CN102642092A - Laser beam based micropore machining device and method - Google Patents
Laser beam based micropore machining device and method Download PDFInfo
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- CN102642092A CN102642092A CN2012101073316A CN201210107331A CN102642092A CN 102642092 A CN102642092 A CN 102642092A CN 2012101073316 A CN2012101073316 A CN 2012101073316A CN 201210107331 A CN201210107331 A CN 201210107331A CN 102642092 A CN102642092 A CN 102642092A
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Abstract
The invention relates to a laser beam based micropore machining device and method. The device comprises a radially polarized beam generation unit for converting a laser beam into a radially polarized beam, and emitting the radially polarized beam to a diffractive optical element, the diffractive optical element for modulating the amplitude and phase of the radially polarized beam, and emitting the modulated radially polarized beam to a focusing lens, and the focusing lens for focusing the modulated radially polarized beam, and obtaining a focusing field of the radially polarized beam in the vicinity of a focus of the focusing lens, wherein the intensity distribution of the focusing filed is determined by the structure of the diffractive optical element and the numerical aperture of the focusing lens, and the micropore machining of a material to be machined is carried out by controlling the intensity distribution of the focusing field. The laser beam based micropore machining device provided by the embodiment of the invention can be used for machining the micropores with large depth to diameter ratio and improving the cutting speed and efficiency of the micropores.
Description
Technical field
The present invention relates to laser technology field, particularly a kind of micropore processing device and method based on laser beam.
Background technology
On some precise light Mechatronic Systems, need the processing micropore that the aperture is little and aspect ratio is big, micropore size is in the submillimeter magnitude, and aspect ratio is greater than 10.Capillary processing method of the prior art (like methods such as machine drilling, electric spark-erosion perforation, electrochemistry punchings) all can't be processed this type micropore by high-quality, therefore presses for very much the capillary processing technology of a kind of small-bore of exploitation and big aspect ratio.
Summary of the invention
The object of the present invention is to provide a kind of micropore processing device and method, realize the capillary processing of small-bore and big aspect ratio, improve the cutting speed and the efficient of micropore simultaneously based on laser beam.
The embodiment of the invention provides a kind of micropore processing device based on laser beam, comprising:
The radial polarized light beam generation unit is used for converting laser beam into radial polarized light beam, and said radial polarized light beam is emitted to diffraction optical element;
Said diffraction optical element, the amplitude and the phase place that are used to modulate said radial polarized light beam, and the said radial polarized light beam after will modulating is emitted to condenser lens;
Said condenser lens; Said radial polarized light beam after being used for modulating focuses on; Near the focus of said condenser lens, obtain the focousing field of said radial polarized light beam; The intensity distributions of said focousing field is confirmed by the structure of said diffraction optical element and the numerical aperture of said condenser lens, is treated material processed through the intensity distributions of controlling said focousing field and carry out capillary processing.
The embodiment of the invention also provides a kind of capillary processing method based on laser beam, comprising:
Convert laser beam into radial polarized light beam through the radial polarized light beam generation unit;
Modulate the amplitude and the phase place of said radial polarized light beam through said diffraction optical element;
Said radial polarized light beam after will modulating through said condenser lens focuses on; Near the focus of said condenser lens, obtain the focousing field of said radial polarized light beam, the intensity distributions of said focousing field is confirmed by the structure of said diffraction optical element and the numerical aperture of said condenser lens;
Intensity distributions through controlling said focousing field is processed micropore.
Micropore processing device and method based on laser beam provided by the invention; The numerical aperture of structure and condenser lens through the regulation and control diffraction optical element can be regulated and control the intensity distributions of light beam focousing field; The intensity distributions that therefore can suitable focousing field be set according to the degree of depth and the aperture of micropore; And owing to can obtain the extra small focal beam spot of long depth of focus from radial polarized light beam; And focus on light field and have post symmetry polarisation distribution, therefore can control the depth of cut of micropore and the ratio of width neatly, improved the cutting speed and the efficient of micropore simultaneously through the control focal beam spot.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art; To do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below; Obviously, the accompanying drawing in describing below only is some embodiments of the present invention, for those of ordinary skills; Under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the polarisation distribution sketch map of the employed radial polarized light beam of the embodiment of the invention on cross section;
Fig. 2 is the structural representation that the present invention is based on an embodiment of micropore processing device of laser beam;
Fig. 3 is the structural representation that the present invention is based on another embodiment of micropore processing device of laser beam;
Fig. 4 is the structural representation that the present invention is based on another embodiment of micropore processing device of laser beam;
Fig. 5 is the structural representation according to the diffraction optical element in embodiment illustrated in fig. 4;
Fig. 6 is the sketch map that distributes according to the distribution of light intensity after the focusing shaping of a transmittance function embodiment illustrated in fig. 4;
Fig. 7 is the sketch map that distributes according to the distribution of light intensity after the focusing shaping of another transmittance function embodiment illustrated in fig. 4;
Fig. 8 is the sketch map that distributes according to the distribution of light intensity after the focusing shaping of another transmittance function embodiment illustrated in fig. 4;
Fig. 9 is the schematic flow sheet that the present invention is based on an embodiment of capillary processing method of laser beam.
The specific embodiment
To combine the accompanying drawing in the embodiment of the invention below, the technical scheme in the embodiment of the invention is carried out clear, intactly description, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the present invention's protection.
Fig. 1 is the polarisation distribution sketch map of the employed radial polarized light beam of the embodiment of the invention on cross section; As shown in Figure 1, on beam cross-section, the polarization state of (except the central point) more arbitrarily of radial polarized light beam all is a linear polarization, and the electric field intensity of radial polarized light beam is along radial direction; Radial polarized light beam is to use the most a kind of vector beam at present; There are a lot of methods to generate radial polarized light beam in the prior art; For example: in laser cavity, add specific optical element modulating oscillation pattern outputting radial polarized light beam; Utilize interferometer to pass through the pattern stack and generate, and outside laser cavity, convert uniform linearly polarized light in space or circularly polarized light into radial polarisation light through some polarization converter device.Radial polarized light beam can obtain the extra small focal beam spot of a circle symmetry under the situation that high-NA focuses on, except cross stream component, also produced a stronger axial light field component; Further, the polarisation distribution of focousing field still is symmetrically distributed about the propagation jack-post of light beam.Through the intensity distributions of regulation and control focousing field, can obtain the optical field distribution of multiple uniqueness.
Fig. 2 is the structural representation that the present invention is based on an embodiment of micropore processing device of laser beam, and as shown in Figure 2, the embodiment of the invention comprises: radial polarized light beam generation unit 21, diffraction optical element 22, condenser lens 23, material 20 to be processed.
Particularly, radial polarized light beam generation unit 21 converts laser beam into radial polarized light beam, and radial polarized light beam is emitted to diffraction optical element 22; The amplitude and the phase place of diffraction optical element (Diffractivc Optical Element abbreviates DOE as) 22 these radial polarized light beams of modulation, and the radial polarized light beam after will modulating is emitted to condenser lens 23; Radial polarized light beam after condenser lens 23 will be modulated focuses on; Near the focus of condenser lens 23, obtain the focousing field of radial polarized light beam; The intensity distributions of focousing field is confirmed by the structure of diffraction optical element 22 and the numerical aperture of condenser lens 23, is treated material processed 20 through the intensity distributions of control focousing field and carry out capillary processing.
The micropore processing device that the embodiment of the invention provides based on laser beam; The numerical aperture of structure and condenser lens 23 through regulation and control diffraction optical element 22 can be regulated and control the intensity distributions of light beam focousing field; The intensity distributions that therefore can suitable focousing field be set according to the degree of depth and the aperture of micropore; And owing to can obtain the extra small focal beam spot of long depth of focus from radial polarized light beam; And focus on light field and have post symmetry polarisation distribution, therefore can control the depth of cut of micropore and the ratio of width neatly, improved the cutting speed and the efficient of material to be processed 20 simultaneously through the control focal beam spot.
Fig. 3 is the structural representation that the present invention is based on another embodiment of micropore processing device of laser beam; As shown in Figure 3, the radial polarized light beam generation unit 31 in the embodiment of the invention specifically comprises: the laser instrument 311, space filtering system 312, collimation lens 313, the transmissibility of adjustable attenuation piece 315 that are provided with the optical element of setting in the chamber; Between radial polarized light beam generation unit 31 and diffraction optical element 32, also be provided with beam-expanding system 34.
Particularly, the laser instrument 311 that is provided with the optical element of setting in the chamber utilizes the interior oscillation mode of optical element buncher to make laser instrument 311 outputting radial polarised lights, and laser instrument 311 is emitted to space filtering system 312 with this radial polarized light beam; 312 pairs of these radial polarized light beams of space filtering system carry out filtering, and filtered radial polarized light beam is emitted to collimation lens 313; 313 pairs of filtered radial polarized light beams of collimation lens collimate; Form the radial polarized light beam of collimation; And the radial polarized light beam of this collimation is emitted to transmissibility of adjustable attenuation piece 315, and transmissibility of adjustable attenuation piece 315 can be regulated the intensity of this radial polarized light beam, and transmissibility of adjustable attenuation piece 315 is emitted to beam-expanding system 34 with this radial polarized light beam afterwards; This beam-expanding system 34 is adjusted the spot size of radial polarized light beams, and adjusted radial polarized light beam is emitted to diffraction optical element 32.
The amplitude and the phase place of diffraction optical element 32 these radial polarized light beams of modulation, and the radial polarized light beam after will modulating is emitted to condenser lens 33; Radial polarized light beam after condenser lens 33 will be modulated focuses on; Near the focus of condenser lens 33, obtain the focousing field of radial polarized light beam; The intensity distributions of focousing field is confirmed by the structure of diffraction optical element 32 and the numerical aperture of condenser lens 33, is treated material processed 30 through the intensity distributions of control focousing field and carry out capillary processing.
The micropore processing device that the embodiment of the invention provides based on laser beam; The numerical aperture of structure and condenser lens 33 through regulation and control diffraction optical element 32 can be regulated and control the intensity distributions of light beam focousing field; The intensity distributions that therefore can suitable focousing field be set according to the degree of depth and the aperture of micropore; And owing to can obtain the extra small focal beam spot of long depth of focus from radial polarized light beam; And focus on light field and have post symmetry polarisation distribution, therefore can control the depth of cut of micropore and the ratio of width neatly, improved the cutting speed and the efficient of material to be processed 30 simultaneously through the control focal beam spot.
Further, above-mentioned embodiment illustrated in fig. 3 in, the optical element of setting specifically can be birefringece crystal or prism of corner cube; Through specific optical element is set in laser instrument 311, laser beam is vibrated with specific polarization mode in the laser cavity of laser instrument 311, thereby the light beam that makes laser support 311 outputs is a radial polarized light beam.
Further, above-mentioned embodiment illustrated in fig. 3 in, space filtering system 312 specifically can comprise microcobjective and pin hole.
Fig. 4 is the structural representation that the present invention is based on another embodiment of micropore processing device of laser beam; As shown in Figure 4, the radial polarized light beam generation unit 41 in the embodiment of the invention specifically comprises: laser instrument 411, space filtering system 412, collimation lens 413, polarization converter 414, transmissibility of adjustable attenuation piece 415; Between radial polarized light beam generation unit 41 and diffraction optical element 42, also be provided with beam-expanding system 44.
Particularly, laser instrument 411 generates laser beam, and this laser beam is emitted to space filtering system 412; 412 pairs of these laser beams of space filtering system carry out filtering, and filtered laser beam is emitted to collimation lens 413; 413 pairs of filtered laser beams of collimation lens collimate, and form the uniform collimated light beam of intensity, and this collimated light beam is emitted to polarization converter 414; Polarization converter 414 is in converting this collimated light beam into radial polarized light beam; And this radial polarized light beam is emitted to beam-expanding system 44; This beam-expanding system 44 can be adjusted the spot size of radial polarized light beam; And adjusted radial polarized light beam is emitted to transmissibility of adjustable attenuation piece 415, and transmissibility of adjustable attenuation piece 415 can be regulated the intensity of this radial polarized light beam, and transmissibility of adjustable attenuation piece 415 is emitted to diffraction optical element 42 with this radial polarized light beam afterwards.
The amplitude and the phase place of diffraction optical element 42 these radial polarized light beams of modulation, and the radial polarized light beam after will modulating is emitted to condenser lens 43; Radial polarized light beam after condenser lens 43 will be modulated focuses on; Near the focus of condenser lens 43, obtain the focousing field of radial polarized light beam; The intensity distributions of focousing field is confirmed by the structure of diffraction optical element 42 and the numerical aperture of condenser lens 43, is treated material processed 40 through the intensity distributions of control focusing, field and carry out capillary processing.
The micropore processing device that the embodiment of the invention provides based on laser beam; The numerical aperture of structure and condenser lens 43 through regulation and control diffraction optical element 42 can be regulated and control the intensity distributions of light beam focousing field; The intensity distributions that therefore can suitable focousing field be set according to the degree of depth and the aperture of micropore; And owing to can obtain the extra small focal beam spot of long depth of focus from radial polarized light beam; And focus on light field and have post symmetry polarisation distribution, therefore can control the depth of cut of micropore and the ratio of width neatly, improved the cutting speed and the efficient of material to be processed 40 simultaneously through the control focal beam spot.
For clearer explanation technical scheme embodiment illustrated in fig. 4, below in conjunction with Fig. 5～Fig. 8 to the exemplary illustration that carries out embodiment illustrated in fig. 4; Fig. 5 is the structural representation according to the diffraction optical element in embodiment illustrated in fig. 4; Fig. 6 is the sketch map that distributes according to the distribution of light intensity after the focusing shaping of a transmittance function embodiment illustrated in fig. 4; Fig. 7 is the sketch map that distributes according to the distribution of light intensity after the focusing shaping of another transmittance function embodiment illustrated in fig. 4, and Fig. 8 is the sketch map that distributes according to the distribution of light intensity after the focusing shaping of another transmittance function embodiment illustrated in fig. 4.
Fig. 5 is the structural representation according to the diffraction optical element in embodiment illustrated in fig. 4; As shown in Figure 5, the DOE in the embodiment of the invention has rotational symmetric many zonary structures, and the radius of endless belt is respectively r
1, r
2, r
3..., r
N-1And r
N, the light beam convergent angle that these endless belt outer edges are corresponding in focusing system is respectively θ
1, θ
2, θ
3..., θ
N-1And θ
NIf the complex amplitude transmitance of DOE is shown in equality (1):
Wherein, a
jWith
The amplitude and the phase value of corresponding j the endless belt amplitude transmittance of difference, j ∈ [1, N], a
j∈ [1,1],
For the described device of the embodiment of the invention, the maximum radius r of DOE
NNumerical aperture NA by condenser lens confirms.At this moment, as endless belt quantity N → ∞, DOE is then infinitely near continuous structure.
Further; Through adopting the DOE of more circular ring structures; And condenser lens adopts suitable numerical aperture, then can obtain longer depth of focus and littler focal beam spot size, thereby make this kind focusing light field can process the micropore of bigger aspect ratio at material to be processed 40.
In addition, when carrying out capillary processing, can also adopt the DOE of different structure to the condenser lens of specific numerical aperture, thereby obtain the hot spot of different aspect ratios, further process the micropore of different aspect ratios.
Like Fig. 6～shown in Figure 8, shown that three kinds of focousing field intensity during to different DOE design distribute, the lens numerical aperture is 0.85; The DOE transmittance function that Fig. 6～Fig. 8 is corresponding is respectively shown in formula (2)～formula (4):
Wherein, the largest beam convergent angle of the corresponding condenser lens of α is 58.2 °.
Can see by above result; Using the DOE of simple circle ring structure is the intensity distributions of adjustable focousing field; Obtain the focusing light field of long depth of focus; Depth of focus length reaches 10 times of wavelength, and focal spot size is very little, is circular less than a wavelength
and focal beam spot usually; And focus on light field and have post symmetry polarisation distribution, therefore utilize such focusing light field can realize the high-quality processing of high aspect ratio micropore.
Fig. 9 is the schematic flow sheet that the present invention is based on an embodiment of capillary processing method of laser beam; The method flow of the embodiment of the invention can pass through above-mentioned Fig. 2～device embodiment illustrated in fig. 4 and realize that as shown in Figure 9, the embodiment of the invention comprises the steps:
The capillary processing method that the embodiment of the invention provides based on laser beam; The numerical aperture of structure and condenser lens through the regulation and control diffraction optical element can be regulated and control the intensity distributions of light beam focousing field; The intensity distributions that therefore can suitable focousing field be set according to the degree of depth and the aperture of micropore; And owing to can obtain the extra small focal beam spot of long depth of focus from radial polarized light beam; And focus on light field and have post symmetry polarisation distribution, therefore can control the depth of cut of micropore and the ratio of width neatly, improved the cutting speed and the efficient of material to be processed simultaneously through the control focal beam spot.
Further, above-mentioned embodiment illustrated in fig. 9 in, between step 901 and step 902, can also comprise the steps:
Adjust the spot size of said radial polarized light beam through beam-expanding system.
The invention described above embodiment; Radial polarized light beam is under the situation that high-NA focuses on; Can obtain the extra small focal beam spot of circle symmetry, and utilize diffraction optical element to focus on shaping, can further reduce spot size and increase depth of focus; This extra small hot spot and long depth of focus focussed laser beam are expected to be used to treat the micropore of processing small-bore and big aspect ratio on the material processed, obtain having the profound and subtle hole of low surface roughness and high verticality.
One of ordinary skill in the art will appreciate that: all or part of step that realizes the foregoing description can be accomplished through the relevant hardware of programmed instruction; Aforesaid program can be stored in the computer read/write memory medium; This program the step that comprises said method embodiment when carrying out; And aforesaid storage medium comprises: various media that can be program code stored such as ROM, RAM, magnetic disc or CD.
What should explain at last is: above embodiment is only in order to explaining technical scheme of the present invention, but not to its restriction; Although with reference to previous embodiment the present invention has been carried out detailed explanation, those of ordinary skill in the art is to be understood that: it still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, and perhaps part technical characterictic wherein is equal to replacement; And these are revised or replacement, do not make the spirit and the scope of the essence disengaging various embodiments of the present invention technical scheme of relevant art scheme.
Claims (8)
1. the micropore processing device based on laser beam is characterized in that, said device comprises:
The radial polarized light beam generation unit is used for converting laser beam into radial polarized light beam, and said radial polarized light beam is emitted to diffraction optical element;
Said diffraction optical element, the amplitude and the phase place that are used to modulate said radial polarized light beam, and the said radial polarized light beam after will modulating is emitted to condenser lens;
Said condenser lens; Said radial polarized light beam after being used for modulating focuses on; Near the focus of said condenser lens, obtain the focousing field of said radial polarized light beam; The intensity distributions of said focousing field is confirmed by the structure of said diffraction optical element and the numerical aperture of said condenser lens, is treated material processed through the intensity distributions of controlling said focousing field and carry out capillary processing.
2. device according to claim 1 is characterized in that, said radial polarized light beam generation unit comprises:
Laser instrument is used to generate laser beam, and said laser beam is emitted to the space filtering system;
Said space filtering system is used for said laser beam is carried out filtering, and filtered said laser beam is emitted to collimation lens;
Said collimation lens is used for filtered said laser beam is collimated, and forms the uniform collimated light beam of intensity, and said collimated light beam is emitted to polarization converter;
Said polarization converter is used for converting said collimated light beam into radial polarized light beam.
3. device according to claim 1 is characterized in that, said radial polarized light beam generation unit comprises:
Be provided with the laser instrument of the optical element of setting in the chamber, the oscillation mode of modulating in the said chamber through said optical element makes said laser instrument outputting radial polarized light beam;
Said space filtering system is used for said radial polarized light beam is carried out filtering, and filtered said radial polarized light beam is emitted to collimation lens;
Said collimation lens is used for filtered said radial polarized light beam is collimated, and forms the radial polarized light beam of collimation, and the radial polarized light beam of said collimation is emitted to transmissibility of adjustable attenuation piece;
Said transmissibility of adjustable attenuation piece, the intensity that is used to regulate said radial polarized light beam.
4. device according to claim 3 is characterized in that, the optical element of said setting is birefringece crystal or prism of corner cube.
5. according to the arbitrary described device of claim 1～4, it is characterized in that said diffraction optical element is rotational symmetric many zonary structures, the maximum radius of said diffraction optical element is confirmed by the numerical aperture of said condenser lens.
6. according to the arbitrary described device of claim 1～4, it is characterized in that also be provided with beam-expanding system between said radial polarized light beam generation unit and the said diffraction optical element, said beam-expanding system is used to adjust the spot size of said radial polarized light beam.
7. capillary processing method based on laser beam is characterized in that said method comprises:
Convert laser beam into radial polarized light beam through the radial polarized light beam generation unit;
Modulate the amplitude and the phase place of said radial polarized light beam through said diffraction optical element;
Said radial polarized light beam after will modulating through said condenser lens focuses on; Near the focus of said condenser lens, obtain the focousing field of said radial polarized light beam, the intensity distributions of said focousing field is confirmed by the structure of said diffraction optical element and the numerical aperture of said condenser lens;
Treat material processed through the intensity distributions of controlling said focousing field and carry out capillary processing.
8. method according to claim 7; It is characterized in that; The said step and said that converts laser beam into radial polarized light beam through the radial polarized light beam generation unit is modulated through said diffraction optical element between the step of amplitude and phase place of said radial polarized light beam, also comprises:
Adjust the spot size of said radial polarized light beam through beam-expanding system.
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