CN105607162B - One kind is focused on and obtains Diode laser Bessel-Gaussian beam novel optical lens - Google Patents

One kind is focused on and obtains Diode laser Bessel-Gaussian beam novel optical lens Download PDF

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CN105607162B
CN105607162B CN201610107420.9A CN201610107420A CN105607162B CN 105607162 B CN105607162 B CN 105607162B CN 201610107420 A CN201610107420 A CN 201610107420A CN 105607162 B CN105607162 B CN 105607162B
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focusing
annulus
focus
eyeglass
curved surface
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CN105607162A (en
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邵华江
李思佳
李思泉
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Jiaqiang Shanghai Intelligent Technology Co ltd
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Shanghai Automobile Gear Works
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/10Bifocal lenses; Multifocal lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B2003/0093Simple or compound lenses characterised by the shape

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)

Abstract

Diode laser Bessel-Gaussian beam novel optical lens, including many annulus curved surfaces and focusing curved surface are obtained the invention discloses one kind focusing, many annulus curved surfaces and focusing curved surface are overlapped mutually setting with coaxial manner;It is provided with many annulus curved surfaces and annulus is set with concentric structure, cuff surface is sphere or aspherical, and annular optical axis is provided between adjacent ring band:The focusing curved surface is sphere or aspherical.Can be focused on using single eyeglass and obtain Bessel-Gaussian beam, formation center range Energy distribution is high, the extremely low focus on light beam section of edge distribution, its high power density scope hot spot is minimum, and depth of focus is extremely long, and hot spot peak power density is close in depth of focus section.This kind of eyeglass assembly precision requirement is general, has wider universality to laser beam pattern, can improve and improve the cutting technique of Laser focus technique, particularly transparent material.

Description

One kind is focused on and obtains Diode laser Bessel-Gaussian beam novel optical lens
Technical field
The present invention relates to field of optical equipment, a kind of specially focusing obtains Diode laser Bessel-Gaussian beam novel optical Lens.
Background technology
Laser processing technology be cut by laser using the characteristic of high-order harmonics spectrum, welded, being surface-treated, Punching, micro Process etc., wherein especially of a relatively high to focusing on laser beam characteristic requirement with techniques such as laser cutting, punching, micro Process. Under equal laser power, must often be provided simultaneously with that focal beam spot is small, depth of focus is long, peak power density is high, could carry to a greater extent Rise process velocity and quality.
Nowadays, laser cutting occupies the more than half markets of laser processing technology as main flow, and major part laser cutting light path is adopted With the lens combination even aspherical mirror of optics better performances.However, the focusing that conventional eyeglass, microscope group and aspherical mirror are obtained Hot spot hour, then depth of focus length limited;Depth of focus length is met, then hot spot is larger and peak power is reduced.
Axial multifocal lens can to a certain extent make up the deficiency of conventional eyeglass, microscope group and aspherical mirror, can be simultaneously Realize that focal beam spot is small, depth of focus is more long.Have the disadvantage, axial multifocal lens is limited to laser beam pattern composition, incident beam chi It is very little etc. multifactor, so as to influence stability in use and scope.
Axicon lens are obtained in that bessel beam, and then realize Diode laser small light spot high-power peaks Energy distribution.No Foot, hot spot peak power density comparison in difference is obvious in axicon lens focal depth range, and to Automatic manual transmission required precision pole It is high, it is difficult to be widely used in industrial laserses processing industry.
Be to improve the processing technologys such as existing laser cutting, punching, micro Process, raising eyeglass to laser beam pattern universality with And laser beam peak power stability in focal beam spot depth of focus section, while reducing assembly precision requirement, reduce light path lens quantity With complexity, so that suitable for general occasion, the present invention proposes a kind of new type lens, coaxial many annulus Gauss mirrors, to parallel incidence Light is focused on can obtain Bessel-Gaussian beam, focus on small section high energy distribution scope hot spot, depth of focus extremely length and light in focal depth range Spot peak power density is basically identical.
The content of the invention
Focal beam spot high power density scope can be obtained it is an object of the invention to provide a kind of focusing to parallel input light Minimum, peak power density is high, the Bezier Gauss light of peak power density difference very little in depth of focus extremely long and focal depth range Beam, can be used to improving the laser processing technology high to focus on light beam characteristic requirements be such as cut by laser, punch, micro Process, especially Be conducive to improving the Laser Processing speed and quality of transparent material, with the technical side for solving the problems, such as to be proposed in above-mentioned background technology Case.To overcome general spherical mirror, sphere microscope group or even aspherical mirror focal beam spot small size and Diode laser incompatibility problem, improve Eyeglass improves laser beam peak power stability in depth of focus section, and reduce eyeglass itself assembling essence to laser beam pattern universality Degree requires, reduces the number of lenses and complexity of laser working light path, improvement laser cutting, punching, micro Process etc. and swash to focusing on Light beam request laser processing technology higher, improving laser process velocity and quality.
One kind is focused on and obtains Diode laser Bessel-Gaussian beam novel optical lens, including many annulus curved surfaces are bent with focusing Face, many annulus curved surfaces and focusing curved surface are overlapped mutually setting with coaxial manner;It is provided with same on many annulus curved surfaces The heart justifies structure setting annulus, and cuff surface is sphere or aspherical, and annular optical axis is provided between adjacent ring band:It is described to focus on song Face is sphere or aspherical.
Preferably, annular optical axis is concentric with center of lens axle and is parallel to each other.
Preferably, the positive and negative assembling mode of eyeglass can be used, need parallel input light or nearly parallel input light incident, focus on Facula position is focal position before and after eyeglass, and eyeglass focal length depends on another focusing curved surface correspondence focal length.
Preferably, focal beam spot overall size Stimulated Light light beam parameters influence, the focusing light of design eyeglass is depended primarily on Spot.
Preferably, focal beam spot overall size is directly proportional to the annulus width of coaxial many annulus Gauss mirrors, with corresponding annulus Focal length is inversely proportional, and focal length corresponding with another focusing surface of eyeglass is directly proportional, and proportionality coefficient is about 1.
Preferably, depth of focus length is weighed with focus on light beam center high power density distributed areas change in size.
Preferably, eyeglass is applied to improves fine laser processing technology, the particularly laser processing technology of transparent material.
Compared with prior art, the beneficial effects of the invention are as follows:The invention can be focused on using single eyeglass and obtain Bezier Gaussian beam, formation center range Energy distribution is high, the extremely low focus on light beam section of edge distribution, its high power density scope hot spot Minimum, depth of focus is extremely long, and hot spot peak power density is close in depth of focus section.This kind of eyeglass assembly precision requirement is general, to laser beam Pattern has wider universality, can improve and improve the cutting technique of Laser focus technique, particularly transparent material.
Brief description of the drawings
Fig. 1 is schematic structural view of the invention;
Fig. 2 is annulus curved-surface structure schematic diagram;
Fig. 3 is cutting plane structural representation of the present invention;
Fig. 4 is partial cutaway tangent plane structural representation of the present invention;
Fig. 5 is each annular sphere band optical axis shown in coaxial many annulus Gauss mirrors and dotted line;
Fig. 6 is the assembling mode of embodiment 1, and the light splitting demonstration during beam Propagation shown in dotted line;
Fig. 7 is the assembling mode of embodiment 2, and the light splitting demonstration during beam Propagation shown in dotted line;
Fig. 8 is that eyeglass cross section in focus hot spot power smooth is fitted Bezier Gaussian Profile cut away view;
Fig. 9 is that eyeglass focuses on depth of focus section defocus section hot spot power smooth fitting Bezier Gaussian Profile cut away view.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made Embodiment, belongs to the scope of protection of the invention.
Fig. 1~4 are referred to, the present invention provides a kind of focusing and obtains Diode laser Bessel-Gaussian beam novel optical lens, Including many annulus curved surfaces 2 and focusing curved surface 1, many annulus curved surfaces 2 and focusing curved surface 1 are overlapped mutually setting with coaxial manner, polycyclic It is provided with band curved surface 2 and annulus 3 is set with concentric structure, the surface of annulus 3 is sphere or aspherical, is set between adjacent ring band 3 Annular optical axis 4 is equipped with, focusing curved surface 1 is sphere or aspherical.Under parallel or near parallel input light, focal beam spot can be obtained high Power density scope is minimum, and peak power density is high, peak power density difference very little in depth of focus extremely long and focal depth range Bessel-Gaussian beam.It is optimal from sphere scheme in view of this kind of unnecessary anaberration of eyeglass and machining eyeglass cost.This Sphere scheme is selected in design, but covers aspherical and both combinations.
Wherein, annular optical axis 4 is concentric with center of lens axle and is parallel to each other.The positive and negative assembling mode of eyeglass can be used, and be needed Parallel input light or nearly parallel input light are incident, and focal beam spot position is focal position before and after eyeglass, and eyeglass focal length depends on another One focuses on curved surface correspondence focal length.
Also, focal beam spot overall size Stimulated Light light beam parameters influence, the focal beam spot of design eyeglass is depended primarily on.It is burnt Hot spot overall size is directly proportional to the width of annulus 3 of coaxial many annulus Gauss mirrors, is inversely proportional with the focal length of corresponding annulus 3, another with eyeglass One focusing surface correspondence focal length is directly proportional, and proportionality coefficient is about 1.Depth of focus length is with focus on light beam center high power density distributed area Domain sizes change to weigh.
At the same time, eyeglass is applied to improves fine laser processing technology, the particularly Laser Processing of transparent material such as glass The techniques such as glass cutting.Compared with prior art, the invention can be focused on using single eyeglass and obtain Bessel-Gaussian beam, in formation Heart scope Energy distribution is high, and the extremely low focus on light beam section of edge distribution, its high power density scope hot spot is minimum, and depth of focus is extremely long, Hot spot peak power density is close in depth of focus section.This kind of eyeglass assembly precision requirement is general, has to laser beam pattern wider Universality, can improve and improve the cutting technique of Laser focus technique, particularly transparent material.
Annulus segmentation is carried out to parallel or near parallel entrance beam by the polycyclic curved surface band of eyeglass, then by another curve focusing Cyclization band light beam;Or, parallel or near parallel input light is focused on by lens curve and shunk, then by another with polycyclic curved surface The minute surface of band is transformed into annulus focus on light beam.Annulus light beam interlocks and is superimposed upon on focal plane, forms the hot spot of certain size size, Because each annulus light beam has an energy ring to focus in optical axis focus, so as to greatly improve focal beam spot central energy point Cloth, reduces edge energy distribution, with reference to the staggeredly effect of light beam, and then obtains Bessel-Gaussian beam.
Wherein, coaxial many annulus Gauss mirror annular surface bands are spherical annulus or aspherical annulus, and another curved surface can also With sphere or aspherical.In view of eyeglass is without deliberately anaberration, and it is reduces cost, eyeglass one side selects spherical annulus, another Face is that sphere is optimal.
Embodiment 1
The annulus of coaxial many annulus Gauss mirrors is presented equidistant, and the width of annulus 3 is T, beneficial to raising eyeglass in different laser Stability under pattern, each annulus 3 is spherical annulus, and spherical radius is equal to be R0, and another spherical radius is R1.Eyeglass Diameter depends on launching spot size.
As shown in fig. 6, by taking circular parallel or near directional light incidence as an example, D is focal beam spot overall diameter, BFL1, BFL2 point Dui Ying not be under corresponding assembling mode, the back focal length that spherical radius R1 and lens thickness and refractive index are formed.Wherein, light is focused on Spot diameter D is directly proportional to spherical radius R1 and annulus width T, is inversely proportional with the spherical radius of annulus 3, and theoretical proportions coefficient is about 1. As shown in Figure 8, eyeglass focal beam spot overall diameter is D, and the spot diameter that can be actually distributed with high power density is about d, and d is much smaller than Focal beam spot overall diameter D.
Embodiment 2
Because eyeglass positive and negative can be assembled, as shown in fig. 7, by taking circular parallel or near directional light incidence as an example, D is focal beam spot Overall diameter, BFL1, BFL2 are corresponded under corresponding assembling mode respectively, what spherical radius R1 and lens thickness and refractive index were formed Back focal length.Wherein, focal beam spot diameter D is directly proportional to spherical radius R1 and annulus width T, is inversely proportional with the spherical radius of annulus 3, Theoretical proportions coefficient is about 1.Eyeglass depth of focus section arbitrary section hot spot overall diameter as seen from Figure 9 is D1, and D1 is with defocus distance Increase and increase, actually can with high power density be distributed spot diameter d be basically unchanged.In depth of focus section, focal beam spot peak value Power density difference is little.
Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with Understanding can carry out various changes, modification, replacement to these embodiments without departing from the principles and spirit of the present invention And modification, the scope of the present invention be defined by the appended.

Claims (2)

1. a kind of focusing obtains Diode laser Bessel-Gaussian beam novel optical lens, it is characterised in that:Including many annulus curved surfaces With focusing curved surface, many annulus curved surfaces and focusing curved surface are overlapped mutually setting with coaxial manner;Set on many annulus curved surfaces It is equipped with and annulus is set with concentric structure, cuff surface is sphere or aspherical, and annular optical axis is provided between adjacent ring band:Institute It is sphere or aspherical to state focusing curved surface;
The annular optical axis is concentric with center of lens axle and is parallel to each other;
Many annulus curved surfaces and the focusing positive and negative assembling mode of curved surface can be used, and need parallel input light or nearly parallel input light to enter Penetrate, focal beam spot position is focal position before and after eyeglass, eyeglass focal length depends on another focusing curved surface correspondence focal length;
The focal beam spot overall size Stimulated Light light beam parameters influence, depending on the focal beam spot of design eyeglass;
The focal beam spot overall size is directly proportional to the annulus width of coaxial many annulus Gauss mirrors, with corresponding annulus focal length into anti- Than focal length corresponding with another focusing surface of eyeglass is directly proportional, and proportionality coefficient is 1;
The depth of focus length is weighed with focus on light beam center high power density distributed areas change in size.
2. a kind of focusing according to claim 1 obtains Diode laser Bessel-Gaussian beam novel optical lens, its feature It is:Many annulus curved surfaces and focusing curved surface are applied to and improve fine laser processing technology, the Laser Processing work of transparent material Skill.
CN201610107420.9A 2016-02-26 2016-02-26 One kind is focused on and obtains Diode laser Bessel-Gaussian beam novel optical lens Active CN105607162B (en)

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CN105891916B (en) * 2016-06-26 2018-08-14 上海嘉强自动化技术有限公司 A kind of aspherical mirror based on axicon lens Yu focus lamp characteristic
DE102016115844A1 (en) * 2016-07-01 2018-01-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Arrangement for generating a Bessel beam
CN109683331A (en) * 2019-02-01 2019-04-26 长春理工大学 A kind of more bottle beams optical optical tweezers systems based on bifocal lens
CN110018565B (en) * 2019-03-19 2021-10-01 北京工业大学 Method and device for improving focusing capacity of ultrafast laser beam
CN114839768B (en) * 2022-04-07 2023-05-12 浙江大学 Far-field focusing capability improving method based on annular array Ai Ligao S beam

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CN104297925A (en) * 2014-10-11 2015-01-21 北京工业大学 Design method of hybrid refractive-diffractive element for achieving femtosecond laser long focal depth
CN205720742U (en) * 2016-02-26 2016-11-23 上海嘉强自动化技术有限公司 A kind of focusing obtains Diode laser Bessel-Gaussian beam novel optical lens

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TW201106106A (en) * 2009-08-13 2011-02-16 Univ Nat Taiwan Optical etching device for laser machining

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Publication number Priority date Publication date Assignee Title
CN104297925A (en) * 2014-10-11 2015-01-21 北京工业大学 Design method of hybrid refractive-diffractive element for achieving femtosecond laser long focal depth
CN205720742U (en) * 2016-02-26 2016-11-23 上海嘉强自动化技术有限公司 A kind of focusing obtains Diode laser Bessel-Gaussian beam novel optical lens

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Address after: No. 8 Dongbao Road, Songjiang District, Shanghai, 2016

Patentee after: Jiaqiang (Shanghai) Intelligent Technology Co.,Ltd.

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Address before: 201611 first floor, No. 56, Lane 1500, Xinfei Road, Songjiang District, Shanghai

Patentee before: SHANGHAI EMPOWER AUTOMATION TECHNOLOGY Co.,Ltd.

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