CN108427203A - One kind being continuously adjusted focus on light beam angle of divergence optical system based on axicon lens - Google Patents
One kind being continuously adjusted focus on light beam angle of divergence optical system based on axicon lens Download PDFInfo
- Publication number
- CN108427203A CN108427203A CN201810290313.3A CN201810290313A CN108427203A CN 108427203 A CN108427203 A CN 108427203A CN 201810290313 A CN201810290313 A CN 201810290313A CN 108427203 A CN108427203 A CN 108427203A
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- China
- Prior art keywords
- axicon lens
- anaberration
- microscope group
- focus
- light beam
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
Abstract
The invention discloses one kind being continuously adjusted focus on light beam angle of divergence optical system based on axicon lens, including anaberration collimation microscope group, the first axicon lens, the second axicon lens and the anaberration of sequence arrangement focus microscope group from the object side to image side；Wherein, it is circular eyeglass that anaberration collimation microscope group, first axicon lens, second axicon lens and the anaberration, which focus microscope group, and light shaft coaxle；The cone angle of first axicon lens is identical as the cone angle of the second axicon lens, and apex angle is opposite or places in opposite directions.It is provided by the invention that solid light beam is converted to by hollow circular light beam using double-disk axicon lens based on the continuously adjustable focus on light beam angle of divergence optical system of axicon lens, change the focus on light beam angle of divergence by adjusting the first axicon lens and the second axicon lens spacing, change focused spot position by adjusting anaberration focusing microscope group, it cuts and applies suitable for high power optical fibre laser, the cutting speed and quality of medium-thick plate can be substantially improved.
Description
Technical field
The present invention relates to high power laser light cutting technique fields, it is more particularly related to a kind of saturating based on axial cone
Mirror is continuously adjusted focus on light beam angle of divergence optical system.
Background technology
Laser processing technology covers a variety of laser processing technologies such as laser cutting, welding, quenching, punching, micro Process, profit
With the fundamental characteristics of high-order harmonics spectrum.Due to laser beam and the untouchable of rapidoprint, process velocity and matter
The advantages such as amount, it is a kind of new and high technology that can not be substituted to have established laser processing technology.
Present laser cutting accounts for entirely laser machining the main status of industry, wherein again headed by optical-fiber laser is cut
It wants.Optical fiber laser other than good beam quality, have due to optical fiber flexibility and to near-infrared light beam couple well it is defeated
Go out so that optical fiber laser occupation rate of market becomes increasingly conspicuous.Optical fiber laser multikilowatt has been quite universal at present, and myriawatt grade swashs
Light device also gradually shows market, even ten myriawatt grades also this life, all kinds of processing technologys of optical-fiber laser is allowed all the more to generalize.
Optical laser cutting head is generally fixed-focus cutting head, that is, collimating mirror focal length is fixed with focus lamp focal length, is passed through
The focus lamp mode of different focal length is changed to realize the cutting of different-thickness plank.But with the increase of laser power, ZOOM light
System is also gradually applied on optical laser cutting head, and one of reason is the plank for different-thickness, material, theoretically right
Answer one group of best focus configuration and cutting technique, in a manner of replacing focus lamp, usual effect and not up to best, ZOOM light
The appearance of system realizes the case where a set of light path replaces multigroup lens combination.
It is well known that the cutting for medium-thick plate, generally use defocus cutting technique, for example, in thick carbon steel using just from
Burnt processing method, middle thickness stainless steel is then using negative defocus processing method, and under normal conditions, defocusing amount is not small, often exceeds
Focus on light beam depth of focus scope.When one of reason is that plank is thicker, near focal point hot spot is smaller, and joint-cutting is too thin, cutting gas or
Auxiliary gas can not reach predictive role to plank completely in cutting process, so that cutting section difference or can not cut etc. existing
As occurring.For ZOOM optical systems, the cutting of medium-thick plate is also restricted by above-mentioned technique, in other words, ZOOM optics
Although system has a focus spot size continuously adjustable, but in use it is main be still utilized the focus on light beam angle of divergence it is adjustable this
One characteristic.
In addition, solid Gauss or Gaussian-Like beam, since central energy density is higher, the relatively low phenomenon of edge fluence is made
Use the solid light spot edge energy density of same size on plank there is no ring-shaped light spot edge fluences high, cutting speed
Also can be relatively limited, this TRUMPF etc. is based on to propose that ring-shaped light spot cutting scheme, cutting speed have with quality under fixed-focus system
Further promoted, but focus on light beam can not carry out angle of divergence adjusting, and there are eyeglasses to be used interchangeably wind in laser beam perforation
The defects of dangerous.
Invention content
It is an object of the invention to solve at least the above, and provide the advantages of at least will be described later.
It is a still further object of the present invention to provide a kind of angle of divergence of focus on light beam, adjustable and focused spot position is adjustable
Be suitable for high power optical fibre laser cutting application be continuously adjusted focus on light beam angle of divergence optical system based on axicon lens.
To achieve the goals above, the invention discloses one kind being continuously adjusted focus on light beam angle of divergence light based on axicon lens
System, including from the object side to image side sequence arrangement anaberration collimation microscope group, the first axicon lens, the second axicon lens and
Anaberration focuses microscope group；
Wherein, the anaberration collimation microscope group, first axicon lens, second axicon lens and the picture that disappears
It is circular eyeglass that difference, which focuses microscope group, and light shaft coaxle；
The cone angle of first axicon lens is identical as the cone angle of the second axicon lens, and first axicon lens
Apex angle it is opposite with the apex angle of the second axicon lens or opposite place.
Preferably, the anaberration collimation microscope group is that anaberration spherical surface collimates microscope group, and it is to disappear that the anaberration, which focuses microscope group,
Aberration spherical surface focusing microscope group.
Preferably, first axicon lens are fixed, between second axicon lens and first axicon lens
Spacing is adjustable, realizes that beam divergence angle is adjusted after focusing.
Preferably, the anaberration focuses the focal length of microscope group more than the focal length of anaberration collimation microscope group, the picture that disappears
The spacing that difference focuses between microscope group and anaberration collimation microscope group is adjustable.The anaberration focusing microscope group focal length is longer and along light
Axis is continuously adjustable, realizes that focused spot position is adjusted.
Preferably, anaberration collimation microscope group, first axicon lens, second axicon lens and described disappear
It is fused silica material that aberration, which focuses microscope group,.
The present invention includes at least following advantageous effect：
1, the structure design provided by the invention that focus on light beam angle of divergence optical system is continuously adjusted based on axicon lens is new
Solid light beam is converted to hollow circular light beam by grain husk using double-disk axicon lens, by adjusting the first axicon lens and second
Axicon lens spacing changes the focus on light beam angle of divergence, and focusing microscope group by adjusting anaberration changes focused spot position, fits
It cuts and applies for high power optical fibre laser, can be substantially improved especially with respect to traditional fixed-focus optical system and ZOOM optical systems
The cutting speed and quality of medium-thick plate.
2, the second axial cone provided by the invention that focus on light beam angle of divergence optical system is continuously adjusted based on axicon lens is saturating
Mirror is continuously adjusted relative to the first axicon lens on optical axis, and adjustable range and angle of divergence variation are linear, need not answer
Miscellaneous software program is controlled, while the variation of the focus on light beam angle of divergence and focused spot variation are independences, two groups
It adjusts eyeglass to be independent of each other, greatly simplifies eyeglass driving difficulty.
3, the focus on light beam provided by the invention that focus on light beam angle of divergence optical system is continuously adjusted based on axicon lens,
Focus and be nearby solid hot spot, can be used coke after defocus certain distance for ring-shaped light spot in cut deal laser cutting process
Point hot spot quickly perforates to plank, reuses defocused spot and carries out high-speed cutting, therefore both perforation and cutting to plank
It gets both.
Part is illustrated to embody by further advantage, target and the feature of the present invention by following, and part will also be by this
The research and practice of invention and be understood by the person skilled in the art.
Description of the drawings
Fig. 1 is the optical element of the present invention that focus on light beam angle of divergence optical system is continuously adjusted based on axicon lens
The sectional view of arrangement.
Fig. 2 is the beam Propagation of the present invention that focus on light beam angle of divergence optical system is continuously adjusted based on axicon lens
The sectional view of process.
Fig. 3 is the focus on light beam of the present invention that focus on light beam angle of divergence optical system is continuously adjusted based on axicon lens
The schematic diagram that the angle of divergence is adjusted.
Fig. 4 is the focused spot of the present invention that focus on light beam angle of divergence optical system is continuously adjusted based on axicon lens
The schematic diagram that position is adjusted.
Specific implementation mode
The present invention is described in further detail with reference to the accompanying drawings and embodiments, to enable those skilled in the art's reference
Specification word can be implemented according to this.
It should be appreciated that such as " having ", "comprising" and " comprising " term used herein are not precluded one or more
The presence or addition of a other elements or combinations thereof.
As shown in Figure 1, a kind of axicon lens that are based on provided by the invention are continuously adjusted focus on light beam angle of divergence optical system,
Microscope group 4 is focused including anaberration collimation microscope group 1, the first axicon lens 2, the second axicon lens 3 and anaberration.Wherein, disappear picture
It is circular eyeglass and optical axis that difference collimation microscope group 1, the first axicon lens 2, the second axicon lens 3 and anaberration, which focus microscope group 4,
Coaxially, anaberration collimation microscope group 1 can be replaced anaberration spherical surface collimation microscope group, and anaberration focuses microscope group 4 and can be replaced anaberration
Spherical surface focusing microscope group, the first axicon lens 2 are identical as 3 cone angle of the second axicon lens and apex angle is opposite or places in opposite directions.
In the present invention, first axicon lens 2 are fixed, and 32 spacing of opposite first axicon lens of the second axicon lens connects
It is continuous adjustable, realize that beam divergence angle is adjusted after focusing.
In the present invention, anaberration collimation 1 focal length of microscope group is shorter, and the anaberration focuses that 4 focal length of microscope group is longer and edge
Optical axis is continuously adjustable, realizes that focused spot position is adjusted.
In the present invention, the anaberration collimation microscope group 1, the first axicon lens 2, the second axicon lens 3 and anaberration are poly-
4 material of burnt microscope group is fused silica material.
The beam Propagation process of optical system of the present invention is as shown in Figure 2：Go out luminous point 5 in high-capacity optical fiber laser
Under normal incidence, divergent beams collimate microscope group 1 by anaberration, realize the collimation of incident beam, to be by incident beam collimation
Collimated light beam, after the first axicon lens 2, the annular beam dissipated afterwards, annular beam are first converged in formation for collimated light beam incidence
Inner and outer diameter difference is constant, and diverging annular beam obtains parallel annular beam using the second axicon lens 3, is finally gathered by anaberration
The focusing of burnt microscope group 4 forms focused spot 6, and hot spot is solid Gaussian spot at focused spot 6, is then before and after defocus certain distance
Ring-shaped light spot.
As shown in figure 3, optical system of the present invention can realize the adjusting of the focus on light beam angle of divergence, specially：
On the basis of Fig. 2 optical transmission properties, the second axicon lens 3 are moved along optical axis, realize the parallel annular after the second axicon lens 3
Light beam outer diameter is adjusted, but internal-and external diameter difference is constant, and so focusing microscope group 4 by anaberration focuses, and realizes the focus on light beam angle of divergence
Variation；Comparison diagram 2 moves the second axicon lens in Fig. 3 along the direction of optical axis towards the direction for focusing microscope group 4 close to anaberration
3, so that the angle of the focus on light beam angle of divergence is become larger.
As shown in figure 4, optical system of the present invention can realize the adjusting of focused spot position, specially：In Fig. 3
On the basis of, it moves anaberration along optical axis and focuses microscope group 4, focused spot 6 moves, and focused spot is to anaberration focus lamp
Apart from constant, the position for so realizing focused spot 6 is adjusted group 4.Comparison diagram 3, along the direction of optical axis towards remote in Fig. 4
Direction movement anaberration from the second axicon lens 3 focuses microscope group 4, to change the position of focused spot 6.
Structure of the invention is novel in design, and solid light beam is converted to hollow circular light beam using double-disk axicon lens, leads to
The first axicon lens 2 and 3 spacing of the second axicon lens are overregulated to change the focus on light beam angle of divergence, are focused by adjusting anaberration
Microscope group 4 changes focused spot position, is suitable for high power optical fibre laser cutting application, especially with respect to traditional fixed-focus optical system
The cutting speed and quality of medium-thick plate can be substantially improved in system and ZOOM optical systems.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (5)
1. one kind being continuously adjusted focus on light beam angle of divergence optical system based on axicon lens, which is characterized in that including from object side to
Anaberration collimation microscope group, the first axicon lens, the second axicon lens and the anaberration of image side sequence arrangement focus microscope group；
Wherein, the anaberration collimation microscope group, first axicon lens, second axicon lens and the anaberration are poly-
Burnt microscope group is circular eyeglass, and light shaft coaxle；
The cone angle of first axicon lens is identical as the cone angle of the second axicon lens, and the top of first axicon lens
Angle is opposite with the apex angle of the second axicon lens or places in opposite directions.
2. it is according to claim 1 a kind of based on the continuously adjustable focus on light beam angle of divergence optical system of axicon lens, it is special
Sign is that the anaberration collimation microscope group is that anaberration spherical surface collimates microscope group, and it is anaberration spherical surface that the anaberration, which focuses microscope group,
Focus microscope group.
3. it is according to claim 1 a kind of based on the continuously adjustable focus on light beam angle of divergence optical system of axicon lens, it is special
Sign is that first axicon lens are fixed, and the spacing between second axicon lens and first axicon lens is adjustable.
4. it is according to claim 1 a kind of based on the continuously adjustable focus on light beam angle of divergence optical system of axicon lens, it is special
Sign is that the focal length that the anaberration focuses microscope group is more than the focal length that the anaberration collimates microscope group, the anaberration focus lamp
The position of group can be adjusted along optical axis.
5. it is according to claim 1 a kind of based on the continuously adjustable focus on light beam angle of divergence optical system of axicon lens, it is special
Sign is that the anaberration collimation microscope group, first axicon lens, second axicon lens and the anaberration focus
Microscope group is fused silica material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810290313.3A CN108427203A (en) | 2018-04-03 | 2018-04-03 | One kind being continuously adjusted focus on light beam angle of divergence optical system based on axicon lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810290313.3A CN108427203A (en) | 2018-04-03 | 2018-04-03 | One kind being continuously adjusted focus on light beam angle of divergence optical system based on axicon lens |
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| Publication Number | Publication Date |
|---|---|
| CN108427203A true CN108427203A (en) | 2018-08-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810290313.3A Withdrawn CN108427203A (en) | 2018-04-03 | 2018-04-03 | One kind being continuously adjusted focus on light beam angle of divergence optical system based on axicon lens |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108919500A (en) * | 2018-09-19 | 2018-11-30 | 长春理工大学 | Tunable bottle beams optical optical tweezers system based on double light beam laser trap |
| CN111618426A (en) * | 2020-06-05 | 2020-09-04 | 成都拓米电子装备制造有限公司 | Light beam shaping structure and method for improving flexible OLED module laser cutting |
| CN112475638A (en) * | 2020-10-15 | 2021-03-12 | 西安中科微精光子制造科技有限公司 | Laser micropore machining system and method based on axicon lens |
| CN113059279A (en) * | 2021-03-18 | 2021-07-02 | 广东宏石激光技术股份有限公司 | Laser cutting device and cutting method thereof |
| CN113677981A (en) * | 2021-07-06 | 2021-11-19 | 香港应用科技研究院有限公司 | Flexible display inspection system |
| CN113798659A (en) * | 2020-05-29 | 2021-12-17 | 方强 | Optical zoom focusing lens, mechanical structure thereof, optical structure and using method thereof |
| CN114231976A (en) * | 2021-12-27 | 2022-03-25 | 中国人民解放军军事科学院国防科技创新研究院 | Adjustable long focal depth superspeed annular laser cladding processing device |
| EP3978964A1 (en) * | 2020-10-01 | 2022-04-06 | ASML Netherlands B.V. | Achromatic optical relay arrangement |
| CN115464154A (en) * | 2022-09-16 | 2022-12-13 | 爱司凯科技股份有限公司 | Device and method for adjusting laser energy distribution of 3D printing beam by using axicon |
| WO2023279425A1 (en) * | 2021-07-06 | 2023-01-12 | Hong Kong Applied Science and Technology Research Institute Company Limited | Flexible display inspection system |
| CN116079229A (en) * | 2023-03-07 | 2023-05-09 | 长沙麓邦光电科技有限公司 | Point ring laser processing system and processing method thereof |
-
2018
- 2018-04-03 CN CN201810290313.3A patent/CN108427203A/en not_active Withdrawn
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108919500B (en) * | 2018-09-19 | 2020-08-21 | 长春理工大学 | Tunable local hollow beam optical tweezers system based on double-beam laser trap |
| CN108919500A (en) * | 2018-09-19 | 2018-11-30 | 长春理工大学 | Tunable bottle beams optical optical tweezers system based on double light beam laser trap |
| CN113798659A (en) * | 2020-05-29 | 2021-12-17 | 方强 | Optical zoom focusing lens, mechanical structure thereof, optical structure and using method thereof |
| CN111618426A (en) * | 2020-06-05 | 2020-09-04 | 成都拓米电子装备制造有限公司 | Light beam shaping structure and method for improving flexible OLED module laser cutting |
| WO2022069218A1 (en) * | 2020-10-01 | 2022-04-07 | Asml Netherlands B.V. | Achromatic optical relay arrangement |
| EP3978964A1 (en) * | 2020-10-01 | 2022-04-06 | ASML Netherlands B.V. | Achromatic optical relay arrangement |
| CN112475638A (en) * | 2020-10-15 | 2021-03-12 | 西安中科微精光子制造科技有限公司 | Laser micropore machining system and method based on axicon lens |
| CN112475638B (en) * | 2020-10-15 | 2022-07-12 | 西安中科微精光子科技股份有限公司 | Laser micropore machining system and method based on axicon lens |
| CN113059279A (en) * | 2021-03-18 | 2021-07-02 | 广东宏石激光技术股份有限公司 | Laser cutting device and cutting method thereof |
| CN113677981A (en) * | 2021-07-06 | 2021-11-19 | 香港应用科技研究院有限公司 | Flexible display inspection system |
| WO2023279425A1 (en) * | 2021-07-06 | 2023-01-12 | Hong Kong Applied Science and Technology Research Institute Company Limited | Flexible display inspection system |
| CN114231976A (en) * | 2021-12-27 | 2022-03-25 | 中国人民解放军军事科学院国防科技创新研究院 | Adjustable long focal depth superspeed annular laser cladding processing device |
| CN115464154A (en) * | 2022-09-16 | 2022-12-13 | 爱司凯科技股份有限公司 | Device and method for adjusting laser energy distribution of 3D printing beam by using axicon |
| CN115464154B (en) * | 2022-09-16 | 2023-10-27 | 爱司凯科技股份有限公司 | Device and method for adjusting laser energy distribution of 3D printing beam by using axicon |
| CN116079229A (en) * | 2023-03-07 | 2023-05-09 | 长沙麓邦光电科技有限公司 | Point ring laser processing system and processing method thereof |
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Application publication date: 20180821 |
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