CN209664571U - Integral type laser condensing lens - Google Patents
Integral type laser condensing lens Download PDFInfo
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- CN209664571U CN209664571U CN201920134038.6U CN201920134038U CN209664571U CN 209664571 U CN209664571 U CN 209664571U CN 201920134038 U CN201920134038 U CN 201920134038U CN 209664571 U CN209664571 U CN 209664571U
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Abstract
The utility model relates to a kind of integral type laser condensing lens, including laser condensing lens mirror body, the laser emitting end of the laser condensing lens mirror body is equipped with the conical surface, the end face at the laser light incident end of the laser condensing lens mirror body is equipped with cricoid arch convex surface or the Fresnel surface type equivalent with it, incident Gaussian Profile laser beam is set to be transmitted one cricoid optical field distribution of formation at the section that light beam initially intersects with the circular cone at laser emitting end or the first rotary table, after the circular cone at laser emitting end or the outgoing of the first rotary table, approximate bessel beam is formed.Its capacity usage ratio is high, and on axis in the focusing range of position, the center spot size and light intensity of the approximate bessel beam of output are basically unchanged, in favor of carrying out Laser Micro-Machining, the especially Laser Micro-Machining to big aspect ratio material.
Description
Technical field
The utility model relates to field of laser processing more particularly to a kind of integral type laser condensing lens.
Background technique
The spot diameter minimum of bessel beam is up to wavelength magnitude and can be held essentially constant in very long distance, phase
There is longer depth of focus than Gaussian beam, therefore be very suitable to for doing Laser Micro-Machining, especially processing big aspect ratio material
There is incomparable advantage in material.
Ideal bessel beam, can not be real in reality due to occupying infinitely great space and possessing infinitely great energy
It is existing, but people can obtain approximate bessel beam by experimental method.So far, many has been proposed in researcher
Kind generates the experimental method of bessel beam, these methods can be roughly divided into two types: active and passive type.It is so-called active
Bessel beam (being called Resonant-cavity Method) is directly exactly generated by laser by the resonant cavity of specific structure, and passive type refers to
Other light beams are converted into bessel beam by certain method.The method that common passive type generates bessel beam is main
Have: circumferential weld-lens method calculates holography method, axial cone mirror method, spherical aberration method, spatial light modulator method, waveguide method etc..Compare
State several method, respectively there is advantage and disadvantage: circumferential weld-lens method structure is simple, is easily achieved, but to the capacity usage ratio of incident light
It is lower；It is also relatively simple to calculate holography method structure, but has higher quality requirement to hologram sheet；Spherical aberration lens method structure
More flexibly, but spherical aberration lens design and processing technology are complicated, and center spot size and light intensity with position can be sent out
Changing；Axial cone mirror method structure is simple, can generate the bessel beam of high quality, capacity usage ratio is significantly than circumferential weld-lens method
It improves, is the main way of current Laser Micro-Machining, then axial cone mirror method is higher to axial cone mirror requirement on machining accuracy, practical laser
Micro-machined depth corresponds to generally in several hundred a microns to several millimeters of magnitude and needs cyclic annular hot spot, energy at incidence conical surface of shaft
Although power utilization rate is more much higher than circumferential weld-lens method, still need to block a large amount of laser energy, center spot size
Although being able to maintain fixation, light intensity with position can change, and it is possible to which, there are violent vibration, Fig. 1 is prior art axis
The plane wave that axicon lens method provides is limited axial cone mirror method and is existed by the on-axis intensity distribution curve after axial cone mirror, these above-mentioned disadvantages
Directly applying and promoting in Laser Micro-Machining.
Summary of the invention
The purpose of the utility model is to overcome the defects of the prior art, provide a kind of integral type laser condensing lens,
Capacity usage ratio is high, and on axis in the focusing range of position, the center spot size and light intensity base of the approximate bessel beam of output
This is constant, in favor of carrying out Laser Micro-Machining, the especially Laser Micro-Machining to big aspect ratio material.
The utility model is realized in this way: the utility model provides a kind of integral type laser condensing lens, it is characterised in that:
Including laser condensing lens mirror body, the laser emitting end of the laser condensing lens mirror body is equipped with the conical surface, the laser condensing lens mirror body
Laser light incident end be equipped with cricoid arch convex surface or the Fresnel surface type equivalent with it, make incident laser beam through transmitting in light
A cricoid optical field distribution is formed at the new acquaintance section that beam initially intersects with the conical surface that laser emitting end is equipped with, and is gone out by laser
After penetrating the conical surface outgoing that end is equipped with, formed in laser condensing lens outgoing axis direction setting range center spot size and
The metastable approximate bessel beam of light intensity.
Cyclic annular optical field distribution at the new acquaintance section is the decline relationship that interior outer annular light intensity is Gaussian function, intermediate
Light intensity is the optical field distribution with radial radius inversely, so that on cross-section radial within the scope of intermediate light intensity respective radius, often
Energy a little on corresponding infinitely small integral annulus area is equal, help to obtain the light field being axially evenly distributed；It is described first
Phase and center phase difference radial at section is handed over to be no more than 2 π.
The laser emitting end of the laser condensing lens mirror body is equipped with conical section or the first rotary table section, laser condensing lens mirror body
The conical surface that laser emitting end is equipped with is conical section side or the first rotary table section side；The laser emitting end of laser condensing lens mirror body
The axial line of the axial line and laser condensing lens mirror body of conical section or the first rotary table section is located along the same line；The laser focuses
It is cylindrical section or the second rotary table section in the middle part of mirror mirror body.
The axial line of laser condensing lens mirror body is convex by the cricoid arch that laser condensing lens mirror body laser light incident end is equipped with
Face center；The end face at the laser light incident end of laser condensing lens mirror body be using laser condensing lens mirror body axial line as rotary shaft, to
The arc section of evagination is rotated by 360 °, and forms cricoid arch convex surface；The end of arc section one end of convex extends to sharp
The end of the end face center of light incident side, the arc section other end of convex extends to the end face outer most edge at laser light incident end；With
In forming the region of approximate bessel beam on the axial line of laser condensing lens mirror body in setting range.
Cricoid arch convex surface external profile diameter is equal with the largest circumference diameter of laser condensing lens mirror body；Laser condensing lens mirror
The largest circumference diameter of the conical section at the laser emitting end of body or the first rotary table section is greater than or equal to light beam and laser emitting end
The circle diameter that conical section side or the first rotary table section side are initially crossed to form；The laser emitting end of laser condensing lens mirror body
The smallest circumference diameter of first rotary table section is less than or equal to light beam and intersects shape with the first rotary table section side most end at laser emitting end
At circle diameter；The axis of incident Gaussian Profile laser beam axis and laser condensing lens mirror body is point-blank.
By light field without laser condensing lens mirror body on position be set as hollow out.
When the laser emitting end of laser condensing lens mirror body is the first rotary table section, the inside of laser condensing lens mirror body is equipped with edge
Axially extending hollow-out parts；The hollow-out parts are cone, and the vertex of conical hollow-out parts extends to laser light incident end.
In the non-active area of laser condensing lens mirror body, setting uses light blocking material blocks veiling glare.Mainly block output face
Non-active area.
When the laser emitting end of laser condensing lens mirror body is the first rotary table section, the laser emitting end of laser condensing lens mirror body
Light blocking material blocks veiling glare is set on the end face i.e. upper bottom surface of the first rotary table.
Integral type laser condensing lens are an integral molding structure.Laser condensing lens mirror body is made of optical material.
Further, the Fresnel lens structure that can obtain phase distribution similar with cricoid arch convex surface passes through diffraction
The method of optical element designs.
Further, incidence end, the mirror body middle part of the integral type laser condensing lens and exit end center coaxial line.
Further, according to light beam focusing requirement, the intracorporal optical field distribution range of mirror is calculated, is added by high-precision requirement
Work is detected into circular cone.
Further, according to light beam focusing requirement, the intracorporal optical field distribution range of mirror is calculated, it is only corresponding in working range
Circular cone position carries out processing detection into circular cone by high-precision requirement.
Further, according to light beam focusing requirement, the energy and spot size of incident Gaussian beam want matching.Such as
Increase Gaussian beam radius, its non diffracting distance can be increased.
Further, incident Gaussian beam wants vertical incidence integral type laser condensing lens, Gaussian beam axis, with integral type
The axis of laser condensing lens is point-blank.
Further, the integral type laser condensing lens process the base angle size of the conical surface according to light beam focusing requirement
Want matching.Such as reduce axial cone base angle, can increase its non diffracting distance.
Further, the integral type laser condensing lens, according to light beam focusing requirement, Refractive Index of Material will therewith
Match.The refractive index for such as reducing axial cone can increase its non diffracting distance.
Further, the inoperative range of the integral type laser condensing lens mirror body can be with hollow out or removal, to mitigate
Weight.
Further, the corresponding exit end of inoperative range of the integral type laser condensing lens mirror body and hollow out or
The position of removal can place extinction light screening material, to remove veiling glare.
Compared with prior art, the utility model has the following beneficial effects:
(1) incident light of the utility model is Gaussian Profile laser beam, and the cricoid arch from the laser light incident end is convex
Face (1) or equivalent with it Fresnel surface type are incident, transmit at middle part, light beam and laser emitting end circular cone or the first rotary table most
A cricoid optical field distribution is formed at the section just intersected, after exit end circular cone or the outgoing of the first rotary table, described
A center spot size and the metastable approximation of light intensity are formed in laser condensing lens mirror body central axial direction setting range
Bessel beam.The end face at the laser light incident end of the laser condensing lens mirror body of the utility model be equipped with cricoid arch convex surface or with
Its equivalent Fresnel surface type introduces specific phase distribution, with the focus lamp mirror body mediate cylindrical or round estrade portion
Point achieve the effect that beam shaping and transmission, by incident Gauss beam reshaping circlewise optical field distribution, and makes new acquaintance section
Cyclic annular optical field distribution is the decline relationship that interior outer annular light intensity is Gaussian function, and intermediate light intensity is the pass that is inversely proportional with radial radius
The optical field distribution of system, capacity usage ratio is high, and almost the energy of entire incident laser hot spot can utilize, and help to obtain axial direction
The light field being evenly distributed.
(2) laser condensing lens of the utility model enormously simplify installation and debugging difficulty using integrated design, drop significantly
Low installation and debugging errors.
(3) the cricoid arch convex surface at the laser light incident end of laser condensing lens mirror body or the Fresnel surface type equivalent with it,
It can be obtained using traditional aspherical mirror machining mode, not need to obtain by the photoetching process of integrated circuit, processing and fabricating cost
It substantially reduces.
(4) cricoid arch convex surface external profile diameter is equal with the largest circumference diameter of laser condensing lens mirror body；Laser focuses
The largest circumference diameter of the circular cone at the laser emitting end of mirror mirror body or the first rotary table be greater than or equal to laser emitting end circular cone or
The circle diameter that first rotary table is initially crossed to form；The smallest circumference of first rotary table at the laser emitting end of laser condensing lens mirror body
Diameter is less than or equal to the circle diameter that the first rotary table most end at laser emitting end is crossed to form；It is required, is counted according to beam design
The range of work circular cone is calculated, the processing circular cone range for needing to guarantee precision is reduced, reduces processing cost.
(5) required according to beam design, calculate laser beam optical field distribution range in mirror body, by light field without position
Hollow out, and light screening material is placed, have using weight is mitigated, improve heat dissipation effect, eliminate stray light, is conducive to light in the axial direction
The uniformity of field intensity.
In short, the utility model is capable of increasing, capacity usage ratio is low, reduces processing and fabricating cost, reduces installation and debugging hardly possible
Degree stablizes the approximate bessel beam center spot size of the interior output of position focusing range on axis and light intensity, in favor of carrying out laser
Micro Process, the especially Laser Micro-Machining to big aspect ratio material.
Detailed description of the invention
Fig. 1 is that the plane wave that prior art axial cone mirror method provides passes through the on-axis intensity distribution curve after axial cone mirror；
Fig. 2 is the structural schematic diagram (biography of figure top shadow part expression light of the integral type laser condensing lens of the utility model
Defeated path)；
Fig. 3 is the incident Gaussian beam schematic diagram of the first embodiment of the integral type laser condensing lens of the utility model；
Fig. 4 is the left view of the first embodiment of the integral type laser condensing lens of the utility model；
Fig. 5 is the first embodiment light beam of the integral type laser condensing lens of the utility model and section that the conical surface initially intersects
Face marks 4 position optical field distribution figures；
Fig. 6 is to mark on the circular cone body cone section of the first embodiment of the integral type laser condensing lens of the utility model
The corresponding light distribution of 4 position radial direction r of note；
Fig. 7 is to mark on the circular cone body cone section of the first embodiment of the integral type laser condensing lens of the utility model
The corresponding phase distribution of 4 position radial direction r of note；
The output that the Gaussian beam that Fig. 8 is Fig. 3 passes through the integral type laser condensing lens of the first embodiment of the utility model
Bessel beam on-axis intensity distribution curve；
Fig. 9 is corresponding section at the bessel beam on-axis intensity distribution curve center abscissa or stabilized intensity of Fig. 8
The curve of light distribution；
Figure 10 is structural schematic diagram (the figure top shadow of second of embodiment of the integral type laser condensing lens of the utility model
Part indicates the transmission path of light)；
Figure 11 is structural schematic diagram (the figure top shadow of the 6th kind of embodiment of the integral type laser condensing lens of the utility model
Part indicates the transmission path of light)；
Figure 12 is the left view of Figure 11.
Specific embodiment
The technical scheme in the utility model embodiment is clearly and completely described below, it is clear that described reality
Applying example is only the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention,
All other embodiment obtained by those of ordinary skill in the art without making creative efforts, belongs to this reality
With novel protected range.
Embodiment one
The present embodiment provides a kind of integral type laser condensing lens, including laser condensing lens mirror body, the laser condensing lens mirror
The laser emitting end of body is equipped with conical section 5-1, and the end face at the laser light incident end of the laser condensing lens mirror body is equipped with cricoid arch
Shape convex surface 1 intersects incident Gaussian Profile laser beam initially through transmitting the conical section side at light beam with laser emitting end
A cricoid optical field distribution is formed at section 4, after the outgoing of the conical section side at laser emitting end, forms approximate Bezier
Light beam.The axial line of the conical section 5-1 at the laser emitting end of laser condensing lens mirror body and the axle center in the middle part of laser condensing lens mirror body
Line 7 is located along the same line；It is cylindrical section 8-1 in the middle part of the laser condensing lens mirror body.
The axial line of laser condensing lens mirror body is convex by the cricoid arch that laser condensing lens mirror body laser light incident end is equipped with
Face center；The end face at the laser light incident end of laser condensing lens mirror body be using laser condensing lens mirror body axial line as rotary shaft, to
The arc section 1-1 of evagination is rotated by 360 °, and forms cricoid arch convex surface；The end of arc section one end of convex extends
To the end face center at laser light incident end, the end of the arc section other end of convex extends to the end face outer most edge at laser light incident end
The end face center at the laser light incident end of laser condensing lens mirror body is set to form taper concave surface, taper cone is located at laser condensing lens mirror body
Axial line on；The region of approximate bessel beam is used to form on the axial line of laser condensing lens mirror body in setting range.
The schematic diagram of the axial cross section for crossing center for the laser condensing lens that the first embodiment of the utility model provides is such as
Shown in Fig. 2, laser condensing lens are an integral molding structure, and mirror body is a cylindrical structure optical material, are at laser light incident end
One cricoid arch convex surface 1, laser emitting end are conical section 5-1.Figure top shadow part indicates the transmission path of light, and incidence swashs
Light enters from incidence end, transmits at middle part, finally exports in exit end.The integral type laser condensing lens, it is poly- according to light beam
Coke requires, and calculates the intracorporal optical field distribution range of mirror, calculates the base angle size of the processing conical surface, matches focus lamp Refractive Index of Material,
Processing detection is carried out as required into the laser condensing lens, especially carries out processing detection into output circular cone by high-precision requirement.
It is illustrated in figure 3 the incident Gaussian beam schematic diagram of the first embodiment of the utility model, Gaussian beam is vertical
The axis of incidence, Gaussian beam axis and laser condensing lens is point-blank.According to light beam focusing requirement, incident Gauss light
The energy and spot size of beam are matching.
It is illustrated in figure 4 the left view of the first embodiment of the integral type laser condensing lens of the utility model, shows institute
State the rotational symmetry at laser light incident end, the region that wherein shadow representation light passes through, it is seen that incident Gaussian beam almost all into
Enter to the focus lamp incidence end.It can intuitively understand that the structure design of incidence end, such a cricoid arch are convex in conjunction with Fig. 2
Face 1 introduces specific phase distribution, and the effect of beam shaping and transmission is reached with the intermediate cylindrical body portion of the focus lamp
Fruit, by incident Gauss beam reshaping circlewise optical field distribution.
It is illustrated in figure 5 the circular cone body cone section of the first embodiment of the integral type laser condensing lens of the utility model
Optical field distribution figure is the section optical field distribution figure for marking 4 positions, shows the incident over-focusing mirror incidence end of Gaussian Beam
With the beam shaping of mediate cylindrical and the effect of transmission, cyclic annular optical field distribution is formed in section 4, wherein shadow representation light passes through
Region, linear shadow represents both ends Gauss on radial Intensity of Gaussian decline region i.e. circular cone body cone section, and to decline light intensity corresponding
Laser transmission region 3, netted shade represents intermediate light intensity pair on radial light intensity linear decline region i.e. circular cone body cone section
The laser transmission region 2 answered.
It is illustrated in figure 6 the circular cone body cone section of the first embodiment of the integral type laser condensing lens of the utility model
The corresponding light distribution of 4 position radial direction r of upper i.e. mark.The ring in the integral type laser condensing lens circular cone body cone section
Shape optical field distribution is the decline relationship that both ends light intensity is Gaussian function.Intermediate light intensity is to be inversely proportional with radial direction (vertical axial) radius
The optical field distribution of relationship, so that on new acquaintance's cross-section radial within the scope of intermediate light intensity respective radius, the corresponding infinitely small product of every bit
Energy in cyclotomy anchor ring product is equal, help to obtain the light field being axially evenly distributed.
The light beam and cone for being illustrated in figure 7 the first embodiment of the integral type laser condensing lens of the utility model are bored
Radial direction r corresponding phase distribution in position on the new acquaintance section 4 in face, radial phase and center phase are poor at new acquaintance section 4
No more than 2 π.Center refers to the center of Fig. 6 radial direction r Symmetric Mesh shade.
Cyclic annular optical field distribution as described in Figure 5 light distribution as described in Figure 6 is formed at new acquaintance section 4 and such as Fig. 7 institute
The laser for the phase distribution stated is set after the outgoing of exit end circular cone in the laser condensing lens mirror body central axial direction
Range distance cone [9.75-10.25mm] forms a center spot size and the metastable approximate bessel beam of light intensity,
6 positions of mark are bessel beam region as shown in Figure 2.The outgoing conical surface is practical to play focusing effect.The shellfish
The on-axis intensity distribution curve of Sai Er light beam is as shown in figure 8, the both ends light intensity of on-axis intensity distribution curve is under Gaussian function
Drop relationship, intermediate light intensity is relatively stable to be basically unchanged.The both ends light intensity of Fig. 6 and Fig. 8 is the decline relationship of Gaussian function, drop point
It corresponds.
Fig. 9 is corresponding at the abscissa of bessel beam on-axis intensity distribution curve center or at stabilized intensity described in Fig. 8
Intensity distribution in cross-section distribution curve, symmetrical first zero crossing corresponds to the diameter of the bessel beam, the Bezier on figure
The on-axis intensity of light beam is basically unchanged in 0.5mm interval, and within this range, center spot size is also relatively stable,
Diameter is about 2um.
Embodiment two
The present embodiment provides a kind of integral type laser condensing lens, including laser condensing lens mirror body, the laser condensing lens mirror
The laser emitting end of body is equipped with the first rotary table section 5-2, and the end face at the laser light incident end of the laser condensing lens mirror body is equipped with ring-type
Arch convex surface 1, transmit incident Gaussian Profile laser beam initial in light beam and the first rotary table section 5-2 at laser emitting end
A cricoid optical field distribution is formed at the new acquaintance section 4 of intersection, after the first rotary table section 5-2 at laser emitting end outgoing,
Form approximate bessel beam.The axial line and laser of the first rotary table section 5-2 at the laser emitting end of laser condensing lens mirror body is poly-
Axial line 7 in the middle part of burnt mirror mirror body is located along the same line；Side is the second rotary table section 8- in the middle part of the laser condensing lens mirror body
2.The inside that laser condensing lens mirror body is set as the hollow i.e. described laser condensing lens mirror body is equipped with conical hollow-out parts, and cone is engraved
The vertex in empty portion 10 extends to laser light incident end.
The laser condensing lens that second of embodiment of the utility model provides cross the schematic diagram of the axial cross section at center as schemed
Shown in 10, laser condensing lens are an integral molding structure, and it is one at laser light incident end that mirror body, which is a round estrade feature optical material,
A cricoid arch convex surface 1, laser emitting end are frustum cone side, and the round estrade of exit end can actually be regarded as in embodiment one
Emergent cone body is truncated at the section that light beam intersects with circular cone most end.Identical with embodiment one, figure top shadow part indicates light
Transmission path, incident laser from incidence end enter, middle part transmit, finally exit end export, the integral type laser
Focus lamp calculates the intracorporal optical field distribution range of mirror according to light beam focusing requirement, calculates the base angle size of output round estrade,
With focus lamp Refractive Index of Material, processing detection is carried out as required at the laser condensing lens, only in the corresponding output of working range
Round table surface position carries out processing detection into output round table surface by high-precision requirement.
The optical path of embodiment two, focus lamp and outgoing after each section in Bezier workspace on optical field distribution and
Light distribution is all consistent with embodiment one, and the focus lamp plane of incidence, middle part is consistent with the working region of exit facet, and difference is reality
It applies in example two, mirror body central structure becomes round estrade from original cylindrical body, and mirror body output end becomes round estrade from cone, defeated
It appears to become round table surface from circular cone, only carries out processing detection by high-precision requirement in the corresponding output round table surface position of working range
At output round table surface, it is in conical structure hollow out in the middle part of focus lamp mirror body, compares embodiment one, reduce high-precision output face and add
Work cost, alleviates weight, reduces veiling glare.
Embodiment three
After the third embodiment of the utility model, the structure of focus lamp, processing method, optical path, focus lamp and outgoing
The each section in Bezier workspace on optical field distribution and light distribution it is all consistent with embodiment two, difference be to implement
Without engraved structure be in example three, in the middle part of focus lamp mirror body it is solid, on laser emitting end end face, that is, rotary table of laser condensing lens mirror body
Light screening material is set on bottom surface 9, laser emitting end end face, that is, rotary table upper bottom surface 9 is all covered.Compared to embodiment one, reduce
High-precision output face processing cost, alleviates weight, reduces veiling glare.Compared to embodiment two, weight is big, but difficulty of processing
It is smaller.
Example IV
The laser emitting end of the laser condensing lens mirror body is equipped with rotary table, and the round estrade of exit end, which can actually be seen, puts into effect
Emergent cone body in example one is applied, is truncated at the section that light beam intersects with circular cone most end.The other technical characteristics of the present embodiment with
Embodiment one is identical, and side is cylindrical surface in the middle part of the laser condensing lens mirror body unlike embodiment two.
Embodiment five
The laser emitting end of the laser condensing lens mirror body is equipped with circular cone, and the middle part of the laser condensing lens mirror body is rotary table
The other technical characteristics of shape, the present embodiment are the same as example 1, the laser condensing lens mirror body unlike embodiment two
Laser emitting end be equipped with circular cone.
Embodiment six
Figure 11 is the axial cross section for crossing center of the 6th kind of embodiment of the integral type laser condensing lens of the utility model
Schematic diagram (transmission path of figure top shadow part expression light)；Referring to Figure 11 and Figure 12, the laser of the laser condensing lens mirror body
The end face of incidence end is equipped with the Fresnel surface type 11 equivalent with cricoid arch convex surface 1.
The other technical characteristics and embodiment one or embodiment two or embodiment three or example IV of the present embodiment or implementation
Example five is identical, and compared with embodiment one, difference is that the end face at the laser light incident end of the laser condensing lens mirror body is and ring-type
The equivalent Fresnel surface type in arch convex surface 1.
In general, the utility model is a cricoid arch at laser light incident end by design integral type laser condensing lens
Shape convex surface 1, or to obtain the embossment structure of similar phase distribution, make incident Gaussian Profile laser beam by transmission, in mark 4
A cricoid optical field distribution is formed at section, it is poly- in the laser after exit end works circular cone or round table surface outgoing
A center spot size and the metastable approximate Bezier of light intensity are formed in burnt mirror mirror body central axial direction setting range
Light beam.The face type at the laser light incident end of the laser condensing lens mirror body of the utility model is distributed, and introduces specific phase distribution, with
The intermediate cylindrical body portion of the focus lamp achievees the effect that beam shaping and transmission, circlewise by incident Gauss beam reshaping
Optical field distribution, exit end circular cone play focussing force, form one in laser condensing lens mirror body central axial direction setting range
A center spot size and the metastable approximate bessel beam of light intensity.The utility model overcomes existing focusing technology energy
Utilization rate is low, processing and fabricating cost is high, installation and debugging difficulty is big, center spot size and light intensity with position can change even
The problems such as there may be violent vibrations, in view of the drawbacks of the prior art so that on axis in the focusing range of position, output it is close
It is basically unchanged like the center spot size and light intensity of bessel beam, while substantially reducing installation and debugging difficulty, in favor of carrying out
Laser Micro-Machining, the especially Laser Micro-Machining to big aspect ratio material.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.
Claims (10)
1. a kind of integral type laser condensing lens, it is characterised in that: including laser condensing lens mirror body, the laser condensing lens mirror body
Laser emitting end is equipped with the conical surface, the laser light incident end of the laser condensing lens mirror body be equipped with cricoid arch convex surface (1) or and its
Equivalent Fresnel surface type, make incident laser beam through transmitted light beam and the conical surface that laser emitting end is equipped with initially intersect at the beginning of
It hands over and forms a cricoid optical field distribution at section (4), after the conical surface outgoing that laser emitting end is equipped with, in laser condensing lens
It is emitted the approximate bessel beam that a center spot size and stabilized intensity are formed in axis direction setting range.
2. integral type laser condensing lens according to claim 1, it is characterised in that: the ring-type at the new acquaintance section (4)
Optical field distribution is the decline relationship that interior outside (3) annulus light intensity is Gaussian function, and intermediate light intensity (2) is to be inversely proportional with radial radius
The optical field distribution of relationship, so that on cross-section radial within the scope of intermediate light intensity respective radius, the corresponding infinitely small integral circle of every bit
Energy in anchor ring product is equal, help to obtain the light field being axially evenly distributed；At the new acquaintance section (4) radial phase with
Center phase difference is no more than 2 π.
3. integral type laser condensing lens according to claim 1, it is characterised in that: the laser of the laser condensing lens mirror body
Exit end is equipped with conical section (5-1) or the first rotary table section (5-2), and the conical surface that the laser emitting end of laser condensing lens mirror body is equipped with is
The conical section side (5-1) or first side rotary table section (5-2)；The conical section (5-1) at the laser emitting end of laser condensing lens mirror body
Or first rotary table section (5-2) axial line and the axial line (7) of laser condensing lens mirror body be located along the same line；The laser is poly-
It is cylindrical section (8-1) or the second rotary table section (8-2) in the middle part of burnt mirror mirror body.
4. integral type laser condensing lens according to claim 1 or 3, it is characterised in that: the axle center of laser condensing lens mirror body
Line (7) passes through cricoid arch convex surface (1) center that laser condensing lens mirror body laser light incident end is equipped with；Laser condensing lens mirror body
The end face at laser light incident end is with laser condensing lens mirror body axial line (7) for rotary shaft, is rotated by the arc section (1-1) of convex
360 degree form, and form cricoid arch convex surface (1)；The end of one end arc section (1-1) of convex extends to laser light incident end
End face center, the end of arc section (1-1) other end of convex extends to the end face outer most edge at laser light incident end；For shape
At the region of approximate bessel beam on the axial line (7) of laser condensing lens mirror body in setting range.
5. integral type laser condensing lens according to claim 3, it is characterised in that: cricoid arch convex surface (1) outer rim is straight
Diameter is equal with the largest circumference diameter of laser condensing lens mirror body；The conical section (5-1) at the laser emitting end of laser condensing lens mirror body
Or first the largest circumference diameter of rotary table section (5-2) be greater than or equal to conical section side or first circle at light beam and laser emitting end
The circle diameter that platform section side is initially crossed to form；The first rotary table section (5-2) at the laser emitting end of laser condensing lens mirror body
Smallest circumference diameter is less than or equal to the circle diameter that the first rotary table section side most end of light beam and laser emitting end is crossed to form；
The axis of incident Gaussian Profile laser beam axis and laser condensing lens mirror body is point-blank.
6. integral type laser condensing lens according to claim 1 or 3, it is characterised in that: by light field without laser gather
Position in burnt mirror mirror body is set as hollow out.
7. integral type laser condensing lens according to claim 3, it is characterised in that: when the laser of laser condensing lens mirror body goes out
When to penetrate end be the first rotary table section (5-2), the inside of laser condensing lens mirror body is equipped with the hollow-out parts axially extended；The hollow-out parts
It (10) is cone, the vertex of conical hollow-out parts extends to laser light incident end.
8. integral type laser condensing lens according to claim 1 or 3, it is characterised in that: in the non-of laser condensing lens mirror body
Working region setting uses light blocking material blocks veiling glare.
9. integral type laser condensing lens according to claim 3, it is characterised in that: when the laser of laser condensing lens mirror body goes out
When to penetrate end be the first rotary table section (5-2), on the upper bottom surface (9) of i.e. the first rotary table in laser emitting end end face of laser condensing lens mirror body
Light blocking material blocks veiling glare is set.
10. integral type laser condensing lens according to claim 1, it is characterised in that: integral type laser condensing lens are integrated
Molding structure.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109746569A (en) * | 2019-01-26 | 2019-05-14 | 江苏先河激光研究院有限公司 | Integral type laser condensing lens |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109746569A (en) * | 2019-01-26 | 2019-05-14 | 江苏先河激光研究院有限公司 | Integral type laser condensing lens |
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