CN110303244A - It is a kind of quickly to prepare surface period structural approach - Google Patents
It is a kind of quickly to prepare surface period structural approach Download PDFInfo
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- CN110303244A CN110303244A CN201910675104.5A CN201910675104A CN110303244A CN 110303244 A CN110303244 A CN 110303244A CN 201910675104 A CN201910675104 A CN 201910675104A CN 110303244 A CN110303244 A CN 110303244A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
Surface period structural approach is quickly prepared the invention discloses a kind of, the femto-second laser and beam-expanding system for being overlapped including center line and successively laying, be arranged between femto-second laser and beam-expanding system and along half-wave plate and Glan-Taylor prism that light transmission direction is successively laid, and after beam-expanding system is set, be used to form size adjustable hollow focus on light beam hollow focusing component.Surface period structural approach is prepared the following steps are included: generating laser beam, and the laser intensity through the incident laser beam of half-wave plate adjustment and the polarization direction through Glan-Taylor prism adjustment laser beam using femto-second laser；Utilize beam-expanding system expanded beam；The hollow object distance for focusing component is adjusted, continuously to change hollow focus on light beam radius and carry out polar coordinates radial scan.Through the above scheme, the present invention has many advantages, such as that structure is simple, preparation efficiency is high, has very high practical value and promotional value in micro-nano structure preparation technical field.
Description
Technical field
The present invention relates to micro-nano structure preparation technical fields, especially a kind of quickly to prepare surface period structural approach.
Background technique
Femtosecond laser is a kind of laser operated with impulse form, and the duration is very short, a femtosecond be exactly 10 it is negative
15 power seconds, that is, 1/1,000,000,000,000,000 seconds, electronically most short pulse obtained wants thousands of times short to its Billy；Separately
Outside, femtosecond laser has very high instantaneous power, can reach hundred TW terawatts,；Moreover, it can focus on more straight than hair
Diameter also wants small area of space, makes the intensity of electromagnetic field several times more taller than active force of the atomic nucleus to its ambient electron.
At femtosecond laser radiative material surface, by can analogy nonlinear feedback reach very high degree of precision mode-locked laser
Nonlinear feedback mechanism can seamlessly be self-assembly of accurate light on metal film surfaces, bulk material or curved surface
The metal oxide nanostructure (Laser Induced Periodic Surface Structure, LIPSS) of grid cycle.This
Kind nonlinear feedback mechanism is very high for defect and the robustness degree of disturbance, and needs to focus on incident femtosecond laser tens of
Within a wavelength, it is also necessary to control scanning speed.Currently, LIPSS is all made of the solid Gaussian beam of small focal spot, with a kind of two maintenance and operations
The mode of dynamic scanning carries out the assembling of accurate period nanostructure, and manufacturing speed is slow, has seriously affected large area periodic structure
Producing efficiency.
Therefore, urgent need will propose that one kind quickly prepares surface period structural approach, by continuously changing hollow focusing light
Beam radius carries out the mode of radial scan while retaining laser induced surface periodic structure nonlinear feedback mechanism, moreover it is possible to big
Width improves the preparation efficiency of surface period structure, has weight to the application in the fields such as the production of large area optical device, material modification
It acts on.
Summary of the invention
In view of the above-mentioned problems, the purpose of the present invention is to provide one kind quickly to prepare surface period structural approach, the present invention
The technical solution adopted is as follows:
One kind quickly preparing surface period structural approach, including center line coincidence and successively the femto-second laser laid and
Beam-expanding system, the half-wave plate and lattice for being arranged between femto-second laser and beam-expanding system and successively being laid along light transmission direction
Blue Taylor prism, and after beam-expanding system is set, be used to form size adjustable hollow focus on light beam hollow focusing member device
Part.
Prepare surface period structural approach, comprising the following steps:
Step S1 generates laser beam, and the laser intensity through the incident laser beam of half-wave plate adjustment using femto-second laser
With the polarization direction through Glan-Taylor prism adjustment laser beam；
Step S2 utilizes the laser beam in beam-expanding system spread step S1；
Step S3 adjusts the hollow object distance for focusing component, continuously to change hollow focus on light beam radius and carry out pole seat
Mark radial scan.
Further, described quickly to prepare surface period structural approach, it further include being arranged in femto-second laser and half-wave plate
Between electronic shutter.
Preferably, the hollow focus on light beam of the hollow size adjustable for focusing component transmitting be round, polygon or
One of ellipse.
Further, the hollow focus on light beam of the hollow size adjustable for focusing component transmitting is circle, described
Hollow focusing component is that ring focuses zone plate, and the ring is focused and is provided on zone plate using center as the several concentric of the center of circle
Light penetrating ring band；
The radius relationship of several light penetrating ring bands meets:
Wherein, the ring radius that d representation theory is related to, f indicate that ring focuses the focal length of zone plate, and λ indicates the wavelength of incident light,
N indicates ring of light band number；
The ring of light band number n=0 is the light penetrating ring band of innermost layer.
Preferably, the femto-second laser is one of microwave, Terahertz, infrared light, visible light, ultraviolet light, X-ray
Electromagnetic wave band.
Preferably, the hollow focusing component is that ring focusing zone plate, phase plate, the circumferential weld of generation hollow beam are saturating
One of mirror, optical fiber, axicon.
Preferably, the ring focuses zone plate for visible transparent substrate or to the opaque substrate of visible light.
Further, in the step S1, by Glan-Taylor prism along the axially consecutive Rotating with Uniform of laser beam, to adjust
The polarization direction of the laser beam of whole incidence.
Preferably, the laser source is that point light source, the ring focus the object distance of zone plate when being oz and oz > f, and ring focuses
The image distance of zone plate isThe hollow beam radius that the surface of material to be irradiated generates is
Compared with prior art, the invention has the following advantages:
(1) half-wave plate and Glan-Taylor prism combination is dexterously arranged in the present invention, accurately to control incident laser intensity
The polarization direction and；Wherein, half-wave plate can arbitrarily change the linear polarization of incident femtosecond laser, then cooperate Glan-Taylor prism
Analyzing can continuously adjust the light intensity of incident laser.
(2) present invention dexterously generates the hollow focus on light beam of size adjustable using optical component, by continuously changing
Hollow focus on light beam radius carries out polar coordinates radial scan；It is non-linear anti-that it is based on laser induced surface periodic structure (LIPSS)
Infeed mechanism, incident pulse are scattered by already present nanostructure or surface defect, and scattering light and the incident interference of light lead to neighbouring dissipate
The light intensity of exit point changes, and is more than the region of material ablation threshold value in light intensity, and material reacts shape with the oxygen in air
The oxide nano structure of Cheng Xin.By controlling hollow focused spot size and radial scan speed, guarantee generated nanometer
The graphical quality of structure.
(3) present invention is influenced by LIPSS nonlinear feedback mechanism, and the nanostructure of ring focusing spot area is by ring
Interior existing nanostructure inductive formation, i.e., the nanometer grating structure made by this scan mechanism it is direct or indirect by
The center point inductive formation ensure that the consistency of large area periodic structure.
(4) present invention is compared with the mode of small focal spot two dimensional motion scanning, and the present invention is by continuously changing hollow focusing light
Beam radius carries out the method for radial scan while retaining laser induced surface periodic structure nonlinear feedback mechanism, additionally it is possible to
The preparation speed of surface period structure is greatly improved, promotion amplitude is directly proportional to sample size, has unrivaled advantage.
(5) hollow focusing component is dexterously arranged in the present invention, and ring can be selected and focus zone plate, can be to polychromatic light
Source carries out monochromatization, and forms the hollow focusing annulus of single wavelength, can design the ring focusing for generating any radius according to demand
Hollow beam；Its design principle is combined with spatial light modulator, is not necessarily to actual fabrication component, that is, can produce any need partly
The ring of diameter focuses hollow beam.
In conclusion the present invention has many advantages, such as that structure is simple, preparation efficiency is high, have in micro-nano structure preparation technical field
There are very high practical value and promotional value.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to the attached drawing used required in embodiment
It is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as to protection
The restriction of range to those skilled in the art without creative efforts, can also be attached according to these
Figure obtains other relevant attached drawings.
Fig. 1 is working light path schematic diagram of the invention.
Fig. 2 is that figure is compared in the scanning of solid focal spot two dimensional motion and hollow beam radial scan of the invention.
Fig. 3 is the design principle that ring of the invention focuses zone plate.
Specific embodiment
To keep the purposes, technical schemes and advantages of the application apparent, with reference to the accompanying drawings and examples to the present invention
It is described further, embodiments of the present invention include but is not limited to the following example.Based on the embodiment in the application, ability
Domain those of ordinary skill every other embodiment obtained without making creative work, belongs to the application
The range of protection.
Embodiment
As shown in Figure 1 to Figure 3, it present embodiments provides one kind and quickly prepares surface period structural approach, including center line
Femto-second laser, electronic shutter, half-wave plate, Glan-Taylor prism, beam-expanding system and the hollow focusing member for being overlapped and successively laying
Device.Wherein, the hollow focus on light beam of the hollow size adjustable for focusing component transmitting can be round, polygon or ellipse
Shape.In addition, femto-second laser is the electromagnetic wave band of one of microwave, Terahertz, infrared light, visible light, ultraviolet light, X-ray.
In the present embodiment, the hollow focus on light beam of the hollow size adjustable for focusing component transmitting is preferably round,
The hollow focusing component is that ring focuses zone plate, and the ring is focused and is provided on zone plate using center as the several of the center of circle
Concentric light penetrating ring band, wherein ring focuses zone plate for visible transparent substrate or to the opaque substrate of visible light.
The radius relationship of several light penetrating ring bands meets:
Wherein, the ring radius that d representation theory is related to, f indicate that ring focuses the focal length of zone plate, and λ indicates the wavelength of incident light,
N indicates ring of light band number；
When femto-second laser be point light source, the ring focus zone plate object distance be oz and oz > f when, ring focus wave band
The image distance of piece isThe hollow beam radius that the surface of material to be irradiated generates is
It is briefly described as follows the design principle that ring focuses zone plate:
Fig. 3 (a) constitutes fresnel's zone plate by one group of concentric ring band, is a kind of Variable line-space gratings around zone plate central axes
Rotation forms Fig. 3 (b), and focus is located on central axes, and it is that (λ is zone plate incidence for λ/2 that adjacent ring, which takes the optical path difference of focus to,
Optical wavelength).Fig. 3 (c) is the light distribution simulation drawing on one-dimensional fresnel's zone plate focal plane shown in Fig. 3 (b), can be very clear
A single focus is seen by Chu.One-dimensional zone plate in Fig. 3 (b) is first translated d by the present embodiment, then takes its one side with its former axis
Line (dotted line in figure) is done symmetrically, and obtains the new one-dimensional zone plate in Fig. 3 (e).This one-dimensional zone plate will with shown in Fig. 3 (b)
Former zone plate have a same focal length, should there are two the focuses that distance is 2d on focal plane.The present embodiment utilizes Kiel suddenly
Husband's diffraction formula has carried out numerical simulation to the light distribution on one-dimentional structure focal plane, shown in analog result such as Fig. 3 (f).From
It can clearly see two focuses in Fig. 3 (f), its spacing 2d is consistent with theory expectation.Therefore, if it is Fig. 3 (f) is one-dimensional
It is rotated about the axis structure, and the zone plate of the focusing of ring shown in Fig. 3 (d) can be obtained, and can produce the hollow light that internal diameter is 2d
Beam；And so on, the ring that can obtain several concentric light penetrating ring bands focuses zone plate.
It is briefly described as follows and prepares surface period structural approach, comprising the following steps:
The first step generates laser beam, and the laser intensity through the incident laser beam of half-wave plate adjustment using femto-second laser
With the polarization direction through Glan-Taylor prism adjustment laser beam；Here, by Glan-Taylor prism along the axially consecutive equal of laser beam
Even rotation, to adjust the polarization direction of incident laser beam.
Second step utilizes the laser beam in the beam-expanding system extension first step；
Third step adjusts the hollow object distance for focusing component, continuously to change hollow focus on light beam radius and carry out pole seat
Mark radial scan.
In the present embodiment, the laser beam that femtosecond laser light source issues enters processing optical path after electronic shutter.Light beam is first
Half-wave plate and Glan-Taylor prism combination are first passed through, accurately to control incident laser intensity and polarization direction.Half-wave plate can be with
Any linear polarization for changing incident femtosecond laser, then cooperate Glan-Taylor prism analyzing, it can continuously adjust incident laser
Light intensity.Incident femtosecond laser is most focused into hollow beam incidence through hollow focusing component afterwards after beam-expanding system expands
Onto sample.The present embodiment realizes hollow light by adjusting the light intensity of incident laser and the object image distance of hollow focusing component
The radial scan of beam.
This gives the comparisons of the working method of the scanning of solid focal spot two dimensional motion and hollow beam radial scan.
The scanning of solid focal spot two dimensional motion needs for sample to be placed on two-dimentional work bench and carries out two dimensional motion therewith, with laser focal spot
Movement on sample, sample surfaces nanostructure constantly generate.Hollow beam radial scan is then by continuously changing ring
Focused radius carries out radial scan, to make the periodic structure on surface.If manufactured size is the surface period structure of L × L, gather
Burnt spot size is w, scanning speed v, then is L the time required to the two dimensional motion scanning based on solid Gaussian beam2/ wv,
It is the time required to radial scan based on hollow beamIt is scanned relative to two dimensional motion, the improved efficiency of radial scan
?Times, surface period structure size is bigger, and improved efficiency amplitude is bigger.The scanning speed of LIPSS is general~10 μm/
S, if raster size L~1000mm, efficiency will promote~105Magnitude.In conclusion the present invention has substance outstanding
Feature and significant progress have very high practical value and promotional value in micro-nano structure preparation technical field.
Above-described embodiment is merely a preferred embodiment of the present invention, and it is not intended to limit the protection scope of the present invention, as long as using
Design principle of the invention, and the non-creative variation worked and made is carried out on this basis, it should belong to of the invention
Within protection scope.
Claims (9)
1. one kind quickly prepares surface period structural approach, including center line coincidence and the successively femto-second laser laid and expansion
Beam system, which is characterized in that further include being arranged between femto-second laser and beam-expanding system and along light transmission direction successively cloth
If half-wave plate and Glan-Taylor prism, and after beam-expanding system is set, be used to form the hollow focus on light beam of size adjustable
Hollow focusing component；
Prepare surface period structural approach, comprising the following steps:
Step S1 generates laser beam, and laser intensity and warp through the incident laser beam of half-wave plate adjustment using femto-second laser
The polarization direction of Glan-Taylor prism adjustment laser beam；
Step S2 utilizes the laser beam in beam-expanding system spread step S1；
Step S3 adjusts the hollow object distance for focusing component, continuously to change hollow focus on light beam radius and carry out polar coordinates diameter
To scanning.
2. one kind according to claim 1 quickly prepares surface period structural approach, which is characterized in that further include that setting exists
Electronic shutter between femto-second laser and half-wave plate.
3. one kind according to claim 1 quickly prepares surface period structural approach, which is characterized in that the hollow focusing
The hollow focus on light beam of the size adjustable of component transmitting is one of round, polygon or ellipse.
4. one kind according to claim 3 quickly prepares surface period structural approach, which is characterized in that the hollow focusing
Component is one of the ring focusing zone plate for generating hollow beam, phase plate, circumferential weld lens, optical fiber, axicon.
5. one kind according to claim 4 quickly prepares surface period structural approach, which is characterized in that the hollow focusing
The hollow focus on light beam of the size adjustable of component transmitting is circle, and the hollow focusing component is ring focusing zone plate, and
The ring focuses the several concentric light penetrating ring bands being provided on zone plate using center as the center of circle；
The radius relationship of several light penetrating ring bands meets:
Wherein, the ring radius that d representation theory is related to, f indicate that ring focuses the focal length of zone plate, and λ indicates the wavelength of incident light, n table
Show ring of light band number；
The ring of light band number n=0 is the light penetrating ring band of innermost layer.
6. one kind described according to claim 1 or 2 or 3 or 4 or 5 quickly prepares surface period structural approach, which is characterized in that
The femto-second laser is the electromagnetic wave band of one of microwave, Terahertz, infrared light, visible light, ultraviolet light, X-ray.
7. one kind according to claim 5 quickly prepares surface period structural approach, which is characterized in that the ring focus wave
Strap is for visible transparent substrate or to the opaque substrate of visible light.
8. one kind according to claim 6 quickly prepares surface period structural approach, which is characterized in that the step S1
In, by Glan-Taylor prism along the axially consecutive Rotating with Uniform of laser beam, to adjust the polarization direction of incident laser beam.
9. one kind according to claim 5 quickly prepares surface period structural approach, which is characterized in that the femtosecond laser
Device is that point light source, the ring focus the object distance of zone plate when being oz and oz > f, and the image distance that ring focuses zone plate isThe hollow beam radius that the surface of material to be irradiated generates is
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110899957A (en) * | 2019-11-27 | 2020-03-24 | 西安交通大学 | Method for realizing information display and encryption based on femtosecond laser induced segmentation pattern |
| CN112008232A (en) * | 2020-08-11 | 2020-12-01 | 华东师范大学 | Method and device for preparing periodic stripe structure on surface of glass coated with ITO film |
| CN113758565A (en) * | 2020-06-03 | 2021-12-07 | 中国工程物理研究院激光聚变研究中心 | Connecting component for spectrum sensing system and spectrometer |
| DE102020127116A1 (en) | 2020-10-15 | 2022-04-21 | Trumpf Laser- Und Systemtechnik Gmbh | Device and method for laser machining a workpiece |
| CN114703437A (en) * | 2022-04-25 | 2022-07-05 | 西安新智造者企业管理合伙企业(有限合伙) | Femtosecond laser abrasion-resistant and fatigue-resistant integrated strengthening method and device for metal part |
| CN116088090A (en) * | 2023-03-29 | 2023-05-09 | 北京工业大学 | System for writing 2-micrometer large-mode-field fiber bragg grating based on mask method and working method |
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| CN110899957A (en) * | 2019-11-27 | 2020-03-24 | 西安交通大学 | Method for realizing information display and encryption based on femtosecond laser induced segmentation pattern |
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| CN116088090A (en) * | 2023-03-29 | 2023-05-09 | 北京工业大学 | System for writing 2-micrometer large-mode-field fiber bragg grating based on mask method and working method |
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