CN106949971A - A kind of compact polarization state measuring instrument based on the super surface of medium - Google Patents
A kind of compact polarization state measuring instrument based on the super surface of medium Download PDFInfo
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- CN106949971A CN106949971A CN201710187581.8A CN201710187581A CN106949971A CN 106949971 A CN106949971 A CN 106949971A CN 201710187581 A CN201710187581 A CN 201710187581A CN 106949971 A CN106949971 A CN 106949971A
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- 230000010287 polarization Effects 0.000 title claims abstract description 281
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 73
- 229910052710 silicon Inorganic materials 0.000 claims description 73
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G01J4/04—Polarimeters using electric detection means
Abstract
The invention discloses a kind of compact polarization state measuring instrument based on the super surface of medium, including the super surface of medium and detector array, detector array is located at the focal length on the super surface of medium；The super surface of medium includes multiple basic modules, and adjacent basic module contacts with each other；The polarization state for treating light-metering on the basic module surface is incided in each basic module autonomous working to obtain；Each basic module includes the first flat focus mirror, the second flat focus mirror, the 3rd flat focus mirror and fourth plane focus lamp, and four pieces of flat focus mirrors constitute sphere of movements for the elephants shape planar structure according to order from left to right, from top to bottom；The focal length of this four flat focus mirrors is consistent；The compact polarization state measuring instrument that the present invention is provided is smaller in visible light wave range loss, is not almost lost in near-infrared to infrared band, greatly reduces light loss, improves the sensitivity of detection.
Description
Technical field
The invention belongs to field of optical device technology, more particularly, to a kind of compact polarization based on the super surface of medium
State measuring instrument.
Background technology
The application that polarization state measuring instrument is attracted people's attention in fields such as high speed optical communication, polarization imaging, laser technologies.
At present in optical field, mainly there are two class measuring polarization state methods：One class is different with linear polarizer using quarter-wave plate
The combination of rotation direction is taken multiple measurements to incident light, and the stokes parameter of incident light is calculated using the data measured, this
The shortcoming of method is to take multiple measurements, it is impossible to which the polarization state to moment judges；Another kind of is that will to treat that light-metering is divided into several
Road, per all the way treat that light-metering is detected with the quarter-wave plate and linear polarizer for having fixed rotation direction, this method reality
Show the data acquisition of transient state, but system is huge, complex and costly enterprise.
In recent years, a kind of two-dimentional super surfacing is used in the intensity of regulation and control light, phase, polarization state, is polarization state
Detection provide new thinking.2015, Anders Pors et al. utilized a kind of clearance surface with birefringence etc.
The super surface texture of gas ions is introduced to be modulated to the phase gradient of the incident light of different polarization states component, successfully by incident light
Polarization state component is separated to different exit directions, by the intensity of real-time detection all directions diffraction light, calculates transient state
Stokes parameter, so as to uniquely determine the polarization state of incident light, (Anders Pors wait " Plasmonic
metagratings for simultaneous determination of Stokes parameters,”Optica 2,
716-723(2015))；Its device material used, for gold and silica, is that one layer is covered in one layer of thicker layer gold
The thick silica of nanoscale, deposit one layer of nanogold block array being continually changing on space scale thereon again and formed
Structure；Because when using transmitted light to be detected, nanogold block array has larger loss for incident light, retaining
While nano metal block is to incident light phase modulation ability, increased using a kind of structure of clearance surface plasma for entering
The reflectivity of light is penetrated, reduces the loss to incident light, and detected using reflected light；However, due to having used metallic element,
Unavoidably there is larger light loss；Further, since being detected using reflected light, it is difficult to realize the detection near field, be
System needs to use multiple optical lenses that the light for being diffracted into different directions is focused on into detector surface, adds the complexity of system
Degree, limits the integrated level of device.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, the invention provides a kind of based on the compact of the super surface of medium
Polarization state measuring instrument, its object is to improve the detectivity of polarization state device, and improves device integration.
To achieve the above object, according to one aspect of the present invention, there is provided a kind of compact inclined based on the super surface of medium
Polarization state measuring instrument, including the super surface of medium and detector array, detector array are located at the focal length on the super surface of medium；
Wherein, the super surface of medium includes multiple basic modules, and adjacent basic module contacts with each other, and multiple basic modules are total to
With planar structure of the composition with thickness；Each basic module works independently incides the to be measured of the basic module surface to obtain
The polarization state of light；
Each basic module includes the first flat focus mirror, the second flat focus mirror, the 3rd flat focus mirror and Siping City
Face focus lamp, adjacent two pieces of flat focus mirrors contact with each other；First flat focus mirror, the second flat focus mirror, the 3rd plane are gathered
Burnt mirror and fourth plane focus lamp constitute sphere of movements for the elephants shape planar structure according to order from left to right, from top to bottom；Aforementioned four
The focal length of flat focus mirror is identical；
Wherein, the first flat focus mirror is used to the horizontal linear polarization component in incident light converging to detector array surface
Form hot spot；Second flat focus mirror is formed for the perpendicular linear polarization component in incident light to be converged into detector array surface
Hot spot；3rd flat focus mirror forms light for 45 degree of linear polarization components in incident light to be converged into detector array surface
Spot；Fourth plane focus lamp is used to the Left-hand circular polarization component in incident light converging to detector array surface formation hot spot；
This four flat focus mirrors play transmission for remaining polarized component outside above-mentioned four kinds of polarized components in incident light, but do not have
There is focussing force, the transmission light of remaining polarized component is dispersed in detector array surface as bias light.
It is preferred that, above-mentioned compact polarization state measuring instrument, its first flat focus mirror includes multiple base units, Mei Geji
It is oval silicon column that plinth unit, which includes substrate with the section on substrate,；The substrate of adjacent foundation unit contacts with each other, arrangement
Form the first flat focus mirror；
Wherein, each base unit is high to the transmitance of transmitted light, big to the modification scope of phase near Michaelis formant,
The long and short axle oval by adjusting silicon column section, the phase-modulation in the range of 2 π is realized to incident light.
It is preferred that, above-mentioned compact polarization state measuring instrument, the baseplate material of its base unit is quartz.
It is preferred that, above-mentioned compact polarization state measuring instrument, the silicon column section of the base unit of its first flat focus mirror is ellipse
Round rotation direction angle counterclockwise is fixed as 0.
It is preferred that, above-mentioned compact polarization state measuring instrument, the silicon column section of the base unit of its first flat focus mirror is ellipse
Round major axis and short axle meets following relation：
Wherein, DxThe oval major axis size in the base unit silicon column section of first flat focus mirror, DyFor the first flat focus
The oval short axle size in the base unit silicon column section of mirror, in the horizontal direction, short axle is in vertical direction for major axis；λ1For the first plane
The operation wavelength of focus lamp, (x, y) is the coordinate at any point on the first flat focus mirror, f1For Jiao of the first flat focus mirror
Away from size, const is constant；
According to Fdtd Method (FDTD) algorithm, with (0,0) for projection coordinate of the focal position on flat focus mirror,
The oval major axis in silicon column section, short axle size are mapped on its phase-modulation introduced to horizontal linear polarization incident light, obtained
Obtain mapping relations F；F-1It is mapping relations F inverse mapping, is to be mapped to the phase-modulation to horizontal polarization incident light accordingly
The mapping relations obtained on the oval major axis in silicon column section, short axle size；
Wherein, Fdtd Method (FDTD) algorithm refer to the equation of two curls in Maxwell equation in space and
Carried out with central difference schemes discrete on time, so as to obtain one group of recurrence equation, and asked under certain boundary condition
Solve the algorithm of maxwell equation group；Central difference schemes ensure that the solution of Fdtd Method (FDTD) has second order essence
Degree, and when meeting Courant conditions the result is that stable.
It is preferred that, above-mentioned compact polarization state measuring instrument, its second flat focus mirror is by by the first flat focus mirror
The silicon column of base unit is unified centered on axial direction to be rotated by 90 ° acquisition clockwise or counterclockwise.
It is preferred that, above-mentioned compact polarization state measuring instrument, its 3rd flat focus mirror is by by the first flat focus mirror
The silicon column of base unit is unified centered on axial direction to rotate 45 degree of acquisitions in the counterclockwise direction.
It is preferred that, above-mentioned compact polarization state measuring instrument, the rotation counterclockwise of its fourth plane focus lamp base unit silicon column
To angle
Wherein, (x, y) is the coordinate at any point on fourth plane focus lamp, and θ (x, y) is basis at point (x, y) position
The rotation direction angle counterclockwise of unit silicon column, λ2For the operation wavelength of fourth plane focus lamp, f2Focal length for fourth plane focus lamp is big
Small, const is constant；When the rotation direction of fourth plane focus lamp base unit silicon column covers 0~π, fourth plane focus lamp pair
The phase-modulation of circularly polarized light can cover 0~2 π.
It is preferred that, above-mentioned compact polarization state measuring instrument, the silicon column section of the base unit of its fourth plane focus lamp is ellipse
Round major axis is fixed with short axle size, meets following relation：F(Bx, By)+F(By, Bx)=0；
Wherein, BxFor the silicon column section transverse size of the base unit of fourth plane focus lamp, ByIt is poly- for fourth plane
The silicon column section ellipse short shaft size of the base unit of burnt mirror, when the silicon column section of the base unit of fourth plane focus lamp is oval
When rotation angle θ is 0, in the horizontal direction, short axle is in vertical direction, and F refers to fourth plane focus lamp silicon column section is oval for major axis
Long and short axle size be mapped on its phase-modulation introduced to horizontal linear polarization incident light obtained by mapping relations.
It is preferred that, above-mentioned compact polarization state measuring instrument, the substrate of base unit is rectangle quartz base plate, its lateral cross section
Length and width in λ3With 0.5 λ3Between value, to reduce diffraction effect and reach horizontal state of polarization and perpendicular polarisation state
Incident light forms Michaelis resonance in the silicon column of base unit；Wherein, λ3For lambda1-wavelength.
It is further preferred that above-mentioned compact polarization state measuring instrument, quartz base plate length and width is equal, the height of silicon column is less than
Lambda1-wavelength, and silicon column major axis be 0.1 × base length~0.9 × base length, short axle be 0.1 × base widths~
0.9 × base widths, intercouple between adjacent ellipses shape silicon column influence to reduce to prepare difficulty and reduce.
It is further preferred that above-mentioned compact polarization state measuring instrument, its fourth plane focus lamp is by the way that the first plane is gathered
The silicon column of the base unit of burnt mirror 0~180 degree of unified rotation clockwise or counterclockwise centered on axial direction is obtained, and makes it
0~360 degree is reached to the phase-modulation of circular polarization；
It is further preferred that above-mentioned compact polarization state measuring instrument, its detector array uses ccd array.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it can obtain down and show
Beneficial effect：
(1) the compact polarization state measuring instrument based on the super surface of medium that provides of the present invention, its base unit structural substrates is
Quartz, cylindroid material is silicon, and incident light is modulated using nonmetallic materials silicon, smaller in visible light wave range loss,
Almost it is not lost in near-infrared to infrared band, compared with the super surface of existing metal material, greatly reduces light loss, carry
The high sensitivity of detection；
(2) the compact polarization state measuring instrument based on the super surface of medium that the present invention is provided, the super surface of its medium has transmission
With the function of focusing, detected using transmitted light so that near field detection is possibly realized, the super surface with existing metal material
Compare, just detection light can be converged to detector surface without other optical lenses, and multiple detectors need not be set to exist
Diverse location detect simultaneously, substantially increases the integrated level of system.
Brief description of the drawings
Fig. 1 is shown for the overall structure of the compact polarization state measuring instrument provided in an embodiment of the present invention based on the super surface of medium
It is intended to；
Fig. 2 is the structural representation of the basic module for the compact polarization state measuring instrument based on the super surface of medium that embodiment is provided
Figure；
Fig. 3 is the structural representation of the base unit for the compact polarization state measuring instrument based on the super surface of medium that embodiment is provided
Figure；
Fig. 4 is the top view of the base unit for the compact polarization state measuring instrument based on the super surface of medium that embodiment is provided；
Fig. 5 is that the structure of the basic module for the compact polarization state measuring instrument based on the super surface of medium that embodiment 1 is provided is bowed
View；
Fig. 6 is the light distribution schematic diagram of each planar lens in embodiment 1；
Fig. 7 is that the structure of the basic module for the compact polarization state measuring instrument based on the super surface of medium that embodiment 2 is provided is bowed
View；
Fig. 8 is the light distribution schematic diagram of each planar lens in embodiment 2；
Fig. 9 is that the structure of the basic module for the compact polarization state measuring instrument based on the super surface of medium that embodiment 3 is provided is bowed
View；
Figure 10 is the light distribution schematic diagram of each planar lens in embodiment 3；
In all of the figs, identical reference is used for representing identical element or structure, wherein：The super table of 1- media
Face, 2-CCD arrays, 3- cellular constructions quartz substrate, 4- cellular construction ellipticity silicon columns.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below
Not constituting conflict each other can just be mutually combined.
It is made up by depositing a section on cuboid quartz base plate of elliptoid silicon column；
It is the overall structure signal for the compact polarization state measuring instrument based on the super surface of medium that embodiment is provided shown in Fig. 1
Figure, ccd array 2 is integrated at the focal length behind the super surface 1 of medium；The super surface of medium includes multiple basic modules, each basic mould
Block autonomous working is incident on the incident light polarization state information on the basic module surface to obtain；In Fig. 1, solid-line rectangle is illustrated that
4 dashed rectangles in basic module, basic module respectively illustrate horizontal linear polarization sensitive plane focus lamp, perpendicular linear polarization
Sensitive plane focus lamp, 45 degree of linear polarization sensitive plane focus lamps and Left-hand circular polarization sensitive plane focus lamp dashed rectangle；It is empty
Line cylinder illustrates that incident ray with circular cone, and the dotted line circular cone between the super surface of medium and ccd array illustrates that medium surpasses
The light of surface convergence.
Fig. 2 is the structural representation of the basic module for the compact polarization state measuring instrument based on the super surface of medium that embodiment is provided
Figure；In embodiment, each basic module includes horizontal linear polarization sensitive plane focus lamp, and perpendicular linear polarization sensitive plane is focused on
Mirror, 45 degree of linear polarization sensitive plane focus lamps, Left-hand circular polarization sensitive plane focus lamp；
The focal length of this above-mentioned four flat focus mirrors is consistent, respectively that horizontal line polarized component, vertical line in incident light is inclined
Shake component, 45 degree of linear polarization components and Left-hand circular polarization component is converged on ccd array；Aforementioned four polarization state component exists
Four focal beam spots are formed on ccd array；In Fig. 2,4 dotted line circular cones between basic module and ccd array illustrate by this 4
Individual planar lens converge after emergent ray.
Fig. 3 is the structural representation of the base unit for the compact polarization state measuring instrument based on the super surface of medium that embodiment is provided
Figure, Fig. 4 is corresponding top view；In the present embodiment, base unit includes the quartz base plate 3 of rectangular-shape with being located on substrate
Section is oval silicon column 4, and silicon column deposits formation on substrate；Multiple base units are spliced to form planar lens, and 4 kinds of planes are saturating
Microscope group is spliced to form matrix pattern into basic module；
The length and width of the quartz base plate lateral cross section of base unit between λ and 0.5 λ value with reach Michaelis resonate
Yardstick and reduce diffraction effect, wherein, λ is lambda1-wavelength；In the present embodiment, the quartz base plate lateral cross section of base unit
Length it is equal with width；The height of oval silicon column is less than the length of lambda1-wavelength；The oval major axis scope in silicon column section is
0.1 × base length~0.9 × base length, short axle scope is 0.1 × base widths~0.9 × base widths；In Fig. 4, θ angles
The as rotation direction angle counterclockwise of the silicon column of Left-hand circular polarization sensitive plane focus lamp, the value between 0~180 degree makes left-handed circle
Polarization-Sensitive flat focus mirror reaches 0~360 degree to the phase-modulation of circular polarization.In the present invention, rotation direction angle counterclockwise refer to as
The anglec of rotation of the oval cross section for the silicon column that θ is illustrated in Fig. 4, its direction of rotation is as shown in Fig. 4 dotted arrow, and rotation size is
θ。
Simulate the condition of incidence of different polarization light respectively with Fdtd Method (FDTD) algorithm, it can be seen that different inclined
When the light that shakes is incident, the light distribution at the focal position of four, ccd array surface is different；This four light intensity magnitudes and incident light
Stokes parameter is linear, and the relation between them is as described by below equation：
(s0 s1 s2 s3)T=M4×4·(Ix Iy I45 ILC)T
Wherein, (s0 s1 s2 s3)TIt is stokes parameter, IxIt is horizontal linear polarization state component intensity, IyIt is that vertical line is inclined
Polarization state component intensity, I45It is 45 degree of linear polarization component intensities, ILCIt is Left-hand circular polarization state component intensity；M4×4For contacting 4
4 × 4 matrix of individual light intensity component and 4 stokes parameters, can pass through experimental calibration；Using the matrix, it can pass through
The four light intensity components detected calculate the stokes parameter of incident light, so as to uniquely determine the polarization state of incident light.
The compact polarization state based on the super surface of medium that the present invention is provided is expanded on further below in conjunction with specific embodiment
Measuring instrument.
Embodiment 1：
Fig. 5 is that the structure of the basic module for the compact polarization state measuring instrument based on the super surface of medium that embodiment 1 is provided is bowed
View；
Analogue simulation is carried out with Fdtd Method (FDTD) algorithm, the wavelength of incident light is set as 1000nm, it is polarized
State is set to horizontal linear polarization light, perpendicular linear polarization light, 45 degree of linearly polarized lights, -45 degree linearly polarized lights, right-circularly polarized light and
Left circularly polarized light, and normal incidence, in the super surface of medium, detector array is located at the common of the planar lens on the super surface of medium
At focal length.
In embodiment 1, the length Λ of the quartz substrate lateral cross section of base unitXFor 500 nanometers, the width of lateral cross section
ΛYFor 500 nanometers, the height H of silicon column is 600 nanometers, the oval major axis D in ellipticity silicon column sectionxFor 50~450 nanometers, section
Oval short axle DyFor 50~450 nanometers, the rotation direction θ of ellipticity silicon column is 0~180 degree, and ccd detector array is apart from basic mould
4.2 microns of block；The focal length of four planar lens in basic module is all 4.2 microns.
In order to illustrate the oval long and short axle size in silicon column section to the amplitude of the transmission light of horizontal linear polarization state incident light,
The influence of phase, is that object has carried out Multi simulation running by 1000nm incident lights of wavelength；The polarization state of incident light is set to level
Linear polarization, the underface normal incidence from base unit substrate is in base unit, in the surrounding usage cycles of the base unit
(Periodic) boundary condition, the boundary condition of perfect absorber (PML) is used in base unit upper and lower, basic single
A point probe is placed in the surface of member, and the major and minor axis size for changing silicon column oval cross section carries out Multi simulation running, is cut in silicon column
Amplitude and the phase letter for the transmission light of horizontal linear polarization incident light are obtained under the oval multiple different long and short axle parameters in face
Breath, and then obtain mapping relations F；Simulation result shows that each base unit is high to the transmitance of transmitted light, attached in Michaelis formant
The nearly modification scope to phase is big；It can be realized to incident light in the range of 2 π by adjusting the oval long and short axle in silicon column section
Phase-modulation.
In top view shown in Fig. 5, upper left correspondence horizontal linear polarization sensitive plane focus lamp, upper right portion correspondence is hung down
Linear polarization sensitive plane focus lamp, bottom left section 45 degree of linear polarization sensitive plane focus lamps of correspondence, lower right-most portion correspondence is left-handed
Circular polarization sensitive plane focus lamp.
It is the light distribution schematic diagram of each planar lens in embodiment 1 shown in Fig. 6；Wherein, Fig. 6 (a) correspondences incident light is
4 light distribution during horizontal linear polarization light, include 1.1,45 degree of linear polarizations of focus point of incident light horizontal linear polarization state component
The focus point 1.2 of state component, the focus point 1.3 of Left-hand circular polarization state component；It can be seen that horizontal linear polarization state component
Maximum intensity, perpendicular linear polarization state component intensity is minimum, 45 degree of linear polarizations and Left-hand circular polarization state component there is also.
4 light distribution when Fig. 6 (b) correspondence incident lights are perpendicular linear polarization light, including incident light perpendicular linear polarization state
The focus point 1.5 of 1.4,45 degree of linear polarization components of focus point of component, the focus point 1.6 of Left-hand circular polarization state component；From figure
In as can be seen that perpendicular linear polarization state component intensity is maximum, horizontal linear polarization state component intensity is minimum, 45 degree of linear polarizations and a left side
Rounding polarization state component there is also.
4 light distribution when Fig. 6 (c) correspondence incident lights are 45 degree of linearly polarized lights, including incident light horizontal linear polarization state
The focus point 1.7 of component, the focus point of 1.8,45 degree of linear polarization components of focus point of incident light perpendicular linear polarization state component
1.9, the focus point 1.10 of Left-hand circular polarization state component；It can be seen that 45 degree of linear polarization component intensities are maximum, level
Linear polarization component, perpendicular linear polarization state and Left-hand circular polarization state component there is also.
4 light distribution when Fig. 6 (d) correspondence incident lights are -45 degree linearly polarized light, including incident light horizontal linear polarization state
The focus point 1.11 of component, the focus point 1.12 of incident light perpendicular linear polarization state component, the focus point of Left-hand circular polarization state component
1.13；It can be seen that 45 degree of linear polarization component intensities are minimum, horizontal linear polarization state component, perpendicular linear polarization state and
Left-hand circular polarization state component there is also.
4 light distribution when Fig. 6 (e) correspondence incident lights are right-hand circular polarization light, including incident light horizontal linear polarization state
The focus point 1.14 of component, the focus point of 1.15,45 degree of linear polarization components of focus point of incident light perpendicular linear polarization state component
1.16；It can be seen that Left-hand circular polarization state component intensity is minimum, horizontal linear polarization state component, perpendicular linear polarization state and
45 degree of linear polarization components there is also.
4 light distribution when Fig. 6 (f) correspondence incident lights are Left-hand circular polarization light, including incident light horizontal linear polarization state
The focus point 1.17 of component, the focus point of 1.18,45 degree of linear polarization components of focus point of incident light perpendicular linear polarization state component
1.19, the focus point 1.20 of Left-hand circular polarization state component；It can be seen that Left-hand circular polarization state component intensity is maximum, water
Horizontal line polarization state component, perpendicular linear polarization state and 45 degree of linear polarization components there is also.
4 obtained focus light intensity components are detected using the detector being on 4 common focal planes of planar lens, with reference to
4 stokes parameters and horizontal linear polarization state component, perpendicular linear polarization state component, 45 degree of linear polarization components, left-handed circles are inclined
Linear relationship between polarization state component intensity can obtain the stokes parameter of incident light, so as to uniquely determine the polarization of incident light
State information.
Embodiment 2
Fig. 7 is that the structure of the basic module for the compact polarization state measuring instrument based on the super surface of medium that embodiment 2 is provided is bowed
View；
Analogue simulation is carried out with Fdtd Method (FDTD) algorithm, the wavelength of incident light is set as 1310nm, it is polarized
State is set to horizontal linear polarization light, perpendicular linear polarization light, 45 degree of linearly polarized lights, -45 degree linearly polarized lights, right-circularly polarized light and a left side
Rounding polarised light, and normal incidence being total to positioned at the medium each planar lens in super surface at the super surface of medium, ccd detector array
At focal length.
In embodiment 2, the length Λ of the quartz substrate lateral cross section of base unitXFor 800 nanometers, the width of lateral cross section
ΛYFor 800 nanometers, the height H of silicon column is 470 nanometers, the oval major axis D in silicon column sectionxFor 80~720 nanometers, short axle DyFor 80
~720 nanometers；The rotation direction θ of silicon column is 0~180 degree, and ccd detector array is apart from 8 microns of basic module；Four in basic module
The focal length of individual planar lens is 8 microns.
In the present embodiment, the incident light using wavelength as 1310nm is that object has carried out emulation testing；By the inclined of incident light
Polarization state is set to horizontal linear polarization state, and the underface normal incidence from base unit substrate is in base unit, the four of the base unit
The boundary condition of all usage cycles, uses the boundary condition of perfect absorber, in base unit in base unit upper and lower
A detector is placed in surface, and the long and short axle size for changing silicon column oval cross section carries out Multi simulation running, oval in silicon column section
The amplitude and phase information of transmission light for horizontal linear polarization incident light are obtained under multiple different long and short axle parameters, is entered
And obtain mapping relations F；Simulation result shows that each base unit is high to the transmitance of transmitted light, right near Michaelis formant
The modification scope of phase is big；The phase to incident light in the range of 2 π can be realized by adjusting the oval long and short axle in silicon column section
Modulation.
Upper left correspondence horizontal linear polarization sensitive plane focus lamp in Fig. 7, upper right portion correspondence perpendicular linear polarization is sensitive
Flat focus mirror, bottom left section 45 degree of linear polarization sensitive plane focus lamps of correspondence, lower right-most portion correspondence Left-hand circular polarization sensitivity is flat
Face focus lamp.
It is the light distribution schematic diagram of each planar lens in embodiment 2 shown in Fig. 8；Wherein, Fig. 8 (a) correspondences incident light is
4 light distribution during horizontal linear polarization light, include 1.1,45 degree of linear polarizations of focus point of incident light horizontal linear polarization state component
The focus point 1.2 of state component, the focus point 1.3 of Left-hand circular polarization state component；It can be seen that horizontal linear polarization state component
Maximum intensity, perpendicular linear polarization state component intensity is minimum, 45 degree of linear polarizations and Left-hand circular polarization state component there is also.
4 light distribution when Fig. 8 (b) correspondence incident lights are perpendicular linear polarization light, including incident light perpendicular linear polarization state
The focus point 1.5 of 1.4,45 degree of linear polarization components of focus point of component, the focus point 1.6 of Left-hand circular polarization state component；From figure
In as can be seen that perpendicular linear polarization state component intensity is maximum, horizontal linear polarization state component intensity is minimum, 45 degree of linear polarizations and a left side
Rounding polarization state component there is also.
4 light distribution when Fig. 8 (c) correspondence incident lights are 45 degree of linearly polarized lights, including incident light horizontal linear polarization state
The focus point 1.7 of component, the focus point of 1.8,45 degree of linear polarization components of focus point of incident light perpendicular linear polarization state component
1.9, the focus point 1.10 of Left-hand circular polarization state component；It can be seen that 45 degree of linear polarization component intensities are maximum, level
Linear polarization component, perpendicular linear polarization state and Left-hand circular polarization state component there is also.
4 light distribution when Fig. 8 (d) correspondence incident lights are -45 degree linearly polarized light, including incident light horizontal linear polarization state
The focus point 1.11 of component, the focus point 1.12 of incident light perpendicular linear polarization state component, the focus point of Left-hand circular polarization state component
1.13；It can be seen that 45 degree of linear polarization component intensities are minimum, horizontal linear polarization state component, perpendicular linear polarization state and
Left-hand circular polarization state component there is also.
4 light distribution when Fig. 8 (e) correspondence incident lights are right-hand circular polarization light, including incident light horizontal linear polarization state
The focus point 1.14 of component, the focus point of 1.15,45 degree of linear polarization components of focus point of incident light perpendicular linear polarization state component
1.16；It can be seen that Left-hand circular polarization state component intensity is minimum, horizontal linear polarization state component, perpendicular linear polarization state and
45 degree of linear polarization components there is also.
4 light distribution when Fig. 8 (f) correspondence incident lights are Left-hand circular polarization light, including incident light horizontal linear polarization state
The focus point 1.17 of component, the focus point of 1.18,45 degree of linear polarization components of focus point of incident light perpendicular linear polarization state component
1.19, the focus point 1.20 of Left-hand circular polarization state component；It can be seen that Left-hand circular polarization state component intensity is maximum, water
Horizontal line polarization state component, perpendicular linear polarization state and 45 degree of linear polarization components there is also.
4 focus light intensities point detected by the ccd detector array being on 4 common focal planes of planar lens
Amount, with reference to 4 stokes parameters and horizontal linear polarization state component, perpendicular linear polarization state component, 45 degree of linear polarization components, left sides
Linear relationship between rounding polarization state component intensity, can obtain the stokes parameter of incident light, so as to uniquely determine incidence
The polarization state information of light.
Embodiment 3
Fig. 9 is that the structure of the basic module for the compact polarization state measuring instrument based on the super surface of medium that embodiment 3 is provided is bowed
View；
Analogue simulation is carried out with Fdtd Method (FDTD) algorithm, the wavelength of incident light is set as 1550nm, it is polarized
State is set to horizontal linear polarization light, perpendicular linear polarization light, 45 degree of linearly polarized lights, -45 degree linearly polarized lights, right-circularly polarized light and
Left circularly polarized light, normal incidence is in common Jiao of each planar lens in the super surface of medium in the super surface of medium, ccd detector array
Away from place.
In embodiment 3, the length Λ of the quartz substrate lateral cross section of base unitXFor 1500 nanometers, the width of lateral cross section
Spend ΛYFor 1500 nanometers, the height H of silicon column is 340 nanometers, and the oval major axis Dx in silicon column section is 150~1350 nanometers, short axle
Dy is 150~1350 nanometers, and the rotation direction θ of silicon column is 0~180 degree, and ccd detector array is apart from 12 microns of basic module；Substantially
The focal length of four planar lens in module is 12 microns.
In the present embodiment, the incident light using wavelength as 1550nm is that object has carried out emulation testing；By the inclined of incident light
Polarization state is set to horizontal linear polarization state, and the underface normal incidence from base unit substrate is in base unit, the four of the base unit
The boundary condition of all usage cycles, uses the boundary condition of perfect absorber, in base unit in base unit upper and lower
A detector is placed in surface, and the long and short axle size for changing silicon column oval cross section carries out Multi simulation running, oval in silicon column section
The amplitude and phase information of transmission light for horizontal linear polarization incident light are obtained under multiple different long and short axle parameters, is entered
And obtain mapping relations F；Simulation result shows that each base unit is high to the transmitance of transmitted light, right near Michaelis formant
The modification scope of phase is big；The phase to incident light in the range of 2 π can be realized by adjusting the oval long and short axle in silicon column section
Modulation.
In Fig. 9, upper left correspondence horizontal linear polarization sensitive plane focus lamp, upper right portion correspondence perpendicular linear polarization are sensitive
Flat focus mirror, 45 degree of linear polarization sensitive plane focus lamps of bottom left section correspondence, lower right-most portion correspondence Left-hand circular polarization sensitivity are flat
Face focus lamp.
It is the light distribution schematic diagram of each planar lens in embodiment 3 shown in Figure 10；Wherein, Figure 10 (a) correspondences incident light
4 light distribution during for horizontal linear polarization light, including 1.1,45 degree of lines of focus point of incident light horizontal linear polarization state component are inclined
The focus point 1.2 of polarization state component, the focus point 1.3 of Left-hand circular polarization state component；It can be seen that horizontal linear polarization state point
Measure maximum intensity, perpendicular linear polarization state component intensity is minimum, 45 degree of linear polarizations and Left-hand circular polarization state component there is also.
4 light distribution when Figure 10 (b) correspondence incident lights are perpendicular linear polarization light, including incident light perpendicular linear polarization state
The focus point 1.5 of 1.4,45 degree of linear polarization components of focus point of component, the focus point 1.6 of Left-hand circular polarization state component；From figure
In as can be seen that perpendicular linear polarization state component intensity is maximum, horizontal linear polarization state component intensity is minimum, 45 degree of linear polarizations and a left side
Rounding polarization state component there is also.
4 light distribution when Figure 10 (c) correspondence incident lights are 45 degree of linearly polarized lights, including incident light horizontal linear polarization state
The focus point 1.7 of component, the focus point of 1.8,45 degree of linear polarization components of focus point of incident light perpendicular linear polarization state component
1.9, the focus point 1.10 of Left-hand circular polarization state component；It can be seen that 45 degree of linear polarization component intensities are maximum, level
Linear polarization component, perpendicular linear polarization state and Left-hand circular polarization state component there is also.
4 light distribution when Figure 10 (d) correspondence incident lights are -45 degree linearly polarized light, including incident light horizontal linear polarization
The focus point 1.11 of state component, the focus point 1.12 of incident light perpendicular linear polarization state component, the focusing of Left-hand circular polarization state component
Point 1.13；It can be seen that 45 degree of linear polarization component intensities are minimum, horizontal linear polarization state component, perpendicular linear polarization state
With Left-hand circular polarization state component there is also.
4 light distribution when Figure 10 (e) correspondence incident lights are right-hand circular polarization light, including incident light horizontal linear polarization state
The focus point 1.14 of component, the focus point of 1.15,45 degree of linear polarization components of focus point of incident light perpendicular linear polarization state component
1.16；It can be seen that Left-hand circular polarization state component intensity is minimum, horizontal linear polarization state component, perpendicular linear polarization state and
45 degree of linear polarization components there is also.
4 light distribution when Figure 10 (f) correspondence incident lights are Left-hand circular polarization light, including incident light horizontal linear polarization state
The focus point 1.17 of component, the focus point of 1.18,45 degree of linear polarization components of focus point of incident light perpendicular linear polarization state component
1.19, the focus point 1.20 of Left-hand circular polarization state component；It can be seen that Left-hand circular polarization state component intensity is maximum, water
Horizontal line polarization state component, perpendicular linear polarization state and 45 degree of linear polarization components there is also.
4 focus light intensities point detected by the ccd detector array being on 4 common focal planes of planar lens
Amount, with reference to 4 stokes parameters and horizontal linear polarization state component, perpendicular linear polarization state component, 45 degree of linear polarization components, left sides
Linear relationship between rounding polarization state component intensity, can obtain the stokes parameter of incident light, so as to uniquely determine incidence
The polarization state information of light.
The compact polarization state measuring instrument based on the super surface of medium of the present invention, the super surface of its medium can make by the following method
It is standby to obtain：
(1) chemical vapor deposition silicon is utilized on a quartz substrate；
(2) in silicon face spin coating photoresist, default knot is carved by photoengraving or electron beam lithography on a photoresist
Structure；
(3) by electron beam deposition, one layer of aluminium is deposited in photoresist and the silicon face exposed, and go using positive photoresist stripping
Remnants photoresist is removed, layer of metal aluminium mask is left；
(4) silicon etching that will not belong to structure division using the method for inductively coupled plasma silicon etching falls, and washes away most
The metallic aluminium mask of upper strata residual, obtains the super surface of medium.
As it will be easily appreciated by one skilled in the art that the foregoing is only presently preferred embodiments of the present invention, it is not used to
The limitation present invention, any modification, equivalent and the improvement made within the spirit and principles of the invention etc., it all should include
Within protection scope of the present invention.
Claims (11)
1. a kind of compact polarization state measuring instrument based on the super surface of medium, it is characterised in that including the super surface of medium and detector
Array, the detector array is located at the focal length on the super surface of medium；
The super surface of medium includes multiple basic modules, and adjacent basic module contacts with each other；Each basic module independence work
Work incides the polarization state for treating light-metering on the basic module surface to obtain；
Each basic module includes the first flat focus of focal length identical mirror, the second flat focus mirror, the 3rd flat focus
Mirror and fourth plane focus lamp；The first flat focus mirror, the second flat focus mirror, the 3rd flat focus mirror and fourth plane
Focus lamp constitutes sphere of movements for the elephants shape planar structure according to order from left to right, from top to bottom；
The first flat focus mirror is formed for the horizontal linear polarization component in incident light to be converged into detector array surface
Hot spot；The second flat focus mirror is formed for the perpendicular linear polarization component in incident light to be converged into detector array surface
Hot spot；The 3rd flat focus mirror is formed for 45 degree of linear polarization components in incident light to be converged into detector array surface
Hot spot；The fourth plane focus lamp is formed for the Left-hand circular polarization component in incident light to be converged into detector array surface
Hot spot.
2. compact polarization state measuring instrument as claimed in claim 1, it is characterised in that the first flat focus mirror includes multiple
Base unit, it is oval silicon column that each base unit, which includes substrate with the section on substrate,；Adjacent foundation unit
Substrate contact with each other, arrangement form the first flat focus mirror.
3. compact polarization state measuring instrument as claimed in claim 1 or 2, it is characterised in that the base of the first flat focus mirror
The oval rotation direction angle counterclockwise in the silicon column section of plinth unit is fixed as 0 degree.
4. compact polarization state measuring instrument as claimed in claim 3, it is characterised in that the basis of the first flat focus mirror is single
The oval major axis in the silicon column section of member and short axle meet following relation：
Wherein, DxThe oval major axis size in the base unit silicon column section of first flat focus mirror, DyFor the first flat focus mirror
The oval short axle size in base unit silicon column section, in the horizontal direction, short axle is in vertical direction for major axis；λ1For the first flat focus
The operation wavelength of mirror, (x, y) is the coordinate at any point on the first flat focus mirror, f1Focal length for the first flat focus mirror is big
Small, const is constant.
5. compact polarization state measuring instrument as claimed in claim 1 or 2, it is characterised in that the second flat focus mirror passes through
The silicon column of the base unit of first flat focus mirror is rotated by 90 ° acquisition clockwise or counterclockwise centered on axial direction.
6. compact polarization state measuring instrument as claimed in claim 1 or 2, it is characterised in that the 3rd flat focus mirror passes through
The silicon column of the base unit of first flat focus mirror is rotated into 45 degree of acquisitions in the counterclockwise direction centered on axial direction.
7. compact polarization state measuring instrument as claimed in claim 1 or 2, it is characterised in that the fourth plane focus lamp basis
The oval rotation direction angle counterclockwise in unit silicon column section is met
Wherein, (x, y) is the coordinate at any point on fourth plane focus lamp, and θ (x, y) is base unit at point (x, y) position
The rotation direction angle counterclockwise of silicon column, λ2For the operation wavelength of fourth plane focus lamp, f2For the focal length size of fourth plane focus lamp,
Const is constant.
8. compact polarization state measuring instrument as claimed in claim 1 or 2, it is characterised in that the base of the fourth plane focus lamp
The oval major axis in the silicon column section of plinth unit meets following relation with short axle size：F(Bx, By)+F(By, Bx)=0；
Wherein, BxFor the silicon column section transverse size of the base unit of fourth plane focus lamp, ByFor fourth plane focus lamp
Base unit silicon column section ellipse short shaft size, F refers to the oval long and short axle in fourth plane focus lamp silicon column section is big
It is small to be mapped on its phase modulation introduced to horizontal linear polarization incident light resulting mapping relations.
9. compact polarization state measuring instrument as claimed in claim 2, it is characterised in that the substrate of the base unit is rectangle stone
English substrate, the length and width of its lateral cross section is in λ3With 0.5 λ3Between value, λ3For lambda1-wavelength.
10. compact polarization state measuring instrument as claimed in claim 9, it is characterised in that the quartz base plate length and width is equal；Silicon
The height of post is less than lambda1-wavelength, the major axis of silicon column is 0.1 × base length~0.9 × base length, and short axle is 0.1 × base
Bottom width degree~0.9 × base widths.
11. compact polarization state measuring instrument as claimed in claim 9, it is characterised in that the fourth plane focus lamp is by inciting somebody to action
The silicon column of the base unit of first flat focus mirror is rotated 0~180 degree and obtained clockwise or counterclockwise centered on axial direction
.
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