CN101126627A - Light wave interference detection device and light wave interference detection method - Google Patents

Light wave interference detection device and light wave interference detection method Download PDF

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Publication number
CN101126627A
CN101126627A CNA2007101426393A CN200710142639A CN101126627A CN 101126627 A CN101126627 A CN 101126627A CN A2007101426393 A CNA2007101426393 A CN A2007101426393A CN 200710142639 A CN200710142639 A CN 200710142639A CN 101126627 A CN101126627 A CN 101126627A
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lens
light
detected
lens section
interference fringe
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CN101126627B (en
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植木伸明
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Fujinon Corp
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Fujinon Corp
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Abstract

The invention provides an light wave interference means and a measuring method of light wave interference, comprising: a mechanism whole center site based on a first interference fringe picture special detected lens (1) of reflected light of the detected lens (1), a mechanism for adjusting in parallel manner of each optical axis of the detected lens (1) and reference spherical reflector (7), a mechanism for adjusting the relative position of the detected lens (1) and reference spherical reflector (7), a mechanism for adjusting the relative position of the detected lens (1) and reference spherical reflector (7) based on a second interference fringe picture on the bisis of penetrating light of lens part (2). Therefore, for detected lens marked by light generated by the reflected light below detection from surface of the lens part, the deviate of the optical axis of the detected lens and the optical axis of reference sphere is automatically adjusted at high accuracy, therefore a stable detection result can be obtained.

Description

Light wave interference detection device and light wave interference detection method
Technical area
The present invention relates to a kind of light wave interference detection device and light wave interference detection method that Wavefront-measuring is used that see through of detected lens, especially relate to when mensuration is loaded into the corrugated aberration of optical pickup lens etc. of recording/reproducing apparatus of optical recording media, can adjust the light wave interference detection device and the light wave interference detection method of dislocation of the optical axis of the optical axis of these detected lens and benchmark sphere automatically.
Background technology
In the past, in the manufacturing engineering of optical pickup lens etc., the system that establishment can be produced lens in a large number became and was critical professionally, and thus, strong request is measured the interference of light of detected lens and carried out full-automation.
In order to comply with this requirement, need have the mechanism that can adjust the dislocation of the optical axis of the optical axis of the detected lens that produced under the state that is configured at detected lens and benchmark sphere.And in order to carry out the Wavefront-measuring that sees through of detected lens with high precision, the determined zone of determining detected lens with high precision is outbalance also.
As the technology in the determined zone of determining detected lens, that knows has following patent documentation 1 a described method.This method, interference fringe image according to detected lens, on image, specify the center in the determined zone of these detected lens, and according to the center in determined zone, be provided with and the flexible accordingly mask of making of the size of detected lens, use modulation (modulation) information of interference fringe when on image, specifying the determined zone of detected lens.
On the other hand, applicant, motion can be adjusted the light wave interference detection device of dislocation of the optical axis of the optical axis of detected lens and benchmark sphere automatically, and in Department of Intellectual Property's open (with reference to following patent documentation 2).
This light wave interference detection device constitutes as follows: promptly according to by from (the face that vertically protrudes with respect to the optical axis of this lens section from the outer edge of lens section such as the detected lens raised face that is arranged at optical pickup lens etc.Sometimes be called boundary surface or flange surface, the face of reference field etc. be set) mensuration with the reflected light of light beam with reference to the resulting interference fringe image of interference of light, automatically the inclination of the optical axis of the optical axis of the detected lens of adjustment and benchmark sphere departs from, and the positional information of knowing according to the cursor of regulation observed on the plane of delineation, adjust automatically being accompanied by the position deviation (meeting at right angles departing from of direction) that this inclination departs between described 2 optical axises that adjustment produces with respect to optical axis.
Described cursor is known, by can be regarded as and measure in the whole zone from the lens section surface of detected lens with light beam over against the reflected light in zone on plane formed, on the lens section surface is under the situation of 2 curved surfaces, as by near catoptrical 1 bright spot in the zone the summit on lens section surface as observed.
[patent documentation 1] Jap.P. 2003-35514 communique
[patent documentation 2] Jap.P. 2005-83609 instructions
So, described patent documentation 2 described light wave interference detection devices, to know the index of adjusting as optical axis by the cursor that reflected light produced from the surface of the lens section of detected lens, for example, owing to be provided with high performance antireflection film on the lens section surface, so for not observing the detected lens that described cursor is known clearly, be difficult to accurately optical axis be adjusted, and the uneven problem of generation arranged on measurement result.
The present invention proposes in view of this fact, its purpose is, provide a kind of following such light wave interference detection device and light wave interference detection method: promptly for not observing the detected lens of knowing by from the catoptrical cursor on lens section surface, also can adjust the departing from of optical axis of the optical axis of these detected lens and benchmark sphere accurately automatically, and can obtain stable measurement result.
Summary of the invention
In order to solve above-mentioned problem, light wave interference detection device of the present invention comprises:
Measure and use the light beam irradiation means, its to have lens section and from the outer edge of this lens section with respect to the optical axis of this lens section detected lens of outstanding raised face generally perpendicularly, irradiation mensuration light beam;
Detected body supporting mechanism, it to be supporting described detected lens with described mensuration with the mode that it is right that light beam is practised physiognomy, and so that this mensuration support with the mode of at least a portion of described lens section of light beam irradiates and described raised face;
Benchmark sphere reflecting mechanism, it has the benchmark sphere, and in this benchmark sphere, the described mensuration that sees through described lens section is reflected with light beam;
Interference mechanism, it makes the described mensuration that sees through behind the described lens section be seen through lens section that this lens section forms again by described benchmark spheric reflection through light with light beam, and/or the detected reflection from lens light that formed by described detected reflection from lens with light beam of described mensuration, with the interference of reference light;
Image mechanism, it is to being made a video recording by the interference fringe that described interference produced;
The inclination attitude changeable mechanism, it makes the relative tilt posture change of described detected lens and described benchmark sphere reflecting mechanism; And,
3 direction of principal axis position changeable mechanisms, it changes orthogonal, the 3 axial relative positions of described detected lens and described benchmark sphere reflecting mechanism, it is characterized in that,
Constitute by having following mechanism, that is:
Detected lens integral central position particular organization, it is based on by described detected reflection from lens light and described with reference to resulting the 1st interference fringe image of interference of light, to comprise the center of the described detected lens integral body of described raised face, in the plane of delineation, carry out specific;
The inclined light shaft adjusting mechanism, it is based on described the 1st interference fringe image, use described inclination attitude changeable mechanism, approach to become mutually the mode of parallel state, carry out the opposing inclined adjustment of these 2 optical axises with the optical axis and the optical axis of described benchmark sphere of described detected lens;
The 1st relative position adjusting mechanism, the amount of movement information of the described detected lens that it produces together according to the positional information on the described plane of delineation of the center of described detected lens integral body or with the relative tilt adjustment of described 2 optical axises, use described 3 direction of principal axis position changeable mechanisms, adjust the relative position of described detected lens and described benchmark sphere, so that see through the described mensuration of described lens section approaches generally perpendicularly to incide described benchmark sphere with light beam state;
The 2nd relative position adjusting mechanism, it is after the adjustment based on described inclined light shaft adjusting mechanism and described the 1st relative position adjusting mechanism, based on seeing through light and described with reference to resulting the 2nd interference fringe image of interference of light by described lens section, use described 3 direction of principal axis position changeable mechanisms, adjust the relative position of described detected lens and described benchmark sphere, become the state that can generally perpendicularly incide described benchmark sphere with light beam so that see through the described mensuration of described lens section.
In the present invention, preferred described detected lens integral central position particular organization, can be constituted as: in described the 1st interference fringe image, to carrying out specific with corresponding position, the boundary line of described lens section and described raised face, and, obtain the center of described detected lens integral body based on the positional information of this boundary line.
In addition, at this moment, this detected lens integral central position particular organization, be constituted as: in described the 1st interference fringe image will with the centre of gravity place in the corresponding zone of described detected lens Provisional Center position as described detected lens integral body, and based on this Provisional Center position and the exploration zone of specified, explore in the zone at this, ask for the position of described boundary line.
In addition, can also possess:
The raised face zone is extracted mask out and is produced mechanism, and it based on the center of described detected lens integral body, produces the raised face zone of only zone corresponding with described raised face being extracted out and extract mask out on the described plane of delineation; And mask travel mechanism is extracted in the raised face zone out, it moves according to the center of described detected lens integral body that takes place together with the opposing inclined adjustment of described 2 optical axises, on the described plane of delineation, and the regional extraction of described raised face mask is moved.
In addition, described inclined light shaft adjusting mechanism can be constituted as: based on the interference fringe information of extracting out by described raised face zone in the corresponding zone of described raised face that mask extracts out, carry out the opposing inclined adjustment of described 2 optical axises.
In addition, be preferably, possess: do not need interference fringe zone particular organization, it is on described the 1st interference fringe image, and not need the interference fringe zone to carry out specific to unwanted in measuring on the described plane of delineation; Lens section corresponding region internal interference stripe information obtains mechanism, and it is in described the 2nd interference fringe image, and covering does not describedly need the interference fringe zone, thus obtain with the corresponding lens section of described lens section corresponding region in interference fringe information; Lens section center particular organization, it is based on the interference fringe information in the described lens section corresponding region, and the center to described lens section on the described plane of delineation is carried out specific; Determined zone decision mask set mechanism, its according to zone that make in advance, determined decision with the center of mask with the consistent mode in center of specific described lens section, set this determined regional mask that determines to use.
At this moment, be preferably, described the 2nd relative position adjusting mechanism is constituted as: based on the interference fringe information in the described lens section corresponding region, carry out the relative position adjustment of described detected lens and described benchmark sphere.
At this moment, be preferably, between described detected lens and described benchmark sphere reflecting mechanism, possess: the light path switching mechanism that described mensuration is opened and closed with the light path of light beam.
In addition, be preferably, possess: variable in distance amount detection machine structure, it detects variable in distance amount that produce together with the relative tilt adjustment of described 2 optical axises, described detected lens and described benchmark sphere reflecting mechanism;
Variable in distance amount aligning gear, it uses described 3 direction of principal axis position adjusting mechanisms based on detected described variable in distance amount, and the distance of described detected lens and described benchmark sphere reflecting mechanism is proofreaied and correct.
In addition, light wave interference detection method involved in the present invention, according to making mensuration be radiated at the mode of at least a portion of described lens section and described raised face with light beam, the detected lens that outer edge at lens section had raised face support, thereby carry out the Wavefront-measuring that sees through of these detected lens, it is characterized in that
At least carry out once following operation successively:
Inclined light shaft is adjusted, wherein according to detected reflection from lens light that is formed by described detected reflection from lens with light beam by described mensuration and the 1st interference fringe image that obtains with reference to interference of light, carry out the relative tilt adjustment of these 2 optical axises, so that the optical axis of the optical axis of described detected lens and benchmark sphere approaches state parallel to each other;
The 1st relative position adjustment, wherein based on described the 1st interference fringe image, adjust the relative position of described detected lens and described benchmark sphere, so that the described mensuration that sees through described lens section is with the approaching state that can generally perpendicularly incide described benchmark sphere of light beam
After this, carry out the 2nd relative position adjustment, in described the 2nd relative position is adjusted, seen through lens section that this lens section forms again by described benchmark spheric reflection through light and described the 2nd interference fringe image that obtains with reference to interference of light based on the described mensuration that sees through described lens section with light beam, adjust the relative position of described detected lens and described benchmark sphere, so that the described mensuration that sees through described lens section is with the approaching state that can generally perpendicularly incide described benchmark sphere of light beam.
Light wave interference detection method of the present invention is characterised in that,
The detected lens lighting that disposes over the ground with benchmark sphere image planes measured use light beam, and carry out the mensuration that sees through the corrugated of described detected lens based on interference fringe image, described interference fringe picture similarly be by make produce by described irradiation from the back light of described detected lens side and the interference fringe image that interference obtains with reference to light, when the described mensuration of irradiation is used light beam on described detected lens under the 1st state, carry lens section that the corrugated information that sees through of the lens section holding this detected lens forms see through light and except this lens section through not needing light the light, take place as described back light
And, carry out following steps successively:
Do not need interference fringe zone particular step, wherein being set to produce does not describedly need light and does not produce the 2nd state that described lens section sees through light, based at the resulting interference fringe image of the 2nd state, not need the interference fringe zone to carry out specific to unwanted in measuring on the plane of delineation;
Lens section corresponding region internal interference stripe information obtains step, wherein see through in the interference fringe image that obtains under light and described described the 1st state that does not need light to produce together at described lens section, covers described do not need interference fringe regional and obtain with the corresponding lens section of described lens section corresponding region in interference fringe information;
Lens section center particular step, wherein based on the interference fringe information in the described lens section corresponding region, the center to described lens section on the described plane of delineation is carried out specific;
Determined zone decision is set step with mask, wherein with the determined zone decision that makes in advance with the center of mask with the consistent mode in center of specific described lens section, sets this determined regional mask that determines to use.
In addition, so-called " benchmark sphere " is meant: except the physical property spherical shape form, comprise so-called aspherical shape.
Light wave interference detection device of the present invention and light wave interference detection method, based on by detected reflection from lens light with reference to resulting the 1st interference fringe image of interference of light, carry out the relative position tilt adjustments of these 2 optical axises near the mode that becomes parallel state mutually with the optical axis of the optical axis of detected lens and benchmark sphere, and adjust the relative position of detected lens and benchmark sphere, the mensuration that make to see through lens section is with the approaching state that can generally perpendicularly incide the said reference sphere of light beam, after these are adjusted, based on seeing through light by lens section and with reference to resulting the 2nd interference fringe image of interference of light, adjust the relative position of detected lens and benchmark sphere, making becomes the state that can generally perpendicularly incide the benchmark sphere through the mensuration of lens section with light beam.
The index that departs from adjustment as the optical axis of the optical axis of detected lens and benchmark sphere, do not know owing to use by the cursor that reflected light produced from the lens section surface, therefore, for the detected lens that high performance antireflection film is set on the lens section surface, also can adjust departing from of 2 optical axises automatically.
And, the coarse regulation stage of departing from, based on detected reflection from lens light with reference to resulting the 1st interference fringe image of interference of light, and carry out the optical axis of detected lens and benchmark sphere optical axis depart from adjustment, and departing from the terminal stage of adjustment, by based on seeing through light by lens section and carrying out with reference to resulting the 2nd interference fringe image of interference of light, can the short time and adjust departing from of 2 optical axises accurately automatically, therefore the Wavefront-measuring that sees through of detected lens such as optical pickup lens can be carried out rapidly, and high precision and stable measurement result can be obtained.
Description of drawings
Fig. 1 represents the summary pie graph of the light wave interferometer that one embodiment of the present invention is related.
Fig. 2 represents the skeleton diagram ((A) is vertical view for front elevation, (B)) of the shape of detected lens.
Fig. 3 represents the skeleton diagram of shape of boundary surface (the コ バ face) brace table of lens mounting anchor clamps.
Fig. 4 represents the front elevation that the general survey of the detected lens position portion of light wave interferometer that present embodiment is related constitutes.
Fig. 5 (a) and (b) be that general survey for the detected lens position portion of the load/unload state of the detected lens of representing the light wave interferometer that present embodiment is related constitutes side view.
Fig. 6 represents the skeleton diagram of noise cutting off with the setting example of mask.
Fig. 7 represents the skeleton diagram of an example of the 1st interference fringe image.
Fig. 8 represents to explore the skeleton diagram of regional setting example.
Fig. 9 represents the skeleton diagram of an example of the designation method of position, boundary line.
Figure 10 represents the skeleton diagram corresponding to an example of the interference fringe image in raised face zone.
Figure 11 represents the skeleton diagram of an example of the 2nd interference fringe image.
Figure 12 represents the skeleton diagram of the setting example that the edge exploration of lens section is regional.
Figure 13 represents the skeleton diagram of an example of the designation method of lens section center.
Among the figure: the detected lens of 1-, the 2-lens section, the 3-flange part, 3A-flange part lower surface (raised face), the datum plate of 4-interferometer (datum plate), 5-lens mounting anchor clamps, the 6-correction plate, 7-benchmark spherical reflector, 8-shutter device, 8A-shadow shield, the 8B-drive division, the 5A-center window, 5B-raised face reflected light window, 5C-correction plate reflected light window, 5D-raised face supporting zone, the manual 2 inclination objective tables of 11-(the datum plate adjustment is used), the manual 2 inclination objective tables of 12-(the correction plate adjustment is used), the electronic 2 inclination objective tables of 13-, the electronic Y-axis objective table of 14-, the electronic X-axis objective table of 15-, the electronic Z axle of 16-objective table, 20-interferometer main part, the 21-light source, the 22-beam diameter amplifies uses lens, 23-beam splitter, 24-collimation lens, the 25-imaging len, the 26-image mechanism, 27-computing machine, 28-monitoring arrangement, the 29-input media, the detected body of 30-location division, 31-sample stage fore-and-aft direction (L direction of principal axis) travel mechanism, 32-rotary encoder, the 34-pulse motor, 36-Z axle manual coarse adjustment is just being used knob, 41-great circle, 42-roundlet, 43-raised face zone, zone, 44-boundary line, 45-Provisional Center position, the little square of 46-, the big square of 47-, 48,49,52, the 53-straight line, 50,51,54, zone, 56-(detected lens) integral central position are explored in the 55-boundary line, 57-lens section zone, zone, 62-lens section center, R are explored in 58～61-edge 1, R 2-radius.
Embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.Fig. 1 is the figure of the formation of the summary major part of representing the light wave interference detection device that one embodiment of the present invention is related.And, Fig. 2 is the skeleton diagram ((A) is planimetric map for front elevation, (B)) of the shape of the detected lens of expression, Fig. 3 is the skeleton diagram of shape of the raised face brace table of expression lens mounting anchor clamps, Fig. 4 is the front elevation that the general survey of the detected lens position portion of the related light wave interference detection device of expression present embodiment constitutes, and Fig. 5 is that the general survey for the lens position load/unload state of the detected lens of representing the light wave interferometer that present embodiment is related, detected portion constitutes side view.
As shown in Figure 1, the light wave interference detection device that present embodiment is related possesses interferometer main part 20 and subject location division 30 forms.
But above-mentioned interference instrument main part 20 is the phenanthrene that load the long light source 21 of interference distance of LASER Light Source etc. helps the type interferometer, possesses: the beam diameter amplification is with lens 22, beam splitter 23, collimation lens 24, imaging len 25 and image mechanism 26 with light detection faces.And this interferometer main part 20 possesses: computing machine 27, and it carries out carrying out at the image by image mechanism 26 shootings the drive controlling of Flame Image Process, various calculation process and various adjustment parts; Monitoring arrangement 28, it shows interference fringe image etc.; Input media 29, it is used for computing machine 27 is carried out various inputs.In addition, the datum plate of the interferometer that Fig. 1 represents (below, be called for short datum plate) 4 is generally comprised within the interferometer main part 20, yet, in this manual,, be included in the following detected body location division 30 and describe for the convenience on illustrating.
On the other hand, detected body location division 30 constitutes as follows: promptly towards the working direction (the last direction of Fig. 1) of using light beam from the mensuration of interferometer main part 20, support successively: datum plate 4, detected lens 1, correction plate 6, surface be the benchmark sphere benchmark spherical reflector 7, reach shutter device 8, and adjustable position.
That is, datum plate 4 is supported by manual 2 inclination objective tables 11, and the preparation adjusting stage to being the anglec of rotation (degree of tilt) at center with X-axis (axle that extends to the left and right directions of Fig. 1) and Y-axis (vertical and extend axle) with respect to the paper of Fig. 1.And detected lens 1 are supported by electronic 2 inclination objective tables 13 by means of the lens mounting anchor clamps 5 as detected body supporting mechanism, and to adjust with X-axis and Y-axis automatically when measuring each detected lens 1 be the anglec of rotation (degree of tilt) at center.More and, correction plate 6, benchmark spherical reflector 7 and shutter device 8 are supported by manual 2 inclination objective tables 12, electronic Y-axis objective table 14, electronic X-axis objective table 15 and electronic Z axle objective table 16 successively.
At this; correction plate 6 is with the transparent panel that is provided with corresponding to the protective seam of optical recording media (being generally glass plate); actually set for the state that possesses the recording/reproducing optical recording media and the purpose of optical condition; adjusting with X-axis and Y-axis in the preparation adjusting stage is the anglec of rotation (degree of tilt) at center; make by manual 2 inclination objective tables 11, become parallel with respect to the reference field of datum plate 4.On the other hand, benchmark spherical reflector 7 is by electronic Y-axis objective table 14, electronic X-axis objective table 15 and electronic Z axle objective table 16, can move abreast to all directions of Y-axis, X-axis, Z axle (to the axle of the extension of the above-below direction of Fig. 1) and adjust, thus, when measuring each detected lens 1, can carry out the position adjustment automatically.
In addition, in the present embodiment, by light source 21, beam diameter amplify with lens 22, beam splitter 23, collimation lens 24, and datum plate 4 constitute mensuration light beam irradiation means, constitute interference mechanism by datum plate 4, correction plate 6 and benchmark spherical reflector 7, constitute benchmark sphere reflecting mechanism by correction plate 6 and benchmark spherical reflector 7.And, constitute the inclination attitude changeable mechanism by electronic 2 inclination objective tables 13, constitute 3 direction of principal axis position changeable mechanisms by electronic Y-axis objective table 14, electronic X-axis objective table 15 and electronic Z axle objective table 16.
And, in the present embodiment, detected lens 1 be as the optical pickup lens mounting in the device that is used for the optical recording media of CD, DVD, AOD, Blu-ray Disc etc. is carried out recording/reproducing, as shown in Figure 2, by lens section 2 and flange part 3 and constitute.Lens section 2 is a biconvex lens, disposes the face of strong curvature in the light source side of optical recording medium/regenerating unit.And, be disposed at the flange lower surface 3A of this light source side of flange part 3, when constituting lens alignment as the raised face that reference field is set, to set with respect to the vertical accurately mode of the optical axis of detected lens 1.In addition, the another side (lug upper surface) of flange part 3 also can as raised face.
In addition, as detected lens 1, its shape and uses thereof is not limited to above-mentioned embodiment, and can also establish aspheric surface or diffraction optics face in addition.For example, when detected lens 1 had aspheric surface, the surface of benchmark spherical reflector 7 was and the corresponding aspherical shape of the surface configuration of these detected lens 1.
In addition, not shown in the drawings datum plate 4 is provided with and is used for implementing to make the strip-scanning adapter of datum plate 4 to the optical axis direction fine motion when strip-scanning is measured.
Then, the shape of the raised face brace table of lens mounting anchor clamps 5, from interferometer main part 20, as shown in Figure 3, part possesses in the central: continuous window portion, it is by constituting as the lower part: promptly be used to carry out center window 5A that the interference of light of the lens section 2 of detected lens 1 measures, position in 4 raised face reflected light in the outside of center window 5A with window 5B and position in the raised face reflected light with 4 correction plate reflected light in the outside of window 5B with window 5C and protrusion 4 raised face supporting zone 5D in the corresponding region of flange lower surface 3A.In addition, in the example of Fig. 3, the raised face reflected light all is provided with 4 with window 5B, correction plate reflected light with window 5C and raised face supporting zone 5D, yet the quantity of these each ones also can be number in addition.For example, the raised face reflected light can constitute by 3 with window 5C and raised face supporting zone 5D with window 5B, correction plate reflected light.
And, in Fig. 4, expression is used to carry out sample stage fore-and-aft direction (L direction of principal axis) travel mechanism 31 of the load/unload operation of detected lens 1, the rotary encoder 32 of measuring the anglec of rotation (degree of tilt) that X-axis and Y-axis with above-mentioned flange lower surface 3A be the center, pulse motor 34 and the Z axle manual coarse adjustment that electronic Z axle objective table 16 is moved and is just using knob 36.
And Fig. 5 (A) shows the state that detected lens 1 are set at the observation place, and Fig. 5 (B) shows the state of configuration/replacing operation of the unloading operation that carries out detected lens 1, detected lens 1.In the state shown in Fig. 5 (B), at the detected lens 1 of lens mounting anchor clamps 5 mountings, and by means of sample stage fore-and-aft direction (L direction of principal axis) travel mechanism 31, to the L direction of principal axis (in (row I difficult to understand) inwards direction of the paper of Fig. 1; Consistent with Y direction) move, until becoming the state shown in Fig. 5 (A), thereby, detected lens 1 are set in the observation place.
Below, carry out simple declaration in proper order for the mensuration of above-mentioned light wave interferometer.
At first, carry out the preparation adjustment measured for the interference of light of carrying out detected lens 1.In this preparation is adjusted, carry out: by means of manual 2 inclination objective tables 11 with the reference field of datum plate 4 with measure the reference field tilt adjustments of setting with spool the becoming vertical mode mutually of light beam; And become parallel mode mutually with the reference field of correction plate 6 and datum plate 4 and the correction plate tilt adjustments set by means of manual 2 inclination objective tables 12.In addition, whole by Z axle manual coarse adjustment as required with knob 36, carry out the coarse regulation of the Z-direction position of benchmark spherical reflector 7.In addition, during initial operative installations, carry out following 2 from normal moveout correction.
At first, about tilting, on lens mounting anchor clamps 5, place samples such as flat glass, interfere striped by manual adjustment, for the mobile variable quantity that determines electronic 2 inclination objective tables 13 and the relation of interference fringe generating capacity (from the resulting tilt quantity of interference fringe), after the inclination ormal weight variation by electronic 2 inclination objective table 13 samples, automatically carry out the operation that interference fringe is measured in several places, ask the relational expression of the mobile variable quantity of the tilt variation amount of sample and electronic 2 inclination objective tables 13, these are stored in the storage part of computing machine 27.For the feedback of electronic 2 inclination objective tables 13, calculate inclination from the 1 secondary flat adjustment of representing with AX+BY, and the feedback of carrying out the feedback of the inclination of X-direction, carrying out the inclination of Y direction from the coefficient B value from coefficient A value.
After this, in order to carry out electronic X-axis objective table 15, the correction of electronic Y-axis objective table 14 and electronic Z axle objective table 16, to place on the lens mounting anchor clamps 5 with the reference lens (omitting diagram) of detected lens 1 same design of in fact measuring, make generation through after the interference fringe of corrugated by manual adjustment, for X-axis, Y-axis, the objective table 15 of Z axle, 14, each of 16 moves the ormal weight objective table, about X-direction, Y direction, ask the relation of each the objective table amount of movement that sees through wave tilt amount and X-axis and Y-axis, about Z-direction, ask the relation of the amount of movement of optical power (power) value of lens and Z axle objective table 16, and these relational expressions are stored in the storage part of computing machine 27.For the benchmark sphere, with C (X 2+ Y 2)+DX+EY+F and 2 functions representing are adjusted feeds back the amount of movement of Y direction from the amount of movement of coefficient C value feedback Z-direction, from the amount of movement of coefficient D value feedback X-direction, from coefficient E value.
What then, become key of the present invention is used to carry out this adjustment (being described in detail later) that the interference of light of detected lens 1 is measured.Above-mentioned preparation is adjusted to be carried out the interference of light and a series of detected lens 1 is carried out once getting final product before measuring, but this all will carry out when being adjusted at the mensuration of at every turn carrying out each detected lens 1 in principle at every turn.
This this adjustment constitutes an embodiment of light wave interference detection method involved in the present invention, distinguish substantially, be made of following adjustment: the inclination that promptly is intended to make the optical axis of the optical axis of detected lens 1 and benchmark spherical reflector 7 to become mutually between the parallel optical axis departs from adjustment (inclined light shaft adjustment); The position adjustment (the 1st and the 2nd relative position adjustment) of the X-direction of benchmark spherical reflector 7, Y direction and Z-direction can be adjusted with the spherical wave (measure and use light beam) that sees through detected lens 1 in the mode of the sphere that generally perpendicularly incides benchmark spherical reflector 7.
Finish if this is adjusted, then carry out the interference of light of detected lens 1 and measure.The interference fringe image information that obtains in the image mechanism 26 of interferometer main part 20 by this interference of light mensuration is carried out calculation process or image analysis processing by computing machine 27, and is obtained the corrugated aberration amount of detected lens 1.And resulting interference fringe image or analysis result etc. are displayed on the monitoring arrangement 28 that is connected in computing machine 27.
Yet, in the present embodiment device, detected lens 1 are positioned in lens mounting anchor clamps 5 and are moved, be disposed under the state of observation place, the optical axis of detected lens 1 have to the optical axis of tested lens 1 with respect to benchmark spherical reflector 7 optical axis produced departs from the function of carrying out from normal moveout correction.
Even departing from of this optical axis generation small quantity, the mensuration beams focusing point that the result penetrates from detected lens 1 departs from respect to the center (centre of sphere) of benchmark spherical reflector 7, and is difficult to carry out the interference of light mensuration of detected lens 1.For parallel offset so, for example, even be that the minimum margin of error about tens μ m also can cause the state that do not occur interference fringe on the picture observing.
Therefore, in the present embodiment device, possess: detected lens integral central position Notified body, it specifies the center of the integral body of the detected lens 1 that comprise raised face (flange lower surface 3A) based on by from the reflected light of detected lens 1 with reference to resulting the 1st interference fringe image of interference of light on the plane of delineation; The inclined light shaft adjusting mechanism, its according to by from the reflected light of detected lens 1 from the reflected light of raised face with reference to resulting the 2nd interference fringe image of interference of light, use inclination attitude changeable mechanism (electronic 2 inclination objective tables 13) and carry out the relative tilt adjustment of these 2 optical axises, so that approach the optical axis of detected lens 1 and the optical axis of benchmark spherical reflector 7 becomes parallel state mutually; The 1st relative position adjusting mechanism, it uses 3 direction of principal axis position changeable mechanisms (electronic Y-axis objective table 14, electronic X-axis objective table 15 and electronic Z axle objective table 16) to carry out the position adjustment, so that approach can generally perpendicularly incide through the spherical wave behind detected lens 1 and the correction plate 6 state of the sphere of benchmark spherical reflector 7; The 2nd relative position adjusting mechanism, after its adjustment based on above-mentioned inclined light shaft adjusting mechanism and above-mentioned the 1st relative position adjusting mechanism, based on seeing through light by lens section and with reference to resulting the 2nd interference fringe image of interference of light, use 3 direction of principal axis position adjusting mechanisms and carry out the position adjustment, so that become following such state: the sphere that promptly can generally perpendicularly incide benchmark spherical reflector 7 through the spherical wave behind detected lens 1 and the correction plate 6.Constitute in the mode of carrying out above-mentioned adjustment automatically by these.
And, in the present embodiment device, in order successfully carry out this adjustment, possess: the raised face zone is extracted mask (mask) out and is produced mechanism, it is in above-mentioned the 1st interference fringe image, based on the integral central position of detected lens 1, produce the raised face zone extraction mask of only extracting out corresponding to the zone of raised face; Mask travel mechanism is extracted in the raised face zone out, and moving of the integral central position of the detected lens 1 on the plane of delineation that the relative tilt adjustment that its basis is accompanied by above-mentioned 2 optical axises is produced makes the raised face zone extract mask out and move; Do not need interference fringe zone Notified body, its in above-mentioned the 1st interference fringe image, in the plane of delineation, specify do not need to measure do not need the interference fringe zone; Lens section corresponding region internal interference stripe information obtains mechanism, and it is in above-mentioned the 2nd interference fringe image, and covering does not above-mentionedly need interference fringe zone and obtain and the corresponding lens section of lens section corresponding region internal interference stripe information; Lens section center particular organization, it is according to the interference fringe information in this lens section corresponding region, the center of its certain lenses portion on the plane of delineation; Determined zone decision mask set mechanism, it sets this determined zone decision mask with the determined zone decision of making in advance with the mode of the center unanimity of mask in the center of specific lens portion of institute; The light path switching mechanism, it carries out switch to measuring with the light path of light beam between detected lens 1 and benchmark sphere reflecting mechanism (correction plate 6 and benchmark spherical reflector 7).
Here, above-mentioned detected lens integral central position particular organization, the raised face zone is extracted mask out and is produced mechanism, mask travel mechanism is extracted in the raised face zone out, do not need interference fringe zone particular organization, lens section center particular organization and determined zone decision mask set mechanism, be the mechanism that constitutes by CPU in the computing machine 27 and the program in the reservoir etc., the inclined light shaft adjusting mechanism, the 1st relative position adjusting mechanism, and the 2nd relative position adjusting mechanism is by being controlled at each objective table 13,14,15, the control circuit (not shown) of 16 driving motors of setting up (being constituted) and make the program that this control circuit works (be stored in the storer in the computing machine 27 or in the storer that is provided with in addition) etc. and constitute by pulse motor.And the light path switching mechanism is made of shutter device 8.
Below, describe for mensuration detailed content in proper order by the present embodiment device.In addition, be considered as finishing above-mentioned preparation adjustment.
(1) at first, the state of the detected lens 1 of mounting not in lens mounting anchor clamps 5 shown in Figure 1, and under state by the light path between shutter device 8 locking correction plates 6, benchmark spherical reflector 7, the lens mounting anchor clamps 5,5 irradiations are measured and are measured with light beam to lens mounting anchor clamps, and on the plane of delineation, the light intensity that affirmation is caused by noise contribution (modulation: modulation) big zone, end and use mask and set the noise that these regional flexibility ground are covered.
Fig. 6 represents the setting example of this noise cutting off with mask.The part of representing with oblique line at Fig. 6 is a shaded areas.This is set in example, the Outboard Sections of the great circle 41 of radius R 1 and be shaded areas with the inside part of the roundlet 42 of the radius R 2 of concentric arrangement.The Outboard Sections of great circle 41 (especially, the part of 4 corner angle of image) mainly is based on the big zone of modulation from the light at random of lens mounting anchor clamps 5 grades, the inside part of roundlet 42, mainly be on lens mounting anchor clamps 5 during the detected lens 1 of mounting, become based on the bigger zone of catoptrical modulation from the summit near zone of the lens section 2 of detected lens 1.
In addition, shutter device 8, be to use light beam in order to measure in correction plate 6 and 7 incidents of benchmark spherical reflector, and be used to prevent that its reflected light from inciding image mechanism 26, as shown in Figure 1, possess: shadow shield 8A and the drive division 8B that this shadow shield 8A is rotated in the plane vertical with the optical axis of benchmark spherical reflector 7, and constitute as follows: promptly, carry out switch with the light path of light beam and measure by shadow shield 8A is come in and gone out.
(2) then, keep the state that carries out locking by 8 pairs of light paths of shutter device,, (set) detected lens 1 are set on the observation place by sample stage fore-and-aft direction travel mechanism 31 shown in Figure 5.Can carry out self-adjusting to departing from of the optical axis of the optical axis of these detected lens 1 that are provided with in the state to be produced and benchmark spherical reflector 7 be this following adjustment.In addition, under the state that detected lens 1 are set up, the center of this lens section 2 is positioned at the inside part of above-mentioned roundlet 42, and makes flange lower surface 3A between above-mentioned great circle 41 and above-mentioned roundlet 42.
(3) in this adjustment,, detected lens 1 are set in the observation place at first by shutter device 8 locking light paths.Thus, even measuring, irradiation uses light beam, do not produce to carry yet and holding the seeing through corrugated information of lens section 2 and the lens section of row sees through light, this lens section see through beyond the light do not need light (from the boundary line part of flange lower surface 3A or lens section 2 and flange lower surface 3A, and the reflected light of lens mounting anchor clamps 5 etc.) be set as the 2nd state that produces from the back light of detected lens 1 side.At the 2nd state, the detected lens 1 irradiation mensuration that is arranged on the observation place is obtained the 1st interference fringe image with light beam.Schematically show an example of the 1st interference fringe image at Fig. 7.It is additional in Fig. 7 that the part of oblique line is arranged is to observe the zone of interference fringe.Observe in this example: passed through 4 raised face reflected light shown in Figure 3 with window 5B, corresponding to catoptrical 4 raised face zones 43 from flange lower surface 3A, and by center window 5A shown in Figure 3 corresponding to catoptrical circular zone, boundary line 44 from the boundary line part of lens section 2 and flange 3A.
(4) then, in resulting the 1st interference fringe image, according to interference fringe modulation etc. and the center of specific zone (raised face zone 43 and zone, boundary line 44 (with reference to Fig. 7)), and this center set as the whole Provisional Center position 45 of detected lens 1 corresponding to detected lens 1.
(5) then, set the exploration zone, boundary line of regulation according to this Provisional Center position 45.The setting example of representing this exploration zone, boundary line at Fig. 8.In Fig. 8, as being little square 46 the exterior lateral area at center with above-mentioned Provisional Center position 45 and being the common ground of big square 47 the area inside at center equally with Provisional Center position 45, and in the middle of Provisional Center position 45 placed and be set in and leave the distance that this Provisional Center position 45 is equal to mutually, and to 2 straight lines 48 of X-direction prolongation parallel to each other, 2 zones (50 between 49,51), and in the middle of as above-mentioned common ground Provisional Center position 45 being placed and be set in and leave the distance that this Provisional Center position 45 is equal to mutually, and to 2 straight lines 52 of Y direction (above-below direction among the figure) prolongation parallel to each other, 2 zones (54 between 53,55) amount to 4 zones, become the boundary line and explore zone 50,51,54,55.
(6) after this, in the 1st interference fringe image of having set exploration zone, boundary line 50,51,54,55, by the lens section 2 of the specific and detected lens 1 of above-mentioned detected lens integral central position particular organization and the corresponding position, boundary line of flange lower surface 3A.An example of representing the ad hoc approach of position, boundary line at Fig. 9.In example shown in Figure 9, carry out the exploration (arrow line among the figure represents to explore starting position and probing direction) of boundary line by each pixel column of the imaging apparatus on composing images plane.For example, explore zone 50 in the boundary line, with this boundary line explore be divided in the zone 50 with the parallel a plurality of pixel columns of 2 straight lines 48,49 (on identical pixel column, the Y coordinate is certain), each pixel column is carried out exploration from limit, left side left to figure of little square 46, with the position of the light intensity sudden turn of events of interference fringe modulation etc., as the boundary line in left side among the figure of this pixel column and specific its X coordinate figure.Equally, explore in the zone 51, also set a plurality of pixel columns, carry out the exploration right-hand from the Bian Xiangtu on little square 46 right side, and carry out specific the X coordinate figure of the position, boundary line on right side among the figure of each pixel column by each pixel column in the boundary line.Explore zone 54,55 in the boundary line, same, be divided into the pixel column (on identical pixel column, X coordinate be certain) parallel, and carry out specific to the Y coordinate figure of the position, boundary line of each side up and down among the figure each pixel column with 2 straight lines 52,53.
(7) then, based on the coordinate figure of specific position, boundary line, by above-mentioned detected lens integral central position particular organization, ask and count the integral central position 56 (with reference to Fig. 9) of stating detected lens 1 in.Computing method as this integral central position 56, for example, explore zone 50 and 51 in the boundary line, to the mutual common pixel column of each Y coordinate figure, ask calculation separately the absolute value of difference of X coordinate figure of specific position, boundary line, and with its Y coordinate figure that becomes maximum coordinate row Y coordinate figure of center 56 as a whole.Equally, explore zone 54 and 55 in the boundary line, by the mutual common pixel column of each X coordinate figure, ask calculation separately the absolute value of Y coordinate value difference of specific position, boundary line, and with its X coordinate figure that becomes maximum coordinate row X coordinate figure of center 56 as a whole.
Perhaps, can also following carrying out.Promptly, explore in the zone 50 and 51 in the boundary line, ask the X coordinate figure of each position, boundary line by the mutual common pixel column of each Y coordinate figure, with this each mean value as the sample data of the X coordinate figure of the mid point of each pixel column and collect, and, with these the mean value X coordinate figure of center 56 as a whole of mid point coordinate figure.Equally, explore zone 54 and 55 in the boundary line, to the mutual common pixel column of each X coordinate figure, ask the Y coordinate figure of calculating each position, boundary line, with this each mean value as the sample data of the Y coordinate figure of the mid point of each pixel column and collect, and, with these the mean value Y coordinate figure of center 56 as a whole of mid point coordinate figure.In addition, get the mean time of each mid point coordinate figure,, get rid of and calculate from sample data in advance for to compare change bigger with other coordinate figures.
(8) then, above-mentioned raised face zone is extracted mask out and is produced mechanism, to based on the design load of flange part 3 and the raised face that generates in advance zone is extracted mask out and is configured, so that the center that mask is extracted in this raised face zone out is consistent with above-mentioned integral central position 56, thus, obtain: only carry holding by from the reflected light of the flange lower surface 3A of detected lens 1 and with reference to the resulting interference fringe information of interference of light, the corresponding interference fringe image in raised face zone.Show an example of the corresponding interference fringe image in raised face zone at Figure 10.
(9) thereby, based on the corresponding interference fringe image in resulting raised face zone, roughly the disappear degree of (do not have (null) striped) of interference fringe until raised face zone 43, use electronic 2 inclination objective tables 13 shown in Figure 1 by means of above-mentioned inclined light shaft adjusting mechanism, become the mode of parallel state mutually with the optical axis that approaches detected lens 1 and the optical axis of benchmark spherical reflector 7, the inclination attitude of detected lens 1 is adjusted.
(10) if the inclination attitude of detected lens 1 is adjusted, the integral central position 56 of then detected lens 1 from by above-mentioned (7) specific coordinate position move, therefore carry out the operation of above-mentioned (3)～(9) once more.And, till the inclination attitude of detected lens 1 reaches the state of regulation, carry out these operations repeatedly.In addition, extract mask travel mechanism out,, move and use the raised face zone of making in above-mentioned (8) to extract mask out for each adjustment of the inclination attitude of detected lens 1 by above-mentioned raised face zone.
(11) then, above-mentioned the 1st relative position adjusting mechanism, use above-mentioned electronic X-axis objective table 15 and above-mentioned electronic Y-axis objective table 14, make benchmark spherical reflector 7 move following displacement to X-direction and Y direction: promptly the coordinate figure of the integral central position 56 of the lens section center on the plane of delineation that was determined when measuring last time and the detected lens 1 of trying to achieve specifically is poor.Perhaps, make benchmark spherical reflector 7 move following amount to X-direction and Y direction: promptly with the X-direction of detected lens 1 and the identical amount of amount of movement of Y direction, the amount of movement before and after the tilt adjustments of the X-direction of described and detected lens 1 and the above-mentioned electronic 2 inclination objective tables 13 of the amount of movement of Y direction accompanies.And, simultaneously, use above-mentioned Z axle objective table 16 to make benchmark spherical reflector 7 move the identical amount of amount of movement with the Z-direction of detected lens 1 to Z-direction, the amount of movement before and after the tilt adjustments of the amount of movement of the Z-direction of described detected lens 1 and above-mentioned electronic 2 inclination objective tables 13 accompanies.
(12) operation by above-mentioned (3)～(11), relative tilt adjustment (inclined light shaft adjustment) based on the optical axis of the optical axis of the detected lens 1 of the 1st interference fringe image and benchmark spherical reflector 7, and the approximate location adjustment between detected lens 1 and the benchmark spherical reflector 7 (the 1st relative position adjustment), be through with.And, adjusted the 1st interference fringe image (interference fringe image of in the 2nd state, obtaining) in this position, the unwanted interference fringe zone (the above-mentioned light that do not need is the interference fringe zone of cause) that do not need when seeing through Wavefront-measuring, by above-mentioned do not need interference fringe zone particular organization on the plane of delineation by specific (not needing interference fringe zone particular step).After this, by shutter device 8 open light paths.
(13) open by this light path, set the 1st state, described the 1st state is to carry lens section that the corrugated information that sees through of the lens section 2 holding detected lens forms to see through light do not need light beyond this lens section sees through light, as the state that takes place from the back light of detected lens 1 side.At the 1st state, obtain seeing through light and with reference to the 2nd interference fringe image (interference fringe image that the 1st state is obtained) of interference of light by lens section.An example of representing the 2nd interference fringe image at Figure 11.In Figure 11, observe: by 4 raised face reflected light shown in Figure 3 with window 5B, corresponding to catoptrical 4 raised face zones 43 from flange lower surface 3A; By center window 5A shown in Figure 3, corresponding to zone, catoptrical annular boundary line 44 from the boundary line part of lens section 2 and flange lower surface 3A; Same by center window 5A shown in Figure 3, see through after the lens section 2 by 7 reflections of benchmark spherical reflector, and corresponding to seeing through the lens section zone 57 of the lens section of lens section 2 again through light.
(14) then, said lens portion corresponding region internal interference stripe information obtains mechanism, with above-mentioned by the specific interference fringe zone that do not need, on the 2nd interference fringe image, flexibly cover (covering), make to obtain corresponding to the interference fringe information in the lens section corresponding region of lens section 2 (lens section corresponding region internal interference stripe information obtains step).
(15) then, above-mentioned the 2nd relative position adjusting mechanism, relation according to each objective table amount of movement of the wave tilt amount that sees through of the storage part that is stored in computing machine 27 in advance and X-axis and Y-axis, and the relation of the amount of movement of the optical power value of detected lens 1 and Z axle objective table 16, use above-mentioned electronic X-axis objective table 15, above-mentioned electronic Y-axis objective table 14 and above-mentioned electronic Z axle objective table 16, make benchmark spherical reflector 7 to X-direction, Y direction and Z-direction move, and adjust, so that produce interference fringe in the whole zone in said lens portion corresponding region.
(16) then, based on the interference fringe information in the lens section corresponding region, set the edge at the edge that is used to explore lens section 2 by said lens portion center particular organization and explore the zone.The setting example in zone is explored at the edge that figure 12 illustrates lens section 2.In addition, at Figure 12, even figure is shown with 4 raised face zones 43 and circular zone, boundary line 44, yet in fact these regional information quilts end based on the shelter that said lens portion corresponding region internal interference stripe information is obtained mechanism.This is also identical at Figure 13.
In this embodiment, for the integral central position 56 of detected lens 1, in the drawings about and the edge that is set with symmetrically 4 square shapes of configuration up and down explore zone 58～61.In addition, the size and the desired location in zone 58～61 explored at 4 edges, for example, and in view of the diameter dimension of lens section 2, according to set from the pixel count of above-mentioned integral central position 56 (for example, from integral central position 56 up and down about respectively with 70～120 pixels away from scope).
(17) then, explore zone 58～61 separately at 4 edges, by the marginal position in center particular organization certain lenses portion of said lens portion zone 57.The ad hoc approach of this marginal position, same with the ad hoc approach of the boundary line of above-mentioned (6), explore for each pixel column of the imaging apparatus on composing images plane.For example, explore zone 58 at the edge, this edge explored be divided into a plurality of pixel columns of extending to X-direction (left and right directions among the figure) in the zone 58 (on identical pixel column, the Y coordinate is certain), and each pixel column explored, interference fringe is modulated the position of the isocandela degree sudden turn of events, as the marginal position of this pixel column and carry out specific to its coordinate.Equally, explore zone 59～61, also set a plurality of pixel columns and each pixel column is explored, and carry out specific the coordinate of the marginal position of each pixel column at other edges.
(18) then, based on the coordinate figure of specific marginal position, carry out specific by said lens portion center particular organization to the center (with reference to lens section center 62, Figure 13) of the lens section of detected lens 1.An example of representing the ad hoc approach of lens section center at Figure 13.In this embodiment, explore in the zone 58 and 59 at the edge, mutual each the common pixel column of Y coordinate figure is asked each marginal position of calculation X coordinate figure of (representing with No. zero among the figure), this each mean value is collected as the sample data of the X coordinate figure of the mid point of each pixel column (among the figure with * number expression), and with the mean value of these mid point coordinate figures X coordinate figure as lens section center 56.Equally, explore zone 59 and 60 at the edge, to mutual each the common pixel column of X coordinate, ask each marginal position Y coordinate figure of (representing with No. zero among the figure), this each mean value is collected as the sample data of the Y coordinate figure of the mid point of each pixel column (among the figure with △ number expression), and with the mean value of these mid point coordinate figures Y coordinate figure as lens section center 62.In addition, obtain the mean time of each mid point coordinate figure, change is big for comparing with other coordinate figures, gets rid of and calculates from sample data in advance.In addition, constitute lens section center particular step according to the order of above (16)～(18).
(19) then, above-mentioned determined zone decision mask set mechanism, the determined zone decision that makes in advance based on the design load of detected lens 1 etc. is set with mask, so that the center of this mask with specific said lens portion center 62 consistent (decision of determined zone is set step with mask), thus, specific determined zone.
(20) then, above-mentioned the 2nd relative position adjusting mechanism, use electronic X-axis objective table 15, electronic Y-axis objective table 14 and electronic Z axle objective table 16, carry out the final adjustment (the 2nd relative position adjustment) of the position of said reference spherical reflector 7 so that by above-mentioned determined zone decision with mask the interference fringe in the specific determined zone become estriate state.Thus, can become through detected lens 1 and correction plate 6 later spherical waves and generally perpendicularly incide the state of the sphere of benchmark spherical reflector 7, and finish this adjustment.
(21) after this adjustment finishes, based on the interference fringe information in the above-mentioned determined zone, and carry out detected lens 1 lens section 2 see through Wavefront-measuring, and the corrugated aberration of lens section 2 etc. is resolved.
If finish the mensuration of 1 detected lens 1, measure once more with other detected lens 1 exchanges.Above-mentioned adjustment, need carry out when changing detected lens 1 each, thereby, in present embodiment, the time of this adjustment when exchanging for the lens of attempting shortens, and possess: variable in distance amount detection machine structure, its to the relative tilt adjustment (adjustment of above-mentioned (9)) of the optical axis of the optical axis of detected lens 1 and benchmark spherical reflector 7 together and the detected lens 1 that produce and the variable in distance amount of benchmark spherical reflector 7 detect; Variable in distance amount aligning gear, it uses electronic Z axle objective table 16 shown in Figure 1 according to detected variable in distance amount, and the distance of detected lens 1 and benchmark spherical reflector 7 is proofreaied and correct.
At this, variable in distance amount detection machine structure, by instrumentation value according to rotary encoder shown in Figure 4 32, calculate detected lens 1 Z-direction amount of movement program (be stored in the storer in the computing machine 27 or in the storer that is provided with in addition) etc. and constitute, variable in distance amount aligning gear is by the control circuit (not shown) that the driving motor of setting up at electronic Z axle objective table 16 is controlled and make the program that this control circuit works (be stored in the storer in the computing machine 27 or in the storer that is provided with in addition) etc. and constitute.Below, for the order that this variable in distance amount is proofreaied and correct, carry out simple declaration.
At first, be detected by above-mentioned variable in distance amount detection machine structure, the adjustment of the inclination attitude of above-mentioned (9) when measuring with last time is accompanied and the detected lens 1 of generation and the variable in distance amount of benchmark spherical reflector 7, stores this detected value by variable in distance amount aligning gear.And, variable in distance amount aligning gear, the position of also storing the final electronic Z axle objective table 16 when measuring last time.
Secondly, above-mentioned variable in distance amount detection machine structure, the adjustment of the inclination attitude of above-mentioned (9) to current mensuration the time is together and the detected lens 1 that produce and the variable in distance amount of benchmark spherical reflector 7 are adjusted.
Then, variable in distance amount aligning gear compares the detected value of this detected value and last time, and poor according to it, the final position when measuring with respect to last time, the position of proofreading and correct electronic Z axle objective table 16.Thus, in above-mentioned adjustment, the time that the position of the Z-direction of can the attempt detected lens 1 that use electronic Z axle objective table 16 and carry out and benchmark spherical reflector 7 is adjusted shortens.
More than, be illustrated for an embodiment of light wave interference detection device involved in the present invention, but, be not limited to above-mentioned embodiment as light wave interference detection device involved in the present invention, can shift gears allly.
For example, in the above-described embodiment, to correction plate 6 and benchmark spherical reflector 7 incidents mensuration light beam, in order to prevent that this reflected light from inciding image mechanism 26, possesses shutter device 8 as the light path switching mechanism, prevent that as being used to the reflected light from correction plate 6 and benchmark sphere 7 from inciding the mechanism of image mechanism 26, also can possess and make correction plate 6 and benchmark spherical reflector 7 move to the mechanism that light path is outer or make it to tilt.According to the shape of detected lens 1, the situation that has the interval of detected lens 1 and correction plate 6 extremely to narrow down is at this moment comparatively effective.
And, even in the situation of using shutter device 8, when shadow shield 8A is come in and gone out, in order to avoid the interference between these parts, also can constitute: use electronic Z axle objective table 16, the interval between detected lens 1 and the correction plate 6 was once enlarged.
And, in the above-described embodiment, when exploring the marginal position of lens section 2, be constituted as and preestablish the edge and explore the zone, still, also can be and behind the certain lenses portion zone 57 based on the 2nd interference fringe image, the marginal position in specific this lens section zone 57.
And in the above-described embodiment, interferometer main part 20 becomes phenanthrene and helps type, still, uses the dissimilar also passable of Michelson-type etc.
And in the above-described embodiment, prerequisite is to carry out in the lump: be intended to make the optical axis of the optical axis of detected lens 1 and benchmark spherical reflector 7 to become the adjustment that departs between parallel, the optical axis mutually; And the relative position of detected lens 1 and benchmark spherical reflector 7 departs from adjustment, yet as required, become subject matter and tilt to depart from when not becoming problem at the position deviations of 2 dimensions of the backslash that for example causes by lens mounting anchor clamps etc., also can omit the adjustment that departs between the optical axis.
And the order of above-mentioned embodiment (3), (12)～(19) are embodiments that constitutes the related light wave interference detection method of center of the present invention decision.The related light wave interference detection method of this center decision is not limited to above-mentioned embodiment, for example, also can be suitable for for the lens that do not have raised face.And decision related light wave interference detection method in this center departs from and adjusts or relative position departs from adjustment for not carrying out inclination between the above-mentioned optical axis, perhaps only carries out a side person and also is suitable for.

Claims (11)

1. light wave interference detection device comprises:
Measure and use the light beam irradiation means, its to have lens section and from the outer edge of this lens section with respect to the optical axis of this lens section detected lens of outstanding raised face generally perpendicularly, irradiation mensuration light beam;
Detected body supporting mechanism, its with described mensuration with the mode that it is right that light beam is practised physiognomy, and so that should measure mode, support described detected lens with at least a portion of described lens section of light beam irradiates and described raised face;
Benchmark sphere reflecting mechanism, it has the benchmark sphere, and in this benchmark sphere, the described mensuration that sees through described lens section is reflected with light beam;
Interference mechanism, it makes the described mensuration that sees through behind the described lens section be seen through lens section that this lens section forms again by described benchmark spheric reflection through light with light beam, and/or the detected reflection from lens light that formed by described detected reflection from lens with light beam of described mensuration, with the interference of reference light;
Image mechanism, it is to being made a video recording by the interference fringe that described interference produced;
The inclination attitude changeable mechanism, it makes the relative tilt posture change of described detected lens and described benchmark sphere reflecting mechanism; And,
3 direction of principal axis position changeable mechanisms, it changes orthogonal, the 3 axial relative positions of described detected lens and described benchmark sphere reflecting mechanism, it is characterized in that,
Also have:
Detected lens integral central position particular organization, it is based on by described detected reflection from lens light and described with reference to resulting the 1st interference fringe image of interference of light, to comprise the center of the described detected lens integral body of described raised face, in the plane of delineation, carry out specific;
The inclined light shaft adjusting mechanism, it is based on described the 1st interference fringe image, use described inclination attitude changeable mechanism, approach to become mutually the mode of parallel state, carry out the opposing inclined adjustment of these 2 optical axises with the optical axis and the optical axis of described benchmark sphere of described detected lens;
The 1st relative position adjusting mechanism, the amount of movement information of the described detected lens that it produces together according to the positional information on the described plane of delineation of the center of described detected lens integral body or with the relative tilt adjustment of described 2 optical axises, use described 3 direction of principal axis position changeable mechanisms, adjust the relative position of described detected lens and described benchmark sphere, so that see through the described mensuration of described lens section approaches generally perpendicularly to incide described benchmark sphere with light beam state;
The 2nd relative position adjusting mechanism, it is after the adjustment based on described inclined light shaft adjusting mechanism and described the 1st relative position adjusting mechanism, based on seeing through light and described with reference to resulting the 2nd interference fringe image of interference of light by described lens section, use described 3 direction of principal axis position changeable mechanisms, adjust the relative position of described detected lens and described benchmark sphere, become the state that can generally perpendicularly incide described benchmark sphere with light beam so that see through the described mensuration of described lens section.
2. light wave interference detection device according to claim 1 is characterized in that,
Described detected lens integral central position particular organization, be constituted as: in described the 1st interference fringe image, to carrying out specific with corresponding position, the boundary line of described lens section and described raised face, and, obtain the center of described detected lens integral body based on the positional information of this boundary line.
3. light wave interference detection device according to claim 2 is characterized in that,
Described detected lens integral central position particular organization, be constituted as: in described the 1st interference fringe image will with the centre of gravity place in the corresponding zone of described detected lens Provisional Center position as described detected lens integral body, and based on this Provisional Center position and the exploration zone of specified, explore in the zone at this, ask for the position of described boundary line.
4. according to each described light wave interference detection device in the claim 1～3, it is characterized in that,
Possess:
The raised face zone is extracted mask out and is produced mechanism, and it based on the center of described detected lens integral body, produces the raised face zone of only zone corresponding with described raised face being extracted out and extract mask out on described the 1st interference fringe image; And
Mask travel mechanism is extracted in raised face zone out, and moving of the center of the described detected lens integral body on that it takes place together according to the opposing inclined adjustment with described 2 optical axises, the described plane of delineation moved the regional extraction of described raised face mask.
5. light wave interference detection device according to claim 4 is characterized in that,
Described inclined light shaft adjusting mechanism is constituted as: based on the interference fringe information of extracting out by described raised face zone in the corresponding zone of described raised face that mask extracts out, carry out the opposing inclined adjustment of described 2 optical axises.
6. according to each described light wave interference detection device in the claim 1～5, it is characterized in that,
Possess:
Do not need interference fringe zone particular organization, it is on described the 1st interference fringe image, and not need the interference fringe zone to carry out specific to unwanted in measuring on the described plane of delineation;
Lens section corresponding region internal interference stripe information obtains mechanism, and it is in described the 2nd interference fringe image, and covering does not describedly need the interference fringe zone, thus obtain with the corresponding lens section of described lens section corresponding region in interference fringe information;
Lens section center particular organization, it is based on the interference fringe information in the described lens section corresponding region, and the center to described lens section on the described plane of delineation is carried out specific;
Determined zone decision mask set mechanism, its according to zone that make in advance, determined decision with the center of mask with the consistent mode in center of specific described lens section, set this determined regional mask that determines to use.
7. light wave interference detection device according to claim 6 is characterized in that,
Described the 2nd relative position adjusting mechanism is constituted as: based on the interference fringe information in the described lens section corresponding region, carry out the relative position adjustment of described detected lens and described benchmark sphere.
8. according to each described light wave interference detection device in the claim 1～7, it is characterized in that,
Between described detected lens and described benchmark sphere reflecting mechanism, possess: the light path switching mechanism that described mensuration is opened and closed with the light path of light beam.
9. according to each described light wave interference detection device in the claim 1～8, it is characterized in that,
Possess:
Variable in distance amount detection machine structure, it detects variable in distance amount that produce together with the relative tilt adjustment of described 2 optical axises, described detected lens and described benchmark sphere reflecting mechanism;
Variable in distance amount aligning gear, it uses described 3 direction of principal axis position adjusting mechanisms based on detected described variable in distance amount, and the distance of described detected lens and described benchmark sphere reflecting mechanism is proofreaied and correct.
10. light wave interference detection method, the detected lens that outer edge at lens section had raised face support so that mensuration be radiated at least a portion of described lens section and described raised face with light beam, thereby carry out the Wavefront-measuring that sees through of these detected lens, it is characterized in that
At least carry out once following operation successively:
Inclined light shaft is adjusted, wherein according to detected reflection from lens light that is formed by described detected reflection from lens with light beam by described mensuration and the 1st interference fringe image that obtains with reference to interference of light, carry out the relative tilt adjustment of these 2 optical axises, so that the optical axis of the optical axis of described detected lens and benchmark sphere approaches to become state parallel to each other;
The 1st relative position adjustment, wherein based on described the 1st interference fringe image, adjust the relative position of described detected lens and described benchmark sphere, so that see through the described mensuration of described lens section approaches generally perpendicularly to incide described benchmark sphere with light beam state
After this, carry out the 2nd relative position adjustment, in described the 2nd relative position is adjusted, seen through lens section that this lens section forms again by described benchmark spheric reflection through light and described the 2nd interference fringe image that obtains with reference to interference of light based on the described mensuration that sees through described lens section with light beam, adjust the relative position of described detected lens and described benchmark sphere, so that see through the described mensuration of described lens section approaches generally perpendicularly to incide described benchmark sphere with light beam state.
11. a light wave interference detection method is characterized in that,
To measuring and use light beam with practise physiognomy the over the ground detected lens lighting of configuration of benchmark sphere, and carry out the mensuration that sees through the corrugated of described detected lens based on interference fringe image, described interference fringe picture similarly be by make produce by described irradiation from the back light of described detected lens side and the interference fringe image that interference obtains with reference to light, when the described mensuration of irradiation is used light beam on described detected lens under the 1st state, carry lens section that the corrugated information that sees through of the lens section holding this detected lens forms see through light and except this lens section through not needing light the light, take place as described back light
And, carry out following steps successively:
Do not need interference fringe zone particular step, wherein being set to produce does not describedly need light and does not produce the 2nd state that described lens section sees through light, based at the resulting interference fringe image of the 2nd state, not need the interference fringe zone to carry out specific to unwanted in measuring on the plane of delineation;
Lens section corresponding region internal interference stripe information obtains step, wherein see through in the interference fringe image that obtains under light and described described the 1st state that does not need light to produce together at described lens section, covers described do not need interference fringe regional and obtain with the corresponding lens section of described lens section corresponding region in interference fringe information;
Lens section center particular step, wherein based on the interference fringe information in the described lens section corresponding region, the center to described lens section on the described plane of delineation is carried out specific;
Determined zone decision is set step with mask, wherein with the determined zone decision that makes in advance with the center of mask with the consistent mode in center of specific described lens section, sets this determined regional mask that determines to use.
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