CN111618426A - Light beam shaping structure and method for improving flexible OLED module laser cutting - Google Patents
Light beam shaping structure and method for improving flexible OLED module laser cutting Download PDFInfo
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- CN111618426A CN111618426A CN202010504073.XA CN202010504073A CN111618426A CN 111618426 A CN111618426 A CN 111618426A CN 202010504073 A CN202010504073 A CN 202010504073A CN 111618426 A CN111618426 A CN 111618426A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Laser Beam Processing (AREA)
Abstract
The invention discloses a light beam shaping structure for improving flexible OLED module laser cutting and a method thereof, belonging to the technical field of semiconductor laser cutting.A Gaussian beam is used as an incident beam, and a first lens and a second lens are arranged on a light propagation path of the incident beam to form an emergent beam; selecting base angle angles of the first lens and the second lens relative to the light propagation direction according to the processing requirement, and ensuring that the two base angle angles are opposite and equal in absolute value; the lens centers of the first lens and the second lens are coincided with the optical axis of the light, and the size of the annular light spot of the emergent light beam is adjusted by adjusting the distance between the first lens and the second lens; the laser cutting focusing lens is used for focusing the emergent light beam, and the focused light spot is cut on a processing surface so as to achieve the purposes of shaping the Gaussian light beam, removing the energy of the edge part and ensuring the processing quality by reducing the generation of Haze.
Description
Technical Field
The invention belongs to the technical field of semiconductor laser cutting, and particularly relates to a light beam shaping structure and a light beam shaping method for improving laser cutting of a flexible OLED module.
Background
In the field of cutting of OLED panels, laser cutting is currently used to perform the cutting. After laser cutting, the front phenomenon of the product is shown in fig. 1, from the phenomenon, the middle part is completely cut, the black part at the edge is Haze, the Haze degree is gradually weakened from the middle position to the edge position, the reason of the phenomenon is that the cutting is carried out by using Gaussian beams, the energy of the Gaussian beams is normally distributed as shown in fig. 2, the energy at the edge of the beams is obviously reduced compared with the middle energy from the cross section of the focus, ideally, the 1/e2 is considered as a machinable area, and Haze is generated when the energy of the edge distribution is cut, which affects the processing quality.
At present, the Gaussian beam is used for cutting in the industry, and the working principle is as follows: the laser instrument that laser cutting used launches the gaussian beam, uses laser cutting camera lens to focus again, then cuts at the machined surface, and the light beam still is the gaussian type after the focus, easily produces the Haze of great range on the machined product surface, and the unavoidable production Haze leads to the processing quality of cutting to be lower.
Disclosure of Invention
In view of the above, in order to solve the above problems in the prior art, an object of the present invention is to provide a beam shaping structure for improving laser cutting of a flexible OLED module and a method thereof, so as to shape a gaussian beam and remove energy at an edge portion, so as to achieve the purpose of reducing Haze and further ensuring processing quality.
The technical scheme adopted by the invention is as follows: a beam shaping structure for improving laser cutting of a flexible OLED module comprises an incident beam and an emergent beam, wherein a first lens and a second lens are arranged on a light propagation path from the incident beam to the emergent beam, base angle angles of the first lens and the second lens relative to a light propagation direction are opposite, absolute values of the first lens and the second lens are equal, and centers of the first lens and the second lens are coincident with an optical axis of the light; the incident beam is a Gaussian beam, the Gaussian beam is shaped into the emergent beam through the first lens and the second lens, the emergent beam is an annular beam, the annular beam is different from the conventional annular beam, the energy is distributed on the periphery of a light spot, and the structure is similar to an M-shaped structure. When the incident and exit beams are of the same diameter, the annular beam becomes a solid beam whose energy distribution appears as an inverted gaussian beam.
Furthermore, the first lens and the second lens are both cone lenses, the incident light beam and the emergent light beam are located in the same optical axis direction, and the two cone lenses form a lens combination to shape the incident light beam.
Furthermore, the base angle of the conical lens is 1-40 degrees, so that the beam shaping requirement can be met and different processing requirements can be met.
Furthermore, the first lens and the second lens are both set to be conical reflectors, the optical axis axes of the incident light beam and the emergent light beam are parallel to each other and do not coincide with each other, the two conical reflectors form a reflector combination, and the incident light beam is shaped.
Furthermore, the base angle of the conical reflector is smaller than 2 degrees, so that the light beam shaping requirement can be met, and different processing requirements can be met.
The invention also provides a beam shaping method for improving the laser cutting of the flexible OLED module, which comprises the following steps:
taking a Gaussian beam as an incident beam, arranging a first lens and a second lens on a light propagation path of the incident beam and forming an emergent beam;
selecting base angle angles of the first lens and the second lens relative to the light propagation direction according to the processing requirement, and ensuring that the two base angle angles are opposite and equal in absolute value;
the lens centers of the first lens and the second lens are coincided with the optical axis of the light, and the size of the annular light spot of the emergent light beam is adjusted by adjusting the distance between the first lens and the second lens;
and focusing the emergent light beam by using a focusing lens for laser cutting, and cutting the focused light spot on the processed surface.
Further, axicons are selected as the first lens and the second lens, and the incident light beam and the emergent light beam are located in the same optical axis direction.
Furthermore, the base angle of the conical lens is 1-40 degrees, so that the beam shaping requirement can be met and different processing requirements can be met.
Further, a cone-shaped reflecting mirror is selected as the first mirror and the second mirror, and the optical axis axes of the incident light beam and the emergent light beam are parallel to each other and do not coincide.
Furthermore, the base angle of the conical reflector is smaller than 2 degrees, so that the light beam shaping requirement can be met, and different processing requirements can be met.
The invention has the beneficial effects that:
1. the light beam shaping structure and the method for improving the laser cutting of the flexible OLED module are adopted as the optical composition of the light beam shaping of the laser cutting of the OLED module, the Gaussian light beam is shaped into the annular light beam by using the lens combination.
Drawings
FIG. 1 is a front view of a product after laser cutting;
FIG. 2 is a schematic representation of a Gaussian spot used in laser cutting;
FIG. 3 is a schematic layout of a beam shaping structure for improving laser cutting of a flexible OLED module according to the present invention;
FIG. 4 is a schematic view of another layout of a beam shaping structure for improving laser cutting of a flexible OLED module according to the present invention;
FIG. 5 is a schematic view of an annular light spot of a beam shaping structure for improving laser cutting of a flexible OLED module provided by the present invention after shaping;
FIG. 6 is a schematic diagram of FIG. 5 after being focused by a focusing lens for laser cutting;
FIG. 7 is a schematic diagram of the energy distribution of the annular light spot after shaping of the beam shaping structure for improving laser cutting of the flexible OLED module provided by the invention;
the drawings are labeled as follows:
1-first cone lens, 2-second cone lens, 3-first cone reflector and 4-second cone reflector.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the embodiments of the present invention, it should be noted that the indication of the orientation or the positional relationship is based on the orientation or the positional relationship shown in the drawings, or the orientation or the positional relationship which is usually placed when the product of the present invention is used, or the orientation or the positional relationship which is usually understood by those skilled in the art, or the orientation or the positional relationship which is usually placed when the product of the present invention is used, and is only for the convenience of describing the present invention and simplifying the description, but does not indicate or imply that the indicated device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, cannot be understood as limiting the present invention. Furthermore, the terms "first" and "second" are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.
In the description of the embodiments of the present invention, it should be further noted that the terms "disposed" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, unless explicitly stated or limited otherwise; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood in specific cases by those skilled in the art; the drawings in the embodiments are used for clearly and completely describing the technical scheme in the embodiments of the invention, and obviously, the described embodiments are a part of the embodiments of the invention, but not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Example 1
The utility model provides an improve light beam shaping structure of flexible OLED module laser cutting in this embodiment, launch the gaussian beam with the laser instrument and carry out the plastic, remove the peripheral energy that distributes of gaussian spot, use ZEMAX software to design, verify that this optics constitutes the conversion that can realize the gaussian beam. The general working principle is as follows: the laser emits Gaussian beams, the Gaussian beams are transformed through the optical component I, the Gaussian beams are shaped, the energy of the edge part is removed, the laser cutting lens is used for focusing, then cutting is carried out on a machined surface, and the Haze in a large range cannot be generated on the surface of a machined product, so that the Haze is reduced.
As shown in fig. 3, the optical component i includes: the first cone lens and the second cone lens are arranged on a light propagation path from the incident light beam to the emergent light beam, a lens combination is formed by the first cone lens and the second cone lens, and the incident light beam and the emergent light beam are located in the same optical axis direction. The gaussian beam is used as an incident beam (i.e. a gaussian spot), the gaussian beam is shaped into the emergent beam through the first cone lens and the second cone lens, and the emergent beam is an annular beam (i.e. an annular spot), the annular beam is different from the conventional annular beam, the energy is distributed on the periphery of the spot, as shown in fig. 7, the energy distribution is similar to an "M" type structure, and the energy of the annular beam is intensively distributed on the periphery of the spot.
The first cone lens and the second cone lens have opposite base angle angles relative to the light propagation direction, the base angle of the first cone lens relative to the light propagation direction is negative, and the lens center of the first cone lens is coincided with the optical axis of the light; the first axicon lens has the functions of: shaping the incident Gaussian beam into an annular beam, realizing the reversion of the light, and converting the far-axis light into the near-axis light if the far-axis light passes through the first cone lens; on the contrary, if the paraxial ray passes through the first cone lens, the paraxial ray is converted into the paraxial ray. The Gaussian beam is characterized in that paraxial light energy distribution is large, and paraxial light energy distribution is small, obviously, the Gaussian beam is converted into an annular beam with small paraxial light energy distribution and large paraxial light energy distribution through shaping of the first cone lens, but the beam is a divergent annular beam, the diameter of a light spot is increased along with the propagation of the beam, and therefore a second cone lens is required to be added for further shaping.
The second cone lens has a positive base angle relative to the light propagation direction, the base angle degree of the second cone lens is equal to that of the first cone lens, and the lens center of the second cone lens coincides with the optical axis of the light, so that the second cone lens mainly has a collimation effect. The emergent light beam is ensured to be parallel light after being shaped by the second conical lens, the diameter of the light spot is not changed along with the light beam transmission, the diameter of the emergent light spot can be adjusted by adjusting the distance from the second conical lens to the first conical lens, and the diameter is adjusted according to the processing requirement.
In order to achieve the shaping purpose, the base angle of the conical lens can meet the beam shaping requirement when the base angle is 1-40 degrees through simulation of ZEMAX optical design software. When the base angle of the cone lens changes, the distance between the two cone lenses must be correspondingly changed, and the light spot size and the specification of the cone lens meet the following formula:
Minimum Distance＝2x(Cot(β)x 30％of Input Beam Size)
wherein, β ═ Axicon Angle x (n-1) n ═ reflective index
In this embodiment, the pitch values at 5 ° and 20 ° are listed, and as shown in table 1, the corresponding pitch values of the axicons are listed in table 1 when the incident spot sizes are 3mm, 5mm, and 10mm, and when the emergent spot sizes are 5mm and 10 mm.
TABLE 1 Cone lens spacing example
In practical application, the cone lens with a proper angle is selected according to the original spot size of the laser of a user, namely the size of an incident spot, the layout space of equipment or a mechanism and other conditions.
Based on the beam shaping structure for improving the laser cutting of the flexible OLED module, the cutting processing is realized by adopting the following method, and the beam shaping method comprises the following steps:
(1) the Gaussian beam is used as an incident beam, a first conical lens and a second conical lens are arranged on a light propagation path of the incident beam to form an emergent beam, and the incident beam and the emergent beam are positioned on the same optical axis direction;
(2) selecting base angle angles of the first conical lens and the second conical lens relative to the light propagation direction according to processing requirements, wherein in the conical lens combination, relative to the light propagation direction, the base angle of the first conical lens is negative, the base angle of the second conical lens is positive, and the base angle degree of the second conical lens is equal to the base angle degree of the first conical lens;
when the base angle of the conical lens changes, the distance between the first conical lens and the second conical lens must be changed correspondingly, the base angle of the conical lens is 1-40 degrees, the shaping purpose can be achieved, and in practical application, different base angles correspond to different lens distances.
(3) The lens centers of the first conical lens and the second conical lens are coincided with the optical axis of light, and the size of an annular light spot of an emergent light beam (forming annular light spots with different diameters) is adjusted by adjusting the distance between the first conical lens and the second conical lens so as to meet different processing requirements;
(4) and focusing the emergent light beam by using a focusing lens for laser cutting, and cutting the focused light spot on the processed surface.
Example 2
Another kind of beam shaping structure who improves flexible OLED module laser cutting is provided in this embodiment, launches the gaussian beam with the laser instrument and carries out the plastic, removes the peripheral energy that distributes of gaussian spot, uses ZEMAX software to design, verifies that this optics constitutes the conversion that can realize the gaussian beam. The general working principle is as follows: the laser emits Gaussian beams, the Gaussian beams are converted through an optical component II, the Gaussian beams are shaped, the energy of the edge part is removed, the laser cutting lens is used for focusing, then cutting is carried out on a machined surface, and the Haze in a large range cannot be generated on the surface of a machined product, so that the Haze is reduced.
As shown in fig. 4, the optical component ii includes: the first conical reflector and the second conical reflector are arranged on a light propagation path from the incident light beam to the emergent light beam, a lens combination is formed by the first conical reflector and the second conical reflector, and the optical axis axes of the incident light beam and the emergent light beam are parallel to each other and do not coincide with each other (namely are not positioned on the same straight line). And a Gaussian beam is taken as an incident beam (namely, a Gaussian spot), the Gaussian beam is shaped into the emergent beam through the first conical reflector and the second conical reflector, and the emergent beam is an annular beam (namely, an annular spot).
The bottom angle angles of the first conical reflector and the second conical reflector relative to the light propagation direction are opposite, the bottom angle of the first conical reflector relative to the light propagation direction is negative, and the lens center of the first conical reflector is coincided with the optical axis of the light; the first conical reflector functions as: shaping an incident Gaussian beam into an annular beam, realizing the reversion of the light ray, and converting the far-axis light ray into a near-axis light ray if the far-axis light ray passes through the first conical reflector; on the contrary, if the paraxial ray passes through the first conical reflector, the paraxial ray is converted into the paraxial ray. The Gaussian beam is characterized in that paraxial light energy distribution is large, and paraxial light energy distribution is small, obviously, the Gaussian beam is converted into an annular light beam with small paraxial light energy distribution and large paraxial light energy distribution through shaping of the first conical reflector, but the light beam is a divergent annular light beam, the diameter of a light spot is increased along with light beam propagation, and therefore the second conical reflector needs to be added for further shaping.
The second conical reflector has a positive base angle relative to the light propagation direction, the base angle degree of the second conical reflector is equal to that of the first conical reflector, and the lens center of the second conical reflector coincides with the optical axis of the light, so that the second conical reflector mainly has a collimation effect. The emergent light beam is ensured to be parallel light after being shaped by the second conical reflector, the diameter of the light spot is not changed along with the light beam transmission, the diameter of the annular light spot of the emergent light spot can be adjusted by adjusting the distance from the second conical reflector to the first conical reflector, and the diameter is adjusted according to the processing requirement.
In order to achieve the shaping purpose, simulation is carried out by ZEMAX optical design software, and the base angle of the conical reflector is required to be less than 2 degrees, so that the shaping requirement can be met. When the angle of the bottom angle of the conical mirrors changes, the spacing between the two conical mirrors must also change accordingly.
In practical application, the conical reflector with a proper angle is selected according to the original spot size of the laser of a user, namely the size of an incident spot, the layout space of equipment or a mechanism and other conditions.
After the optical components are used for beam shaping, simulation is carried out by using ZEMAX, shaped annular light spots are collected, as shown in figure 5, the Gaussian light spots shown in figure 2 are compared, it is obvious that the shaped annular light beams successfully remove the energy of the edge part of the Gaussian light beams, then focusing is carried out by using a focusing lens for laser cutting, and as shown in figure 6, the focused light spots successfully remove the energy of the edge part.
Based on the beam shaping structure for improving the laser cutting of the flexible OLED module, the cutting processing is realized by adopting the following method, and the beam shaping method comprises the following steps:
(1) the Gaussian beam is used as an incident beam, a first conical reflector and a second conical reflector are arranged on a light propagation path of the incident beam, the incident beam forms an emergent beam through the first conical reflector and the second conical reflector, and the optical axis axes of the incident beam and the emergent beam are parallel and do not coincide;
(2) selecting base angle angles of the first conical reflector and the second conical reflector relative to the light propagation direction according to processing requirements, wherein in the conical reflector combination, relative to the light propagation direction, the base angle of the first conical reflector is negative, the base angle of the second conical reflector is positive, and the base angle degree of the second conical reflector is equal to the base angle degree of the first conical reflector;
when the base angle of the conical reflector changes, the distance between the first conical reflector and the second conical reflector must be changed correspondingly, the base angle of the conical reflector should be below 2 degrees, the shaping purpose can be achieved, and in practical application, different base angles correspond to different distances.
(3) The lens centers of the first conical reflector and the second conical reflector are coincided with the optical axis of the light, and the size of the annular light spot of the emergent light beam is adjusted by adjusting the distance between the first conical reflector and the second conical reflector (so as to form annular light spots with different diameters) to meet different processing requirements;
(4) and focusing the emergent light beam by using a focusing lens for laser cutting, and cutting the focused light spot on the processed surface.
The invention is not limited to the above alternative embodiments, and any other various forms of products can be obtained by anyone in the light of the present invention, but any changes in shape or structure thereof, which fall within the scope of the present invention as defined in the claims, fall within the scope of the present invention.
Claims (10)
1. A beam shaping structure for improving laser cutting of a flexible OLED module comprises an incident beam and an emergent beam, and is characterized in that a first lens and a second lens are arranged on a light propagation path from the incident beam to the emergent beam, base angle angles of the first lens and the second lens relative to a light propagation direction are opposite, absolute values of the first lens and the second lens are equal, and centers of the first lens and the second lens are coincident with an optical axis of the light; the incident beam is a Gaussian beam, the Gaussian beam is shaped into the emergent beam through the first lens and the second lens, and the emergent beam is an annular beam.
2. The structure of claim 1, wherein the first lens and the second lens are both cone lenses, and the incident beam and the emergent beam are located on the same optical axis direction.
3. The structure for improving the beam shaping performance of the laser cutting of the flexible OLED module as claimed in claim 2, wherein the base angle of the conical lens is between 1 ° and 40 °.
4. The structure of claim 1, wherein the first and second mirrors are each configured as a conical reflector, and the optical axes of the incident and emergent beams are parallel and do not coincide with each other.
5. The structure for improving the beam shaping performance of laser cutting of the flexible OLED module as claimed in claim 4, wherein the bottom angle of the conical reflector is less than 2 °.
6. A beam shaping method for improving laser cutting of a flexible OLED module is characterized by comprising the following steps:
taking a Gaussian beam as an incident beam, arranging a first lens and a second lens on a light propagation path of the incident beam and forming an emergent beam;
selecting base angle angles of the first lens and the second lens relative to the light propagation direction according to the processing requirement, and ensuring that the two base angle angles are opposite and equal in absolute value;
the lens centers of the first lens and the second lens are coincided with the optical axis of the light, and the size of the annular light spot of the emergent light beam is adjusted by adjusting the distance between the first lens and the second lens;
and focusing the emergent light beam by using a focusing lens for laser cutting, and cutting the focused light spot on the processed surface.
7. The method as claimed in claim 6, wherein the first and second mirrors are conical lenses, and the incident beam and the emergent beam are located on the same optical axis.
8. The beam shaping method for improving the laser cutting of the flexible OLED module as claimed in claim 7, wherein the base angle of the conical lens is between 1 ° and 40 °.
9. The method as claimed in claim 6, wherein a conical reflector is selected as the first lens and the second lens, and the optical axes of the incident beam and the emergent beam are parallel and not coincident with each other.
10. The method for improving beam shaping of flexible OLED module laser cutting as claimed in claim 9, wherein the base angle of the conical reflector is less than 2 °.
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| CN116931286A (en) * | 2023-09-15 | 2023-10-24 | 成都莱普科技股份有限公司 | Beam shaping module, method and device |
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Application publication date: 20200904 |
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| RJ01 | Rejection of invention patent application after publication |