CN109676246A - Split type laser focusing device - Google Patents
Split type laser focusing device Download PDFInfo
- Publication number
- CN109676246A CN109676246A CN201910076056.8A CN201910076056A CN109676246A CN 109676246 A CN109676246 A CN 109676246A CN 201910076056 A CN201910076056 A CN 201910076056A CN 109676246 A CN109676246 A CN 109676246A
- Authority
- CN
- China
- Prior art keywords
- reflecting mirror
- focus lamp
- mirror
- light
- focusing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000011514 reflex Effects 0.000 claims abstract description 6
- 230000003287 optical effect Effects 0.000 claims description 43
- 239000000463 material Substances 0.000 claims description 20
- 230000007423 decrease Effects 0.000 claims description 12
- 238000005538 encapsulation Methods 0.000 claims description 12
- 230000004313 glare Effects 0.000 claims description 12
- 125000004122 cyclic group Chemical group 0.000 claims description 8
- 230000000903 blocking effect Effects 0.000 claims description 6
- 239000004744 fabric Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 29
- 238000010586 diagram Methods 0.000 description 17
- 238000012545 processing Methods 0.000 description 15
- 238000009434 installation Methods 0.000 description 8
- 238000005459 micromachining Methods 0.000 description 8
- 238000013461 design Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000002994 raw material Substances 0.000 description 5
- 238000012216 screening Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 4
- 230000004075 alteration Effects 0.000 description 3
- 230000004323 axial length Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000001093 holography Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052934 alunite Inorganic materials 0.000 description 1
- 239000010424 alunite Substances 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000571 coke Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000007516 diamond turning Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- KPZTWMNLAFDTGF-UHFFFAOYSA-D trialuminum;potassium;hexahydroxide;disulfate Chemical compound [OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[Al+3].[Al+3].[Al+3].[K+].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O KPZTWMNLAFDTGF-UHFFFAOYSA-D 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
Abstract
The present invention relates to a kind of Split type laser focusing devices, including the first reflecting mirror, second reflecting mirror, third reflecting mirror and output focus lamp, first reflecting mirror, the reflecting surface of third reflecting mirror is plane, the reflecting surface of second reflecting mirror is annular arc-shaped concave surface or equivalent Fresnel surface type, it exports focus lamp and is equipped with the conical surface, first reflecting mirror is for receiving incoming laser beam and reflexing to the second reflecting mirror, incident second reflecting mirror of the emergent ray low-angle of first reflecting mirror, second reflecting mirror receives the emergent ray of the first reflecting mirror and reflexes to third reflecting mirror, third reflecting mirror receives the emergent ray of the second reflecting mirror and reflexes to output focus lamp, export the emergent ray that focus lamp receives third reflecting mirror, and it is emitted by the conical surface that output focus lamp is equipped with, form approximate bessel beam.Its capacity usage ratio is high, and exports on focus lamp axis in the focusing range of position, and the center spot size and light intensity of the approximate bessel beam of output are basically unchanged.
Description
Technical field
The present invention relates to field of laser processing more particularly to a kind of Split type laser focusing devices.
Background technique
The spot diameter minimum of bessel beam is up to wavelength magnitude and can be held essentially constant in very long distance, phase
There is longer depth of focus than Gaussian beam, therefore be very suitable to for doing Laser Micro-Machining, especially processing big aspect ratio material
There is incomparable advantage in material.
Ideal bessel beam, can not be real in reality due to occupying infinitely great space and possessing infinitely great energy
It is existing, but people can obtain approximate bessel beam by experimental method.So far, many has been proposed in researcher
Kind generates the experimental method of bessel beam, these methods can be roughly divided into two types: active and passive type.It is so-called active
Bessel beam (being called Resonant-cavity Method) is directly exactly generated by laser by the resonant cavity of specific structure, and passive type refers to
Other light beams are converted into bessel beam by certain method.The method that common passive type generates bessel beam is main
Have: circumferential weld-lens method calculates holography method, axial cone mirror method, spherical aberration method, spatial light modulator method, waveguide method etc..Compare
State several method, respectively there is advantage and disadvantage: circumferential weld-lens method structure is simple, is easily achieved, but to the capacity usage ratio of incident light
It is lower；It is also relatively simple to calculate holography method structure, but has higher quality requirement to hologram sheet；Spherical aberration lens method structure
More flexibly, but spherical aberration lens design and processing technology are complicated, and center spot size and light intensity with position can be sent out
Changing；Axial cone mirror method structure is simple, can generate the bessel beam of high quality, capacity usage ratio is significantly than circumferential weld-lens method
It improves, is the main way of current Laser Micro-Machining, then axial cone mirror method is higher to axial cone mirror requirement on machining accuracy, practical laser
Micro-machined depth corresponds to generally in several hundred a microns to several millimeters of magnitude and needs cyclic annular hot spot, energy at incidence conical surface of shaft
Although power utilization rate is more much higher than circumferential weld-lens method, still need to block a large amount of laser energy, center spot size
Although being able to maintain fixation, light intensity with position can change, and it is possible to which, there are violent vibration, Fig. 1 is prior art axis
The plane wave that axicon lens method provides is limited axial cone mirror method and is existed by the on-axis intensity distribution curve after axial cone mirror, these above-mentioned disadvantages
Directly applying and promoting in Laser Micro-Machining.
Summary of the invention
It is an object of the invention to overcome the defect of the prior art, a kind of Split type laser focusing device, energy are provided
It is high to measure utilization rate, and on axis in the focusing range of position, the center spot size and light intensity of the approximate bessel beam of output are basic
It is constant, in favor of carrying out Laser Micro-Machining, the especially Laser Micro-Machining to big aspect ratio material.
The present invention is implemented as follows: a kind of Split type laser focusing device, including the first reflecting mirror, the second reflecting mirror,
Third reflecting mirror and output focus lamp, first reflecting mirror, third reflecting mirror reflecting surface be plane, the second reflecting mirror it is anti-
The arc-shaped concave surface or the Fresnel surface type equivalent with it that face is annular are penetrated, the output focus lamp is equipped with the conical surface, and described first
For reflecting mirror for receiving incoming laser beam and reflexing to the second reflecting mirror, going out for the first reflecting mirror is arranged in second reflecting mirror
In light optical path, for receiving the emergent ray of the first reflecting mirror and reflexing to third reflecting mirror, the third reflecting mirror setting exists
Going out in light optical path for second reflecting mirror, it is described defeated for receiving the emergent ray of the second reflecting mirror and reflexing to output focus lamp
Out focus lamp be arranged in third reflecting mirror go out light optical path on, for receiving the emergent ray of third reflecting mirror, light beam with it is defeated
A cricoid optical field distribution is formed at the new acquaintance section that the conical surface that focus lamp is equipped with out initially intersects, emergent ray is poly- by exporting
The outgoing of the conical surface that burnt mirror is equipped with, formed in laser focusing device outgoing axis direction setting range a center spot size and
The approximate bessel beam of stabilized intensity.
Further, incident second reflecting mirror of the emergent ray low-angle of the first reflecting mirror.Low-angle is incident, improves light beam
Imaging and focusing quality.
Further, the first reflecting mirror, third reflecting mirror, output focus lamp are set gradually along laser light incident direction, and first
The axial line of the incident light axis of reflecting mirror, the emergent light axis of third reflecting mirror and output focus lamp is located along the same line, and
It is vertical with the axial line of the second reflecting mirror.
Further, first reflecting mirror, the second reflecting mirror, third reflecting mirror, output focus lamp are separately fixed at envelope
It fills on fixed frame, reduces installation and debugging difficulty.
Further, adjustable multiplying power expand device is set in the laser light incident direction of the first reflecting mirror, is used for laser
Shoot laser expanded after outgoing to the first reflecting mirror.The present invention adjusts expand multiplying power as needed, makes the height after expanding
The angle of divergence of this light beam is smaller, reduces the influence to become larger by each mirror light beam divergence angle.Gaussian beam after expanding is made
For the present apparatus incident light beam strikes to the first reflecting mirror.
Further, the output focus lamp is cone or truncated cone-shaped, and the emergent ray of third reflecting mirror is poly- by exporting
The circular cone bottom surface of burnt mirror or rotary table bottom surface are incident, are emitted by its conical side surface or frustum cone side.
Further, when exporting focus lamp is truncated cone-shaped, the output focus lamp is set as hollow structure, hollow diameters
It is identical as the upper bottom surface diameter of rotary table；The identical i.e. light of the diameter of section that the upper bottom surface diameter of rotary table intersects with light beam and conical surface most end
Upper bottom surface edge most end of the beam with the conical surface in rotary table intersects.
Further, light blocking material blocks veiling glare is placed in the non-active area of output focus lamp.
Further, when exporting focus lamp is solid truncated cone-shaped, light screening material is set in the upper bottom surface of output focus lamp
Block veiling glare.
Further, the reflecting surface of the second reflecting mirror is using its axial line as rotary shaft, by the arc section rotation 360 to concave
It spends, forms the arc-shaped concave surface of annular；The end of the arc section one end to concave extends to the second mirror center, another
The end at end extends to the end face outer most edge of the second reflecting mirror.
Further, it is high that the cyclic annular optical field distribution in the new acquaintance section of the conical surface of light beam and third reflecting mirror, which is both ends light intensity,
The decline relationship of this function, intermediate light intensity is the optical field distribution with radial direction (vertical axial) radius inversely, so that light beam
Within the scope of light intensity respective radius intermediate on new acquaintance's cross-section radial of the conical surface of third reflecting mirror, the corresponding infinitely small product of every bit
Energy in cyclotomy anchor ring product is equal, help to obtain the light field being axially evenly distributed.
Further, light beam does not surpass with phase radial at the new acquaintance section of the conical surface of third reflecting mirror with center phase difference
Cross 2 π.
Second reflecting mirror according to the difference of reflecting surface, can be divided into the arc-shaped concave surface with annular concave mirror or
Equivalent fresnel reflecting mirror.
Further, the fresnel reflecting mirror equivalent with the concave mirror of the arc-shaped concave surface with annular can pass through
The method of diffraction optical element designs.
Further, in the Split type laser focusing device have annular arc-shaped concave surface concave mirror or
Equivalent fresnel reflecting mirror can use diamond turning process, using aluminum alloy materials as Raw material processing, and coat highly reflecting films.
The simple process is mature, at low cost.
Further, the Split type laser focusing device calculates cone or round estrade according to light beam focusing requirement
Interior optical field distribution range is processed into circular conical surface or frustum cone side by high-precision requirement.
Further, the Split type laser focusing device calculates cone or round estrade according to light beam focusing requirement
Interior optical field distribution range is processed into circle by high-precision requirement only in the corresponding circular conical surface of working range or frustum cone side position
The conical surface or frustum cone side.
Further, the Split type laser focusing device, according to light beam focusing requirement, the energy of incident Gaussian beam
Amount and spot size want matching.Such as increase Gaussian beam radius, its non diffracting distance can be increased.
Further, the Split type laser focusing device, according to light beam focusing requirement, machining cone or rotary table
The base angle size of body wants matching.The base angle for such as reducing cone or round estrade can increase its non diffracting distance.
Further, the Split type laser focusing device, according to light beam focusing requirement, the material of cone or round estrade
Material refractive index wants matching.The refractive index for such as subtracting cone or round estrade can increase its non diffracting distance.
Further, the cone of the Split type laser focusing device or the inoperative range of round estrade can be with hollow outs
Or removal, to mitigate weight.
Further, the cone of the Split type laser focusing device or the inoperative range of round estrade are corresponding out
The position for penetrating end and hollow out or removal can place extinction light screening material, to remove veiling glare.
Compared with prior art, the invention has the following advantages:
(1) present invention uses the concave mirror or equivalent fresnel reflecting mirror with the arc-shaped concave surface of annular, so that
Present apparatus capacity usage ratio is high, and almost the energy of entire incident laser hot spot can utilize.First reflecting mirror is for receiving
Incoming laser beam and the concave mirror or equivalent fresnel reflecting mirror for reflexing to the arc-shaped concave surface with annular have annular
Arc-shaped concave surface concave mirror or equivalent fresnel reflecting mirror be arranged in the first reflecting mirror go out light optical path on, for connecing
It receives the emergent ray of the first reflecting mirror and reflexes to third reflecting mirror, the arc-shaped with annular is arranged in the third reflecting mirror
In the light optical path out of the concave mirror of concave surface or equivalent fresnel reflecting mirror, there is annular arc-shaped concave surface for receiving
The emergent ray of concave mirror or equivalent fresnel reflecting mirror simultaneously reflexes to output focus lamp, and the first reflecting mirror has annular
Arc-shaped concave surface concave mirror or equivalent fresnel reflecting mirror, third reflecting mirror reach beam shaping and transmission jointly
Effect by incident Gauss beam reshaping circlewise optical field distribution, and makes at the conical surface new acquaintance section of light beam and the second reflecting mirror
Cyclic annular optical field distribution be decline relationship that interior outer annular light intensity is Gaussian function, intermediate light intensity is to be inversely proportional with radial radius
The optical field distribution of relationship, so that on cross-section radial within the scope of intermediate light intensity respective radius, the corresponding infinitely small integral circle of every bit
Energy in anchor ring product is equal, help to obtain the light field being axially evenly distributed；Radial phase and center phase at new acquaintance section
Potential difference is no more than 2 π；And the circular conical surface or frustum cone side of the output focus lamp of exit end play focussing force, light is poly- by output
After the conical surface outgoing of burnt mirror, center spot size is formed in output focus lamp optical axis direction setting range and light intensity is basically unchanged
Approximate bessel beam.
(2) Split type laser focusing device various components inside is fixed with encapsulation fixed frame enormously simplifies installation and debugging hardly possible
Degree, greatly reduces installation and debugging error.
(3) split-type design of Split type laser focusing device can reduce body absorption.
(4) there is the concave mirror or equivalent fresnel reflecting mirror of the arc-shaped concave surface of annular, diamond can be used
Turning process using aluminum alloy materials as Raw material processing, and coats highly reflecting films.This tradition aspherical mirror machining mode does not need to lead to
The photoetching process for crossing integrated circuit obtains, and processing and fabricating cost substantially reduces.
(5) design requirement is focused according to light beam, calculates the range of work circular conical surface or frustum cone side, reduced and need to guarantee essence
The processing circular conical surface or frustum cone side range of degree, reduce processing cost.
(6) design requirement is focused according to light beam, calculates optical field distribution range of the laser beam in cone or round estrade, it will
Light field without position hollow out or removal, and place light screening material, be conducive to mitigate weight, improve heat dissipation effect, eliminate miscellaneous
Astigmatism influences, conducive to the uniformity of distribution of light intensity in the axial direction.
In short, that the present invention overcomes existing focusing technology capacity usage ratios is low, processing and fabricating cost is high, installation and debugging difficulty
Greatly, center spot size and light intensity with position, which can change, possibly even has the problems such as violent vibration, the invention enables
In output focus lamp optical axis focusing range, the center spot size and light intensity of the approximate bessel beam of output are basically unchanged,
Installation and debugging difficulty is substantially reduced simultaneously, it is especially micro- to the laser of big aspect ratio material to add in favor of carrying out Laser Micro-Machining
Work.
Detailed description of the invention
Fig. 1 is that the plane wave that prior art axial cone mirror method provides passes through the on-axis intensity distribution curve after axial cone mirror；
Fig. 2 is the structural schematic diagram of the first embodiment of Split type laser focusing device of the invention；
Fig. 3 is the first embodiment of Split type laser focusing device of the invention as the height after the expanding of incident light
This light beam schematic diagram；
Fig. 4 is the arc-shaped concave surface with annular of the first embodiment of Split type laser focusing device of the invention
The structural schematic diagram of concave mirror；
Fig. 5 is the left view of Fig. 4；
Fig. 6 is third reflecting mirror and the conscope part of the first embodiment of Split type laser focusing device of the invention
Enlarged drawing；
Fig. 7 is the light beam and the initial phase of circular cone body cone of the first embodiment of Split type laser focusing device of the invention
The section (new acquaintance section) of friendship marks 5 position optical field distribution figures；
Fig. 8 is the light beam and the initial phase of circular cone body cone of the first embodiment of Split type laser focusing device of the invention
The section (new acquaintance section) of friendship marks the corresponding light distribution of 5 position radial direction r；
Fig. 9 is the light beam and the initial phase of circular cone body cone of the first embodiment of Split type laser focusing device of the invention
The section (new acquaintance section) of friendship marks the corresponding phase distribution of 5 position radial direction r；
Figure 10 is the Split type laser focusing device of Gaussian beam after the expanding of Fig. 3 the first embodiment through the invention
Output bessel beam on-axis intensity distribution curve；
Figure 11 is corresponding section at the bessel beam on-axis intensity distribution curve center abscissa or stabilized intensity of Figure 10
The face curve of light distribution；
Figure 12 is the fixed schematic diagram of encapsulation of the first embodiment of Split type laser focusing device of the invention；
Figure 13 is the structural schematic diagram of second of embodiment of Split type laser focusing device of the invention；
Figure 14 is the knot of the equivalent fresnel reflecting mirror of second of embodiment of Split type laser focusing device of the invention
Structure schematic diagram；
Figure 15 is the left view of Figure 14；
Figure 16 is third reflecting mirror and the rotary table mirror portion of second of embodiment of Split type laser focusing device of the invention
The enlarged drawing divided；
Figure 17 is a kind of schematic diagram of embodiment of the rotary table mirror of Split type laser focusing device of the invention；
Figure 18 is the fixed schematic diagram of encapsulation of second of embodiment of Split type laser focusing device of the invention.
Specific embodiment
The following is a clear and complete description of the technical scheme in the embodiments of the invention, it is clear that described embodiment
Only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, the common skill in this field
Art personnel all other embodiment obtained without making creative work belongs to the model that the present invention protects
It encloses.
The present invention provides a kind of Split type laser focusing device, including the reflection of the first reflecting mirror 1, the second reflecting mirror, third
Mirror 3 and output focus lamp, first reflecting mirror, third reflecting mirror are plane mirror, the second reflecting mirror can for
The concave mirror 21 of the arc-shaped concave surface of annular or the Fei Nie equivalent with the concave mirror of the arc-shaped concave surface with annular
That reflecting mirror 22, the output focus lamp have the output conical surface, can such as use conscope 41 or rotary table mirror 42, and described first is anti-
Mirror is penetrated for receiving incoming laser beam and reflexing to the second reflecting mirror, the emergent ray low-angle incidence second of the first reflecting mirror is anti-
Mirror is penetrated, second reflecting mirror is arranged in the light optical path out of the first reflecting mirror, for receiving the emergent ray of the first reflecting mirror
And third reflecting mirror is reflexed to, the third reflecting mirror is arranged in the light optical path out of the second reflecting mirror, anti-for receiving second
It penetrates the emergent ray of mirror and reflexes to output focus lamp, the output focus lamp is arranged in the light optical path out of third reflecting mirror,
For receiving the emergent ray of third reflecting mirror, the emergent ray of third reflecting mirror is by the circular cone bottom surface of output focus lamp or rotary table
Bottom surface 423 is incident, is formed at the new acquaintance section 5 that light beam initially intersects with the conical side surface of output focus lamp or frustum cone side
One cricoid optical field distribution is emitted by its conical side surface or frustum cone side, sets model in output focus lamp central axial direction
Enclose one center spot size of interior formation and the metastable approximate bessel beam of light intensity.
Cyclic annular optical field distribution at new acquaintance section is the decline relationship that interior outer annular light intensity is Gaussian function, intermediate light intensity
For the optical field distribution with radial radius inversely, so that on cross-section radial within the scope of intermediate light intensity respective radius, every bit
Energy on corresponding infinitely small integral annulus area is equal, help to obtain the light field being axially evenly distributed；The new acquaintance cuts
Radial phase and center phase difference are no more than 2 π at face.
Embodiment one
Referring to fig. 2, the structural schematic diagram of the laser focusing device that the first embodiment of the invention provides as shown in Fig. 2,
Laser focusing device is by the first reflecting mirror, concave mirror, third reflecting mirror, conscope structure with annular arc-shaped concave surface
At the first reflecting mirror, third reflecting mirror are plane mirror.Incoming laser beam low-angle after the reflection of the first reflecting mirror enters
It is mapped on the concave mirror of the arc-shaped concave surface with annular, by having the concave mirror of the arc-shaped concave surface of annular anti-
Penetrate, then by third reflecting mirror reflection after, into conscope, be emitted by conical side surface.According to light beam focusing requirement, calculates and focus dress
Interior optical field distribution range is set, the base angle size of machining cone is calculated, cone Refractive Index of Material is matched, is processed into as required
The cone, especially by high-precision requirement processing output circular conical surface.
First reflecting mirror, third reflecting mirror, conscope are set gradually along laser light incident direction, the incident light of the first reflecting mirror
The axial line of axis, the emergent light axis of third reflecting mirror and conscope is located along the same line, and the annular with concave mirror
Arc-shaped concave surface axial line it is vertical；First reflecting mirror, the concave mirror with annular arc-shaped concave surface, third reflection
Mirror, conscope shown in Fig. 2 according to accurately placing.
Further, adjustable multiplying power expand device is set in the laser light incident direction of the first reflecting mirror, is used for laser
Shoot laser expanded after outgoing to the first reflecting mirror.The present invention adjusts expand multiplying power as needed, makes the height after expanding
The angle of divergence of this light beam is smaller, reduces the influence to become larger by each mirror light beam divergence angle.Gaussian beam after expanding is made
For the present apparatus incident light beam strikes to the first reflecting mirror.Be illustrated in figure 3 the first embodiment of the invention is used as incident light
Expand after Gaussian beam schematic diagram, the optical axis of the Gaussian beam axis and the first reflecting mirror is point-blank.According to
Light beam focusing requirement, the energy and spot size of Gaussian beam are matching.The Gaussian beam is focused as Split type laser
The first reflecting mirror of incident light beam strikes of device.
It is illustrated in figure 4 the mistake of the concave mirror of the arc-shaped concave surface with annular of the first embodiment of the invention
The structural schematic diagram of the axial cross section at center, the reflecting surface of the second reflecting mirror is using its axial line as rotary shaft, by the circle to concave
Segmental arc 212 is rotated by 360 °, and forms the arc-shaped concave surface of annular；The end of the arc section one end to concave extends to second
Mirror center, the end of the other end extend to the end face outer most edge of the second reflecting mirror, in the reflecting surface for making reflecting mirror ontology
Heart-shaped tapered convex surface.The cone on taper convex surface is located on the axial line of reflecting mirror ontology, cone to reflecting mirror ontology bottom surface
Axial length is less than the axial length (i.e. the axial length of reflecting mirror ontology external cylindrical surface) of reflecting mirror ontology.
Show symmetry of the concave mirror of the arc-shaped concave surface with annular about axle center.
It is illustrated in figure 5 the left view of Fig. 4, shows the concave mirror of the arc-shaped concave surface 211 with annular about this
The rotational symmetry in the left view center of circle can be with the structure of the cheer and bright concave mirror in conjunction with Fig. 4.
It is illustrated in figure 6 the third reflecting mirror of the first embodiment of the invention and the enlarged drawing of conscope part, also
Be removed in Fig. 2 the first reflecting mirror, with annular arc-shaped concave surface concave mirror part enlarged drawing.
Fig. 7 is the light beam and the initial phase of circular cone body cone of the first embodiment of Split type laser focusing device of the invention
5 position optical field distribution figure of the section of friendship, that is, new acquaintance section, the Gaussian beam after showing incident expand is by the first reflection
Mirror, beam shaping and the transmission with the concave mirror and third reflecting mirror of the arc-shaped concave surface of annular, in new acquaintance
Section forms cyclic annular optical field distribution, the region that wherein shadow representation light passes through, and linear shadow marks 7 and represents radial Intensity of Gaussian
Decline region, netted shade marks 6 and represents radial light intensity linear decline region.
Fig. 8 is the light beam and the initial phase of circular cone body cone of the first embodiment of Split type laser focusing device of the invention
The section (new acquaintance section) of friendship marks the corresponding light distribution of 5 position radial direction r, and the cyclic annular optical field distribution in new acquaintance section is
Both ends light intensity is the decline relationship of Gaussian function, and intermediate light intensity is the light field point with radial direction (vertical axial) radius inversely
Cloth, so that on new acquaintance's cross-section radial within the scope of intermediate light intensity respective radius, on the corresponding infinitely small integral annulus area of every bit
Energy it is equal, help to obtain the light field being axially evenly distributed.Linear shadow represents radial Intensity of Gaussian decline region i.e. just
Both ends Gauss on section is handed over to decline the corresponding laser transmission region 7 of light intensity, netted shade represents radial light intensity linear decline region,
The corresponding laser transmission region 6 of light intensity among i.e. on new acquaintance section.
Fig. 9 is the light beam and the initial phase of circular cone body cone of the first embodiment of Split type laser focusing device of the invention
The corresponding phase distribution of section 5 (new acquaintance section) position radial direction r of friendship, radial phase is at the new acquaintance section 5
Heart phase difference is no more than 2 π.Center refers to the center of Fig. 8 radial direction r Symmetric Mesh shade.
Formed at new acquaintance section cyclic annular optical field distribution as described in Figure 7 light distribution as described in Figure 8 and as described in Figure 9
Phase distribution laser by exit end circular conical surface outgoing after, in conscope optical axis direction setting range (apart from cone
[9.75-10.25mm]) a center spot size and the metastable approximate bessel beam of light intensity are formed, as shown in fig. 6,
8 are labeled as bessel beam region.The outgoing conical surface is practical to play focusing effect.The axis glazing of the bessel beam
Strong distribution curve is as shown in Figure 10, and the both ends light intensity of on-axis intensity distribution curve is the decline relationship of Gaussian function, intermediate light intensity
It is relatively stable to be basically unchanged.The both ends light intensity of Fig. 8 and Figure 10 is the decline relationship of Gaussian function, and drop point corresponds.
Figure 11 is corresponding at bessel beam on-axis intensity distribution curve center abscissa described in Figure 10 or stabilized intensity
Intensity distribution in cross-section distribution curve, symmetrical first zero crossing corresponds to the diameter of the bessel beam, the Bezier on figure
The on-axis intensity of light beam is basically unchanged in 0.5mm interval, and within this range, center spot size is also relatively stable,
Diameter is about 2um.
Figure 12 is the fixed schematic diagram of encapsulation of the first embodiment of Split type laser focusing device of the invention, mark 9
Shown thick line be encapsulation fixed frame, by the first reflecting mirror of focusing device, with annular arc-shaped concave surface concave mirror,
Third reflecting mirror, conscope are separately fixed on encapsulation fixed frame 9, can be finely adjusted in outside, and installation and debugging difficulty is reduced.
Embodiment two
The structural schematic diagram for the laser focusing device that second of embodiment of the invention provides is as shown in figure 13, and laser focuses
Device is made of the first reflecting mirror, equivalent fresnel reflecting mirror, third reflecting mirror, rotary table mirror, the first reflecting mirror, third reflecting mirror
It is plane mirror.Incoming laser beam low-angle after the reflection of the first reflecting mirror is incident on equivalent fresnel reflecting mirror,
By equivalent fresnel reflecting mirror reflect, then by third reflecting mirror reflection after, into rotary table mirror, be emitted by frustum cone side.It is described
Split type laser focusing device the optical field distribution range in focusing device is calculated according to light beam focusing requirement, calculate processing circle
The base angle size of stage body matches round estrade Refractive Index of Material, is processed into the round estrade as required, especially presses high-precision requirement
It is processed into output frustum cone side.The light shaft coaxle of first reflecting mirror and third reflecting mirror, the axis of equivalent fresnel reflecting mirror with
First reflecting mirror is vertical with the optical axis of third reflecting mirror, the first reflecting mirror, equivalent fresnel reflecting mirror, third reflecting mirror, rotary table
Mirror shown in Figure 13 according to accurately placing.
The optical path of embodiment two, focusing device and outgoing after each section in Bezier workspace on optical field distribution with
And light distribution is all consistent with embodiment one, compares embodiment one, distinguishes and be in embodiment two, has the arc-shaped of annular
The concave mirror of concave surface becomes equivalent fresnel reflecting mirror, and emergent cone mirror becomes rotary table mirror.The rotary table mirror can be seen
The conscope made in embodiment one is truncated at the section that light beam intersects with circular cone body cone most end (handing over section in end).In rotary table mirror
Upper bottom surface, that is, end hands over and places light blocking material blocks veiling glare at section, places light screening material in the non-active area of frustum cone side
Block veiling glare.Compared to embodiment one, high-precision output face processing cost is reduced, weight is alleviated, reduces veiling glare.And it compares
The concave mirror of the arc-shaped concave surface with annular of the first embodiment, the equivalent fresnel reflecting mirror of second of embodiment
Raw material is more saved, it is easy to process, reduce cost.
It is as shown in figure 14 the structural schematic diagram of the equivalent fresnel reflecting mirror of second of embodiment of the invention, shows
Imitate symmetry of the fresnel reflecting mirror about axle center.
It is as shown in figure 15 the left view of the equivalent fresnel reflecting mirror of second of embodiment of the invention, shows equivalent phenanthrene
Rotational symmetry of the Nie Er reflecting mirror about the left view center of circle, in conjunction with the structural schematic diagram of the equivalent fresnel reflecting mirror of Figure 14,
It can be with the structure of the cheer and bright equivalent fresnel reflecting mirror.
It is as shown in figure 16 the enlarged drawing of the third reflecting mirror of second of embodiment of the invention and rotary table mirror part, also
It is the enlarged drawing that the first reflecting mirror, equivalent fresnel reflecting mirror part are removed in Figure 13.
It is as shown in figure 18 the fixed schematic diagram of the encapsulation of second of embodiment of Split type laser focusing device of the invention,
Mark 9 shown in thick line be encapsulation fixed frame, by the first reflecting mirror of focusing device, equivalent fresnel reflecting mirror, third reflecting mirror,
Rotary table mirror is fixed up, and can be finely adjusted in outside, simplifies installation and debugging difficulty.The encapsulation fixed frame of second of embodiment
It is identical as the encapsulation fixed frame of the first embodiment.
Embodiment three
Second reflecting mirror is the fresnel reflecting mirror equivalent with the concave mirror of the arc-shaped concave surface with annular.
The other technical characteristics of the present embodiment are the same as example 1.The second reflecting mirror is second of embodiment of the invention in this example
Equivalent fresnel reflecting mirror, compared to the concave mirror of the arc-shaped concave surface with annular of the first embodiment, equivalent phenanthrene alunite
You more save raw material by reflecting mirror, easy to process, reduce cost.It is as shown in figure 14 the equivalent of second of embodiment of the invention
The structural schematic diagram of the axial cross section for crossing center of fresnel reflecting mirror, shows equivalent fresnel reflecting mirror about the symmetrical of axle center
Property.As shown in figure 15 it is the left view of Figure 14, shows rotational symmetry of the equivalent fresnel reflecting mirror about the left view center of circle,
It, can be with the structure of the cheer and bright equivalent fresnel reflecting mirror in conjunction with Figure 14.
Example IV
The output focus lamp uses rotary table mirror.The other technical characteristics of the present embodiment are the same as example 1.The circle
The conscope that platform mirror is considered as in embodiment one is cut at the section that light beam intersects with rotary table mirror conical surface most end (handing over section in end)
It is disconnected.It hands at rotary table mirror upper bottom surface, that is, end and places light blocking material blocks veiling glare at section, in the non-active area of frustum cone side
Place light blocking material blocks veiling glare.Compared to embodiment one, high-precision output face processing cost is reduced, weight is alleviated, reduced
Veiling glare.
Embodiment five
After 5th kind of embodiment of the invention, the structure of focusing device, processing method, optical path, focusing device and outgoing
The each section in Bezier workspace on optical field distribution and light distribution, encapsulation fixed form all with embodiment two or implement
Example four is consistent, also places light blocking material blocks veiling glare in the non-active area of frustum cone side.Difference is in embodiment five, gathers
Cylindrical hollow-out parts 421 are equipped in the middle part of rotary table mirror in coke installation, referring to Figure 17, hollow out cylinder is with rotary table mirror upper bottom surface 422
For bottom surface, with a height of high of rotary table mirror, in this case, rotary table mirror upper bottom surface is empty, it is not necessary to place light screening material.Compared to reality
Example one, embodiment three are applied, high-precision output face processing cost is reduced, alleviates weight, reduce veiling glare.Compared to embodiment
Two, example IV, weight further mitigate, more saving raw material, reduce cost.
In general, for the present invention by design Split type laser focusing device, incoming laser beam is anti-by the first reflecting mirror
It penetrates rear low-angle to be incident on the concave mirror or equivalent fresnel reflecting mirror of the arc-shaped concave surface with annular, by having
Annular arc-shaped concave surface concave mirror or equivalent fresnel reflecting mirror reflection, then by third reflecting mirror reflection after, enter
Conscope or rotary table mirror form the cricoid optical field distribution at 5 new acquaintance section of the conical surface, by exit end circular conical surface or rotary table
After the outgoing of side, a center spot size is formed in conscope or rotary table mirror optical axis direction setting range and light intensity is relatively steady
Fixed approximate bessel beam, whereby, the present invention are capable of increasing low capacity usage ratio, reduction processing and fabricating cost, reduce and install
Debugging difficulty is stablized and exports approximate bessel beam center spot size and light intensity on axis in the focusing range of position, in favor of into
Row Laser Micro-Machining, the especially Laser Micro-Machining to big aspect ratio material.
Certainly, the present invention can also have other various embodiments, without deviating from the spirit and substance of the present invention, ripe
It knows those skilled in the art and makes various corresponding changes and modifications, but these corresponding changes and change in accordance with the present invention
Shape all should belong to protection scope of the present invention.
Claims (10)
1. a kind of Split type laser focusing device, it is characterised in that: including the first reflecting mirror, the second reflecting mirror, third reflecting mirror
With output focus lamp, first reflecting mirror, third reflecting mirror reflecting surface be plane, the reflecting surface of the second reflecting mirror is annular
Arc-shaped concave surface or the Fresnel surface type equivalent with it, the output focus lamp be equipped with the conical surface, first reflecting mirror is used for
It receiving incoming laser beam and reflexes to the second reflecting mirror, second reflecting mirror is arranged in the light optical path out of the first reflecting mirror,
For receiving the emergent ray of the first reflecting mirror and reflexing to third reflecting mirror, the third reflecting mirror is arranged in the second reflecting mirror
Go out light optical path on, for receiving the emergent ray of the second reflecting mirror and reflexing to output focus lamp, the output focus lamp is set
Going out in light optical path in third reflecting mirror is set, for receiving the emergent ray of third reflecting mirror, is set in light beam and output focus lamp
A cricoid optical field distribution is formed at the new acquaintance section that some conical surfaces initially intersect, emergent ray is equipped with by output focus lamp
Conical surface outgoing forms a center spot size and stabilized intensity in laser focusing device outgoing axis direction setting range
Approximate bessel beam.
2. Split type laser focusing device according to claim 1, it is characterised in that: the first reflecting mirror, third reflecting mirror,
Output focus lamp is set gradually along laser light incident direction, the incident light axis of the first reflecting mirror, third reflecting mirror emergent light axis with
And the axial line of output focus lamp is located along the same line, and vertical with the axial line of the second reflecting mirror.
3. Split type laser focusing device according to claim 1, it is characterised in that: the emergent ray of the first reflecting mirror is small
Angle the second reflecting mirror of incidence.
4. Split type laser focusing device according to claim 1, it is characterised in that: the cyclic annular light field point at new acquaintance section
Cloth is the decline relationship that interior outer annular light intensity is Gaussian function, and intermediate light intensity is the light field point with radial radius inversely
Cloth, so that the energy on cross-section radial within the scope of intermediate light intensity respective radius, on the corresponding infinitely small integral annulus area of every bit
It measures equal, help to obtain the light field being axially evenly distributed；Radial phase does not surpass with center phase difference at the new acquaintance section
Cross 2 π.
5. Split type laser focusing device according to claim 1, it is characterised in that: first reflecting mirror, second are instead
Mirror, third reflecting mirror, output focus lamp is penetrated to be separately fixed on encapsulation fixed frame.
6. Split type laser focusing device according to claim 1, it is characterised in that: in the laser light incident of the first reflecting mirror
Adjustable multiplying power expand device is arranged in direction, for outgoing after being expanded the shoot laser of laser to the first reflecting mirror.
7. Split type laser focusing device according to claim 1, it is characterised in that: the output focus lamp is cone
Or truncated cone-shaped, the emergent ray of third reflecting mirror is incident by the circular cone bottom surface of output focus lamp or rotary table bottom surface, by its circular cone
Side or frustum cone side outgoing.
8. Split type laser focusing device according to claim 7, it is characterised in that: when output focus lamp is truncated cone-shaped
When, the output focus lamp is set as hollow structure, and hollow diameters are identical as the upper bottom surface diameter of rotary table；The upper bottom surface of rotary table is straight
The identical i.e. light beam of the diameter of section that diameter intersects with light beam and conical surface most end and the conical surface intersect in the upper bottom surface edge most end of rotary table.
9. Split type laser focusing device according to claim 7, it is characterised in that: when output focus lamp is solid rotary table
When shape, light blocking material blocks veiling glare is set in the upper bottom surface of output focus lamp.
10. Split type laser focusing device according to claim 1, it is characterised in that: the reflecting surface of the second reflecting mirror with
Its axial line is rotary shaft, is rotated by 360 ° by the arc section to concave, and the arc-shaped concave surface of annular is formed；It concaves
The end of arc section one end extends to the second mirror center, and the end face that the end of the other end extends to the second reflecting mirror is outermost
Edge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910076056.8A CN109676246A (en) | 2019-01-26 | 2019-01-26 | Split type laser focusing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910076056.8A CN109676246A (en) | 2019-01-26 | 2019-01-26 | Split type laser focusing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109676246A true CN109676246A (en) | 2019-04-26 |
Family
ID=66194807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910076056.8A Pending CN109676246A (en) | 2019-01-26 | 2019-01-26 | Split type laser focusing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109676246A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110303244A (en) * | 2019-07-25 | 2019-10-08 | 中国工程物理研究院激光聚变研究中心 | It is a kind of quickly to prepare surface period structural approach |
| CN110376748A (en) * | 2019-06-05 | 2019-10-25 | 佛山根固激光科技有限公司 | Superpower laser Donut mode apparatus for shaping and shaping mirror |
| CN115166984A (en) * | 2022-06-21 | 2022-10-11 | 武汉华日精密激光股份有限公司 | Method and device for generating Bessel beam |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070177116A1 (en) * | 2006-01-27 | 2007-08-02 | Seiko Epson Corporation | Method and apparatus for manufacturing microstructure and device manufactured thereby |
| KR20160010041A (en) * | 2014-07-18 | 2016-01-27 | 전상욱 | Method and apparatus for processing of brittle material with filamentation of laser diffraction beam |
| US20170259375A1 (en) * | 2014-11-19 | 2017-09-14 | Trumpf Laser- Und Systemtechnik Gmbh | Optical system for beam shaping |
| WO2017188639A1 (en) * | 2016-04-25 | 2017-11-02 | 주식회사 아톤이엔지 | Method and apparatus for processing brittle material by using laser pin beam, and optical system therefor |
| US20180259779A1 (en) * | 2017-03-09 | 2018-09-13 | Asato TAMURA | Optical processing apparatus, method for processing an object |
| CN209664572U (en) * | 2019-01-26 | 2019-11-22 | 江苏先河激光研究院有限公司 | Split type laser focusing device |
-
2019
- 2019-01-26 CN CN201910076056.8A patent/CN109676246A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070177116A1 (en) * | 2006-01-27 | 2007-08-02 | Seiko Epson Corporation | Method and apparatus for manufacturing microstructure and device manufactured thereby |
| KR20160010041A (en) * | 2014-07-18 | 2016-01-27 | 전상욱 | Method and apparatus for processing of brittle material with filamentation of laser diffraction beam |
| US20170259375A1 (en) * | 2014-11-19 | 2017-09-14 | Trumpf Laser- Und Systemtechnik Gmbh | Optical system for beam shaping |
| WO2017188639A1 (en) * | 2016-04-25 | 2017-11-02 | 주식회사 아톤이엔지 | Method and apparatus for processing brittle material by using laser pin beam, and optical system therefor |
| US20180259779A1 (en) * | 2017-03-09 | 2018-09-13 | Asato TAMURA | Optical processing apparatus, method for processing an object |
| CN209664572U (en) * | 2019-01-26 | 2019-11-22 | 江苏先河激光研究院有限公司 | Split type laser focusing device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110376748A (en) * | 2019-06-05 | 2019-10-25 | 佛山根固激光科技有限公司 | Superpower laser Donut mode apparatus for shaping and shaping mirror |
| CN110376748B (en) * | 2019-06-05 | 2021-06-29 | 佛山根固激光科技有限公司 | High-power laser Donut mode shaping device and shaping mirror |
| CN110303244A (en) * | 2019-07-25 | 2019-10-08 | 中国工程物理研究院激光聚变研究中心 | It is a kind of quickly to prepare surface period structural approach |
| CN115166984A (en) * | 2022-06-21 | 2022-10-11 | 武汉华日精密激光股份有限公司 | Method and device for generating Bessel beam |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109676246A (en) | Split type laser focusing device | |
| CN209590420U (en) | Laser shaping reflecting mirror and laser shaping device | |
| CN106526872B (en) | Transmission-type laser beam shaping system | |
| CN111505831B (en) | Focal spot focal depth variable Bessel beam laser processing system and method | |
| CN110076449A (en) | Realize the laser head assembly of big aspect ratio processing | |
| CN105891916B (en) | A kind of aspherical mirror based on axicon lens Yu focus lamp characteristic | |
| CN208224631U (en) | A kind of optical system generating low speckle annular beam | |
| CN109530913B (en) | Laser processing optimization method and system for Bessel beam | |
| CN105607162B (en) | One kind is focused on and obtains Diode laser Bessel-Gaussian beam novel optical lens | |
| CN107160032A (en) | A kind of spacing and spectral energy adjustable three spot laser welding optical system | |
| CN110446578A (en) | Method for carrying out the device of Materialbearbeitung mit Laserlicht along machine direction and for carrying out material processing with laser beam | |
| CN209664572U (en) | Split type laser focusing device | |
| CN115685537A (en) | Design method of optical system for generating uniform annular light | |
| CN106094226B (en) | One kind is based on two beam splitter prisms and wedge-shaped mirrors combinative optical system | |
| CN210010591U (en) | Laser head device for realizing large depth-diameter ratio processing | |
| CN212885690U (en) | Bifocal laser welding optical system and laser welding head thereof | |
| CN207020405U (en) | A kind of optical system for producing oval hollow focus on light beam | |
| CN209664571U (en) | Integral type laser condensing lens | |
| CN205720743U (en) | A kind of aspherical mirror based on axicon lens Yu focus lamp characteristic | |
| CN207013865U (en) | Three spot lasers welding optical system that a kind of spacing is adjustable with spectral energy | |
| CN206863354U (en) | A kind of reflective laser light-beam forming unit | |
| US5285223A (en) | Ophthalmic optical apparatus having an alignment optical system | |
| CN114578551B (en) | Optical system design method for generating annular focusing laser spot | |
| CN207326178U (en) | One kind is based on coaxial wire feed Laser Processing optical system in wedge-shaped scarnning mirror light | |
| CN214602523U (en) | Integral annular belt laser welding device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |