CN103658975A - Laser beam splitting and processing device - Google Patents
Laser beam splitting and processing device Download PDFInfo
- Publication number
- CN103658975A CN103658975A CN201310642068.5A CN201310642068A CN103658975A CN 103658975 A CN103658975 A CN 103658975A CN 201310642068 A CN201310642068 A CN 201310642068A CN 103658975 A CN103658975 A CN 103658975A
- Authority
- CN
- China
- Prior art keywords
- laser beam
- laser
- unit
- module
- splitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention relates to the field of laser processing, in particular to a laser beam splitting and processing device. The laser beam splitting and processing device comprises a laser focusing and switching module, a laser splitting module and a beam steering module. The laser splitting module can process a single laser into multiple lasers, the laser focusing and switching module can focus lasers and switch spatial space of laser focal points at a high speed, and through combination of the laser splitting module and the laser focusing and switching module, array laser processing with high speed, efficiency and accuracy is realized; through the beam steering module, control content of beam movement trajectories during laser processing is further enriched, and requirements on various processing environments and processing conditions can be met. Compared with conventional laser processing devices, the laser beam splitting and processing device has the advantages that processing accuracy, processing efficiency, processing quality and the like are greatly improved, and the laser beam splitting and processing device adapts to the development trend of modern solid-sate lasers and can be widely applied to the field of laser processing.
Description
Technical field
The present invention relates to field of laser processing, particularly a kind of laser beam splitter processing unit (plant).
Background technology
In prior art, the laser processing device that configuration vibration mirror scanning focuses on, is all to adopt single beam laser processing, and working (machining) efficiency is not high enough, can not meet industrial requirement; And the device that adopts multi-beam laser to process is all based on static focus mode, there is the slow-footed problem of laser spot switching position.And current solid state laser optical fiber laser particularly, all towards high pulse repetition frequency, the ultrashort pulsewidth future development of high power, above-mentioned processing mode, can not want to adapt to the development of current solid state laser, can not give full play to the high pulse repetition frequency of existing laser instrument and the advantage of the ultrashort pulsewidth of high power, therefore must find more efficient laser processing mode, match with current laser developments level.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of laser beam splitter processing unit (plant), has solved the technical problem that in prior art, laser processing device working (machining) efficiency is low, process velocity is slow.
The technical scheme that the present invention solves the problems of the technologies described above is as follows: a kind of laser beam splitter processing unit (plant), comprise Beam Control module, laser beam splitter module and Laser Focusing handover module, described incident beam is irradiated to described Laser Focusing handover module through described Beam Control module, described laser beam splitter module successively; Or described incident beam is irradiated to described Laser Focusing handover module through described laser beam splitter module, described Beam Control module successively;
Described Beam Control module is for regulating the state that is irradiated to the laser beam on it; Described Beam Control module comprises interchangeable laser beam expanding unit, position and light beam dynamic control unit, described laser beam expanding unit is for the described laser beam being irradiated on it is carried out to beam-expanding collimation, and described light beam dynamic control unit is for regulating the motion state that is irradiated to the laser beam on it;
Described laser beam splitter module, for the laser beam irradiating is thereon carried out to beam splitting, forms multiple beam group, and each light beam in described multiple beam group is synchronizeed static or is synchronized with the movement with the described laser beam being irradiated in described laser beam splitter module;
Described Laser Focusing handover module, comprises focus lamp and motion platform; Described focus lamp is static focus mirror or quiescent imaging focus lamp, and described focus lamp, for each light beam irradiating in multiple beam group is thereon carried out to static focus or imaging and focusing, is exported focused beam group; Described motion platform, comprise motion in one dimension platform or the Multi-dimension Motion Platform, described motion platform switches in the locus of different machining cells for controlling each laser spot of described each light beam of focused beam group, or at a machining cell place, the scanning motion of each laser spot of described focused beam group is carried out to synkinesia control.
The invention has the beneficial effects as follows: the present invention is by the combination of described Laser Focusing handover module, described laser beam splitter module and described Beam Control module, can realize multi-beam laser and carry out synchronizing focus processing, possess quick focus switches and high accuracy focus switching capability simultaneously, can high efficiency and the processing of high-precision multi-path laser focusing synchronous, be applicable to the fields such as laser cutting, boring, milling, welding, improved significantly working (machining) efficiency.Simultaneously, Laser Focusing handover module of the present invention comprises focus lamp and motion platform, described motion platform can switch each laser spot of each light beam of sets of beams focusing on through described focus lamp in the locus of different machining cells, realize big width laser Milling Process; Or at a machining cell place, the scanning motion of each laser spot of described focused beam group is carried out to synkinesia control, further enriched laser beam space track modulation, realize more complicated laser processing mode.
On the basis of technique scheme, the present invention can also do following improvement.
Described laser beam splitter module is any one of the first beam splitting unit, the second beam splitting unit, the 3rd beam splitting unit; Or described laser beam splitter module is the tandem compound of at least two kinds in the first beam splitting unit, the second beam splitting unit, the 3rd beam splitting unit, described tandem compound, for the laser beam being irradiated on it is carried out to beam splitting, forms multiple beam group;
Any one that described the first beam splitting unit is micro optical element or multiple tandem compound, described micro optical element is for carrying out light splitting to the laser beam irradiating thereon; Described micro optical element comprises binary optical elements, diffraction grating, microlens array or holographic optical elements (HOE); Described diffraction grating comprises one dimension transmission-type diffraction grating, two-dimentional transmission-type diffraction grating, 3-D transmission formula diffraction grating or reflective gratings;
Described the second beam splitting unit is the tandem compound of optical thin film light-splitting device and optical mirror; Or described the second beam splitting unit is the tandem compound of optical thin film light-splitting device, optical mirror and slide;
Described the 3rd beam splitting device is the tandem compound of birefringece crystal and optical mirror; Or described the 3rd beam splitting unit is the tandem compound of birefringece crystal, optical mirror and slide.
Described micro optical element, upper in the development of optics and photoelectron technology, the novel optical element of developing, has the advantages such as volume is little, quality is light, cost is low, the new functions such as small, the array of realizing that ordinary optical element is difficult to realize, integrated, imaging and corrugated conversion.Described micro optical element, the approach of propagating according to light can be divided into diffraction optical element and the large class of refractiveness optical element two, comprise binary optical elements, diffraction grating, microlens array or holographic optical elements (HOE), be applied in laser optics field and can change laser beam corrugated, realize optical beam transformation, as the collimation of light beam, shaping, beam splitting etc.
Described binary optical elements, a kind of for diffraction optical element, its diffraction theory based on light wave, utilize CAD, and by ultra-large integrated (VLSI) circuit production technique, (or traditional optical device surface) etching produces the embossment structure of two or more step degree of depth on sheet base, form pure phase position, the coaxial diffraction optical element reproducing, its diffraction efficiency is high, and beam shaping is effective, beam splitting good uniformity.
Described grating, also claims diffraction grating, mainly contains four fundamental propertys: dispersion, beam splitting, polarization and phase matched, overwhelming majority's application of grating is all based on this four specific character.The beam splitting characteristic of grating refers to that grating can be divided into a branch of incident monochromatic light the ability of multi beam emergent light, is divided into reflecting diffraction grating and the large class of transmission diffraction grating two, can be applied in the fields such as light interconnects, light lotus root is closed, Uniform Illumination, optical communication, photometry calculation.The Performance Evaluating Indexes of grating has: diffraction efficiency, splitting ratio, compression ratio, hot spot heterogeneity and facular model etc.Described transmission-type diffraction grating is divided into one dimension transmission-type diffraction grating, two-dimentional transmission-type diffraction grating, 3-D transmission formula diffraction grating, and described one dimension transmission-type diffraction grating is to laser beam splitter, and the laser beam after beam splitting is in same plane; Described two-dimentional transmission-type diffraction grating is to laser beam splitter, and the laser beam after beam splitting is not in same plane, and institute's divided beams can distribute by rectangular array, can circumference array distribution also can in two planes of quadrature, distribute, and other situation spatial distributions etc.; Described 3-D transmission formula diffraction grating, the laser beam after beam splitting is not only two-dimensional space array distribution, and along with Laser Transmission direction, and after Laser Focusing, during every a branch of Laser Focusing, can present long depth of focus or short depth of focus feature.
Described microlens array is the array that micron-sized lens form by clear aperature and relief depth, it will spatially be divided into many small parts before a complete laser wave, every part is all focused on focal plane by corresponding lenslet, a series of lenticules just can obtain the plane being comprised of a series of focuses, in multiple systems such as wavefront sensing, light cumulative, light shapings, can be used widely, in this processing unit (plant), possesses good spectrophotometric result.
Described holographic optical elements (HOE) adopts holographic method to make, it is based on interference of light and diffraction principle, can complete the functions such as collimation, focusing, imaging, beam splitting, beam deflection and beam flying, in processing unit (plant) of the present invention, there is good spectrophotometric result.
Further, the spacing of described laser beam splitter module and described Laser Focusing handover module is adjustable, can regulate interior each light beam of described multiple beam group at the relative position of focus lamp porch, thereby can adjust the relative position of described each laser spot of focused beam group; The light splitting surface of described laser beam splitter module can change according to the rotation of described laser beam splitter module, described laser beam splitter module is rotated around the optical axis that irradiates the laser beam on it, and the array beams of its output distributes and also can rotate along the optical axis of described laser beam.
Further, the light beam dynamic control unit that described laser beam splitter processing unit (plant) comprises one or more series connection.
Further, when described incident beam passes through described laser beam splitter module, described laser beam expanding unit, described light beam dynamic control unit successively, while being irradiated to described Laser Focusing handover module; Or when described incident beam is irradiated to described Laser Focusing handover module through described laser beam splitter module, described light beam dynamic control unit, described laser beam expanding unit successively; Or when described incident beam is irradiated to described Laser Focusing handover module through described light beam dynamic control unit, described laser beam expanding unit, described laser beam splitter module successively, described light beam dynamic control unit comprises reflective optical devices and the motor or the piezoelectric ceramics that for controlling described reflective optical devices, carry out deflection or translation.
Adopt the beneficial effect of above-mentioned further scheme to be: when described laser beam expanding unit is arranged on after described light beam dynamic control unit, described laser beam expanding unit is when completing laser bundle-enlarging collimation, also completed the work that the laser motion track imaging after described light beam dynamic control unit modulation is amplified, like this, necessarily entering under the beam motion track prerequisite of Laser Focusing handover module, described light beam dynamic control unit only need to carry out very little modulation, and described like this light beam dynamic control unit modulating speed can further improve.
Because the angle that carries out each light beam after beam splitting through described laser beam splitter module is limited, for example, after diffraction grating beam splitting, it is larger that the angle of each light beam is just difficult to do, for example reach 30 degree, generally all in 10 degree, so need to retain separated for each laser beam of certain space between described laser beam splitter module and described Laser Focusing handover module, if described Beam Control module is placed between described laser beam splitter module and described Laser Focusing handover module, whole apparatus structure can be more compact.
Further, described light beam dynamic control unit is that the first control subelement, second is controlled any one of subelement, the 3rd control subelement; Or described light beam dynamic control unit is that the first control subelement, second is controlled subelement, the 3rd and controlled in subelement the tandem compound of at least two kinds, and described tandem compound is for regulating the motion state that is irradiated to the laser beam on it;
Described the first control subelement comprises transmission optical component and described transmission optical component swings or motor or the piezoelectric ceramics of translation for controlling;
Described second controls subelement comprises acousto-optic modulator, and described acousto-optic modulator regulates the Bragg grating angle of reflection of described laser beam by changing the carrier frequency of drive source, change described Laser beam propagation state;
The described the 3rd controls the laser beam gyrator unit that subelement comprises a laser beam gyrator unit or at least two series connection; Described laser beam gyrator unit comprises rotation transmission optical component and the drive unit rotating for controlling described rotation transmission optical component; When the described the 3rd controls the laser beam gyrator unit that subelement is two or more series connection, described laser beam gyrator unit is independently controlled rotation separately, the optical axis of described last laser beam gyrator unit output beam carries out rotation along the optical axis of its incident light, the optical axis of the output beam of a rear laser beam gyrator unit revolves round the sun along the optical axis of last laser beam gyrator unit output beam, and carries out rotation along revolution track.
Adopt the beneficial effect of above-mentioned further scheme to be: for described light beam dynamic control unit, can be any one or a few tandem compound of above-mentioned subelement.If adopt laser beam gyrator unit, can to laser beam, carry out even ultrahigh speed rotation control of high speed by drive motors, compare the mode that galvanometer swings, there is higher process velocity and machining accuracy, in the processing of the low material of a lot of processing threshold values or thin-film material, can significantly improve Laser Processing effect and quality.
Further, described transmission optical component is transmission planar optics element or optical prism optical element; Described rotation transmission optical component is any one or multiple tandem compound of prism wedge, lens, planar optics element, one dimension transmission-type diffraction optical element, two-dimentional transmission-type diffraction optical element, 3-D transmission formula diffraction optical element, microlens array.
Described transmission-type diffraction optical element is divided into one dimension transmission-type diffraction optical element, two-dimentional transmission-type diffraction optical element, 3-D transmission formula diffraction optical element, described one dimension transmission-type diffraction optical element is to laser beam splitter, and the laser beam after beam splitting is in same plane; Described two-dimentional transmission-type diffraction optical element is to laser beam splitter, laser beam after beam splitting is not in same plane, institute's divided beams can distribute by rectangular array, can circumference array distribution also can in two planes of quadrature, distribute, and other situation spatial distributions etc.; Described 3-D transmission formula diffraction optical element, the laser beam after beam splitting is not only two-dimensional space array distribution, and along with Laser Transmission direction, and after Laser Focusing, during every a branch of Laser Focusing, can present long depth of focus or short depth of focus feature.
Further, the drive unit of described laser beam gyrator unit is hollow spindle motor, and described rotation transmission optical component is arranged on the main shaft of described hollow spindle motor, and described electric machine main shaft is hollow shaft;
Or, the drive unit of described laser beam gyrator unit is motor belt transmission device, described motor belt transmission device comprises motor, driving wheel, driven pulley and is set in the Timing Belt on described driving wheel and driven pulley, described motor is arranged on described driving wheel, and described rotation transmission optical component is fixedly mounted on described driven pulley.
Further, described hollow spindle motor is air supporting hollow spindle motor, magnetic floating hollow spindle motor, the hollow electric spindle motor of hydraulic pressure or servo hollow spindle motor.
When the hollow electric main shaft of described hollow electric spindle motor is arranged on air-bearing, this hollow electric spindle motor is also referred to as the hollow electric spindle motor of air supporting, and described air-bearing refers to by import pressure air in bearing bore realizes the bearing that hollow electric main shaft suspends in air.In described air-bearing bearing bore, the gap of pressure release is minimum, the high accuracy suspension that has guaranteed hollow electric main shaft is rotated, and can stably rotate accurately, possess high rotating speed, pinpoint accuracy, zerofriction force, without wearing and tearing, do not need lubricating oil, have remarkable speed control performance, compact conformation, lightweight, vibrate the advantages such as little, noise is low, the little response of inertia is fast.
When the hollow electric main shaft of described hollow electric spindle motor is arranged on Hydrodynamic and-static Bearing, this hollow electric spindle motor is also referred to as the hollow electric spindle motor of hydraulic pressure.Described Hydrodynamic and-static Bearing refers to that a kind of outer portion supplies with constant pressure oil, in bearing, sets up the bearing that makes electric main shaft oil film of suspension high voltage static pressure carrying all the time from start to stopping.Described Hydrodynamic and-static Bearing has and there is no wearing and tearing, long service life, starting power are little, extremely low, be even also applicable feature under zero speed.In addition, this bearing also has that running accuracy is high, oil film rigidity is large, can suppress the advantages such as film shocks.The hollow electric spindle motor of described hydraulic pressure, owing to having adopted Hydrodynamic and-static Bearing, therefore possesses very high rigidity and damping, possesses higher rotation speed and service life.
When the hollow electric main shaft of described hollow electric spindle motor is arranged on electromagnetic suspension bearing, this hollow electric spindle motor is also referred to as the floating hollow electric spindle motor of magnetic.Described electromagnetic suspension bearing is that a kind of electromagnetic force of utilizing is suspended in by electric main shaft the bearing that contactless supporting is realized in space, have without friction, without lubricated, without oil pollution, the advantage such as energy consumption is low, noise is little, the life-span is long, be specially adapted in the particular surroundings such as vacuum, super dead room, high speed.Described magnetic floats hollow electric spindle motor, owing to adopting electromagnetic suspension bearing, therefore possesses high speed performance good, and precision is high, easily realizes the advantages such as diagnosis and on-line monitoring.
When the hollow electric main shaft of described hollow electric spindle motor is arranged on ceramic bearing, this hollow electric spindle motor is also referred to as the hollow electric spindle motor of ceramic bearing.Described ceramic bearing refers to that the rolling element of bearing uses Ceramic Balls, and bearing ring is still the bearing of steel ring, and ceramic bearing standardization level is high, is meeting under the condition of certain rotating speed, possesses the low advantage simple in structure of cost.The hollow electric main shaft of the hollow electric spindle motor of described ceramic bearing is arranged on ceramic bearing, and the rotating speed of this ceramic bearing turns above per minute 10,000.
Further, described Laser Focusing handover module disposes light path coaxial camera head monitor device.
Adopt the beneficial effect of above-mentioned further scheme to be: configuration light path coaxial camera head monitor device, can carry out very easily the location of focal position of laser, and in laser processing procedure, can observe easily the state of Reciprocity of Laser & Materials.
Further, in described focused beam group, each light beam is oval perpendicular to the cross section of each focus spot of optical axis.
Adopt the beneficial effect of above-mentioned further scheme to be: if the long axis direction of oval focal beam spot is the laser spot direction of motion, when laser pulse repetition frequency one timing, can improve laser scribing speed, pulse overlap degree, joint-cutting section smooth degree so; If the short-axis direction of oval focal beam spot is the laser spot direction of motion, can obtain wider joint-cutting so, in some Laser Processing occasion, the material slag that wide joint-cutting is conducive to laser cutting boring generation sprays effectively from joint-cutting.
Accompanying drawing explanation
Fig. 1 is the structural representation of the embodiment of the present invention 1.
The specific embodiment
Below in conjunction with accompanying drawing, principle of the present invention and feature are described, example, only for explaining the present invention, is not intended to limit scope of the present invention.
Laser beam splitter processing unit (plant) of the present invention is before carrying out Laser Focusing and switching, adopt Beam Control module to carry out beam-expanding collimation and motor adjustment to incident beam, and adopt laser beam splitter module to carry out beam splitting to the laser beam of described Beam Control module output, or first adopt laser beam splitter module to carry out beam splitting to incident beam, each light beam of sets of beams after beam splitting carries out beam-expanding collimation and motion state adjusting through Beam Control module again, thereby realizes the multi-path laser synchronous processing to workpiece; Laser Focusing handover module has further enriched laser beam space track modulation simultaneously, realizes more complicated laser processing mode.If control the cross section of the focus spot perpendicular to optical axis of described each focused beam, be oval, be very suitable for laser scribing.
Operation principle of the present invention is as follows: incident beam is after Beam Control module is carried out beam-expanding collimation and motion state adjusting, form the first light beam, described the first light beam irradiates is in described laser beam splitter module, form the second sets of beams, each light beam in described the second sets of beams and described incident beam, the first light beam are synchronized with the movement; Or incident beam is after the beam splitting of laser beam splitter module, form the first sets of beams, each light beam of described the first sets of beams is after Beam Control module is carried out beam-expanding collimation and motion state adjusting, form the second sets of beams, the relative incident beam of described the first sets of beams is static, and relative the first sets of beams of described the second sets of beams is synchronized with the movement; Each light beam irradiates of described the second sets of beams is to described Laser Focusing handover module, by described Laser Focusing handover module, each light beam is focused on high-speed displacement and switched, control each laser spot and between different machining cells, switch or at a machining cell place, laser spot scanning motion carried out to synkinesia control, reach to workpiece carry out on a large scale, the object of high-speed high-quality amount Laser Processing.
Described Beam Control module comprises light beam dynamic control unit, described light beam dynamic control unit carries out status adjustment to the laser beam being irradiated on it, described state comprises beam motion state, light beam polarization state and Laser beam propagation state etc., as beam deflection, light beam translation or rotation.
Light beam dynamic control unit can adopt the structures such as laser beam gyrator unit, Piezoelectric Ceramic diaphotoscope.The structure of described laser beam rotation system unit adopts the mode of driven by motor rotation transmission optical component conventionally, described motor can be air supporting hollow spindle motor, the floating hollow spindle motor of magnetic or servo hollow spindle motor, for example air-floating main shaft motor speed can reach 160,000 revolutions per seconds, driven rotary transmission optical component is realized at a high speed even ultrahigh speed rotation, meets actual a large amount of process requirements.Now, rotation transmission optical component rotary speed is at a high speed at 5000 revs/min to 50,000 revs/min, at 50,000 revs/min, is ultrahigh speed above.
Embodiment 1:
The structural representation of Fig. 1 when to be a kind of laser beam splitter processing unit (plant) of the present invention apply in aluminium oxide ceramics boring, as shown in Figure 1: comprise Beam Control module, laser beam splitter module and Laser Focusing handover module, described workpiece to be processed 89 is 1000 micron thickness alundum (Al2O3) potsherds, is fixedly mounted on motion platform.
The Beam Control module of the present embodiment comprises laser beam expanding unit (not indicating in figure) and light beam dynamic control unit.
The incident beam 79 of the present embodiment for diameter be the collimated light beam of 10 millimeters, its relevant parameter is as follows: optical maser wavelength 532 nanometers, beam quality factor is less than 1.2, hot spot circularity is greater than 90 percent, 35 watts of mean powers, single mode gauss laser (laterally field intensity is Gaussian distribution), pulse recurrence frequency 50 KHzs.
The described light beam dynamic control unit of the present embodiment comprises a laser beam gyrator unit, and described laser beam gyrator unit comprises rotation transmission optical component and for driving, rotates and state the drive unit that transmission optical component rotates.Preferably, described rotation transmission optical component is any one or multiple tandem compound of prism wedge, lens, planar optics element, transmission-type diffraction optical element, microlens array.In the present embodiment, described rotation transmission optical component is tilt flat plate quartz glass 80, and described dull and stereotyped quartz glass 80 thickness are 6 millimeters, and refractive index is 1.45, and two sides is all coated with the anti-reflection film of 532 nanometers.Described drive unit can be hollow spindle motor or motor belt transmission device.If drive unit is hollow spindle motor, can be air supporting hollow spindle motor, magnetic floating hollow spindle motor, the hollow electric spindle motor of hydraulic pressure or servo hollow spindle motor, in the present embodiment, adopt air supporting hollow spindle motor, described dull and stereotyped quartz glass 80 tilts to be fixed on the hollow spindle 81 of described air supporting hollow spindle motor, 15 millimeters of air-floating main shaft 81 diameter of bores, 180,000 revs/min of air-floating main shaft motor speeds.In other embodiments, described drive unit can also adopt motor belt transmission device, described motor belt transmission device comprises motor, driving wheel, driven pulley and is set in the Timing Belt on described driving wheel and driven pulley, described motor is arranged on described driving wheel, and described dull and stereotyped quartz glass 80 is fixedly mounted on described driven pulley.
In other embodiments, described light beam dynamic control unit also can be by least two laser beam gyrator cell formations, described laser beam gyrator unit is independently controlled rotation separately, the output beam optical axis of last laser beam gyrator unit carries out rotation along the optical axis of its incident beam, the optical axis of the output beam of a rear laser beam gyrator unit revolves round the sun along the optical axis of the output beam of last laser beam gyrator unit, and carries out rotation along revolution track.
Described laser beam splitter module is transmission-type diffraction grating 83, and laser beam splitter ratio is designed to 1 minute 4, adjacent angle of diffraction 5 degree.In other preferred embodiments, described laser beam splitter module can be composed in series by one or more diffraction element, also even multidimensional diffraction beam splitting element is alternative can to adopt two dimension, can also be formed by discrete optical element, the combination of for example combination of divided thin film optical element and speculum, slide, or birefringece crystal and speculum, slide etc.
In the present embodiment, described Laser Focusing handover module comprises quiescent imaging focus lamp and three-dimensional motion platform (the three-dimensional linear motion platform of XYZ, 500 millimeters * 500 millimeters of XY direction range of movement, 20 millimeters of Z axis ranges), described quiescent imaging focus lamp carries out imaging and focusing for each light beam in the second sets of beams 84 to from described laser beam splitter module 83 outputs, output focused beam group 88; Described three-dimensional motion platform switches in the locus of different machining cells for controlling each laser spot of described each light beam of focused beam group; Or the scanning motion of each laser spot of described focused beam group 88 is carried out to synkinesia control at a machining cell place, and the elevating movement of workpiece to be processed 89.
The light path flow process of the present embodiment is as follows: the incident beam 79 through beam-expanding collimation is irradiated to described laser beam gyrator unit, form the first light beam 82, described the first light beam 82 is after 83 light splitting of transmission-type diffraction grating, form the second sets of beams 84, the second sets of beams 84 reflects to form the 3rd sets of beams 86 through plane reflection eyeglass 85, described the 3rd sets of beams 86 is carried out imaging and focusing through quiescent imaging focus lamp 87, obtain focused beam group 88, described focused beam group 88 directly acts on workpiece to be processed 89, described to be processed 89 is fixed on described three-dimensional motion platform (not indicating in figure).
Every batch of array hole completion of processing, described three-dimensional motion platform just moves to next position each beam focus of focused beam group 88, and in this process, laser is black out; When described three-dimensional motion platform (in figure do not indicate) lock again motionless, Laser output now.By described Beam rotation subelement, form the first light beam 82 of High Rotation Speed, the first light beam 82 of High Rotation Speed is diffracted to the second sets of beams 84 of four bundle High Rotation Speeds through transmission-type diffraction grating 83, four bundle light of described the second sets of beams 84 are all done and being synchronized with the movement of the first light beam 82, described focused beam group 88, due to the imaging and focusing effect of quiescent imaging focus lamp 87, can depict corresponding circle on to be processed 89 relevant positions.In the present embodiment, when described focused beam group 88 is carried out Drilling operation with alundum (Al2O3) potsherd 89, described three-dimensional motion platform (not indicating in figure) can move simultaneously, be included in circular motion in XY plane and the motion of Z-direction (the beam Propagation direction of described focused beam group 88), the motion of the Z-direction of described three-dimensional linear stage (not indicating in figure), for adjusting each light beam of described focused beam group 88, to focus on the relative position relation of focus and described alundum (Al2O3) potsherd 89, 1mm thickness aluminium oxide ceramics need to repeatedly be adjusted focus and just can drill.
In the present embodiment, change the distance of described laser beam splitter module and Laser Focusing handover module, can change the position relationship of each laser spot in described focused beam group 88, for example spacing size.The position of described laser beam splitter module and Beam Control module also can exchange, when described Beam Control module is placed between described laser beam splitter module and described Laser Focusing handover module, not only can guarantee the separation of each light beam after the beam splitting of described laser beam splitter module, realize processing effect, and the structure of whole device is compacter, before or after simultaneously now the laser beam expanding unit of described Beam Control module can be taken out separately and is placed in described laser beam splitter module.In described Beam Control inside modules, described laser beam expanding unit and described light beam dynamic control unit position are also interchangeable, when described laser beam expanding unit is placed in after described light beam dynamic control unit, described laser beam expanding unit is when completing laser bundle-enlarging collimation, also completed the work that the laser motion track imaging after described light beam dynamic control unit modulation is amplified, like this, in assurance, enter under the beam motion track prerequisite of Laser Focusing handover module, described light beam dynamic control unit only need to carry out very little modulation, described like this light beam dynamic control unit modulating speed can further improve.
The light splitting surface of described laser beam splitter module can change according to the rotation of described laser beam splitter module, and described laser beam splitter module is rotated around the optical axis that irradiates the laser beam on it, and the array beams of its output distributes and also can rotate along the optical axis of described laser beam.
The benefit of this processing mode of the present embodiment is, combine the High Rotation Speed advantage of laser rotary subelement, the processing of the single channel of laser beam splitter becomes the advantage of multichannel processing, the advantage of vibration mirror scanning high speed switched laser focus, realized the boring of high-speed and high-efficiency high-precision laser array.
The foregoing is only preferred embodiment of the present invention, in order to limit the present invention, within the spirit and principles in the present invention not all, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (11)
1. a laser beam splitter processing unit (plant), it is characterized in that: comprise Beam Control module, laser beam splitter module and Laser Focusing handover module, described incident beam is irradiated to described Laser Focusing handover module through described Beam Control module, described laser beam splitter module successively; Or described incident beam is irradiated to described Laser Focusing handover module through described laser beam splitter module, described Beam Control module successively;
Described Beam Control module is for regulating the state that is irradiated to the laser beam on it; Described Beam Control module comprises interchangeable laser beam expanding unit, position and light beam dynamic control unit; Described laser beam expanding unit is for the described laser beam being irradiated on it is carried out to beam-expanding collimation, and described light beam dynamic control unit is for regulating the motion state that is irradiated to the laser beam on it;
Described laser beam splitter module, for the laser beam irradiating is thereon carried out to beam splitting, forms multiple beam group, and each light beam in described multiple beam group is synchronizeed static or is synchronized with the movement with the laser beam being irradiated in described laser beam splitter module;
Described Laser Focusing handover module, comprises focus lamp and motion platform; Described focus lamp is static focus mirror or quiescent imaging focus lamp, and described focus lamp, for each light beam irradiating in multiple beam group is thereon carried out to static focus or imaging and focusing, is exported focused beam group; Described motion platform, comprise motion in one dimension platform or the Multi-dimension Motion Platform, described motion platform switches in the locus of different machining cells for controlling each laser spot of described each light beam of focused beam group, or at a machining cell place, the scanning motion of each laser spot of described focused beam group is carried out to synkinesia control.
2. laser beam splitter processing unit (plant) according to claim 1, is characterized in that: described laser beam splitter module is any one of the first beam splitting unit, the second beam splitting unit, the 3rd beam splitting unit; Or described laser beam splitter module is the tandem compound of at least two kinds in the first beam splitting unit, the second beam splitting unit, the 3rd beam splitting unit, described tandem compound, for the laser beam being irradiated on it is carried out to beam splitting, forms multiple beam group;
Any one that described the first beam splitting unit is micro optical element or multiple tandem compound, described micro optical element is for carrying out light splitting to the laser beam irradiating thereon; Described micro optical element comprises binary optical elements, diffraction grating, microlens array or holographic optical elements (HOE); Described diffraction grating comprises one dimension transmission-type diffraction grating, two-dimentional transmission-type diffraction grating, 3-D transmission formula diffraction grating or reflective gratings;
Described the second beam splitting unit is the tandem compound of optical thin film light-splitting device and optical mirror; Or described the second beam splitting unit is the tandem compound of optical thin film light-splitting device, optical mirror and slide;
Described the 3rd beam splitting device is the tandem compound of birefringece crystal and optical mirror; Or described the 3rd beam splitting unit is the tandem compound of birefringece crystal, optical mirror and slide.
3. laser beam splitter processing unit (plant) according to claim 1, is characterized in that: the spacing of described laser beam splitter module and described Laser Focusing handover module is adjustable; The light splitting surface of described laser beam splitter module changes according to the rotation of described laser beam splitter module.
4. according to the arbitrary described laser beam splitter processing unit (plant) of claim 1～3, it is characterized in that: the light beam dynamic control unit that described laser beam splitter processing unit (plant) comprises one or more series connection.
5. laser beam splitter processing unit (plant) according to claim 4, is characterized in that: when described incident beam passes through described laser beam splitter module, described laser beam expanding unit, described light beam dynamic control unit successively, while being irradiated to described Laser Focusing handover module; Or when described incident beam is irradiated to described Laser Focusing handover module through described laser beam splitter module, described light beam dynamic control unit, described laser beam expanding unit successively; Or when described incident beam is irradiated to described Laser Focusing handover module through described light beam dynamic control unit, described laser beam expanding unit, described laser beam splitter module successively, described light beam dynamic control unit comprises reflective optical devices and the motor or the piezoelectric ceramics that for controlling described reflective optical devices, carry out deflection or translation.
6. laser beam splitter processing unit (plant) according to claim 4, is characterized in that: described light beam dynamic control unit is that the first control subelement, second is controlled any one of subelement, the 3rd control subelement; Or described light beam dynamic control unit is that the first control subelement, second is controlled subelement, the 3rd and controlled in subelement the tandem compound of at least two kinds, and described tandem compound is for regulating the motion state that is irradiated to the laser beam on it;
Described the first control subelement comprises transmission optical component and described transmission optical component swings or motor or the piezoelectric ceramics of translation for controlling;
Described second controls subelement comprises acousto-optic modulator, and described acousto-optic modulator regulates the Bragg grating angle of reflection of described laser beam by changing the carrier frequency of drive source, change described Laser beam propagation state;
The described the 3rd controls the laser beam gyrator unit that subelement comprises a laser beam gyrator unit or at least two series connection; Described laser beam gyrator unit comprises rotation transmission optical component and the drive unit rotating for controlling described rotation transmission optical component; When the described the 3rd controls the laser beam gyrator unit that subelement is two or more series connection, described laser beam gyrator unit is independently controlled rotation separately, the optical axis of described last laser beam gyrator unit output beam carries out rotation along the optical axis of its incident light, the optical axis of the output beam of a rear laser beam gyrator unit revolves round the sun along the optical axis of last laser beam gyrator unit output beam, and carries out rotation along revolution track.
7. laser beam splitter processing unit (plant) according to claim 6, is characterized in that: described transmission optical component is transmission planar optics element or optical prism optical element; Described rotation transmission optical component is any one or multiple tandem compound of prism wedge, lens, planar optics element, one dimension transmission-type diffraction optical element, two-dimentional transmission-type diffraction optical element, 3-D transmission formula diffraction optical element, microlens array.
8. laser beam splitter processing unit (plant) according to claim 6, it is characterized in that: the drive unit of described laser beam gyrator unit is hollow spindle motor, described rotation transmission optical component is arranged on the main shaft of described hollow spindle motor, and described electric machine main shaft is hollow shaft;
Or, the drive unit of described laser beam gyrator unit is motor belt transmission device, described motor belt transmission device comprises motor, driving wheel, driven pulley and is set in the Timing Belt on described driving wheel and driven pulley, described motor is arranged on described driving wheel, and described rotation transmission optical component is fixedly mounted on described driven pulley.
9. laser beam splitter processing unit (plant) according to claim 8, is characterized in that: described hollow spindle motor is air supporting hollow spindle motor, magnetic floating hollow spindle motor, the hollow electric spindle motor of hydraulic pressure or servo hollow spindle motor.
10. according to the arbitrary described laser beam splitter processing unit (plant) of claim 5～9, it is characterized in that: described Laser Focusing handover module disposes light path coaxial camera head monitor device.
11. according to the laser beam splitter processing unit (plant) of claim 10, it is characterized in that: in described focused beam group, each light beam is ellipse perpendicular to the cross section of each focus spot of optical axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310642068.5A CN103658975B (en) | 2013-12-03 | 2013-12-03 | Laser beam splitting and processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310642068.5A CN103658975B (en) | 2013-12-03 | 2013-12-03 | Laser beam splitting and processing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103658975A true CN103658975A (en) | 2014-03-26 |
| CN103658975B CN103658975B (en) | 2017-02-15 |
Family
ID=50298416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310642068.5A Active CN103658975B (en) | 2013-12-03 | 2013-12-03 | Laser beam splitting and processing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103658975B (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104158067A (en) * | 2014-08-22 | 2014-11-19 | 苏州大学 | Laser stripping method for wire sheath |
| CN106475685A (en) * | 2016-12-07 | 2017-03-08 | 常州英诺激光科技有限公司 | The device of a kind of raising material laser marking quality and efficiency and marking method |
| WO2019019424A1 (en) * | 2017-07-25 | 2019-01-31 | 英诺激光科技股份有限公司 | Method for reducing cutting conicity and increasing cutting speed using multiple ultrafast laser beams |
| CN109290676A (en) * | 2018-11-21 | 2019-02-01 | 浙江龙游道明光学有限公司 | A kind of anti-fake hyperbola marking device of Retroflective article |
| CN109323657A (en) * | 2018-08-29 | 2019-02-12 | 桂林电子科技大学 | A method of measurement optical interconnection module key position postwelding alignment offset |
| CN109702329A (en) * | 2019-03-06 | 2019-05-03 | 广东工业大学 | A kind of array laser processing method |
| CN111496372A (en) * | 2019-01-31 | 2020-08-07 | 通用电气公司 | System and method for automated laser ablation |
| CN112004633A (en) * | 2018-04-12 | 2020-11-27 | 通快机床两合公司 | Device for machining a workpiece, laser machining apparatus and method |
| CN114700628A (en) * | 2022-06-06 | 2022-07-05 | 一道新能源科技(衢州)有限公司 | Device for slotting focused laser birefringence perc battery piece |
| CN114888458A (en) * | 2021-08-17 | 2022-08-12 | 武汉华工激光工程有限责任公司 | Parallel rotary cutting machining device and method |
| CN117239527A (en) * | 2023-11-14 | 2023-12-15 | 拉普拉斯新能源科技股份有限公司 | Laser device, laser processing system and processing method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1560965A (en) * | 2004-02-26 | 2005-01-05 | 天津大学 | Microstructure fibre-optical femto second white light laser generator |
| WO2006000549A1 (en) * | 2004-06-29 | 2006-01-05 | Hitachi Via Mechanics, Ltd. | Laser machining device for drilling holes into a workpiece comprising an optical deflecting device and a diverting unit |
| CN101909804A (en) * | 2008-01-10 | 2010-12-08 | 以色列商奥宝科技股份有限公司 | Multiple beam drilling system |
| JP2011110591A (en) * | 2009-11-27 | 2011-06-09 | Pioneer Electronic Corp | Laser machining device |
| US20120104284A1 (en) * | 2009-07-07 | 2012-05-03 | Koninklijke Philips Electronics N.V. | Patterning device for generating a pattern in and/or on a layer |
| CN103203541A (en) * | 2013-02-04 | 2013-07-17 | 张立国 | Laser machining device |
| CN103317233A (en) * | 2013-06-07 | 2013-09-25 | 张立国 | Light beam movement track control device for laser processing |
| CN203712073U (en) * | 2013-12-03 | 2014-07-16 | 张立国 | Laser beam splitting device |
-
2013
- 2013-12-03 CN CN201310642068.5A patent/CN103658975B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1560965A (en) * | 2004-02-26 | 2005-01-05 | 天津大学 | Microstructure fibre-optical femto second white light laser generator |
| WO2006000549A1 (en) * | 2004-06-29 | 2006-01-05 | Hitachi Via Mechanics, Ltd. | Laser machining device for drilling holes into a workpiece comprising an optical deflecting device and a diverting unit |
| CN101909804A (en) * | 2008-01-10 | 2010-12-08 | 以色列商奥宝科技股份有限公司 | Multiple beam drilling system |
| US20120104284A1 (en) * | 2009-07-07 | 2012-05-03 | Koninklijke Philips Electronics N.V. | Patterning device for generating a pattern in and/or on a layer |
| JP2011110591A (en) * | 2009-11-27 | 2011-06-09 | Pioneer Electronic Corp | Laser machining device |
| CN103203541A (en) * | 2013-02-04 | 2013-07-17 | 张立国 | Laser machining device |
| CN103317233A (en) * | 2013-06-07 | 2013-09-25 | 张立国 | Light beam movement track control device for laser processing |
| CN203712073U (en) * | 2013-12-03 | 2014-07-16 | 张立国 | Laser beam splitting device |
Non-Patent Citations (2)
| Title |
|---|
| 普朝光: "《光波光学》", 31 January 2013, article "光的衍射与傅里叶变换", pages: 213-218,423-438 * |
| 洪新华: "《高光谱成像仪及其光学系统设计》", 30 September 2006, article "二元光学的概念及研究背景", pages: 42-53 * |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104158067A (en) * | 2014-08-22 | 2014-11-19 | 苏州大学 | Laser stripping method for wire sheath |
| CN106475685A (en) * | 2016-12-07 | 2017-03-08 | 常州英诺激光科技有限公司 | The device of a kind of raising material laser marking quality and efficiency and marking method |
| WO2019019424A1 (en) * | 2017-07-25 | 2019-01-31 | 英诺激光科技股份有限公司 | Method for reducing cutting conicity and increasing cutting speed using multiple ultrafast laser beams |
| CN112004633A (en) * | 2018-04-12 | 2020-11-27 | 通快机床两合公司 | Device for machining a workpiece, laser machining apparatus and method |
| CN109323657A (en) * | 2018-08-29 | 2019-02-12 | 桂林电子科技大学 | A method of measurement optical interconnection module key position postwelding alignment offset |
| CN109323657B (en) * | 2018-08-29 | 2019-10-22 | 桂林电子科技大学 | A method of measurement optical interconnection module key position postwelding alignment offset |
| CN109290676A (en) * | 2018-11-21 | 2019-02-01 | 浙江龙游道明光学有限公司 | A kind of anti-fake hyperbola marking device of Retroflective article |
| CN109290676B (en) * | 2018-11-21 | 2023-11-14 | 浙江龙游道明光学有限公司 | Anti-fake hyperbola marking device for retroreflective product |
| CN111496372A (en) * | 2019-01-31 | 2020-08-07 | 通用电气公司 | System and method for automated laser ablation |
| CN111496372B (en) * | 2019-01-31 | 2022-07-12 | 通用电气公司 | System and method for automated laser ablation |
| CN109702329A (en) * | 2019-03-06 | 2019-05-03 | 广东工业大学 | A kind of array laser processing method |
| CN114888458A (en) * | 2021-08-17 | 2022-08-12 | 武汉华工激光工程有限责任公司 | Parallel rotary cutting machining device and method |
| CN114888458B (en) * | 2021-08-17 | 2023-12-15 | 武汉华工激光工程有限责任公司 | Parallel rotary cutting machining device and method |
| CN114700628A (en) * | 2022-06-06 | 2022-07-05 | 一道新能源科技(衢州)有限公司 | Device for slotting focused laser birefringence perc battery piece |
| CN117239527A (en) * | 2023-11-14 | 2023-12-15 | 拉普拉斯新能源科技股份有限公司 | Laser device, laser processing system and processing method |
| CN117239527B (en) * | 2023-11-14 | 2024-04-12 | 拉普拉斯新能源科技股份有限公司 | Laser device, laser processing system and processing method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103658975B (en) | 2017-02-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203817621U (en) | Laser beam splitting and galvanometer scanning processing device | |
| CN103658975A (en) | Laser beam splitting and processing device | |
| CN103706946A (en) | Laser splitting galvanometer scanning and processing device | |
| CN203712073U (en) | Laser beam splitting device | |
| CN103317233B (en) | Light beam movement track control device for laser processing | |
| CN203343612U (en) | Light beam movement trail control device used for laser processing | |
| CN105081586B (en) | A kind of laser processing and device | |
| CN103071930B (en) | System and method for preparing micro-pore array through femtosecond laser direct writing | |
| CN101419336B (en) | Mirror-vibrating laser three-dimensional scanning system | |
| CN103203541B (en) | Laser machining device | |
| CN203265914U (en) | Large-breadth micropore high-speed hole-drilling system | |
| CN111338089A (en) | Optical system with annular light spots | |
| CN111505831B (en) | Focal spot focal depth variable Bessel beam laser processing system and method | |
| CN101670486A (en) | Laser micropore processor of rotating double-optical wedge | |
| CN101856772A (en) | Light beam-rotating galvanometer-scanning focused processing system | |
| CN111872548A (en) | Laser processing device with controllable light beam incident angle and laser processing method | |
| CN201632766U (en) | Rotary double-optical wedge laser micropore processing device | |
| CN102615425A (en) | Processing system of laser special-shaped micropores based on refractive scanning system | |
| CN112540457B (en) | Vortex light beam generation device, system and method with adjustable topological number | |
| CN206230159U (en) | A kind of laser drill and drilling fill system | |
| CN110695521A (en) | Light beam scanning system for laser micropore machining | |
| CN106762499B (en) | Disk working medium disk transmission-type laser ablation microthruster | |
| CN115453767A (en) | Point-ring distributed laser optical system and using method | |
| CN210548826U (en) | Light beam scanning system for laser micropore machining | |
| CN106773025A (en) | Focusing lens and lens vibrating type laser scanning system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |