CN107160032A - A kind of spacing and spectral energy adjustable three spot laser welding optical system - Google Patents
A kind of spacing and spectral energy adjustable three spot laser welding optical system Download PDFInfo
- Publication number
- CN107160032A CN107160032A CN201710584581.1A CN201710584581A CN107160032A CN 107160032 A CN107160032 A CN 107160032A CN 201710584581 A CN201710584581 A CN 201710584581A CN 107160032 A CN107160032 A CN 107160032A
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- Prior art keywords
- wedge
- beam splitter
- shaped mirrors
- splitter prism
- anaberration
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/21—Bonding by welding
- B23K26/24—Seam welding
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a kind of spacing and the adjustable three spot lasers welding optical system of spectral energy, novel in structural design of the present invention, combined by using circle wedge-shaped mirrors with three beam splitter prisms, the adjustable caused light beam translation characteristic of wedge-shaped mirror spacing is justified based on biplate, based on the beam splitter prism splitting properties of biplate three and rib angle characteristic, based on circle wedge-shaped mirrors and three beam splitter prism central shaft revolving properties, realize a kind of three spot optical systems of focusing, three luminous point spacing, energy and direction can adjust, suitable for the optical fiber laser laser welding application of any optical fiber core diameter, it is particularly helpful to improve weldment weldquality in laser soldering.
Description
Technical field：
The present invention relates to laser welding field, more particularly to a kind of spacing and spectral energy adjustable three spot laser welding light
System.
Background technology：
Industrial laserses processing industry include laser cutting, welding, mark, drilling, micro Process, cladding, quenching, at surface
The each side such as reason, 3D printing, cover the Laser Processing of all kinds of common metals or nonmetallic materials, wherein especially with laser welding,
The Laser Processing industry such as mark, 3D printing is multifarious to laser beam to require more representative.
Laser welding, is welded from initial single focus, welded to derivative double focus welding below, three focuses etc., purpose
It is to obtain more preferable welding effect and quality.Double focus welding be laser beam after special shaping, focus on out two beam energies
Hot spot identical, of the same size, the technology mode for respectively symmetrically falling on weld seam both sides to be processed, three focuses, which are welded, is typically
On the basis of double focus welding, introduce another focus and the weld seam after to be welded or welding is pre-processed or post-processed, but
Some laser welding occasions, the double hot spots for being distributed in weld seam both sides are used in aid in treatment weld seam, and most of energy is then given
Hot spot on weld seam.It can be seen that, different laser welding occasions, three spot lasers welding three spot energy distributions on, have it
It is specific to require.
Instantly three focal argon lasers welding light path, substantially from both direction, a kind of obtained by special optical fiber
The output beam of three luminous points is obtained, it is another, it is to be realized by the special Shape correction of outer light path.Former scheme, using IPG as
The optical fiber laser light splitting scheme of representative, three spot orientations after being focused on by conventional outer light path often have randomness, to swashing
Photocoagulation direction has sufficiently expensive in many restrictions, and high-power special fiber, price, three luminous point spectral energies and light
Spot spacing is non-adjustable；Latter scheme, has the light splitting scheme using Laserline as representative, passes through lens surface partial array
Change and light splitting, it is square to obtain main spot, and the problem of double luminous points in side are three circular luminous points, the program is, three luminous points
Distance fix, very influence and limit fibre core diameter differs greatly, focus lamp focal length differs greatly laser welding application, then
Person, the very difficult processing of minute surface of array is costly, and only a small number of international vendors have stable product at present.
Based on described above, while ease, a kind of spacing of present invention proposition and the light splitting realized in view of mechanical structure
Three spot lasers welding optical system that energy is adjustable, combines with three beam splitter prisms by using circle wedge-shaped mirrors, wedge is justified based on biplate
Light beam translation characteristic caused by shape mirror spacing is adjustable, based on the beam splitter prism splitting properties of biplate three and rib angle characteristic, is based on
Circle wedge-shaped mirrors and three beam splitter prism central shaft revolving properties, realize a kind of three spot optical systems of focusing, three luminous point spacing, energy
Amount and direction can adjust, it is adaptable to the optical fiber laser laser welding application of any optical fiber core diameter, be particularly helpful to improve
Weldment weldquality in laser soldering.
The content of the invention：
The present invention provides a kind of spacing and spectral energy adjustable three spot laser welding optical system, to solve above-mentioned background
The problem of being proposed in technology.
In order to solve the above problems, the invention provides a kind of technical scheme：A kind of spacing and adjustable three light of spectral energy
Dot laser welds optical system, including：Optical fiber laser is from luminous point and focal plane is gone out, and its innovative point is：Also include anaberration
Collimate microscope group, first round wedge-shaped mirrors, second round wedge-shaped mirrors, first three beam splitter prisms, second three beam splitter prism and disappear
Aberration focuses on microscope group；The optical fiber laser collimates microscope group, first round wedge-shaped mirrors, second round wedge from luminous point, anaberration is gone out
Shape mirror, first three beam splitter prisms, second three beam splitter prisms, anaberration focus on microscope group and focal plane from top to bottom with mutual
Every mode it is arranged together and mutually with one heart；Described first round wedge-shaped mirrors are parallel to each other with second round wedge-shaped mirrors, described
First round wedge-shaped mirrors and the lozenges of second round wedge-shaped mirrors are mutually corresponding；Described first round wedge-shaped mirrors and second round wedge
Spacing between shape mirror is adjustable, and described first round wedge-shaped mirrors and second round wedge-shaped mirrors can be around 360 ° of rotations of central shaft；
First three beam splitter prism and the light splitting surface of second three beam splitter prism are mutually corresponding, first three beam splitter prism with
Second three beam splitter prism can be around 360 ° of rotations of central shaft；It is interchangeable that the anaberration collimation microscope group and anaberration focus on microscope group
For anaberration aspherical mirror, the eyeglass of the anaberration collimation microscope group and anaberration focusing microscope group is cylindric and mutually same
Axle.
Preferably, described first round wedge-shaped mirrors are identical with the angle of wedge of second round wedge-shaped mirrors lozenges, and described
The both sides minute surface of a piece of round wedge-shaped mirrors and second round wedge-shaped mirrors is plane.
Preferably, first three beam splitter prism and second three beam splitter prisms correspondence central shaft cross three light splitting ribs
Intersection point, three light splitting ribs are that rib axle clamp angle is identical with central shaft angle, and three light splitting surfaces are plane and homalographic is angularly distributed,
The beam splitter prism rib axle clamp angle of two panels three is identical.
Preferably, the anaberration, which focuses on microscope group, focuses on three luminous points on focal plane, and three spot sizes are identical, center
Line is equilateral triangle, and equilateral triangle center is motionless, and three luminous point spacing, beam splitting energy and direction are controllable.
Beneficial effects of the present invention：
(1) novel in structural design of the present invention, combines with three beam splitter prisms by using circle wedge-shaped mirrors, wedge shape is justified based on biplate
Light beam translation characteristic caused by mirror spacing is adjustable, based on the beam splitter prism splitting properties of biplate three and rib angle characteristic, based on circle
Wedge-shaped mirrors and three beam splitter prism central shaft revolving properties, realize a kind of three spot optical systems of focusing, three luminous point spacing, energy
And direction can adjust, it is adaptable to the optical fiber laser laser welding application of any optical fiber core diameter, it is particularly helpful to improve and swashs
Weldment weldquality in light soldering.
(2) fiber laser beam of the invention is collimated light beam after anaberration collimation microscope group collimation, and collimated light beam is by two
While piece circle wedge-shaped mirrors refraction does not influence transmission direction, the position skew on optical axis direction, offset distance and two circle wedges are produced
Shape mirror spacing is relevant, it is ensured that the light beam spectral energy incided on first three beam splitter prism is arbitrarily controllable.
(3) the offset collimated light beam that circle wedge-shaped mirrors of the invention are produced, after the beam splitter prism beam splitting of two panels three, forms three
Light beams, when three beam splitter prism of two panels, six Central Symmetry face each two adjacent surface angles are 60 °, three light beams transmission direction
Identical, focused spot is a point, wherein two adjacent Central Symmetry face angles is finely tuned on this basis, focused spot is to be divided into
Three hot spots, the size that plane of symmetry angle changes, determine the distance of three optical splitting points.
(4) combination of the wedge-shaped microscope group of circle of the invention and three beam splitter prism groups is adjusted, that is, realizes three luminous point spacing and energy
The regulation of amount.Meanwhile, circle wedge shape microscope group, three beam splitter prism groups, 360 ° of central shaft rotations are ensureing three light splitting spot center positions
While putting motionless, it is ensured that three hot spots can change towards any direction, to meet each to process requirements of laser welding.
Brief description of the drawings：
For ease of explanation, the present invention is described in detail by following specific implementations and accompanying drawing.
Fig. 1 is optical system structure schematic diagram of the invention.
Fig. 2 is three beam splitter prism structural representations of the invention.
Fig. 3 is facula-evolution schematic diagram of the invention.
1- optical fiber lasers go out luminous point certainly；2- anaberrations collimate microscope group；The round wedge-shaped mirrors of 3- first；Second circle wedge shape of 4-
Mirror；First three beam splitter prism of 5-；Second three beam splitter prism of 6-；7- anaberrations focus on microscope group；8- focal planes.
Embodiment：
As shown in Figure 1, Figure 2 and Figure 3, present embodiment uses following technical scheme：A kind of spacing and spectral energy
Adjustable three spot laser welds optical system, including：Optical fiber laser goes out luminous point 1 and focal plane 8, in addition to anaberration collimation certainly
Microscope group 2, first round wedge-shaped mirrors 3, second round wedge-shaped mirrors 4, first piece three beam splitter prisms 5, second three beam splitter prism 6 and disappear
Aberration focuses on microscope group 7；The optical fiber laser from go out luminous point 1, anaberration collimation microscope group 2, first round wedge-shaped mirrors 3, second
Circle wedge-shaped mirrors 4, first piece three beam splitter prism 5, second three beam splitter prism 6, anaberration focus on microscope group 7 and focal plane 8 from upper
Under it is arranged together and mutually with one heart in spaced mode；Described first round wedge-shaped mirrors 3 and second round phase of wedge-shaped mirrors 4
Mutually parallel, described first round wedge-shaped mirrors 3 and the lozenges of second round wedge-shaped mirrors 4 are mutually corresponding；First circle wedge shape
Spacing between mirror 3 and second round wedge-shaped mirrors 4 is adjustable, and described first round wedge-shaped mirrors 3 can enclose with second round wedge-shaped mirrors 4
Around 360 ° of rotations of central shaft；First three beam splitter prism 5 and the light splitting surface of second three beam splitter prism 6 are mutually corresponding, institute
State first three beam splitter prism 5 and second three beam splitter prism 6 can be around 360 ° of rotations of central shaft；The anaberration collimates microscope group
2 and anaberration focus on microscope group 7 and can be changed to anaberration aspherical mirror, the anaberration collimation microscope group 2 and anaberration focus on microscope group 7
Eyeglass be cylindric and mutually coaxial.
Wherein, described first round wedge-shaped mirrors 3 are identical with the angle of wedge of second round lozenges of wedge-shaped mirrors 4, and described first
It is plane that piece, which justifies wedge-shaped mirrors 3 and the both sides minute surface of second round wedge-shaped mirrors 4,；First three beam splitter prism 5 and second
Three beam splitter prisms 6 correspondence central shaft crosses three light splitting rib intersection points, and three light splitting ribs are that rib axle clamp angle is identical with central shaft angle, and three
Individual light splitting surface is plane and homalographic is angularly distributed, and the beam splitter prism rib axle clamp angle of two panels three is identical；The anaberration focus lamp
Group 7 focuses on three luminous points on focal plane, and three spot sizes are identical, and the line of centres is equilateral triangle, equilateral triangle center
Motionless, three luminous point spacing, beam splitting energy and direction are controllable.
Refering to Fig. 1, Fig. 2 and Fig. 3, optical fiber laser is collimated from the output divergent beams of luminous point 1, divergent beams are gone out by anaberration
The collimation of microscope group 2 forms collimated light beam, and collimated light beam collimates the central axis of microscope group 2 with anaberration, by first round wedge-shaped mirrors 3
Afterwards, refraction changes beam Propagation direction, and correspondence light beam is reflected again further through second round wedge-shaped mirrors 4 with the identical angle of wedge
Change beam Propagation direction, because the lozenges between two circle wedge-shaped mirrors is parallel, therefore pass through the emergent light of second round wedge-shaped mirrors 4
Beam is identical with the beam direction for inciding first round wedge-shaped mirrors 3, only there occurs the position translation on optical axis, and translation direction with
First round wedge-shaped mirrors 3, second round Central Symmetry face of wedge-shaped mirrors 4 are coplanar.Laser beam normal incidence is translated to first three beam splitting
After prism 5, it is divided into three and first intersects the collimated light beam dissipated afterwards, three light beams pass through second three beam splitter prism 6 again, due to
First three beam splitter prism 5 is identical with second rib axle clamp angle of three beam splitter prism 6, and light splitting surface is relative, when first three beam splitting rib
When the two neighboring face angle in mirror 5 and second three beam splitter prism 6 totally 6 Central Symmetry faces is 60 °, first three points are defined as
The initial state of beam prism 5 and second three beam splitter prism 6.Under initial state, three after second three Amici prisms refraction
Beam divided beams is again after anaberration focusing microscope group 7 is focused on, and focal plane 8 forms a hot spot；On the basis of original state, around center
First three beam splitter prism 5 of axle small angle rotation or second three beam splitter prism 6 are to change 6 two neighboring planes of symmetry of the plane of symmetry
Angle, while ensuring the three beams divided beams by first three beam splitter prism 5 again by the light splitting of second three beam splitter prism 6
Completely fall during face on correspondence light splitting surface and on the premise of being unlikely to secondary light splitting, focal plane 8 occur 3 lines of centres for etc.
Side triangle, size identical focal beam spot, line of centres spacing depend on small angle rotation angle size above, equilateral triangle
Shape center is constant；In other words, the small angle rotation carried out based on original state, it is possible to achieve the focal beam spot of focal plane 8 is from single-point
The process of 3 points, and hot spot spacing continuously adjustabe are gradually evolved into, which guarantee under different optical fiber core diameters, three luminous points swash
Photocoagulation can be carried out；In addition, it is overall again under the premise of above-mentioned to work as first three beam splitter prism 5 and second three beam splitter prism 6
During rotation, the direction of three luminous points can also change, it is ensured that 360 ° of three luminous points are each to welding application.
In Energy distribution, due to the effect of first round wedge-shaped mirrors 3 and second round wedge-shaped mirrors 4, cause second circle
The beam optical axis of outgoing has first round wedge relative to the incident beam optical axis for inciding first round wedge-shaped mirrors 3 on wedge-shaped mirrors 4
Position skew on shape mirror 3, second round Central Symmetry face of wedge-shaped mirrors 4, offset distance depends on first round wedge-shaped mirrors 3, the
The distance between two round wedge-shaped mirrors 4, apart from smaller, light-beam position skew is just smaller, when first round wedge-shaped mirrors 3, second
When the circle spacing of wedge-shaped mirrors 4 is substantially zeroed, light beam is substantially without skew, the three beams divided beams that now first three beam splitter prism 5 is produced
Energy is basically identical, therefore the luminous point light spot energy of focal plane 8 three is basically identical；Conversely, when first round wedge-shaped mirrors 3, second circle
The spacing of wedge-shaped mirrors 4 becomes larger, then light-beam position skew is bigger, is embodied on first each light splitting surface of three beam splitter prism 5
Energy distribution difference is bigger, and the three beams divided beams capacity volume variance of generation is also bigger, the luminous point light spot energy difference phase of focal plane 8 three
Should be also bigger；Based on first round wedge-shaped mirrors 3, second round spacing of wedge-shaped mirrors 4 can consecutive variations, while first round wedge-shaped mirrors
3rd, second round composite entity of wedge-shaped mirrors 4 rotates around central shaft certain angle, you can adjust three luminous points on focal plane 8 on demand
Energy, such as one light spot energy is low, and another two light spot energy is identical and relatively higher；Or a light spot energy height, another two
Light spot energy is identical and relatively low.
The implementation steps of light channel structure of the present invention are：Pass through first three beam splitter prism 5 or second three beam splitting rib first
Mirror 6 forms three required optical splitting points with respect to central shaft small angle rotation, secondly by first three beam splitter prism 5 and second three
The integral-rotation certain angle of beam splitter prism 6 come obtain need process direction, be then then first round wedge-shaped mirrors 3, second
Justify the integral-rotation certain angle of wedge-shaped mirrors 4 to ensure that the spot energy distribution on weld seam both sides is consistent, be finally only change first
Piece justifies wedge-shaped mirrors 3 and second round spacing of wedge-shaped mirrors 4 to realize three light spot energy differentiation, if demand is the marginal ray of weld seam two
The low and middle light spot energy of spot energy is high, finds that can only realize that three light spot energies are basically identical arrives weld seam both sides by above-mentioned regulation
Light spot energy is high and centre light spot energy is low, then again by first round wedge-shaped mirrors 3, second round integral-rotation of wedge-shaped mirrors 4
180 °.
The general principle and principal character and advantages of the present invention of the present invention, the technology of the industry has been shown and described above
Personnel are it should be appreciated that the present invention is not limited to the above embodiments, and the simply explanation described in above-described embodiment and specification is originally
The principle of invention, without departing from the spirit and scope of the present invention, various changes and modifications of the present invention are possible, these changes
Change and improvement all fall within the protetion scope of the claimed invention, the claimed scope of the invention by appended claims and its
Equivalent thereof.
Claims (4)
1. a kind of spacing and spectral energy adjustable three spot laser welding optical system, including：Optical fiber laser goes out luminous point (1) certainly
With focal plane (8), it is characterised in that：Also include anaberration collimation microscope group (2), first round wedge-shaped mirrors (3), second circle wedge shape
Mirror (4), first three beam splitter prism (5), second three beam splitter prism (6) and anaberration focus on microscope group (7)；
The optical fiber laser collimates microscope group (2), first round wedge-shaped mirrors (3), second round wedge from luminous point (1), anaberration is gone out
Shape mirror (4), first three beam splitter prism (5), second three beam splitter prism (6), anaberration focus on microscope group (7) and focal plane (8)
It is arranged together and mutually with one heart in spaced mode from top to bottom；
Described first round wedge-shaped mirrors (3) is parallel to each other with second round wedge-shaped mirrors (4), described first round wedge-shaped mirrors (3) with
The lozenges of second round wedge-shaped mirrors (4) is mutually corresponded to；
Spacing between described first round wedge-shaped mirrors (3) and second round wedge-shaped mirrors (4) is adjustable, and first circle wedge shape
Mirror (3) can be around 360 ° of rotations of central shaft with second round wedge-shaped mirrors (4)；
First three beam splitter prism (5) and the light splitting surface of second three beam splitter prism (6) are mutually corresponding, described first three
Beam splitter prism (5) can be around 360 ° of rotations of central shaft with second three beam splitter prism (6)；
The anaberration collimation microscope group (2) and anaberration, which focus on microscope group (7), can be changed to anaberration aspherical mirror, the anaberration
The eyeglass that collimation microscope group (2) and anaberration focus on microscope group (7) is cylindric and mutually coaxial.
2. a kind of spacing according to claim 1 and spectral energy adjustable three spot laser welding optical system, its feature
It is：Described first round wedge-shaped mirrors (3) is identical with the angle of wedge of second round wedge-shaped mirrors (4) lozenges, and first circle
The both sides minute surface of wedge-shaped mirrors (3) and second round wedge-shaped mirrors (4) is plane.
3. a kind of spacing according to claim 1 and spectral energy adjustable three spot laser welding optical system, its feature
It is：First three beam splitter prism (5) and second three beam splitter prisms (6) correspondence central shaft cross three light splitting rib intersection points,
Three light splitting ribs are that rib axle clamp angle is identical with central shaft angle, and three light splitting surfaces are plane and homalographic is angularly distributed, two panels
Three beam splitter prism rib axle clamp angles are identical.
4. a kind of spacing according to claim 1 and spectral energy adjustable three spot laser welding optical system, its feature
It is：The anaberration focuses on microscope group (7) and focuses on three luminous points on focal plane, and three spot sizes are identical, and the line of centres is etc.
Side triangle, equilateral triangle center is motionless, and three luminous point spacing, beam splitting energy and direction are controllable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710584581.1A CN107160032A (en) | 2017-07-18 | 2017-07-18 | A kind of spacing and spectral energy adjustable three spot laser welding optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710584581.1A CN107160032A (en) | 2017-07-18 | 2017-07-18 | A kind of spacing and spectral energy adjustable three spot laser welding optical system |
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| Publication Number | Publication Date |
|---|---|
| CN107160032A true CN107160032A (en) | 2017-09-15 |
Family
ID=59817786
Family Applications (1)
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|---|---|---|---|
| CN201710584581.1A Withdrawn CN107160032A (en) | 2017-07-18 | 2017-07-18 | A kind of spacing and spectral energy adjustable three spot laser welding optical system |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109365414A (en) * | 2018-11-29 | 2019-02-22 | 华核（天津）新技术开发有限公司 | Straight path type synchronizes incorgruous double-wedge lens type laser cleaning head and cleaning method |
| WO2020015607A1 (en) * | 2018-07-19 | 2020-01-23 | 上海微电子装备（集团）股份有限公司 | Beam splitting device |
| CN110919175A (en) * | 2019-12-30 | 2020-03-27 | 苏州迅镭激光科技有限公司 | Hand-held laser welding head optical system based on wedge angle lens |
| CN112548322A (en) * | 2020-11-23 | 2021-03-26 | 上海嘉强自动化技术有限公司 | Double-beam laser welding equipment |
| US20220126397A1 (en) * | 2020-10-26 | 2022-04-28 | Industrial Technology Research Institute | Laser beam shaping device, laser processing system and laser interlocking welding structure |
| CN114434008A (en) * | 2022-04-11 | 2022-05-06 | 江苏联赢激光有限公司 | Composite laser welding method and laser welding device |
| CN115362281A (en) * | 2020-04-09 | 2022-11-18 | 马克思-普朗克科学促进协会 | Thermal laser evaporation system and method of providing a thermal laser beam at a source |
| TWI802712B (en) * | 2018-06-20 | 2023-05-21 | 日商迪思科股份有限公司 | Laser processing device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI802712B (en) * | 2018-06-20 | 2023-05-21 | 日商迪思科股份有限公司 | Laser processing device |
| WO2020015607A1 (en) * | 2018-07-19 | 2020-01-23 | 上海微电子装备（集团）股份有限公司 | Beam splitting device |
| CN110737098A (en) * | 2018-07-19 | 2020-01-31 | 上海微电子装备（集团）股份有限公司 | light splitting devices |
| CN110737098B (en) * | 2018-07-19 | 2021-08-17 | 上海微电子装备（集团）股份有限公司 | Light splitting device |
| CN109365414A (en) * | 2018-11-29 | 2019-02-22 | 华核（天津）新技术开发有限公司 | Straight path type synchronizes incorgruous double-wedge lens type laser cleaning head and cleaning method |
| CN110919175A (en) * | 2019-12-30 | 2020-03-27 | 苏州迅镭激光科技有限公司 | Hand-held laser welding head optical system based on wedge angle lens |
| CN115362281A (en) * | 2020-04-09 | 2022-11-18 | 马克思-普朗克科学促进协会 | Thermal laser evaporation system and method of providing a thermal laser beam at a source |
| US20220126397A1 (en) * | 2020-10-26 | 2022-04-28 | Industrial Technology Research Institute | Laser beam shaping device, laser processing system and laser interlocking welding structure |
| CN112548322A (en) * | 2020-11-23 | 2021-03-26 | 上海嘉强自动化技术有限公司 | Double-beam laser welding equipment |
| CN114434008A (en) * | 2022-04-11 | 2022-05-06 | 江苏联赢激光有限公司 | Composite laser welding method and laser welding device |
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