CN108445555A - Super surface lens - Google Patents
Super surface lens Download PDFInfo
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- CN108445555A CN108445555A CN201810440564.5A CN201810440564A CN108445555A CN 108445555 A CN108445555 A CN 108445555A CN 201810440564 A CN201810440564 A CN 201810440564A CN 108445555 A CN108445555 A CN 108445555A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/005—Arrays characterized by the distribution or form of lenses arranged along a single direction only, e.g. lenticular sheets
Abstract
The present invention provides a kind of super surface lens, including multiple minor structures, each minor structure includes a micro-structure and supports the part of substrate of the micro-structure, each minor structure is identical in the size of either direction, the part of substrate of all minor structures collectively forms the substrate of super surface lens, and the micro-structure of all minor structures constitutes the micro structure array of super surface lens.The projector distance that corresponding phase can be by the center of the wavelength of incident light, the focal length of super surface lens and micro-structure and the center of super surface lens in phase-modulation direction at the center for each micro-structure that the micro structure array includes determines.The present invention can effectively improve the focusing efficiency to the incident light of visible light wave range.
Description
Technical field
This application involves optical technical field more particularly to a kind of super surface lens.
Background technology
Super surface is a kind of ultra-thin two-dimension array plane that a series of artificial micro-structure by sub-wavelengths forms, and has and makes
The characteristics such as relatively easy, relatively low, the small and thickness ultrathin of loss, may be implemented the amplitude to electromagnetic wave, phase, propagation
The Effective Regulation of pattern, polarization state etc..
In recent years, various hyperplane are suggested, such as v-shaped, U- types, and cross, L-type, and it is based on P-B phases
Position principle is rotary-type etc., however, based on super lens made of these hyperplane to the focusing efficiency of the incident light of visible light wave range
It is very low.
Invention content
In view of this, the present invention provides a kind of super surface lens, to solve existing super surface lens to visible light
The relatively low problem of focusing efficiency.
A kind of super surface lens, including multiple minor structures, each minor structure include a micro-structure and the support micro-structure
Part of substrate, each minor structure is identical in the size of either direction, and the part of substrate of all minor structures collectively forms super surface
The substrate of lens, the micro-structure of all minor structures constitute the micro structure array of super surface lens.
Preferably, when incident light is focused to a line, corresponding phase needs full at the center of each micro-structure
Sufficient formula (1)：
Wherein,Refer to corresponding phase at the center of micro-structure, m is arbitrary integer, and λ is the wavelength of incident light, and f is
The focal length of super surface lens, throwings of the x for the center of micro-structure and the center of super surface lens in a predetermined phase modulation direction
Shadow distance.
Preferably, the predetermined phase modulation direction is any change in coordinate axis direction in two-dimentional x-y coordinate system, works as two dimension
For the coordinate origin of x-y coordinate system at the center of super surface lens, x is the center of micro-structure in two-dimentional x-y coordinate system
Abscissa or ordinate.
Preferably, when incident light is focused at one, corresponding phase needs to meet formula at the center of each micro-structure
(2)：
Wherein,Refer to corresponding phase at the center of micro-structure, m is arbitrary integer, and λ is the wavelength of incident light, f
For the focal length of super surface lens；X is the center of micro-structure and the center of super surface lens in a predetermined phase modulation direction
Projector distance；Projector distances of the y for the center of micro-structure and the center of super surface lens in another predetermined phase modulation direction.
Preferably, two predetermined phase modulation directions are the x coordinate axis direction in two-dimentional x-y coordinate system and y-coordinate axis side
To when the coordinate origin of two-dimentional x-y coordinate system is at the center of super surface lens, x and y is the center of micro-structure respectively two
Tie up the abscissa and ordinate in x-y coordinate system.
Preferably, the minor structure the size of either direction be super surface lens periodic dimensions or adjacent two
Spacing of the center of micro-structure in the either direction.
Preferably, the micro structure array is distributed for axial symmetry.
Preferably, the micro-structure is cylindric micro-structure, and radius is 10nm to 150nm, is highly 488nm, phase
The centre distance of two adjacent cylindric micro-structures is 318nm, and the thickness of the substrate is 200nm, the refractive index of the substrate
It is 1.45.
Preferably, symmetric figure centered on the section of the micro-structure.
Preferably, the composition material of the micro-structure is titanium dioxide or silica, and the composition material of the substrate is
Silica.
Super surface lens provided by the invention, are made of substrate and the micro-structure being arranged in substrate, to visible light wave
The incident light of section has preferable transmittance, so the service band of the lens is visible light wave range, in addition, passing through incident light
Projection of the center of the center of wavelength, the focal length of super surface lens and micro-structure and super surface lens in phase-modulation direction
Distance determines corresponding phase at the center of each micro-structure, and the phase-modulation to incident light may be implemented.
Description of the drawings
Figure 1A is a kind of structural schematic diagram of super surface lens shown in an exemplary embodiment of the invention；
Figure 1B is a kind of schematic diagram of the minor structure of super surface lens shown in an exemplary embodiment of the invention；
Fig. 1 C are a kind of vertical view of super surface lens shown in an exemplary embodiment of the invention；
Fig. 2 to Fig. 7 is the simulation analysis schematic diagram of the super surface lens shown in exemplary embodiment of the present.
Specific implementation mode
Example embodiments are described in detail here, and the example is illustrated in the accompanying drawings.Following description is related to
When attached drawing, unless otherwise indicated, the same numbers in different drawings indicate the same or similar elements.Following exemplary embodiment
Described in embodiment do not represent all embodiments consistent with the application.On the contrary, they be only with it is such as appended
The example of consistent device and method of some aspects be described in detail in claims, the application.Used in this application
Term is the purpose only merely for description specific embodiment, is not intended to be limiting the application.
Please refer to Fig.1 A, super surface lens include substrate 110 and the micro structure array in substrate 110, described micro-
Array of structures includes multiple micro-structures 120.
As shown in Figure 1B, can by any micro-structure 120 and support its part of substrate be referred to as super surface lens son
Structure, each minor structure is identical in the size of the either direction, and size mentioned herein can also refer to the period of super surface lens
Spacing of the center of size or adjacent two micro-structures in the either direction.Length of the minor structure in the directions x and y
It is w, a height of H of cylindric micro-structure, radius R, substrate thickness h.
The specific arrangement mode of micro structure array can be determined according to actual focusing requirements.Such as it needs to gather incident light
Coke be a line, then can in 110 surface of substrate the either direction period arrange micro-structure 120, in another vertical direction non-week
Phase arranges, and carries out phase-modulation to incident light in aperiodic direction, which is phase-modulation direction.
As shown in Figure 1 C, in two-dimentional x-y coordinate system, micro-structure 120 is in the y-axis direction periodic arrangement, vertical
It arranges for aperiodicity (i.e. in x-axis direction) on direction, i.e., x-axis direction is phase-modulation direction.
Preferably, micro-structure 120 is preferably cylindric micro-structure.
Preferably, micro structure array is distributed for axial symmetry.
If necessary to which incident light is focused to a line, needs to be modulated the phase of incident light, pass through following formula
(1) corresponding phase at the center for each micro-structure 120 that micro structure array includes is determined：
Wherein,Referring to corresponding phase at the center of micro-structure 120, m is arbitrary integer, and λ is the wavelength of incident light,
F is the focal length of super surface lens, and as shown in Figure 1A, incident light is incident to super surface lens from 110 side of substrate, is focused into one
The vertical range of line, surface to the focal line of super surface lens is focal length f.
Projector distances of the x for the center of micro-structure 120 and the center of super surface lens in a predetermined phase modulation direction,
The predetermined phase modulation direction can be any change in coordinate axis direction in two-dimentional x-y coordinate system.When the seat of two-dimentional x-y coordinate system
Origin is marked at the center of super surface lens, x is abscissa or vertical seat of the center of micro-structure 120 in two-dimentional x-y coordinate system
Mark.
If necessary to which incident light is focused to a point, then need to modulate in two vertical direction in 110 surface of substrate
The phase of incident light.It needs to determine by following formula (2) at the center of each micro-structure 120 that the micro structure array includes pair
The phase answered：
Wherein,Refer to corresponding phase at the center of micro-structure 120, m is arbitrary integer, and λ is the wave of incident light
Long, f is the focal length of super surface lens；X is the center of micro-structure 120 and the center of super surface lens in a predetermined phase modulation methods
Upward projector distance；Y is the center of micro-structure 120 and the center of super surface lens in another predetermined phase modulation direction
Projector distance.Two predetermined phase modulation directions mentioned herein can be x coordinate axis direction and y in two-dimentional x-y coordinate system
Change in coordinate axis direction.When the coordinate origin of two-dimentional x-y coordinate system is at the center of super surface lens, x and y is micro-structure respectively
Abscissa and ordinate of the center in two-dimentional x-y coordinate system.
After corresponding phase determines at 120 center of micro-structure, the phase-modulation such as to incident light progress 0-2 π can be with
By the size of identified phase calculation micro-structure 120.If micro-structure 120 is cylindric micro-structure, can be by identified
Phasometer calculates the radius of micro-structure 120.
Further, it is also possible to set micro-structure 120 to centrosymmetric micro-structure, meet unrelated to the polarization of incident light
Property, for example, micro-structure 120 can be section be symmetric figure centered on round, ellipse, regular polygon or other sections knot
Structure.
In order to improve transmissivity of the super surface lens to visible light, the composition material of substrate 110 is preferably silica.It is micro-
The composition material of structure 120 is preferably titanium dioxide or silica.The composition material of micro-structure 120 may be that other pairs can
The light-exposed higher material of transmissivity.
Modulation principle of the super surface lens of the embodiment of the present invention described further below to visible light.
In order to ensure that super surface lens transmissivity is high, realizes the phase regulation and control of 0-2 π, time domain different finite member method can be used
(FDTD) numerical analysis is carried out to the minor structure of super surface lens.Can set the focal length of super surface lens to 2 microns, it is 4 micro-
Rice, 6 microns or other numerical value, can choose incident light in the wave-length coverage of 560nm to 800nm.
In turn, the height of cylindric micro-structure could be provided as 488nm, and substrate thickness could be provided as 200nm, substrate
Refractive index could be provided as 1.45.
In one example, micro-structure is set as cylindric micro-structure, and composition material is set as titanium dioxide, height
For 488nm, it sets substrate to silica substrate, the wavelength of thickness 200nm, refractive index 1.45, incident light are
633nm, the boundary condition by super surface lens in the directions x and the directions y is set as periodic boundary condition, in the propagation side of incident light
It is set as PML boundary conditions to the boundary condition in (directions z as shown in Figure 1A).After numerical analysis, the saturating of incident light is obtained
Relationship of the rate (Transmission) respectively with substructure size and microstructure size (radius of such as cylindric micro-structure) is penetrated, such as
In Fig. 2 shown in subgraph a, the longitudinal axis indicates substructure size, variation range 300nm-500nm；Horizontal axis indicates micro-structure half
Diameter, variation range 10nm-150nm, transmissivity are indicated by the depth of color.
In addition, also obtain phase (Phase, unit rad) of the incident light at the center of each micro-structure respectively with minor structure
The relationship of size and microstructure size (radius of such as cylindric micro-structure), as shown in subgraph b in Fig. 2, the longitudinal axis indicates minor structure
Size, variation range 300nm-500nm；Horizontal axis indicates micro-structure radius, variation range 10nm-150nm, phase
It is indicated by the depth of color.
It can be obtained from subgraph a and b, when substructure size is 318nm (in subgraph a and subgraph b shown in heavy black), micro- knot
When structure radius changes within the scope of 10nm-150nm, the covering to 2 π of phase, and its corresponding transmission can be preferably realized
Rate is generally higher, and specifically as shown in the subgraph c in Fig. 2, in subgraph c in fig. 2, horizontal axis indicates that micro-structure radius, left side are vertical
Axis indicates that transmissivity, right side longitudinal axis indicate phase.The relationship of two curves and phase and projection ratio in the subgraph c of Fig. 2, by scheming
In arrow show.
Based on the above numerical analysis, three can be configured and be operated in the visible lights that wavelength is 633nm, focal length is respectively 2,
4 and 6 microns of super surface lens, these super surface lens can have identical diameter D, D=5.406 microns, be calculated three
The numerical aperture NA of a super surface lens is respectively 0.8,0.56 and 0.42, and the computational methods of numerical aperture NA are NA=sin
(tanh(D/2f))。
When the focal length that each subgraph in Fig. 3 respectively illustrates super surface lens is 2 microns, 4 microns or 6 microns, incident light
Phase distribution, the distribution of micro-structure radius and the distribution of aspect ratios of micro-structure in the directions x in Figure 1A.Wherein, coordinate system
Coordinate origin be super surface lens center, when the subgraph a of Fig. 3 indicates that the focal length of super surface lens is 2 microns, incident light edge
The phase (Phase, unit rad) in the directions x；When the subgraph b of Fig. 3 indicates that the focal length of super surface lens is 4 microns, incident light is along x
The phase in direction；When the subgraph c of Fig. 3 indicates that the focal length of super surface lens is 6 microns, the phase of incident light in the x-direction；Fig. 3's
When subgraph d indicates that the focal length of super surface lens is 2 microns, (right side is vertical to be sat for micro-structure radius (left side ordinate) and aspect ratio
Mark) distribution in the x-direction；When the subgraph e of Fig. 3 indicates that the focal length of super surface lens is 4 microns, (Radius is left for micro-structure radius
Side ordinate, unit be microns micron) and aspect ratio (right side ordinate, Highaspectratio) in the x-direction divide
Cloth；When the subgraph f of Fig. 3 indicates that the focal length of super surface lens is 6 microns, the radius (left side ordinate) and aspect ratio of micro-structure
The distribution of (right side ordinate) in the x-direction.
Wherein, aspect ratio is defined as the height of micro-structure and the ratio of diameter, as shown by the following formula：
In another example, it can also be obtained by numerical analysis, a branch of plane wave is respectively 2 micro- by above-mentioned focal length
Rice, 4 microns or 6 microns super surface lens after effect.Plane wave mentioned herein can be the plane of linear polarization of x-polarisation
Wave.Wherein, the coordinate origin of coordinate system is the center of super surface lens, and the subgraph a of Fig. 4 indicates that the focal length of super surface lens is 2
When micron, the super surface lens field intensity map Intensity that (incident direction of incident light) is stablized along the z-axis direction (| Ex|2)；
When the subgraph b of Fig. 4 indicates that the focal length of super surface lens is 4 microns, super surface lens are along the z-axis direction (incident direction of incident light)
Stable field intensity map Intensity (| Ex|2)；When the subgraph c of Fig. 4 indicates that the focal length of super surface lens is 6 microns, super table
The face lens field intensity map Intensity that (incident direction of incident light) is stablized along the z-axis direction (| Ex|2)；The subgraph d tables of Fig. 4
Show super surface lens focal length be 2 microns when, super surface lens the stabilization of x-z-plane field intensity map (| Ex|2)；Fig. 4
Subgraph e when indicating that the focal length of super surface lens is 4 microns, super surface lens the stabilization of x-z-plane field intensity map (|
Ex|2)；When the subgraph f of Fig. 4 indicates that the focal length of super surface lens is 6 microns, field strength of the super surface lens in the stabilization of x-z-plane
Distribution map (| Ex|2)。
As seen from Figure 4, the super surface lens of above three in each from super surface lens exit facet 1.88,3.56
With 5.2 microns of position, relatively it coincide with 2,4 and 6 microns of values of preset value before them.With the increase of default focal length, gather
Burnt focal spot size also becomes larger.
In addition, subgraph g, subgraph h, subgraph i are respectively the halfwidth of the focusing spot of the super surface lens of above three in Fig. 4
Figure, respectively 350nm (f=2 microns), 490nm (f=4 microns) and 630nm (f=6 microns) are less than their theoretical diffraction
Limiting value λ/2NA=395nm, 565nm, 760nm.Since this kind of super surface lens have only carried out phase-modulation, the side y to the directions x
To no progress phase-modulation (array is all identical), so need to only emulate the array of a cycle.
In above-mentioned simulation process, the boundary condition of x, the directions z are PML, and the boundary condition in the directions y is set as periodic boundary
Condition, emulation the result is that the line of a focusing, a rather than point, as Fig. 4 subgraph g, subgraph h, subgraph i in three-dimensional insert
Shown in figure.The focusing efficiency of three super surface lens is up to 86%, 88.5% and 85% respectively, and focusing efficiency is defined as focal area
The energy of incident light in the energy ratio in domain, the energy definition of incident light are to be equal to hole with super surface lens size by focal plane
The energy of the light of diameter.
The super surface lens focusing effect of front be in the case that incident light wavelength be 633nm simulation result, however
In order to characterize the quality of super surface lens, the influence such as aberration to them can test down these three super surface lens at other
Focus condition at wavelength.
The embodiment of the present invention, the wavelength change for testing 560nm-800nm this wave band gather three super surface lens
The influence of burnt effect.When showing that super surface lens focal length is respectively 2 microns, 4 microns, 6 microns in Fig. 5, the incidence of each wavelength
Light in the x-direction intensity and focal length distribution, wherein subgraph a, subgraph b, the subgraph c of Fig. 5 be respectively three default focal lengths be 2 microns,
4 microns, 6 microns of super surface lens, the cross-sectional view of the focusing focal line in the wave-length coverage 560nm-800nm of incident light
(halfwidth figure), these incident wavelengths are all x-polarisation light normal incidence.
In another example, intuitively indicate that lens are influenced by aberration in order to more, the embodiment of the present invention tests
The real focal lengths (as shown in subgraph d in Fig. 5) of the super surface lens of the above three, (areas subgraph e in such as Fig. 5 halfwidth size FWHM
Shown in domain) and focusing efficiency (as shown in subgraph f in Fig. 5) with the variation diagram of wavelength.
As can be seen that as wavelength changes in the range of 560nm-800nm, the real focal length of three super surface lens
Occur slight decline on the whole, default focal length is respectively 2 microns, 4 microns, the focal lengths of 6 microns of super surface lens respectively from
2.2 μm drop to 1.46 μm, drop to 2.96 μm from 3.85 μm, dropping to 4.59 μm from 5.22 μm.
It is worth noting that, although being influenced by wavelength change, three lens remain able to light focusing is bright at one
Aobvious focus.Near the preset wavelength 633nm at least about 1 μm of section, lens are not in apparent when plane wave focuses
Monochromatic aberration.When far from preset wavelength 633nm, it is clearly seen that, it is f=2,4,6 μm of lens for default focal length, half is high
Wide size FWHM sizes are gradually increased from 350nm to 429nm, from 470nm to 560nm, from 630nm to 776nm respectively, meanwhile,
Focusing efficiency drops to 51.7% (f from the peak of 86% (f=2 μm), 88.5% (f=4 μm), 85% (f=6 μm) respectively
=2 μm), 68.4% (f=4 μm), 73.6% (f=6 μm).Although halfwidth size and focusing efficiency become along different wave length
Change, but 75% or more is remained in most of visible-range inner focusing efficiency of 560nm to 800nm.
Above-mentioned super surface lens are designed for x polarization plane of polarization waves.In fact, due to the center pair of micro-structure
Title property (circular symmetry of such as cylindrical structure), the super surface lens proposed are that polarization is unrelated.In order to prove, the present invention is implemented
The super surface lens that example is 2 μm with default focal length are representative, are directed to x linear polarizations (XLP), y linear polarizations (YLP), circular polarization respectively
(CP) these three incident lights have carried out simulation analysis to intensity, electric field and phase distribution.
Subgraph a shows intensity (Intensity) distribution of x linear polarizations (XLP) light in the x-direction in Fig. 6；Subgraph b shows in Fig. 6
Go out the intensity distribution of y linear polarizations (YLP) light in the x-direction；Subgraph c shows the intensity of circular polarization (CP) light in the x-direction point in Fig. 6
Cloth.
Subgraph d shows electric field (Electricfied) distribution of x linear polarizations (XLP) light in the x-direction in Fig. 6；Subgraph in Fig. 6
E shows the field distribution of y linear polarizations (YLP) light in the x-direction；Subgraph f shows the electric field of circular polarization (CP) light in the x-direction in Fig. 6
Distribution.
Subgraph g shows the phase distribution of x linear polarizations (XLP) light in the x-direction in Fig. 6；Subgraph h shows y linear polarizations in Fig. 6
(YLP) phase distribution of light in the x-direction；Subgraph i shows the phase distribution of circular polarization (CP) light in the x-direction in Fig. 6.
It will be appreciated from fig. 6 that x linear polarizations (XLP) light, y linear polarizations (YLP) light, these three incident lights of circular polarization (CP) light gather
Burnt effect is almost the same.Moreover, the lens for focusing circularly polarized light are all bipolarity lens, they can be according to the polarization of incident light
State is as convex lens or concavees lens.Bipolar electrode effect may be to enter since the symbol of phase increment can be reversed to different chiralitys
Penetrate light.However, due to rotation of the phase increment independent of optical axis of cylindric micro-structure, so the super surface lens proposed
It is still convergent lens for left circularly polarized light LCP and right-circularly polarized light RCP, and is for the incidence angle of LCP and RCP
It is identical.Therefore, the super surface lens of the embodiment of the present invention can be used for linear polarization LP and circular polarization CP incident lights simultaneously, that is,
It says, the focusing effect of super surface lens of the invention is insensitive to incident polarization.
In another example, in order to further characterize the quality of super surface lens, the embodiment of the present invention, for default focal length
Imaging analysis has been carried out to the point light source on axis and outside axis for 2 microns of super surface lens.
Wherein, the subgraph a in Fig. 7 is point-sourcre imaging schematic device on axis, a point light source be positioned in z-axis and
The place on super 4 microns of the surface lens left side of distance, one angle of divergence of point light source here is 30 ° of Gauss light source approximation generation
It replaces.According to Newton's imaging equation, a picture point should be present in 4 microns on the right side of lens.
Subgraph b is distribution of the electric field strength along z-axis in Fig. 7；Subgraph c in Fig. 7 is the electric-field intensity distribution of x-z-plane
Figure；Subgraph d is the cross-sectional view of focal plane, halfwidth 670nm in Fig. 7；Subgraph e is that off-axis imaging focuses dress in Fig. 7
Schematic diagram is set, similar with the setting of imaging and focusing on axis, point light source, which remains unchanged, is placed on the place in super 4 microns of surface lens left side,
The difference is that point light source here deviates from 1 micron apart from z-axis, opposite z-axis deviates about 14 °, and f is at x=-1 microns, along flat
Row is in the electric-field intensity distribution figure in z-axis direction；Subgraph g in Fig. 7 is the x-z-plane electric-field intensity distribution that off-axis imaging focuses
Figure；Subgraph h in Fig. 7 is the field strength sectional view that off-axis imaging focuses focal plane, corresponding halfwidth about 550nm.
In order to preferably express clearly the relationship of these figures, the subordinate relation of each figure is illustrated in figure with arrow line segment form.By
The distance for making point light source apart from lens centre is focused in off-axis imaging to occur slightly increasing (4 microns to 4.12 microns) so that its
A little to left for z=4 microns of the position ratio of picture point.
The foregoing is merely the preferred embodiments of the application, not limiting the application, all essences in the application
With within principle, any modification, equivalent substitution, improvement and etc. done should be included within the scope of the application protection god.
Claims (10)
1. a kind of super surface lens, which is characterized in that including multiple minor structures, each minor structure includes a micro-structure and support
The part of substrate of the micro-structure, each minor structure is identical in the size of either direction, the common structure of part of substrate of all minor structures
At the substrate of super surface lens, the micro-structure of all minor structures constitutes the micro structure array of super surface lens.
2. super surface lens according to claim 1, which is characterized in that when incident light is focused to a line, each micro- knot
Corresponding phase needs to meet formula (1) at the center of structure：
Wherein,Refer to corresponding phase at the center of micro-structure, m is arbitrary integer, and λ is the wavelength of incident light, and f is super table
The focal length of face lens, x be projection of the center of center and the super surface lens of micro-structure in a predetermined phase modulation direction away from
From.
3. super surface lens according to claim 2, which is characterized in that the predetermined phase modulation direction is two dimension x-y
Any change in coordinate axis direction in coordinate system, when the coordinate origin of two-dimentional x-y coordinate system is at the center of super surface lens, x is micro-
Abscissa or ordinate of the center of structure in two-dimentional x-y coordinate system.
4. super surface lens according to claim 1, which is characterized in that when incident light is focused at one, each micro- knot
Corresponding phase needs to meet formula (2) at the center of structure：
Wherein,Refer to corresponding phase at the center of micro-structure, m is arbitrary integer, and λ is the wavelength of incident light, and f is super
The focal length of surface lens；Projections of the x for the center of micro-structure and the center of super surface lens in a predetermined phase modulation direction
Distance；Projector distances of the y for the center of micro-structure and the center of super surface lens in another predetermined phase modulation direction.
5. super surface lens according to claim 4, which is characterized in that two predetermined phase modulation directions are two dimension x-y
X coordinate axis direction in coordinate system and y-coordinate axis direction, when the coordinate origin of two-dimentional x-y coordinate system is in super surface lens
When the heart, x and y is abscissa and ordinate of the center of micro-structure in two-dimentional x-y coordinate system respectively.
6. super surface lens according to claim 1, which is characterized in that the minor structure is super in the size of either direction
Spacing of the center of the periodic dimensions of surface lens or adjacent two micro-structures in the either direction.
7. super surface lens according to claim 1, which is characterized in that the micro structure array is distributed for axial symmetry.
8. super surface lens according to claim 1, which is characterized in that the micro-structure is cylindric micro-structure, radius
Ranging from 10nm to 150nm is highly 488nm, and the centre distance of adjacent two cylindric micro-structures is 318nm, the base
The thickness at bottom is 200nm, and the refractive index of the substrate is 1.45.
9. super surface lens according to claim 1, which is characterized in that symmetric graph centered on the section of the micro-structure
Shape.
10. super surface lens according to claim 1, which is characterized in that the composition material of the micro-structure is titanium dioxide
The composition material of titanium or silica, the substrate is silica.
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