CN216283315U - High-precision two-dimensional misalignment angle calibration device - Google Patents
High-precision two-dimensional misalignment angle calibration device Download PDFInfo
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- CN216283315U CN216283315U CN202123065671.0U CN202123065671U CN216283315U CN 216283315 U CN216283315 U CN 216283315U CN 202123065671 U CN202123065671 U CN 202123065671U CN 216283315 U CN216283315 U CN 216283315U
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Abstract
The utility model discloses a high-precision two-dimensional misalignment angle calibration device, which comprises: the top of the horizontal rotary table is fixedly connected with a first annular motor, and the output end of the first annular motor is fixedly connected with a first reference plate; one side of the vertical rotary table, which is close to the first reference plate, is fixedly connected with a second annular motor, and the output end of the second annular motor is fixedly connected with a second reference plate; the bottom of the right-angle support is fixedly connected with two ends of the horizontal rotary table respectively, one end of the right-angle support is fixedly connected with a right-angle fixing plate, and one side of the right-angle fixing plate is fixedly connected with the back of the vertical rotary table. The utility model adopts two sets of servo annular motors with vertically arranged shafts, the grating ruler is arranged on the outer side wall of the turntable, the grating ruler adopts a grating distance of 20 microns, each grid is subdivided into 256 parts by adopting a subdivision module, and when the diameter of the turntable reaches 200mm, the positioning precision can reach +/-0.04 arc second.
Description
Technical Field
The utility model relates to the technical field of optical element installation, in particular to a high-precision two-dimensional misalignment angle calibration device.
Background
According to the principle of auto-collimation angle measurement, the misalignment angle can be calculated through the focal length of the system and the offset of the target point relative to the zero position. However, since the theoretical value of the focal length is different from the actual value after assembly, and it is difficult to measure the focal length after assembly, the misalignment angle needs to be calibrated. At present, the method for realizing the calibration of the two-dimensional misalignment angle at home and abroad mainly comprises a block calibration method, a reference calibration method, a laser interferometer calibration method, a space angle autocollimator calibration method and the like. The block calibration method is used for calibrating an azimuth angle and a pitch angle measured by a high-precision two-dimensional turntable by partitioning an imaging area of an image sensor, but the high-precision two-dimensional turntable is high in cost and difficult to erect; the calibration method of the spatial angle autocollimator is characterized in that two reference autocollimators are respectively used as horizontal reference and vertical reference, the autocollimator to be calibrated and the two reference autocollimators are orthogonal pairwise, a two-axis system is used for operating a reflector, and the offset angle and the inclination angle of a transmitting mirror are observed from the autocollimator to be calibrated, so that two-dimensional calibration is performed.
Two-axis turntable devices are used in the two calibration methods. However, the resolution of the high-precision turntable on the market, such as an Aerotech high-precision turntable, is 0.036-0.18 arc second, and the two-way repeatability is as follows: <1 arc second, positioning accuracy is ± 2 arc second, the price of such a turntable is very high, and the accuracy provided is not sufficient.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problems that in the prior art, a rotary table is very high in price and insufficient in precision, and provides a high-precision two-dimensional misalignment angle calibration device.
In order to achieve the purpose, the utility model adopts the following technical scheme:
high accuracy two-dimensional misalignment angle calibration device includes:
the top of the horizontal rotary table is fixedly connected with a first annular motor, and the output end of the first annular motor is fixedly connected with a first reference plate;
one side of the vertical rotary table, which is close to the first reference plate, is fixedly connected with a second annular motor, and the output end of the second annular motor is fixedly connected with a second reference plate;
the bottom of the right-angle support is fixedly connected with two ends of the horizontal rotary table respectively, one end of the right-angle support is fixedly connected with a right-angle fixing plate, and one side of the right-angle fixing plate is fixedly connected with the back of the vertical rotary table;
and the reflector is fixedly connected with the second reference plate.
Preferably, one end of the right-angle support, which is far away from the vertical rotary table, is fixedly connected with the balancing weight.
Preferably, the top of the horizontal turntable is fixedly connected with a first annular grating ruler corresponding to the first reference plate, and the top of the horizontal turntable is fixedly connected with a first reading head corresponding to the first annular grating ruler.
Preferably, one side of the vertical turntable is fixedly connected with a second annular grating scale corresponding to the second reference plate, and the top of the vertical turntable is fixedly connected with a second reading head corresponding to the second annular grating scale.
Preferably, a plurality of fixing ports are fixedly connected to the edges of the vertical turntable and the horizontal turntable.
Preferably, the connecting plates are fixedly sleeved at two ends of the balancing weight, and a plurality of locking ports are formed in the connecting plates.
Has the advantages that:
1. the utility model adopts two sets of servo annular motors with vertically arranged shafts, a grating ruler is arranged on the outer side wall of a turntable, the grating ruler adopts a grating distance of 20 microns, each grid is subdivided into 256 parts by adopting a subdivision module, and when the diameter of the turntable reaches 200mm, the positioning precision can reach +/-0.04 arc second;
2. the utility model controls the change of the azimuth angle and the pitch angle of the reflector arranged at the center of the vertical standard disk through the motor controller.
Drawings
FIG. 1 is a schematic structural diagram of a high-precision two-dimensional misalignment angle calibration apparatus according to the present invention;
FIG. 2 is a schematic top view of a high-precision two-dimensional misalignment angle calibration apparatus according to the present invention;
FIG. 3 is a schematic side view of a high-precision two-dimensional misalignment angle calibration apparatus according to the present invention;
fig. 4 is a schematic diagram of an internal structure of the high-precision two-dimensional misalignment angle calibration apparatus according to the present invention.
In the figure: the device comprises a horizontal rotary table 1, a vertical rotary table 2, a right-angle support 3, a transmitting mirror 4, a first annular motor 5, a first reference plate 6, a second annular motor 7, a second reference plate 8, a right-angle fixing plate 9, a balancing weight 10, a first annular grating ruler 11, a first reading head 12, a second annular grating ruler 13, a second reading head 14 and a connecting plate 15.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Referring to fig. 1-4, a high-precision two-dimensional misalignment angle calibration apparatus includes:
the device comprises a horizontal rotary table 1, wherein the top of the horizontal rotary table 1 is fixedly connected with a first annular motor 5 and used for driving a first reference plate 6 to rotate, the output end of the first annular motor 5 is fixedly connected with the first reference plate 6, the top of the horizontal rotary table 1 is fixedly connected with a first annular grating ruler 11 corresponding to the first reference plate 6 and used for measuring the rotation angle of the first reference plate 6, and the top of the horizontal rotary table 1 is fixedly connected with a first reading head 12 corresponding to the first annular grating ruler 11 and used for reading the first annular grating ruler 11;
the vertical turntable 2 is fixedly connected with a second annular motor 7 at one side of the vertical turntable 2 close to the first reference plate 6 and used for driving the second reference plate 8 to rotate, the output end of the second annular motor 7 is fixedly connected with the second reference plate 8, one side of the vertical turntable 2 is fixedly connected with a second annular grating ruler 13 corresponding to the second reference plate 8 and used for measuring the rotation angle of the second annular grating ruler 13, the top of the vertical turntable 2 is fixedly connected with a second reading head 14 corresponding to the second annular grating ruler 13 and used for reading the second annular grating ruler 13, and the edges of the vertical turntable 2 and the horizontal turntable 1 are fixedly connected with a plurality of fixing ports, so that the vertical turntable 2 and the horizontal turntable 1 can be conveniently fixed;
the bottom of the right-angle support 3 is respectively and fixedly connected with two ends of the horizontal rotary table 1, one end of the right-angle support 3 is fixedly connected with a right-angle fixing plate 9 for supporting the vertical rotary table 2 and the horizontal rotary table 1, and one side of the right-angle fixing plate 9 is fixedly connected with the back of the vertical rotary table 2;
one end of the right-angle support 3, which is far away from the vertical rotary table 2, is fixedly connected with a balancing weight 10 and is used for balancing gravity center deviation caused by eccentric installation, two ends of the balancing weight 10 are fixedly sleeved with connecting plates 15, and the connecting plates 15 are provided with a plurality of locking ports so as to conveniently fix the connecting plates 15;
and the reflector 4 is fixedly connected with the second reference plate 8 and used for providing a high-precision reflector corner for an external optical system.
In the embodiment, two sets of servo annular motors with vertically arranged shafts are adopted, the grating ruler is arranged on the outer side wall of the turntable, the grating ruler adopts the grating distance of 20 micrometers, each grid is subdivided into 256 parts by adopting the subdivision module, and when the diameter of the turntable reaches 200mm, the positioning precision can reach +/-0.04 arc second.
In this embodiment, the change of the azimuth angle and the pitch angle of the mirror installed at the center of the vertical collimator disc is controlled by the motor controller.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and equivalent alternatives or modifications according to the technical solution of the present invention and the inventive concept thereof should be covered by the scope of the present invention.
Claims (6)
1. High accuracy two-dimensional misalignment angle calibration device, its characterized in that includes:
the top of the horizontal rotary table (1) is fixedly connected with a first annular motor (5), and the output end of the first annular motor (5) is fixedly connected with a first reference plate (6);
the vertical turntable (2), one side of the vertical turntable (2) close to the first reference plate (6) is fixedly connected with a second annular motor (7), and the output end of the second annular motor (7) is fixedly connected with a second reference plate (8);
the bottom of the right-angle support (3) is fixedly connected with two ends of the horizontal rotary table (1) respectively, one end of the right-angle support (3) is fixedly connected with a right-angle fixing plate (9), and one side of the right-angle fixing plate (9) is fixedly connected with the back of the vertical rotary table (2);
the reflecting mirror (4), the reflecting mirror (4) and second benchmark board (8) fixed connection.
2. The high-precision two-dimensional misalignment angle calibration device according to claim 1, wherein: and one end of the right-angle support (3) far away from the vertical rotary table (2) is fixedly connected with a balancing weight (10).
3. The high-precision two-dimensional misalignment angle calibration device according to claim 1, wherein: the top fixedly connected with of horizontal revolving stage (1) corresponds first annular grating chi (11) with first benchmark board (6), the top fixedly connected with of horizontal revolving stage (1) and first reading head (12) that first annular grating chi (11) correspond.
4. The high-precision two-dimensional misalignment angle calibration device according to claim 1, wherein: one side of the vertical rotary table (2) is fixedly connected with a second annular grating ruler (13) corresponding to the second reference plate (8), and the top of the vertical rotary table (2) is fixedly connected with a second reading head (14) corresponding to the second annular grating ruler (13).
5. The high-precision two-dimensional misalignment angle calibration device according to claim 1, wherein: the edges of the vertical rotary table (2) and the horizontal rotary table (1) are fixedly connected with a plurality of fixing ports.
6. The high-precision two-dimensional misalignment angle calibration device according to claim 2, wherein: both ends of balancing weight (10) all are fixed to be cup jointed connecting plate (15), be equipped with a plurality of locking ports on connecting plate (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123065671.0U CN216283315U (en) | 2021-12-08 | 2021-12-08 | High-precision two-dimensional misalignment angle calibration device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123065671.0U CN216283315U (en) | 2021-12-08 | 2021-12-08 | High-precision two-dimensional misalignment angle calibration device |
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| Publication Number | Publication Date |
|---|---|
| CN216283315U true CN216283315U (en) | 2022-04-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123065671.0U Active CN216283315U (en) | 2021-12-08 | 2021-12-08 | High-precision two-dimensional misalignment angle calibration device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216283315U (en) |
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2021
- 2021-12-08 CN CN202123065671.0U patent/CN216283315U/en active Active
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