KR20040081946A - Apparatus for measuring roughness and flatness - Google Patents

Abstract

PURPOSE: An apparatus for measuring roughness and flatness is provided to perform linear driving and rotational driving through a non-contact manner by using a laser sensor, and to control a clamp supporter by using an upper and lower adjustment nut. CONSTITUTION: An apparatus for measuring roughness and flatness includes a base(1) having a table(1) performing a linear movement and a clamp supporter(8), which is vertically adjusted along an upper and lower guide(4) provided on an upper and lower guide base(10). A ball screw(16) is driven in forward and backward directions by means of a motor(12). The motor(12) is mounted on the base(1) by means of a driving motor bracket(13). The ball screw(16) is rotatively supported by a supporting shaft supporter unit(15) and a fixing shaft supporter unit(17).

Description

Apparatus for measuring roughness and flatness}

The present invention relates to an apparatus for simultaneously measuring flatness and surface roughness for acquiring shape data of a workpiece, and in particular, to an apparatus for simultaneously measuring flatness and surface roughness, which can be measured by a non-contact method in acquiring shape information of a micro-object. To do it.

In general, machining evaluation is performed after machining, and the importance of data on surface shape information as well as dimensional accuracy is very important.

In particular, the surface roughness, straightness, roundness, flatness, etc. of the workpiece is used as an absolute index for determining the quality of the workpiece in the manufacturing industry.

In addition, these evaluation indicators are closely related to the dimensional accuracy, and research on the measurement method in the evaluation methodology is actively conducted in industry, academia and research.

First of all, the specific device of the related art is going to change from the granular measurement system to the current integrated measurement system.

Typically, in a measurement system that requires rotational driving, such as roundness, flatness, coaxiality, and cylindricalness, all measurements are performed in one device. In addition, the surface roughness, shape, etc. required for linear driving is integrated and the measurement is performed in one measuring device.

However, in a measuring device using such a contact stylus, it is difficult to measure in a device such as a linear drive and a rotary drive.

Figure 5 shows an example of a device that can measure the conventional roundness, flatness, coaxiality, cylindrical degree, etc., Figure 6 shows an example of a conventional surface roughness measuring apparatus.

In FIG. 6, the measurement object is placed on the table 201, and the stylus 202 approaches the measurement object by the upper and lower guides 203 to obtain surface roughness or shape information of the workpiece by linear driving of the stylus 202. In FIG. 5, the measurement object is placed on the rotation table 101, and the stylus 102 approaches the measurement object by the upper and lower guides 103, and the measurement is performed by rotating the rotation table 101.

5 and 6 mentioned above is a contact method using a stylus, and several conditions are required for the measurement.

First, when the object to be measured is a soft material, the object is damaged by the stylus and measurement errors are also generated.

Second, in FIG. 5, the object to be measured on the rotary table 101 must have a certain size to measure the object. In the case of a minute object, the rotational drive is too fast to measure by the rotary table 101, and the contact of the stylus 102 is also difficult.

Third, the normal contact measurement method takes longer than the non-contact method.

For this reason, there is a growing interest in contactless methods. The surface roughness measurement by the non-contact method has been used a variety of methods, such as optical cutting, optical interference, and high magnification lens in the vision camera.

However, there is no case to use for the measurement of roundness, flatness, etc. by rotational driving.

In the case of using a laser, the measuring range is constant, so the distance between the sensor and the object to be measured must be maintained within the measuring range.

Moreover, if the measuring range is very small (for example, the measuring range varies from 0.02 to 0.8) depending on the sensor, the need for vertical adjustment is more urgent.

Accordingly, the present invention has been made in view of this point, and performs a linear drive and a rotary drive by a non-contact method using a laser sensor, the flat support can be adjusted by the vertical support bolt up and down by the pitch of the clamp supporter by the vertical guide The present invention has been completed with the technical object of the present invention to provide a device for measuring the surface roughness and simultaneously.

1 is a perspective view of a combined state of the device according to the invention

Figure 2 is a perspective view of the upper and lower control means according to the present invention

Figure 3 is a perspective view of the linear drive means according to the present invention

Figure 4 is a cross-sectional view of the coupling state according to the present invention

Figure 5 is a front view showing a conventional roundness measuring device

Figure 6 is a front view showing a conventional surface roughness measuring device

■ Explanation of symbols used in main part of drawing ■

1: Base 2: Straight Guide

3: rail 4: up and down guide

5: upper housing 6: lower housing

7: Vertical adjustment bolt 8: Clamp supporter

8a: coupling groove 9: up and down adjustment nut

10: upper and lower guide base 11: table

12: Motor 13: Drive Motor Bracket

14: Coupling 15: Support Shaft Supporter Unit

16: Ball screw 17: Fixed shaft supporter unit

18: Table supporter 19: Ball screw

Hereinafter, the configuration of the present invention with reference to the accompanying drawings in detail as follows.

First, Figure 1 is a perspective view showing a combined state of the flatness and surface roughness measurement apparatus according to the present invention, Figure 2 is a perspective view of the vertical adjustment means according to the present invention, Figure 3 is a linear drive according to the present invention Figure 4 shows a perspective view of the excerpt showing the means of the cross-sectional view of the combined state of the present invention.

The present invention can be divided into a body for the straight line and rotational driving as a whole and a clamp portion for fixing the sensor and the vertical adjustment.

The base 1 constituting the flatness and surface roughness simultaneously measuring device is composed of one body as a symmetrical structure for stable measurement, and a linear guide 2 for linear motion is formed on both sides.

At the center of the base 1, a ball skew 16 for converting the rotational power of the motor 12 installed by the drive motor bracket 13 into linear motion is supported at both ends of the support shaft supporter unit 15 and the fixed shaft supporter. The table supporter 18, which is rotatably supported by the unit 17 and connected to the table 11 in the middle of the ball screw 16, is screwed with the ball screw 16 by the ball screw 19 to be provided with the ball screw. The table 11 allows the left and right adjustments to be made with respect to the rotational motion of (16).

The rail 3, which is guided on the straight guides 2 formed on both sides of the base 1 and performs the sliding movement, is fixed to the lower portion of the table 11 to serve as a stand during the sliding movement.

The upper and lower guide bases 10 are stably fixed to both sides of the base 1 by bolts, and the upper and lower guides 4 are fixed to the upper and lower guide bases 10 to clamp the sensor (not shown). ) And the upper housing (5), and the lower housing (6).

The upper housing 5 and the lower housing 6 slide upward and downward along the upper and lower guides 4, and the upper and lower adjustment bolts 7 connect the upper housing 5 and the lower housing 6 and adjust the upper and lower sides. A nut 9 is attached to the rear side of the lower housing 6.

The upper and lower adjustment nuts (9) are screwed with the upper and lower adjustment bolts (7) to move the upper and lower housings (5) and the lower housings (6) by moving according to the pitch of the upper and lower adjustment bolts (7) by the movement of the upper and lower adjustment nuts (9). Support fine up and down control.

The upper housing 5 and the lower housing 6 may be fixed to the upper and lower guides 4 with bolts (not shown), and may be fixed at any position as necessary.

The clamp supporter 8 is fixed to both sides as bolts on both sides of the lower housing 6 so that the clamp supporter 8 moves together with the vertical movement of the lower housing 6.

The front side of the clamp supporter 8 has a coupling groove 8a formed in a U shape when viewed in a plan view so that the sensor can be settled and the sensor is fixed as a separate bolt on the side.

The lower end of the coupling groove 8a of the clamp supporter 8 is bored leaving only a part which can support both parts of the sensor, so that the laser of the sensor is emitted and the reflected laser signal can be received by the receiver.

As described in detail above, the present invention may be a surface roughness (or shape information) and flatness (or roundness, cylinder degree, coaxiality, etc.) having different measurement properties in a non-contact type measuring method, especially when using a laser sensor. It is a device capable of measuring, and fine adjustment is possible by the vertical adjusting nut (9) along the pitch of the vertical adjusting bolt (7) in adjusting the measuring range which is one of the characteristics of the laser. As a structure, it is possible to minimize mechanical error, temperature error, and inertia force.

That is, the present invention is a measurement structure using a non-contact sensor, so that the linear drive and the rotation drive is implemented in one device, the measurement time is reduced, and various measurement factors are integrated.

Claims (1)

Simultaneous measurement of flatness and surface roughness with a base 1 provided with a table 11 capable of linear driving, and a clamp supporter 8 for sensor coupling which can be adjusted up and down in the upper and lower guides 4 on the upper and lower guide bases 10. Device for; The base 1 is connected to the motor 12 installed by the driving motor bracket 13 to the support shaft support unit 15 and the fixed shaft supporter unit 17 on both sides of the ball screw 16 capable of reverse rotation. Fixed by means of rotatable, The ball screw 16 is linearly driven with the table supporter 18 supporting the table 11 under the table 11 guided by the rail 3 along the straight guide 2 formed on the base 1. Combines the ball screw (19) to perform, The clamp supporter (8) is coupled to one end on the lower housing (6) slidably coupled on the upper and lower guides (4), the lower housing (6) is coupled to the upper and lower adjustment nuts (9) and slides thereon. Apparatus for measuring flatness and surface roughness simultaneously, characterized in that the screw is coupled to the upper and lower adjustment bolts (7) coupled to the upper housing (5) to enable fine adjustment.