CN110568581A - High-precision electric reflector frame - Google Patents

High-precision electric reflector frame Download PDF

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Publication number
CN110568581A
CN110568581A CN201910864978.5A CN201910864978A CN110568581A CN 110568581 A CN110568581 A CN 110568581A CN 201910864978 A CN201910864978 A CN 201910864978A CN 110568581 A CN110568581 A CN 110568581A
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CN
China
Prior art keywords
hinge
ball head
seat
frame
reflector
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Granted
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CN201910864978.5A
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Chinese (zh)
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CN110568581B (en
Inventor
张宏志
卢礼华
漆力子
金鸿宇
赵航
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Harbin Institute of Technology
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Harbin Institute of Technology
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Priority to CN201910864978.5A priority Critical patent/CN110568581B/en
Publication of CN110568581A publication Critical patent/CN110568581A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

Abstract

A high-precision electric reflector frame relates to an electric reflector frame. The existing reflector bracket driving chain is long, the pitching action and the yawing action of the reflector bracket are driven by a separate driving mechanism, the number of supports is large, the precision is limited, and the reflector bracket is large in geometric dimension and difficult to be used in places with limited space. The reflecting mirror frame comprises a reflecting mirror frame, a mirror frame back plate, a mirror frame platform, a first ball joint hinge pair, a second ball joint hinge pair and two driving modules, wherein the plate surface of the reflecting mirror frame and the plate surface of the mirror frame back plate are vertically arranged side by side and are connected through the first ball joint hinge pair and the second ball joint hinge pair which are arranged oppositely up and down, the mirror frame platform is vertically arranged at the lower end of the plate surface at the outer side of the mirror frame back plate, the two driving modules are arranged on two sides of the lower plate surface of the mirror frame platform side by side, and the two driving modules respectively vertically penetrate through first round holes in the mirror frame back plate and are connected. The invention is mainly used for adjusting the two-dimensional orthogonal angle of the reflector.

Description

High-precision electric reflector frame
Technical Field
The invention relates to an electric reflector frame, in particular to a high-precision electric reflector frame.
Background
In a high-power laser transmission scene, the main design function of a large-aperture reflector (the aperture is about 500mm) is to complete the collimation guide and the near-field adjustment of a light beam of laser, the large-aperture reflector is a final adjustment original before the light beam enters a terminal component, the surface accuracy and the stability of the large-aperture reflector directly influence the final targeting quality, and the angle error of 1 mu rad of the reflector can cause the influence of more than 10 mu m on the final targeting accuracy; therefore, it is necessary to develop a motor-driven mirror holder with high mounting precision and adjustment precision and good stability, which is helpful to improve the precision and reliability of laser targeting.
The existing reflecting mirror bracket in service is designed and developed by Harbin industry university, and the publication number is as follows: CN103018879B, this patent is a shaft type mirror holder, utilizes two-dimensional orthogonal rotation to realize angle adjustment, and comprises six parts of an inner frame, a transition frame, an outer frame, a bracket, a locking device and a micro-driving device; the reflector is fixed on the transition frame in a peripheral supporting mode, the transition frame is installed on the inner frame through the quick positioning device, the inner frame rotates around the outer frame, the outer frame rotates around the support, two-dimensional orthogonal adjustment of the reflector is achieved, the reflector frame has the problems of long transmission chain and large supporting number, the accuracy is limited, the adjustment range is +/-15 mrad, the single-step adjustment accuracy is 1.5 mu rad, the geometric size of the reflector frame is large, and the reflector frame is difficult to use in a place with limited space.
disclosure of Invention
The technical problems to be solved by the invention are as follows: the existing reflector bracket driving chain is long, has an orthogonal structure, has large transmission error, and the pitching motion and the yawing motion of the reflector bracket are driven by a single driving mechanism, so that the supporting number is large, the precision is limited, the adjusting range is +/-15 mrad, the single-step adjusting precision is 1.5 mrad, and the reflector bracket has large geometric dimension and is difficult to be used in places with limited space.
The technical scheme adopted by the invention for solving the technical problems is as follows:
A high-precision electric reflector bracket comprises a reflector bracket 1, a bracket back plate 2, a bracket platform 5, a first ball joint hinge pair 4, a second ball joint hinge pair 6 and two driving modules 3, wherein the plate surface of the reflector bracket 1 and the plate surface of the bracket back plate 2 are vertically arranged side by side and oppositely, the two are connected through a first ball joint hinge pair 4 and a second ball joint hinge pair 6 which are arranged oppositely up and down, the first ball joint hinge pair 4 is positioned in the middle position of the upper end of the reflector bracket 1 or the mirror bracket back plate 2, the second ball joint hinge pair 6 is positioned in the middle position of the lower end of the reflector bracket 1 or the mirror bracket back plate 2, the mirror bracket platform 5 is vertically arranged at the lower end of the outer side plate surface of the mirror bracket back plate 2, the two driving modules 3 are arranged at two sides of the lower plate surface of the mirror bracket platform 5 side by side, and the two driving modules 3 respectively vertically penetrate through the first round holes on the mirror bracket back plate 2 to be connected with the inner side plate surface of the reflector bracket 1.
Further, the electronic speculum frame of high accuracy still include that two length meters 7 and two length meters keep off seat 8, two length meters keep off the lower extreme of seat 8 dress at the inboard face of speculum frame 1 admittedly, two length meters 7 set up respectively in the downside of two drive module 3, and every length meter 7 passes the second round hole on mirror frame backplate 2 respectively and keeps off seat 8 continuous with the length meter.
Furthermore, each driving module 3 comprises a servo motor 3-1, a speed reducer 3-2, a coupling 3-4, a bearing seat 3-5, a lead screw 3-6, a lead screw nut 3-7, a guide rail 3-3, a guide rail slide block 3-8, a flexible hinge 3-10 and a flexible hinge connecting seat 3-11, an output shaft of the servo motor 3-1 is connected to the speed reducer 3-2, an output shaft of the speed reducer 3-2 is connected with one end of the lead screw 3-6 through the coupling 3-4, the lead screw 3-6 is externally sleeved with a bearing and the bearing seat 3-5, the lead screw nut 3-7 is screwed on the lead screw 3-6, the lead screw nut 3-7 is fixedly connected with one end of the guide rail slide block 3-8, the other end of the guide rail slide block 3-8 is fixedly connected with one end of, the flexible hinge connecting seats 3-11 are fixedly arranged on the inner side plate surface of the reflector bracket 1, the other ends of the flexible hinges 3-10 are fixedly connected with the flexible hinge connecting seats 3-11, the guide rails 3-3 are fixedly connected on the lower plate surface of the bracket platform 5, and the guide rail sliding blocks 3-8 are in sliding connection with the guide rails 3-3.
furthermore, the first ball joint hinge pair 4 comprises a first ball joint hinge seat 4-1, a first ball joint hinge 4-2 and a first ball joint hinge groove 4-3, the first ball joint hinge seat 4-1 is fixedly arranged on the inner side plate surface of the reflector frame 1, the first ball joint hinge groove 4-3 is fixedly arranged on the inner side plate surface of the reflector frame back plate 2, one end of the first ball joint hinge 4-2 is fixedly connected with the first ball joint hinge seat 4-1, and the other end of the first ball joint hinge 4-2 is rotatably connected in the first ball joint hinge groove 4-3.
Furthermore, the second ball joint hinge pair 6 comprises a second ball joint hinge seat 6-1, a second ball joint hinge 6-2 and a second ball joint hinge groove 6-3, the second ball joint hinge seat 6-1 is fixedly arranged on the inner side plate surface of the reflector bracket 1, the second ball joint hinge groove 6-3 is fixedly arranged on the inner side plate surface of the reflector bracket back plate 2, one end of the second ball joint hinge 6-2 is fixedly connected with the second ball joint hinge seat 6-1, and the other end of the second ball joint hinge 6-2 is rotatably connected in the second ball joint hinge groove 6-3;
The second ball head hinge groove 6-3 is provided with a through hole 6-3-1 along the axis direction of the groove, and the inner diameter of the groove along the vertical direction of the groove is larger than the outer diameter of the second ball head hinge 6-2.
Furthermore, the flexible hinge 3-10 is a polygonal column, two ends of the column are respectively provided with a connecting part, a through hole 3-10-2 is formed along the axial direction of the column, and a plurality of rows of slit groups 3-10-1 penetrating through the through holes are uniformly formed on the side wall of the column along the axial direction.
Compared with the prior art, the invention has the following beneficial effects:
1. The two driving chains in the invention are in a parallel structure, and the driving chains are short and high in precision;
2. The reflector bracket performs pitching motion and yawing motion respectively through synchronous motion of the two driving modules, when the two driving modules synchronously rotate in the same direction, the reflector bracket performs pitching motion, when the two driving modules synchronously rotate in opposite directions, the reflector bracket performs yawing motion, the pitching angle and the yawing angle of the reflector are measured through a length meter and a control system, the stepping resolution is about 0.3 micro-radian, the precision is higher, and the reflector is directly arranged on the reflector bracket, so that the overall occupied geometric dimension is smaller, and the reflector bracket is suitable for more spaces.
drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a top view of the present invention;
FIG. 3 is a schematic structural diagram of a driving module;
FIG. 4 is a cross-sectional view of the flexible hinge and length gauge;
FIG. 5 is a side view of the present invention;
3 FIG. 3 6 3 is 3 a 3 longitudinal 3 sectional 3 view 3 taken 3 along 3 line 3 A 3- 3 A 3 in 3 FIG. 3 1 3; 3
FIG. 7 is an enlarged view of a portion of FIG. 6 at I;
FIG. 8 is a schematic structural view of a flexible hinge;
FIG. 9 is a half sectional view of the flexible hinge;
figure 10 is a schematic view of the mirror mounted on a mirror mount.
Detailed Description
the technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings:
The first embodiment is as follows: as shown in fig. 1 and 2, in this embodiment, a high-precision electric mirror bracket includes a mirror bracket 1, a bracket back plate 2, a bracket platform 5, a first ball joint hinge pair 4, a second ball joint hinge pair 6 and two driving modules 3, a plate surface of the mirror bracket 1 and a plate surface of the bracket back plate 2 are vertically arranged side by side and are opposite to each other, the side plate surface of the mirror bracket 1 opposite to the bracket back plate 2 is set as an inner side surface, the side plate surface of the bracket back plate 2 opposite to the mirror bracket 1 is set as an inner side surface, the mirror bracket 1 and the bracket back plate 2 are connected through the first ball joint hinge pair 4 and the second ball joint hinge pair 6 which are arranged oppositely from top to bottom, the first ball joint hinge pair 4 is located at a middle position of an upper end of the mirror bracket 1 or the bracket back plate 2, the second ball joint pair 6 is located at a middle position of a lower end of the mirror bracket 1 or the bracket, two drive modules 3 set up the both sides of face under mirror holder platform 5 side by side, and two drive modules 3 pass first round hole on mirror holder backplate 2 perpendicularly respectively and link to each other with the inboard face of reflector bracket 1.
As shown in fig. 10, the mirror 9 is mounted on the outer plate surface of the mirror holder 1;
As shown in fig. 5, under the combined action of the two driving modules 3 and the first ball-head hinge pair 4 and the second ball-head hinge pair 6, the electronic mirror bracket can rotate in a small angle along a connecting line direction (X-axis direction) of the first ball-head hinge pair 4 and the second ball-head hinge pair 6, as shown in fig. 1, the electronic mirror bracket can swing in a small angle around a horizontal line (Z-axis direction) where the first ball-head hinge pair 4 is located as an axis, so as to adjust a pitching attitude and a yawing attitude of the mirror 9, and the following is specifically implemented:
When the two driving modules synchronously rotate in the same direction, the guide rail sliding blocks in the two driving modules synchronously move forwards, and the reflector bracket 1 can swing in a small angle by taking the horizontal line (Z-axis direction) where the first ball head hinge pair 4 is located as an axis through the deformation of the flexible hinge; when the two driving modules synchronously rotate in different directions, the guide rail sliding blocks in the two driving modules move in different directions, and the reflector bracket 1 can rotate in a small angle by taking the direction (X-axis direction) of the connecting line of the first ball joint hinge pair 4 and the second ball joint hinge pair 6 as an axis through the deformation of the flexible hinge.
the reflector frame respectively realizes pitching motion and deflection motion under the action of synchronous motion of the two driving modules, so that the precision of the reflector frame is higher, the pitching motion of the original reflector frame is realized by driving one driving module, the deflection motion is realized by driving the other driving module, and the precision cannot meet the requirement.
The second embodiment is as follows: as shown in fig. 1, 4 and 6, in this embodiment, the high-precision electric mirror bracket further includes two length meters 7 and two length meter blocking seats 8, the two length meter blocking seats 8 are fixedly mounted at the lower end of the inner side plate surface of the mirror bracket 1, the two length meters 7 are respectively disposed at the lower sides of the two driving modules 3, and each length meter 7 respectively passes through a second circular hole on the back plate 2 of the mirror bracket to be connected with the length meter blocking seat 8, wherein a probe of the length meter is connected with the length meter blocking seats, when the two driving modules drive the mirror bracket to generate pitching or yawing motion, the two length meters can measure axial displacement at the connection position of the mirror bracket and the flexible hinge, the control system obtains a tilt angle of the mirror bracket by the distance ratio between the length meter and the rotation axis (X axis or Z axis), further obtains a posture of the mirror bracket, and then performs closed-loop control on the driving modules, the invention enables the measurement of the pitching angle and the deflection angle of the reflector bracket to be more accurate by using the driving module and the length meter, and the stepping resolution is about 0.3 micro radian.
other components and connection modes are the same as those of the first embodiment.
The third concrete implementation mode: as shown in fig. 1, 3 and 4, in this embodiment, each driving module 3 includes a servo motor 3-1, a reducer 3-2, a coupler 3-4, a bearing seat 3-5, a lead screw 3-6, a lead screw nut 3-7, a guide rail 3-3, a guide rail slider 3-8, a flexible hinge 3-10 and a flexible hinge connecting seat 3-11, an output shaft of the servo motor 3-1 is connected to the reducer 3-2, an output shaft of the reducer 3-2 is connected to one end of the lead screw 3-6 through the coupler 3-4, the lead screw 3-6 is externally sleeved with a bearing and the bearing seat 3-5, two ball bearings arranged side by side are arranged in the bearing seat 3-5 to support the whole gravity of the lead screw 3-6, the lead screw nut 3-7 is screwed on the lead screw 3-6, and the lead screw nut 3-7 is fixedly connected with one end of the guide rail sliding block 3-8, the other end of the guide rail sliding block 3-8 is fixedly connected with one end of the flexible hinge 3-10, the flexible hinge connecting seat 3-11 is fixedly arranged on the inner side plate surface of the reflector bracket 1, the other end of the flexible hinge 3-10 is fixedly connected with the flexible hinge connecting seat 3-11, the guide rail 3-3 is fixedly connected on the lower plate surface of the reflector bracket platform 5, the guide rail sliding block 3-8 is in sliding connection with the guide rail 3-3, a through hole is arranged in the guide rail sliding block 3-8 along the axial direction, and the other end of the lead screw 3-6 is positioned in the through.
each driving module 3 further comprises a photoelectric switch baffle and two photoelectric switches 3-9, the photoelectric switch baffle is arranged on a guide rail sliding block 3-8, the two photoelectric switches 3-9 are respectively arranged at two ends of the guide rail, a rotation angle output by the servo motor 3-1 is converted into translational displacement of the guide rail sliding block through transmission of the speed reducer 3-2, the coupler 3-4, the lead screw 3-6 and the lead screw nut 3-7, the precision of the translational displacement can reach within 20nm, and the limit movement position of the guide rail sliding block is limited by the photoelectric switches 3-9 and the photoelectric switch baffle.
The servo motor is used for realizing accurate torque output, the invention realizes the accurate locking of the position of the sliding block by using the servo motor, prevents the displacement drift phenomenon under the factors of gravity, inertia and the like, and ensures that the motion control of the mirror bracket achieves higher accuracy.
other components and connection modes are the same as those of the first embodiment.
The fourth concrete implementation mode: as shown in fig. 6, in this embodiment, the first ball joint hinge pair 4 includes a first ball joint hinge seat 4-1, a first ball joint hinge 4-2, and a first ball joint hinge groove 4-3, the first ball joint hinge seat 4-1 is fixedly mounted on the inner side plate surface of the mirror bracket 1, the first ball joint hinge groove 4-3 is fixedly mounted on the inner side plate surface of the mirror bracket back plate 2, one end of the first ball joint hinge 4-2 is fixedly connected with the first ball joint hinge seat 4-1, and the other end of the first ball joint hinge 4-2 is rotatably connected in the first ball joint hinge groove 4-3.
the first ball joint hinge groove 4-3 is a conventional groove, and the first ball joint hinge pair 4 has three rotational degrees of freedom.
Other components and connection modes are the same as those of the first embodiment.
the fifth concrete implementation mode: as shown in fig. 6 and 7, in this embodiment, the second ball joint hinge pair 6 includes a second ball joint hinge seat 6-1, a second ball joint hinge 6-2 and a second ball joint hinge groove 6-3, the second ball joint hinge seat 6-1 is fixedly mounted on the inner side plate surface of the mirror bracket 1, the second ball joint hinge groove 6-3 is fixedly mounted on the inner side plate surface of the mirror bracket back plate 2, one end of the second ball joint hinge 6-2 is fixedly connected with the second ball joint hinge seat 6-1, and the other end of the second ball joint hinge 6-2 is rotatably connected in the second ball joint hinge groove 6-3;
the through hole 6-3-1 is formed in the second ball joint hinge groove 6-3 along the axis direction of the groove, the inner diameter of the groove in the vertical direction of the groove is larger than the outer diameter of the second ball joint hinge 6-2, the up-down moving range of the second ball joint hinge 6-2 is smaller, the second ball joint hinge pair 6 has two translational degrees of freedom, namely one translational degree of freedom is formed in the axis direction of the second ball joint hinge groove 6-3, one translational degree of freedom is formed in the vertical direction of the second ball joint hinge groove 6-3, meanwhile, the second ball joint hinge pair 6 also has three rotational degrees of freedom, and the pitching posture of the reflector bracket is realized through the two translational degrees of freedom and the three rotational degrees of freedom of the second ball joint hinge pair 6.
Other components and connection modes are the same as those of the first embodiment.
The sixth specific implementation mode: as shown in fig. 8 and 9, in the present embodiment, the flexible hinge 3-10 is a polygonal prism, two ends of the cylinder are respectively provided with a connecting portion, one of the connecting portions is used for connecting the guide rail slider, the other connecting portion is used for connecting the flexible hinge connecting seat, a through hole 3-10-2 is formed along the axial direction of the cylinder, and a plurality of rows of slit groups 3-10-1 penetrating through the through hole are uniformly formed on the sidewall of the cylinder along the axial direction.
Wherein each row of slit group comprises two slits which are oppositely arranged, the head end and the tail end of each slit are respectively arranged on the two opposite side walls of the flexible hinges 3-10, and a connecting part is reserved between the head end and the tail end of each two oppositely arranged slits, when the servo motor drives the guide rail slide block to move forwards linearly, the reflector bracket performs pitching motion along the Z axis (the tail end of the reflector bracket generates arc motion), the flexible hinge connected with the reflector bracket can be realized only by bending, the bending angle is about plus or minus 0.86 degrees, the angle range is very small, the deformation of the flexible hinge is realized by the extrusion and expansion of a plurality of rows of slits (the flexible hinge has the freedom degrees in three directions), the device realizes the deformation by utilizing the bending freedom degrees in two directions, and the flexible hinge has higher axial rigidity, and further, the linear motion of the driving module is converted into the pitching motion and the yawing motion of the reflector bracket.
Other components and connection modes are the same as those of any one of the first to the fifth embodiments.

Claims (6)

1. the utility model provides an electronic speculum frame of high accuracy which characterized in that: it includes speculum frame (1), mirror holder backplate (2), mirror holder platform (5), first bulb hinge is vice (4), vice (6) of second bulb hinge and two drive module (3), the face of speculum frame (1) and the face of mirror holder backplate (2) are vertical to be set up side by side relatively, and connect through vice (4) of first bulb hinge and the vice (6) of second bulb hinge that relative set up from top to bottom between the two, first bulb hinge is vice (4) and is in speculum frame (1) or mirror holder backplate (2) upper end intermediate position, second bulb hinge is vice (6) and is in speculum frame (1) or mirror holder backplate (2) lower extreme intermediate position, the lower extreme at mirror holder backplate (2) outside face is installed perpendicularly to mirror holder platform (5), two drive module (3) set up the both sides of face under mirror holder platform (5) side by side, and two drive module (3) pass the interior of first bulb hinge on mirror holder backplate (2) and speculum frame round hole (1) respectively perpendicularly The side plate surfaces are connected.
2. a high precision motorized mirror mount according to claim 1, wherein: a high accuracy electronic speculum frame still include two length meters (7) and two length meters keep off seat (8), two length meters keep off the lower extreme of seat (8) dress at the inboard face of speculum frame (1) admittedly, two length meters (7) set up respectively in the downside side of two drive module (3), and every length meter (7) pass the second round hole on mirror frame backplate (2) respectively and keep off seat (8) and link to each other with the length meter.
3. A high precision motorized mirror mount according to claim 1, wherein: each driving module (3) comprises a servo motor (3-1), a speed reducer (3-2), a coupler (3-4), a bearing seat (3-5), a lead screw (3-6), a lead screw nut (3-7), a guide rail (3-3), a guide rail sliding block (3-8), a flexible hinge (3-10) and a flexible hinge connecting seat (3-11), an output shaft of the servo motor (3-1) is connected to the speed reducer (3-2), an output shaft of the speed reducer (3-2) is connected with one end of the lead screw (3-6) through the coupler (3-4), a bearing and the bearing seat (3-5) are sleeved outside the lead screw (3-6), the lead screw nut (3-7) is screwed on the lead screw (3-6), and the lead screw nut (3-7) is fixedly connected with one end of the guide rail sliding block (3-8), the other end of the guide rail sliding block (3-8) is fixedly connected with one end of a flexible hinge (3-10), a flexible hinge connecting seat (3-11) is fixedly arranged on the inner side plate surface of the reflector frame (1), the other end of the flexible hinge (3-10) is fixedly connected with the flexible hinge connecting seat (3-11), the guide rail (3-3) is fixedly connected on the lower plate surface of the reflector frame platform (5), and the guide rail sliding block (3-8) is in sliding connection with the guide rail (3-3).
4. A high precision motorized mirror mount according to claim 1, wherein: the first ball head hinge pair (4) comprises a first ball head hinge seat (4-1), a first ball head hinge (4-2) and a first ball head hinge groove (4-3), the first ball head hinge seat (4-1) is fixedly arranged on the inner side plate surface of the reflector frame (1), the first ball head hinge groove (4-3) is fixedly arranged on the inner side plate surface of the reflector frame back plate (2), one end of the first ball head hinge (4-2) is fixedly connected with the first ball head hinge seat (4-1), and the other end of the first ball head hinge (4-2) is rotatably connected in the first ball head hinge groove (4-3).
5. a high precision motorized mirror mount according to claim 1, wherein: the second ball head hinge pair (6) comprises a second ball head hinge seat (6-1), a second ball head hinge (6-2) and a second ball head hinge groove (6-3), the second ball head hinge seat (6-1) is fixedly arranged on the inner side plate surface of the reflector frame (1), the second ball head hinge groove (6-3) is fixedly arranged on the inner side plate surface of the reflector frame back plate (2), one end of the second ball head hinge (6-2) is fixedly connected with the second ball head hinge seat (6-1), and the other end of the second ball head hinge (6-2) is rotatably connected in the second ball head hinge groove (6-3);
The second ball head hinge groove (6-3) is provided with a through hole (6-3-1) along the axis direction of the groove, and the inner diameter of the groove along the vertical direction of the groove is larger than the outer diameter of the second ball head hinge (6-2).
6. A high precision motorized mirror stand according to any one of claims 1 to 5, wherein: the flexible hinge (3-10) is a polygonal column, two ends of the column are respectively provided with a connecting part, a through hole (3-10-2) is formed along the axial direction of the column, and a plurality of rows of slit groups (3-10-1) penetrating through the through holes are uniformly formed on the side wall of the column along the axial direction.
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CN114153127B (en) * 2021-12-16 2022-10-04 哈尔滨工业大学 Micro mirror array driving device based on multi-degree-of-freedom flexible hinge

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