dimensional rotating device, a first lens group, a second lens group and a third lens group, so that the distribution of multiple light beams can be realized, and the included angle of each multiple light beam relative to a workpiece to be processed is more than or equal to 90 degrees.
Further, the two-dimensional rotating device comprises two reflection type lenses, each lens is connected with a motor, and the rotation of the motor is used for realizing the rotation of the light beam. Wherein, the reflection type lens can be selected from a vibrating mirror, a digital micro-mirror DMD, and the like.
Further, the angle between the emergent beam of the device and the workpiece to be processed is more than or equal to 90 degrees. The arrangement has the advantage that the side wall of the processed element is smooth and does not have taper.
Further, the distance between the multi-beam generating device and the combined lens group is the distance between the multi-beam generating device and the object focal position of the object focal length of the combined lens group.
Further, the distance between the combined lens group and the two-dimensional rotating device is the sum of the image side focal lengths of the combined lens group.
Further, the distance between the first lens group and the second lens group is the sum of the focal length of the first image side of the lens group and the focal length of the second object side of the lens group.
Further, the distance between the second lens group and the third lens group is the sum of the focal length of the second image side of the lens group and the focal length of the third object side of the lens group.
Further, the combined lens group comprises a first lens and a second lens. The first lens and the second lens form a combined lens group, so that the turnover of the light beam can be realized, the aperture of the light beam incident on the two-dimensional rotating device is not limited, and the modulation of the amplitude and the phase of the space of multiple light beams is realized.
Further, the first lens group and the second lens group are respectively a single lens or a combination of a plurality of lenses.
Further, the multi-beam generating device is a binary optical element, a holographic optical element or a liquid crystal element that is insensitive to the incident beam.
According to an aspect of the present disclosure, there is provided a parallel rotary-cut machining method, implemented based on the apparatus, the method including:
generating at least 2 laser beams by using a multi-beam generating device;
the generated light beam is overturned through the combined lens group;
the turned light beam rotates around the shaft through a two-dimensional rotating device;
the rotated light beam is incident to the first lens group, and the angle of the light beam incident to the third lens group is adjusted by adjusting the relative positions of the first lens group and the second lens group under the condition that the relative distance between the first lens group and the third lens group is kept unchanged;
the adjusted light beam is focused on the surface of the workpiece to be processed through the lens group III.
Compared with the prior art, the invention has the beneficial effects that:
(1) The invention generates multiple beams through the multiple beam generating device, the generated beams are turned over by the combined lens group and then are incident to the two-dimensional rotating device, the two-dimensional rotating device rotates the beams around the axis and then emits the beams to the first lens group, the angle of the beams incident to the third lens group is regulated by regulating the relative positions of the first lens group and the second lens group under the condition that the relative distance between the first lens group and the third lens group is kept unchanged, and finally the beams are focused to the surface of a workpiece through the lens group; the invention is composed of a light beam generating device, a combined lens group, a two-dimensional rotating device, a first lens group, a second lens group and a third lens group, can realize the distribution of multiple light beams, and the included angle of each multiple light beam relative to a workpiece to be processed is more than or equal to 90 degrees.
(2) The parallel rotary cutting processing device provided by the invention can realize simultaneous processing of multiple light beams, and the processed hole inlet and outlet have the same aperture, namely the taper is zero, the relative apertures processed by the multiple light beams are the same, the punching efficiency is high, and the processing effect is good.
Drawings
Fig. 1 is a layout view of the overall structure of a parallel rotary cutting machine according to an embodiment of the present invention.
Fig. 2 is a layout diagram of a two-dimensional and two-dimensional rotation device for a lens according to an embodiment of the invention.
In the figure: 1-multiple beam generating device, 201-first lens, 202-second lens, 3-two-dimensional rotating device, 4-first lens group, 5-second lens group, 6-third lens group and 7-workpiece to be processed.
Detailed Description
The following description of the embodiments of the present invention will be made in detail and with reference to the accompanying drawings, wherein it is apparent that the embodiments described are only some, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
Example 1
As shown in fig. 1-2, the present embodiment provides a parallel rotary-cut machining device, which is obtained by combining a multi-beam generating device 1, a combined lens group, a two-dimensional rotating device 3, a lens group one 4, a lens group two 5 and a lens group three 6. The multi-beam generating device 1 generates multiple beams, the generated beams are turned by the combined lens group and then are incident to the two-dimensional rotating device 3, the two-dimensional rotating device 3 rotates the beams around the axis and then emits the beams to the lens group I4, the angle of the beams incident to the lens group III 6 is adjusted by adjusting the relative positions of the lens group I4 and the lens group II 5 under the condition that the relative distance between the lens group I4 and the lens group III 6 is kept unchanged, and finally the beams are focused on the surface of a workpiece 7 to be processed through the lens group III 6.
The embodiment can realize the distribution of multiple light beams, and besides the multiple light beams, the included angle of each multiple light beam relative to the workpiece 7 to be processed is more than or equal to 90 degrees.
The light beam generated by the multi-beam generating device 1 is a laser light beam of more than 2 beams, and the multi-beam generating device 1 may be a binary optical element insensitive to the incident light beam, a holographic optical element or a liquid crystal element.
The two-dimensional rotating device 3 can ensure that the relative angle between the angles of the laser beams of the multiple beams and the workpiece 7 to be processed is unchanged in the rotating process, can meet the requirement of simultaneously emitting n beams of light, and is suitable for different laser wave bands. The two-dimensional rotating device 3 is used for realizing the pivoting rotation of the light beam, thereby realizing the processing of holes or grooves and the like.
The combined lens group is used for realizing the overturn of the light beams, so that the aperture of the light beams incident to the two-dimensional rotating device is not limited, and the modulation of the amplitude and the phase of the space of the multiple light beams is realized. The combined lens group comprises a first lens 201 and a second lens 202.
Under the condition that the total relative distance between the first lens group 4 and the third lens group 6 is kept unchanged, the angle of the light beam entering the third lens group 6 is adjusted by adjusting the relative positions of the first lens group 4 and the second lens group 5, so that the entrance pupil position of the third lens group 6 is adjusted, and the distribution of angles of multiple light beams with different apertures is realized. The first lens group 4 and the second lens group 5 can be single lenses or a combination of a plurality of lenses.
The third lens group 6 is used for realizing focusing of light beams, the light beams are focused on the surface of the workpiece 7 to be processed, so that simultaneous processing of multiple light beams is realized, the processed hole inlet and the processed hole outlet have the same aperture, namely the taper is zero, the processed relative apertures of the multiple light beams are the same, the processing efficiency is determined by the number of the light beams, namely n light beams exist, and the processing efficiency is n times that of a single light beam.
The distances between the components in this embodiment are as follows: the distance between the multi-beam generating device 1 and the combined lens group is the object focal position of the object focal length of the combined lens group, namely the distance f1. The distance between the combined lens group and the two-dimensional rotating device 3 is l2+l21+l22, which is the sum of the focal lengths of the image sides of the combined lens group, wherein l22=1/2×l23. L4 is the sum of the focal length of the first lens group 5 and the focal length of the second lens group 6, and L5 is the sum of the focal length of the second lens group 6 and the focal length of the third lens group 7. L1, L5, L23, L24 are not limited alone.
Example 2
The embodiment provides a parallel rotary cutting processing method, which is realized by adopting a device obtained by combining a multi-beam generating device 1, a combined lens group, a two-dimensional rotating device 3, a lens group I4, a lens group II 5 and a lens group III 6, and comprises the following steps:
generating at least 2 laser beams by using the multi-beam generating device 1;
the generated light beam is overturned through the combined lens group;
the turned light beam is rotated around the shaft by a two-dimensional rotating device 3;
the rotated light beam is incident to the first lens group 4, and the angle of the light beam incident to the third lens group 6 is adjusted by adjusting the relative positions of the first lens group 4 and the second lens group 5 under the condition that the relative distance between the first lens group 4 and the third lens group 6 is kept unchanged;
the adjusted light beam is focused on the surface of the workpiece 7 to be processed through the lens group III 6.
The embodiment can realize simultaneous processing of multiple light beams, and the processed hole inlet and outlet have the same aperture, namely the taper is zero, the relative apertures processed by the multiple light beams are the same, the punching efficiency is high, and the processing effect is good.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced with equivalents; these modifications or substitutions do not depart from the essence of the corresponding technical solutions from the technical solutions of the embodiments of the present invention.
Claims (9)
1. The parallel rotary cutting processing device is characterized by comprising a multi-beam generating device, a combined lens group, a two-dimensional rotating device, a first lens group, a second lens group and a third lens group which are sequentially arranged along a light path; the multi-beam generating device is used for generating at least 2 laser beams, the combined lens group is used for realizing the overturning of the beams, the two-dimensional rotating device is used for realizing the pivoting rotation of the beams, and the first lens group and the second lens group are used for adjusting the angles of the beams incident to the third lens group; the lens group is used for realizing focusing of light beams on the surface of a workpiece to be processed;
the processing method based on the parallel rotary cutting processing device comprises the following steps:
generating at least 2 laser beams by using a multi-beam generating device;
the generated light beam is overturned through the combined lens group;
the turned light beam rotates around the shaft through a two-dimensional rotating device;
the rotated light beam is incident to the first lens group, and the angle of the light beam incident to the third lens group is adjusted by adjusting the relative positions of the first lens group and the second lens group under the condition that the relative distance between the first lens group and the third lens group is kept unchanged;
the adjusted light beam is focused on the surface of the workpiece to be processed through the lens group III.
2. The parallel rotary cutting machining device according to claim 1, wherein the angle between the outgoing beam of the device and the workpiece to be machined is not less than 90 degrees.
3. The parallel rotational atherectomy device of claim 1, wherein the multi-beam generator and the combined lens are spaced apart by a distance between the multi-beam generator and an object focal position of an object focal length of the combined lens.
4. The parallel rotational atherectomy device of claim 1, wherein the combined lens assembly and the two-dimensional rotating device are spaced apart by a distance equal to the sum of the focal lengths of the combined lens assemblies at the image side.
5. The parallel rotary-cut processing device according to claim 1, wherein the distance between the first lens group and the second lens group is the sum of the focal length of the first lens group and the focal length of the second lens group.
6. The parallel rotary-cut machining device according to claim 1, wherein the distance between the second lens group and the third lens group is the sum of the focal length of the second lens group image side and the focal length of the third lens group object side.
7. The parallel rotational atherectomy device of claim 1, wherein the combined lens assembly comprises a first lens and a second lens.
8. The parallel rotary cutting machining device according to claim 1, wherein the first lens group and the second lens group are respectively a single lens or a combination of a plurality of lenses.
9. The parallel rotational atherectomy device of claim 1, wherein the multi-beam generation device is a binary optical element, a holographic optical element, or a liquid crystal element that is insensitive to the incident beam.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110942819.XA CN114888458B (en) | 2021-08-17 | 2021-08-17 | Parallel rotary cutting machining device and method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110942819.XA CN114888458B (en) | 2021-08-17 | 2021-08-17 | Parallel rotary cutting machining device and method |
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| CN114888458A CN114888458A (en) | 2022-08-12 |
| CN114888458B true CN114888458B (en) | 2023-12-15 |
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| CN114888458A (en) | 2022-08-12 |
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