CN106052886A - Laser pulse shape measurer based on third-order correlation method - Google Patents

Laser pulse shape measurer based on third-order correlation method Download PDF

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CN106052886A
CN106052886A CN201610549016.7A CN201610549016A CN106052886A CN 106052886 A CN106052886 A CN 106052886A CN 201610549016 A CN201610549016 A CN 201610549016A CN 106052886 A CN106052886 A CN 106052886A
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frequency
light
mirror
reflected
crystal
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CN106052886B (en
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夏彦文
孙志红
彭志涛
傅学军
卢宗贵
张波
粟敬钦
朱启华
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Laser Fusion Research Center China Academy of Engineering Physics
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J11/00Measuring the characteristics of individual optical pulses or of optical pulse trains

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The invention discloses a laser pulse shape measurer based on a third-order correlation method. Measured parallel laser beams are converted into transmission light and reflection light through a light splitter, the transmission light is converted into transmission light and reflection light through a semitransparent mirror, the transmission light and the reflection light are converted into frequency doubled light through a frequency doubling crystal, the time strength information is converted into the strength autocorrelation one-dimensional space information, the frequency doubled light beam and a reflection light beam after passing through the light splitter are converted through the frequency doubling crystal to realize frequency-tripled conversion, and the time strength information is converted into the strength third-order correlation two-dimensional space information. According to the measurer, through the simple reconstruction technology, not only can the pulse width information be acquired, but also the pulse waveform information can be accurately acquired, and picosecond and femtosecond pulse waveforms can be processed. The measurer has advantages of low cost, simple structure and convenient adjustment.

Description

Laser pulse waveform measuring device based on third-order correlation method
Technical field
The invention belongs to ultrashort laser pulse technical field of measurement and test, be specifically related to a kind of laser arteries and veins based on third-order correlation method Rush waveform meter.
Background technology
At present, the arteries and veins of ultrashort laser pulse is typically deduced by measurement second order, single three rank intensity correlation functions postponed Width, but, the three rank intensity correlation functions only record second order, singly postponing can not determine the shape of pulse, therefore second order, three rank Correlator is mainly used to measure the contrast of pulse.The practicality of entitled " apparatus for measuring high power ultra-short laser pulse contrast " New patent (patent No.: ZL 170717077677.0) discloses a kind of three rank G by singly postponing(3)(τ) intensity is correlated with letter Number obtains the measuring method of contrast ration, the reality of entitled " a kind of device for measuring contrast ratio of single-time ultrashort laser pulses " Disclose two delay devices formation two of a kind of employing with new patent (patent No.: ZL 1,710 2 0293160.8) singly to prolong Three slow rank autocorrelation signals, the method for test coherent signal main peak and pulse front edge obtains contrast information respectively.FROG and Although its mutation can measure the shape of pulse, but calculates complicated, and pulse width measure is limited in scope.
Summary of the invention
It is limited in scope to overcome existing measurement technology to measure in ultrashort laser pulse waveform measurement, recovers impulse wave Shape calculates complicated deficiency, and the present invention provides a kind of laser pulse waveform measuring device based on third-order correlation method.
The technical solution adopted for the present invention to solve the technical problems is:
The laser pulse waveform measuring device based on third-order correlation method of the present invention, is characterized in, in described device, at Gao Gong Spectroscope, semi-transparent semi-reflecting lens is set gradually in rate laser pulse incident direction.Laser pulse is divided into by described spectroscope Penetrating light and reflection light, transmission light is divided into transmission light and reflection light again through semi-transparent semi-reflecting lens.Reflection light at semi-transparent semi-reflecting lens Road is disposed with reflecting mirror I, frequency-doubling crystal, light barrier I, is disposed with delay and adjusts on the transmitted light path of semi-transparent semi-reflecting lens Joint device I, reflecting mirror II, frequency-doubling crystal, light barrier II;The reflection light of semi-transparent semi-reflecting lens is reflected mirror I and reflexes to frequency-doubling crystal, instead Penetrate light to be absorbed by light barrier I after frequency-doubling crystal transmission;The delayed actuator of transmission light I of described semi-transparent semi-reflecting lens carries out light Cheng Yan lags and projects reflecting mirror II, is reflected mirror II and reflexes to frequency-doubling crystal, and reflection light is in the light after frequency-doubling crystal transmission Sheet II absorbs;Project frequency-doubling crystal with the light beam from reflecting mirror II reflection from the light beam of reflecting mirror I reflection simultaneously, anti-two Irradiating light beam overlapping region realizes frequency-doubled conversion, and two frequency doubled lights of generation export along the direction with frequency-doubling crystal perpendicular;? Guide-lighting mirror group and frequency crystal, attenuator I, CCD I is set gradually on two frequency multiplication beam directions of frequency-doubling crystal output;Described two Frequency multiplication light beam projects and frequency crystal after guide-lighting mirror group reflection, and two frequency multiplication light beams are through projecting attenuator after frequency crystal transmission I carries out strength retrogression, enters CCD I;It is disposed with reflecting mirror III, delay modulator II, reflection at spectroscopical reflected light path Mirror IV, reflecting mirror V and frequency crystal, light barrier III;Described spectroscopical reflection light enters after being reflected mirror III reflection and postpones Actuator II carries out optical path delay, projects after the light beam of delay modulator II outgoing is reflected mirror IV, reflecting mirror V the most successively Arrive and frequency crystal, from the fundamental frequency light of reflecting mirror V reflection through being absorbed by light barrier III after crystal transmission frequently;Anti-from reflecting mirror V The fundamental frequency light penetrated projects and on frequency crystal, in described fundamental frequency light and two frequencys multiplication with two frequency doubled lights of guide-lighting mirror group outgoing simultaneously The overlapping region of light realizes frequency tripling conversion, the frequency tripling light of generation along with and the perpendicular direction output of frequency plane of crystal;? Setting gradually attenuator II, CCD II on frequency tripling beam direction, frequency tripling light beam carries out strength retrogression through attenuator II, enters CCDⅡ;Described CCD I, CCD II external computer respectively, the signal from CCD I, CCD II finally enters computer number According to process.
Described guide-lighting mirror group is made up of four pieces of guide-lighting mirrors.Two frequency multiplication beam Propagation directions are disposed with guide-lighting mirror I, guide-lighting mirror II, guide-lighting mirror III, guide-lighting mirror IV.Incoming Level beam is reflected by guide-lighting mirror I vertically upward, and guide-lighting mirror II will be vertical Beam level reflects, and horizontal reflected beam exit direction is vertical with incoming Level beam, and horizontal reflected beam is hung down by guide-lighting mirror III Directly being reflected down, the beam level reflection that guide-lighting mirror IV will reflect vertically downward, the horizontal reflected beam of final outgoing is with incident In the same plane, horizontal reflected beam is vertical with incoming Level beam for horizontal light beam.
Described frequency-doubling crystal and frequency crystal use 90oNon-colinear mates.Select not according to different laser wavelength of incidence Same crystalline material such as BBO, KDP etc., can be to use different noncollinear phase matching mode such as ooe, oee etc..
The invention has the beneficial effects as follows:
1. the measurement apparatus low cost of the present invention, simple in construction, easy to adjust, use frequency-doubling crystal with and frequently crystal combined, Three rank pulse strength time correlation signals are converted to the spatial-intensity Two dimensional Distribution beneficially detected, by simply reconstructing skill Art, is possible not only to obtain pulse width information, it is also possible to accurately obtain pulse shape information.
2. the present invention uses 90 degree of noncollinear phase matchings, and double delay devices can increase measure of time with independent regulation Scope.
Accompanying drawing explanation
Fig. 1 is the laser pulse waveform measuring device light path schematic diagram based on third-order correlation method of the present invention;
Fig. 2 is the guide-lighting mirror group light path schematic diagram in the present invention;
In figure, 1. spectroscope 2. semi-transparent semi-reflecting lens 3. reflecting mirror I 4. delay modulator I 5. reflecting mirror II 6. Guide-lighting mirror group 10. reflecting mirror III 11. delay modulator of frequency-doubling crystal 7. light barrier I 8. light barrier II 9. II 12. reflecting mirror IV 13. reflecting mirrors V 14. and frequency crystal 15. attenuator I 16. CCD I 17. decay Sheet II 18. CCD II 19. light barrier III 9-1. leaded light mirror I 9-2. leaded light mirror II 9-3. leaded light mirror III 9- 4. guide-lighting mirror IV.
Detailed description of the invention
The present invention is further described with embodiment below in conjunction with the accompanying drawings, but should not limit the protection model of the present invention with this Enclose.
Embodiment 1
Fig. 1 is the laser pulse waveform measuring device light path schematic diagram based on third-order correlation method of the present invention, and Fig. 2 is in the present invention Guide-lighting mirror group light path schematic diagram, for the A of the guide-lighting mirror group in Fig. 1 to side view.In Fig. 1, Fig. 2, the present invention based on three In the laser pulse waveform measuring device of rank method of correlation, high-power laser pulse incident direction sets gradually spectroscope 1, half Semi-reflective mirror 2 thoroughly;Laser pulse is divided into transmission light and reflection light by described spectroscope 1, and transmission light is another through semi-transparent semi-reflecting lens 2 Secondary be divided into transmission light and reflection light;Reflected light path at semi-transparent semi-reflecting lens 2 is disposed with reflecting mirror I 3, frequency-doubling crystal 6, is in the light Sheet I 7, is disposed with delay modulator I 4, reflecting mirror II 5, frequency-doubling crystal 6 on the transmitted light path of semi-transparent semi-reflecting lens 2, is in the light Sheet II 8;The reflection light of semi-transparent semi-reflecting lens 2 is reflected mirror I 3 and reflexes to frequency-doubling crystal 6, reflects light quilt after frequency-doubling crystal 6 transmission Light barrier I 7 absorbs;The delayed actuator of transmission light I 4 of described semi-transparent semi-reflecting lens 2 projects reflection after carrying out optical path delay Mirror II 5, is reflected mirror II 5 and reflexes to frequency-doubling crystal 6, and reflection light is absorbed by light barrier II 8 after frequency-doubling crystal 6 transmission;From instead The light beam penetrating mirror I 3 reflection projects frequency-doubling crystal 6 with the light beam from reflecting mirror II 5 reflection simultaneously, overlapping at two reflection light beams Region realizes frequency-doubled conversion, and two frequency doubled lights of generation export along the direction with frequency-doubling crystal 6 perpendicular;At frequency-doubling crystal 6 Guide-lighting mirror group 9 and frequency crystal 14, attenuator I 15, CCD I 16 is set gradually on two frequency multiplication beam directions of output;Described two Frequency multiplication light beam projects and frequency crystal 14 after guide-lighting mirror group reflection, two frequency multiplication light beams through and frequency crystal 14 transmission after project and decline Subtract sheet I 15 and carry out strength retrogression, enter CCD I 16;Reflected light path at spectroscope 1 is disposed with reflecting mirror III 10, postpones to adjust Joint device II 11, reflecting mirror IV 12, reflecting mirror V 13 and frequency crystal 14, light barrier III 19;The reflection light warp of described spectroscope 1 Enter delay modulator II 11 after reflecting mirror III 10 reflection and carry out optical path delay, depend on again from the light beam of delay modulator II 11 outgoing Secondary be reflected mirror IV 12, reflecting mirror V 13 after project and frequency crystal 14, brilliant from fundamental frequency light warp and the frequency of reflecting mirror V 13 reflection Absorbed by light barrier III 19 after body 14 transmission;Two frequency doubled lights from the fundamental frequency light of reflecting mirror V 13 reflection with guide-lighting mirror group 9 outgoing Project and on frequency crystal 14 simultaneously, realize frequency tripling conversion in the overlapping region of described fundamental frequency light Yu two frequency doubled lights, produce Frequency tripling light along with and frequency crystal 14 perpendicular direction output;Frequency tripling beam direction sets gradually attenuator II 17, CCD II 18, frequency tripling light beam carries out strength retrogression through attenuator II 17, enters CCD II 18;Described CCD I 16, CCD The II 18 external computers of difference, the signal from CCD I 16, CCD II 18 finally enters computer and carries out data process.
Described guide-lighting mirror group 9 is made up of four pieces of guide-lighting mirrors;Two frequency multiplication beam Propagation directions are disposed with leaded light Mirror I 9-1, guide-lighting mirror II 9-2, guide-lighting mirror III 9-3, guide-lighting mirror IV 9-4;Guide-lighting mirror I 9-1 is the most anti-by incoming Level beam Penetrating, guide-lighting mirror II 9-2 is by normal beam horizontal reflection, and horizontal reflected beam exit direction is vertical with incoming Level beam, guide-lighting Horizontal reflected beam is reflected by mirror III 9-3 vertically downward, the beam level reflection that guide-lighting mirror IV 9-4 will reflect vertically downward, With incoming Level beam in the same plane, horizontal reflected beam hangs down the horizontal reflected beam of whole outgoing with incoming Level beam Directly, as shown in Figure 2.
Described frequency-doubling crystal 6 and frequency crystal 14 use 90oNon-colinear mates.According to different laser wavelength of incidence choosings With different crystalline materials such as BBO, KDP etc., can be to use different noncollinear phase matching mode such as ooe, oee etc..
Laser pulse time signal I (t) is converted to space second order in the horizontal direction and is correlated with by described frequency-doubling crystal 6 Signal G(2)(x1)。
The coherent signal G in the horizontal direction that frequency-doubling crystal 6 is produced by described guide-lighting mirror group 9(2)(x1) be converted to edge The coherent signal G of vertical direction(2)Y (), is converted to horizontal polarization by coherent signal by vertical polarization simultaneously.
Fundamental frequency pulsed light and two frequency doubled lights are carried out and frequency by described and frequency crystal 14, are converted to third-order correlation signal G(3) (x,y)。
Described delay modulator I 4, delay modulator II 11 are possible not only to determine zero point G of three rank intensity coherent signals(3)(x=0, y=0), it is also possible to extension G(3)(x, field range y).
The ultimate principle that the laser pulse shape based on third-order correlation method of the present invention is measured is: utilize second-order qs-correlation function G(2)(τ) triple correlation function G is postponed with double(3)( τ1, τ2) can accurately determine the spectral distribution of light pulse, then pass through Fu Vertical leaf transformation obtains impulse waveform;And the non-colinear frequency by frequency-doubling crystal and with frequency crystal is changed, can be by time phase Close function G(2)(τ)、G(3)( τ1, τ2) be converted to time-space coordinate one to one, can be with spatial-intensity measured directly Distribution G(2)(x1)、G(3)(x y), then recovers measured pulse waveform by simple time-space coordinate transform.
The ultimate principle recovering impulse waveform from correlation function is:
By second-order qs-correlation function G(2)(τ) amplitude of the spectral intensity of light pulse can be obtained | I (ν) |:
(1)
In formula, ν represents frequency, i representation unit complexor, τ express time.
Triple correlation function G is postponed by dual-time(3)( τ1, τ2) phase of the spectral intensity of light pulse can be obtained (ν):
;(2)
(3)
So, by second-order qs-correlation function G(2)(τ) triple correlation function G is postponed with double(3)( τ1, τ2) may determine that light pulse Spectral distribution I (ν)=| I (ν) | exp(i φ (ν)), more just can recover impulse waveform by Fourier transform:
(4)
The measurement apparatus utilizing the present invention is measured ultrashort laser pulse waveform and is comprised the following steps:
1. frequency doubled light aplanatism calibration: by pulse width less than 1 psec, beam modulation near field degree less than 1.2, near field contrast is less than The horizontal polarization laser pulse of 0.06 is input to this device, regulates delay modulator I 4, and two frequency doubled lights making generation are the strongest, and The strongest region is positioned at the target surface center of CCD I 16, and described horizontal coordinate position is designated as zero x1On=0, CCD I 16 The grey scale change image obtained in the horizontal direction is second order coherent signal G(2)(x1)。
2. frequency tripling light aplanatism calibration: regulation delay modulator II 11, the frequency tripling light making generation is the strongest and the strongest Bright spot is positioned at the target surface center of CCD II 18, and described coordinate position is designated as zero (x=0, y=0), on CCD II 18 The grey scale change image obtained is third-order correlation signal G(3)( x, y)。
3. space-time transformation coefficient calibration: regulation delay modulator I 4, increases the light path 0.3mm of this light path, is i.e. equivalent to Time delay 1 psec, records direction and the amount of movement Δ x of facular point deviation from origin on CCD I 16, CCD II 181, Δ y; Regulation delay modulator II 11, increases the light path 0.3mm of this light path, is i.e. equivalent to time delay 1 psec, records CCD II The direction of facular point deviation from origin and amount of movement Δ x on 18, it is thus achieved that the proportionality coefficient of correlation function time delay and coordinate: k1 =Δ x1、k2=Δ y, k3=Δ x(unit: mm/ps), i.e. G(2)(τ=x1/k1), G(3)( τ1=x/k3, τ2=y/k2)。
4. calculate amplitude | the I (ν) | of spectral intensity: utilize below equation to obtain spectral intensity amplitude | the I (ν) | of light pulse
(5)
Here, Δ x is the pixel dimension of CCD I 16, xiFor horizontal direction i-th pixel from the distance of initial point, 2Ni is hot spot institute Account for the pixel number of horizontal direction.
5. calculate the phase (ν) of spectral intensity: utilize formula (2), (3) to obtain the spectral intensity phase (ν) of light pulse, Integration need to change into during calculating summation, and range of summation is region shared by hot spot on CCD II 18.
6. utilize formula (4) to obtain laser pulse shape.
In the present embodiment, incident laser pulse wavelength is 1053nm, and pulse width is about 1ps, and energy is about 10mJ, light beam Bore is 1cm, horizontal polarization, frequency-doubling crystal 6 with and frequency crystal 14 all uses KDP material, all employing non-colinear ooe position phase Join.From two basic frequency beams of semi-transparent semi-reflecting lens 2 transmission and reflection with about 30oIncident angle symmetry incide frequency-doubling crystal On 6, two frequency doubled lights of generation export along frequency-doubling crystal 6 normal to a surface direction, by after guide-lighting mirror group 9 by two frequency multiplication light beams Partially turning 90 degrees, at this moment two frequency doubled lights of CCD I 16 record are second order coherent signal G(2)(τ=y/k1), related direction is perpendicular Nogata to, the deflected state of two frequency doubled lights is converted to horizontal polarization, space-time transformation coefficient k by vertical polarization simultaneously1≈0.58mm/ ps;It is made simultaneously incident to and frequency crystal with the basic frequency beam come from spectroscope 1 reflection from guide-lighting mirror group 9 two frequency doubled lights out On 14, the angle of incidence of basic frequency beam is about 170, the angle of incidence of two frequency doubled lights is about 100, frequency tripling is produced in light beam overlapping region Light, the frequency tripling light edge of generation and the output of frequency crystal 14 normal to a surface direction, at this moment the frequency tripling light of CCD II 18 record is i.e. For third-order correlation signal G(3)( τ1=x/k3, τ2=y/k2), space-time transformation coefficient k2≈ 0.58mm/ps, k3≈0.49mm/ps; Data process is carried out, it is thus achieved that laser pulse shape is distributed finally by computer.

Claims (3)

1. a laser pulse waveform measuring device based on third-order correlation method, is characterized in that: in described device, at high power Spectroscope (1), semi-transparent semi-reflecting lens (2) is set gradually in laser pulse incident direction;Laser pulse is by described spectroscope (1) Being divided into transmission light and reflection light, transmission light is divided into transmission light and reflection light again through semi-transparent semi-reflecting lens (2);At semi-transparent semi-reflecting lens (2) reflected light path is disposed with reflecting mirror I (3), frequency-doubling crystal (6), light barrier I (7), saturating at semi-transparent semi-reflecting lens (2) Penetrate and in light path, be disposed with delay modulator I (4), reflecting mirror II (5), frequency-doubling crystal (6), light barrier II (8);Semi-transparent semi-reflecting The reflection light of mirror (2) is reflected mirror I (3) and reflexes to frequency-doubling crystal (6), reflects light after frequency-doubling crystal (6) transmission by light barrier I (7) absorb;The delayed actuator of transmission light I (4) of described semi-transparent semi-reflecting lens (2) projects reflecting mirror after carrying out optical path delay II (5), it is reflected mirror II (5) and reflexes to frequency-doubling crystal (6), reflect light after frequency-doubling crystal (6) transmission by light barrier II (8) Absorb;The light beam reflected from reflecting mirror I (3) projects frequency-doubling crystal (6) with the light beam reflected from reflecting mirror II (5) simultaneously, Realizing frequency-doubled conversion in two reflection light beam overlapping regions, two frequency doubled lights of generation are along the side with frequency-doubling crystal (6) perpendicular To output;The two frequency multiplication beam directions that frequency-doubling crystal (6) exports set gradually guide-lighting mirror group (9) and frequency crystal (14), declines Subtract sheet I (15), CCD I (16);Two described frequency multiplication light beams project and frequency crystal (14), two frequencys multiplication after guide-lighting mirror group reflection Light beam through and frequency crystal (14) transmission after project attenuator I (15) and carry out strength retrogression, enter CCD I (16);At spectroscope (1) reflected light path is disposed with reflecting mirror III (10), delay modulator II (11), reflecting mirror IV (12), reflecting mirror V (13) and frequency crystal (14), light barrier III (19);The reflection light of described spectroscope (1) is reflected mirror III (10) and reflects laggard Enter delay modulator II (11) and carry out optical path delay, be reflected mirror IV the most successively from the light beam of delay modulator II (11) outgoing (12), project after reflecting mirror V (13) and frequency crystal (14), the fundamental frequency light warp reflected from reflecting mirror V (13) and frequency crystal (14) absorbed by light barrier III (19) after transmission;The fundamental frequency light reflected from reflecting mirror V (13) and the two of guide-lighting mirror group (9) outgoing Frequency doubled light projects simultaneously and on frequency crystal (14), realizes frequency tripling in the overlapping region of described fundamental frequency light with two frequency doubled lights and turn Change, the frequency tripling light of generation along with and the direction output of frequency crystal (14) perpendicular;On frequency tripling beam direction successively Arranging attenuator II (17), CCD II (18), frequency tripling light beam carries out strength retrogression through attenuator II (17), enters CCD II (18);Described CCD I (16), CCD II (18) external computer respectively, last from the signal of CCD I (16), CCD II (18) Enter computer and carry out data process.
Laser pulse waveform measuring device based on third-order correlation method the most according to claim 1, is characterized in that: described Guide-lighting mirror group (9) is made up of four pieces of guide-lighting mirrors;Two frequency multiplication beam Propagation directions are disposed with guide-lighting mirror I (9-1), leaded light Mirror II (9-2), guide-lighting mirror III (9-3), guide-lighting mirror IV (9-4);Incoming Level beam is reflected by guide-lighting mirror I (9-1) vertically upward, Guide-lighting mirror II (9-2) is by normal beam horizontal reflection, and horizontal reflected beam exit direction is vertical with incoming Level beam, guide-lighting mirror Horizontal reflected beam is reflected by III (9-3) vertically downward, the beam level reflection that guide-lighting mirror IV (9-4) will be reflected vertically downward, With incoming Level beam in the same plane, horizontal reflected beam hangs down the horizontal reflected beam of final outgoing with incoming Level beam Directly.
Laser pulse waveform measuring device based on third-order correlation method the most according to claim 1, is characterized in that: described Frequency-doubling crystal (6) and frequency crystal (14) use 90oNon-colinear mates.
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CN109060151A (en) * 2018-09-05 2018-12-21 中国工程物理研究院激光聚变研究中心 A kind of subnanosecond laser pulse contrast measuring device
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CN107677379B (en) * 2017-09-30 2023-06-09 中国工程物理研究院激光聚变研究中心 Femtosecond laser pulse waveform measuring device
CN107782456A (en) * 2017-09-30 2018-03-09 中国工程物理研究院激光聚变研究中心 A kind of ultrashort laser pulse measurement apparatus
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CN108775966A (en) * 2018-09-05 2018-11-09 中国工程物理研究院激光聚变研究中心 A kind of double delay third-order relevant instruments
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CN109060151A (en) * 2018-09-05 2018-12-21 中国工程物理研究院激光聚变研究中心 A kind of subnanosecond laser pulse contrast measuring device
CN113155280B (en) * 2021-04-16 2022-07-26 北京大学 Three-order correlator high-fidelity device and control method thereof
CN113155280A (en) * 2021-04-16 2021-07-23 北京大学 Three-order correlator high-fidelity device and control method thereof
CN114888458A (en) * 2021-08-17 2022-08-12 武汉华工激光工程有限责任公司 Parallel rotary cutting machining device and method
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