CN110238521A - A kind of collimator lattice structure laser accurate welder and method - Google Patents

A kind of collimator lattice structure laser accurate welder and method Download PDF

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Publication number
CN110238521A
CN110238521A CN201910563701.9A CN201910563701A CN110238521A CN 110238521 A CN110238521 A CN 110238521A CN 201910563701 A CN201910563701 A CN 201910563701A CN 110238521 A CN110238521 A CN 110238521A
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welding
laser
collimator
scanning
dynamic focusing
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CN110238521B (en
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肖荣诗
黄婷
杨海青
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Suzhou Feeltek Laser Technology Co ltd
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SUZHOU FEILEI TAIKE LASER TECHNOLOGY Co Ltd
Beijing University of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20Bonding
    • B23K26/21Bonding by welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

The present invention discloses a kind of collimator lattice structure laser accurate welder and method, wherein welder includes: laser, beam shaping system, dynamic focusing scanning system, vision detection system, XY numerical control workbench, Z-direction kinematic axis, welding purification system, auxiliary welding equipment and relevant control system.The dynamic focusing scanning system is fixed on Z axis, and collimator grid is fixed on XY numerical control workbench, and control system can utilize the welding position of vision detection system detection grid, driving XY numerical control workbench calibration adjustment position.Control system can also drive control laser beam, realize scanning motion and dynamic focusing, lattice structure welded.Apparatus and method provided by the invention meet the demand of this high-performance of collimator lattice structure, lightweight device precision manufactureing, weld accurate positioning, thermal weld stress is few, deformation is small, high efficient and reliable, high degree of automation.

Description

A kind of collimator lattice structure laser accurate welder and method
Technical field
The present invention relates to a kind of collimator lattice structure laser accurate welder and methods, belong to laser welding processing neck Domain.
Background technique
High precision collimator is the critical component in the fields such as deep space exploration, pulsar navigation and medical instrument.Collimator by Collimator metal frame ontology and the metal foil grid cell being plugged on ontology form.Collimator overall structure is rice magnitude, And lattice dimensions, in millimeter magnitude, foil thickness is in micron dimension.Collimator lattice structure is typical across scale precision component, Number of welds is numerous, nearly ten thousand solder joints of single component.The metal foil of orthogonal interfix constitutes grid cell structure, and material is usual It is the metals such as tungsten, tantalum, foil thickness is tens microns, and the depth of parallelism of grid and verticality required precision are stringent, difficulty of processing pole Greatly.It is external that collimator lattice structure is mainly manufactured using mechanical means, phase is used using internal thicker grid frame and outer wall Same material is an entirety by casting or laser fast shaping, then processes micro-groove on the Turbogrid plates, be inserted perpendicularly into Tungsten plate or tantalum plate constitute collimator ontology.The country have unit propose tantalum piece intersect interfix use again laser welding manufacture high-precision The concept of collimator, and applied for related patents.
The design feature of high precision collimator determines great manufacture difficulty.Due to what is welded to refractory metal paillon It is required that it is high, it is difficult to prepare qualified collimator grid using conventional laser welding apparatus.Firstly, collimator overall structure For rice magnitude, and the single lattice dimensions of lattice structure, in millimeter magnitude, metal foil thickness is in micron dimension, the grid of orthogonal interfix The plate paillon depth of parallelism and verticality required precision are high, and large-sized collimator ontology is done step-by-step by the fine paillon of laser welding Manufacture, this is a kind of ultraprecise welding technique across scale;Secondly, the high-melting-point of the metals such as tantalum requires biggish welding energy, And the paillon of micron dimension thickness is extremely easy to deform in the case where welding heat effect, it is desirable that accurate control heat input is to control Thermal stress and thermal deformation guarantee dimensional accuracy;Again, the number of welds of single lattice structure just has hundreds and thousands of, to positioning The redundancy of precision and welding procedure, stability requirement are also very high, this accurate control for requiring laser energy to input.These are right Welding jig and welding technique are proposed challenge, have not yet to see be able to satisfy high precision collimator manufacture demand ultraprecise it is sharp Flush weld connection device needs the device and technology of exploitation precise laser welding.
Summary of the invention
In view of the foregoing, the purpose of the present invention is to provide a kind of laser soldering device of collimator lattice structure and sides Method realizes high-precision, the automatic welding of lattice structure, meets high-accuracy collimator using the laser soldering device and method The requirement of manufacture.
To achieve the above object, the invention adopts the following technical scheme:
One aspect of the present invention provides a kind of laser soldering device for collimator grid, comprising: laser, light beam are whole Shape system, vision detection system, XY numerical control workbench, Z-direction kinematic axis, welds purification system, is auxiliary at dynamic focusing scanning system Help welding equipment and control system, it is characterised in that:
The dynamic focusing scanning system is fixed on the Z-direction kinematic axis;The collimator grid is fixed on the XY On numerical control workbench;
The vision detection system is able to detect the welding position of the collimator grid, and the XY digital control platform being capable of school Quasi- adjustment position;The control system can drive control laser beam, scanning motion and dynamic focusing are realized, to lattice structure It is welded.
Preferably, the laser is pulse laser, and laser power is in 50-200W, minimum focal beam spot≤30 μm.
Preferably, the dynamic focusing scanning system includes that dynamic focusing microscope group, two axis reflection galvanometer and galvanometer control are single Member.
Preferably, scanning range >=50mm × 50mm of the dynamic focusing scanning system, linearity≤ 3.5mrad, dynamic focusing scanning system repeatable accuracy≤8 μm ad.
Preferably, the vision detection system includes two ccd image sensors and image-forming objective lens, and it is poly- to be located at dynamic The light-emitting window two sides of burnt scanning system.
Preferably, feature structural dimension parameter detection accuracy error≤2 μm of the vision detection system;Feature structural dimension parameter is fixed Position trueness error≤5 μm.
Preferably, X/Y axis positioning accuracy≤2 μm of the XY numerical control workbench, X/Y axis repetitive positioning accuracy≤2 μm.
Another aspect of the present invention provides a kind of use Laser Welding according to any one of above technical scheme tipping The method for setting welding collimator grid, includes the following steps:
Step 1, collimator grid is placed on special fixture, then be fixed on XY numerical control workbench;
Step 2, the threedimensional model of the collimator grid is imported into control system, determines the seat of the collimator grid Mark system origin, is planned by path of welding, determines scanning weld pattern;
Step 3, welding initial position is positioned using vision detection system, control system drives the XY numerical control work Make platform sports calibration, determines welding starting point;
Step 4, dynamic Laser focus scanning system is scanned welding according to planning parameters of scanning paths;
Step 5, after a grid cell of the welding completion collimator grid, the XY numerical control workbench is controlled A unwelded unit is moved into, step 3 and step 4 are repeated, is completed until all grid cells weld.
Preferably, the collimator grid selected from tungsten, molybdenum, tantalum, lead material made of metal foil intersect group At foil thickness is at 20~100 μm;The metal foil pairwise orthogonal infall is the welding position of laser beam.
Preferably, dynamic focusing scanning system is driven to realize laser in the step 4 according to the scanning weld pattern Beam scanning movement, is welded to open laser beam in each welding position, and black out sky is jumped between different welding positions.
The present invention has the advantages that
The present invention provides a kind of collection pulse laser beam dynamic fine focus, high-speed vibrating mirror scanning welding, high-precision vision The Light Electrical Collaborative Control welder of sensing detection and the linkage of accurate digital control platform, realizes the more welderings of large-size workpiece/component The quick scanning machining of point high-precision, it is more flexible efficiently to implement automatic welding.
For the welding requirements of collimator lattice structure manufacture, dynamic Laser focus scanning system realizes that dynamic is focused in real time With high-velocity scanning campaign, fine ideal spot diameter is obtained within the scope of workpiece surface large scale, is carried out by control system Error revising and compensating, can eliminate change in optical path length caused by scanning galvanometer rotates and caused by defocus error and when vibration mirror scanning Pillowy error and barrel-shaped error, to ensure that being precisely controlled for welding position;Based on dynamic focusing vibration mirror scanning system, realize Laser beam high speed based on graphics driver precisely scans, and opens laser beam at each welding point and is welded, between different welding beads Black out sky is jumped, and reduces thermal weld stress to greatest extent, while being directed to collimator lattice structure, can be carried out to scanning path of welding There are residual stress for optimization, dispersion and reduction component inside, prevent buckling deformation, realize the precision welding of device.It is transported in numerical control Under the accurate movement of moving platform and the detection control of CCD visual sensing, the weldering one by one to multiple grid individual units can be fast implemented It connects, is finally completed the manufacture of collimator.Laser welding technology based on dynamic focusing vibration mirror scanning, will be in aerospace, medical treatment The high-end fields such as instrument and micro-optoelectronic meet the needs of to high-performance, lightweight device precision manufactureing, and development potentiality is huge.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the collimator grid of the invention to be welded.
Fig. 2 is laser welding metal foil crossover location schematic diagram.
Fig. 3 is the composition schematic diagram of laser soldering device of the invention.
Fig. 4 is the perspective view of laser soldering device main part.
Fig. 5 is the schematic diagram of double ccd image sensor vision-based detections.
Fig. 6 is that dynamic Laser focuses each solder joint schematic diagram of scanning.
Specific embodiment
Below in conjunction with drawings and examples, the present invention is described in further detail.
Fig. 1 is the schematic diagram for the collimator lattice structure 1 that the present invention needs to weld, it is mainly by multiple lattice structure units 2 form, and are transverse metal paillon 21, longitudinal metal paillon 22 by numerous orthogonal interfix inside each lattice structure unit 2 It constitutes, horizontal and vertical metal foil crossover location is exactly welding position 23.The length and width dimensions of single lattice structure are in millimeter amount Grade, the material of metal foil are generally selected from the metals such as tungsten, tantalum, and thickness is in tens micron dimensions.The solder joint of each lattice structure has Nearly ten thousand, the depth of parallelism and verticality must assure that at 1 jiao point.In a preferred embodiment, the metal foil Material is tantalum, and the fusing point of tantalum is up to 2996 DEG C, and foil thickness is 40 μm.
As shown in Fig. 2, laser beam 3 is irradiated to welding position 23, and requires to weld during welding collimator grid Point combines reliably, and welding overall deformation is small.
Fig. 3 is laser soldering device overall construction drawing according to the present invention.Wherein welder includes: laser, light beam Shaping Transmission system, dynamic focusing scanning system, vision detection system, XY numerical control workbench, Z-direction kinematic axis, welding purification System and auxiliary welding jig and relevant control system including welding fixture special.
Fig. 4 illustrates the perspective view of the main part of welder.Wherein laser selects the QCW pulsed light of power 100W Fibre laser, the laser can be realized the fine focus of light beam.The laser beam that laser issues is transmitted by optical fiber 31, is passed through Beam shaping 32 is transferred to dynamic focusing scanning system.
Dynamic focusing scanning system is mainly controlled by dynamic focusing microscope group 41, two axis high-velocity scannings reflection galvanometer 42 and galvanometer Unit composition.For the welding range for meeting collimator lattice structure unit, in welding plane, laser beam dynamic focusing is swept Retouch range >=50mm × 50mm, linearity≤3.5mrad, dynamic Laser focus scanning system repeatable accuracy≤8 μm ad.Institute It states dynamic focusing scanning system to be fixed on Z-direction kinematic axis 6, can be lowered in vertical direction relative to welding position 23 It is whole.
Vision detection system is comprising two high resolution CCD imaging sensors and corresponding to each ccd image sensor Image-forming objective lens are located at the light-emitting window two sides of dynamic focusing scanning system.The feature structural dimension parameter of vision detection system detects Trueness error≤2 μm;Feature structural dimension parameter positioning accuracy error≤5 μm.
X/Y axis positioning accuracy≤2 μm of the XY numerical control workbench 7;X/Y axis repetitive positioning accuracy≤2 μm.Collimator Grid 1 is fixed on XY numerical control workbench 7, and above-mentioned all devices are both mounted on workbench (8).Control system utilizes vision Detection system detects the welding position of grid automatically, to drive the calibration adjustment position automatically of XY numerical control workbench 7, control system System can also drive control laser beam, realize scanning motion and dynamic focusing, lattice structure welded.
In addition, entire welding system requires equipment that can continually and steadily work in laser, system must comprehensively consider system Several factors such as thermal diffusivity, stability and safety, according still further to good appearance, structure it is reliable with simple principle be installed design The body structure of system.Compact overall structure is simple, firm dust-proof, easy for installation accurate, and industrial occasions is suitble to use.
Method using this welder laser aligner lattice structure includes the following steps:
Collimator grid 1 is placed in (not shown) on special fixture first, then is fixed on XY numerical control workbench 7 On;The threedimensional model of the collimator grid is imported into the welding computer system as control system, determines the coordinate of weldment It is origin, is calculated based on existing welding experience and numerical value, establishes the thermal stress coupling of collimator lattice structure scanning welding process Model is realized the optimization design in scanning process path, is welded by the welding deformation rule under research different scanning mode Path planning finally determines optimal scanning weld pattern in welding computer system.
As shown in figure 5, vision detection system includes two high resolution CCD imaging sensors 51 and image-forming objective lens 52, divide Not Wei Yu dynamic focusing scanning system light-emitting window two sides.Select the high resolution CCD imaging sensor of 10,000,000 pixels or more Vision-based detection is carried out to welding position, each ccd image sensor 51 has corresponding detection range 53.In a preferred implementation In mode, vision detection system is photogrammetric using double ccd image sensors, realizes real-time shadow correction, can acquire edge Clearly, sharpness is good, the uniform image of intensity profile, so that the calibration of pattern distortion correction and camera intrinsic parameter is carried out, benefit High-precision edge extracting, and automatic identification datum mark or feature contour are realized to welding position with the image processing algorithm of optimization Position.Thus welding computer system can drive the XY numerical control workbench sports calibration, determine welding starting point.It is complete After above-mentioned preparation, start to be scanned welding, after the laser that laser issues passes through shaping, by dynamic focusing optics Lens group, then successively welding position is injected into after two axis scanning galvanometers.It is controlled by control system, fine laser focuses It is focused in face of weld to balancing energy.The coordination polarization of scanning galvanometer is realized complete by scanning weld pattern drive laser beam At complicated scanning motion, in scanning range, error revising and compensating is carried out by control system, scanning galvanometer can be eliminated and turned To caused change in optical path length and caused by defocus error and pillowy error and barrel-shaped error when vibration mirror scanning, to ensure that weldering Connect the accurate of position.
As shown in figure 5, laser scanning range is 80mm × 100mm on the working face 20 of the present embodiment.
As shown in fig. 6, each welding position welding focal beam spot diameter can reach 30 μm.In each welding position 23, it opens laser beam and is welded, black out sky is jumped between different welding positions 23.The dynamic focusing scanning system is realized real-time Dynamic focusing and high-velocity scanning campaign carry out error revising and compensating by control system, to ensure that the essence of welding position 23 Quasi- control.
After completing the scanning welding of a collimator grid cell, XY numerical control workbench 7 removes the welding unit, And move into new unwelded unit.At this time, vision detection system carries out image detection analysis to new lattice structure unit again, Automatically welding positioning is carried out, and carries out new scanning welding, such cycle operation, the weldering until completing all grid cells again It connects.
In the welding process, it is contemplated that weld fumes, welding oxidation etc. can use welding purification system in time welding Flue dust in the process is drained, while using supplementary means such as inert gas shieldings.
Using welder according to the present invention, is tested by Welding experiment and dimensional accuracy, can disperse and reduce structure There are residual stress inside part, prevent buckling deformation, realize the precision welding of collimator lattice structure.To last collimation grid Lattice structure carries out analysis confirmation, and all weld pads are reliable, and maximum weld deformation is no more than 30 μm.
Those skilled artisans will appreciate that the dynamic focusing scanning system in the present invention can be using laser three-D processing neck Any prior art in domain.Dynamic focusing scanning system refers to can be according to location parameter dynamic adjustment X, Y, Z axis galvanometer position To realize system that laser is processed in body surface different location, distortion error correction process belongs to laser galvanometer scanning neck The common technology means in domain.
Those skilled artisans will appreciate that the vision detection system in the present invention uses at relevant hardware device and image Software algorithm is managed, the edge detection method of starting point is can determine, any applicable prior art can also be used.
It is real according to the technical requirements of the process requirements of collimator precision manufactureing and outer dimension, position, precision etc. Existing collimator lattice structure is reliably connected, while guaranteeing its high-precision size, and collimator lattice structure provided by the invention swashs Light precision welding device and technology combine dynamic focusing scanning technique, vision-based detection and automatic positioning technology, multi-shaft interlocked Precise flange technology.Real-time detection acquisition image is sensed by electric light and is handled in real time, and the geometry of collimation device structure is special Sign is judged and is positioned;Based on dynamic focusing vibration mirror scanning system, realize that the laser beam high speed based on graphics driver is precisely swept It retouches, opens laser beam at each welding point and welded, black out sky is jumped between different welding beads, and it is defeated to reduce sweating heat to greatest extent Enter;For the numerous micro-force sensings of collimator lattice structure, efficient full-automatic welding is realized.Device provided by the invention and side Method can satisfy in the high-end manufacturing field such as aerospace, medical instrument and micro-optoelectronic to high-performance, lightweight device essence The demand of close manufacture, development potentiality are huge.
The above is presently preferred embodiments of the present invention and its technical principle used, for those skilled in the art For, without departing from the spirit and scope of the present invention, any equivalent change based on the basis of technical solution of the present invention Change, simple replacement etc. is obvious changes, all fall within the protection scope of the present invention.

Claims (10)

1. a kind of laser soldering device for collimator grid, comprising: laser, beam shaping system, dynamic focusing scanning System, vision detection system, XY numerical control workbench, Z-direction kinematic axis, welding purification system, auxiliary welding equipment and control System, it is characterised in that:
The dynamic focusing scanning system is fixed on the Z-direction kinematic axis;The collimator grid is fixed on the XY numerical control On workbench;
The vision detection system is able to detect the welding position of the collimator grid, and the XY digital control platform can calibrate tune Whole position;The control system can drive control laser beam, realize scanning motion and dynamic focusing, lattice structure carried out Welding.
2. laser soldering device as described in claim 1, which is characterized in that the laser is pulse laser, laser function Rate is in 50-200W, minimum focal beam spot≤30 μm.
3. laser soldering device as described in claim 1, which is characterized in that the dynamic focusing scanning system includes that dynamic is poly- Burnt microscope group, two axis reflection galvanometer and galvanometer control unit.
4. laser soldering device as described in claim 1, which is characterized in that the scanning range of the dynamic focusing scanning system >=50mm × 50mm, linearity≤3.5mrad, dynamic focusing scanning system repeatable accuracy≤8 μm ad.
5. laser soldering device as described in claim 1, which is characterized in that the vision detection system includes two CCD figures As sensor and image-forming objective lens, it is located at the light-emitting window two sides of dynamic focusing scanning system.
6. laser soldering device as described in claim 1, which is characterized in that the feature structural dimension parameter of the vision detection system Detection accuracy error≤2 μm;Feature structural dimension parameter positioning accuracy error≤5 μm.
7. laser soldering device as described in claim 1, which is characterized in that the X/Y axis of the XY numerical control workbench positions Precision≤2 μm, X/Y axis repetitive positioning accuracy≤2 μm.
8. a kind of method using the welding collimator grid of laser soldering device described in any one of -7 according to claim 1, Include the following steps:
Step 1, collimator grid is placed on special fixture, then be fixed on XY numerical control workbench;
Step 2, the threedimensional model of the collimator grid is imported into control system, determines the coordinate system of the collimator grid Origin is planned by path of welding, determines scanning weld pattern;
Step 3, welding initial position is positioned using vision detection system, control system drives the XY numerical control work flat Platform sports calibration determines welding starting point;
Step 4, dynamic Laser focus scanning system is scanned welding according to planning parameters of scanning paths;
Step 5, it after a grid cell of the welding completion collimator grid, controls the XY numerical control workbench and moves into One unwelded unit repeats step 3 and step 4, completes until all grid cells weld.
9. method according to claim 8, which is characterized in that the collimator grid by selected from tungsten, molybdenum, tantalum, lead material Manufactured metal foil intersects composition, and foil thickness is at 20~100 μm;The metal foil pairwise orthogonal infall is sharp The welding position of light beam.
10. method according to claim 8, which is characterized in that driven in the step 4 according to the scanning weld pattern Dynamic focusing scanning system realizes laser beam flying campaign, is welded to open laser beam in each welding position, in difference Black out sky is jumped between welding position.
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CN111774775A (en) * 2020-06-30 2020-10-16 中国船舶重工集团公司第七一六研究所 Three-dimensional vision system for gantry type robot welding of large-scale structural part and control method
WO2022142476A1 (en) * 2020-12-31 2022-07-07 武汉华工激光工程有限责任公司 Galvanometer-based three-dimensional scanning, imaging, and machining device, and machining method
CN114346531A (en) * 2021-12-30 2022-04-15 北京无线电计量测试研究所 Welding device for collimator
CN114488554A (en) * 2022-01-28 2022-05-13 中国科学院高能物理研究所 Collimator suitable for Einstein probe satellite and manufacturing process thereof

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