CN113758565B - Connecting component used in spectrum sensing system and spectrometer - Google Patents
Connecting component used in spectrum sensing system and spectrometer Download PDFInfo
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- CN113758565B CN113758565B CN202010493231.6A CN202010493231A CN113758565B CN 113758565 B CN113758565 B CN 113758565B CN 202010493231 A CN202010493231 A CN 202010493231A CN 113758565 B CN113758565 B CN 113758565B
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- 238000001228 spectrum Methods 0.000 title abstract description 11
- 239000002086 nanomaterial Substances 0.000 claims abstract description 141
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 238000002834 transmittance Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 3
- 230000010354 integration Effects 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000001934 delay Effects 0.000 description 3
- 230000023077 detection of light stimulus Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229920000297 Rayon Polymers 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0202—Mechanical elements; Supports for optical elements
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Abstract
The invention relates to a connecting component used in a spectrum sensing system and a spectrometer. The connecting member includes: a plurality of nanostructure units arranged on the upper surface of the substrate in an array manner; each nanostructure unit corresponds to a set resonant wavelength value; each nanostructure unit is composed of a plurality of circular rings; the plurality of circular rings are concentric circular rings; each circular ring is formed by uniformly arranging a plurality of same nano structures in the circumferential direction, and the focal lengths of all the nano structure units are equal. The invention sets a plurality of nano structures, and the focal length of each nano structure unit is equal by setting the phase of each nano structure according to the light with different wavelengths so as to realize the focusing of the light with different wavelengths on a plane, so that the area array detector can accurately measure the light intensity distribution, solve the problem of diffraction crosstalk generated by a spectroscopic optical system, and realize the high-efficiency integration of a spectrum sensing system and a spectrometer.
Description
Technical Field
The invention relates to the field of spectrum measurement, in particular to a connecting component for a spectrum sensing system and a spectrometer.
Background
When the light splitting system is connected with the area array detector through adhesive, diffraction rings appear on the area array detector due to diffraction of the array units, so that crosstalk can appear in detection of light in adjacent areas. When the array units and the area array detector are connected by adopting a single lens, due to the existence of the dispersion characteristic of the lens, the light focusing of different wavelengths is not on a plane, and after the light focusing of different wavelengths on the area array detector, the focal spot size is inconsistent due to different focal lengths, and adjacent light spots are mutually influenced, so that the detection result of the area array detector on the light intensity is inaccurate.
Disclosure of Invention
The invention aims to provide a connecting component and a spectrometer for a spectrum sensing system, so as to improve the accuracy of measuring light intensity distribution of an area array detector.
In order to achieve the above object, the present invention provides the following solutions:
a connection component for use in a spectroscopic sensing system, comprising: a plurality of nanostructure units arranged on the upper surface of the substrate in an array manner; each nanostructure unit corresponds to a set resonance wavelength value; each of the nanostructure units consists of a plurality of circular rings; the circular rings are concentric circular rings; each circular ring is formed by uniformly arranging a plurality of identical nano structures in the circumferential direction, and the phase and the radius of each nano structure are determined according to the radius of the circular ring where the nano structure is positioned; the focal lengths of all the nanostructure elements are equal.
Optionally, the phase of each nanostructure and the radius of the circular ring in which the nanostructure is located satisfy the formula,wherein phi (r, lambda) represents the phase of the nanostructure, the range of the value is 0-2 pi, r represents the radius of the circular ring where the nanostructure is positioned, f is the focal length of the nanostructure unit, lambda is the set resonance wavelength value, ">Representing the phase at the center of the ring.
Optionally, the radius of the circular ring is:
r i ＝i*(r i -r i-1 )，
wherein r is i Represents the radius of the ith circular ring, r, counted radially outward 0 =0, i denotes the number of turns at which the circular ring is calculated radially outwards from the ring core.
Optionally, the abscissa of the nanostructure is:the ordinate is +.>Wherein r is i The radius of the ith circular ring is counted outwards along the radial direction, N represents the number of the nano structures in the same circular ring, the origin of coordinates of the nano structures is the center of the ring, and j represents the number of the nano structures in the same circular ring.
Optionally, the nanostructure has a square columnar shape.
Optionally, the height of the nanostructure is less than or equal to λ/(n) 1 -1) the length of the nanostructure is greater than 0.1 λ and the width of the nanostructure is less than 0.5 λ, where λ is a set resonance wavelength value, n 1 Is the refractive index of the material used for the nanostructure.
Optionally, the spacing between two adjacent nanostructures in the circular ring is less thanWherein lambda is a set resonance wavelength value, n is the refractive index of the environment where the nanostructure unit is located, and alpha is the aperture angle of the nanostructure unit.
Optionally, the number of the nanostructures in each circular ring is a rounded value; the rounding value is a pairThe value obtained by rounding down, r i Denote the radius of the ith annular ring counted radially outward, T denotes the spacing of two adjacent nanostructures in the annular ring.
A spectrometer, comprising: the device comprises a light splitting system, an area array detector and the connecting component; the upper surface of the connecting component is provided with the light splitting system, and the lower surface of the connecting component is provided with the area array detector.
Optionally, the light splitting system includes a plurality of super-atom units arranged on the upper surface of the supporting element in an array manner, each super-atom unit corresponds to a set resonance wavelength value, and the super-atom units are composed of a plurality of identical super-atoms; the super atomic unit is used for transmitting light with set resonance wavelength; each nanostructure unit in the connection part corresponds to the super atom unit one by one, and the corresponding nanostructure unit is used for focusing the transmitted light with the set resonance wavelength.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects: the invention is provided with a plurality of nanostructure units, the nanostructure units comprise a plurality of nanostructures, and the focal length of each nanostructure unit is equal by setting the phase position of each nanostructure according to light with different wavelengths so as to realize the focusing of the light with different wavelengths on a plane, thereby enabling the area array detector to accurately measure the light intensity distribution.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the drawings that are needed in the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic structural diagram of nanostructure elements in a connection part of a spectrum sensing system according to embodiment 1 of the invention;
FIG. 2 is a schematic diagram of the square nanostructure in example 1 of the present invention;
FIG. 3 is a schematic view of the aperture angle of the nanostructure unit in example 1 of the present invention;
FIG. 4 is a schematic structural diagram of a spectrometer according to embodiment 2 of the present invention;
FIG. 5 is a schematic diagram of the principle of crosstalk between light intensities of adjacent test areas on an area array detector in the prior art;
fig. 6 is a schematic diagram of the prior art in which a single lens causes light of different wavelengths to be focused out of one plane.
Symbol description:
1-substrate, 2-nanostructure unit, 3-circular ring, 4-nanostructure, width of 5-square columnar nanostructure, height of 6-square columnar nanostructure, length of 7-square columnar nanostructure, 8-aperture angle, 100-spectroscopic system, 101-super atomic unit, 102-support frame, 110-connecting component, 120-area array detector, 121-viscose, 122-diffraction circular ring, 123-single lens.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention aims to provide a connecting component and a spectrometer used in a spectrum sensing system. The invention sets a plurality of nanostructure units, wherein the nanostructure units comprise a plurality of nanostructures, and the focal length of each nanostructure unit is equal to realize that light with different wavelengths is focused on a plane by setting the phase position of each nanostructure according to light with different wavelengths, so that the area array detector can accurately measure the light intensity distribution, the problem of diffraction crosstalk generated by a spectroscopic optical system is solved, and the high-efficiency integration of a spectrum sensing system and a spectrometer is realized.
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
Example 1
As shown in fig. 1, a connection part for use in a spectrum sensing system, comprising: a plurality of nanostructure units 2 arrayed on the upper surface of the substrate 1; each nanostructure unit 2 corresponds to a set resonance wavelength value; each of the nanostructure elements 2 is composed of a plurality of circular rings 3; a plurality of the circular rings 3 are concentric circular rings; each circular ring 3 is formed by uniformly arranging a plurality of identical nano structures 4 in the circumferential direction, and the phase and the radius of each nano structure 4 are determined according to the radius of the circular ring 3 where the nano structure 4 is positioned; the focal lengths of all the nanostructure elements 2 are equal.
Optionally, the phase of each nanostructure and the radius of the circular ring in which the nanostructure is located satisfy the formula,and->Wherein (1)>Representing the calculated phase of each nanostructure, phi (r, lambda) representing the phase of the selected nanostructure, with a value in the range of 0-2 pi, r representing the nanostructureThe radius of the circular ring, f is the focal length of the nanostructure unit, lambda is the set resonant wavelength value,represents the phase at the center of the circle, where +.>The function of the formula is to limit the phase of the nanostructures in the ring to a range of 0-2 pi.
The radius of the circular ring 3 satisfies the formula:
r i ＝i*(r i -r i-1 )，
wherein r is i Represents the radius of the ith annular ring 3, r, counted radially outward 0 =0, i denotes the number of turns in which the circular ring 3 is calculated radially outwards from the ring core.
The abscissa of the nanostructure 4 satisfies the formula:the ordinate is +.>Wherein r is i The radius of the ith circular ring 3 is counted outwards along the radial direction, N represents the number of the nano structures 4 in the same circular ring 3, the origin of coordinates set by the nano structures 4 is the center of the ring, j represents the number of the nano structures 4 in the same circular ring 3, the nano structure on the positive half axis of x is the number 0, i.e. j=0, and the nano structures in the same circular ring are numbered in the anticlockwise direction.
The number of the nanostructures 4 in each circular ring 3 is a rounded value; the rounding value is a pairThe value obtained by rounding down, r i Representing the radius of the i-th circular ring 3 counted radially outwards, T representing the spacing of two adjacent nanostructures 4 in the circular ring 3.
As shown in fig. 2, the nanostructure may have a square columnar shape.
The phase delay generated after light passes through the square columnar nano structure is then adjusted by adjusting the width 5 of the square columnar nano structure, the height 6 of the square columnar nano structure and the length 7 of the square columnar nano structure. The height 6 of the square columnar nano structure is less than or equal to lambda/(n) 1 -1) the length 7 of the square pillar-like nanostructure is greater than 0.1 λ, the width 5 of the square pillar-like nanostructure is less than 0.5 λ, where λ is the set resonance wavelength value, n 1 Is the refractive index of the material used for the nanostructure. The spacing between two adjacent square columnar nanostructures in the circular ring (the distance between the centers of two adjacent square columnar nanostructures) is less thanWherein lambda is a set resonance wavelength value, N A Is the numerical aperture of the nanostructure unit. N (N) A N sin (α/2), where n is the refractive index of the environment in which the nanostructure unit is located, and α is the aperture angle 8 of the nanostructure unit, as shown in fig. 3.
Regarding the design of the nanostructures:
m nanostructures were designed altogether as alternative nanostructures. Selecting m phase intervals within the phase range of 0 to 2 piThe phase delays produced by the m nanostructures are +.> The phase delay of the s-th nanostructure is +.>s＝1,2，…m。
Based on electromagnetic simulation design theory, such as time domain finite difference method, finite element method, etc., two adjacent nanostructures in the circular ring can be arrangedAnd (3) taking a single nano structure as a unit to perform simulation calculation to obtain the phase delay and transmittance conditions generated by the nano structure under different sizes. When the transmittance is higher than 70%, the fixed parameter is high, the width and length are changed, and the phase of the s square nano columnar structure is obtainedWhere s=1, 2, …, m.
The s satisfies the formulaWherein (1)>Representing a rounding down of x (e.g +.>)，<x>Representing rounding x (e.g<1.55>=2), s=1, 2, …, m, m represents the number of alternative nanostructures, r represents the radius of the circular ring, f represents the focal length of the nanostructure element, λ represents the resonant wavelength value,/->Representing the phase of the nanostructure cell center.
The focusing function of the lens is due to the fact that the phase delay from the light impinging on different positions on the lens plane to the final focus is the same. The purpose of the nanostructure is to generate different phase delays, so as to achieve the purpose of adjusting the phase delays of light at different positions in space, and realize the focusing with equal focal length.
Example 2
As shown in fig. 4, a spectrometer includes: a spectroscopic system 100, an area array detector 120, and the above-described connection member 110; the focal length of all nanostructure elements 2 is equal to the distance of the connection element 110 from the area array detector 120. The spectroscopic system 100 is disposed on the upper surface of the connection member 110, and the area array detector 120 is disposed on the lower surface of the connection member 110. The area array detector can be CCD, CMOS or other instruments capable of detecting the light field intensity at different positions of the plane.
The distance between the spectroscopic system 100, the connection member 110, and the area array detector 120 satisfies the imaging formula:f is the focal length of the nanostructure unit, u is the object distance between the light-splitting system and the connecting component, v is the image distance between the connecting component and the area array detector, and the area array detector can accurately measure the light intensity distribution on the surface of the light-splitting system.
The spectroscopic system 100 includes a plurality of meta-atomic units 101 arranged on the upper surface of the support member 102 in an array manner, each meta-atomic unit 101 corresponds to a set resonance wavelength value, and the meta-atomic units 101 are composed of a plurality of identical meta-atoms. The super atomic unit 101 is configured to achieve a spectroscopic effect by making the light transmittance at the set resonance wavelength different from the light transmittance at the non-set resonance wavelength. The distance between the super-atomic units 101 is greater than 10 times the wavelength. Each nanostructure unit 2 in the connection member 110 corresponds to the super atom unit one by one, and the corresponding nanostructure unit serves to focus the transmitted light of the set resonance wavelength. For example: the set resonant wavelength values corresponding to the super atomic units 101 are respectively lambda 1 、λ 2 、λ 3 、λ 4 ...λ N . Setting the resonance wavelength value as lambda 1 Super atomic unit 101 of (a) corresponds to nanostructure unit F 1 A resonant wavelength lambda 2 Super atomic unit 101 of (a) corresponds to nanostructure unit F 2 Setting the resonance wavelength value as lambda N Super atomic unit 101 of (a) corresponds to nanostructure unit F N 。F 1 To F N For each corresponding set resonant wavelength value lambda 1 To lambda N Is the same.
As shown in fig. 5, when the spectroscopic system 100 is connected to the area array detector 120 by using the adhesive 121, a diffraction ring 122 appears on the area array detector due to diffraction of the super atomic unit, and crosstalk occurs in detection of light in adjacent areas.
As shown in FIG. 6, when a single lens 123 is used for connection between the meta-atomic unit 101 and the area array detector 120, it is difficult for the single lens to achromat a wide band due to the existence of chromatic dispersion characteristics of the lens, resulting in light (lambda) 1 、λ 2 、λ 3 、λ 4 ) Focusing is not in a plane, which is detrimental to the detection of light intensity on the area array detector 120.
The basic principle of this embodiment is as follows:
each super atomic unit is set with a resonance wavelength value lambda i For the set resonance wavelength value lambda i The method comprises the steps of designing a nano structure unit with a focal length f, wherein the area of the nano structure unit is the same as that of a super atom unit, and the nano structure unit and the super atom unit are in one-to-one correspondence. According to the embodiment, the equal focal length nanostructure units aiming at different wavelengths are adopted between the light splitting system and the area array detector, the problem that crosstalk occurs in testing light intensity in adjacent areas on the area array detector due to diffraction of light by the light splitting system is solved, and light with a set resonance wavelength value corresponding to each super-atomic unit is focused on the surface of the area array detector after passing through the corresponding nanostructure units. Therefore, the diffraction problem between the super-atomic units is solved, and the problem of inconsistent focal length caused by a single lens connection mode is solved.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other.
The principles and embodiments of the present invention have been described herein with reference to specific examples, the description of which is intended only to assist in understanding the methods of the present invention and the core ideas thereof; also, it is within the scope of the present invention to be modified by those of ordinary skill in the art in light of the present teachings. In view of the foregoing, this description should not be construed as limiting the invention.
Claims (8)
1. A connection component for use in a spectroscopic sensing system, comprising: a plurality of nanostructure units arranged on the upper surface of the substrate in an array manner; each nanostructure unit corresponds to a set resonance wavelength value; each of the nanostructure units consists of a plurality of circular rings; the circular rings are concentric circular rings; each circular ring is formed by uniformly arranging a plurality of identical nano structures in the circumferential direction, and the phase and the radius of each nano structure are determined according to the radius of the circular ring where the nano structure is positioned; the focal lengths of all the nanostructure units are equal;
the radius of the circular ring is as follows:
r i ＝i*(r i -r i-1 )，
wherein r is i Represents the radius of the ith circular ring, r, counted radially outward 0 =0, i denotes the number of turns at which the circular ring is calculated radially outwards from the ring core;
the abscissa of the nanostructure is:the ordinate is +.>Wherein r is i The radius of the ith circular ring is counted outwards along the radial direction, N represents the number of the nano structures in the same circular ring, the origin of coordinates of the nano structures is the center of the ring, and j represents the number of the nano structures in the same circular ring.
2. A connection for use in a spectroscopic sensor system as set forth in claim 1, wherein the phase of each of said nanostructures and the radius of the circular ring in which said nanostructure is located satisfy the formula,wherein phi (r, lambda) represents the phase of the nanostructure, the range of the value is 0-2 pi, r represents the radius of the circular ring where the nanostructure is positioned, f is the focal length of the nanostructure unit, lambda is the set resonance wavelength value, ">Representing the phase at the center of the ring.
3. A connection member for use in a spectroscopic sensing system as claimed in claim 1, wherein the nanostructure is square columnar in shape.
4. A connection element for use in a spectroscopic sensing system as claimed in claim 3, wherein the nanostructure has a height of λ/(n) or less 1 -1) the length of the nanostructure is greater than 0.1 λ and the width of the nanostructure is less than 0.5 λ, where λ is a set resonance wavelength value, n 1 Is the refractive index of the material used for the nanostructure.
5. A connection member for use in a spectroscopic sensing system as claimed in claim 3, wherein the spacing between two adjacent nanostructures in the circular ring is less thanWherein lambda is a set resonance wavelength value, n is the refractive index of the environment where the nanostructure unit is located, and alpha is the aperture angle of the nanostructure unit.
6. A connection member for use in a spectroscopic sensing system as claimed in claim 1, wherein the number of nanostructures in each of said circular rings is a rounded value; the rounding value is a pairThe value obtained by rounding down, r i Denote the radius of the ith annular ring counted radially outward, T denotes the spacing of two adjacent nanostructures in the annular ring.
7. A spectrometer, comprising: a spectroscopic system, an area array detector and a connecting member according to any one of claims 1 to 6; the upper surface of the connecting component is provided with the light splitting system, and the lower surface of the connecting component is provided with the area array detector.
8. The spectrometer of claim 7, wherein the spectroscopic system comprises a plurality of super-atomic units arranged on the upper surface of the support member in an array, each super-atomic unit corresponding to a set resonant wavelength value, the super-atomic unit comprising a plurality of identical super-atoms; the super atomic unit is used for enabling the light transmittance of the set resonance wavelength to be different from the light transmittance of the non-set resonance wavelength; each nanostructure unit in the connection part corresponds to the super atom unit one by one, and the corresponding nanostructure unit is used for focusing the transmitted light with the set resonance wavelength.
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