CN103317233B - Light beam movement track control device for laser processing - Google Patents
Light beam movement track control device for laser processing Download PDFInfo
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- CN103317233B CN103317233B CN201310228182.3A CN201310228182A CN103317233B CN 103317233 B CN103317233 B CN 103317233B CN 201310228182 A CN201310228182 A CN 201310228182A CN 103317233 B CN103317233 B CN 103317233B
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Abstract
The invention relates to a light beam movement track control device for laser processing. The light beam movement track control device comprises a light beam transmission direction control module, a light beam movement track imaging amplification module and a light beam focusing and focus switching module, wherein the light beam transmission direction control module is used for modulating a transmission direction of an incident beam which is emitted onto the light beam transmission direction control module, the light beam movement track imaging amplification module is used for amplifying an optical axis movement track of the first light beam and performing beam expanding collimation on the first light beam to form a second light beam simultaneously, and the light beam focusing and focus switching module is used for focusing the second light beam and controlling a laser focus to switch among different processing units or performing auxiliary movement control on the laser focus within one processing unit. The light beam movement track control device has the advantages that the structure is simple, the transmission directions of the light beams can be controlled flexibly, sizes of light beam scanning movement tracks, light beam rotation radiuses and the like can be adjusted dynamically, meanwhile, scanning speeds of the laser processing light beams are accelerated, the large-size processing is facilitated, and the requirements of actual laser processing are met.
Description
Technical field
The present invention relates to field of laser processing, particularly relate to a kind of light beam movement track control device for Laser Processing.
Background technology
Application number is the patent of 201010183539.7, the Beam rotation module adopted, and cannot dynamically change Beam rotation diameter in process, is only suitable for using in the situation of the less change of same work piece surface boring aperture, therefore has certain limitation.
Application number is the patent of 200380110303.9, and the light beam circumference modulation movement before galvanometer is moved in a circle by speculum reflection modulation laser, and speculum is by Piezoelectric Ceramic, and its deflection amplitude is very little, is difficult to process larger hole.
Application number is the patent of 201210460145.0, because flat optical element is the work of swing mode, the modulation movement scope of flat optical element to laser beam is very little, be not suitable for processing comparatively large format, time in certain range of work, flat optical element amplitude of fluctuation is less, its period frequency repeatedly scanned is higher, but because general graphics processing all has the dimensions requirement, the period frequency repeatedly scanned is not increased, there is limitation.
Summary of the invention
It is simple that technical problem to be solved by this invention is to provide a kind of structure, transmission orientation and the expanded light beam optical axis scanning motion track of light beam can be controlled flexibly, and a kind of light beam movement track control device for Laser Processing that beam scanning rate is faster, the scan period is shorter can be made.
The technical scheme that the present invention solves the problems of the technologies described above is as follows: a kind of light beam movement track control device for Laser Processing, comprises beam Propagation orientation control module, beam motion track imaging amplification module and light beam and focuses on and focus handover module.
Described beam Propagation orientation control module is for modulating the transmission orientation of the incident beam be transmitted on it, and the first beam emissions formed after incident beam being transmitted orientation modulation is to the beam motion track imaging amplification module being positioned at this first light beam side of described beam Propagation orientation control module outgoing.
Described beam motion track imaging amplification module is used for the axis movement track of the first light beam sended over from described beam Propagation orientation control module is carried out to imaging amplification and expands process to light beam, expand and the second light beam expanded to form axis movement track, and sent to by this second light beam the light beam being positioned at this this second light beam side of beam motion track imaging amplification module outgoing to focus on and focus handover module.
Described light beam focuses on and is used for focusing on the second light beam sended over from described beam motion track imaging amplification module with focus handover module, and controls laser spot and carry out switching or carrying out synkinesia control at a machining cell place to laser spot between different machining cell.
Further, described beam Propagation orientation control module comprises Beam rotation modulating unit and/or beam deviation modulating unit.
Further, described beam deviation modulating unit comprises the beam deviation modulation subunit of one or more series connection, and described beam deviation modulation subunit comprises transmission optical component and carries out swinging or the motor of translation or piezoelectric ceramics for controlling transmission optical component; Or described beam deviation modulation subunit comprises reflective optical devices and carries out deflecting or the motor of translation or piezoelectric ceramics for controlling reflective optical devices; Or described beam deviation modulation subunit comprises acousto-optic modulator, regulated the Bragg grating reflection angle of described incident laser by the carrier frequency of the drive source changing acousto-optic modulator, change incident laser transmission direction.
Further, described transmission optical component is transmission flat optical element or optical prism optical element; Described reflective optical devices is reflecting optics.
Further, described Beam rotation modulating unit comprises the Beam rotation modulation subunit of one or at least two series connection, described Beam rotation modulation subunit comprises transmission optical component and rotating driving device thereof, described transmission optical component rotating driving device is hollow spindle motor or motor belt transmission device, rotation transmission optical component in Beam rotation modulation subunit is arranged on described hollow spindle electric machine main shaft, and described electric machine main shaft is hollow shaft.
Described motor belt transmission device, the Timing Belt comprising motor, driving wheel, driven pulley and be set on described driving wheel and driven pulley, described motor is arranged on driving wheel, rotates transmission optical component fixed installation on the driven wheel.
Further, described hollow spindle motor is air supporting hollow spindle motor or magnetic floating heart spindle motor or ceramic bearing hollow spindle motor.
Further, described rotation transmission optical component is prism wedge or lens or flat optical element or diffracting object grating or wedge.
Further, described Beam rotation modulating unit, comprise the Beam rotation modulation subunit of at least two series connection, described Beam rotation modulation subunit rotating part independently rotates separately, the output beam optical axis of Beam rotation modulation subunit carries out rotation along the optical axis of its incident light, the optical axis of the output beam of a rear Beam rotation modulation subunit revolves round the sun along the optical axis of the light beam of the output of last Beam rotation modulation subunit, and carries out rotation along revolution track.
Further, described beam motion track imaging amplification module comprises at least one enlargement ratio laser imaging unit, and described enlargement ratio laser imaging unit is the adjustable laser imaging unit of the laser imaging unit fixed of enlargement ratio or enlargement ratio.
Further, the laser imaging unit that described enlargement ratio is fixed comprises the lens of multiple series connection and the shell for fixing the plurality of lens; The laser imaging unit that described enlargement ratio is adjustable comprises shell, is installed on the lens of the multiple series connection in described shell and changes the driver element of spacing between lens.
Further, described driver element is manual actuation unit or electric drive unit.
Further, described Laser Focusing and focus handover module are vibration mirror scanning focusing unit or platform movement quiescent imaging focusing unit.
Described vibration mirror scanning focusing unit comprises scanning galvanometer and scanning f-theta mirror, described scanning f-theta mirror focuses on the emergent light exported from described beam motion track imaging amplification module, described scanning galvanometer switches for controlling the high speed of laser spot between different machining cell, or at a machining cell place, described scanning galvanometer carries out synkinesia control to laser spot scans motion; Described scanning f-theta mirror is the scanning focused mirror of common flat field or telecentric scanning focus lamp.
Described platform movement quiescent imaging focusing unit comprises quiescent imaging focus lamp and linear moving table, the emergent light that described quiescent imaging focus lamp is used for exporting from described beam motion track imaging amplification module carries out imaging and focusing, described linear moving table is for controlling the switching of laser spot between different machining cell, or at a machining cell place, described linear moving table carries out synkinesia control to laser spot scans motion.
Operation principle of the present invention is:
The transmission orientation of beam Propagation orientation control module modulated incident light beam, sends the first light beam according to certain scanning motion track.First light beam enters beam motion track imaging amplification module, spacing between the lens of manual adjustment or the automatically described beam motion track imaging amplification module inside of adjustment, obtain the second light beam that light beam is parallel, and output beam second light beam and the beam diameter ratio size of input light beam first light beam are the optical magnification of now enlargement ratio laser imaging unit in this beam motion track imaging amplification module, by enlargement ratio laser imaging unit interior lens spacing, this image optics enlargement ratio continuously adjustabe.When the first light beam high-speed, high precision motion, the second light beam is synchronous high-speed high-precision motion also, and its movement locus shape is identical, and size is different.Because the complete small complete graphical velocity of the first beam flying is exceedingly fast, precision is high, and therefore, the second light beam can be scanned with identical efficiency, and the figure of scanning can than the corresponding amplification of the first beam flying figure.
Beam Propagation orientation control module comprises Beam rotation modulating unit and/or beam deviation modulating unit.
When beam deviation modulation subunit comprise transmission optical component and for control transmission optical component carry out swinging the motor of translation or piezoelectric ceramics time, described beam deviation modulation subunit carries out refraction wobble modulations to light beam.When beam deviation modulation subunit comprise reflective optical devices and for control reflective optical devices carry out deflecting or the motor of translation or piezoelectric ceramics time, described beam deviation modulation subunit carries out reflection wobble modulations to light beam.Adopt the beam deviation modulation subunit modulated beam of light motion orientation of above-mentioned two kinds of structures, wobble modulations amplitude carried out to light beam larger, complete one-period longer for sweep time, light beam orientation modulating frequency is lower, thus there is contradiction between the size of the scanning motion track of light beam and light beam orientation modulating frequency height.Due to the function that beam motion track imaging amplification module has imaging amplification to light beam and expands, when thus acting on when being be combined with each other by the beam deviation modulation subunit of above-mentioned two kinds of structures and beam motion track imaging amplification module, in practical laser processed and applied, only need the skew doing slight amplitude of described beam deviation modulating unit to swing, therefore hunting frequency is offset very high, even can reach the frequency of 100 KHzs, and precision is high.
When beam deviation modulation subunit comprises acousto-optic modulator, beam deviation modulation subunit carries out diffraction wobble modulations to light beam.The Bragg grating reflection angle of described incident laser is regulated by the carrier frequency of the drive source changing acousto-optic modulator, change incident laser transmission direction, the modulating frequency of this mode to light beam is higher, but beam wobbling amplitude is difficult to do greatly, is not suitable for the track occasion that comparatively exposes thoroughly.The first light beam is made to become the second light beam of more large scale scanning motion track, more short scan movement velocity through light beam image transformation by the imaging amplification of beam motion track imaging amplification module.
When the driver element of the rotation transmission optical component of Beam rotation modulating unit is the form such as air supporting hollow spindle motor or magnetic floating heart spindle motor, rotating transmission optical component is prism wedge or lens or flat optical element or diffracting object grating or wedge, very meticulous laser beam can be obtained rotate (inverted cone surface, the positive conical surface, the face of cylinder rotate), meticulous and ultrahigh speed first Beam rotation speed can also be obtained.Inside this Beam rotation modulation scheme, the more difficult realization of the first beam optical axis rotational trajectory size dynamic conditioning.Adopt the beam motion track imaging amplification module that imaging enlargement ratio is adjustable or dynamically adjustable, that is the second beam optical axis rotational trajectory size is adjustable or dynamically adjustable can to realize rotating output beam optical axis.
Vibration mirror scanning focusing unit is to the high-speed displacement switching capability of laser beam and extensive area scanning machining ability, can reach on a large scale, the object of the variable micropore boring in high-speed high-quality amount, aperture, be also very suitable for the blind slot of cross section change or the blind hole laser milling processing in the multiple aperture of time processing.Due to static focus mirror, there is outstanding focus characteristics, in conjunction with linear moving table, meticulous micropore, blind slot, blind hole processing can be realized.
In a word, beam Propagation orientation control module is used to modulate the motion orientation of the little motion amplitude high-precision high-speed of incident beam, use beam motion track imaging amplification module is to the first beam optical axis movement locus amplification and to the first beam expander to obtain the second light beam, second beam optical axis movement velocity is faster, track while scan is larger, in conjunction with Laser Focusing and focus handover module, complete the efficient micro Process of various laser particularly efficient micropore Drilling operation.
The invention has the beneficial effects as follows:
The beam Propagation orientation control module be made up of above-mentioned Beam rotation modulating unit and/or beam deviation modulating unit can obtain after the transmission orientation of beam Propagation orientation control module to the incident beam be transmitted on it can be made to modulate meticulous and with ultrahigh speed carry out rotation first light beam and/or at a high speed, the first light beam of high-precision micro-displacement motion, Beam rotation track can form inverted cone surface or the positive conical surface or the face of cylinder.
Owing to have employed beam motion track imaging amplification module, under the second beam optical axis track while scan size one stable condition, beam deviation modulating unit is only needed to carry out the transmission azimuth motion modulation of slight amplitude to incident beam, beam motion amplitude is less, the required time is just corresponding shorter, thus capacitation enough greatly reduces the time that the first light beam completes the scanning of unit path, greatly improves Laser Micro-Machining efficiency.
Owing to have employed the adjustable beam motion track imaging amplification module of imaging enlargement ratio, thus can adjust flexibly or the track while scan size of dynamic conditioning second beam optical axis.
Owing to have employed beam motion track imaging amplification module, under the second beam optical axis rotating diameter one stable condition, the first beam optical axis rotating diameter can be less relative to the second beam optical axis rotating diameter.Beam rotation modulating unit can adopt the transmission optical component of small size to export the first little light beam of rotating diameter.The transmission optical component of small size is conducive to Beam rotation modulating unit and obtains higher rotating speed, improves the rotating speed of the first light beam, thus improves the second Beam rotation speed further.
Laser Focusing and focus handover module can realize switching fast at different machining cells laser spot, the Laser Processing effect and quality significantly improved, realize big width laser Milling Process, or at a machining cell place, synkinesia control is carried out to laser spot, enrich laser beam space track modulation further, realize more complicated laser processing mode.
This apparatus structure is simple, the transmission orientation of light beam can be controlled flexibly, the sizes such as adjustment or dynamic adjustments beam scanning motion track, Beam rotation radius, the sweep speed of laser processing beam can also be made faster simultaneously, be easy to large-sized processing, the demand of more realistic Laser Processing.
Accompanying drawing explanation
Fig. 1 is the apparatus structure schematic diagram of the embodiment of the present invention 1 Copper Foil laser drilling through hole;
Fig. 2 is the apparatus structure schematic diagram of the embodiment of the present invention 2 aluminium nitride ceramics laser milling blind slot;
Fig. 3 is the apparatus structure schematic diagram of the embodiment of the present invention 3 aluminium nitride ceramics laser milling blind slot.
In accompanying drawing, the list of parts representated by each label is as follows:
1, beam Propagation orientation control module, 101, Rotating Plates quartz glass, 102, the hollow spindle of air-floating main shaft motor, 103, first plane mirror, 104, second plane mirror, 112, first beam deviation unit, 121, first flat quartz glass, 122, first rotating shaft, 113, second beam deviation unit, 131, second motor, 132, second rotating shaft, 133, second flat quartz glass, 2, beam motion track imaging amplification module, 201, first convex lens, 202, first concavees lens, 203, second concavees lens, 204, second convex lens, 205, shell, 3, Laser Focusing and focus handover module, 31, scanning galvanometer, 311, the electric machine main shaft of the second motor, 312, second vibration mirror reflected eyeglass, 313, first vibration mirror reflected eyeglass, 314, first motor, 315, the electric machine main shaft of the first motor, 32, scanning f-theta mirror, 4, workpiece to be processed, 5, incident beam, 6, first light beam, 7, second light beam, 8, first folded light beam, 9, second folded light beam, 10, focused beam, 11, transmitted light beam.
Detailed description of the invention
Be described principle of the present invention and feature below in conjunction with accompanying drawing, example, only for explaining the present invention, is not intended to limit scope of the present invention.
Embodiment 1:
Fig. 1 is the apparatus structure schematic diagram of Copper Foil laser drilling through hole, as shown in Figure 1: the device of Copper Foil laser drilling through hole comprises beam Propagation orientation control module 1, beam motion track imaging amplification module 2 and Laser Focusing and focus handover module 3.
Described beam Propagation orientation control module 1 is Beam rotation modulating unit, this Beam rotation modulating unit comprises a Beam rotation modulation subunit, and this Beam rotation modulation subunit comprises the drive unit rotating transmission optical component and rotate for driven rotary transmission optical component.Rotating transmission optical component is Rotating Plates quartz glass 101, and the refractive index of Rotating Plates quartz glass 101 is 1.35 to 3, is preferably 1.45, thickness 6 millimeters, 532 nanometer anti-reflection films are all plated on its two sides, and the thickness of Rotating Plates quartz glass 101 is larger, and Beam rotation diameter is larger.Drive unit is the air supporting hollow spindle motor of band hollow spindle, and air supporting hollow spindle motor also can substitute with being with the magnetic floating heart spindle motor of hollow spindle or ceramic bearing hollow spindle motor or motor belt transmission device.Described Rotating Plates quartz glass 101 is fixed in the hollow spindle 102 of air-floating main shaft motor, and Rotating Plates quartz glass 3 rotates together with hollow spindle 2.Hollow spindle 2 diameter of bore is preferably 8 millimeters, and air-floating main shaft motor speed can reach 500,000 revs/min.General actuating speed can reach at a high speed or superfast level, and wherein, speed is at a high speed at 5000 revs/min to 50,000 revs/min, is ultrahigh speed more than 50,000 revs/min.Current air-floating main shaft motor speed can reach 160,000 revolutions per seconds.
The driver element rotating transmission optical component is the form such as air supporting hollow spindle motor or magnetic floating heart spindle motor, rotating transmission optical component is prism wedge or lens or flat optical element or diffracting object grating or wedge, the result of this configuration can obtain very meticulous laser beam to rotate (inverted cone surface, the positive conical surface, the face of cylinder rotate), meticulous and ultrahigh speed first Beam rotation speed can also be obtained, its rotary speed even can up to 1,000,000 revs/min, if adopt Dove prism to coordinate slide, the rotary light beam of 2,000,000 revs/min can be obtained.
If adopt motor belt actuator drives Rotating Plates quartz glass 3, the Timing Belt that this motor belt transmission device comprises motor, driving wheel, driven pulley and is set on described driving wheel and driven pulley, described motor is arranged on driving wheel, and Rotating Plates quartz glass 3 fixedly mounts in hollow shaft on the driven wheel.
When the hollow electric spindle of described hollow electric spindle motor is arranged on air-bearing, this hollow electric spindle motor is also referred to as air supporting hollow electric spindle motor.Described air-bearing refers to and realizes by importing pressure air in bearing bore the bearing that hollow electric spindle suspends in atmosphere.In described air-bearing bearing bore, the gap of pressure release is minimum, ensure that the high accuracy of hollow electric spindle suspends to rotate, and can stably rotate accurately, possess high rotating speed, pinpoint accuracy, zerofriction force, without wearing and tearing, do not need lubricating oil, have remarkable speeds control performance, compact conformation, lightweight, vibrate the advantages such as little, noise is low, the little response of inertia is fast.
When the hollow electric spindle of described hollow electric spindle motor is arranged on Hydrodynamic and-static Bearing, this hollow electric spindle motor is also referred to as hydraulic pressure hollow electric spindle motor.Described Hydrodynamic and-static Bearing refers to a kind of outer portion's supply constant pressure oil, in bearing, sets up the bearing making electro spindle oil film of suspension high voltage static pressure carrying all the time from start to stopping.Described Hydrodynamic and-static Bearing have do not have wearing and tearing, long service life, starting power little, under the speed of extremely low (being even zero) also applicable feature.In addition, this bearing also has that running accuracy is high, oil film rigidity is large, can suppress the advantages such as film shocks.Described hydraulic pressure hollow electric spindle motor, owing to have employed Hydrodynamic and-static Bearing, therefore possesses very high rigidity and damping, possesses higher rotation speed and service life.
When the hollow electric spindle of described hollow electric spindle motor is arranged on electromagnetic suspension bearing, this hollow electric spindle motor is also referred to as magnetic floating electrocardio spindle motor.Described electromagnetic suspension bearing is that electro spindle is suspended in the bearing that space realizes contactless supporting by a kind of electromagnetic force that utilizes, have without friction, without the need to lubrication, without oil pollution, the advantage such as energy consumption is low, noise is little, the life-span is long, be specially adapted in the particular surroundings such as vacuum, super dead room, high speed.Described magnetic floating electrocardio spindle motor, owing to adopting electromagnetic suspension bearing, therefore possess high speed performance good, precision is high, easily realizes the advantages such as diagnosis and on-line monitoring.
When the hollow electric spindle of described hollow electric spindle motor is arranged on ceramic bearing, this hollow electric spindle motor is also referred to as ceramic bearing hollow electric spindle motor.Described ceramic bearing refers to that the rolling element of bearing uses Ceramic Balls, and bearing ring is still the bearing of steel ring, and ceramic bearing standardization level is high, under the condition meeting certain rotating speed, possesses the simple advantage of the low structure of cost.The hollow electric spindle of described ceramic bearing hollow electric spindle motor is arranged on ceramic bearing, and the rotating speed of this ceramic bearing is at more than 5000 turns per minute.
Described beam motion track imaging amplification module 2 comprises an enlargement ratio laser imaging unit, according to the object-image relation of perfect optical system, the laser imaging unit that imaging enlargement ratio is adjustable can adopt the lens combination of more than three groups or three groups to realize the function without burnt continuous zoom imaging and collimator and extender.The various ways such as " positive lens-negative lens-positive lens " or " negative lens-positive lens-negative lens " that three lens cluster can adopt, such as can design first group for fixing group, second group is mobile zoom group, and the 3rd group is compensating group.In the laser imaging unit that the enlargement ratio of three lens cluster composition is adjustable, when relative to its object point, also namely the picture point of first group of lens moves second group of lens, its imaging magnification changes thereupon, and consequent system focal length variations is moved by three lens cluster and compensates.Now, if the picture point of second group of lens overlaps with the front focus of the 3rd group just, then whole system is exactly a non-focus optical system, and outgoing beam diameter constantly can change along with the movement of these two groups of lens.
The enlargement ratio laser imaging unit of the present embodiment is the adjustable laser imaging unit of enlargement ratio.The laser imaging unit that this enlargement ratio is adjustable comprises shell 205, connects successively and is arranged on the first convex lens 201, first concavees lens 202, second concavees lens 203 and the second convex lens 204 in shell 205.Wherein, first convex lens 201 are fixed in housing 205 also known as fixed lens group, first concavees lens 202 are called variable focus lens package, second concavees lens 203 and the second convex lens 204 are called offset lens group, and the mobile linear electric motors high-speed, high precision that adopts of variable focus lens package and offset lens group drives and position and lock.When variable focus lens package moves relative to fixed lens group, the equivalent focal length of variable focus lens package and fixed lens group just continuously changes, and produces in new focus A(figure and does not indicate).Offset lens group is also designed to movably, do not indicate when variable focus lens package moves in a certain position B(figure) time, offset lens group also moves in corresponding position C(figure and does not indicate), make not indicate in new focus A(figure) be stabilized in the focus of offset lens group, be combined into new expand than beam-expanding system.Zoom beam-expanding system here adopts the version similar in appearance to Galilean type, each constituent element is decided to be the combination of positive negative lens, laser beam can not too be assembled, and also shortens the operating distance of system simultaneously.Simultaneously, in order to spherical aberration corrector preferably, coma and band spherical aberration, and consider that superlaser can should not adopt balsaming lens to cemented surface damage, zoom group being become two separate type with compensating group lens design, carrying out aberration correction by selecting the trace change of the kind of optical lens material and the air gap.In some cases, in order to reduce costs, can manual actuation variable focus lens package and offset lens group mechanical caging.
Use Beam rotation modulation subunit, the transmission optical component of small size can be adopted, to reduce the rotary inertia of transmission optical component to obtain better dynamic balance property, be conducive to Beam rotation modulating unit and obtain higher rotating speed, thus the first light beam of higher running accuracy and rotary rpm can be obtained, but still there is the problems such as the diameter adjustment inconvenience of the first beam scanning motion track, the first beam optical axis movement locus little to rotating diameter by beam motion track imaging amplification module carries out imaging amplification, the second light beam of the large movement locus of high-speed, high precision can be obtained, the imaging amplification of the different multiplying of the amplification module of beam motion track imaging simultaneously can change the scanning motion track size of the second light beam.
Described Laser Focusing and focus handover module 3 are vibration mirror scanning focusing unit, and described vibration mirror scanning focusing unit comprises scanning galvanometer 31 and scanning f-theta mirror 32.Scanning f-theta mirror 32 has the types such as the scanning focused mirror of common flat field and telecentric scanning focus lamp, and in the present embodiment, scanning f-theta mirror adopts telecentric scanning focus lamp.The focal length of telecentric scanning focus lamp is 10 to 1000 millimeters, and be preferably 100 millimeters, f-theta scope is 5 millimeters × 5 millimeters to 500 millimeters × 500 millimeters, is preferably 50 millimeters × 50 millimeters.Scanning galvanometer 32 comprises the first vibration mirror reflected eyeglass 313 and the second vibration mirror reflected eyeglass 312.
First vibration mirror reflected eyeglass 313 of described scanning galvanometer is arranged on the electric machine main shaft 315 of the first motor 314 of scanning galvanometer.
Second vibration mirror reflected eyeglass 312 of described scanning galvanometer is arranged on the electric machine main shaft 311 of the second motor of scanning galvanometer.
Described workpiece to be processed 4 is 100 micron thickness Copper Foils.
Light path flow process in the apparatus structure of whole Copper Foil laser drilling through hole is as follows: incident beam 5 obtains the first light beam 6 through after the Rotating Plates quartz glass 101 being positioned at hollow spindle cavity, described first light beam 6 obtains the second light beam 7 after electronic adjustable enlargement ratio image-generating unit, second light beam 7 obtains the first folded light beam 8 through the first vibration mirror reflected eyeglass 313 of scanning galvanometer 31, first folded light beam 8 obtains the second folded light beam 9 through the second vibration mirror reflected eyeglass 312 of scanning galvanometer 31, second folded light beam 9 focuses on through telecentric scanning focus lamp, obtain focused beam 10, focused beam 10 directly acts on workpiece to be processed 4.
Described incident beam 5 is preferably the incident beam of 1 millimeter for diameter, relevant parameter is as follows: optical maser wavelength 532 nanometer, beam quality factor is less than 1.2, hot spot circularity is greater than 90 percent, mean power 30 watts, single mode gauss laser (horizontal field intensity is Gaussian Profile), pulse recurrence frequency, from 10 KHz to 100 megahertzes, is preferably 500 KHzs.
The refractive index of described Rotating Plates quartz glass 101 is 1.45, thickness 3 millimeters, 532 nanometer anti-reflection films are all plated on its two sides, the normal of the laser entrance face of Rotating Plates quartz glass 3 and incident beam optical axis angle are 5 degree, under air supporting hollow spindle drives, Rotating Plates quartz glass 101 can rotate around the optical axis of incident beam 5, makes the movement locus of the first light beam 6 optical axis become axle centered by incident beam 5 and diameter is the face of cylinder of 80 microns.The normal of laser entrance face of design Rotating Plates quartz glass 101 and the angle of incident beam 5 optical axis, change the thickness of Rotating Plates quartz glass 101, or change Refractive Index of Material or the shape of rotating optical element, the first Beam rotation track of the positive conical surface or inverted cone surface can be obtained.
First light beam 6 injects described adjustable enlargement ratio image-generating unit.When the first light beam 6 transfixion, described adjustable enlargement ratio image-generating unit just only plays the function of adjustable multiplying power laser beam expander, expands multiplying power between 2 to 12 times.When the first light beam 6 moves around incident beam 5, described adjustable enlargement ratio image-generating unit can not only play the function of adjustable multiplying power laser beam expander, the enlargement ratio of the movement locus of the first light beam 6 can also be made to become adjustable, and adjustable enlargement ratio is also between 2 to 12 times.When the movement locus of the first light beam 6 optical axis is the face of cylinder around the diameter 80 microns of incident beam 5, the movement locus of the optical axis of the second light beam 7 be around the face of cylinder diameter of section of the optical axis of incident beam 5 between 160 microns to 960 microns.
The two panels reflecting optics i.e. first vibration mirror reflected eyeglass 313 of scanning galvanometer 31 matches with the second vibration mirror reflected eyeglass 312, every completion of processing hole, just the Focal Point Shift of focused beam 10 to next position, in this jump procedure, laser is black out; When described first vibration mirror reflected eyeglass 313 and the second vibration mirror reflected eyeglass 312 lock motionless again, now Laser output.For described first light beam 6 optical axis rotational trajectory for diameter 80 microns of faces of cylinder, when the imaging enlargement ratio of described adjustable enlargement ratio image-generating unit is 12 times, second light beam 7 optical axis rotational trajectory is diameter 960 microns of faces of cylinder, and the optical axis rotational trajectory of the first folded light beam 8, second folded light beam 9, focused beam 10 is diameter 960 microns of faces of cylinder.The focus of focused beam 10 marks the circle (focal beam spot 20 microns) of 980 microns on workpiece 4 to be added.By the imaging enlargement ratio of the adjustable enlargement ratio image-generating unit of electronic dynamic conditioning, the focus dynamically changing focused beam 10 can be reached on workpiece 4 to be added, mark diameter of a circle size.By this method, the via-hole array of required different pore size can be got out on described workpiece to be processed 4.
In order to expand processing breadth, can also described workpiece to be processed 4 be placed on mobile platform, large-scale Laser Processing can be realized like this, in practice Laser Processing sweep limits area generally more than 200 millimeters × 200 millimeters be commonly referred to large area.
Adjustable enlargement ratio image-generating unit described in the present embodiment, can be substituted by some fixing enlargement ratio imaging subelements, selects the wherein fixing enlargement ratio imaging subelement of one or several series connection to form adjustable enlargement ratio image-generating unit when needs.
Embodiment 2:
Fig. 2 is the apparatus structure schematic diagram of aluminium nitride ceramics laser milling blind slot, as shown in Figure 2: the device of aluminium nitride ceramics laser milling blind slot comprises beam Propagation orientation control module 1, beam motion track imaging amplification module 2 and Laser Focusing and focus handover module 3.Structure in the structure of the beam motion track imaging amplification module 2 in the present embodiment and Laser Focusing and focus handover module 3 and embodiment 1 is identical.
Described beam Propagation orientation control module 1 comprises beam deviation modulating unit, and this beam deviation modulating unit comprises the beam deviation subelement of two series connection, i.e. the first beam deviation unit 112 and the second beam deviation unit 113.First beam deviation unit 112 comprises the first flat quartz glass 121 and for driving the first motor (not shown) of described first flat quartz glass 121, described first flat quartz glass 121 is arranged on the first rotating shaft 122, first rotating shaft 122 is the electric machine main shaft of the first motor, first flat quartz glass 121 around the first rotating shaft 122 axial-rotation, and the first rotating shaft 122 be axially perpendicular to paper.Second beam deviation unit 113 comprises the second flat quartz glass 133 and for driving the second motor 131 of described second flat quartz glass 133, described second flat quartz glass 133 is arranged on the second rotating shaft 132, and the second rotating shaft 132 is the electric machine main shaft of the second motor 131.Described second flat quartz glass 133 can around the second rotating shaft 132 axial-rotation.The refractive index of described first flat quartz glass 121 and the second flat quartz glass 133 is 1.45, and thickness is 3 millimeters, and two sides is all coated with the anti-reflection film of 532 nanoseconds.
Motor is adopted to swing transmission flat optical element, be exactly the first light beam after incident beam refraction, both can reach micron dimension by translation distance, but because transmission flat optical element can be accomplished very little, therefore motor can swing by higher hunting frequency, can obtain the first light beam of micro-displacement high-speed motion.
Described workpiece to be processed 4 is 500 micron thickness aluminium nitride ceramics.
Light path flow process in the apparatus structure of whole aluminium nitride ceramics laser milling blind slot is as follows: incident beam 5 obtains transmitted light beam 11 through the first flat quartz glass 121, transmitted light beam 11 obtains the first light beam 6 through after the second flat quartz glass 133, described first light beam 6 obtains the second light beam 7 after electronic adjustable enlargement ratio image-generating unit 2, second light beam 7 obtains the first folded light beam 8 through the first vibration mirror reflected eyeglass 313 of scanning galvanometer 31, first folded light beam 8 obtains the second folded light beam 9 through the second vibration mirror reflected eyeglass 312 of scanning galvanometer 31, second folded light beam 9 focuses on through telecentric scanning focus lamp, obtain focused beam 10, focused beam 10 directly acts on workpiece to be processed 4.
Described incident beam 5 for diameter be the incident beam of 1 millimeter, relevant parameter is as follows: optical maser wavelength 532 nanometer, beam quality factor is less than 1.2, hot spot circularity is greater than 90 percent, mean power 30 watts, single mode gauss laser (horizontal field intensity is Gaussian Profile), pulse recurrence frequency, from 10 KHz to 100 megahertzes, is preferably 100 KHzs.
The refractive index of described first flat quartz glass 121 and the second flat quartz glass 133 is 1.45, thickness 3 millimeters, and 532 nanometer anti-reflection films are all plated on its two sides, and described first flat quartz glass 121 is vertical non-intersect with the swinging axle of the second flat quartz glass 133.
Described first flat quartz glass 121 can swing around the first swinging axle 122 perpendicular to paper, angle between the laser incidence surface normal of the first flat quartz glass 121 and original incident laser beam 5 beam optical axis is changed within the scope of 0 ~ 1 degree, make transmitted light beam 11 obtain translation relative to incident beam 5, side-play amount changes in 0 ~ 16 micrometer range.
Second rotating shaft 132 of described second flat quartz glass 133 and the first swinging axle 122 spatial vertical of the first flat quartz 121 non-intersect, and be all basically perpendicular to incident laser beam 5.Second swinging axle 132 controls the second flat quartz glass 133 and swings, the laser incidence surface normal of the second quartzy plate glass 133 and the angle of transmitted light beam 11 are changed between 0 ~ 1 degree of scope, make the first light beam 6 obtain respective parallel displacement relative to transmitted light beam 11, side-play amount changes between 0 ~ 16 micrometer range.
The routing motion of described first flat quartz glass 121 and the second flat quartz glass 133 directly determines the movement locus of the first light beam 6, and in the present embodiment, the range of movement of the first light beam 6 is the square region of 16 microns × 16 microns.And first, second flat optical element is small-sized, pendulum angle is so little, and its hunting frequency can be very high, and laser displacement control accuracy is high, obtains the scanning effect of high-speed, high precision first light beam 6 like this.
First light beam 6 injects described adjustable enlargement ratio image-generating unit.When the first light beam 6 transfixion, described adjustable enlargement ratio image-generating unit just only plays the function of adjustable multiplying power laser beam expander, expands multiplying power between 2 to 12 times.When the first light beam 6 moves around incident beam 5, described adjustable enlargement ratio image-generating unit can not only play the function of adjustable multiplying power laser beam expander, and the enlargement ratio of the movement locus of the first light beam 6 can also be made adjustable, and adjustable enlargement ratio is also between 2 to 12 times.When the movement locus of the first light beam 6 optical axis is when centered by incident beam 5, axle and diameter are the face of cylinder of 16 microns, the movement locus of the optical axis of the second light beam 7 be around the face of cylinder diameter of section of the optical axis of incident beam 5 between 32 microns to 190 microns.
The two panels reflecting optics i.e. first vibration mirror reflected eyeglass 313 of scanning galvanometer 31 matches with the second vibration mirror reflected eyeglass 312, every completion of processing hole, just the Focal Point Shift of focused beam 10 to next position, in this jump procedure, laser is black out; When described first vibration mirror reflected eyeglass 313 and the second vibration mirror reflected eyeglass 312 lock motionless again, now Laser output.When described first light beam 6 optical axis rotational trajectory is diameter 16 microns of faces of cylinder, when the imaging enlargement ratio of described adjustable enlargement ratio image-generating unit is 10 times, second light beam 7 optical axis rotational trajectory is diameter 160 microns of faces of cylinder, and the optical axis rotational trajectory of the first folded light beam 8, second folded light beam 9, focused beam 10 is diameter 160 microns of faces of cylinder.The focus of focused beam 10 marks the circle (focal beam spot 30 microns) of 190 microns on workpiece 4 to be added.By the imaging enlargement ratio of the adjustable enlargement ratio image-generating unit of electronic dynamic conditioning, the focus dynamically changing focused beam 10 can be reached on workpiece 4 to be added, mark diameter of a circle size.By this method, the via-hole array of required different pore size can be got out on described workpiece to be processed 4.
Sometimes in order to reduce costs, the enlargement ratio image-generating unit that enlargement ratio can be adopted manually adjustable or fixing enlargement ratio image-generating unit.
The present embodiment situation, described beam Propagation orientation control module itself can change shape and the size of the track while scan of the first light beam 6 by the swing changing the first and second flat quartz glass, therefore, fixing enlargement ratio image-generating unit is adopted in a lot of situation, and remain unchanged due to laser beam expanding multiplying power, possess the advantage that focused spot size remains unchanged.
The benefit of this processing mode of the present embodiment is, the advantage of high-speed, high precision when make use of beam Propagation orientation control module 1 fine scanning, coordinate beam motion track imaging amplification module 2 to the laser beam expanding function of the first light beam 6, the movement locus enlarging function of the first light beam 6, achieve the function in figure path needed for high-speed, high precision dynamic scan cleverly.In addition, make use of that beam Propagation orientation control module 1 is meticulous fills scanning repeatedly, form wider laser scanning cutting joint-cutting, flat-top Laser Processing effect is realized with gauss laser, retain the advantages such as the Laser Processing feature of gauss laser Diode laser and Gaussian Profile light intensity simultaneously, be very suitable for the field needing flat-top Laser Processing or the even Fast Filling scanning of small scope, processing effect is better than flat-top laser and controls very simple.
In above-described embodiment, the while that the rotary main shaft of flat optical element being orthogonal, also need vertical with beam optical axis in theory, the alignment error in actual use is undertaken correcting by control software design.
Embodiment 3:
Fig. 3 is the apparatus structure schematic diagram of embodiment 3 LTCC laser drill, as shown in Figure 3: the device of LTCC laser drill comprises beam Propagation orientation control module 1, beam motion track imaging amplification module 2 and Laser Focusing and focus handover module 3.Structure in the structure of the beam motion track imaging amplification module 2 in the present embodiment and Laser Focusing and focus handover module 3 and embodiment 1 is identical.
Described beam Propagation orientation control module 1 comprises beam deviation modulating unit, this beam deviation modulating unit comprises the beam deviation subelement of two series connection, i.e. the first beam deviation unit and the second beam deviation unit, first beam deviation unit comprises the first plane mirror 103 and for driving described first plane mirror 103 to move the first Piezoelectric Ceramic system (not shown) of (swing or translation), second beam deviation unit comprises the second plane mirror 104 and for driving described second plane mirror 104 to move the second Piezoelectric Ceramic system (not shown) of (swing or translation).
Adopt Piezoelectric Ceramic plane mirror, one dimension or two-dimensional deflection reflection are carried out to laser, can accomplish to laser beam reflection modulation ability the frequency that 10KHz is even higher under low-angle, this very high modulating frequency, make the speed of the first beam flying figure quickly.
Described workpiece to be processed 4 is 200 micron thickness LTCCs.
Light path flow process in the apparatus structure of whole LTCC laser drill is as follows: incident beam 5 obtains a folded light beam through the reflection of the first plane mirror 103, this folded light beam obtains the first light beam 6 after the second plane mirror 104 reflects, first light beam 6 obtains the second light beam 7 again after electronic adjustable enlargement ratio image-generating unit, second light beam 7 obtains the first folded light beam 8 through the first vibration mirror reflected eyeglass 313 of scanning galvanometer 31, first folded light beam 8 obtains the second folded light beam 9 through the second vibration mirror reflected eyeglass 312 of scanning galvanometer 31, second folded light beam 9 focuses on through telecentric scanning focus lamp, obtain focused beam 10, focused beam 10 directly acts on workpiece to be processed 4.
Described incident beam 5 for diameter be the incident beam of 1 millimeter, relevant parameter is as follows: optical maser wavelength 532 nanometer, beam quality factor is less than 1.2, hot spot circularity is greater than 90 percent, mean power 30 watts, single mode gauss laser (horizontal field intensity is Gaussian Profile), pulse recurrence frequency, from 10 KHz to 100 megahertzes, is preferably 500 KHzs.
Described first plane mirror 103 can be arranged at least one piezoelectric element or electrostriction element, particularly on piezoelectric ceramics; Piezoelectric element particularly piezo ceramic element flexible, makes the first mirror angle deflection, the transmission of angle of the folded light beam of the first plane mirror 103 is deflected.Piezo ceramic element basic at present or the stretching frequency of electrostriction element can accomplish more than GHz (GHz).Here 20KHz stretching frequency piezoelectric ceramics is adopted.
Described second plane mirror 104 can be arranged at least one piezoelectricity telescopic element or electrostriction element, particularly on piezoelectric ceramics; Stretching of piezo ceramic element, makes the second plane mirror 104 angular deflection, the transmission of angle of the first light beam 6 is deflected.
Described first plane mirror 103 is mutually vertical with the axis of oscillation of the second plane mirror 104.The movement locus of weave control first light beam 6 of the first plane mirror 103 and the second plane mirror 104 is the space tracking of free routing.Such as control the taper seat that the first beam motion track is angle 0.5 degree, second plane mirror 104 is apart from the plane of incidence distance 10 centimetres of electronic adjustable enlargement ratio image-generating unit, and so the beam optical axis of the first light beam 6 is the circle of diameter 60 microns at the movement locus of the plane of incidence of electronic adjustable enlargement ratio image-generating unit.Now change the distance of the second plane mirror 53 apart from the electronic adjustable enlargement ratio image-generating unit plane of incidence, or change the angle of the first light beam 6 taper seat movement locus, the motion Circular test size of beam optical axis at the electronic adjustable enlargement ratio image-generating unit plane of incidence of the first light beam 6 can be changed.
Described first light beam 6 injects described adjustable enlargement ratio image-generating unit.When the first light beam 6 transfixion, described adjustable enlargement ratio image-generating unit just only plays the function of adjustable multiplying power laser beam expander, expands multiplying power between 2 to 12 times.When the first light beam 6 moves around incident beam 5, adjustable enlargement ratio image-generating unit just not only has the function of adjustable multiplying power laser beam expander, and the enlargement ratio of the movement locus of the first light beam 6 can also be made adjustable, and adjustable enlargement ratio is between 2 to 12 times.
The two panels reflecting optics i.e. first vibration mirror reflected eyeglass 313 of scanning galvanometer 31 matches with the second vibration mirror reflected eyeglass 312, every completion of processing hole, just the Focal Point Shift of focused beam 10 to next position, in this jump procedure, laser is black out; When described first vibration mirror reflected eyeglass 313 and the second vibration mirror reflected eyeglass 312 lock motionless again, now Laser output.When the movement locus of the first light beam 6 optical axis is summit at the taper seat of the second plane mirror 104 or other movement locus, the movement locus of the optical axis of the second light beam 7 is the picture of the first light beam 6 movement locus after adjustable enlargement ratio image-generating unit amplifies, the beam optical axis of the first light beam 6 is the circle of diameter 60 microns at the movement locus of the electronic adjustable enlargement ratio image-generating unit plane of incidence, the enlargement ratio of electronic adjustable enlargement ratio image-generating unit is set in 10, the movement locus of the optical axis of the second light beam 7 from diameter of section during 55 outgoing of electronic adjustable enlargement ratio image-generating unit at 600 microns.The optical axis rotational trajectory taper seat of the first folded light beam 8, second folded light beam 9, focused beam 10.The focus of focused beam 10 marks the circle of required diameter on workpiece 4 to be added.By the imaging enlargement ratio of the adjustable enlargement ratio image-generating unit of electronic dynamic conditioning, the focus dynamically changing focused beam 10 can be reached on workpiece 4 to be added, mark diameter of a circle size.By this method, the via-hole array of required different pore size can be got out on described workpiece to be processed 4.
Sometimes in order to reduce costs, the enlargement ratio image-generating unit that enlargement ratio can be adopted manually adjustable or fixing enlargement ratio image-generating unit.
The present embodiment situation, described beam Propagation orientation control module 1 itself can change shape and the size of the track while scan of the first light beam 1 by changing the first and second plane mirror reflection angles; Change the distance of the second plane mirror 104 apart from the electronic adjustable enlargement ratio image-generating unit plane of incidence, or change the angle of the first light beam taper seat movement locus, also can change the motion Circular test size of beam optical axis at the electronic adjustable enlargement ratio image-generating unit plane of incidence of the first light beam 6.Therefore, adopt fixing enlargement ratio image-generating unit in a lot of situation, and remain unchanged due to laser beam expanding multiplying power, possess the advantage that focused spot size remains unchanged.
The benefit of this processing mode of the present embodiment is, the advantage of high-speed, high precision when make use of beam Propagation orientation control module 1 fine scanning, coordinate the laser beam expanding function of beam motion track imaging amplification module to the first light beam 6, the movement locus enlarging function of the first light beam 6, achieve the function in figure path needed for high-speed, high precision dynamic scan cleverly.In addition, make use of that beam Propagation orientation control module 1 is meticulous fills scanning repeatedly, form wider laser scanning cutting joint-cutting, flat-top Laser Processing effect is realized with gauss laser, retain the advantages such as the Laser Processing feature of gauss laser Diode laser and Gaussian Profile light intensity simultaneously, be very suitable for the field needing flat-top Laser Processing or the even Fast Filling scanning of small scope, processing effect is better than flat-top laser and controls very simple.
Above-described embodiment is three typically application of the present invention, in fact the application of its principle is not limited to described situation above, the mode that such as Laser Focusing can adopt two-dimensional linear mobile platform to focus in conjunction with laser quiescent imaging with focus handover module works, and the laser spot microspur of fine space switches and can complete with the first beam wobbling that beam Propagation orientation control module 1 exports.
In a word, the present invention proposes a kind of light beam movement track control device for Laser Processing, its important feature is: the advantage of high-speed, high precision when make use of beam Propagation orientation control module 1 fine scanning, coordinate beam motion track imaging amplification module 2 to the laser beam expanding function of the first light beam and axis movement track imaging enlarging function, achieve the combination that two kinds of modes are amplified in the meticulous fine motion scanning of high speed and the imaging of laser beam axis movement locus cleverly, realize the function in the required figure path of laser high-speed Dynamic High-accuracy scanning.In addition, make use of that beam Propagation orientation control module 1 is meticulous fills scanning repeatedly, form wider laser scanning cutting joint-cutting, flat-top Laser Processing effect is realized with gauss laser, retain the advantages such as the Laser Processing feature of gauss laser Diode laser and Gaussian Profile light intensity simultaneously, be very suitable for the field needing flat-top Laser Processing or the even Fast Filling scanning of small scope, processing effect is better than flat-top laser and controls very simple.
For the beam Propagation orientation control module 1 of Beam rotation mode, manual or electronic enlargement ratio adjustable laser image-generating unit successfully achieves the online nonadjustable problem of high speed rotary motion Beam rotation diameter.
Adopt vibration mirror scanning focusing unit, laser spot is switched fast, the Laser Processing breadth, working (machining) efficiency and the crudy that significantly improve.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (8)
1. for a light beam movement track control device for Laser Processing, it is characterized in that: comprise beam Propagation orientation control module, beam motion track imaging amplification module and light beam and focus on and focus handover module;
Described beam Propagation orientation control module is for modulating the transmission orientation of the incident beam be transmitted on it, and the first beam emissions formed after incident beam being transmitted orientation modulation is to the beam motion track imaging amplification module being positioned at this first light beam side of described beam Propagation orientation control module outgoing;
Described beam Propagation orientation control module comprises Beam rotation modulating unit and/or beam deviation modulating unit;
Described beam deviation modulating unit comprises the beam deviation modulation subunit of one or more series connection, and described beam deviation modulation subunit comprises transmission optical component and carries out swinging or the motor of translation or piezoelectric ceramics for controlling transmission optical component; Or described beam deviation modulation subunit comprises reflective optical devices and carries out deflecting or the motor of translation or piezoelectric ceramics for controlling reflective optical devices; Or described beam deviation modulation subunit comprises acousto-optic modulator, regulated the Bragg grating reflection angle of described incident laser by the carrier frequency of the drive source changing acousto-optic modulator, change incident laser transmission direction;
Described Beam rotation modulating unit comprises the Beam rotation modulation subunit of one or at least two series connection, described Beam rotation modulation subunit comprises transmission optical component and rotating driving device thereof, described transmission optical component rotating driving device is hollow spindle motor or motor belt transmission device, rotation transmission optical component in described Beam rotation modulation subunit is arranged in described hollow spindle electric machine main shaft, and described electric machine main shaft is hollow shaft;
Described hollow spindle motor is air supporting hollow spindle motor or magnetic floating heart spindle motor or ceramic bearing hollow spindle motor;
Described motor belt transmission device, the Timing Belt comprising motor, driving wheel, driven pulley and be set on described driving wheel and driven pulley, described motor is arranged on driving wheel, rotates transmission optical component fixed installation on the driven wheel;
Described beam motion track imaging amplification module is used for carrying out imaging amplification to the axis movement track of the first light beam sended over from described beam Propagation orientation control module and expanding process to described first light beam, expand and the second light beam expanded to form axis movement track, and sent to by this second light beam the light beam being positioned at this this second light beam side of beam motion track imaging amplification module outgoing to focus on and focus handover module;
Described light beam focuses on and is used for focusing on the second light beam sended over from described beam motion track imaging amplification module with focus handover module, and controls laser spot and carry out switching or carrying out synkinesia control at a machining cell place to laser spot between different machining cell.
2. a kind of light beam movement track control device for Laser Processing according to claim 1, is characterized in that: described transmission optical component is transmission flat optical element or optical prism optical element; Described reflective optical devices is reflecting optics.
3. a kind of light beam movement track control device for Laser Processing according to claim 1, is characterized in that: described rotation transmission optical component is prism wedge or lens or flat optical element or diffracting object grating or wedge.
4. a kind of light beam movement track control device for Laser Processing according to claim 1, it is characterized in that: described Beam rotation modulating unit, comprise the Beam rotation modulation subunit of at least two series connection, described Beam rotation modulation subunit independently rotates separately, the output beam optical axis of described Beam rotation modulation subunit carries out rotation along the optical axis of its incident light, the optical axis of the output beam of a rear incident beam rotation modulation subelement revolves round the sun along the optical axis of the light beam of the output of last incident beam rotation modulation subelement, and carry out rotation along revolution track.
5. a kind of light beam movement track control device for Laser Processing according to any one of Claims 1-4, it is characterized in that: described beam motion track imaging amplification module comprises at least one enlargement ratio laser imaging unit, described enlargement ratio laser imaging unit is the adjustable laser imaging unit of the laser imaging unit fixed of enlargement ratio or enlargement ratio.
6. a kind of light beam movement track control device for Laser Processing according to claim 5, is characterized in that: the laser imaging unit that described enlargement ratio is fixed comprises the lens of multiple series connection and the shell for fixing the plurality of lens;
The laser imaging unit that described enlargement ratio is adjustable comprises shell, is installed on the lens of the multiple series connection in described shell and changes the driver element of spacing between lens.
7. a kind of light beam movement track control device for Laser Processing according to claim 6, is characterized in that: described driver element is manual actuation unit or electric drive unit.
8. a kind of light beam movement track control device for Laser Processing according to claim 7, is characterized in that: described Laser Focusing and focus handover module are vibration mirror scanning focusing unit or platform movement quiescent imaging focusing unit,
Described vibration mirror scanning focusing unit comprises scanning galvanometer and scanning f-theta mirror, described scanning f-theta mirror focuses on the emergent light exported from described beam motion track imaging amplification module, described scanning galvanometer switches for controlling the high speed of laser spot between different machining cell, or at a machining cell place, described scanning galvanometer carries out synkinesia control to laser spot scans motion; Described scanning f-theta mirror is the scanning focused mirror of common flat field or telecentric scanning focus lamp;
Described platform movement quiescent imaging focusing unit comprises quiescent imaging focus lamp and linear moving table, the emergent light that described quiescent imaging focus lamp is used for exporting from described beam motion track imaging amplification module carries out imaging and focusing, described linear moving table is for controlling the switching of laser spot between different machining cell, or at a machining cell place, described linear moving table carries out synkinesia control to laser spot scans motion.
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| JP6571638B2 (en) | 2013-06-10 | 2019-09-04 | レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ | Selective laser solidification apparatus and method |
| GB201310398D0 (en) | 2013-06-11 | 2013-07-24 | Renishaw Plc | Additive manufacturing apparatus and method |
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| CN103658975B (en) * | 2013-12-03 | 2017-02-15 | 张立国 | Laser beam splitting and processing device |
| CN104607638A (en) * | 2014-12-11 | 2015-05-13 | 广东汉唐量子光电科技有限公司 | Novel laser output device for 3D printing |
| GB201505458D0 (en) | 2015-03-30 | 2015-05-13 | Renishaw Plc | Additive manufacturing apparatus and methods |
| CN105215546B (en) * | 2015-10-28 | 2017-05-24 | 武汉铱科赛科技有限公司 | Laser scan filling system and scan filling method thereof |
| CN105458492B (en) * | 2015-12-22 | 2017-02-22 | 武汉铱科赛科技有限公司 | Precision laser processing device based on swing angle compression |
| ITUA20161635A1 (en) * | 2016-03-14 | 2017-09-14 | Comau Spa | "Laser source, particularly for industrial processes" |
| CN108247200A (en) * | 2018-02-01 | 2018-07-06 | 西安中科微精光子制造科技有限公司 | For the optical beam scanning system and beam scanning method of laser micropore processing |
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| CN113714221B (en) * | 2021-09-17 | 2022-06-03 | 深圳技术大学 | Be used for abluent device of many sizes internal diameter pipeline inner wall |
| CN114178687A (en) * | 2021-11-19 | 2022-03-15 | 华中科技大学 | Plug-in laser inclination angle control module and laser scanning processing device |
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