CN103317233A

CN103317233A - Light beam movement track control device for laser processing

Info

Publication number: CN103317233A
Application number: CN2013102281823A
Authority: CN
Inventors: 张立国
Original assignee: Individual
Current assignee: Individual
Priority date: 2013-06-07
Filing date: 2013-06-07
Publication date: 2013-09-25
Anticipated expiration: 2033-06-07
Also published as: CN103317233B

Abstract

The invention relates to a light beam movement track control device for laser processing. The light beam movement track control device comprises a light beam transmission direction control module, a light beam movement track imaging amplification module and a light beam focusing and focus switching module, wherein the light beam transmission direction control module is used for modulating a transmission direction of an incident beam which is emitted onto the light beam transmission direction control module, the light beam movement track imaging amplification module is used for amplifying an optical axis movement track of the first light beam and performing beam expanding collimation on the first light beam to form a second light beam simultaneously, and the light beam focusing and focus switching module is used for focusing the second light beam and controlling a laser focus to switch among different processing units or performing auxiliary movement control on the laser focus within one processing unit. The light beam movement track control device has the advantages that the structure is simple, the transmission directions of the light beams can be controlled flexibly, sizes of light beam scanning movement tracks, light beam rotation radiuses and the like can be adjusted dynamically, meanwhile, scanning speeds of the laser processing light beams are accelerated, the large-size processing is facilitated, and the requirements of actual laser processing are met.

Description

A kind of beam motion track control device for Laser Processing

Technical field

The present invention relates to field of laser processing, relate in particular to a kind of beam motion track control device for Laser Processing.

Background technology

Application number is 201010183539.7 patent, and the Beam rotation module that adopts cannot dynamically change the Beam rotation diameter in process, is only suitable for using in the situation of the less variation of same work piece surface boring aperture, and therefore certain limitation is arranged.

Application number is 200380110303.9 patent, and the light beam circumference modulation movement of galvanometer front is to move in a circle by the mirror reflects modulated laser, and speculum is by Piezoelectric Ceramic, and its deflection amplitude is very little, is difficult to process larger hole.

Application number is 201210460145.0 patent, because the planar optics element is the work of swing mode, the planar optics element is very little to the modulation movement scope of laser beam, be not suitable for processing than large format, in the time of in certain range of work, planar optics element amplitude of fluctuation is less, its period frequency that repeatedly scans is just higher, but because general graphics processing all has the dimensions requirement, so that the period frequency of scanning does not increase repeatedly, has limitation.

Summary of the invention

Technical problem to be solved by this invention provides a kind of simple in structure, can control flexibly transmission orientation and the expanded light beam optical axis scanning motion track of light beam, and can be so that a kind of beam motion track control device for Laser Processing that beam flying speed is faster, the scan period is shorter.

The technical scheme that the present invention solves the problems of the technologies described above is as follows: a kind of beam motion track control device for Laser Processing comprises that beam Propagation orientation control module, beam motion track imaging amplification module and light beam focus on and the focus handover module.

Described beam Propagation orientation control module is used for the transmission orientation that is transmitted into the incident beam on it is modulated, and incident beam is transmitted rear the first beam emissions that forms of orientation modulation to the beam motion track imaging amplification module that is positioned at this first light beam one side of described beam Propagation orientation control module outgoing.

Described beam motion track imaging amplification module is used for the axis movement track of the first light beam that sends over from described beam Propagation orientation control module is carried out the imaging amplification and light beam is expanded processing, the second light beam that enlarges and expand to form the axis movement track, and this second light beam is sent to the light beam that is positioned at this this second light beam one side of beam motion track imaging amplification module outgoing focus on and the focus handover module.

Described light beam focuses on the focus handover module and is used for the second light beam that sends over from described beam motion track imaging amplification module is focused on, and the control laser spot is switched between different machining cells or at a machining cell place laser spot carried out synkinesia and control.

Further, described beam Propagation orientation control module comprises Beam rotation modulating unit and/or beam deviation modulating unit.

Further, described beam deviation modulating unit comprises the beam deviation modulation subunit of one or more series connection, and described beam deviation modulation subunit comprises transmission optical component and transmission optical component swings or motor or the piezoelectric ceramics of translation for controlling; Or described beam deviation modulation subunit comprises reflective optical devices and is used for motor or the piezoelectric ceramics that the control reflective optical devices carries out deflection or translation; Or described beam deviation modulation subunit comprises acousto-optic modulator, and the carrier frequency of the drive source by changing acousto-optic modulator is regulated the Bragg grating angle of reflection of described incident laser, changes the incident laser transmission direction.

Further, described transmission optical component is transmission planar optics element or optical prism optical element; Described reflective optical devices is reflecting optics.

Further, described Beam rotation modulating unit comprises the Beam rotation modulation subunit of or at least two series connection, described Beam rotation modulation subunit comprises transmission optical component and rotating driving device thereof, described transmission optical component rotating driving device is hollow spindle motor or motor belt transmission device, rotation transmission optical component in the Beam rotation modulation subunit is installed on the described hollow spindle electric machine main shaft, and described electric machine main shaft is hollow shaft.

Described motor belt transmission device comprises motor, driving wheel, driven pulley and is set in Timing Belt on described driving wheel and the driven pulley that described motor is installed on the driving wheel, and the rotation transmission optical component is fixedly mounted on the driven pulley.

Further, described hollow spindle motor is the floating hollow spindle motor of air supporting hollow spindle motor or magnetic or ceramic bearing hollow spindle motor.

Further, described rotation transmission optical component is prism wedge or lens or planar optics element or diffracting object grating or wedge.

Further, described Beam rotation modulating unit, the Beam rotation modulation subunit that comprises at least two series connection, described Beam rotation modulation subunit rotating part is independently rotation separately, the output beam optical axis of Beam rotation modulation subunit carries out rotation along the optical axis of its incident light, the optical axis of the output beam of a rear Beam rotation modulation subunit revolves round the sun along the optical axis of the light beam of the output of last Beam rotation modulation subunit, and carries out rotation along the revolution track.

Further, described beam motion track imaging amplification module comprises at least one enlargement ratio laser imaging unit, and described enlargement ratio laser imaging unit is fixing laser imaging unit or the adjustable laser imaging unit of enlargement ratio of enlargement ratio.

Further, the fixing laser imaging unit of described enlargement ratio comprises the lens of a plurality of series connection and the shell that is used for fixing these a plurality of lens; The laser imaging unit that described enlargement ratio is adjustable comprises shell, is installed on the lens of a plurality of series connection in the described shell and the driver element that changes spacing between the lens.

Further, described driver element is manual drives unit or electric drive unit.

Further, described Laser Focusing and focus handover module are vibration mirror scanning focusing unit or platform movement quiescent imaging focusing unit.

Described vibration mirror scanning focusing unit comprises scanning galvanometer and scanning flat field focus lamp, described scanning flat field focus lamp focuses on the emergent light from described beam motion track imaging amplification module output, described scanning galvanometer is used for the high speed of control laser spot between different machining cells and switches, or at a machining cell place, described scanning galvanometer carries out synkinesia control to the laser spot scanning motion; Described scanning flat field focus lamp is the scanning focused mirror of common flat field or telecentric scanning focus lamp.

Described platform movement quiescent imaging focusing unit comprises quiescent imaging focus lamp and linear moving table, described quiescent imaging focus lamp is used for the emergent light from described beam motion track imaging amplification module output is carried out imaging and focusing, described linear moving table is used for the switching of control laser spot between different machining cells, or at a machining cell place, described linear moving table carries out synkinesia control to the laser spot scanning motion.

Operation principle of the present invention is:

The first light beam according to certain scanning motion track is sent in the transmission orientation of beam Propagation orientation control module modulated incident light beam.The first light beam enters beam motion track imaging amplification module, manually adjust or automatically adjust the spacing between the lens of described beam motion track imaging amplification module inside, obtain the second parallel light beam of light beam, and output beam the second light beam is the optical amplifier multiplying power of enlargement ratio laser imaging unit in this beam motion track imaging amplification module this moment with the beam diameter ratio size of input light beam the first light beam, by enlargement ratio laser imaging unit interior lens spacing, this image optics enlargement ratio is adjustable continuously.When the first light beam high-speed, high precision moved, the second light beam is the synchronous high-speed high-precision motion also, and its movement locus shape is identical, and size is different.Because the complete small complete figure speed of the first beam flying is exceedingly fast, precision is high, and therefore, the second light beam can be with identical efficient been scanned, and the figure of scanning can be than the corresponding amplification of the first beam flying figure.

Beam Propagation orientation control module comprises Beam rotation modulating unit and/or beam deviation modulating unit.

When the beam deviation modulation subunit comprises transmission optical component and is used for that the control transmission optical component swings or when the motor of translation or piezoelectric ceramics, described beam deviation modulation subunit reflects wobble modulations to light beam.When the beam deviation modulation subunit comprises reflective optical devices and be used for the control reflective optical devices that when carrying out the motor of deflection or translation or piezoelectric ceramics, described beam deviation modulation subunit reflects wobble modulations to light beam.Adopt the beam deviation modulation subunit modulated beam of light motion orientation of above-mentioned two kinds of structures, light beam is carried out the wobble modulations amplitude larger, finish one-period longer sweep time, light beam orientation modulating frequency is just lower, thereby has contradiction between the size of the scanning motion track of light beam and the light beam orientation modulating frequency height.Because beam motion track imaging amplification module has the function that imaging is amplified and expanded to light beam, thereby in the situation about acting on that mutually combined by the beam deviation modulation subunit of above-mentioned two kinds of structures and beam motion track imaging amplification module, in the practical laser processed and applied, only need the skew of doing small amplitude of described beam deviation modulating unit to swing, therefore be offset hunting frequency very high, even can reach the frequency of 100 KHzs, and precision is high.

When the beam deviation modulation subunit comprised acousto-optic modulator, the beam deviation modulation subunit was carried out the diffraction wobble modulations to light beam.The carrier frequency of the drive source by changing acousto-optic modulator is regulated the Bragg grating angle of reflection of described incident laser, change the incident laser transmission direction, this mode is higher to the modulating frequency of light beam, but the beam wobbling amplitude is difficult to do greatly, is not suitable for the track occasion that exposes thoroughly.Imaging amplification by beam motion track imaging amplification module is so that the first light beam becomes more the second light beam of large scale scanning motion track, more short scan movement velocity through the light beam image transformation.

When the driver element of the rotation transmission optical component of Beam rotation modulating unit is the forms such as air supporting hollow spindle motor or the floating hollow spindle motor of magnetic, the rotation transmission optical component is prism wedge or lens or planar optics element or diffracting object grating or wedge, can obtain very meticulous laser beam rotation (inverted cone surface, the positive conical surface, face of cylinder rotation), can also obtain meticulous and ultrahigh speed the first Beam rotation speed.In this Beam rotation modulation scheme the inside, the first beam optical axis rotational trajectory size is dynamically adjusted difficult the realization.Adopt the adjustable or dynamic adjustable beam motion track imaging amplification module of imaging enlargement ratio, namely the second beam optical axis rotational trajectory size is adjustable or dynamically adjustable can to realize rotating the output beam optical axis.

The vibration mirror scanning focusing unit is to high-speed displacement switching capability and the extensive area scanning machining ability of laser beam, the purpose of the micropore boring of can reach on a large scale, high-speed high-quality amount, aperture are variable also is very suitable for blind slot that cross section changes or the blind hole laser milling processing in the multiple aperture of time processing.Owing to the outstanding focus characteristics that has of static focus mirror, in conjunction with linear moving table, can realize meticulous micropore, blind slot, blind hole processing.

In a word, use beam Propagation orientation control module to the motion orientation modulation of the little motion amplitude high-precision high-speed of incident beam, use beam motion track imaging amplification module that the first beam optical axis movement locus is amplified and to the first beam expander to obtain the second light beam, the second beam optical axis movement velocity is faster, track while scan is larger, in conjunction with Laser Focusing and focus handover module, finish particularly efficient micropore Drilling operation of the efficient little processing of various laser.

The invention has the beneficial effects as follows:

The beam Propagation orientation control module that is consisted of by above-mentioned Beam rotation modulating unit and/or beam deviation modulating unit can so that beam Propagation orientation control module can obtain after the transmission orientation that is transmitted into the incident beam on it is modulated meticulous and with ultrahigh speed be rotated the first light beam and/or at a high speed, the first light beam of high-precision micro-displacement motion, the Beam rotation track can form inverted cone surface or the positive conical surface or the face of cylinder.

Owing to having adopted beam motion track imaging amplification module, under the second beam optical axis track while scan size one stable condition, only need the beam deviation modulating unit incident beam to be carried out the transmission orientation motion modulation of small amplitude, the beam motion amplitude is less, the required time is just corresponding shorter, thereby capacitation enough greatly reduces the time that the first light beam is finished path, unit scanning, greatly improved Laser Micro-Machining efficient.

Owing to having adopted the adjustable beam motion track imaging amplification module of imaging enlargement ratio, thereby can adjust flexibly or dynamically adjust the track while scan size of the second beam optical axis.

Owing to having adopted beam motion track imaging amplification module, under the second beam optical axis rotating diameter one stable condition, the first beam optical axis rotating diameter can be less with respect to the second beam optical axis rotating diameter.The Beam rotation modulating unit can adopt the first little light beam of transmission optical component output rotating diameter of small size.The transmission optical component of small size is conducive to the Beam rotation modulating unit and obtains higher rotating speed, improves the rotating speed of the first light beam, thereby further improves the second Beam rotation speed.

Laser Focusing can be realized laser spot is switched fast at different machining cells from the focus handover module, the Laser Processing effect and quality that significantly improves, realize the big width laser Milling Process, or at a machining cell place, laser spot is carried out synkinesia control, further enrich the laser beam space track modulation, realized more complicated laser processing mode.

This apparatus structure is simple, can control flexibly the transmission orientation of light beam, regulate or the sizes such as dynamic adjustments beam scanning motion track, Beam rotation radius, simultaneously can also be so that the sweep speed of laser processing beam be faster, be easy to large-sized processing, the demand of more realistic Laser Processing.

Description of drawings

Fig. 1 is the apparatus structure schematic diagram of the embodiment of the invention 1 Copper Foil laser drilling through hole;

Fig. 2 is the apparatus structure schematic diagram of the embodiment of the invention 2 aluminium nitride ceramics laser milling blind slots;

Fig. 3 is the apparatus structure schematic diagram of the embodiment of the invention 3 aluminium nitride ceramics laser milling blind slots.

In the accompanying drawing, the list of parts of each label representative is as follows:

1, beam Propagation orientation control module, 101, the Rotating Plates quartz glass, 102, the hollow spindle of air-floating main shaft motor, 103, the first plane mirror, 104, the second plane mirror, 112, the first beam deviation unit, 121, the first dull and stereotyped quartz glass, 122, the first rotating shaft, 113, the second beam deviation unit, 131, the second motor, 132, the second rotating shaft, 133, the second dull and stereotyped quartz glass, 2, beam motion track imaging amplification module, 201, the first convex lens, 202, the first concavees lens, 203, the second concavees lens, 204, the second convex lens, 205, shell, 3, Laser Focusing and focus handover module, 31, scanning galvanometer, 311, the electric machine main shaft of the second motor, 312, the second vibration mirror reflected eyeglass, 313, the first vibration mirror reflected eyeglass, 314, the first motor, 315, the electric machine main shaft of the first motor, 32, scanning flat field focus lamp, 4, workpiece to be processed, 5, incident beam, 6, the first light beam, 7, the second light beam, 8, the first folded light beam, 9, the second folded light beam, 10, focused beam, 11, transmitted light beam.

The specific embodiment

Below in conjunction with accompanying drawing principle of the present invention and feature are described, institute gives an actual example and only is used for explaining the present invention, is not be used to limiting scope of the present invention.

Embodiment 1:

Fig. 1 is the apparatus structure schematic diagram of Copper Foil laser drilling through hole, and as shown in Figure 1: the device of Copper Foil laser drilling through hole comprises beam Propagation orientation control module 1, beam motion track imaging amplification module 2 and Laser Focusing and focus handover module 3.

Described beam Propagation orientation control module 1 is the Beam rotation modulating unit, this Beam rotation modulating unit comprises a Beam rotation modulation subunit, and this Beam rotation modulation subunit comprises the rotation transmission optical component and is used for the drive unit that the driven rotary transmission optical component rotates.The rotation transmission optical component is Rotating Plates quartz glass 101, and the refractive index of Rotating Plates quartz glass 101 is 1.35 to 3, is preferably 1.45,6 millimeters of thickness, 532 nanometer anti-reflection films are all plated on its two sides, and the thickness of Rotating Plates quartz glass 101 is larger, and the Beam rotation diameter is larger.Drive unit is the air supporting hollow spindle motor with hollow spindle, and air supporting hollow spindle motor also can float hollow spindle motor or ceramic bearing hollow spindle motor or motor belt transmission device and substitute with the magnetic with hollow spindle.Described Rotating Plates quartz glass 101 is fixed in the hollow spindle 102 of air-floating main shaft motor, and Rotating Plates quartz glass 3 rotates with hollow spindle 2.Hollow spindle 2 diameter of bores are preferably 8 millimeters, and the air-floating main shaft motor speed can reach 500,000 rev/mins.General actuating speed can reach at a high speed or superfast level, and wherein, speed is at a high speed at 5000 rev/mins to 50,000 rev/mins, is being ultrahigh speed more than 50,000 rev/mins.The air-floating main shaft motor speed can reach 160,000 revolutions per seconds at present.

The driver element of rotation transmission optical component is the forms such as air supporting hollow spindle motor or the floating hollow spindle motor of magnetic, the rotation transmission optical component is prism wedge or lens or planar optics element or diffracting object grating or wedge, the result of this configuration can obtain very meticulous laser beam rotation (inverted cone surface, the positive conical surface, face of cylinder rotation), can also obtain meticulous and ultrahigh speed the first Beam rotation speed, its rotary speed even can be up to 1,000,000 rev/mins, if adopt Dove prism to cooperate slide, can obtain 2,000,000 rev/mins rotary light beam.

If adopt motor belt actuator drives Rotating Plates quartz glass 3, this motor belt transmission device comprises motor, driving wheel, driven pulley and is set in Timing Belt on described driving wheel and the driven pulley, described motor is installed on the driving wheel, and Rotating Plates quartz glass 3 is fixedly mounted in the hollow shaft on the driven pulley.

When the hollow electric main shaft of described hollow electric spindle motor is installed on the air-bearing, this hollow electric spindle motor is also referred to as the hollow electric spindle motor of air supporting.Described air-bearing refers to realize the bearing that hollow electric main shaft suspends by import pressure air in bearing bore in air.The slit of pressure release is minimum in the described air-bearing bearing bore, the high accuracy suspension that has guaranteed hollow electric main shaft is rotated, and can stably rotate accurately, possess high rotating speed, pinpoint accuracy, zerofriction force, without wearing and tearing, do not need lubricating oil, remarkable speed control performance, compact conformation arranged, the advantage such as lightweight, vibration is little, noise is low, the little response of inertia is fast.

When the hollow electric main shaft of described hollow electric spindle motor is installed on the Hydrodynamic and-static Bearing, this hollow electric spindle motor is also referred to as the hollow electric spindle motor of hydraulic pressure.Described Hydrodynamic and-static Bearing refers to a kind of outer supply constant pressure oil, sets up the bearing that makes electric main shaft all the time suspension high voltage static pressure carrying oil film from start to stopping in bearing.Described Hydrodynamic and-static Bearing has and does not have wearing and tearing, long service life, starting power are little, also applicable characteristics under the speed of extremely low (even being zero).In addition, this bearing also has that running accuracy is high, oil film rigidity is large, can suppress the advantage such as film shocks.The hollow electric spindle motor of described hydraulic pressure owing to having adopted Hydrodynamic and-static Bearing, therefore possesses very high rigidity and damping, possesses higher rotation speed and service life.

When the hollow electric main shaft of described hollow electric spindle motor is installed on the electromagnetic suspension bearing, this hollow electric spindle motor is also referred to as the floating hollow electric spindle motor of magnetic.Described electromagnetic suspension bearing is that a kind of electromagnetic force of utilizing is suspended in the bearing that contactless supporting is realized in the space with electric main shaft, have without friction, need not to lubricate, without oil pollution, the advantage such as energy consumption is low, noise is little, the life-span is long, be specially adapted in the particular surroundings such as vacuum, super dead room, high speed.Described magnetic floats hollow electric spindle motor, owing to adopting electromagnetic suspension bearing, therefore possesses high speed performance good, and precision is high, easily realizes the advantages such as diagnosis and on-line monitoring.

When the hollow electric main shaft of described hollow electric spindle motor is installed on the ceramic bearing, this hollow electric spindle motor is also referred to as the hollow electric spindle motor of ceramic bearing.Described ceramic bearing refers to that the rolling element of bearing uses Ceramic Balls, and bearing ring still is the bearing of steel ring, and the ceramic bearing standardization level is high, is satisfying under the condition of certain rotating speed, possesses the low advantage simple in structure of cost.The hollow electric main shaft of the hollow electric spindle motor of described ceramic bearing is installed on the ceramic bearing, and the rotating speed of this ceramic bearing turns above at per minute 5000.

Described beam motion track imaging amplification module 2 comprises an enlargement ratio laser imaging unit, according to the object-image relation of perfect optical system, the laser imaging unit that the imaging enlargement ratio is adjustable can adopt the above lens combination of three groups or three groups to realize function without burnt continuous zoom imaging and collimator and extender.Three groups of lens can adopt " positive lens-negative lens-positive lens " or various ways such as " negative lens-positive lens-negative lens ", for example can design first group and be fixing group, and second group is mobile zoom group, and the 3rd group is the compensation group.In the adjustable laser imaging unit of the enlargement ratio that three groups of lens form, when second group of lens relative to its object point when also namely the picture point of first group of lens moves, its imaging magnification changes thereupon, and consequent system focal length variations is moved by the 3rd group of lens and compensates.At this moment, if the lucky front focus with the 3rd group of the picture point of second group of lens overlaps, then whole system is exactly a non-focus optical system, and the outgoing beam diameter can constantly change along with the movement of these two groups of lens.

The enlargement ratio laser imaging unit of the present embodiment is the adjustable laser imaging unit of enlargement ratio.The laser imaging unit that this enlargement ratio is adjustable comprises shell 205, connects successively and is installed in the first convex lens 201, the first concavees lens 202, the second concavees lens 203 and the second convex lens 204 in the shell 205.Wherein, the first convex lens 201 are fixed in and claim again fixed lens group in the housing 205, the first concavees lens 202 are called variable focus lens package, the second concavees lens 203 and the second convex lens 204 are called the offset lens group, and the mobile linear electric motors high-speed, high precision that adopts of variable focus lens package and offset lens group drives and position and lock.When variable focus lens package moved with respect to fixed lens group, the equivalent focal length of variable focus lens package and fixed lens group just changed continuously, produced among the new focus A(figure not indicate).The offset lens group also is designed to movably, do not indicate when variable focus lens package moves among a certain position B(figure) time, the offset lens group also moves among the corresponding position C(figure and does not indicate), make among the new focus A(figure and indicate) be stabilized on the focus of offset lens group, be combined into new expand than beam-expanding system.The zoom beam-expanding system here adopts the version similar in appearance to Galilean type, each constituent element is decided to be the combination of positive negative lens, and laser beam can not too be assembled, and has also shortened the operating distance of system simultaneously.Simultaneously, for spherical aberration corrector preferably, coma and band spherical aberration, and consider that superlaser can should not adopt balsaming lens to the cemented surface damage, zoom group and compensation arrangement of mirrors sheet are designed to two separate types, and the kind by selecting optical lens material and the trace of the air gap change and come aberration correction.In some cases, in order to reduce cost, can manual drives variable focus lens package and offset lens group and mechanical caging.

Use the Beam rotation modulation subunit, can adopt the transmission optical component of small size, with the rotary inertia that reduces transmission optical component to obtain better dynamic balance property, be conducive to the Beam rotation modulating unit and obtain higher rotating speed, thereby can obtain higher running accuracy and the first light beam that rotates rotating speed, but still exist the diameter of the first beam scanning motion track to adjust the problems such as inconvenient, by beam motion track imaging amplification module the first little beam optical axis movement locus of rotating diameter is carried out the imaging amplification, can obtain the second light beam of the large movement locus of high-speed, high precision, the imaging amplification of the different multiplying of simultaneously beam motion track imaging amplification module can change the scanning motion track size of the second light beam.

Described Laser Focusing and focus handover module 3 are the vibration mirror scanning focusing unit, and described vibration mirror scanning focusing unit comprises scanning galvanometer 31 and scanning flat field focus lamp 32.Scanning flat field focus lamp 32 has the types such as the scanning focused mirror of common flat field and telecentric scanning focus lamp, and in the present embodiment, scanning flat field focus lamp adopts the telecentric scanning focus lamp.The focal length of telecentric scanning focus lamp is 10 to 1000 millimeters, is preferably 100 millimeters, and the flat field focusing range is 5 millimeters * 5 millimeters to 500 millimeters * 500 millimeters, is preferably 50 millimeters * 50 millimeters.Scanning galvanometer 32 comprises the first vibration mirror reflected eyeglass 313 and the second vibration mirror reflected eyeglass 312.

The first vibration mirror reflected eyeglass 313 of described scanning galvanometer is installed on the electric machine main shaft 315 of the first motor 314 of scanning galvanometer.

The second vibration mirror reflected eyeglass 312 of described scanning galvanometer is installed on the electric machine main shaft 311 of the second motor of scanning galvanometer.

Described workpiece to be processed 4 is 100 micron thickness Copper Foils.

Light path flow process in the apparatus structure of whole Copper Foil laser drilling through hole is as follows: obtain the first light beam 6 after incident beam 5 sees through the Rotating Plates quartz glass 101 that is positioned at the hollow spindle cavity, described the first light beam 6 obtains the second light beam 7 behind electronic adjustable enlargement ratio image-generating unit, the second light beam 7 obtains the first folded light beam 8 through the first vibration mirror reflected eyeglass 313 of scanning galvanometer 31, the first folded light beam 8 obtains the second folded light beam 9 through the second vibration mirror reflected eyeglass 312 of scanning galvanometer 31, the second folded light beam 9 focuses on through the telecentric scanning focus lamp, obtain focused beam 10, focused beam 10 directly acts on workpiece to be processed 4.

Described incident beam 5 is preferably 1 millimeter incident beam for diameter, relevant parameter is as follows: optical maser wavelength 532 nanometers, beam quality factor is less than 1.2, hot spot circularity is greater than 90 percent, 30 watts of mean powers, single mode gauss laser (laterally field intensity is Gaussian Profile), pulse recurrence frequency is preferably 500 KHzs from 10 KHz to 100 megahertzes.

The refractive index of described Rotating Plates quartz glass 101 is 1.45,3 millimeters of thickness, 532 nanometer anti-reflection films are all plated on its two sides, the normal of the laser entrance face of Rotating Plates quartz glass 3 and incident beam optical axis angle are 5 degree, under the air supporting hollow spindle drives, Rotating Plates quartz glass 101 can be around the rotation of the optical axis of incident beam 5, is 80 microns the face of cylinder so that the movement locus of the first light beam 6 optical axises becomes centered by incident beam 5 axle and diameter.The normal of the laser entrance face of design Rotating Plates quartz glass 101 and the angle of incident beam 5 optical axises, change the thickness of Rotating Plates quartz glass 101, perhaps change Refractive Index of Material or the shape of rotating optical element, can obtain the first Beam rotation track of the positive conical surface or inverted cone surface.

The first light beam 6 is injected described adjustable enlargement ratio image-generating unit.When the first light beam 6 transfixion, described adjustable enlargement ratio image-generating unit just only plays the function of adjustable multiplying power laser beam expander, expands multiplying power between 2 to 12 times.At the first light beam 6 during around incident beam 5 motion, described adjustable enlargement ratio image-generating unit can not only play the function of adjustable multiplying power laser beam expander, can also make the enlargement ratio of the movement locus of the first light beam 6 become adjustable, adjustable enlargement ratio is also between 2 to 12 times.When the movement locus of the first light beam 6 optical axises is the face of cylinder around 80 microns of the diameters of incident beam 5, the movement locus of the optical axis of the second light beam 7 be around the face of cylinder of the optical axis of incident beam 5 diameter of section between 160 microns to 960 microns.

Two reflecting optics of scanning galvanometer 31 i.e. the first vibration mirror reflected eyeglass 313 match with the second vibration mirror reflected eyeglass 312, and hole of every completion of processing is just arrived next position to the Focal Point Shift of focused beam 10, and laser is black out in this jump procedure; When described the first vibration mirror reflected eyeglass 313 and the second vibration mirror reflected eyeglass 312 lock again motionless, this moment Laser output.Take described the first light beam 6 optical axis rotational trajectories as 80 microns faces of cylinder of diameter as example, when the imaging enlargement ratio of described adjustable enlargement ratio image-generating unit is 12 times, the second light beam 7 optical axis rotational trajectories are 960 microns faces of cylinder of diameter, and the optical axis rotational trajectory of the first folded light beam 8, the second folded light beam 9, focused beam 10 is 960 microns faces of cylinder of diameter.The focus of focused beam 10 is to be processed 4 circle (20 microns of focal beam spots) that marks 980 microns.By the imaging enlargement ratio of the adjustable enlargement ratio image-generating unit of electronic dynamic adjustment, the focus that can reach dynamic change focused beam 10 marks the diameter of a circle size to be processed 4.By this method, can get out at described workpiece to be processed 4 via-hole array of needed different pore size.

In order to enlarge the processing breadth, can also place described workpiece to be processed 4 on the mobile platform, can realize large-scale Laser Processing like this, Laser Processing sweep limits area generally surpasses 200 millimeters * 200 millimeters the large tracts of land that is commonly referred in the practice.

Adjustable enlargement ratio image-generating unit described in the present embodiment can be substituted by some fixedly enlargement ratio imaging subelements, in needs, select wherein one or several series connection fixedly enlargement ratio imaging subelement consist of adjustable enlargement ratio image-generating unit.

Embodiment 2:

Fig. 2 is the apparatus structure schematic diagram of aluminium nitride ceramics laser milling blind slot, and as shown in Figure 2: the device of aluminium nitride ceramics laser milling blind slot comprises beam Propagation orientation control module 1, beam motion track imaging amplification module 2 and Laser Focusing and focus handover module 3.Beam motion track imaging amplification module 2 in the present embodiment is identical with the structure among the embodiment 1 with the structure of focus handover module 3 with Laser Focusing.

Described beam Propagation orientation control module 1 comprises the beam deviation modulating unit, and this beam deviation modulating unit comprises the beam deviation subelement of two series connection, i.e. the first beam deviation unit 112 and the second beam deviation unit 113.The first beam deviation unit 112 comprises the first dull and stereotyped quartz glass 121 and is used for driving the first motor (not shown) of the described first dull and stereotyped quartz glass 121, the described first dull and stereotyped quartz glass 121 is installed on the first rotating shaft 122, the first rotating shaft 122 is the electric machine main shaft of the first motor, the first dull and stereotyped quartz glass 121 is around the first rotating shaft 122 axial-rotations, and the first rotating shaft 122 be axially perpendicular to paper.The second beam deviation unit 113 comprises the second dull and stereotyped quartz glass 133 and is used for driving the second motor 131 of the described second dull and stereotyped quartz glass 133, the described second dull and stereotyped quartz glass 133 is installed on the second rotating shaft 132, and the second rotating shaft 132 is the electric machine main shaft of the second motor 131.The described second dull and stereotyped quartz glass 133 can center on the second rotating shaft 132 axial-rotations.The refractive index of the described first dull and stereotyped quartz glass 121 and the second dull and stereotyped quartz glass 133 is 1.45, and thickness is 3 millimeters, and the two sides all is coated with the anti-reflection film of 532 nanoseconds.

Adopt motor to swing transmission planar optics element, be exactly the first light beam after the incident beam refraction, both translation distances can reach micron dimension, but because transmission planar optics element can be accomplished very little, therefore motor can swing with higher hunting frequency, can obtain the first light beam of micro-displacement high-speed motion.

Described workpiece to be processed 4 is 500 micron thickness aluminium nitride ceramics.

Light path flow process in the apparatus structure of whole aluminium nitride ceramics laser milling blind slot is as follows: incident beam 5 obtains transmitted light beam 11 through the first dull and stereotyped quartz glass 121, after seeing through the second dull and stereotyped quartz glass 133, transmitted light beam 11 obtains the first light beam 6, described the first light beam 6 obtains the second light beam 7 behind electronic adjustable enlargement ratio image-generating unit 2, the second light beam 7 obtains the first folded light beam 8 through the first vibration mirror reflected eyeglass 313 of scanning galvanometer 31, the first folded light beam 8 obtains the second folded light beam 9 through the second vibration mirror reflected eyeglass 312 of scanning galvanometer 31, the second folded light beam 9 focuses on through the telecentric scanning focus lamp, obtain focused beam 10, focused beam 10 directly acts on workpiece to be processed 4.

Described incident beam 5 is 1 millimeter incident beam for diameter, relevant parameter is as follows: optical maser wavelength 532 nanometers, beam quality factor is less than 1.2, hot spot circularity is greater than 90 percent, 30 watts of mean powers, single mode gauss laser (laterally field intensity is Gaussian Profile), pulse recurrence frequency is preferably 100 KHzs from 10 KHz to 100 megahertzes.

The refractive index of the described first dull and stereotyped quartz glass 121 and the second dull and stereotyped quartz glass 133 is 1.45,3 millimeters of thickness, and 532 nanometer anti-reflection films are all plated on its two sides, and the swinging axle of the described first dull and stereotyped quartz glass 121 and the second dull and stereotyped quartz glass 133 is vertical non-intersect.

The first swinging axle 122 that the described first dull and stereotyped quartz glass 121 can wind perpendicular to paper swings, so that the angle between the laser incidence surface normal of the first dull and stereotyped quartz glass 121 and initial incoming laser beam 5 beam optical axis changes in 0～1 degree scope, so that transmitted light beam 11 obtains translation with respect to incident beam 5, side-play amount changes in 0～16 micrometer range.

The second rotating shaft 132 of the described second dull and stereotyped quartz glass 133 and first dull and stereotyped the first swinging axle 122 spatial vertical of quartzy 121 are non-intersect, and all are basically perpendicular to incident laser light beam 5.The second swinging axle 132 controls the second dull and stereotyped quartz glass 133 swings, so that the angle of the laser incidence surface normal of the second quartzy plate glass 133 and transmitted light beam 11 changes between 0～1 degree scope, so that the first light beam 6 obtains the respective parallel displacement with respect to transmitted light beam 11, side-play amount changes between 0～16 micrometer range.

The routing motion of the described first dull and stereotyped quartz glass 121 and the second dull and stereotyped quartz glass 133 has directly determined the movement locus of the first light beam 6, and the range of movement of the first light beam 6 is 16 microns * 16 microns square region in the present embodiment.And first, second planar optics element is small-sized, and pendulum angle is so little, and its hunting frequency can be very high, and the laser displacement control accuracy is high, obtains like this scanning effect of high-speed, high precision the first light beam 6.

The first light beam 6 is injected described adjustable enlargement ratio image-generating unit.When the first light beam 6 transfixion, described adjustable enlargement ratio image-generating unit just only plays the function of adjustable multiplying power laser beam expander, expands multiplying power between 2 to 12 times.During around incident beam 5 motion, described adjustable enlargement ratio image-generating unit can not only play the function of adjustable multiplying power laser beam expander at the first light beam 6, can also make the enlargement ratio of movement locus of the first light beam 6 adjustable, and adjustable enlargement ratio is also between 2 to 12 times.When the movement locus of the first light beam 6 optical axises for axle centered by incident beam 5 and diameter during as 16 microns the face of cylinder, the movement locus of the optical axis of the second light beam 7 be around the face of cylinder of the optical axis of incident beam 5 diameter of section between 32 microns to 190 microns.

Two reflecting optics of scanning galvanometer 31 i.e. the first vibration mirror reflected eyeglass 313 match with the second vibration mirror reflected eyeglass 312, and hole of every completion of processing is just arrived next position to the Focal Point Shift of focused beam 10, and laser is black out in this jump procedure; When described the first vibration mirror reflected eyeglass 313 and the second vibration mirror reflected eyeglass 312 lock again motionless, this moment Laser output.When described the first light beam 6 optical axis rotational trajectories are 16 microns faces of cylinder of diameter, when the imaging enlargement ratio of described adjustable enlargement ratio image-generating unit is 10 times, the second light beam 7 optical axis rotational trajectories are 160 microns faces of cylinder of diameter, and the optical axis rotational trajectory of the first folded light beam 8, the second folded light beam 9, focused beam 10 is 160 microns faces of cylinder of diameter.The focus of focused beam 10 is to be processed 4 circle (30 microns of focal beam spots) that marks 190 microns.By the imaging enlargement ratio of the adjustable enlargement ratio image-generating unit of electronic dynamic adjustment, the focus that can reach dynamic change focused beam 10 marks the diameter of a circle size to be processed 4.By this method, can get out at described workpiece to be processed 4 via-hole array of needed different pore size.

Sometimes in order to reduce cost, can adopt enlargement ratio manually adjustable enlargement ratio image-generating unit or fixing enlargement ratio image-generating unit.

The present embodiment situation, described beam Propagation orientation control module itself can change by the swing that changes the first and second dull and stereotyped quartz glass shape and the size of the track while scan of the first light beam 6, therefore, adopting fixedly in a lot of situations, the enlargement ratio image-generating unit gets final product, and because the laser beam expanding multiplying power remains unchanged, possesses the advantage that the focusing focus size remains unchanged.

The benefit of this processing mode of the present embodiment is, the advantage of the high-speed, high precision when having utilized beam Propagation orientation control module 1 fine scanning, cooperate the laser beam expanding function of 2 pairs of the first light beams 6 of beam motion track imaging amplification module, the movement locus enlarging function of the first light beam 6, realized cleverly the function in the required figure of high-speed, high precision dynamic scan path.In addition, utilized control module 1 meticulous repeatedly filling the in beam Propagation orientation to scan, form wider laser scanning cutting joint-cutting, realize flat-top Laser Processing effect with gauss laser, the advantages such as Laser Processing characteristics that keep simultaneously the long depth of focus of gauss laser and Gaussian Profile light intensity, needing to be very suitable for the field of flat-top Laser Processing or the even Fast Filling scanning of small scope, processing effect is better than flat-top laser and control is very simple.

In above-described embodiment, the orthogonal while of the rotary main shaft of planar optics element, also need in theory vertically with beam optical axis, the alignment error in actual the use can be proofreaied and correct by control software and be got final product.

Embodiment 3:

Fig. 3 is the apparatus structure schematic diagram of embodiment 3 LTCC laser drill, and as shown in Figure 3: the device of LTCC laser drill comprises beam Propagation orientation control module 1, beam motion track imaging amplification module 2 and Laser Focusing and focus handover module 3.Beam motion track imaging amplification module 2 in the present embodiment is identical with the structure among the embodiment 1 with the structure of focus handover module 3 with Laser Focusing.

Described beam Propagation orientation control module 1 comprises the beam deviation modulating unit, this beam deviation modulating unit comprises the beam deviation subelement of two series connection, i.e. the first beam deviation unit and the second beam deviation unit, the first beam deviation unit comprises the first plane mirror 103 and for the first Piezoelectric Ceramic system (not shown) that drives described the first plane mirror 103 motions (swinging or translation), the second beam deviation unit comprises the second plane mirror 104 and is used for driving the second Piezoelectric Ceramic system (not shown) of described the second plane mirror 104 motions (swing or translation).

Adopt the Piezoelectric Ceramic plane mirror, laser is carried out one dimension or two-dimensional deflection reflection, can accomplish 10KHz even higher frequency to laser beam reflection modulation ability under the low-angle, this very high modulating frequency is so that the speed of the first beam flying figure is very fast.

Described workpiece to be processed 4 is 200 micron thickness LTCCs.

Light path flow process in the apparatus structure of whole LTCC laser drill is as follows: incident beam 5 obtains a folded light beam through the reflection of the first plane mirror 103, this folded light beam obtains the first light beam 6 after 104 reflections of the second plane mirror, the first light beam 6 obtains the second light beam 7 again behind electronic adjustable enlargement ratio image-generating unit, the second light beam 7 obtains the first folded light beam 8 through the first vibration mirror reflected eyeglass 313 of scanning galvanometer 31, the first folded light beam 8 obtains the second folded light beam 9 through the second vibration mirror reflected eyeglass 312 of scanning galvanometer 31, the second folded light beam 9 focuses on through the telecentric scanning focus lamp, obtain focused beam 10, focused beam 10 directly acts on workpiece to be processed 4.

Described incident beam 5 is 1 millimeter incident beam for diameter, relevant parameter is as follows: optical maser wavelength 532 nanometers, beam quality factor is less than 1.2, hot spot circularity is greater than 90 percent, 30 watts of mean powers, single mode gauss laser (laterally field intensity is Gaussian Profile), pulse recurrence frequency is preferably 500 KHzs from 10 KHz to 100 megahertzes.

Described the first plane mirror 103 can be installed at least one piezoelectric element or the electrostriction element, particularly on the piezoelectric ceramics; Piezoelectric element is stretching of piezo ceramic element particularly, so that the first mirror angle deflection, so that the transmission of angle of the folded light beam of the first plane mirror 103 deflects.At present basic piezo ceramic element or the stretching frequency of electrostriction element can be accomplished more than the GHz (GHz).Here adopt 20KHz stretching frequency piezoelectric ceramics.

Described the second plane mirror 104 can be installed at least one piezoelectricity telescopic element or the electrostriction element, particularly on the piezoelectric ceramics; Stretching of piezo ceramic element, so that 104 angular deflections of the second plane mirror, so that the transmission of angle of the first light beam 6 deflects.

Described the first plane mirror 103 is mutually vertical with the axis of oscillation of the second plane mirror 104.The movement locus that the first light beam 6 is controlled in the swing of the first plane mirror 103 and the second plane mirror 104 is the space tracking of free routing.For example controlling the first beam motion track is the taper seat of angle 0.5 degree, 10 centimetres of the plane of incidence distances of the electronic adjustable enlargement ratio image-generating unit of the second plane mirror 104 distances, the beam optical axis of the first light beam 6 is the circle of 60 microns of diameters at the movement locus of the plane of incidence of electronic adjustable enlargement ratio image-generating unit so.Change the distance of the electronic adjustable enlargement ratio image-generating unit plane of incidence of the second plane mirror 53 distances this moment, perhaps change the angle of the first light beam 6 taper seat movement locus, can change the beam optical axis of the first light beam 6 in the motion circle track size of the electronic adjustable enlargement ratio image-generating unit plane of incidence.

Described the first light beam 6 is injected described adjustable enlargement ratio image-generating unit.When the first light beam 6 transfixion, described adjustable enlargement ratio image-generating unit just only plays the function of adjustable multiplying power laser beam expander, expands multiplying power between 2 to 12 times.During around incident beam 5 motion, adjustable enlargement ratio image-generating unit just not only has the function of adjustable multiplying power laser beam expander at the first light beam 6, can also make the enlargement ratio of movement locus of the first light beam 6 adjustable, and adjustable enlargement ratio is between 2 to 12 times.

Two reflecting optics of scanning galvanometer 31 i.e. the first vibration mirror reflected eyeglass 313 match with the second vibration mirror reflected eyeglass 312, and hole of every completion of processing is just arrived next position to the Focal Point Shift of focused beam 10, and laser is black out in this jump procedure; When described the first vibration mirror reflected eyeglass 313 and the second vibration mirror reflected eyeglass 312 lock again motionless, this moment Laser output.When the movement locus of the first light beam 6 optical axises is that the summit is at the taper seat of the second plane mirror 104 or other movement locus, the movement locus of the optical axis of the second light beam 7 is the picture after the first light beam 6 movement locus amplify through adjustable enlargement ratio image-generating unit, the beam optical axis of the first light beam 6 is the circle of 60 microns of diameters at the movement locus of the electronic adjustable enlargement ratio image-generating unit plane of incidence, the movement locus of optical axis that the enlargement ratio of electronic adjustable enlargement ratio image-generating unit is set in 10, the second light beams 7 during from electronic adjustable enlargement ratio image-generating unit 55 outgoing diameter of section at 600 microns.The optical axis rotational trajectory taper seat of the first folded light beam 8, the second folded light beam 9, focused beam 10.The focus of focused beam 10 is to be processed 4 circle that marks required diameter.By the imaging enlargement ratio of the adjustable enlargement ratio image-generating unit of electronic dynamic adjustment, the focus that can reach dynamic change focused beam 10 marks the diameter of a circle size to be processed 4.By this method, can get out at described workpiece to be processed 4 via-hole array of needed different pore size.

The present embodiment situation, described beam Propagation orientation control module 1 itself can change by changing the first and second plane mirror reflection angles shape and the size of the track while scan of the first light beam 1; Change the distance of the electronic adjustable enlargement ratio image-generating unit plane of incidence of the second plane mirror 104 distances, perhaps change the angle of the first light beam taper seat movement locus, also can change the beam optical axis of the first light beam 6 in the motion circle track size of the electronic adjustable enlargement ratio image-generating unit plane of incidence.Therefore, adopt in a lot of situations fixedly that the enlargement ratio image-generating unit get final product, and owing to the laser beam expanding multiplying power remains unchanged, possess the advantage that the focusing focus size remains unchanged.

The benefit of this processing mode of the present embodiment is, the advantage of the high-speed, high precision when having utilized beam Propagation orientation control module 1 fine scanning, cooperate beam motion track imaging amplification module to the laser beam expanding function of the first light beam 6, the movement locus enlarging function of the first light beam 6, realized cleverly the function in the required figure of high-speed, high precision dynamic scan path.In addition, utilized control module 1 meticulous repeatedly filling the in beam Propagation orientation to scan, form wider laser scanning cutting joint-cutting, realize flat-top Laser Processing effect with gauss laser, the advantages such as Laser Processing characteristics that keep simultaneously the long depth of focus of gauss laser and Gaussian Profile light intensity, needing to be very suitable for the field of flat-top Laser Processing or the even Fast Filling scanning of small scope, processing effect is better than flat-top laser and control is very simple.

Above-described embodiment is three typical application of the present invention, in fact its application of principle is not limited to top described situation, for example Laser Focusing and focus handover module can adopt the two-dimensional linear mobile platform to be combined the mode that the laser quiescent imaging focuses on to work, and the laser spot microspur of fine space switches can be finished with the first beam wobbling of beam Propagation orientation control module 1 output etc.

In a word, the present invention proposes a kind of beam motion track control device for Laser Processing, its important feature is: the advantage of the high-speed, high precision when having utilized beam Propagation orientation control module 1 fine scanning, the laser beam expanding function and the axis movement track imaging enlarging function that cooperate 2 pairs of the first light beams of beam motion track imaging amplification module, realized cleverly the combination of the meticulous fine motion scanning of high speed and the imaging of laser beam axis movement locus amplification dual mode, realized that the laser high-speed Dynamic High-accuracy scans the function in required figure path.In addition, utilized control module 1 meticulous repeatedly filling the in beam Propagation orientation to scan, form wider laser scanning cutting joint-cutting, realize flat-top Laser Processing effect with gauss laser, the advantages such as Laser Processing characteristics that keep simultaneously the long depth of focus of gauss laser and Gaussian Profile light intensity, needing to be very suitable for the field of flat-top Laser Processing or the even Fast Filling scanning of small scope, processing effect is better than flat-top laser and control is very simple.

For the beam Propagation orientation control module 1 of Beam rotation mode, manual or electronic enlargement ratio adjustable laser image-generating unit has successfully been realized the online nonadjustable problem of high speed rotary motion Beam rotation diameter.

Adopt the vibration mirror scanning focusing unit, laser spot is switched fast, the Laser Processing breadth, working (machining) efficiency and the crudy that significantly improve.

The above only is preferred embodiment of the present invention, and is in order to limit the present invention, within the spirit and principles in the present invention not all, any modification of doing, is equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims

1. a beam motion track control device that is used for Laser Processing is characterized in that: comprise that beam Propagation orientation control module, beam motion track imaging amplification module and light beam focus on and the focus handover module;

Described beam Propagation orientation control module is used for the transmission orientation that is transmitted into the incident beam on it is modulated, and incident beam is transmitted rear the first beam emissions that forms of orientation modulation to the beam motion track imaging amplification module that is positioned at this first light beam one side of described beam Propagation orientation control module outgoing;

Described beam motion track imaging amplification module is used for the axis movement track of the first light beam that sends over from described beam Propagation orientation control module is carried out the imaging amplification and described the first light beam is expanded processing, the second light beam that enlarges and expand to form the axis movement track, and this second light beam is sent to the light beam that is positioned at this this second light beam one side of beam motion track imaging amplification module outgoing focus on and the focus handover module;

2. a kind of beam motion track control device for Laser Processing according to claim 1, it is characterized in that: described beam Propagation orientation control module comprises Beam rotation modulating unit and/or beam deviation modulating unit.

3. a kind of beam motion track control device for Laser Processing according to claim 2, it is characterized in that: described beam deviation modulating unit comprises the beam deviation modulation subunit of one or more series connection, and described beam deviation modulation subunit comprises transmission optical component and transmission optical component swings or motor or the piezoelectric ceramics of translation for controlling; Or described beam deviation modulation subunit comprises reflective optical devices and is used for motor or the piezoelectric ceramics that the control reflective optical devices carries out deflection or translation; Or described beam deviation modulation subunit comprises acousto-optic modulator, and the carrier frequency of the drive source by changing acousto-optic modulator is regulated the Bragg grating angle of reflection of described incident laser, changes the incident laser transmission direction.

4. a kind of beam motion track control device for Laser Processing according to claim 3, it is characterized in that: described transmission optical component is transmission planar optics element or optical prism optical element; Described reflective optical devices is reflecting optics.

5. a kind of beam motion track control device for Laser Processing according to claim 2, it is characterized in that: described Beam rotation modulating unit comprises the Beam rotation modulation subunit of or at least two series connection, described Beam rotation modulation subunit comprises transmission optical component and rotating driving device thereof, described transmission optical component rotating driving device is hollow spindle motor or motor belt transmission device

Rotation transmission optical component in the described Beam rotation modulation subunit is installed in the described hollow spindle electric machine main shaft, and described electric machine main shaft is hollow shaft;

6. a kind of beam motion track control device for Laser Processing according to claim 5 is characterized in that: described hollow spindle motor is the floating hollow spindle motor of air supporting hollow spindle motor or magnetic or ceramic bearing hollow spindle motor.

7. a kind of beam motion track control device for Laser Processing according to claim 6, it is characterized in that: described rotation transmission optical component is prism wedge or lens or planar optics element or diffracting object grating or wedge.

8. a kind of beam motion track control device for Laser Processing according to claim 5, it is characterized in that: described Beam rotation modulating unit, the Beam rotation modulation subunit that comprises at least two series connection, described Beam rotation modulation subunit is independently rotation separately, the output beam optical axis of described Beam rotation modulation subunit carries out rotation along the optical axis of its incident light, the optical axis of the output beam of a rear incident beam rotation modulation subelement revolves round the sun along the optical axis of the light beam of the output of last incident beam rotation modulation subelement, and carries out rotation along the revolution track.

9. according to claim 1 to 8 each described a kind of beam motion track control devices for Laser Processing, it is characterized in that: described beam motion track imaging amplification module comprises at least one enlargement ratio laser imaging unit, and described enlargement ratio laser imaging unit is fixing laser imaging unit or the adjustable laser imaging unit of enlargement ratio of enlargement ratio.

10. a kind of beam motion track control device for Laser Processing according to claim 9 is characterized in that: the fixing laser imaging unit of described enlargement ratio comprises the lens of a plurality of series connection and the shell that is used for fixing these a plurality of lens;

The laser imaging unit that described enlargement ratio is adjustable comprises shell, is installed on the lens of a plurality of series connection in the described shell and the driver element that changes spacing between the lens.

11. a kind of beam motion track control device for Laser Processing according to claim 10, it is characterized in that: described driver element is manual drives unit or electric drive unit.

12. a kind of beam motion track control device for Laser Processing according to claim 11 is characterized in that: described Laser Focusing and focus handover module are vibration mirror scanning focusing unit or platform movement quiescent imaging focusing unit,

Described vibration mirror scanning focusing unit comprises scanning galvanometer and scanning flat field focus lamp, described scanning flat field focus lamp focuses on the emergent light from described beam motion track imaging amplification module output, described scanning galvanometer is used for the high speed of control laser spot between different machining cells and switches, or at a machining cell place, described scanning galvanometer carries out synkinesia control to the laser spot scanning motion; Described scanning flat field focus lamp is the scanning focused mirror of common flat field or telecentric scanning focus lamp;