CN108983428A - A kind of method and device reducing laser focused spot size - Google Patents
A kind of method and device reducing laser focused spot size Download PDFInfo
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- CN108983428A CN108983428A CN201810940490.1A CN201810940490A CN108983428A CN 108983428 A CN108983428 A CN 108983428A CN 201810940490 A CN201810940490 A CN 201810940490A CN 108983428 A CN108983428 A CN 108983428A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/16—Beam splitting or combining systems used as aids for focusing
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0944—Diffractive optical elements, e.g. gratings, holograms
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/48—Laser speckle optics
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Abstract
The invention discloses a kind of method and devices for reducing laser focused spot size, method includes: to carry out light splitting operation to incoming laser beam, so that incoming laser beam occur spatial dispersion and formed have concentric structure dispersed light beam, and in dispersed light beam different wave length light distribution on the annulus of different radii；Dispersed light beam is converted to parallel annular beam；Annular beam is converted into radial polarized light beam；Radial polarized light beam is focused, the focal beam spot for laser processing is obtained；Device includes: spectrophotometric unit, the first lens, radial polarisation unit and the second lens.The present invention can effectively reduce the size of laser focal beam spot from horizontal and vertical two dimensions simultaneously, to effectively improve the precision of laser processing.
Description
Technical field
The invention belongs to Materialbearbeitung mit Laserlicht fields, more particularly, to a kind of side for reducing laser focused spot size
Method and device.
Background technique
In recent years, Three-dimension process is carried out in transparent material using femtosecond laser have developed into Materialbearbeitung mit Laserlicht technology
An important branch in field.This method is not only capable of processing various optical devices, such as optical waveguide, polarization optical element
Deng, it may also be used for manufacture microfluidic system and optofluidic system etc..The interaction of laser and transparent material and material are to photon
Non-linear absorption properties it is related, laser is related with focal point light distribution to the zone of action of material, laser focal beam spot
Size is smaller, and machining accuracy is then higher.Therefore, in order to improve machining accuracy, need to reduce the size of focal beam spot.
The size of laser focal beam spot includes horizontal and vertical two dimensions.Space-time focusing (SSTF) method can reduce sharp
The longitudinal length of light focal beam spot, therefore be usually used in improving the longitudinal resolution of laser processing.Radial polarized light beam is only due to it
Special focus characteristics, also receive more and more attention in Materialbearbeitung mit Laserlicht field.When the object lens with high-NA (NA)
When being focused to radial polarisation light, a very strong vertically polarized light field component can be obtained near focal point, this method can be with
Reduce the lateral dimension of focal beam spot, still, the hot spot longitudinal length focused with radial polarized light beam is longer, and is not suitable for
In the processing of bulk material.Above two method can reduce the size of laser focal beam spot to a certain extent, but effect is all
It is extremely limited, it is not well positioned to meet the required precision of laser processing.
Summary of the invention
In view of the drawbacks of the prior art and Improvement requirement, the present invention provides a kind of sides for reducing laser focused spot size
Method and device, it is intended that the size of laser focal beam spot is effectively reduced from horizontal and vertical two dimensions simultaneously, to have
Effect improves the precision of laser processing.
To achieve the above object, according to the invention a kind of to reduce laser focused spot size in a first aspect, providing
Method includes the following steps:
(1) light splitting operation is carried out to incoming laser beam, so that spatial dispersion occurs for incoming laser beam and is formed to have with one heart
Circle structure dispersed light beam, and in dispersed light beam different wave length light distribution on the annulus of different radii；
(2) dispersed light beam is converted to parallel annular beam；
(3) annular beam is converted into radial polarized light beam；
(4) radial polarized light beam is focused, obtains the focal beam spot for laser processing.
The method provided by the present invention for reducing laser focused spot size, can be simultaneously from horizontal and vertical two dimensions
Effectively reduce the size of focal beam spot: by carrying out light splitting operation to incoming laser beam, so that light beam is before entering object lens, it is different
Spectral components separated in space, i.e. space chirp；Since different spectral components only just generate weight near focal point
Folded, i.e. generation time domain focuses, so in the available shortest pulse length of focal point and maximum peak light intensity；Therefore, should
Method can effectively reduce the longitudinal length of focal beam spot；After light beam is converted to radial polarized light beam, when being focused to it,
A very strong longitudinal electric field component can be obtained near focal point, while the lateral dimension of focal beam spot reduces, therefore, the party
Method can effectively reduce the lateral length of focal beam spot.
Second aspect according to the invention provides a kind of device for reducing laser focused spot size, along incident laser
The optical path direction of beam successively includes: spectrophotometric unit, the first lens, radial polarisation unit and the second lens；
Spectrophotometric unit is for carrying out light splitting operation to incoming laser beam, so that incoming laser beam occurs spatial dispersion and formed
Dispersed light beam with concentric structure, and in dispersed light beam different wave length light distribution on the annulus of different radii；
Dispersed light beam for being converted to parallel annular beam by the first lens；
Radial polarisation unit is used to annular beam being converted to radial polarized light beam；
Second lens obtain the focal beam spot for laser processing for being focused to radial polarized light beam.
Further, spectrophotometric unit is circular grating.
Further, the first lens are axicon lens.
Further, when incoming laser beam is linearly polarized light, radial polarisation unit includes multiple half-wave plates, and half-wave plate
Fast axis direction with spatial variations.
Further, when incoming laser beam is circularly polarized light, radial polarisation unit includes multiple quarter-wave plates, and
The fast axis direction of quarter-wave plate is with spatial variations.
Further, the second lens are the object lens that numerical aperture is higher than preset numerical aperture threshold value；Numerical aperture threshold value
Required precision setting according to laser processing.
In general, contemplated above technical scheme through the invention, can obtain it is following the utility model has the advantages that
The method provided by the present invention for reducing laser focused spot size, first carries out light splitting operation to incoming laser beam,
Then light beam is converted into collimated light beam, light beam is then converted into radial polarized light beam, finally light beam is focused to be formed
Focal beam spot for laser processing.On the one hand, due to carrying out light splitting operation to incoming laser beam before focusing, so that focusing light
The longitudinal length of spot reduces since space-time focuses；On the other hand, by light beam be converted to after radial polarized light beam again to light beam into
Line focusing enables to the lateral extent of focal beam spot to reduce.Therefore, reduction laser focused spot size provided by the present invention
Method, the size of laser focal beam spot can be effectively reduced from horizontal and vertical two dimensions.
Detailed description of the invention
Fig. 1 is the schematic device provided in an embodiment of the present invention for reducing laser focused spot size；
Fig. 2 is radial polarisation cell schematics provided in an embodiment of the present invention.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
The device provided by the present invention for reducing laser focal beam spot, as shown in Figure 1, along the optical path direction of incoming laser beam
It successively include: spectrophotometric unit, the first lens, radial polarisation unit and the second lens；
Spectrophotometric unit is for carrying out light splitting operation to incoming laser beam, so that incoming laser beam occurs spatial dispersion and formed
Dispersed light beam with concentric structure, and in dispersed light beam different wave length light distribution on the annulus of different radii；At this
In embodiment, spectrophotometric unit is circular grating, and circular grating is made of a series of concentric structure, when round light beam is incident on
When on circular grating, spatial dispersion can occur for light beam, wherein the light component of different wave length reflects at different angles, in circle
On the outgoing beam section of light beam, the light distribution of different wave length is on the annulus of different radii；
Dispersed light beam for being converted to parallel annular beam by the first lens；In the present embodiment, the first lens are cone
Lens, since dispersed light beam is that divergent beams can be converted to parallel light beam after axicon lens；
Radial polarisation unit is used to annular beam being converted to radial polarized light beam；In the present embodiment, incoming laser beam
For linearly polarized light, the structure of radial polarisation unit is as shown in Fig. 2, including multiple half-wave plates, and the fast axis direction of half-wave plate
With spatial variations；When light beam passes through the radial polarisation unit, the light beam of different location is through the half-wave plate of different fast axis directions
Effect, the rotation of certain angle can occur for polarization direction, so that the outgoing beam of the radial polarisation unit is converted to radial polarisation
Light beam；
Second lens obtain the focal beam spot for laser processing for being focused to radial polarized light beam；In this reality
It applies in example, the second lens are the object lens that numerical aperture is higher than preset numerical aperture threshold value, and numerical aperture threshold value adds according to laser
The required precision of work is set.
In another embodiment of the present invention, incoming laser beam is circularly polarized light, and in device, radial polarisation unit includes
Multiple quarter-wave plates, and the fast axis direction of quarter-wave plate is with spatial variations；When light beam passes through the radial polarisation unit
When, through the effect of the half-wave plate of different fast axis directions, the rotation of certain angle can occur the light beam of different location for polarization direction, from
And the outgoing beam of the radial polarisation unit is converted to radial polarized light beam.
Device shown in FIG. 1 can be used for implementing the method provided by the present invention for reducing laser focused spot size.In Fig. 1
Shown in device, the method provided by the present invention for reducing laser focused spot size includes the following steps:
(1) spectrophotometric unit is utilized, light splitting operation is carried out to incoming laser beam, so that spatial dispersion occurs for incoming laser beam simultaneously
Formed have concentric structure dispersed light beam, and in dispersed light beam different wave length light distribution on the annulus of different radii；
(2) the first lens are utilized, dispersed light beam is converted to parallel annular beam；
(3) radial polarisation unit is utilized, annular beam is converted into radial polarized light beam；
(4) the second lens are utilized, radial polarized light beam is focused, the focal beam spot for laser processing is obtained.
Above method can effectively reduce the size of focal beam spot from horizontal and vertical two dimensions simultaneously: by entering
It penetrates laser beam and carries out light splitting operation, so that light beam, before entering object lens, different spectral components separate and space in space
Chirp；Since different spectral components only just generate overlapping near focal point, i.e., generation time domain focus, so focal point can
To obtain shortest pulse length and maximum peak light intensity；Therefore, this method can effectively reduce the longitudinal direction length of focal beam spot
Degree；After light beam is converted to radial polarized light beam, when being focused to it, can near focal point obtain one like longitudinal direction
Electric field component, while the lateral dimension of focal beam spot reduces, therefore, the transverse direction that this method can effectively reduce focal beam spot is long
Degree.
The experimental results showed that being obtained when being focused using the object lens of identical numerical aperture by device shown in FIG. 1
The size of focal beam spot is significantly less than through other existing device focal beam spots obtained, and therefore, the present invention can be effective
The size for reducing focal beam spot, to effectively improve the machining accuracy of laser processing.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (7)
1. a kind of method for reducing laser focused spot size characterized by comprising
(1) light splitting operation is carried out to incoming laser beam, so that spatial dispersion occurs for incoming laser beam and is formed have concentric circles knot
The dispersed light beam of structure, and in the dispersed light beam different wave length light distribution on the annulus of different radii；
(2) dispersed light beam is converted to parallel annular beam；
(3) annular beam is converted into radial polarized light beam；
(4) radial polarized light beam is focused, obtains the focal beam spot for laser processing.
2. a kind of device for reducing laser focused spot size, which is characterized in that the optical path direction along incoming laser beam successively wraps
It includes: spectrophotometric unit, the first lens, radial polarisation unit and the second lens；
The spectrophotometric unit is for carrying out light splitting operation to incoming laser beam, so that incoming laser beam occurs spatial dispersion and formed
Dispersed light beam with concentric structure, and in the dispersed light beam different wave length light distribution on the annulus of different radii；
The dispersed light beam for being converted to parallel annular beam by first lens；
The radial polarisation unit is used to the annular beam being converted to radial polarized light beam；
Second lens obtain the focal beam spot for laser processing for being focused to the radial polarized light beam.
3. reducing the device of laser focused spot size as claimed in claim 2, which is characterized in that the spectrophotometric unit is circle
Shape grating.
4. reducing the device of laser focused spot size as claimed in claim 2, which is characterized in that first lens are cone
Lens.
5. reducing the device of laser focused spot size as claimed in claim 2, which is characterized in that when incoming laser beam is line
When polarised light, the radial polarisation unit includes multiple half-wave plates, and the fast axis direction of half-wave plate is with spatial variations.
6. reducing the device of laser focused spot size as claimed in claim 2, which is characterized in that when incoming laser beam is circle
When polarised light, the radial polarisation unit includes multiple quarter-wave plates, and the fast axis direction of quarter-wave plate is with space
Variation.
7. reducing the device of laser focused spot size as claimed in claim 2, which is characterized in that second lens are number
It is worth the object lens that aperture is higher than preset numerical aperture threshold value.
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| CN201810940490.1A CN108983428B (en) | 2018-08-17 | 2018-08-17 | Method and device for reducing size of laser focusing light spot |
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| CN201810940490.1A CN108983428B (en) | 2018-08-17 | 2018-08-17 | Method and device for reducing size of laser focusing light spot |
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Cited By (4)
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|---|---|---|---|---|
| CN110515216A (en) * | 2019-07-19 | 2019-11-29 | 四川大学 | It a kind of light intensity and polarizes atwirl light field and regulates and controls method |
| RU2726219C1 (en) * | 2020-01-09 | 2020-07-10 | АКЦИОНЕРНОЕ ОБЩЕСТВО "Научно-исследовательский институт оптико-электронного приборостроения" (АО "НИИ ОЭП") | Method for guidance and focusing of radiation on a target and device for its implementation |
| CN112666196A (en) * | 2019-10-16 | 2021-04-16 | 北航（四川）西部国际创新港科技有限公司 | Ray integration device |
| CN114279346A (en) * | 2021-12-18 | 2022-04-05 | 上海精测半导体技术有限公司 | Optical measurement device, optical measurement method, and photoacoustic film thickness measurement system |
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| CN110515216A (en) * | 2019-07-19 | 2019-11-29 | 四川大学 | It a kind of light intensity and polarizes atwirl light field and regulates and controls method |
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| RU2726219C1 (en) * | 2020-01-09 | 2020-07-10 | АКЦИОНЕРНОЕ ОБЩЕСТВО "Научно-исследовательский институт оптико-электронного приборостроения" (АО "НИИ ОЭП") | Method for guidance and focusing of radiation on a target and device for its implementation |
| CN114279346A (en) * | 2021-12-18 | 2022-04-05 | 上海精测半导体技术有限公司 | Optical measurement device, optical measurement method, and photoacoustic film thickness measurement system |
| CN114279346B (en) * | 2021-12-18 | 2024-04-16 | 上海精测半导体技术有限公司 | Optical measurement device, optical measurement method, and photoacoustic film thickness measurement system |
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