CN203536721U - Device for outputting hollow laser beam - Google Patents
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- CN203536721U CN203536721U CN201320690664.6U CN201320690664U CN203536721U CN 203536721 U CN203536721 U CN 203536721U CN 201320690664 U CN201320690664 U CN 201320690664U CN 203536721 U CN203536721 U CN 203536721U
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Abstract
本实用新型公开了一种输出空心激光光束的装置，包括：整形系统，其设置在输入的实心光束后，用于将该实心光束整形为空心光束；泵浦光耦合系统，其沿光路设置在所述整形系统后，用于将所述空心光束变换成合适直径大小的空心光束；激光谐振腔，其沿光路设置在所述耦合系统后，合适直径大小的空心光束从该激光谐振腔的一端面耦合进入谐振腔，对激光器增益介质进行泵浦，通过相位控制使得所述谐振腔中的增益介质吸收泵浦光产生连续的空心激光输出。本实用新型的装置通过将入射的泵浦光从通常的实心形式改变成为空心形式，使激光振荡的轴心部分没有增益，再通过相位控制，得到空心激光光束输出，具有实现简单、可靠性高、转换效率高和输出功率高的优点。
The utility model discloses a device for outputting a hollow laser beam, which comprises: a shaping system, which is arranged behind the input solid beam, and is used to shape the solid beam into a hollow beam; a pump light coupling system, which is arranged along the optical path at After the shaping system, it is used to transform the hollow beam into a hollow beam with a suitable diameter; the laser resonator is arranged behind the coupling system along the optical path, and the hollow beam with a suitable diameter passes from a part of the laser resonator The end face is coupled into the resonant cavity to pump the gain medium of the laser, and through phase control, the gain medium in the resonant cavity absorbs the pump light to generate continuous hollow laser output. The device of the utility model changes the incident pump light from the usual solid form to the hollow form, so that the axis of the laser oscillation has no gain, and then through phase control, the output of the hollow laser beam is obtained, which has the advantages of simple implementation and high reliability. , high conversion efficiency and high output power advantages.
Description
Technical field
The utility model belongs to laser field, is specifically related to a kind of device of exporting hollow laser beam.
Background technology
For a long time, solid laser beam has a wide range of applications on as cutting, cladding, welding and mark etc. in conventional laser industry.But in recent years, due to the promotion of application technology, various center intensity be zero laser beam---hollow laser beam produces in succession, and forming the extended familys of a novel so-called hollow beam (also claiming dark hollow beam).Hollow beam is as laser catheter, optical tweezers (light pincers) and optics spanner, in accurate, the contactless manipulation of microcosmic particle (as micro particles, nano particle, free electron, biological cell and atom or molecule etc.) with in controlling, has a wide range of applications.
Due to the generation of hollow beam, also promoted conversely the further optimization of a lot of conventional laser application self-examination light beam forms.For example even find recently that hollow beam also has certain advantage for the such conventional laser manufacture field of laser impact forming.This hollow beam, except having the general parameters of the laser beams such as laser frequency, laser power and beam divergence angle, also has some special parameters such as blackening size, width of light beam, beam radius and width radius ratio.All kinds of hollow beams have its unique physical property, distribution as cylindrical in intensity, very little blackening size, without heating effect, propagate consistency and there is spinning and orbit angular momentum etc., these character have a wide range of applications hollow beam in the fields such as laser optics, optical information processing, particulate waveguide, isotope separation, microelectronics and material science, biotechnology, medical science and atomics, molecules.
So far, in prior art, there is the method for the hollow laser beam of multiple generation, as geometrical optics approach, hollow optical fiber method, π phase board method, Identification with Method of Optical Holography and computer-generated hologram method etc.Wherein, geometrical optics approach, hollow optical fiber method and π phase board method obtain hollow beam, advantage be simple in structure, be convenient to realize, but the shortcoming of the beam quality that conversion efficiency is low, the purity of output hollow beam is high and not lower is also clearly; And computer-generated hologram method and Identification with Method of Optical Holography obtain hollow beam, although the purity of output hollow beam is high, good beam quality, cost is higher, and manufacture difficulty is very large.
In Chinese patent literature 201210049178.6, disclose a kind of employing end pumping, pump light focus has been coupled to gain medium inner or outside, obtained the method for hollow laser beam.The hot spot of the hollow beam that the method obtains is comprised of a lot of little secondary lobes, this discrete annular hollow light beam has certain restriction in actual application, for example be excited in loss microscopy, existence due to secondary lobe, hollow beam is not just so obvious to the Control of Fluorescence effect of exciting light, cause the generation of fragmentary impurity fluorescence, reduced and be excited the resolution of loss microscopy.
Utility model content
Above defect or Improvement requirement for prior art, the utility model provides a kind of device of exporting hollow laser beam, its object is to utilize annular pump light, by axial end pumping, in gain media, form the gain region of hollow form, directly obtain the output of hollow laser beam, by the ring-type spot size to annular pump light, control accurately, the control of realization to zlasing mode, solved the not complete unglazed problem in hollow beam center, by phase control, solved the discontinuous problem of hollow beam cavity ring simultaneously.
According to an aspect of the present utility model, a kind of device of exporting hollow beam is provided, for realizing, solid pump light is transformed to continuous hollow pump beam, it is characterized in that, this device comprises:
Orthopedic systems, it is arranged on after the solid light beam of input, for this solid light beam is shaped as to hollow beam;
Pump light coupled system, it is arranged on after described orthopedic systems along light path, for described hollow beam being transformed into the hollow beam of suitable diameter size;
Laserresonator, it is arranged on after described coupled system along light path, the hollow beam of described suitable diameter size is coupled into resonant cavity from an end face of this laserresonator, laser gain medium is carried out to pumping, by phase control, make the gain media absorptive pumping light in described resonant cavity produce continuous hollow Laser output.
As improvement of the present utility model, described orthopedic systems consists of the annular hollow internal conical surface speculum with same apex angle of outer conical surface speculum and coaxial placement with it, the surface of emission that is outer conical surface speculum is parallel with the reflecting surface of annular hollow internal conical surface speculum, incident light optical axis overlaps with the rotation axes of symmetry of outer conical surface speculum and annular hollow internal conical surface speculum, light beam is from the incident of outer conical surface speculum, reverberation is the annular beam of dispersing centered by optical axis, it is after the reflection of annular hollow internal conical surface speculum, with the parallel mode outgoing of the incident beam with entering at first orthopedic systems, be the hollow beam parallel with optical axis.
As improvement of the present utility model, described orthopedic systems consists of the outer conical surface speculum with same apex angle of internal conical surface speculum and placement in contrast, this internal conical surface speculum rotation axes of symmetry becomes 135 ° of angles with incident beam optical axis, the rotation axes of symmetry of outer conical surface speculum is parallel with internal conical surface speculum rotation axes of symmetry, and internal conical surface speculum is vertical with incident beam optical axis with outer conical surface speculum summit line.
As improvement of the present utility model, described orthopedic systems consists of the outer conical surface lens with same apex angle, identical refractive index of internal conical surface lens and coaxial placement with it, two lens are all that a side is plane, one side is the mirror structure of taper seat, wherein the rotation axes of symmetry of taper seat is vertical with plane, and with the light shaft coaxle of incident beam.
As improvement of the present utility model, described end pumping coupling is combined by spherical lens or cylindrical lens combination is coupled, by GRIN Lens, is coupled or is realized by coupling fiber.
As improvement of the present utility model, described laserresonator 4 comprises that the eyeglass, spiral phase plate, gain media, the focal length that along optical axis, set gradually are the cylindrical mirror system that the cylindrical mirror of f forms and want and be located at the eyeglass that is f between two cylindrical mirrors with the distance of two cylindrical mirrors, light beam is from described eyeglass incident, vibration back and forth between eyeglass and eyeglass, wherein said light beam per pass spiral phase plate, phase factor will increase the single high-order light beam that makes only to export single-phase bit pattern, thereby forms continuous hollow beam.
As improvement of the present utility model, described gain media is YAG rod.
On the other hand, a kind of method of utilizing device output hollow beam of the present utility model is provided, by solid pump light is shaped as after hollow pump light, recycling coupled system is coupled into laserresonator by pump light, in the mode of axial end pumping, in gain media, form the gain region of hollow form, by laser generation, realize the direct output of hollow laser beam, concrete steps are as follows:
(1) the solid light beam that laser produces, is shaped as the annular pump light of hollow through orthopedic systems;
(2) the annular pump light of this hollow, incides coupled system along optical axis, and this coupled system is transformed into described annular pump light the hollow beam of suitable diameter size;
(3) this hollow beam is coupled into resonant cavity from an end face of laserresonator, and laser gain medium is carried out to pumping, by phase control, makes the gain media absorptive pumping light in described resonant cavity produce continuous hollow Laser output.
Wherein, described continuous hollow laser is by continuously changing the phase place of incident beam, makes to only have in resonant cavity a kind of phase pattern can persistent oscillation and realize.
Continuously changing by a spiral phase plate being arranged in resonant cavity of described incident beam phase place realizes, and this spiral phase plate is the phase place diffraction optical element that optical thickness is directly proportional to gyrobearing angle.
In the utility model, the pump light of incident can be solid, and solid pump light first incides an orthopedic systems, and the pump light of exporting by shaping becomes hollow annular pump light.
In the utility model, the solid laser beam that solid pump light can send for semiconductor laser, coupled system can be semiconductor laser coupled system.
In general, device of the present utility model is with respect to prior art, it is by changing the pump light of incident to become hollow form from common solid form, make the not gain of axial portions of laser generation, pass through again phase control, obtain hollow laser beam output, have advantages of that realization is simple, reliability is high, conversion efficiency is high and power output is high.
Accompanying drawing explanation
Fig. 1 is the apparatus structure schematic diagram according to the utility model embodiment;
Fig. 2 is the structural representation of an embodiment of orthopedic systems in Fig. 1;
Fig. 3 is the structural representation of another embodiment of orthopedic systems in Fig. 1;
Fig. 4 is the structural representation of another embodiment of orthopedic systems in Fig. 1;
Fig. 5 is coupled system schematic diagram in Fig. 1;
Fig. 6 is laserresonator schematic diagram in Fig. 1;
Fig. 7 is spiral phase plate schematic diagram in Fig. 6;
Fig. 8 is single LG degenerate mode laser beam additive process schematic diagram;
Fig. 9 is LG
0 ,+lthe process analysis procedure analysis of the phase factor of pattern light beam round-trip transmission in resonant cavity;
Figure 10 is LG
0 ,-lthe process analysis procedure analysis of the phase factor of pattern light beam round-trip transmission in resonant cavity;
In institute's drawings attached, same Reference numeral represents identical technical characterictic, wherein, and 1-pump light, 2-orthopedic systems, 3-coupled system, 4-laserresonator, the hollow output beam of 5-.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein is only in order to explain the utility model, and be not used in restriction the utility model.In addition involved technical characterictic in each execution mode of the utility model the following describes, just can not mutually combine as long as do not form each other conflict.
The light beam that semiconductor laser sends is solid light beam, but its light beam is astigmatic pencil on fast axle and slow-axis direction, by ordinary lens, collimates, and can obtain the output beam of circular solids, usings as the pump light 1 in the utility model embodiment Fig. 1.
As shown in Figure 2, the orthopedic systems 2 of the present embodiment consists of the annular hollow internal conical surface speculum 202 with same apex angle of outer conical surface speculum 201 and coaxial placement with it, the surface of emission that is outer conical surface speculum 201 is parallel with the reflecting surface of annular hollow internal conical surface speculum 202, incident light optical axis overlaps with the rotation axes of symmetry of outer conical surface speculum 201 and annular hollow internal conical surface speculum 202, light beam is from 201 incidents of outer conical surface speculum, reverberation is the annular beam of dispersing centered by optical axis, because the reflecting surface of annular hollow internal conical surface speculum 202 is parallel with the reflecting surface of outer conical surface speculum 201, therefore light beam is again after 202 reflections of annular hollow internal conical surface speculum, can be with the parallel mode outgoing of the incident beam with entering at first orthopedic systems, be the hollow beam parallel with optical axis.
As shown in Figure 3, the orthopedic systems 2 ' of another embodiment of the utility model consists of the outer conical surface speculum 204 with same apex angle of internal conical surface speculum 203 and placement in contrast, internal conical surface speculum 203 rotations axes of symmetry become 135 ° of angles with incident beam optical axis, the rotation axes of symmetry of outer conical surface speculum 204 is parallel with internal conical surface speculum 203 rotations axes of symmetry, internal conical surface speculum 203 is vertical with incident beam optical axis with outer conical surface speculum 204 summit lines, and beam shaping process is identical with 1.
As shown in Figure 4, the orthopedic systems 2 ' of the another embodiment of the utility model ' by internal conical surface lens 205 and with it the coaxial outer conical surface lens 206 with same apex angle, identical refractive index of placing form, two lens are all that a side is plane, one side is the mirror structure of taper seat, wherein the rotation axes of symmetry of taper seat is vertical with plane, and with the light shaft coaxle of incident beam.Incident beam is from the plane one side incident of internal conical surface lens 205, during again from the outgoing of taper seat side, due to refraction effect, light beam can be to away from optical axis direction deviation, and then light beam, from the outer conical surface side incident of outer conical surface lens 206, reflects again, and because the plane of refraction of twice refraction is parallel, refractive index is also identical, and outgoing beam can be parallel with the light beam that incides internal conical surface lens 205, is the parallel hollow beam of optical axis.
Through above-mentioned orthopedic systems 2 shapings, obtaining hollow laser beam is hollow pump beam, and then it be coupled into laserresonator in the mode of end pumping gain media is carried out to pumping.
The preferred end pumping coupled modes of the present embodiment have following several: 1) compound lens system optically focused: with spherical lens combination or cylindrical lens combination, be coupled.2) GRIN Lens coupling: replace compound lens by GRIN Lens and be coupled, advantage is simple in structure, the size of collimation hot spot depends on the numerical aperture of GRIN Lens.3) coupling fiber: refer to carry out pumping coupling with the LD with tail optical fiber output, advantage is flexible structure.Fig. 5 is the coupled system schematic diagram that consists of compound lens, and the larger hollow beam of beam radius is after set of lenses, and the thin hollow beam that pumping is more easily carried out in output, improves pumping efficiency.
Gain media in the hollow pumping optically pumped laser resonant cavity of incident, due to the not gain of axial portions of laser generation, the LG of the vibration that therefore conventionally takes the lead in
0,0the gain of mould is pressed lower than higher order mode, and hollow higher order mode takes the lead in vibrating and exports, and obtains hollow beam.By orthopedic systems and coupled system, the ring-type spot size of annular pump light is controlled accurately, made to form in resonant cavity specific high-order LG
0, ± lmode oscillation.Fig. 6 is the laserresonator schematic diagram of an embodiment of the utility model, pump light is through eyeglass 401 incidents, vibration back and forth between eyeglass 401 and eyeglass 405, gain media 403 is YAG rod, wherein eyeglass 401 is pump light full impregnated, 1064nm is all-trans, and 405 pairs of 1064nm light of eyeglass have certain reflectivity (non-being all-trans), and laser beam is exported by eyeglass 405.
Due to LG
0 ,+land LG
0 ,-lhave identical radial distribution, therefore, interior these the two kinds of phase patterns of conventional laser resonant cavity are by an oscillates, and stable existence, in this case, and two hollow ring light beam LG
0 ,+land LG
0 ,-lafter being superimposed, the hollow beam of formation is secondary lobe form, as shown in Figure 8.In order to obtain continuous hollow beam, need to make to only have in resonant cavity a kind of phase pattern can persistent oscillation, the utility model has added spiral phase plate 402 and cylindrical mirror system in resonant cavity.Wherein, spiral phase plate 402(is as shown in Figure 7) be the pure phase position diffraction optical element that a kind of thickness of optics is directly proportional to gyrobearing angle, be used for changing the phase place of incident beam.The cylindrical mirror 404,406 that cylindrical mirror system is f by focal length forms, and cylindrical mirror 404 and cylindrical mirror 406 are apart 2f, and the relative eyeglass 405 of two cylindrical mirrors is symmetrical, and the distance of eyeglass 405 and two cylindrical mirrors is f.
LG
0 ,+lpattern has exp(+il θ) phase term, LG
0 ,-lpattern has exp(-il θ) phase term, (in Fig. 9 and Figure 10+l represents that phase factor is the LG of exp (+il θ)
0 ,+lpattern light beam ,-l represents that phase factor is the LG of exp (il θ)
0 ,-lpattern light beam).Light beam per pass spiral phase plate 402, phase factor will increase l; When phase factor be ± light beam of l is during by cylindrical mirror system, phase factor can negate becomes ml(light beam by identical with the effect of passing through successively cylindrical mirror 404, eyeglass 405, cylindrical mirror 406 by the effect of cylindrical mirror 404 again by eyeglass 405 reflections after cylindrical mirror 404).
With gain media 403 right sides, count the original position of light beam vibration, LG
0 ,+lafter pattern comes and goes one week in chamber, phase factor is still+l to meet from the PHASE DISTRIBUTION of reproducing, this LG
0 ,+lpattern can stable oscillation stationary vibration in resonant cavity, as shown in Figure 9.And LG
0 ,-lafter pattern comes and goes one week in chamber, become+3l of phase factor, does not meet from the PHASE DISTRIBUTION of reproducing, this LG
0 ,-lpattern can be suppressed and cannot continue vibration in resonant cavity.Therefore, add after spiral phase plate 402 and cylindrical mirror system in resonant cavity, laser can only be exported the single high-order light beam of single-phase bit pattern, and the hollow beam obtaining is like this no longer just common secondary lobe light beam, but continuous hollow beam.
In resonant cavity, can also increase Q-switching device, form pulse Q and close laser, export annular Q impulse light beam; Also can increase modulation, form the annular mode locking pulse of locked mode vibration output; Can also increase in addition frequency multiplication or other frequency inverted devices, the annular beam of output frequency multiplication or other frequency inverted.
The method that obtains hollow laser beam described in the utility model, adopts device in chamber that common solid pump beam is transformed to hollow pump beam.Utilize the energy of the hollow beam that the method obtains more to concentrate on ring upper, by the control of the light beam phase place of vibrating in the ring-type spot size to annular pump light and laserresonator, realize hollow pattern light beam output.The method than before method to have quality for outputting laser beam good, due to concentration of energy, more to concentrate on ring upper simultaneously, the slope efficiency that makes to export hollow beam is higher, can provide a kind of feasible method for the output of higher-wattage hollow beam.Meanwhile, use the method to obtain the device of hollow laser beam, there is cost low, assembling feature simple and that easily regulate.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present utility model; not in order to limit the utility model; all any modifications of doing within spirit of the present utility model and principle, be equal to and replace and improvement etc., within all should being included in protection range of the present utility model.
Claims (7)
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103594918A (en) * | 2013-11-04 | 2014-02-19 | 华中科技大学 | Method and device for outputting hollow laser beam |
| CN105865346A (en) * | 2016-03-02 | 2016-08-17 | 上海理鑫光学科技有限公司 | SMT paster part height indicator |
| CN106975836A (en) * | 2017-05-26 | 2017-07-25 | 北京华岸科技有限公司 | Optical beam transformation device and laser processing device |
| CN109167248A (en) * | 2018-11-15 | 2019-01-08 | 云南大学 | A kind of non-homogeneous cross-polarization hollow ring laser |
| CN111618426A (en) * | 2020-06-05 | 2020-09-04 | 成都拓米电子装备制造有限公司 | Light beam shaping structure and method for improving flexible OLED module laser cutting |
-
2013
- 2013-11-04 CN CN201320690664.6U patent/CN203536721U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103594918A (en) * | 2013-11-04 | 2014-02-19 | 华中科技大学 | Method and device for outputting hollow laser beam |
| CN105865346A (en) * | 2016-03-02 | 2016-08-17 | 上海理鑫光学科技有限公司 | SMT paster part height indicator |
| CN106975836A (en) * | 2017-05-26 | 2017-07-25 | 北京华岸科技有限公司 | Optical beam transformation device and laser processing device |
| CN109167248A (en) * | 2018-11-15 | 2019-01-08 | 云南大学 | A kind of non-homogeneous cross-polarization hollow ring laser |
| CN109167248B (en) * | 2018-11-15 | 2019-09-10 | 云南大学 | A kind of non-homogeneous cross-polarization hollow ring laser |
| CN111618426A (en) * | 2020-06-05 | 2020-09-04 | 成都拓米电子装备制造有限公司 | Light beam shaping structure and method for improving flexible OLED module laser cutting |
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