CN109581558A - A kind of preparation method and multifocal diffractive element of multifocal diffractive element - Google Patents
A kind of preparation method and multifocal diffractive element of multifocal diffractive element Download PDFInfo
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- CN109581558A CN109581558A CN201811597506.XA CN201811597506A CN109581558A CN 109581558 A CN109581558 A CN 109581558A CN 201811597506 A CN201811597506 A CN 201811597506A CN 109581558 A CN109581558 A CN 109581558A
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- diffractive element
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
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Abstract
This application involves a kind of preparation method of multifocal diffractive element and multifocal diffractive elements, comprising: obtains the basic parameter of multifocal diffractive element；According to the corresponding step etching depth of each coke section of the Parameter Calculation；Simulation experiments are carried out according to the step etching depth to obtain the multifocal diffractive element.Multifocal diffractive element provided by the present application reduces the size of multifocal diffractive element, avoids the alignment issues between multiple optical elements, keeps its usage scenario more flexible extensively.Above-mentioned multifocal diffractive element can generate equidistant multifocal, peak energy uniformity, point spread function consistency between each focus can be transferred through optimization and obtain good result, it can be used as the important beam splitter in high-precision micro/nano processing system, and have highly important effect for increasing depth of focus in certain specific imaging optical systems.
Description
Technical field
This application involves optical element technology field, in particular to the preparation method of a kind of multifocal diffractive element and multifocal
Point diffraction element.
Background technique
Multifocal optical element comprising enables to a branch of directional light in axial multiple focal points while converging, this special light
Learning attribute is widely used in multifocal optical element comprising in various modern optical manufacturing and imaging system.Such as swash in femtosecond
When light cuts thick transparent material, due to being affected to transparent material cutting separation by material thickness using single laser spot,
With the increase of transparent material thickness, at laser spot induction generate fire check in a thickness direction move towards uncontrolled, from
And cause cutting section face shape irregular, or even phenomena such as surface chipping occur, the physical attribute of material surface is seriously affected, is limited
It has made femtosecond laser and has cut the application in thick transparent material.Laser beam is pooled axially using multifocal optical element comprising
Multiple focuses make it be evenly distributed on the different location on transparent material thickness direction, and the cutting of high-flatness is obtained with this
Surface；Such as compound eye structural has many characteristics, such as that high sensitive receives extensively to moving object due to the property of wide visual field again
General concern and research can use chip multi-focal optical lens array to expand depth of focus of the bionic compound eyes structure in imaging
To realize.
Usually there are two types of implementations for traditional multifocal optical element comprising.One kind is Zigzag type optical device, such as Fig. 1 institute
Show.The common form of this kind of optical element are as follows: the lens group that is made of multi-disc lens is made of the high-precision reflecting mirror of two panels
Optics multiple reflections system, not only volume is larger for this multifocal optical device, is not easy to the adjustment of optical path, strongly limits
Its application scenarios；And the optical element in system usually all needs to be made into hollow structure, is not easy to process.Second is to utilize to spread out
Optical device is penetrated to realize multifocal, but this traditional multifocal diffractive element has three big disadvantages: 1. conventional multifocal point spreads out
Penetrate the refraction/diffraction mixed optical device that element is made of two parts element actually: a traditional convex lens and diffraction optics member
Part.This mode also limits the use of its function to a certain extent, such as when for bionic compound eyes structure, two optics members
The alignment of part is just at urgent problem to be solved.2. due to designing intrinsic problem, this traditional diffractive multifocal optics member
Part cannot form equidistant multifocal.3. point spread function is inconsistent between each focus, cause the peak energy of each focus strong
Degree and halfwidth are all inconsistent, to influence the image quality of each focal plane.
Summary of the invention
In view of this, the application provides the preparation method and multifocal diffractive element of a kind of multifocal diffractive element, with solution
The certainly above problem.
The first aspect of the embodiment of the present application provides a kind of preparation method of multifocal diffractive element, the preparation method
Include:
Obtain multifocal diffractive element basic parameter, wherein the multifocal be etc. step widths focus；
According to the corresponding step etching depth of each coke section of the Parameter Calculation；
Simulation experiments are carried out according to the step etching depth to obtain the multifocal diffractive element.
It is optionally, described according to the corresponding step etching depth of each coke section of the Parameter Calculation, comprising:
It is planned according to the number of focus of the multifocal diffractive element and calculates the step etching position for needing to etch and platform
Rank etching depth；
The step etching depth is integrated, the step etching depth of corresponding radial width is successively arranged according to burnt section
Sequence, to finally obtain orderly step etching depth.
Optionally, the step etching depth is calculated by the following formula to obtain:
Wherein, HiFor etching depth, fiTo design focal length, n is Refractive Index of Material, r be each step of diffraction element it is radial away from
From λ is design wavelength, and m is number of focus.
Optionally, described that simulation experiments are carried out to obtain the multifocal diffractive member according to the step etching depth
Part includes:
After carrying out step etching according to the step etching depth, the peak energy for verifying each focus is corresponding
Whether the half-breadth height of energy peak is consistent；
If inconsistent, caused by the peak energy that the number of steps of the corresponding burnt section of increase and decrease adjusts each focus corresponding
In the high difference to specified range of the half-breadth of energy peak, to finally obtain the multifocal diffractive element.
Optionally, the peak energy that the number of steps by the corresponding burnt section of increase and decrease adjusts each focus causes corresponding
Include: in the high difference to specified range of the half-breadth of energy peak
Change the utilization rate of each focus by the number of steps of the corresponding burnt section of increase and decrease；
By changing the corresponding step width of each burnt section, the point spread function region for adjusting each focal point is consistent, from
And in the difference to specified range for making the peak energy of each focus cause the half-breadth of corresponding energy peak high.
The second aspect of the embodiment of the present application provides a kind of multifocal diffractive element, and the multifocal diffractive element passes through
Method described in any one of preparation method of above-mentioned multifocal diffractive element is prepared.
The beneficial effects of the present invention are: multifocal diffractive member in the preparation method of multifocal diffractive element provided by the present application
Setting is based on multiple focuses in part, can be achieved in the case where not needing condenser lens merely with a piece of diffraction element
Multifocal distribution.Compared to traditional multifocal diffractive element, multifocal diffractive element provided by the present application is further reduced
The size of multifocal diffractive element, and the alignment issues between multiple optical elements are avoided, so that its usage scenario is more
Flexibly extensively；Secondly, multifocal diffractive element provided by the present application can generate equidistant multifocal, and the peak between each focus
Value energy uniformity, point spread function consistency can be transferred through optimization and obtain adding as a result, can be used as high-precision micro-nano well
Important beam splitter in work system, and have for increasing depth of focus in certain specific imaging optical systems highly important
Effect.
Detailed description of the invention
It in order to more clearly explain the technical solutions in the embodiments of the present application, below will be to embodiment or description of the prior art
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only some of the application
Embodiment for those of ordinary skill in the art without any creative labor, can also be according to these
Attached drawing obtains other attached drawings.
Fig. 1 is the multifocal diffractive element provided in the prior art；
Fig. 2 is the flow diagram of the preparation method for the multifocal diffractive element that this Shen embodiment please provide；
Fig. 3 is the step etching depth design diagram that this Shen embodiment please provide；
Fig. 4 is the peak value energy of diffraction element made from the multifocal diffractive element that this Shen embodiment please provide and conventional method
Measure difference in distribution schematic diagram；
Specific embodiment
In being described below, for illustration and not for limitation, the tool of such as particular system structure, technology etc is proposed
Body details, so as to provide a thorough understanding of the present application embodiment.However, it will be clear to one skilled in the art that there is no these specific
The application also may be implemented in the other embodiments of details.In other situations, it omits to well-known system, device, electricity
The detailed description of road and method, so as not to obscure the description of the present application with unnecessary details.
Fig. 2 shows the preparation methods of multifocal diffractive element provided by the present application, and details are as follows: the preparation method packet
It includes:
Step S21, obtain multifocal diffractive element basic parameter, wherein the multifocal be etc. step widths coke
Point.
In embodiment provided by the present application, when preparing multifocal diffractive element, it is first determined multifocal diffractive element
Basic parameter, such as number of focus, each focus, initial step width, step periodicity.Multifocal provided by the present application is spread out
Penetrate the focus that multiple focuses in element such as are at the step widths.
Step S22, according to the corresponding step etching depth of each coke section of the Parameter Calculation.
It is optionally, described according to the corresponding step etching depth of each coke section of the Parameter Calculation, comprising:
It is planned according to the number of focus of the multifocal diffractive element and calculates the step etching position for needing to etch and platform
Rank etching depth；
The step etching depth is integrated, the step etching depth of corresponding radial width is successively arranged according to burnt section
Sequence, to finally obtain orderly step etching depth.
Optionally, the step etching depth is calculated by the following formula to obtain:
Wherein, HiFor etching depth, fiTo design focal length, n is Refractive Index of Material, r be each step of diffraction element it is radial away from
From λ is design wavelength, and m is number of focus.
The application provide in each focus is carried out etc. step widths diffraction element design, the platform etched needed for calculating
Rank height.As shown in Figure 2.
Calculation formula is as follows:
Wherein, HiFor etching depth, fiTo design focal length, n is Refractive Index of Material, r be each step of diffraction element it is radial away from
From λ is design wavelength, and m is number of focus.With this, the corresponding step etching depth of each burnt section has been obtained.
Then the integration for carrying out step etching depth again successively arranges the etching depth of corresponding radial width according to burnt section
Column, final etching depth such as Fig. 2.
H=[h1 h2 ... hi h1 h2 ... hi ... h1 h2 ... hi]
Step S23 carries out simulation experiments according to the step etching depth to obtain the multifocal diffractive element.
Optionally, described that simulation experiments are carried out to obtain the multifocal diffractive member according to the step etching depth
Part includes: after carrying out step etching according to the step etching depth, and the peak energy for verifying each focus is corresponding
Whether the half-breadth height of energy peak is consistent.
If inconsistent, caused by the peak energy that the number of steps of the corresponding burnt section of increase and decrease adjusts each focus corresponding
In the high difference to specified range of the half-breadth of energy peak, to finally obtain the multifocal diffractive element.
Optionally, the peak energy that the number of steps by the corresponding burnt section of increase and decrease adjusts each focus causes corresponding
Include: in the high difference to specified range of the half-breadth of energy peak
Change the utilization rate of each focus by the number of steps of the corresponding burnt section of increase and decrease；
By changing the corresponding step width of each burnt section, the point spread function region for adjusting each focal point is consistent, from
And in the difference to specified range for making the peak energy of each focus cause the half-breadth of corresponding energy peak high.
Specifically, peak energy and half-breadth height through each focus of multifocal diffractive element prepared by the above process are not
Unanimously, this is because the corresponding effective R/# of each focus is not identical at this time causes.It also needs to make respectively by subsequent Optimization Steps
The peak energy intensity and half-breadth height of a focus are reached an agreement.
Specific optimization method is as follows:
According to formulaGuarantee the corresponding R/# of each focus by increasing and decreasing the corresponding numbers of steps of each burnt section
It is equal, change the capacity usage ratio of each focus with this, then again by changing the corresponding step width of each burnt section, to make
The point spread function for obtaining each focal point reaches unanimity, and finally makes the peak energy of each focus similar with halfwidth holding, this mistake
Journey needs successive ignition.Design and the detailed process of optimization are as shown in Figure 3.
As shown in figure 4, distinguishing focusing using conventional multifocal point diffraction element design method and design method of the invention
The design of bifocal diffractive element is carried out for 40mm and 50mm, the diameter of the two is 2.2mm.It is designed using traditional design method
Peak energy (normalization) of the bifocal optical element at bifocal be respectively 1/0.64, halfwidth (normalization) is respectively
0.63/1；And using the bifocal diffractive element of the invention peak energy (normalization) at bifocal is respectively 1/0.97, half
High width (normalization) is respectively 0.89/1.Peak energy uniformity promotes 51%, and halfwidth homogeneity promotes 41%.It can be seen that
Multifocal diffractive Design Method of Fixture Elements of the invention is with the obvious advantage.
Setting is based on multiple cokes in multifocal diffractive element in the preparation method of multifocal diffractive element provided by the present application
Point can be achieved with multifocal distribution merely with a piece of diffraction element in the case where not needing condenser lens.Compared to biography
The multifocal diffractive element of system, multifocal diffractive element provided by the present application further reduce the ruler of multifocal diffractive element
It is very little, and the alignment issues between multiple optical elements are avoided, so that its usage scenario is more flexible extensively；Secondly, this Shen
The multifocal diffractive element that please be provided can generate equidistant multifocal, and the peak energy uniformity between each focus, point expand
Scattered function consistency can be transferred through optimization and obtain well as a result, can be used as the important light splitting in high-precision micro/nano processing system
Element, and have highly important effect for increasing depth of focus in certain specific imaging optical systems.
Mode the above is only the implementation of the present invention is not intended to limit the scope of the invention, all to utilize this
Equivalent structure or equivalent flow shift made by description of the invention and accompanying drawing content, it is relevant to be applied directly or indirectly in other
Technical field is included within the scope of the present invention.
Claims (6)
1. a kind of preparation method of multifocal diffractive element, which is characterized in that the preparation method includes:
Obtain multifocal diffractive element basic parameter, wherein the multifocal be etc. step widths focus；
According to the corresponding step etching depth of each coke section of the Parameter Calculation；
Simulation experiments are carried out according to the step etching depth to obtain the multifocal diffractive element.
2. the preparation method of multifocal diffractive element according to claim 1, which is characterized in that described according to described basic
Parameter calculates the corresponding step etching depth of each burnt section, comprising:
It is planned according to the number of focus of the multifocal diffractive element and calculates the step etching position for needing to etch and step quarter
Lose depth；
The step etching depth is integrated, the step etching depth of corresponding radial width is successively sorted according to burnt section,
To finally obtain orderly step etching depth.
3. the preparation method of multifocal diffractive element according to claim 1, which is characterized in that the step etching depth
It is calculated by the following formula to obtain:
Wherein, HiFor etching depth, fiTo design focal length, n is Refractive Index of Material, and r is the radial distance of each step of diffraction element, λ
For design wavelength, m is number of focus.
4. the preparation method of multifocal diffractive element according to claim 1, which is characterized in that described according to the step
Etching depth carries out simulation experiments to obtain the multifocal diffractive element
After carrying out step etching according to the step etching depth, the corresponding energy of the peak energy of each focus is verified
Whether the half-breadth height at peak is consistent；
If inconsistent, corresponding energy is caused by the peak energy that the number of steps of the corresponding burnt section of increase and decrease adjusts each focus
In the high difference to specified range of the half-breadth at peak, to finally obtain the multifocal diffractive element.
5. the preparation method of multifocal diffractive element according to claim 4, which is characterized in that described to be corresponded to by increase and decrease
The difference that the peak energy that the number of steps of burnt section adjusts each focus causes the half-breadth of corresponding energy peak high is to specified range
Inside include:
Change the utilization rate of each focus by the number of steps of the corresponding burnt section of increase and decrease；
By changing the corresponding step width of each burnt section, the point spread function region for adjusting each focal point is consistent, to make
In the difference to specified range that the peak energy for obtaining each focus causes the half-breadth of corresponding energy peak high.
6. a kind of multifocal diffractive element, which is characterized in that the multifocal diffractive element is any by the claim 1-5
Method described in is prepared.
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| CN201811597506.XA CN109581558B (en) | 2018-12-26 | 2018-12-26 | Preparation method of multifocal diffraction element and multifocal diffraction element |
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| CN201811597506.XA CN109581558B (en) | 2018-12-26 | 2018-12-26 | Preparation method of multifocal diffraction element and multifocal diffraction element |
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Cited By (3)
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| CN110989062A (en) * | 2019-12-17 | 2020-04-10 | 中国科学院长春光学精密机械与物理研究所 | Multi-focus optical element and design method thereof |
| CN111007664A (en) * | 2019-12-18 | 2020-04-14 | 中国科学院光电技术研究所 | Design method of diffractive optical element with high diffraction efficiency and low speckle noise |
| CN111673269A (en) * | 2020-07-01 | 2020-09-18 | 中国工程物理研究院激光聚变研究中心 | Focal spot rapid movement regulation and control system based on surface type reflector set and regulation and control method thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110989062A (en) * | 2019-12-17 | 2020-04-10 | 中国科学院长春光学精密机械与物理研究所 | Multi-focus optical element and design method thereof |
| CN111007664A (en) * | 2019-12-18 | 2020-04-14 | 中国科学院光电技术研究所 | Design method of diffractive optical element with high diffraction efficiency and low speckle noise |
| CN111673269A (en) * | 2020-07-01 | 2020-09-18 | 中国工程物理研究院激光聚变研究中心 | Focal spot rapid movement regulation and control system based on surface type reflector set and regulation and control method thereof |
| CN111673269B (en) * | 2020-07-01 | 2022-05-31 | 中国工程物理研究院激光聚变研究中心 | Focal spot rapid movement regulation and control system based on surface type reflector set and regulation and control method thereof |
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