CN210010591U - Laser head device for realizing large depth-diameter ratio processing - Google Patents

Laser head device for realizing large depth-diameter ratio processing Download PDF

Info

Publication number
CN210010591U
CN210010591U CN201920804146.XU CN201920804146U CN210010591U CN 210010591 U CN210010591 U CN 210010591U CN 201920804146 U CN201920804146 U CN 201920804146U CN 210010591 U CN210010591 U CN 210010591U
Authority
CN
China
Prior art keywords
axicon
diffraction
light beam
positive
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201920804146.XU
Other languages
Chinese (zh)
Inventor
龙芋宏
梁恩
黄宇星
杨林帆
刘清原
周嘉
赵要武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guilin University of Electronic Technology
Original Assignee
Guilin University of Electronic Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guilin University of Electronic Technology filed Critical Guilin University of Electronic Technology
Priority to CN201920804146.XU priority Critical patent/CN210010591U/en
Application granted granted Critical
Publication of CN210010591U publication Critical patent/CN210010591U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Laser Beam Processing (AREA)

Abstract

The utility model discloses a laser head device for realizing large depth-diameter ratio processing, which comprises a light beam transmission conversion mechanism, wherein the light beam transmission conversion mechanism converts a laser beam emitted by a laser into a diffraction-free focused light beam acting on the surface of a workpiece, and the light beam transmission conversion mechanism comprises a beam expanding component and an axicon combined module; an axicon combination module comprises a positive axicon I and a monocular which are coaxially arranged along a light path; the other type of axicon combined module comprises an axicon I, an axicon II and an axicon III, wherein the axicon I is coaxially arranged along a light path, and the axicon II and the axicon III have the same parameters and are in mirror symmetry; and the axicon combined module comprises a negative axicon, a positive axicon IV and a positive axicon V, wherein the negative axicon is coaxially arranged along the light path, and the positive axicon IV and the positive axicon V have consistent parameters and are in mirror symmetry. The utility model discloses utilize axicon composite module to generate the diffraction-free focused beam who has certain working distance, utilize the characteristic of diffraction-free focused beam, improve the quality of focused beam, obtain less focus center facula and longer collimation district.

Description

Laser head device for realizing large depth-diameter ratio processing
Technical Field
The utility model relates to a laser device specifically is a laser head device who realizes big depth-diameter ratio processing.
Background
The laser processing technology is a processing technology for cutting, welding, surface treatment, punching, additive manufacturing, micro-machining, and the like of a material by utilizing the characteristic of interaction between a laser beam and a substance. The laser processing has the main characteristics that: processing in a non-contact manner; the heat affected zone of the processed material is small; the processing is flexible; processing a micro area; the work piece in the sealed container can be processed by the transparent medium; can be used for processing various metal and non-metal materials with high hardness, high brittleness and high melting point.
The amplitude of the gaussian beam is rotationally symmetric with the distribution of the illuminance, gradually decreasing in intensity from the optical axis to the edge and having a gaussian shape. The minimum beam diameter at the focus of the Gaussian beam is called as beam waist, the key influencing factors of laser processing by the Gaussian beam are the beam waist radius of the beam and the beam divergence angle, and effective processing can be carried out only within the range of twice Rayleigh length during processing. The Rayleigh length of the Gaussian beam is calculated by the formula
Figure BDA0002078146280000011
And as the rayleigh length of the gaussian beam is smaller, the small rayleigh length cannot meet the processing requirement of a thicker material along with the increase of the processing depth, so that the application of the traditional laser processing is limited to a certain extent.
Aiming at the defect of the Gaussian beam, Durnin proposes the concept of a non-diffracted beam (zero-order bessel beam) in 1987, the non-diffracted beam has the characteristics of small central spot diameter, uniform energy distribution, long collimation area and the like, the non-diffracted beam can reach a central spot of dozens of microns, and the collimation length can reach dozens of centimeters in the size order of the central spot; when the method is used for machining, the dynamic range of the machining depth is large, the sensitivity to the position error of the workpiece is zero in a diffraction-free range, the flatness of the surface of the workpiece is high in adaptability, and the problems of neither precise focusing nor parfocal need to be considered along the direction of an optical axis. The non-diffraction beam is widely applied to the fields of optical tweezers, nonlinear optics, laser collimation and the like due to the unique characteristics of the non-diffraction beam, and the characteristics of the non-diffraction bessel beam open up a new way for the application of laser processing.
Ideal bessel beams are difficult to realize in reality, but people can obtain approximate bessel beams through an experimental method, wherein the most traditional structure is that a single axicon is utilized to generate undiffracted beams, the undiffracted beams generated by the traditional refraction axicon have the characteristics of high energy utilization rate, low manufacturing cost and the like, but the defect of short working distance limits the application of the bessel beams in more fields.
SUMMERY OF THE UTILITY MODEL
The utility model provides a not enough to prior art, the utility model provides a realize laser head device of big depth-diameter ratio processing, the technical problem that solve obtains a bessel light beam that has big working distance and realizes working distance's controllable.
Can solve the laser head device of big depth-diameter ratio processing of realization of above-mentioned technical problem, its first technical scheme includes beam transmission transform mechanism, beam transmission transform mechanism converts the laser beam that the laser instrument sent into the diffraction-free focused beam that is used in on the work piece surface, beam transmission transform mechanism is including expanding subassembly and axicon composite module, expand the subassembly with the laser beam expansion for parallel gaussian beam, the difference is that axicon composite module includes along the coaxial positive axicon I and the single tube telescope that sets up of light path, positive axicon I converts gaussian beam into diffraction-free beam, the single tube telescope converts diffraction-free beam into diffraction-free focused beam, distance between the diffraction-free focus area that diffraction-free focused beam formed and the single tube telescope is the working distance of diffraction-free focused beam.
Can solve the laser head device of big depth-diameter ratio processing of realization of above-mentioned technical problem, its second technical scheme includes light beam transmission transform mechanism, light beam transmission transform mechanism converts the laser beam that the laser instrument sent into the diffraction-free focused beam that is used in on the work piece surface, light beam transmission transform mechanism is including expanding subassembly and axicon combination module, expand the subassembly with the laser beam and expand the gauss light beam that is parallel, the difference is that axicon combination module includes along the coaxial setting of light path positive axicon I and parameter unanimity and positive axicon II and positive axicon III that mirror symmetry arranged, positive axicon I converts gauss light beam into the diffraction-free light beam, positive axicon II converts the diffraction-free light beam into parallel light beam, positive axicon III converts parallel light beam into the diffraction-free focused beam, the distance between the diffraction-free zone that the diffraction-free focused beam formed and positive axicon III is the diffraction-free focused beam The working distance.
The third technical proposal of the laser head device which can solve the technical problems and realize the processing with large depth-diameter ratio comprises a light beam transmission and conversion mechanism, the beam transmission and conversion mechanism converts the laser beam emitted by the laser into a non-diffraction focused beam acting on the surface of the workpiece, the light beam transmission and conversion mechanism comprises a beam expanding component and an axicon combined module, wherein the beam expanding component expands a laser beam into parallel Gaussian beams, the difference is that the axicon combined module comprises a coaxial negative axicon and a positive axicon IV and a positive axicon V which have consistent parameters and are arranged in a mirror symmetry manner, the negative axicon converts the Gaussian beam into an annular hollow beam, the positive axicon IV converts the annular hollow beam into a parallel beam, the positive axicon V converts the parallel light beams into non-diffraction focusing light beams, and the distance between a non-diffraction focusing area formed by the non-diffraction focusing light beams and the positive axicon V is the working distance of the non-diffraction focusing light beams.
The utility model has the advantages that:
1. the utility model discloses realize that the laser head device of big depth-diameter ratio processing utilizes axicon lens combination module to generate no diffraction light beam, utilizes the characteristic of no diffraction light beam, improves the quality of focusing light beam, obtains less focus center facula and longer collimation district.
2. The utility model discloses utilize the characteristic that does not have diffraction beam focus and obtain long distance collimation district, reduce the adjustment degree of difficulty of light beam to further reduce the laser head and add alignment adjusting device precision and the complexity to the laser man-hour.
3. The utility model discloses well adopted generation does not have axicon combination module of diffraction focusing light beam, compare in the simple single positive axicon who produces no diffraction light beam, can increase working distance and realize that the working distance is controllable, realize big depth-diameter ratio processing, improved the reliability and the stability of laser head processing to further guarantee the optical characteristic who corresponds.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a first scheme of the axicon combiner module in the embodiment of fig. 1.
Fig. 3 is a schematic structural diagram of a second scheme of the axicon combiner module in the embodiment of fig. 1.
Fig. 4 is a schematic structural diagram of a third scheme of the axicon combination module in the embodiment of fig. 1.
And (3) identifying the figure number: 1. a laser beam; 2. a workpiece; 3. a light beam transmission conversion mechanism; 4. a beam expanding assembly; 5. a diffraction-free focused beam; 6. an axicon combination module; 7. an axial axicon I; 8. a monocular telescope; 9. a positive axicon II; 10. positive axicon lens III; 11. a negative axicon; 12. a positive axicon IV; 13. a positive axicon V; 14. no diffracted beam; 15. an annular hollow beam; 16. a Gaussian beam; 17. a parallel light beam.
Detailed Description
The technical solution of the present invention will be further explained with reference to the embodiments shown in the drawings.
The utility model discloses realize big depth and diameter ratio processing's laser head device, including light beam transmission transform mechanism 3, light beam transmission transform mechanism 3 converts the laser beam 1 that the top laser instrument sent into and is used in 2 no diffraction focusing light beams 5 on the surface of below work pieces, light beam transmission transform mechanism 3 includes beam expanding component 4 and axicon combination module 6, beam expanding component 4 expands into parallel gauss light beam 16 with laser beam 1, axicon combination module 6 focuses on 16 gauss light beams and produces no diffraction focusing light beam 5, as shown in figure 1.
The axicon combined module 6 has three optimization schemes:
the axicon combination module 6 comprises an axicon I7 and a monocular telescope 8 which are coaxially arranged along the direction of a light path, the plane diameter of the incident end of the axicon I7 (forward direction) is greater than the diameter of a Gaussian beam 16, and the base angle degree of the axicon I7 is gamma1The positive axicon I7 has refractive index n1, and the angle between the inward refracted ray and the optical axis is theta1The maximum transmission distance of the non-diffracted light beam 14 generated by the positive axicon I7 is Zmax1The distance between the monocular telescope 8 and the positive axicon I7 is larger than Zmax1The monocular telescope 8 focuses the non-diffracted beam 14 generated by the positive axicon I7 into the non-diffracted focused beam 5, and the transmission distance of the non-diffracted focused beam 5 is Zmax2(diffraction free zone), transmission distance Zmax2The distance D from the monocular telescope 8 is the working distance, r, of the non-diffractive focused beam 50The diameter of the central spot of the non-diffracted focused beam 5 is shown in fig. 2.
Two, axicon composite module 6 includes according to the coaxial positive axicon I7 (forward), positive axicon II 9 (backward) and positive axicon III 10 (forward) that set up of light path trend, the incident end plane diameter of positive axicon I7 is greater than 16 diameters of gauss light beam, and the base angle degree of positive axicon I7 is gamma1The positive axicon I7 has refractive index n1, and the angle between the inward refracted ray and the optical axis is theta1The maximum transmission distance of the non-diffracted light beam 14 generated by the positive axicon I7 is Zmax1The parameters of the positive axicon II 9 and the positive axicon III 10 are the same and are arranged symmetrically in the mirror direction (the opposite end surfaces of the positive axicon II 9 and the positive axicon III 10 are planes), and the positive axicon II 9 and the positive axicon III 10 are arranged symmetricallyThe refractive indexes of the axicons III 10 are all n2, and the base angle degrees are all gamma2The included angle between the refracted ray of the positive axicon III 10 and the optical axis is theta2The distance L between the positive axicon II 9 and the positive axicon I7 is larger than Zmax1And at the distance L, the positive axicon II 9 converts the undiffracted light beam 14 into a parallel light beam 17, the positive axicon III 10 converts the parallel light beam 17 into the undiffracted focused light beam 5, and the transmission distance of the undiffracted focused light beam 5 is Zmax2(diffraction free zone), transmission distance Zmax2The distance D from the positive axicon III 10 is the working distance of the non-diffraction focusing light beam 5, r0The diameter of the central spot of the non-diffracted focused beam 5 is shown in fig. 3.
Thirdly, axicon combination module 6 includes that move towards coaxial negative axicon 11, positive axicon IV 12 (backward) and positive axicon V13 (forward) that set up according to the light path, positive axicon IV 12 is the same with positive axicon V13's parameter and mirror symmetry sets up (positive axicon IV 12 is the plane with positive axicon V13 relative terminal surface), the incident end plane diameter of negative axicon 11 is greater than 16 diameters of gaussian beam, and the base angle number of negative axicon 11 is gamma1The negative axicon 11 has a refractive index n1, and the angle between the outward refracted ray and the optical axis is theta1The positive axicon IV 12 and the positive axicon V13 both have refractive indexes of n2 and base angle degrees of gamma2The included angle between the refracted ray of the positive axicon V13 and the optical axis is theta2The transmission distance of the annular hollow light beam 15 generated by the negative axicon 11 is L (i.e. the distance between the negative axicon 11 and the positive axicon iv 12), under the transmission distance L, the outer diameter (i.e. the diameter of the right end in fig. 4) of the annular hollow light beam 15 is smaller than the diameter of the positive axicon iv 12, the annular hollow light beam 15 is converted into a parallel light beam 17 by the positive axicon iv 12, the parallel light beam 17 is finally converted into the non-diffraction focusing light beam 5 by the positive axicon v 13, and the transmission distance of the non-diffraction focusing light beam 5 is Zmax(diffraction free zone), transmission distance ZmaxThe distance D from the positive axicon V13 is the working distance of the non-diffraction focusing light beam 5, r0The working distance D is the diameter of the central light spot of the diffraction-free focused light beam 5 and is determined by the parameters of the negative axicon 11, the positive axicon IV 12 and the positive axicon V13The distance L between the negative axicon 11 and the positive axicon IV 12 is determined together, as shown in figure 4.
In the above three embodiments, the third axicon combination module 6 has obvious advantages: the Gaussian beam 16 is converted into an annular hollow beam 15 through the negative axicon 11, the annular hollow beam 15 is converted into a parallel beam 17 through the positive axicon IV 12, and the parallel beam 14 is converged and converted into a non-diffraction focusing beam 5 through the positive axicon V13 and then output; the third axicon combination module 6 adopts the combination of a positive axicon and a negative axicon, thereby greatly reducing the optical path, shortening the optical path of the system and better reducing the overall size of the laser head.

Claims (3)

1. Realize laser head device of big depth-diameter ratio processing, including light beam transmission transform mechanism (3), laser beam (1) that light beam transmission transform mechanism (3) sent the laser instrument are converted into and are used in no diffraction focusing light beam (5) on work piece (2) surface, light beam transmission transform mechanism (3) are including beam expanding component (4) and axicon composite module (6), beam expanding component (4) expand laser beam (1) for parallel gaussian beam (16), its characterized in that: the axicon combination module (6) is including along the coaxial positive axicon I (7) and the monocular (8) that set up of light path, positive axicon I (7) convert gaussian beam (16) into no diffraction light beam (14), monocular (8) become no diffraction light beam (14) conversion and become no diffraction focus light beam (5), the working distance of no diffraction focus light beam (5) is apart from between the no diffraction focus area that no diffraction focus light beam (5) formed and monocular (8).
2. Realize laser head device of big depth-diameter ratio processing, including light beam transmission transform mechanism (3), laser beam (1) that light beam transmission transform mechanism (3) sent the laser instrument are converted into and are used in no diffraction focusing light beam (5) on work piece (2) surface, light beam transmission transform mechanism (3) are including beam expanding component (4) and axicon composite module (6), beam expanding component (4) expand laser beam (1) for parallel gaussian beam (16), its characterized in that: axicon combination module (6) are including the positive axicon II (9) and positive axicon III (10) of consistent and mirror symmetry of positive axicon I (7) and parameter along the coaxial setting of light path, positive axicon I (7) convert gaussian beam (16) into no diffraction light beam (14), no diffraction light beam (14) are converted into parallel beam (17) in positive axicon II (9), positive axicon III (10) convert parallel beam (17) into no diffraction focusing beam (5), the distance between no diffraction focusing region that no diffraction focusing beam (5) formed and positive axicon III (10) is the working distance of no diffraction focusing beam (5).
3. Realize laser head device of big depth-diameter ratio processing, including light beam transmission transform mechanism (3), laser beam (1) that light beam transmission transform mechanism (3) sent the laser instrument are converted into and are used in no diffraction focusing light beam (5) on work piece (2) surface, light beam transmission transform mechanism (3) are including beam expanding component (4) and axicon composite module (6), beam expanding component (4) expand laser beam (1) for parallel gaussian beam (16), its characterized in that: the axicon combination module (6) include along the unanimous and mirror symmetry's positive axicon IV (12) and positive axicon V (13) of negative axicon (11) and the parameter of the coaxial setting of light path, negative axicon (11) generate gaussian beam (16) for annular hollow beam (15), positive axicon IV (12) generate annular hollow beam (15) for parallel beam (17), positive axicon V (13) generate parallel beam (17) into no diffraction focusing beam (5), the distance between no diffraction focusing region that no diffraction focusing beam (5) formed and positive axicon V (13) is the working distance of no diffraction focusing beam (5).
CN201920804146.XU 2019-05-30 2019-05-30 Laser head device for realizing large depth-diameter ratio processing Expired - Fee Related CN210010591U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201920804146.XU CN210010591U (en) 2019-05-30 2019-05-30 Laser head device for realizing large depth-diameter ratio processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201920804146.XU CN210010591U (en) 2019-05-30 2019-05-30 Laser head device for realizing large depth-diameter ratio processing

Publications (1)

Publication Number Publication Date
CN210010591U true CN210010591U (en) 2020-02-04

Family

ID=69318297

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201920804146.XU Expired - Fee Related CN210010591U (en) 2019-05-30 2019-05-30 Laser head device for realizing large depth-diameter ratio processing

Country Status (1)

Country Link
CN (1) CN210010591U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110076449A (en) * 2019-05-30 2019-08-02 桂林电子科技大学 Realize the laser head assembly of big aspect ratio processing
CN113125121A (en) * 2021-04-16 2021-07-16 森思泰克河北科技有限公司 Lens spherical aberration measuring system and method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110076449A (en) * 2019-05-30 2019-08-02 桂林电子科技大学 Realize the laser head assembly of big aspect ratio processing
CN113125121A (en) * 2021-04-16 2021-07-16 森思泰克河北科技有限公司 Lens spherical aberration measuring system and method
CN113125121B (en) * 2021-04-16 2022-07-01 森思泰克河北科技有限公司 Lens spherical aberration measuring system and method

Similar Documents

Publication Publication Date Title
CN107824959B (en) Laser drilling method and system
CN111505831B (en) Focal spot focal depth variable Bessel beam laser processing system and method
CN110076449A (en) Realize the laser head assembly of big aspect ratio processing
CN108427203A (en) One kind being continuously adjusted focus on light beam angle of divergence optical system based on axicon lens
CN210010591U (en) Laser head device for realizing large depth-diameter ratio processing
CN208224631U (en) A kind of optical system generating low speckle annular beam
CN105891916B (en) A kind of aspherical mirror based on axicon lens Yu focus lamp characteristic
CN109530913B (en) Laser processing optimization method and system for Bessel beam
CN110977152A (en) SLM double-laser combined machining system
CN205720742U (en) A kind of focusing obtains Diode laser Bessel-Gaussian beam novel optical lens
CN105607162B (en) One kind is focused on and obtains Diode laser Bessel-Gaussian beam novel optical lens
CN103252575B (en) A kind of optical delivery method and system for Materialbearbeitung mit Laserlicht
CN209867670U (en) Optical lens group capable of realizing switching of light spot energy distribution and laser processing head
CN112975171B (en) Ultrafast laser micropore rotary-cut processingequipment
CN207020405U (en) A kind of optical system for producing oval hollow focus on light beam
CN212885690U (en) Bifocal laser welding optical system and laser welding head thereof
CN109676246A (en) Split type laser focusing device
CN211564832U (en) SLM double-laser composite processing device
CN103240524A (en) Time and focus dividing device and method based on scanning galvanometer
CN210803879U (en) Flaky Bessel light beam generating device
CN205720743U (en) A kind of aspherical mirror based on axicon lens Yu focus lamp characteristic
CN111736355A (en) Adjustable energy distribution optical system based on micro-lens group
CN210427969U (en) ZOOM cutting device based on adjustable annular light spot of aspherical mirror
CN110018565B (en) Method and device for improving focusing capacity of ultrafast laser beam
CN207965372U (en) One kind being continuously adjusted focus on light beam angle of divergence optical system based on axicon lens

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20200204

Termination date: 20200530