CN110376665A

CN110376665A - A kind of super lens and the optical system with it

Info

Publication number: CN110376665A
Application number: CN201910704719.6A
Authority: CN
Inventors: 郝成龙; 仇成伟; 余长源; 徐政基; 董渊; 赵磊
Original assignee: Individual
Current assignee: Shenzhen Metalenx Technology Co Ltd
Priority date: 2019-07-31
Filing date: 2019-07-31
Publication date: 2019-10-25
Anticipated expiration: 2039-07-31
Also published as: CN113466974A; CN110376665B; CN113466974B

Abstract

The present invention provides a kind of super lens and the optical system with it, which includes: substrate, being capable of light transmission；With the nanometer ring structure for being set to substrate surface, nanometer ring structure includes the nano-rings of multiple annular shapes and multiple air central spacers for being formed between multiple nano-rings；The diameter of multiple nano-rings is different, and multiple nano-rings are coaxially distributed；At least partly at least one in the height of air central spacer and width is unequal, so that the light phase of the air central spacer of different location is different, to limit the phase distribution of super lens.The present invention forms super lens by nanostructure such as nanometer ring structure, nanometer rod structure, and, the nanostructure of different location has different light phases, form the super lens for meeting the phase distribution of user demand, compared to existing optical lens, super lens of the invention are small in size, light-weight, solve the problems, such as that optical system minimizes, is light-weighted.

Description

A kind of super lens and the optical system with it

Technical field

The present invention relates to lens art more particularly to a kind of super lens and with its optical system.

Background technique

Optical lens is used as basic component to play in the science such as imaging, accurate measurement and optic communication with industrial circle Vital effect.Traditional optical lens are by serial complicated process systems such as cutting material, polishing surface, finishing polish and plated films It forms.Poly-lens group optical system is formed by multiple traditional optical lenses, this kind of system generally there are several pieces refraction type lens Or reflective lens composition, complete a specific imaging applications, such as infinite distance imaging, image projecting and micro-imaging. However in general, the single camera lens of tradition has volume big and the deficiencies of weight is big.

Summary of the invention

The present invention provides a kind of super lens and the optical system with it.

Specifically, the present invention is achieved through the following technical solutions:

According to the first aspect of the invention, a kind of super lens are provided, the super lens include:

Substrate, being capable of light transmission；

Set on the nanometer ring structure of the substrate surface, the nanometer ring structure includes the nano-rings and shape of multiple annular shapes At multiple air central spacers between the multiple nano-rings；

Wherein, the diameter of multiple nano-rings is different, and multiple nano-rings are coaxially distributed；

At least one in the height and width of at least partly described air central spacer is unequal, so that different location is described The light phase of air central spacer is different, to limit the phase distribution of the super lens.

Optionally, the light phase of the air central spacer is related to the size of the height of the air central spacer and width.

Optionally, the super lens have the phase distribution in infinite distal shaft with off-axis aberration correcting lens.

Optionally, the air central spacer includes the air central spacer of multistage height.

Optionally, the nanometer ring structure be equivalent to multilayer with single step height air central spacer nanometer ring structure along Short transverse is superimposed to be formed.

Optionally, the nanometer ring structure be equivalent to two layers of nanometer ring structure with single step height air central spacer along Short transverse is superimposed to be formed, and the position of the air central spacer meets:

max c₁I_on-axis(z₀)+c₂I_off-axis(z₀)

s.t.a_m+1-a_m>l

b_m+1-b_m>l

|Ea_m-Eb_n|>d_F

a₁>d,b₁>d

NA≥NA_min

Wherein, I_on-axis(z₀): focus light intensity degree figure of the incident light under 0 visual field；

I_off-axis(z₀): focus light intensity degree figure of the incident light in the case where maximum half field-of-view is incident；

z₀: position of the focus on optical axis；

c₁、c₂: weight factor；

a_m: the center of m grades of first layer air central spacers, between m=present air central spacer and the concentric circles center of circle Air central spacer quantity+1；

b_m: the center of m grades of second layer air central spacers；

L: the minimum spacing between the adjacent air ring interval of each layer；

D: the least radius of the center of first layer air central spacer and second layer air central spacer；

Ea_m: the marginal position of m grades of first layer air central spacers；

Eb_n: the marginal position of n-th grade of second layer air central spacer, n=present air central spacer and the concentric circles center of circle it Between air central spacer quantity+1；

d_F: minimum process precision；

NA: the numerical aperture of the super lens；

NA_min: minimum value aperture.

Optionally, the material of the nanometer ring structure is one of following:

Photoresist, quartz glass, silicon nitride, titanium oxide, monocrystalline silicon.

According to the second aspect of the invention, a kind of optical system is provided, the optical system includes:

Mounting rack；

Super lens described in first aspect, the super lens are mounted on the mounting rack.

According to the third aspect of the invention we, a kind of super lens are provided, the super lens include:

Substrate, being capable of light transmission；With

The multiple nanometers of rod structures set on the same surface of the substrate；

Wherein, multiple nanometer rod structures are in array-like arrangement, and multiple nanometer rod structures include negative nano-pillar knot At least one of structure and hollow nanometer rod structure, the negative nanometer rod structure include the first cylinder, the cross of first cylinder Section is regular hexagon, and first cylinder has columned first hollow portion that bottom is extended to from its top；In described Empty nanometer rod structure includes the first cylindrical body, and first cylindrical body, which has from its top, extends to columned the second of bottom Hollow portion；

The light phase of the nanometer rod structure of different location is different, to limit the phase distribution of the super lens, and not It is different with the group delay of the nano-pillar of position, to limit the color aberration characteristics of the super lens.

Optionally, the nanometer rod structure further includes positive nanometer rod structure, and the positive nanometer rod structure includes the second cylinder Body.

Optionally, the light phase of the positive nanometer rod structure and the negative nanometer rod structure and corresponding nanometer rod structure Height it is related to the size of diameter；

The light phase of the hollow nanometer rod structure is related to the inner and outer diameter size of the hollow nanometer rod structure.

Optionally, for each nanometer of rod structure, surround this nanometer of rod structure other nano-pillar structures be located at it is same just On the different vertex of hexagon, and this nanometer of rod structure is set to the center of corresponding regular hexagon.

Optionally, phase distribution of the super lens with the positive negative lens of no spherical aberration or axicon lens.

Optionally, the lens surface light phase of the super lens meets:

K is wave number, and r is distance of each nanometer rod structure to substrate center, and f is the focal length of super lens.

Optionally, the material of the nanometer rod structure is one of following:

According to the fourth aspect of the invention, a kind of optical system is provided, the optical system includes:

Super lens described at least two third aspect；

Wherein, at least two super lens interval setting.

Optionally, the phase distribution with group delay of all super lens are all different, one of them described super lens is configured At the aberration for correcting other super lens, the aberration includes spherical aberration, coma, astigmatism, the curvature of field, distortion, chromatism of position and multiplying power color At least one of difference.

Optionally, the optical system further include:

Optical module, the optical module and the super lens interval are arranged, and the optical module includes lens, described Mirror is different from the super lens.

Optionally, the lens are refractors.

Optionally, the refractor has the positive negative lens of spherical surface, infinity correction lens, Schmidt corrector or aspheric The phase distribution and group delay of face lens are distributed.

Optionally, multiple super lens are arranged to correct the aberration of the refractor, the aberration include spherical aberration, At least one of coma, astigmatism, the curvature of field, distortion, chromatism of position and ratio chromatism,.

By the above technical solution provided in an embodiment of the present invention as it can be seen that the present invention by nanostructure such as nanometer ring structure, Nanometer rod structure forms super lens, also, nanostructure has different light phases in different location, and formation meets user demand Phase distribution super lens, compare existing optical lens, super lens of the invention are small in size, light-weight, solve optics System compact, light-weighted problem.

It should be understood that above general description and following detailed description be only it is exemplary and explanatory, not It can the limitation present invention.

Detailed description of the invention

The drawings herein are incorporated into the specification and forms part of this specification, and shows and meets implementation of the invention Example, and be used to explain the principle of the present invention together with specification.

Figure 1A is the schematic cross-section of the super lens in the embodiment of the present invention one；

Figure 1B is the top view of the super lens in the embodiment of the present invention one；

Fig. 1 C is the focusing schematic diagram of the super lens in the embodiment of the present invention one；

Fig. 1 D is the focusing schematic diagram of plano-convex lens in the prior art；

Fig. 1 E is that one of the embodiment of the present invention one super lens merge two single layer nanometer ring structures as one with two The schematic diagram of the nanometer ring structure of rank height；

Fig. 1 F is that another super lens two single layer nanometer ring structures of fusion in the embodiment of the present invention one have for one The schematic diagram of the nanometer ring structure of second order height；

Fig. 1 G is that another super lens two single layer nanometer ring structures of fusion in the embodiment of the present invention one have for one The schematic diagram of the nanometer ring structure of second order height；

Fig. 1 H is the 3 D-printing write field precedence diagram of the super lens in the embodiment of the present invention one；

Fig. 2 is in the embodiment of the present invention one for measuring the experimental provision schematic diagram of the focal spot size of super lens.

Fig. 3 A is the focal spot intensity measurement figure of 0 ° of visual field of super lens in the embodiment of the present invention one with 100 μm of focal lengths；

Fig. 3 B is the focal spot intensity measurement figure of 5 ° of visual fields of super lens in the embodiment of the present invention one with 100 μm of focal lengths；

Fig. 3 C is the focal spot intensity measurement figure of 10 ° of visual fields of super lens in the embodiment of the present invention one with 100 μm of focal lengths；

Fig. 3 D is the focal spot intensity measurement figure of 0 ° of visual field of spherical aberration correction lens of 100 μm of focal lengths in the prior art；

Fig. 3 E is the focal spot intensity measurement figure of 5 ° of visual fields of spherical aberration correction lens of 100 μm of focal lengths in the prior art；

Fig. 3 F is the focal spot intensity measurement figure of 10 ° of visual fields of spherical aberration correction lens of 100 μm of focal lengths in the prior art；

Fig. 3 G is the focal spot intensity measurement figure of 0 ° of visual field of super lens in the embodiment of the present invention one with 1mm focal length；

Fig. 3 H is the focal spot intensity measurement figure of 8 ° of visual fields of super lens in the embodiment of the present invention one with 1mm focal length；

Fig. 3 I is the focal spot intensity measurement figure of 16 ° of visual fields of super lens in the embodiment of the present invention one with 1mm focal length；

Fig. 3 J is the focal spot intensity measurement figure of 0 ° of visual field of lens of 1mm focal length in the prior art；

Fig. 3 K is the focal spot intensity measurement figure of 8 ° of visual fields of lens of 1mm focal length in the prior art；

Fig. 3 L is the focal spot intensity measurement figure of 16 ° of visual fields of lens of 1mm focal length in the prior art；

Fig. 3 M is super lens modulation transfer function figure shown in Fig. 3 D-3F；

Fig. 3 N is lens modulation transfer function figure shown in Fig. 3 G-3I；

Fig. 4 A is 0 ° of view field imaging figure of resolution ratio target of the super lens in the embodiment of the present invention one with 1mm focal length；

Fig. 4 B is the enlarged view of Fig. 4 A picture centre；

Fig. 4 C is 0 ° of view field imaging figure of resolution ratio target of the lens of 1mm focal length in the prior art；

Fig. 4 D is the enlarged view of Fig. 4 C picture centre；

Fig. 4 E is 16 ° of view field imaging figures of the super lens in the embodiment of the present invention one with 1mm focal length；

Fig. 4 F is 16 ° of view field imaging figures of the lens of 1mm focal length in the prior art；

Fig. 4 G is that the super lens in the embodiment of the present invention one with 1mm focal length are illustrated as the microscopic system of microcobjective Figure；

Fig. 4 H is the resolution ratio target micro-imaging figure of microscopic system shown in Fig. 4 G；

Fig. 4 I is the plumage micro-imaging figure of microscopic system shown in Fig. 4 G；

Fig. 5 A is the schematic diagram of the super lens in the embodiment of the present invention two；

Fig. 5 B is the schematic diagram of the negative nanometer rod structure in the embodiment of the present invention two；

Fig. 5 C is the schematic diagram of the hollow nanometer rod structure in the embodiment of the present invention two；

Fig. 5 D is the schematic diagram of the positive nanometer rod structure in the embodiment of the present invention two；

Fig. 5 E is operation wavelength in the embodiment of the present invention two when being 940nm light phase and nano-pillar radius relationship figure；

Fig. 5 F is operation wavelength in the embodiment of the present invention two when being 550nm light phase and nano-pillar radius relationship figure；

Fig. 5 G is that the bore that the operation wavelength in the embodiment of the present invention two is 940nm is 100 μm, and focal length is 100 μm Super lens phase diagram；

Fig. 5 H is the processing diameter figure of the corresponding nanometer rod structure of super lens of Fig. 5 G；

Fig. 5 I is the corresponding emulation focal spot figure of the super lens of Fig. 5 G；

Fig. 6 A is the two-piece type super lens schematic diagram of optical system that the operation wavelength in the embodiment of the present invention two is 940nm；

Fig. 6 B is the radial phase figure of the first super lens in Fig. 6 A；

Fig. 6 C is the radial phase figure of the second super lens in Fig. 6 A；

Fig. 6 D is the emulation focal spot figure of 0 °, 15 ° and 30 ° incident light rays of super lens optical system shown in Fig. 6 A；

Fig. 6 E is the modulation transmitting analogous diagram of super lens optical system shown in Fig. 6 A；

Fig. 6 F is super lens optical system imaging analogous diagram shown in Fig. 6 A；

Fig. 6 G is that the energy of super lens optical system shown in Fig. 6 A surrounds circle analogous diagram；

Fig. 7 A is the three-chip type super lens schematic diagram of optical system that the operation wavelength in the embodiment of the present invention two is 550nm；

Fig. 7 B is the radial phase figure of the third super lens in Fig. 7 A；

The radial phase figure of the 4th super lens in Fig. 7 C Fig. 7 A；

Fig. 7 D is the radial phase figure of the 5th super lens in Fig. 7 A；

Fig. 7 E is the emulation focal spot figure of 0 °, 15 ° and 30 ° incident light rays of super lens optical system shown in Fig. 7 A；

Fig. 7 F is the modulation transmitting analogous diagram of super lens optical system shown in Fig. 7 A；

Fig. 7 G is super lens optical system imaging analogous diagram shown in Fig. 7 A；

Fig. 7 H is that the energy of super lens optical system shown in Fig. 7 A surrounds circle analogous diagram；

Fig. 8 A is super lens refracting optical members hybrid optical of the work in the embodiment of the present invention two in visible light wave range System schematic；

Fig. 8 B is the 6th super lens radial phase distribution under three kinds of wavelength (400nm, 550nm and 700nm) in Fig. 8 A Figure；

Fig. 8 C is the 7th super lens radial phase distribution under three kinds of wavelength (400nm, 550nm and 700nm) in Fig. 8 A Figure；

Fig. 8 D is 0 °, 15 ° and 30 ° of super lens refracting optical members hybrid optical system shown in Fig. 8 A in 400nm incident light The emulation focal spot figure of convergence；

Fig. 8 E is 0 °, 15 ° and 30 ° of super lens refracting optical members hybrid optical system shown in Fig. 8 A in 550nm incident light The emulation focal spot figure of convergence；

Fig. 8 F is 0 °, 15 ° and 30 ° of super lens refracting optical members hybrid optical system shown in Fig. 8 A in 700nm incident light The emulation focal spot figure of convergence；

Fig. 8 G is modulation transmitting of the super lens refracting optical members hybrid optical system shown in Fig. 8 A under 400nm incident light Function analogous diagram；

Fig. 8 H is modulation transmitting of the super lens refracting optical members hybrid optical system shown in Fig. 8 A under 550nm incident light Function analogous diagram；

Fig. 8 I is modulation transmitting of the super lens refracting optical members hybrid optical system shown in Fig. 8 A under 700nm incident light Function analogous diagram；

Fig. 9 A is the 3 D-printing processing technology schematic diagram in one embodiment of the invention；

Fig. 9 B is the 3 D-printing process flow diagram in one embodiment of the invention.

Appended drawing reference:

100: super lens；1: substrate；2: nanometer ring structure；21: nano-rings；22: air central spacer；3: nanometer rod structure； 31: negative nanometer rod structure；311: the first cylinders；312: the first hollow portions；32: hollow nanometer rod structure；321: the first cylindrical bodies； 322: the second hollow portions；33: positive nanometer rod structure；

210: first light source；220: variable light decay piece；230: filtering system；231: the first lens；232: the second lens； 233: pin hole；240: displacement platform；250: amplification system；251: the first microcobjectives；252: the third lens；253: the first senses Light camera；

310: second light source；320: laser speckle remover；330: the second microcobjectives；340: the four lens；350: the Two photosensitive cameras.

Specific embodiment

Example embodiments are described in detail here, and the example is illustrated in the accompanying drawings.Following description is related to When attached drawing, unless otherwise indicated, the same numbers in different drawings indicate the same or similar elements.Following exemplary embodiment Described in embodiment do not represent all embodiments consistented with the present invention.On the contrary, they be only with it is such as appended The example of device and method being described in detail in claims, some aspects of the invention are consistent.

It is only to be not intended to limit the invention merely for for the purpose of describing particular embodiments in terminology used in the present invention. It is also intended in the present invention and the "an" of singular used in the attached claims, " described " and "the" including majority Form, unless the context clearly indicates other meaning.It is also understood that term "and/or" used herein refers to and wraps It may be combined containing one or more associated any or all of project listed.

It will be appreciated that though various information, but this may be described using term first, second, third, etc. in the present invention A little information should not necessarily be limited by these terms.These terms are only used to for same type of information being distinguished from each other out.For example, not departing from In the case where the scope of the invention, the first information can also be referred to as the second information, and similarly, the second information can also be referred to as One information.Depending on context, word as used in this " if " can be construed to " ... when " or " when ... When " or " in response to determination ".In the absence of conflict, the feature in following embodiment and embodiment can be mutual group It closes.

There is assemblings to alignment request height, multi-disc lens corrects aberrations luminous energy for the optical system being made of multiple conventional lenses Utilization rate decline, volume weight is huge and the various aspects such as whole system is complicated are insufficient.Although flat diffraction lenses are to a certain extent Volume and weight can be reduced, but the cross section structure of wavelength dimension becomes difficult accurate phase distribution, to cannot reach To high-resolution requirement.

The super surface rapid rising of optics simultaneously becomes a kind of realization miniaturization, planarizes optical main way.The super table of optics Face has illustrated axicon lens, balzed grating, polarizing film, holographic dry plate and planar lens based on super surface.Continuous 2 π phase The super surface of position variation makes single layer aplanasia super lens become a reality.At the same time, the double-deck super surface super lens correct institute Some monochromatic aberrations.

The embodiment of the invention provides a kind of super lens, super lens include capableing of the substrate of light transmission and set on substrate surface Nanometer ring structure, the nanometer ring structure include the nano-rings of multiple annular shapes and are formed in more between the multiple nano-rings A air central spacer；Wherein, the diameter of multiple nano-rings is different, and multiple nano-rings are coaxially distributed；At least partly air At least one in the height and width of central spacer is unequal, and the light phase of the air central spacer of different location is different, super to limit The phase distribution of lens.

The embodiment of the present invention also provides another super lens, and super lens include being capable of transparent substrates and to be set to substrate same The multiple nanometers of rod structures on surface；Wherein, multiple nanometers of rod structures are in array-like arrangement, and multiple nanometers of rod structures include negative nanometer At least one of rod structure and hollow nanometer rod structure, negative nanometer rod structure include the first cylinder, the cross section of the first cylinder For regular hexagon, the first cylinder has columned first hollow portion that bottom is extended to from its top；Hollow nanometer rod structure Including the first cylindrical body, the first cylindrical body has columned second hollow portion that bottom is extended to from its top；Different location Nanometer rod structure light phase it is different, to limit the phase distribution of super lens, and the group delay of the nano-pillar of different location is not Together, to limit the color aberration characteristics of super lens.

The present invention forms super lens, also, nanostructure by the nanostructures such as nanometer ring structure or nanometer rod structure Different location has different light phases, forms the super lens for meeting the phase distribution of user demand, compares existing optical lens Mirror, super lens of the invention are small in size, light-weight, solve the problems, such as that optical system minimizes, is light-weighted.

In the following, the super lens respectively to above two type are described in detail.

Embodiment one

Referring to Figure 1A and Figure 1B, the super lens 100 of the present embodiment include substrate 1 and the nanometer ring structure set on substrate surface 2, this nanometer of ring structure 2 includes the nano-rings 21 of multiple annular shapes and multiple air rings for being formed between multiple nano-rings 21 Interval 22.Wherein, substrate 1 can light transmission, i.e. substrate 1 is the material production for capableing of light transmission, and the material of substrate 1 can be quartzy glass Glass is also possible to other materials for capableing of light transmission.In addition, the thickness of substrate 1 can design as needed, and optionally, the thickness of substrate 1 Degree be more than or equal to 0.17mm (unit: millimeter) and be less than or equal to 2mm, for example, the thickness of substrate 1 can for 0.17mm, 0.18mm, 0.19mm, 2mm etc..

The diameter of multiple nano-rings 21 is different, and multiple nano-rings 21 are coaxially distributed.It should be noted that this implementation In example, the diameter of nano-rings 21 can refer to the internal diameter of nano-rings 21, can also refer to the outer diameter of nano-rings 21, above-mentioned multiple nano-rings 21 diameter is different include: multiple nano-rings 21 internal diameter it is different, the outer diameter of multiple nano-rings 21 is also different. Correspondingly, multiple air central spacers 22 are also annular in shape, and the diameter of multiple air central spacers 22 is different, the present embodiment Multiple air central spacers 22 are also coaxially to be distributed.Wherein, the diameter of air central spacer 22 can refer to the interior of air central spacer 22 Diameter can also refer to the outer diameter of air central spacer 22, and the different diameter of above-mentioned multiple air central spacers 22 includes: multiple air The internal diameter of central spacer 22 is different, and the outer diameter of multiple air central spacers 22 is also different.

In the present embodiment, at least one is unequal at least partly in the height of air central spacer 22 and width, so that not It is different with the light phase of the air interannular of position, so that the different location of nanometer ring structure 2 has different light phases, with Limit the phase distribution of super lens 100.Optionally, in certain embodiments, at least partly height of air central spacer 22 not phase Deng；In certain embodiments, the width of at least partly air central spacer 22 is unequal；In certain embodiments, at least partly empty The height at compression ring interval 22 is unequal, and the width of at least partly air central spacer 22 is unequal.It should be noted that air ring The height at interval 22 refers to the depth of the air central spacer 22, and wherein the depth of air central spacer 22 is along perpendicular to air ring Radial, the width, that is, width of air central spacer 22 radially of air central spacer 22, the width size of air central spacer 22 is should The absolute value of the difference of the outer diameter and inner diameter of air central spacer 22.In addition, the height and width of air central spacer 22 are nanoscale Other size.Different strategies specifically can be used, so that the light phase of the air central spacer 22 of different location is different, for example, optional , the light phase of air central spacer 22 is related to the size of the height of the air central spacer 22 and width；Optionally, air interannular Light phase every 22 is related to the size of the height of the air central spacer 22 or width.By the air central spacer 22 of different location Height and/or width be sized and dimensioned to it is unequal so that the light phase of the nanometer ring structure 2 of different location is different.

It should be noted that in the embodiment of the present invention, the light phase phase of the light phase and air central spacer 22 of nano-rings 21 Corresponding, the light phase of the nano-rings 21 of different location is also different, to limit the phase distribution of super lens 100.

In the present embodiment, nanometer ring structure 2 is integral structure, nanometer ring structure 2 with a thickness of micron level, therefore, Nanometer ring structure 2 on substrate 1 is similar to a planar structure.Optionally, the thickness of nanometer ring structure 2 is less than or equal to 5 μm of (lists Position: micron), such as 0.5 μm, 1 μm, 1.5 μm, 2 μm, 2.5 μm, 3 μm, 3.5 μm, 4 μm, 4.5 μm, 5 μm.Optionally, nanometer The thickness of ring structure 2 and the operation wavelength size of super lens 100 are the same order of magnitude.It is further to note that the present invention is real It applies in example, the thickness of super lens 100 refers to the thickness of nanometer ring structure 2, in fact, substrate 1 is only to support nanometer ring structure 2 Support construction will not have an impact the optical property of super lens 100.

The material of nanometer ring structure 2 can be one of following: photoresist, quartz glass, silicon nitride, titanium oxide, list Crystal silicon；Certainly, the material of nanometer ring structure 2 may be other.

It is to be appreciated that the material of substrate 1 can be identical as the material of nano-rings, it can not also be identical.

In certain embodiments, such as Fig. 1 C, the super lens 100 using the production of above-mentioned nanometer ring structure 2 have infinity school Positive aberration focusing/imaging function, i.e. super lens 100 have the phase distribution in infinite distal shaft with off-axis aberration correcting lens, On 100 axis of super lens imaging without spherical aberration, extra-axial imagery is without off-axis aberration such as comas, optionally, the super lens 100 with a thickness of 1 μm, 0.633 μm of same order of magnitude of operation wavelength with the super lens 100.As shown in figure iD, (refraction is saturating for existing refractor Mirror with a thickness of 0.8mm) on axis imaging have spherical aberration, extra-axial imagery has coma, and lens thickness is much larger than wavelength in millimeter rank Magnitude.

Optionally, the air central spacer of air central spacer 22 including multistage height, i.e. air central spacer 22 have it is multiple not Same height, if the 3. capable air central spacer 22 of Fig. 1 E has two rank height, certainly, air central spacer 22 can also have three ranks Highly, quadravalence height or other rank height.Wherein, the air central spacer 22 of n rank height, the light phase of air central spacer 22 are (n + 1) rank light phase, that is, air central spacer 22 has n different height, then air central spacer 22 forms (n+1) a difference The light phase of size.By taking the 3. capable air central spacer 22 of Fig. 1 E as an example, height > air of the air central spacer 22 in region 221 Central spacer 22 is in the height in region 222, and air central spacer, therefore region 221, region 222 and region is not present in region 223 223 are respectively provided with different light phases, i.e. the air central spacer 22 of the 3. two rank height of row of 1E forms three rank light phases.

Optionally, nanometer ring structure 2 is equivalent to nanometer ring structure of the multilayer with single step height air central spacer along height Degree direction is superimposed to be formed, that is, there is multilayer the nanometer ring structure of single step height air central spacer to be superimposed to be formed along short transverse The nanometer ring structure 2 of super lens.

As a kind of feasible implementation, nanometer ring structure 2, which is equivalent to two layers, has single step height air central spacer Nanometer ring structure is superimposed to be formed along short transverse, optionally, two layers of nano-rings knot with single step height air central spacer 22 The nanometer ring structure that structure merges may include the air central spacer of second order height and/or single step height is air central spacer, Such as Fig. 1 E, 1F and 1G, wherein the sectional drawing of first layer nanometer ring structure is 1. going for Fig. 1 E, and second layer nanometer ring structure is cut Face figure is 2. going for Fig. 1 E, the sectional drawing of the single layer nanometer ring structure with second order height after the 3. action amalgamation of Fig. 1 E.Folded Added-time, for the air central spacer that two layers of nano-rings structure height direction is overlapped, the height size of intersection is two layers nanometer The sum of the height size of the air central spacer of ring structure, such as 1. going in Fig. 1 E and 2. capable superposition；For two layers of nano-rings knot The air central spacer that structure short transverse is not overlapped, height size are constant.

To realize 100 function of super lens such as example in Fig. 1 C, two layers of nano-rings with single step height air central spacer Structure is respectively first layer nanometer ring structure and second layer nanometer ring structure, and the air central spacer of first layer nanometer ring structure is claimed For first layer air central spacer, the air central spacer of second layer nanometer ring structure is known as the second air central spacer.It is fused The position of air central spacer should meet following optimize and constrain:

In formula (1), I_on-axis(z₀) it is focus light intensity degree figure of the incident light under 0 visual field；I_off-axis(z₀) it is incident light Focus light intensity degree figure in the case where maximum half field-of-view is incident；Light intensity I can be determined based on Rayleigh-Suo Mofei diffraction principle；z₀For Position of the focus on optical axis；c₁And c₂For weight factor, optionally, c₁=c₂=1, certainly, c₁And c₂It may be alternatively provided as other Numerical value；a_mIt is the center of m grades of first layer air central spacers, wherein m=present air central spacer and concentric circles (multiple skies The concentric circles at compression ring interval) air central spacer between the center of circle quantity+1, it is to be understood that the air ring near the center of circle Between be divided into the first order, outside by the center of circle, the series where air central spacer successively increases；b_mIt is m grades of second layer air interannulars Every center, it should be noted that the present invention in, the center of air central spacer refers to the outer diameter side of air central spacer The position of the center ring of edge and inner diameter edge；L is the minimum spacing between the adjacent air ring interval of each layer, optionally, l= 800nm (unit: nanometer), certain l may be set to be other numerical value；D is first layer air central spacer and the second air interannular Every center least radius, optionally, d=1.4 μm, certainly, d may be set to be other numerical value；Ea_mIt is m grades First layer air ring interval edge position (including radial outer edge and inner diameter edge)；Eb_nIt is n-th grade of second layer air central spacer Marginal position (including radial outer edge and inner diameter edge), n=present air central spacer and concentric circles (multiple air central spacers it is same Heart circle) air central spacer between the center of circle quantity+1；d_FIt is minimum process precision, that is, processes the super lens 100 of the present embodiment The minimum process precision that can achieve when processing air central spacer 22 of equipment optionally existed using electron beam lithography Nanometer ring structure 2, d is formed on substrate 1_FFor 50nm；Optionally, nano-rings knot is formed on substrate 1 using three-dimensional printing technology Structure 2, d_FFor 200nm；NA is the numerical aperture of super lens； NA_minIt is minimum value aperture, for 100 μm of super lens 100, NA_minIt is 0.75, for the super lens 100, NA of 1mm_minIt is 0.45.

It is to be appreciated that the above-mentioned two layers nanometer ring structure with single step height air central spacer is superimposed along short transverse The nanometer ring structure 2 of formation is only exemplary, it is also an option that two layers or more the nanometer with single step height air central spacer Ring structure is superimposed to form nanometer ring structure 2 along short transverse, herein a different citing.

When processing, directly processing forms fused nanometer ring structure 2.

Optionally, in embodiments of the present invention, the width of all nano-rings 21 is 400nm, and certainly, nano-rings 21 can also To select other width.

Optionally, when processing super lens, nanostructure 2 is formed on substrate 1 first, then use laser or 3 D-printing Technology processes air central spacer 22 in nanostructure 2, to form nano-rings 21 and air central spacer 22.

In some embodiments, super lens 100 are process by three-dimensional printing technology.As shown in fig. 1H, entire super Mirror 100 is divided into multiple write fields (m row, n column) and sequentially prints and complete from (1,1) to (m, n) by " Z " font, when entire printing is processed Between it is directly proportional to write field number, within a few minutes to a few hours.It should be understood that write field sequence can choose other forms.

Fig. 2 is a kind of for measuring the Experimental equipment of above-mentioned 100 focal spot size of super lens, lines with the arrow in Fig. 2 Indicate light.In some embodiments of the invention, He-Ne laser is used as the first light source 210 of test, can be changed light decay piece 220 for adjusting the incident intensity of entire test macro.The filtering that first lens 231, the second lens 232 and pin hole 233 form System 230 realizes space filtering, pin hole 233 be located at the first lens 231 and the second lens 232 and public focus go out, while the The focal length f1 of one lens 231 and the focal length f2 of the second lens 232 may be the same or different.The effect of this spatial filtering system 230 is Guarantee that the hot spot being incident on tested super lens 100 is uniform.Super lens 100 are located on the displacement platform 240 of xy twocouese, In, y displacement guarantees that incident light is radiated on super lens 100 for adjusting 100 position of super lens；X displacement is for measuring super lens 100 intensity distribution in the direction of the optical axis.First microcobjective 251 and the third lens 252 (pipe lens) and the first sense The amplification system 250 that light camera 253 forms can capture spot intensity of the tested super lens 100 at incidence angles degree θ Pattern, above-mentioned first photosensitive camera 253 can be CCD camera, or other kinds of first photosensitive camera 253.It should Understand, in some instances, other lasers can be selected in first light source 210, as visible light wave range super continuous laser or The laser of person's infrared band.It should also be understood that spatial filtering system 230 is in certain realities due to good light source characteristic It applies in example and is not present.In addition, displacement platform 240 also could alternatively be the mobile platform of more direction.First lens 231, second Lens 232 and the third lens 252 are ordinary lens.

It in 633nm, numerical aperture 0.75, lens thickness is 240 nm, focal length that Fig. 3 A to Fig. 3 C, which is with operation wavelength, 100 μm, the super lens 100 that full filed is 20 ° be respectively 0 °, 5 ° and 10 ° in incidence angle θ under focal spot test result figure.0 ° enters When penetrating, the halfwidth degree of focal spot is 410nm, is slightly less than the halfwidth of its diffraction limitedWherein λ is wave Long, NA is the numerical aperture of super lens 100.Fig. 3 D to Fig. 3 E is that have operation wavelength in 633nm, the ball that numerical aperture is 0.75 Difference corrects focal spot simulation result diagram of the lens respectively in the case where incidence angle θ is 0 °, 5 ° and 10 °.Comparison diagram 3B and Fig. 3 E, Fig. 3 C respectively With Fig. 3 F, it is known that 5 ° with 10 ° of incidence when, compared to spherical aberration correction lens, the off-axis aberration of the super lens 100 of the present embodiment is obtained Compensation and correction well.

It in 633nm, numerical aperture 0.45, lens thickness is 1000 nm, focal length that Fig. 3 G to Fig. 3 I, which is with operation wavelength, For 1mm, full filed be 32 ° super lens 100 be respectively 0 °, 8 ° and 16 ° in incidence angle under focal spot test result figure.0 ° of incidence When, the halfwidth of focal spot is 720nm, substantially with the halfwidth of its diffraction limitedQuite.When 8 ° of incidence, axis Outer aberration is preferably compensated and is corrected, and the halfwidth degree of focal spot is 900nm；When 16 ° of incidence, off-axis aberration obtains certain Compensation and correction, the halfwidth degree of focal spot are 1300nm.

In order to compare the performance of super lens 100 Yu existing refractor, the folding of identical numerical aperture and focal length is also had recorded Penetrate focal spot intensity of the lens under identical incidence angle.Fig. 3 J to Fig. 3 L is that existing refractor is respectively 0 °, 8 ° in incidence angle With the focal spot test result figure under 16 °.Super lens 100 and existing refractor are compared, existing refractor compares super lens 100 is thicker and price is more expensive；Compare focal spot figure, super lens 100 incident light rays can be obtained it is smaller, to obtain higher point Resolution.

Fig. 3 M and Fig. 3 N is the super lens 100 of the embodiment of the present invention and the modulation transfer function of existing refractor respectively (Modulation Transfer Function, abbreviation MTF) figure；Wherein solid line adds asterisk curve to be meridian direction modulation transmitting Function, only asterisk curve is sagitta of arc direction modulation transfer function.The modulation for comparing super lens 100 and existing refractor is transmitted Functional arrangement, the more existing refractor of the identical incidence angle of 100 identical frequency of super lens has better contrast, to confirm super Mirror 100 has better resolution ratio than existing refractor.

Fig. 4 A and Fig. 4 B are respectively shown is in 633nm, numerical aperture 0.45, lens thickness with operation wavelength 1000nm, focal length 1mm, the 0 ° of view field imaging figure of resolution ratio target for the super lens 100 that full filed is 32 ° and its center amplification Figure.In order to compare the actual imaging performance difference of existing refractor Yu super lens 100, Fig. 4 C and Fig. 4 D respectively show identical Numerical aperture, focal length existing refractor 0 ° of view field imaging figure of resolution ratio target and its center enlarged drawing.Compare image It is found that the image quality of super lens 100 is better than existing refractor image quality in the case where 0 ° of view field imaging.Fig. 4 E and figure 4F is super lens 100 and 16 ° of view field imaging figures of existing refractor respectively, and comparison image is it is found that the case where 16 ° of view field imagings Under, the image quality of super lens 100 is also better than existing refractor image quality.

It is noted that above-mentioned super lens 100 can be applied in optical system.The embodiment of the present invention also provides one kind Optical system, optical system include: mounting rack and above-mentioned super lens 100, and super lens 100 are mounted on mounting rack.

Fig. 4 G illustrates a kind of optical system using above-mentioned super lens 100.

Specifically, Fig. 4 G illustrate operation wavelength 633nm, numerical aperture 0.45, lens thickness 1000nm, The micro imaging system schematic diagram for the super lens 100 that focal length is 1mm, full filed is 32 °, lines with the arrow indicate to close in Fig. 4 G System, wherein after such as He-Ne laser of second light source 310 plus laser speckle remover 320 is for removing laser speckle.High magnification Two microcobjectives 330 are used for high intensity illumination Imaged samples, super lens 100 and the 4th lens 340 with focal length f=25.4mm (can be pipe lens or other ordinary lens) composition 100 microscope of super lens, the second photosensitive camera 350 are located on pipe lens focal plane For recording the intensified image of sample.It should be understood that in some instances, other lasers can be selected in second light source 310, such as The super continuous laser of visible light wave range or the laser of infrared band.

Fig. 4 H be target the micro imaging system as shown in Fig. 4 G at intensified image, minimum line is to (single line in figure It is 2.2 μm wide) it differentiates very well, to illustrate this resolution ratio of the super lens 100 at least better than 2.2 μm；Image length and width are 275 μm of x 206 μm, so that having corresponded to micro imaging system visual field is at least 206 μm of 275 μm of x.Fig. 4 I is plumage sample, it is seen that plumage Pinnule and plumage sprig in hair is high-visible, so that illustrating above-mentioned micro imaging system can be used for practical micro-imaging.

Embodiment two

Referring to Fig. 5 A, second embodiment of the present invention provides a kind of super lens, which includes substrate 1 and nanometer rod structure 3. Wherein, substrate 1 can light transmission, i.e. substrate 1 is the material production for capableing of light transmission, and the material of substrate 1 can be quartz glass, It can be other materials for capableing of light transmission.In addition, the thickness of substrate 1 can design as needed, optionally, the thickness of substrate 1 is big In be equal to 0.17mm (unit: millimeter) and be less than or equal to 2mm, for example, the thickness of substrate 1 can for 0.17mm, 0.18mm, 0.19mm, 2mm etc..

Nanometer rod structure 3 includes multiple, and multiple nanometers of rod structures 3 are set to the same surface of substrate 1.It is more in the present embodiment A nanometer of rod structure 3 is in array-like arrangement.Further, multiple nanometers of rod structures 3 include negative nanometer rod structure 31 and hollow receive At least one of rice rod structure 32.As shown in Figure 5 B, negative nanometer rod structure 31 includes the first cylinder 311, the first cylinder 311 Cross section is regular hexagon, and the first cylinder 311 has columned first hollow portion 312 that bottom is extended to from its top.It is negative Nanometer rod structure 31 has a height H in a z-direction, range in 300nm between 1500nm, as H can be set to 300nm, 400nm、 500nm、600nm、700nm、800nm、900nm、1000nm、1100nm、1200nm、1300nm、1400nm、 1500nm etc.；Meanwhile negative nanometer rod structure 31 has its range of diameter of section d in 40nm between 400nm in an x-y plane, Such as d can be set to 40nm, 50nm, 150nm, 200nm, 250nm, 300nm, 350nm, 400nm.As shown in Figure 5 C, in Empty nanometer rod structure 32 includes the first cylindrical body 321, and the first cylindrical body 321, which has from its top, extends to the columned of bottom Second hollow portion 322.Hollow nanometer rod structure 32 has a height H in a z-direction, range in 300nm between 1500nm, such as H Can be set to 300nm, 400nm, 500nm, 600nm, 700nm, 800nm, 900nm, 1000nm, 1100nm, 1200nm, 1300nm, 1400nm, 1500nm etc.；Meanwhile hollow nanometer rod structure 32 has section overall diameter d in an x-y plane₁With it is interior straight Diameter d₂, d₁-d₂Range in 40nm between 400nm, such as d₁-d₂Can be set to 40nm, 50nm, 150nm, 200nm, 250nm, 300nm, 350nm, 400nm etc..

In certain embodiments, super lens are by the multiple negative nano-pillars being in array-like arrangement set on the same surface of substrate 1 Structure 31 forms；In certain embodiments, super lens by be set to the same surface of substrate 1 be in array-like arrangement multiple hollow receive Rice rod structure 32 forms；In certain embodiments, super lens are multiple by being set to being in array-like arrangement for the same surface of substrate 1 Negative nano-pillar and multiple hollow nanometer rod structures 32 form, and in the present embodiment, the surface of substrate 1 is divided into multiple regions, same area Same type of nanometer rod structure 3 is arranged in domain.

The negative nanometer rod structure 31 and hollow nanometer rod structure 32 of the present embodiment are axially symmetric structure, due to nano-pillar knot The circular symmetry of structure 3, this nanometer of rod structure 3 are insensitive to the polarizability of incident light.

In certain embodiments, nanometer rod structure 3 further includes positive nanometer rod structure 33, referring to Fig. 5 D, positive nanometer rod structure 33 include the second cylindrical body, which is solid construction, and the positive nanometer rod structure 33 of the present embodiment is also axial symmetry knot Structure.Positive nanometer rod structure 33 has a height H in a z-direction, range in 300 nm between 1500nm, as H can be set to 300nm、400nm、500nm、600nm、700nm、 800nm、900nm、1000nm、1100nm、1200nm、1300nm、 1400nm, 1500nm etc.；Meanwhile positive nanometer rod structure 33 has a diameter of section d in an x-y plane, range 40nm extremely Between 400nm, such as d can be set to 40nm, 50nm, 150nm, 200nm, 250nm, 300nm, 350nm, 400nm.

Optionally, super lens by be set to the same surface of substrate 1 the multiple negative nano-pillars being in array-like arrangement and it is multiple just Nanometer rod structure 33 forms；Optionally, super lens are by the multiple positive nano-pillars being in array-like arrangement set on the same surface of substrate 1 It is formed with multiple hollow nanometer rod structures 32；Optionally, super lens are more by being set to being in array-like arrangement for the same surface of substrate 1 A negative nano-pillar, multiple positive nanometer rod structures 33 and multiple hollow nanometer rod structures 32 form.It should be noted that working as super lens When including different types of nanometer rod structure 3, the surface of substrate 1 is divided into multiple regions, and the same area setting is same type of to be received Rice rod structure 3.

In addition, in the present embodiment, the light phase of the nanometer rod structure 3 of different location is different, to limit the phase of super lens Bit distribution, and the group delay of the nano-pillar of different location is different, to limit the color aberration characteristics of super lens.It specifically can be used different Strategy, so that the light phase of the nanometer rod structure 3 of different location is different, to limit the phase distribution of super lens, and different location Nano-pillar group delay it is different, for example, positive nanometer rod structure 33 and negative nanometer rod structure 31 in one of the embodiments, Light phase it is related to the size of the height of corresponding nanometer rod structure 3 and diameter, that is, the light phase of positive nanometer rod structure 33 It is related to the size of the height of the positive nanometer rod structure 33 and diameter, the light phase of negative nanometer rod structure 31 and the negative nano-pillar knot The height of structure 31 and the size of diameter are related.Wherein, the height of positive nanometer rod structure 33 is that the height of the second cylindrical body (is schemed H in 5D), the diameter of positive nanometer rod structure 33 is the diameter of the second cylindrical body (i.e. d in Fig. 5 D)；Negative nanometer rod structure 31 height is the height (H in Fig. 5 B) of the first cylinder 311, and the width of negative nanometer rod structure 31 is the first cylinder 311 On the first hollow portion 312 diameter (d in Fig. 5 B).The light phase of hollow nanometer rod structure 32 and the hollow nano-pillar knot The inner and outer diameter size of structure 32 is related, wherein the height of hollow nanometer rod structure 32 be the height of the first cylindrical body 321 (i.e. H in Fig. 5 C), the diameter of hollow nanometer rod structure 32 includes diameter (the i.e. d in Fig. 5 C of the first cylindrical body 321₁) and the Diameter (the d in Fig. 5 C of the second hollow portion 322 on one cylindrical body 321₂).In other embodiments, the nanometer of different location Rod structure 3 is unlike material, so that the light phase of the nanometer rod structure 3 of different location is different.

Other nanometer of rod structure 3 of this nanometer of rod structure 3 is surrounded for each nanometer of rod structure 3 referring again to Fig. 1 On the different vertex of same regular hexagon, this nanometer of rod structure 3 is set to the center of corresponding regular hexagon, such Array arrangement, the minimum number of the nanometer rod structure 3 of the super lens of formation, the performance for the super lens being formed simultaneously, which also complies with, to be needed It asks；Certainly, in other embodiments, multiple nano-pillars can also arrange in other array configurations.

In the present embodiment, multiple nanometers of rod structures 3 are formed integrally-built with a thickness of micron level, therefore, on substrate 1 Nanometer rod structure 3 be similar to a planar structure.Optionally, the integrally-built thickness that multiple nanometers of rod structures 3 are formed is less than Equal to 5 μm (unit: micron), such as 0.15 μm, 0.5 μm, 1 μm, 1.5 μm, 2 μm, 2.5 μm, 3 μm, 3.5 μm, 4 μm, 4.5 μm, 5 μ M etc..Optionally, the operation wavelength size of multiple nanometers of rod structures 3 are formed integrally-built thickness and super lens is same The order of magnitude.It is further to note that the thickness of super lens refers to what multiple nanometers of rod structures 3 were formed in the embodiment of the present invention Integrally-built thickness, in fact, substrate 1 is only the support construction for supporting multiple nanometers of rod structures 3, to the optical of super lens It can will not have an impact.

The material of nanometer rod structure 3 can be one of following: photoresist, quartz glass, silicon nitride, titanium oxide, list Crystal silicon；Certainly, the material of nanometer rod structure 3 may be other.

In certain embodiments, phase distribution of the super lens with the positive negative lens of no spherical aberration or axicon lens.

Super lens for design work wavelength in 940nm, the selection monocrystalline silicon material of nanometer rod structure 3, and design height Side for 500nm, corresponding regular hexagon basic unit is 404.15nm, and Fig. 5 E gives light phase and nanometer under this 940nm The relationship of the radius of rod structure 3.Super lens for design work wavelength in 550nm, the selection monocrystalline silicon material of nanometer rod structure 3 Matter, and design height is 750nm, the side of corresponding regular hexagon basic unit is 381.05nm, and Fig. 5 F gives under this 550nm The relationship of the radius of light phase and nanometer rod structure 3.

Fig. 5 G be operation wavelength be 940nm, 100 μm of focal length, 100 μm of bore spherical aberration correction nano-pillar super lens lens Surface light phase distribution map, light phaseMeet:

Formula (in 2), k are wave number；R is super lens surface (i.e. 1 surface of substrate) radius, i.e., each nanometer rod structure 3 to base The distance at 1 center of plate；F designs focal length for super lens.

Due to k and f it is known that therefore the light phase size of each nanometer rod structure 3 can be determined according to formula (2), according to respectively receiving After the light phase of rice rod structure 3, further according to the relationship of light phase under 940nm shown in Fig. 5 E and the radius of nanometer rod structure 3, really Determine the radius of the nanometer rod structure 3 of corresponding position.

Fig. 5 H is the 3 diameter manuscript of nanometer rod structure of super lens representated by Fig. 5 G；Fig. 5 I is to surpass representated by Fig. 5 G The analogous diagram of the convergence focal spot of 0 ° of incident light of lens, this figure can be by calculating Rayleigh-Suo Mofei diffraction integral or the letter of its far field Change form Fraunhofer diffraction formula obtains.

It is noted that the super lens of the embodiment of the present invention two can be applicable in optical system, compared to traditional light Lens are learned, the super lens of the embodiment of the present invention two allow optical system to minimize, and super lens optical system is to the polarization of light It is insensitive.

The embodiment of the present invention also provides a kind of optical system, which may include at least two embodiment of the present invention Super lens described in two, wherein at least two super lens intervals setting.

In certain embodiments, the phase distribution with group delay of all super lens are all different, one of super lens quilt It is configured to correct the aberration of other super lens.The aberration includes spherical aberration, coma, astigmatism, the curvature of field, distortion, chromatism of position and multiplying power At least one of color difference, certainly, the aberration may be other.

Fig. 6 A is the super lens schematic diagram of optical system that an operation wavelength is formed in 940nm two panels super lens.This system It is made of the first super lens, the second super lens and image planes.1 material of substrate of first super lens and the second super lens is quartzy glass Glass, thickness are 775 μm.The super surface bore of first super lens is 0.9mm, and 1 rear surface clear aperture of substrate is 1.85mm；The It is the airspace of 2.4mm between one super lens and the second super lens；The super surface bore of second super lens is 7.6mm, substrate 1 Rear surface clear aperture is 6.8mm；Airspace between image planes and the second super lens is 3mm, the high 0.9mm of image planes.

Fig. 6 B and Fig. 6 C is the light phase distribution map of the first super lens and the second super lens respectively, and ordinate is light phase Rad, abscissa are radius (unit: mm).Entire optical system passes through optical design software CODE V 10.2 and Matlab 2016a Joint Designing forms, but not limited to this.Wherein, CODE V 10.2 provides ray tracing, focal spot emulation, modulation transmitting letter Number, energy surround round and imaging simulation；Matlab 2016a realizes interior point method optimization algorithm, to obtain the first super lens It is distributed with the light phase on the second super lens.It should be understood that 1 material of substrate and thickness depending on actual design, can use Other materials and thickness.

Super lens optical system shown in Fig. 6 A can realize that super lens group image space F number is 1.5, back focal length 3mm, and visual field is 60 °, thickness is about 3mm, and service band is the optical characteristics of 940nm, and incident light can be focused in all visual fields The focal spot of diffraction limited size provides high-resolution wide-angle image.

Fig. 6 D is emulation focal spot figure of the super lens optical system shown in Fig. 6 A in 0 °, 15 ° and 30 ° incident light rays, this three A visual field reaches or probably reaches diffraction limit.Fig. 6 E is the modulation transfer function emulation of super lens optical system shown in Fig. 6 A Scheme (R represents meridian direction, and T represents sagitta of arc direction), this three visual fields reach or approach the modulation corresponding to diffraction limit Transmission function.

In order to be more clear the imaging performance of super lens optical system shown in display diagram 6A, Fig. 6 F gives this super lens light The simulation imaging figure of system.By Fig. 6 F it is found that the image imaging clearly of all visual fields, but the distortion under Wide-angle imaging is still In the presence of.

Fig. 6 G illustrates energy of the system shown in Fig. 6 A under 0 °, 15 ° and 30 ° visual field and surrounds circle.By Fig. 6 E it is found that 0 °, Under 15 ° of visual fields, 90% energy is in the circle of 1.5 μ m diameters；Under 30 ° of visual fields, 90% energy is in the circle of 5 μ m diameters.This Energy surrounds circle diagram and illustrates that the capacity usage ratio of this super lens system is high.

Fig. 7 A is the super lens schematic diagram of optical system that an operation wavelength is formed in 550nm three pieces super lens.This system It is made of third super lens, the 4th super lens, the 5th super lens and image planes.Third super lens, the 4th super lens and are five super 1 material of substrate of mirror is quartz glass, and thickness is 170 μm.The super surface bore of third super lens is 0.54mm, substrate 1 Rear surface clear aperture is 0.76mm；It is the airspace of 3.083mm between third super lens and the 4th super lens；Is four super The super surface bore of mirror is 8.6mm, and 1 rear surface clear aperture of substrate is 8.5mm；It is between 4th super lens and the 5th super lens The airspace of 0.1mm；The super surface bore of 5th super lens is 8.4mm, and 1 rear surface clear aperture of substrate is 8.2mm image planes It is 3mm, the high 0.8mm of image planes with the airspace surpassed between the 5th lens.

Fig. 7 B and Fig. 7 D is the light phase distribution map of third super lens, the 4th super lens and the 5th super lens respectively, indulges and sits It is designated as light phase Rad, abscissa is radius (unit: mm).Entire optical system can pass through optical design software CODE V 10.2 form with computational science software Matlab 2016a Joint Designing, but not limited to this.Wherein CODE V 10.2 provides light Trace, focal spot emulation, modulation transfer function, energy surround round and imaging simulation；Matlab 2016a realizes that interior point method optimizes Algorithm, to obtain the light phase distribution on third super lens, the 4th super lens and the 5th super lens.It should be understood that super 1 material of substrate and thickness of lens can use other materials and thickness depending on actual design.

Super lens optical system shown in Fig. 7 A can realize that image space F number is 1.5, and back focal length 3mm, visual field is 60 °, thickness Incident light and can be focused on diffraction limited in all visual fields in the optical signature of 550nm by about 4mm, service band The focal spot of size provides high-resolution wide-angle image.

Fig. 7 E is the emulation focal spot figure of 0 °, 15 ° and 30 ° incident light rays of super lens system shown in Fig. 7 A, this three visual fields Reach or probably reach diffraction limit.Fig. 7 F is the modulation transfer function analogous diagram of super lens optical system shown in Fig. 7 A, (R Meridian direction is represented, T represents sagitta of arc direction), this three visual fields reach or probably reach the biography of modulation corresponding to diffraction limit Delivery function.

In order to be more clear the imaging performance of super lens optical system shown in display diagram 7A, Fig. 7 G gives this super lens light The simulation imaging figure of system.By Fig. 7 G it is found that the image imaging clearly of all visual fields, but the distortion under Wide-angle imaging is still In the presence of.

Energy of the system shown in Fig. 7 H show Fig. 7 A under 0 °, the 15 ° and 30 ° visual field surrounds circle.By Fig. 7 E it is found that 0 °, Under 15 ° of visual fields, 90% energy is in the circle of 3.0 μ m diameters；Under 30 ° of visual fields, 90% energy is in the circle of 6 μ m diameters.This Energy surrounds circle diagram and illustrates that the capacity usage ratio of this super lens system is high.

In certain embodiments, optical system further includes optical module, and the optical module and super lens interval are arranged, this reality The optical module for applying example includes lens, which is different from super lens.The lens may include in refractor and mirror lens One, also may include refractor and mirror lens.

As a kind of feasible implementation, lens include refractor, it can be achieved that super lens refracting optical members mix All wave band incident lights can be focused on the focal spot of about diffraction limited size in all visual fields, provide high score by optical system Resolution wide-angle image.Optionally, the refractor have the positive negative lens of spherical surface, infinity correction lens, Schmidt corrector or The phase distribution and group delay of non-spherical lens are distributed.

Fig. 8 A is a kind of super lens refracting optical members hybrid optical system, and image space F number is 1.5, back focal length 3mm, Visual field is 60 °, and service band covers entire visible spectrum (wavelength between 400nm to 700nm).This system is six super by Mirror, the 7th super lens, refractor, image planes and successively between airspace composition.The base of 6th super lens and the 7th super lens 1 material of plate is selected as quartz glass, and the material of refractor is BK7 glass.6th super lens, the 7th super lens thickness are 170 μm, the center thickness of refractor is 0.16mm, edge thickness 0.517mm.The super surface bore of 6th super lens is 1.04mm, 1 rear surface clear aperture of substrate are 1.26mm；It is the air of 3.187mm between 6th super lens and the 7th super lens Interval；The super surface bore of 7th super lens is 8.6mm, and 1 rear surface clear aperture of substrate is 8.4 mm；7th super lens and folding Penetrate the airspace between lens for 0.1mm；Wherein refractor front surface is plane, and rear surface is that radius is 12.185mm's Spherical surface, clear aperture 7.0mm.Airspace between image planes and refractor is 3mm, the high 0.9mm of image planes.

Fig. 8 B and Fig. 8 C be respectively the 6th super lens and the 7th super lens radial direction light phase and wavelength (400 nm of selection, 550nm and tri- individual wavelengths of 700nm) relational graph, ordinate is light phase (unit: radian Rad), and abscissa is radius (unit: mm).According to the light phase figure under different wave length can the positive nanometer rod structure 33 of corresponding selection, negative nanometer rod structure 31, in Empty formula nanometer rod structure 3.Entire optical system passes through optical design software CODE V 10.2 and computational science software Matlab 2016a Joint Designing forms.Wherein CODE V 10.2 provides refractor curvature estimation, ray tracing, focal spot emulation, modulation Transmission function, energy surround round and imaging simulation；Matlab 2016a realizes interior point method optimization algorithm, to obtain super surface 1, the phase distribution on super surface 2.It should be understood that 1 material of substrate and thickness can use other materials depending on actual design Material and thickness.

Fig. 8 D to Fig. 8 F is 0 °, 15 ° and 30 ° incident light of super lens refracting optical members hybrid optical system shown in Fig. 8 A The convergence at 400nm, 550nm and 700nm emulates focal spot figure to wavelength respectively, this three visual fields reach or probably reach diffraction The limit.Fig. 8 G to Fig. 8 I is that super lens refracting optical members hybrid optical system shown in Fig. 8 A exists respectively in lambda1-wavelength Modulation transfer function analogous diagram under 400nm, 550nm and 700nm, each visual field reaches or probably reaches and spread out under three wavelength The corresponding modulation transfer function of emitter-base bandgap grading limit.

Further alternative, multiple super lens are arranged to the aberration of correction of refractive optical module.The aberration may include At least one of spherical aberration, coma, astigmatism, the curvature of field, distortion, chromatism of position and ratio chromatism, also may include other.

Above-described embodiment one and the super lens of embodiment two solve the problems, such as that optical system miniaturization is light-weighted, and provide It is suitable for the picture quality of business, industry and research application.Thus, above-mentioned super lens and optical system can be in micro- light Learn, imaging and spectroscopy and other with having a wide range of applications on the way, for example, mobile phone camera, safety monitoring pop one's head in, are micro- Mirror, virtual reality projecting lens and augmented reality projecting lens etc..In addition to this, this kind of super lens can by photoetching technique or The processing of person's three-dimensional printing technology, and this processing technology is compatible with large-scale integrated manufacturing process.

Fig. 9 A is that 3 D-printing laser direct-writing enters schematic diagram.The pulsed infrared laser light that one wavelength is 780nm converges to one Inside a negative photo glue film, in focal position of laser, the photoresist of ultraviolet sensitivity by two-photon polymerized reaction forming together And become solid-state.Unexposed part is cleaned out after still maintaining liquid, and laser spot moves to print in tri- directions xyz Complicated structure out.

Fig. 9 B is the flow chart for processing micro-nano rod structure, is included the following steps:

(1), by continuously x-y plane exposure scan come fill a square to generate a region unit, write field Sequence is also possible to Z-shaped as shown in Figure 1 G to be the serpentine illustrated.

(2), step 1 is repeated to obtain thicker block (optional) in a bit high Z location.

(3), nanometer rod structure 3 is printed by exposure, the diameter of nanometer rod structure 3 is controlled by light exposure.

(4), step 3 is repeated in a bit high Z location to obtain the higher nanometer rod structure 3 (optional) in the direction z.Substrate 1 Thickness and nanometer rod structure 3 can highly be controlled by more laser explosures of step 2 and step 4.

The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention Within mind and principle, any modification, equivalent substitution, improvement and etc. done be should be included within the scope of the present invention.

Claims

1. a kind of super lens, which is characterized in that the super lens include:

Substrate, being capable of light transmission；

Set on the nanometer ring structure of the substrate surface, the nanometer ring structure includes the nano-rings of multiple annular shapes and is formed in Multiple air central spacers between the multiple nano-rings；

At least one in the height and width of at least partly described air central spacer is unequal, so that the air of different location The light phase of central spacer is different, to limit the phase distribution of the super lens.

2. super lens according to claim 1, which is characterized in that the light phase of the air central spacer and the air interannular Every height it is related to the size of width.

3. super lens according to claim 1 or 2, which is characterized in that the super lens have in infinite distal shaft and outside axis The phase distribution of aberration correcting lens.

4. super lens according to claim 1, which is characterized in that the air central spacer includes the air ring of multistage height Interval.

5. super lens according to claim 1, which is characterized in that it is high with single-order that the nanometer ring structure is equivalent to multilayer The nanometer ring structure of degree air central spacer is superimposed to be formed along short transverse.

6. super lens according to claim 5, which is characterized in that the nanometer ring structure, which is equivalent to two layers, has single-order high The nanometer ring structure of degree air central spacer is superimposed to be formed along short transverse, and the position of the air central spacer meets:

max c₁I_on-axis(z₀)+c₂I_off-axis(z₀)

s.t.a_m+1-a_m>l

b_m+1-b_m>l

|Ea_m-Eb_n|>d_F

a₁>d,b₁>d

NA≥NA_min

z₀: position of the focus on optical axis；

c₁、c₂: weight factor；

a_m: the center of m grades of first layer air central spacers, the air between m=present air central spacer and the concentric circles center of circle The quantity+1 of central spacer；

b_m: the center of m grades of second layer air central spacers；

L: the minimum spacing between the adjacent air ring interval of each layer；

Ea_m: the marginal position of m grades of first layer air central spacers；

Eb_n: the marginal position of n-th grade of second layer air central spacer, between n=present air central spacer and the concentric circles center of circle The quantity+1 of air central spacer；

d_F: minimum process precision；

NA: the numerical aperture of the super lens；

NA_min: minimum value aperture.

7. super lens according to claim 1, which is characterized in that the material of the nanometer ring structure is one in following Kind:

8. a kind of optical system, which is characterized in that the optical system includes:

Mounting rack；

The described in any item super lens of claim 1 to 7, the super lens are mounted on the mounting rack.

9. a kind of super lens, which is characterized in that the super lens include:

Substrate, being capable of light transmission；With

Wherein, multiple nanometer rod structures are in array-like arrangement, multiple nanometer rod structures include negative nanometer rod structure and At least one of hollow nanometer rod structure, the negative nanometer rod structure include the first cylinder, the cross section of first cylinder For regular hexagon, first cylinder has columned first hollow portion that bottom is extended to from its top；It is described hollow to receive Rice rod structure includes the first cylindrical body, and first cylindrical body is hollow with extend to bottom from the top of it columned second Portion；

The light phase of the nanometer rod structure of different location is different, to limit the phase distribution of the super lens, and different positions The group delay for the nano-pillar set is different, to limit the color aberration characteristics of the super lens.

10. super lens according to claim 9, which is characterized in that the nanometer rod structure further includes positive nanometer rod structure, The positive nanometer rod structure includes the second cylindrical body.

11. super lens according to claim 10, which is characterized in that the positive nanometer rod structure and the negative nano-pillar The light phase of structure is related to the size of the height of corresponding nanometer rod structure and diameter；

12. according to super lens described in claim 9 or 10 or 11, which is characterized in that for each nanometer of rod structure, surrounding should Other nano-pillar structures of nanometer rod structure are located on the different vertex of same regular hexagon, and this nanometer of rod structure is set to and corresponds to Regular hexagon center.

13. super lens according to claim 9, which is characterized in that the super lens are with the positive negative lens of no spherical aberration or axis The phase distribution of prismatic lens.

14. super lens according to claim 13, which is characterized in that the lens surface light phase of the super lensMeet:

15. super lens according to claim 9, which is characterized in that the material of the nanometer rod structure is one in following Kind:

16. a kind of optical system, which is characterized in that the optical system includes:

The described in any item super lens of at least two claims 9 to 15；

Wherein, at least two super lens interval setting.

17. optical system according to claim 16, which is characterized in that the phase distribution of all super lens and group delay are equal Not identical, one of them super lens is configured to correct the aberration of other super lens, the aberration include spherical aberration, coma, At least one of astigmatism, the curvature of field, distortion, chromatism of position and ratio chromatism,.

18. optical system according to claim 16, which is characterized in that the optical system further include:

Optical module, the optical module and the super lens interval are arranged, and the optical module includes lens, the lens region Not in the super lens.

19. optical system according to claim 18, which is characterized in that the lens are refractors.

20. optical system according to claim 19, which is characterized in that the refractor have the positive negative lens of spherical surface, Infinity corrects phase distribution and the group delay distribution of lens, Schmidt corrector or non-spherical lens.

21. optical system according to claim 20, which is characterized in that multiple super lens are arranged to described in correction The aberration of refractor, the aberration include in spherical aberration, coma, astigmatism, the curvature of field, distortion, chromatism of position and ratio chromatism, extremely It is one few.